CN110160200A - A kind of exhaust filtering system and method for processing Quartz stove tube - Google Patents
A kind of exhaust filtering system and method for processing Quartz stove tube Download PDFInfo
- Publication number
- CN110160200A CN110160200A CN201910531309.6A CN201910531309A CN110160200A CN 110160200 A CN110160200 A CN 110160200A CN 201910531309 A CN201910531309 A CN 201910531309A CN 110160200 A CN110160200 A CN 110160200A
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- CN
- China
- Prior art keywords
- cone cell
- air
- suction opening
- air outlet
- stove tube
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
- F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
- F24F7/08—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with separate ducts for supplied and exhausted air with provisions for reversal of the input and output systems
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The present invention relates to a kind of exhaust filtering systems and method for processing Quartz stove tube, including cone cell suction opening, cone cell air outlet, air draft pipe, air supply duct, exhaust fan, pressure fan and spherical air port, one end of air draft pipe connects exhaust fan, the other end connects cone cell suction opening, one end of air supply duct connects pressure fan, the other end connects cone cell air outlet, the diameter of cone cell air outlet is greater than the diameter of cone cell suction opening, the diameter of air supply duct is greater than the diameter of air draft pipe, is equipped between cone cell suction opening and cone cell air outlet multiple for adjusting the spherical air port of wind direction.Heat can be discharged from air draft pipe in time for one aspect of the present invention, guarantee that the heat of working region is discharged in time, on the other hand the thermal energy fired and generated is reduced using the cold airflow of conveying, to achieve the purpose that reduce local working areas temperature, can be 20 DEG C of effective temperature-reducing or more, it keeps the cleanliness of working environment and extends the maintenance cycle of equipment.
Description
Technical field
The present invention relates to exhaust equipment technical field, specially a kind of exhaust filtering system for processing Quartz stove tube.
Background technique
Currently, the quartz components used in integrated circuit manufacture process are in processing, working environment needs certain cleaning
It spends and needs to be fired with hydrogen-oxygen gas flame.Especially when processing Quartz stove tube, need in capstan equipment with two with
On 37 wick oxyhydrogen flame guns processing.A large amount of thermal energy (peripheral temperature is up to 50 DEG C or more) and oxide can be generated at this time
(volatile matter of quartzy sio2), causes the increase of processing staff's labor intensity and the pollution of processing environment, and in use process
In, high efficiency particulate air needs frequent replacement.
Existing exhaust system and supply air system are individually arranged, and exhaust hood is arranged separately in capstan equipment
Side, supply air system are mounted on the periphery of processing workshop.The amount of heat generated when converted products is discharged by the suction of exhaust blower, such as
Fruit thermal energy excludes not in time, can greatly promote operating ambient temperature, while also exacerbating the aging of exhaust system, need at this time
Increasing blast intensity could maintain working environment to keep in certain temperature again, need to increase a large amount of energy of consumption at this time.Such as
In the insufficient situation of fruit air draft, quartzy oxide then cannot exclude clean and influence product quality, the temperature of working environment also without
Method significantly declines；In view of the foregoing drawbacks, it is urgent to provide a kind of air drafts for processing Quartz stove tube to filter system by those skilled in the art
System and method, timely thermal energy can be discharged, and prevent that quartzy oxide is caused to cannot exclude completely because of air draft deficiency, improve work
Make environment.
Summary of the invention
The object of the present invention is to provide a kind of exhaust filtering systems and method for processing Quartz stove tube, can timely will be hot
It can be discharged, timely thermal energy can be discharged, prevent that quartzy oxide is caused to cannot exclude completely because of air draft deficiency, improve work
Environment.
To achieve the above object, it provides the following technical solutions: a kind of exhaust filtering system for processing Quartz stove tube, including cone
Shape suction opening, cone cell air outlet, air draft pipe, air supply duct, exhaust fan, pressure fan and spherical air port, the air draft pipe
One end connect exhaust fan, the other end connects cone cell suction opening, and one end of the air supply duct connects pressure fan, other end connection
Cone cell air outlet, the diameter of the cone cell air outlet are greater than the diameter of the cone cell suction opening, and the diameter of the air supply duct is big
In the diameter of the air draft pipe, the cone cell suction opening is set in the cone cell air outlet, one end of the air draft pipe
Connect with cone cell suction opening, the other end is stretched out from the air supply duct and is connect with the exhaust fan, the cone cell suction opening and
It is equipped between the cone cell air outlet multiple for adjusting the spherical air port of wind direction.
Preferably, the cone cell suction opening is arranged right below heating capstan, and the exhaust fan passes through the air draft pipe
Thermal current is detached, cold airflow is delivered to the surrounding of the heating capstan by the air supply duct by the pressure fan.
Preferably, the spherical air port is multiple, be evenly distributed on the cone cell suction opening and the cone cell air outlet it
Between.
Preferably, the spherical air port includes ball support and ball nozzle, the ball support be fixed on the cone cell suction opening and
Between the cone cell air outlet, the ball nozzle is embedded in the internal diameter of the ball support, to adjust air supply direction.
Preferably, the air supply direction of the ball nozzle is directed at the heating capstan.
Preferably, the inner wall of the cone cell suction opening is equipped with composite filter net, and the composite filter net includes active carbon filtration
Net, anti-bacterial fibre strainer and HEPA strainer.
The present invention also provides a kind of air draft filter methods for processing Quartz stove tube, comprising the following steps:
S1, pressure fan is opened, cold airflow is delivered to the surrounding of heating capstan by cone cell air outlet, maintain 30min；
S2, exhaust fan is opened, air draft pipe is made to keep exhausting state；
S3, by Quartz stove tube clamping heating capstan on, open oxyhydrogen flame gun；
S4, the thermal energy after the firing of hydrogen-oxygen gas flame and quartzy oxide detach outdoor by cone cell suction opening；
S5, air supply duct spherical air port cold airflow be delivered to it is described heating capstan surrounding, to reduce working environment
Temperature.
It is of the invention by air draft pipe that the present invention provides a kind of having the beneficial effect that for the exhaust filtering system of processing Quartz stove tube
It is placed in the inside of air supply duct, the two is combined, while adjusting wind direction using rotatable spherical air port, on the one hand may be used
Heat is discharged from air draft pipe in time, guarantees that the heat of working region is discharged in time, on the other hand utilizes the cold airflow of conveying
The thermal energy fired and generated is reduced, thus achieve the purpose that reduce local working areas temperature, it can be 20 DEG C of effective temperature-reducing or more, it keeps
The cleanliness of working environment and the maintenance cycle for extending equipment.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to needed in the embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is the structural schematic diagram that the exhaust filtering system of Quartz stove tube is processed in the present invention；
Fig. 2 is the structural schematic diagram in spherical air port in the present invention.
Specific embodiment
To keep the contents of the present invention more clear and easy to understand, below in conjunction with Figure of description, the contents of the present invention are made into one
Walk explanation.Certainly the invention is not limited to the specific embodiment, general replacement known to those skilled in the art
It is included within the scope of protection of the present invention.Secondly, the present invention has carried out detailed statement using schematic diagram, it is real the present invention is described in detail
When example, for ease of description, schematic diagram is not partially enlarged in proportion to the general scale, should not be in this, as limitation of the invention.
Above and other technical characteristic and beneficial effect, will in conjunction with the embodiments and attached drawing is to processing Quartz stove tube of the invention
Exhaust filtering system be described in detail.Fig. 1 is the structural representation that the exhaust filtering system of Quartz stove tube is processed in the present invention
Figure；Fig. 2 is the structural schematic diagram in spherical air port in the present invention.
As shown in Figure 1, the present invention provide it is a kind of process Quartz stove tube exhaust filtering system, including cone cell suction opening 100,
Cone cell air outlet 200, air draft pipe 110, air supply duct 210, exhaust fan 120, pressure fan 220 and spherical air port 300.
The abandoning tradition air draft pipe of the present invention structure mutually arranged side by side with air supply duct, the air draft pipe 110 in the present embodiment
One end connect exhaust fan 120, the other end connects cone cell suction opening 100, and one end of air supply duct 210 connects pressure fan 220, separately
One end connects cone cell air outlet 200, and the diameter of cone cell air outlet 200 is greater than the diameter of cone cell suction opening 100, by cone cell suction opening
100 are set in cone cell air outlet 200.
The operation principle of the present invention is that: the thermal current that heating capstan 400 generates, which expands, to be risen, as air draft pipe 110 is taken out
From outdoor, while the continuous transporting cold-air stream in spherical air port 300, cold airflow sink and raise thermal current, substantially reduce partial duty
Regional temperature.
The diameter of air supply duct 210 in the present invention is greater than the diameter of air draft pipe 110, and cone cell suction opening 100 is set in
In cone cell air outlet 200, one end of air draft pipe 110 is connect with cone cell suction opening 100, and the other end is stretched out from air supply duct 210
And connect with exhaust fan 120, it is equipped between cone cell suction opening 100 and cone cell air outlet 200 multiple for adjusting the spherical shape of wind direction
Air port 300, spherical air port 300 are mounted between cone cell suction opening 100 and cone cell air outlet 200, for defeated to heating capstan 400
Cold airflow out.
Specifically, the heating rotation of the cone cell suction opening 100 in the present embodiment being arranged right below for clamping Quartz stove tube
Disk 400, exhaust fan 120 are detached thermal current by air draft pipe 110, and pressure fan 220 is defeated by cold airflow by air supply duct 210
It send to the surrounding of heating capstan 400.
Spherical air port 300 in the present embodiment be it is multiple, be evenly distributed on cone cell suction opening 100 and cone cell air outlet 200
Between, as shown in Fig. 2, spherical air port 300 includes ball support 320 and ball nozzle 310, ball support 320 is fixed on cone cell suction opening 100
Between cone cell air outlet 200, ball nozzle 310 is embedded in the internal diameter of ball support 320, to adjust air supply direction；Ball nozzle
310 air supply direction preferred alignment heats capstan 400.
In order to improve the filter effect of quartzy oxide, the inner wall of cone cell suction opening 100 is equipped with composite filter net 500, multiple
Closing filter screen 500 includes active carbon filter screen, anti-bacterial fibre strainer and HEPA strainer；Composite filter net can also adjust as needed
The cleanliness of working environment can be improved in filtering layer, the setting of composite filter net.
The present invention also provides a kind of air draft filter methods for processing Quartz stove tube, comprising the following steps:
S1, pressure fan 220 is opened, cold airflow is delivered to the surrounding of heating capstan 400, dimension by cone cell air outlet 200
Hold 30min；
S2, exhaust fan 120 is opened, air draft pipe 110 is made to keep exhausting state；
S3, by Quartz stove tube clamping heating capstan 400 on, open oxyhydrogen flame gun；
S4, the thermal energy after the firing of hydrogen-oxygen gas flame and quartzy oxide detach outdoor by cone cell suction opening 100；
S5, air supply duct 210 spherical air port 300 cold airflow be delivered to heating capstan 400 surrounding, to reduce work
Environment temperature.
In conclusion air draft pipe 110 is placed in the inside of air supply duct 210 by the present invention, the two is combined, while benefit
Wind direction is adjusted with rotatable spherical air port 300, heat can be discharged in time from air draft pipe 110 on the one hand, guarantee work
The heat for making region is discharged in time, on the other hand the thermal energy fired and generated is reduced using the cold airflow of conveying, to reach reduction
The purpose of local working areas temperature, can be 20 DEG C of effective temperature-reducing or more, keep the cleanliness of working environment and extend equipment
Maintenance cycle.
Although the present invention essentially describes above embodiments, example is intended only as to be described, and the present invention is simultaneously
It is without being limited thereto.Those of ordinary skill in the art can make the essential characteristics of a variety of modifications and application without departing from embodiment.For example,
Each component that embodiment is shown in detail can be modified and be run, be believed that and be included in the modification and the relevant difference of application
In protection scope of the present invention as defined in the appended claims.
Embodiment involved in this specification is meant that specially feature, structure or the spy described in conjunction with the embodiment
Property is included at least one embodiment of the present invention.These terms for coming across everywhere in specification are not necessarily directed to same
Embodiment.In addition, it is common all to think that it falls into this field when describing a particular feature, structure, or characteristic in conjunction with any embodiment
In the range of these a particular feature, structure, or characteristics that technical staff combines other embodiments that can realize.
Claims (7)
1. a kind of exhaust filtering system for processing Quartz stove tube, which is characterized in that including cone cell suction opening, cone cell air outlet, take out
Air piping, air supply duct, exhaust fan, pressure fan and spherical air port, one end of the air draft pipe connect exhaust fan, the other end
Cone cell suction opening is connected, one end of the air supply duct connects pressure fan, and the other end connects cone cell air outlet, the cone cell air-supply
The diameter of mouth is greater than the diameter of the cone cell suction opening, and the diameter of the air supply duct is greater than the diameter of the air draft pipe, institute
It states cone cell suction opening to be set in the cone cell air outlet, one end of the air draft pipe is connect with cone cell suction opening, the other end
It stretches out from the air supply duct and is connect with the exhaust fan, is equipped between the cone cell suction opening and the cone cell air outlet more
A spherical air port for being used to adjust wind direction.
2. the exhaust filtering system of processing Quartz stove tube according to claim 1, which is characterized in that the cone cell suction opening
Be arranged right below heating capstan, the exhaust fan is detached thermal current by the air draft pipe, and the pressure fan passes through institute
State the surrounding that cold airflow is delivered to the heating capstan by air supply duct.
3. the exhaust filtering system of processing Quartz stove tube according to claim 2, which is characterized in that the spherical shape air port is
It is multiple, it is evenly distributed between the cone cell suction opening and the cone cell air outlet.
4. the exhaust filtering system of processing Quartz stove tube according to claim 3, which is characterized in that spherical shape air port packet
Ball support and ball nozzle are included, the ball support is fixed between the cone cell suction opening and the cone cell air outlet, the spherical spray
Mouth is embedded in the internal diameter of the ball support, to adjust air supply direction.
5. the exhaust filtering system of processing Quartz stove tube according to claim 4, which is characterized in that the ball nozzle
Air supply direction is directed at the heating capstan.
6. the exhaust filtering system of processing Quartz stove tube according to claim 1, which is characterized in that the cone cell suction opening
Inner wall be equipped with composite filter net, the composite filter net includes active carbon filter screen, anti-bacterial fibre strainer and HEPA strainer.
7. a kind of air draft filter method for processing Quartz stove tube, which comprises the following steps:
S1, pressure fan is opened, cold airflow is delivered to the surrounding of heating capstan by cone cell air outlet, maintain 30min；
S2, exhaust fan is opened, air draft pipe is made to keep exhausting state；
S3, by Quartz stove tube clamping heating capstan on, open oxyhydrogen flame gun；
S4, the thermal energy after the firing of hydrogen-oxygen gas flame and quartzy oxide detach outdoor by cone cell suction opening；
S5, air supply duct spherical air port cold airflow be delivered to it is described heating capstan surrounding, to reduce operating ambient temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910531309.6A CN110160200A (en) | 2019-06-19 | 2019-06-19 | A kind of exhaust filtering system and method for processing Quartz stove tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910531309.6A CN110160200A (en) | 2019-06-19 | 2019-06-19 | A kind of exhaust filtering system and method for processing Quartz stove tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110160200A true CN110160200A (en) | 2019-08-23 |
Family
ID=67625998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910531309.6A Pending CN110160200A (en) | 2019-06-19 | 2019-06-19 | A kind of exhaust filtering system and method for processing Quartz stove tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110160200A (en) |
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2019
- 2019-06-19 CN CN201910531309.6A patent/CN110160200A/en active Pending
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