CN110153108A - A kind of focusing method and device of laser cleaning - Google Patents
A kind of focusing method and device of laser cleaning Download PDFInfo
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- CN110153108A CN110153108A CN201910573495.XA CN201910573495A CN110153108A CN 110153108 A CN110153108 A CN 110153108A CN 201910573495 A CN201910573495 A CN 201910573495A CN 110153108 A CN110153108 A CN 110153108A
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- cleaning
- laser
- laser beam
- defocused
- focusing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/40—Optical focusing aids
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
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- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Optical Recording Or Reproduction (AREA)
- Cleaning In General (AREA)
Abstract
The embodiment of the present invention provides the focusing method and device of a kind of laser cleaning, this method comprises: providing defocus information using having measuring at a distance from cleaned body surface to focusing focus of the defocused laser beam to cleaning laser for first wave length；Have maximum penetration rate to laser cleaning accessory products to defocused laser beam, provide defocus information using to defocused laser beam, is converted into electric signal, and as the cleaning lens movement of the error signal drives of automatic focusing control unit and then carry out focusing control.The focusing method and device of laser cleaning provided in an embodiment of the present invention, by using from cleaning the wavelength of laser it is different and to laser cleaning accessory products have maximum penetration rate to defocused laser beam acquisition defocus information, the reliable extraction for realizing defocus information, has high s/n ratio；Using obtained defocus information and then focusing control is carried out, can make to clean light spot focus of the laser when scanning cleaning object surface, be always positioned at body surface, reach good cleaning effect.
Description
Technical field
The present invention relates to laser application technique fields, and in particular to a kind of focusing method and device of laser cleaning.
Background technique
Laser cleaning is a kind of method of corrosion or dirt that body surface is removed using high energy laser pulse.Pass through light
Lens are learned by laser beam focus in body surface, can be cleaned with lesser pulsed laser energy, laser beam is swept
Retouch the cleaning that the large area for object can be realized.In order to clean laser beam body surface effectively, swashing
Light beam is needed laser beam focus when scanning in body surface.There is the nonplanar object of fluctuating for surface, in laser scanning
In the process, laser beam will be unable to accurately focus on body surface.In this way, the cleaning effect of body surface will be made bad, very
To being that the position having could not realize cleaning.In order to reach good and uniform cleaning effect, needing automatic focusing system makes to swash
Light light beam focuses on a surface of an always during scanning.Automatic focusing system is generally included to defocused laser beam and its optics
Component, for measuring the deviation distance of cleaning laser spot and body surface, i.e. error of focusing, further include photoelectric sensor, from
The driving unit of dynamic focusing control unit and focus lamp.
Laser in the process of cleaning, can generate flame or flue dust, it will to the interference very big to defocused laser beam generation.Especially
It is very high in the density of near focal point, flame, with very strong flare, will make that error of focusing can not be accurately measured to defocused laser beam,
To influence cleaning effect.
Summary of the invention
To solve the problems of the prior art, the embodiment of the present invention provides the focusing method and device of a kind of laser cleaning.
In a first aspect, the embodiment of the present invention provides a kind of focusing method of laser cleaning, comprising: using having first wave length
Focusing focus of the defocused laser beam to cleaning laser is measured at a distance from cleaned body surface and provides defocus information；Its
In, the focus of the focus to defocused laser beam and the cleaning laser has same position on the surface of cleaned object, described
The wavelength of first wave length and the cleaning laser is different, and described has maximum penetration to laser cleaning accessory products to defocused laser beam
Rate；By the defocus information by conversion of photoelectric sensor at electric signal, and list is controlled using the electric signal as automatic focusing
The error signal of member keeps automatic focusing control unit driving cleaning lens mobile and then carries out focusing control, realizes clear for laser
The automatic focusing washed.
Further, described that there is different waveforms from the cleaning laser to defocused laser beam；The defocus is believed described
It is described to believe the electric signal as the error of automatic focusing control unit after breath passes through conversion of photoelectric sensor into electric signal
Before number making automatic focusing control unit driving cleaning lens mobile and then carrying out focusing control, the method also includes: to institute
It states electric signal to be decoded or be filtered, to reject the signal of the remaining laser cleaning accessory products.
Further, the method also includes: change the waveform to defocused laser beam by encoding or modulating, so that described
There is different waveforms from the cleaning laser to defocused laser beam.
Further, the method also includes: pass through the Penetrating Test for the laser cleaning accessory products, determine
The first wave length to defocused laser beam, the Penetrating Test by for the laser cleaning accessory products determine
The first wave length to defocused laser beam, it specifically includes: in the cleaning laser cleaning body surface, being surveyed using first
Examination lens will become being focused to defocused laser beam for wavelength light beam generator output, and the focus to defocused laser beam and described clear
The focus of laser is washed in same position；It is described that defocused laser beam is converged after cleaned body surface reflection by the second test lens
And entering detector after wavelength variable optical filter, the electric signal of the detector provides light intensity signal by processor；
It keeps the power to defocused laser beam and changes the wavelength to defocused laser beam, make the maximum intensity of the light intensity signal, at this time
The wavelength to defocused laser beam is the first wave length.
Further, described is laser beam to defocused laser beam.
Further, the laser cleaning accessory products include that the laser that generates in the process of cleaning of cleaning laser is clear
Wash flame and/or laser cleaning flue dust.
Second aspect, the embodiment of the present invention provide a kind of focusing mechanism of laser cleaning, comprising: photoelectric transfer interconnected
Sensor and automatic focusing control unit；The photoelectric sensor is for will be converted into telecommunications to the defocus information that defocused laser beam obtains
Number, and export to the automatic focusing control unit；The automatic focusing control unit is used for using the electric signal as error
Signal driving cleaning lens are mobile and then carry out focusing control, realize the automatic focusing for laser cleaning；Wherein, the focusing
The focus of light beam and the focus of cleaning laser have same position on the surface of cleaned object；It is described to have first to defocused laser beam
The wavelength of wavelength, the first wave length and the cleaning laser is different, and described has to defocused laser beam to laser cleaning accessory products
Standby maximum penetration rate.
Further, described that there is different waveforms from the cleaning laser to defocused laser beam；In the photoelectric sensor and
Between the automatic focusing control unit, described device further includes time domain denoising unit, and the time domain denoising unit includes decoding
Unit or filter unit；The time domain denoising unit is for being decoded or being filtered to the electric signal, to reject residual
The laser cleaning accessory products signal.
Further, described device further includes coding unit or modulation unit；The coding unit or the modulation unit
For changing the waveform to defocused laser beam by coding or modulation, so that described have not defocused laser beam and the cleaning laser
Same waveform.
Further, described device further includes wavelength determination unit, and the wavelength determination unit includes sequentially setting in optical path
Change wavelength light beam generator, the first test lens, the second test lens, wavelength variable optical filter, detector and the processing set
Device；The change wavelength light beam generator is for generating to defocused laser beam, and by first test lens described in defocused laser beam directive；
First test lens make the focus to defocused laser beam and the cleaning for being focused described to defocused laser beam
The focus of laser is in same position；It is described that defocused laser beam is converged after cleaned body surface reflection by second test lens
Gather and enter after the wavelength variable optical filter detector, the electric signal of the detector passes through the processor
Provide light intensity signal.
The focusing method and device of laser cleaning provided in an embodiment of the present invention, by utilizing with the wavelength of cleaning laser not
With and to laser cleaning accessory products have maximum penetration rate to defocused laser beam obtain defocus information, realize defocus information
Reliable extraction has high s/n ratio；Using obtained defocus information and then focusing control is carried out, cleaning laser can be made to scan
Light spot focus when cleaning object surface, is always positioned at body surface, reaches good cleaning effect.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the present invention
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the focusing method flow chart of laser cleaning provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of the focusing mechanism of laser cleaning provided in an embodiment of the present invention；
Fig. 3 be another embodiment of the present invention provides laser cleaning focusing mechanism structural schematic diagram；
Fig. 4 be another embodiment of the present invention provides laser cleaning focusing mechanism application schematic diagram；
Fig. 5 is the application schematic diagram of the focusing mechanism for the laser cleaning that yet another embodiment of the invention provides；
Fig. 6 is the application signal of the wavelength determination unit in the focusing mechanism of laser cleaning provided in an embodiment of the present invention
Figure.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
Fig. 1 is the focusing method flow chart of laser cleaning provided in an embodiment of the present invention.As shown in Figure 1, the method packet
It includes:
Step 101 utilizes the focusing focus and cleaned material body surface to defocused laser beam to cleaning laser for having first wave length
The distance in face, which measures, provides defocus information；Wherein, the focus to defocused laser beam and the focus of the cleaning laser are in quilt
The surface of cleaning of objects has same position, and the first wave length is different with the wavelength of the cleaning laser, and the focusing light
Beam has maximum penetration rate to laser cleaning accessory products；；
In the prior art, laser in the process of cleaning, can generate flame or flue dust, it will very big to generating to defocused laser beam
Interference, so that can not extract well to defocused laser beam, to cause that error of focusing can not be accurately measured, so that cleaning laser
Laser spot can not influence cleaning effect always in cleaned body surface.
The laser cleaning accessory products refer to cleaning laser, and generated such as flame, flue dust is attached in the process of cleaning
Product.The embodiment of the present invention can be determined by the Penetrating Test for laser cleaning accessory products to the first of defocused laser beam
Wavelength, the first wave length is different with the cleaning wavelength of laser, and described has to defocused laser beam to the laser cleaning accessory products
Standby maximum penetration rate.In this way, the reliable extraction to defocused laser beam can be realized, to accurately measure error of focusing.
The focus to defocused laser beam and the focus of the cleaning laser have same position on the surface of cleaned object,
It can reflect the defocus information of cleaning laser to defocused laser beam in this way.Using having the described to defocused laser beam pair of the first wave length
The focusing focus of the cleaning laser measures at a distance from cleaned body surface provides defocus information, provides defocus information
Process can using the prior art method realize.The first wave length used by the embodiment of the present invention to defocused laser beam,
Make to defocused laser beam for cleaning laser generate flame or flue dust penetrability with higher, can obtain signal-to-noise ratio it is higher from
Burnt information.
The defocus information is passed through conversion of photoelectric sensor into electric signal by step 102, and using the electric signal as certainly
The error signal of dynamic focusing control unit keeps automatic focusing control unit driving cleaning lens mobile and then carries out focusing control, real
Referring now to the automatic focusing of laser cleaning；
The defocus information can be the distance between the light spot focus for cleaning laser and cleaned object information.It is described from
What burnt information can be detected by the photoelectric sensor obtains the beam and focus distributed intelligence of defocused laser beam.Because if by
The surface of cleaning of objects is not smooth, then can change to the reflection route of defocused laser beam in the process of cleaning, to make
The beam and focus distributed intelligence changes, and therefore, can provide defocus information using the beam and focus distributed intelligence.Benefit
It can use prior art with the process that the beam and focus distributed intelligence can provide defocus information to realize.
By the defocus information by conversion of photoelectric sensor at electric signal, and using the electric signal as automatic focusing control
The error signal of unit processed keeps automatic focusing control unit driving cleaning lens mobile and then carries out focusing control, realizes for swashing
The automatic focusing of light cleaning keeps the focusing for cleaning laser during scanning burnt to realize the closed-loop control for focusing
Point is always positioned at the surface of cleaned object, improves cleaning quality.
The embodiment of the present invention is by utilizing different from the cleaning wavelength of laser and having maximum to laser cleaning accessory products
Penetrance obtains defocus information to defocused laser beam, realizes the reliable extraction of defocus information, has high s/n ratio；Utilize what is obtained
Defocus information carries out focusing control in turn, can make to clean light spot focus of the laser when scanning cleaning object surface, always position
In body surface, reach good cleaning effect.
Further, based on the above embodiment, described that there is different waveforms from the cleaning laser to defocused laser beam；Institute
It states after the defocus information is passed through conversion of photoelectric sensor into electric signal, it is described using the electric signal as automatic focusing control
Before the error signal of unit processed keeps automatic focusing control unit driving cleaning lens mobile and then carries out focusing control, the side
Method further include: the electric signal is decoded or is filtered, to reject the letter of the remaining laser cleaning accessory products
Number.
It is described that there is different waveforms from the cleaning laser to defocused laser beam, i.e., it is described to defocused laser beam and the cleaning laser
With different time-domain informations.And laser cleaning accessory products as cleaning flame or flue dust signal strength and cleaning laser when
Between Variation Features having the same in sequence, i.e. laser cleaning accessory products and cleaning laser time-domain information having the same.Cause
This, it is described that there is different waveforms from the cleaning laser to defocused laser beam, laser cleaning can be further filtered out from time domain
Accessory products propagate bring interference from optical path.
Therefore, it is described by the defocus information by conversion of photoelectric sensor at electric signal after, it is described by the electricity
Signal keeps automatic focusing control unit driving cleaning lens mobile and then carries out as the error signal of automatic focusing control unit
Before focusing control, the method also includes: the electric signal is decoded or is filtered, it is remaining described sharp to reject
The signal of light cleaning accessory products.
On the basis of the above embodiments, the embodiment of the present invention is different by have defocused laser beam from cleaning laser
Waveform, and by being decoded or being filtered to electric signal, it realizes and further rejects remaining laser cleaning accessory products
Signal further improve cleaning effect to further improve the signal-to-noise ratio of defocus information.
Further, based on the above embodiment, the method also includes: by encode or modulate change it is described to defocused laser beam
Waveform so that described have different waveforms to defocused laser beam and the cleaning laser.
Cleaning laser is usually impulse wave.It is described that laser beam can be to defocused laser beam.For example, described is sharp to defocused laser beam
When light light beam, what is generated from laser is also impulse wave to defocused laser beam.If utilizing the focusing different from optical maser wavelength is cleaned
Light beam then can change the waveform to defocused laser beam by coding or modulation in advance, so that described to defocused laser beam and described clear
Laser is washed with different waveforms.
On the basis of the above embodiments, the embodiment of the present invention changes the waveform to defocused laser beam by coding or modulation, makes
Obtaining has different waveforms from cleaning laser to defocused laser beam, to further increase the signal-to-noise ratio of defocus information, improving cleaning quality
It lays the foundation.
Further, based on the above embodiment, the method also includes: by for the laser cleaning accessory products
Penetrating Test determines the first wave length to defocused laser beam, described by for the laser cleaning accessory products
Penetrating Test determines that the first wave length to defocused laser beam specifically includes: in the cleaning laser cleaning body surface
When, being focused to defocused laser beam for wavelength light beam generator output will be become using the first test lens, and described to defocused laser beam
Focus and it is described cleaning laser focus in same position；It is described to defocused laser beam after cleaned body surface reflection by the
The convergence of two test lens simultaneously enters detector after wavelength variable optical filter, and the electric signal of the detector passes through processor
Provide light intensity signal；It keeps the power to defocused laser beam and changes the wavelength to defocused laser beam, make the light intensity signal
Maximum intensity, the wavelength to defocused laser beam described at this time are the first wave length.
If described is laser beam to defocused laser beam, the change wavelength light beam generator is then into change long wavelength laser.It determines
The first wave length can be realized by the Penetrating Test for laser cleaning accessory products.In the cleaning laser cleaning object
When body surface face, being focused to defocused laser beam for wavelength light beam generator output will be become using the first test lens, and described right
The focus of defocused laser beam and the focus of the cleaning laser are in same position, swashing when in this way and reality is focused to defocused laser beam and cleaning
The focus of light is co-located consistent, guarantees to determine more suitable wavelength.
It is described that defocused laser beam is converged after cleaned body surface reflection by the second test lens and passes through Wavelength variable
Optical filter after enter detector, the electric signal of the detector provides light intensity signal by processor；In cleaning of objects, institute
The flame or flue dust of generation can generate interference to focusing laser, interfere bigger, then signal wearing for flame or flue dust etc. of focusing
Saturating rate is smaller, and the light intensity signal is with regard to smaller；Conversely, interference is smaller, then focus signal for flame or flue dust etc. penetrance
Bigger, the light intensity signal is bigger.
Through experimental analysis, the wavelength difference meeting to defocused laser beam is so that the output intensity of light intensity signal is different, that is, by changing
Become the penetrability that can change to the wavelength of defocused laser beam to defocused laser beam for flame or flue dust etc..Therefore, by keeping described right
The power of defocused laser beam simultaneously changes the wavelength to defocused laser beam, makes the maximum intensity of the light intensity signal, at this time the focusing light
The wavelength of beam is the first wave length.Wherein, power assurance light intensity variation directly reaction wavelength change is kept to influence.
On the basis of the above embodiments, the embodiment of the present invention, which passes through, utilizes change wavelength light beam generator output focusing light
Beam, the output intensity signal after optical path is conducted keep the power to defocused laser beam and change the wavelength to defocused laser beam, make light intensity signal
Maximum intensity, and then determine first wave length, improve the penetrability to defocused laser beam for laser cleaning accessory products, thus into
One step improves the signal-to-noise ratio of defocus information, further improves cleaning quality.
Fig. 2 is the structural schematic diagram of the focusing mechanism of laser cleaning provided in an embodiment of the present invention.As shown in Fig. 2, described
Device includes photoelectric sensor 14 interconnected and automatic focusing control unit 30；The photoelectric sensor 14 will be for that will focus
The defocus information that light beam obtains is converted into electric signal, and exports to the automatic focusing control unit 30；The automatic focusing control
Unit 30 processed is used for mobile using the electric signal as error signal drives cleaning lens and then carries out focusing control, realization for
The automatic focusing of laser cleaning；Wherein, the focus to defocused laser beam and the focus of cleaning laser are on the surface of cleaned object
With same position；Described to have first wave length to defocused laser beam, the first wave length is different with the wavelength of the cleaning laser, and
It is described to have maximum penetration rate to laser cleaning accessory products to defocused laser beam.
The embodiment of the present invention is by utilizing different from the cleaning wavelength of laser and having maximum to laser cleaning accessory products
Penetrance obtains defocus information to defocused laser beam, realizes the reliable extraction of defocus information, has high s/n ratio；Utilize what is obtained
Defocus information carries out focusing control in turn, can make to clean light spot focus of the laser when scanning cleaning object surface, always position
In body surface, reach good cleaning effect.
Further, based on the above embodiment, described that there is different waveforms from the cleaning laser to defocused laser beam.Fig. 3
Be another embodiment of the present invention provides laser cleaning focusing mechanism structural schematic diagram.As shown in figure 3, in the photoelectric transfer
Between sensor 14 and the automatic focusing control unit 30, described device further includes time domain denoising unit 16, the time domain denoising
Unit includes decoding unit or filter unit；Time domain denoising unit 16 be used to be decoded the electric signal or filtering at
Reason, to reject the signal of the remaining laser cleaning accessory products.
On the basis of the above embodiments, the embodiment of the present invention is different by have defocused laser beam from cleaning laser
Waveform, and by being decoded or being filtered to electric signal, it realizes and further rejects remaining laser cleaning accessory products
Signal further improve cleaning effect to further improve the signal-to-noise ratio of defocus information.
Further, based on the above embodiment, described device further includes coding unit or modulation unit；The coding unit
Or the modulation unit is used to change the waveform to defocused laser beam by coding or modulation so that it is described to defocused laser beam with it is described
Cleaning laser has different waveforms.
On the basis of the above embodiments, the embodiment of the present invention changes the waveform to defocused laser beam by coding or modulation, makes
Obtaining has different waveforms from cleaning laser to defocused laser beam, to further increase the signal-to-noise ratio of defocus information, improving cleaning quality
It lays the foundation.
Further, based on the above embodiment, described device further includes wavelength determination unit, the wavelength determination unit packet
Include the change wavelength light beam generator being sequentially arranged in optical path, the first test lens, the second test lens, wavelength variable optical filtering
Piece, detector and processor；The change wavelength light beam generator is used to generate to defocused laser beam, and by described to defocused laser beam directive institute
State the first test lens；First test lens make described to defocused laser beam for being focused described to defocused laser beam
Focus and it is described cleaning laser focus in same position；It is described to defocused laser beam after cleaned body surface reflection by institute
It states the convergence of the second test lens and enters the detector, the telecommunications of the detector after the wavelength variable optical filter
Number light intensity signal is provided by the processor.
On the basis of the above embodiments, the embodiment of the present invention, which passes through, utilizes change wavelength light beam generator output focusing light
Beam, the output intensity signal after optical path is conducted keep the power to defocused laser beam and change the wavelength to defocused laser beam, make light intensity signal
Maximum intensity, and then determine first wave length, improve the penetrability to defocused laser beam for laser cleaning accessory products, thus into
One step improves the signal-to-noise ratio of defocus information, further improves cleaning quality.
Device provided in an embodiment of the present invention is for the above method, and concrete function can refer to above method process, this
Place repeats no more.
To be more clear focusing method and the principle and effect of device of laser cleaning provided in an embodiment of the present invention,
It is specifically described again below by example.
Fig. 4 be another embodiment of the present invention provides laser cleaning focusing mechanism application schematic diagram.Fig. 5 is the present invention
The application schematic diagram of the focusing mechanism for the laser cleaning that another embodiment provides.Wherein, what Fig. 4 was provided is the focus of laser cleaning
The case where positioned at the surface of cleaned object, what Fig. 5 was provided is that the focus of laser cleaning deviates the surface of cleaned object, that is, is sent out
The case where having given birth to defocus.It is as shown in Figure 4, Figure 5:
1 is the cleaning laser beam for cleaning, and wavelength is λ 1；2 be the lens for focusing, will clean laser beam 1
Focus on the surface 4 of cleaned object 3；5 be for measure focussing error signal to defocused laser beam, wavelength is λ 2；6 be point
Mating plate, and be coated with optical thin film on the light splitting piece, can be with reflection wavelength λ 2 to defocused laser beam and transmission peak wavelength is λ 1
Clean laser beam；7 flames generated when being laser cleaning；8 are reflected from cleaned body surface 4 to defocused laser beam；9 be through
Lens are crossed back through light splitting piece 6 to defocused laser beam；10 be spectroscope, can partially be reflected through with part to defocused laser beam 5；
11 be through spectroscopical pair of defocused laser beam, and 12 be narrowband optical optical filter, can be reflecting defocused laser beam for λ 2 with transmission peak wavelength
Filter out the light of other wavelength；13 be sensing optical lens；14 be the photoelectric sensor that can detect beam and focus distribution；15 be light
The electric signal of electric transducer output, 16 be time domain denoising unit, and 17 be the signal that time domain denoising unit provides, and 18 be to automatically control
Unit, 19 be the control signal of automatic control unit output for controlling driving unit 20；21 be the driving that driving unit provides
Signal, 22 be executing agency for driving condenser lens 2.The waveform of 23 cleaning laser；24 be the waveform to defocused laser beam；25 be object
The focal position in body surface face；26 be the defocus position of body surface；27 be Focused objects surface reflection to defocused laser beam.
The parallel cleaning laser beam 1 that waveform is 23 (the usually pulses of repetition rate f), wavelength is λ 1, through point
Light microscopic 6 and the surface 4 for focusing and being located at cleaned object 3 by focus lamp 2, wash the dirt of body surface while generating
Flame 7；Contain the light of various wavelength in flame 7；The parallel 10 arrival light splitting after light splitting piece to defocused laser beam 5 that waveform is 24
Piece 6 is become the directional light of same light path by reflection with cleaning laser beam, is also focused, the position phase of focal position and cleaning laser beam
Together, it and also in cleaned body surface 4, is reflected as light beam 8 and returns to focus lamp 2, by reaching light splitting piece after focus lamp 2
6 are reflected to light splitting piece 10, and optical filter 12 is reached after partially being reflected and is penetrated.Light in flame, by lens 2, light splitting piece 6
With can also reach optical filter 12 after light splitting piece 10, but due to the filter action of optical filter 12, it will such flame light is anti-
It penetrates and filters out.In this way, the light for reaching and passing through sensing optical lens 13 is exactly the very high focusing light of signal-to-noise ratio, the letter of flame light
It is number very faint.The light spot shape that the detection focusing light of photoelectric sensor 14 reaches photoelectric sensor exports electric signal 15, and when passing through
Domain denoises unit 16, according to the waveform 24 to defocused laser beam, further rejects remaining flame light residual signal, further improves
Time domain denoises the signal-to-noise ratio of signal 17 given by unit 16, and the time domain denoising unit 16 can be decoding circuit or filtered electrical
Road.The signal 17, which enters automatic control unit 18, becomes the error input signal controlled, and automatic control unit 18 is by signal
Reason provides control signal 19 and enters driving unit 20, and driving unit 20 provides driving signal 21 and executing agency 22 is driven to keep focusing saturating
Mirror 2 moves up and down, to realize the closed-loop control for focusing, makes the focusing focus for cleaning laser during scanning, protects
It holds above the surface 4 of object.
During Fig. 5 expression laser cleaning the case where defocus.For convenience of description, Fig. 5 is omitted cleaning laser and generates
Flame 7 (comparison diagram 4).The focus on light beam and cleaned relative motion of object of cleaning laser realize the scanning to body surface 4,
And since body surface is uneven or rises and falls, 25 position of focus that body surface 4 will be made to deviate cleaning laser beam, focus 25 is apart from object
The distance on 3 surface 4 of body is 26, that is to say, that the defocus 26 of generation.Due to defocused laser beam with cleaning laser beam it is same also pass through it is poly-
It is burnt and identical as the cleaning focal position of laser beam.In this way, to defocused laser beam be also in cleaning laser beam it is identical from
Coke-like state generates defocus 26.In this way, the body surface 4 of the cleaning of defocus be reflected back to defocused laser beam 27, it is just anti-with focus state
The light beam 8 penetrated is different, enters focus lamp 2, is reflected as light beam 28 by reaching light splitting piece 6 after focus lamp 2, passes through optical filtering
Piece 12 and sensing optical lens 13 become light beam 29 and enter photoelectric sensor 14.Due to reaching the light of photoelectric sensor module at this time
Beam hot spot, different from the beam and focus reached when defocus not occurring, photoelectric sensor 14 can be according to the transformation of this hot spot
Situation and the electric signal 15 exported, electric signal 15 have the information of this hot spot variation, and thereby give the information of defocus 26.
Denoise unit 16 by time domain, further reject the signal of remaining flame light, obtained the defocus signal 17 of high s/n ratio and
Into automatic control unit 18, automatic control unit 18 provides control signal 19 and enters driving unit 20, and driving unit 20 provides
Driving signal 21 drives condenser lens 2 to move up and down, to realize the closed-loop control for focusing, makes clear during scanning
The focusing focus for washing laser is always positioned above the surface 4 of object.
Wherein, it is single to collectively form the automatic focusing control for automatic control unit 18, driving unit 20 and executing agency 22
Member 30.
Fig. 6 is the application signal of the wavelength determination unit in the focusing mechanism of laser cleaning provided in an embodiment of the present invention
Figure.As shown in fig. 6, the embodiment of the present invention gives the wavelength how selected to defocused laser beam, as shown in fig. 6,30 be Wavelength variable
The light beam for becoming long wavelength laser and issuing, 31 be the first test condenser lens, and 32 be another second test condenser lens, and 33 be wavelength
Variable optical filter, 34 detectors, 35 be signal processor, and 36 be the signal that signal processor provides.
When cleaning laser cleaning body surface, light beam 30 is equally focused on cleaned object by the first test lens 31
Surface 4, and with the focus of cleaning laser in same position.Light beam 30 is after the reflection of cleaning object surface 4 by the second test
The convergence of lens 32 simultaneously enters detector 34 after wavelength variable optical filter 33, and the electric signal of detector 34 is crossed and passes through signal
Processor 35 provides light intensity signal 36.It keeps the power of light beam 30 and changes the optical maser wavelength of light beam 30, keep signal 36 most strong, just
The wavelength that may indicate that corresponding light beam 30 is the most suitable wavelength across flame 7.
The coding or time waveform of the laser of the change wavelength are different from the cleaning waveform of laser, so that it may at signal
It manages and decoding or filter circuit is added in device, to reject the interference of cleaning flame.
It should be further noted that the focusing method and device of laser cleaning provided in an embodiment of the present invention, feature
It is using optical maser wavelength is different compared with high transmittance to defocused laser beam laser cleaning flame or flue dust to clear from cleaning
The focusing focus for washing laser measures at a distance from cleaned body surface provides defocus information, and described to defocused laser beam
It is different with the coding or waveform of cleaning laser.Thus, it is possible to filter out cleaning flame or cigarette by using the mode of optically filtering
Interference of the dirt for the defocus measured to defocused laser beam can further be filtered using circuit mode decoding or circuit filtering mode
Except the interference of defocus signal, high s/n ratio defocus signal is obtained, the precision of measurement defocus is improved, to finally realize laser cleaning
Good automatic focusing.
Wherein, measure defocus can use light identical with cleaning laser beam when measuring defocus signal to defocused laser beam
Road, can also be using the optical path different from cleaning laser beam.Also, the measurement defocus can be polarization to defocused laser beam
Be also possible to unpolarized, described measurement defocus to defocused laser beam can with cleaning the polarization of laser it is identical, be also possible to
It is different from the cleaning polarization of laser.
The measurement defocus can be used wavelength variable change wavelength laser to the wavelength of defocused laser beam and be determined, special
Point is that the coding of the laser of the change wavelength or time waveform are different from the cleaning waveform of laser, thus can be in signal
Decoding or filter circuit are added in processor, to reject the interference of cleaning flame, realize higher signal-to-noise ratio and sense sensitive
Degree, is conducive to the automatic focusing of laser cleaning, improves the quality of laser cleaning.
The apparatus embodiments described above are merely exemplary, wherein described, unit can as illustrated by the separation member
It is physically separated with being or may not be, component shown as a unit may or may not be physics list
Member, it can it is in one place, or may be distributed over multiple network units.It can be selected according to the actual needs
In some or all of the modules achieve the purpose of the solution of this embodiment.Those of ordinary skill in the art are not paying creativeness
Labour in the case where, it can understand and implement.
Through the above description of the embodiments, those skilled in the art can be understood that each embodiment can
It realizes by means of software and necessary general hardware platform, naturally it is also possible to pass through hardware.Based on this understanding, on
Stating technical solution, substantially the part that contributes to existing technology can be embodied in the form of software products in other words, should
Computer software product may be stored in a computer readable storage medium, such as ROM/RAM, magnetic disk, CD, including several fingers
It enables and using so that a computer equipment (can be personal computer, server or the network equipment etc.) executes each implementation
Method described in certain parts of example or embodiment.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features；
And these are modified or replaceed, technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (10)
1. a kind of focusing method of laser cleaning characterized by comprising
Using have first wave length to defocused laser beam to cleaning laser focusing focus carried out at a distance from cleaned body surface
Measurement provides defocus information；Wherein, the focus to defocused laser beam and the focus of the cleaning laser are in the table for being cleaned object
Face has a same position, and the wavelength of the first wave length and the cleaning laser is different, and it is described to defocused laser beam to laser cleaning
Accessory products have maximum penetration rate；
By the defocus information by conversion of photoelectric sensor at electric signal, and list is controlled using the electric signal as automatic focusing
The error signal of member keeps automatic focusing control unit driving cleaning lens mobile and then carries out focusing control, realizes clear for laser
The automatic focusing washed.
2. the focusing method of laser cleaning according to claim 1, which is characterized in that described to defocused laser beam and the cleaning
Laser has different waveforms；It is described by the defocus information by conversion of photoelectric sensor at electric signal after, it is described will
The electric signal as the error signal of automatic focusing control unit keep automatic focusing control unit driving cleaning lens mobile into
And before carrying out focusing control, the method also includes:
The electric signal is decoded or is filtered, to reject the signal of the remaining laser cleaning accessory products.
3. the focusing method of laser cleaning according to claim 1, which is characterized in that the method also includes:
Change the waveform to defocused laser beam by encoding or modulating, so that described have not defocused laser beam and the cleaning laser
Same waveform.
4. the focusing method of laser cleaning according to claim 1, which is characterized in that the method also includes: by right
In the Penetrating Test of the laser cleaning accessory products, determine the first wave length to defocused laser beam, it is described by pair
In the Penetrating Test of the laser cleaning accessory products, determines the first wave length to defocused laser beam, specifically includes:
In the cleaning laser cleaning body surface, the focusing of wavelength light beam generator output will be become using the first test lens
Light beam is focused, and the focus to defocused laser beam and the focus of the cleaning laser are in same position；The focusing light
Beam is converged by the second test lens after cleaned body surface reflection and enters detection after wavelength variable optical filter
The electric signal of device, the detector provides light intensity signal by processor；It keeps described in the power defocused laser beam and variation
To the wavelength of defocused laser beam, make the maximum intensity of the light intensity signal, the wavelength to defocused laser beam described at this time is the first wave
It is long.
5. the focusing method of laser cleaning according to claim 1, which is characterized in that described is laser light to defocused laser beam
Beam.
6. the focusing method of laser cleaning according to claim 1, which is characterized in that the laser cleaning accessory products packet
Include laser cleaning flame and/or laser cleaning flue dust that the cleaning laser generates in the process of cleaning.
7. a kind of focusing mechanism of laser cleaning, which is characterized in that including photoelectric sensor interconnected and automatic focusing control
Unit processed；
The photoelectric sensor is used to that electric signal will to be converted into the defocus information that defocused laser beam obtains, and exports to the automatic tune
Burnt control unit；The automatic focusing control unit be used for using the electric signal as error signal drives cleaning lens move into
And focusing control is carried out, realize the automatic focusing for laser cleaning；
Wherein, the focus to defocused laser beam and the focus for cleaning laser have same position on the surface of cleaned object；Institute
It states and has first wave length to defocused laser beam, the first wave length is different and described to defocused laser beam pair with the wavelength of the cleaning laser
Laser cleaning accessory products have maximum penetration rate.
8. focusing mechanism according to claim 7, which is characterized in that described to have not to defocused laser beam and the cleaning laser
Same waveform；Between the photoelectric sensor and the automatic focusing control unit, described device further includes that time domain denoising is single
Member, the time domain denoising unit includes decoding unit or filter unit；Time domain denoising unit be used for the electric signal into
Row decoding or filtering processing, to reject the signal of the remaining laser cleaning accessory products.
9. focusing mechanism according to claim 7, which is characterized in that described device further includes that coding unit or modulation are single
Member；The coding unit or the modulation unit are used to change the waveform to defocused laser beam by coding or modulation, so that institute
Stating has different waveforms from the cleaning laser to defocused laser beam.
10. focusing mechanism according to claim 7, which is characterized in that described device further includes wavelength determination unit, described
Wavelength determination unit includes the change wavelength light beam generator being sequentially arranged in optical path, the first test lens, the second test lens, wave
Long variable optical filter, detector and processor；
The change wavelength light beam generator is used to generate to defocused laser beam, and first test described in defocused laser beam directive is saturating
Mirror；First test lens for being focused described to defocused laser beam, and make the focus to defocused laser beam with it is described
The focus of laser is cleaned in same position；It is described saturating by second test after cleaned body surface reflection to defocused laser beam
Mirror convergence simultaneously enters the detector after the wavelength variable optical filter, and the electric signal of the detector passes through the place
Reason device provides light intensity signal.
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| CN111822446A (en) * | 2020-06-28 | 2020-10-27 | 济南金威刻科技发展有限公司 | Automatic focusing type laser cleaning machine |
| CN112532853A (en) * | 2019-09-17 | 2021-03-19 | 深圳市硕德激光技术有限公司 | Automatic focusing method and device, laser equipment and storage medium |
| CN112536292A (en) * | 2020-11-20 | 2021-03-23 | 中国核动力研究设计院 | High-efficiency laser decontamination system and method for radioactive metal surface |
| CN112717154A (en) * | 2020-12-22 | 2021-04-30 | 武汉菩济医疗科技有限公司 | Object surface virus killing system and virus killing machine based on ultrafast laser |
| CN115229330A (en) * | 2022-09-22 | 2022-10-25 | 武汉引领光学技术有限公司 | Automatic focusing device and method for laser processing |
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| CN110153108B (en) | 2020-12-01 |
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