CN110133820A - The nanoscale precise displacement actuator of large-scale segmented mirror optical telescope - Google Patents
The nanoscale precise displacement actuator of large-scale segmented mirror optical telescope Download PDFInfo
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- CN110133820A CN110133820A CN201910413873.8A CN201910413873A CN110133820A CN 110133820 A CN110133820 A CN 110133820A CN 201910413873 A CN201910413873 A CN 201910413873A CN 110133820 A CN110133820 A CN 110133820A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
- F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H2025/2062—Arrangements for driving the actuator
- F16H2025/2084—Perpendicular arrangement of drive motor to screw axis
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H2025/2062—Arrangements for driving the actuator
- F16H2025/209—Arrangements for driving the actuator using worm gears
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Astronomy & Astrophysics (AREA)
- Sustainable Development (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Telescopes (AREA)
- Gears, Cams (AREA)
Abstract
The weight of the nanoscale precise displacement actuator of large-scale segmented mirror optical telescope, sub- mirror and mirror cell's assembly acts on the output shaft of compression spring mechanism；It is characterized in that, the top of compression spring mechanism and output shaft are coaxially provided with voice coil motor；The lower section of compression spring mechanism, which is equipped with, makees telescopic device by the mechanism that worm couple, ball screw assembly, spline pair are constituted；The compression spring mechanism, voice coil motor, telescopic device are all coaxially disposed with output shaft.It is avoided that the brings problems at high cost such as similar lever nanoscale precise displacement actuator output shaft waves, is more using joint, lever quantity is more, processing complexity, structure of the invention is fairly simple, lower production costs are able to satisfy the requirement that large-scale segmented mirror optical telescope largely uses.
Description
Technical field
The present invention relates to a kind of nanoscale precise displacement actuators in optical field application, and in particular to one kind is in large size
In segmented mirror optical telescope, nanoscale precise displacement actuator to be used is needed when splicing sub- mirror.Its outstanding feature is to unload
Lotus mechanism, voice coil motor are coaxial with output shaft, are avoided that similar lever nanoscale precise displacement actuator output shaft is waved, closed
The brings problems at high cost such as more, lever quantity is more, processing complexity are saved, lever nanoscale precise displacement actuator is compared to
Its is relatively simple for structure, lower production costs, is able to satisfy heavy caliber segmented mirror optical telescope and largely uses wanting for actuator
It asks.
Background technique
Nanoscale precise displacement actuator is the key that indispensable in large-scale segmented mirror astronomical optics telescope development process
One of component.Large-aperture optical telescope is spliced by many sub- mirrors, look in the distance sem observation use when need to correct sub- mirror in real time
Position, realize that the coplanar and common phase of each sub- mirror is spliced, the critical component for correcting sub- mirror is nanoscale precise displacement actuator,
The displacement resolution of actuator is asked to reach several nanometers.Large-aperture optical looks in the distance mirror mirror and mirror cell's weight reaches several hundred kilograms,
Even thousands of kilograms, so heavy weight object wants command displacement resolution ratio to reach several to receive with traditional mechanically operated method
Rice, it is extremely difficult, so there has been proposed discharging type displacement actuator, problem is solved in two steps, i.e. off-load mechanical part
With the voice coil motor part of accurate adjustment compensation, mirror weight sub- first acts on spring, generates displacement-X, use machine driving
Mode compensates X to submillimeter level, since the precision that conventional mechanical transmission mode compensates X is inadequate, enables voice coil motor to mend
X is repaid to nanoscale.The characteristics of power output having using voice coil motor is sensitive, is easy to control, voice coil motor provide small power,
Change the compressive state of compressed spring, participate in the rebalancing of load with compressed spring, which realizes micro-displacement.Pass through height
The current control card of resolution ratio provides electric current to voice coil motor, realizes the accurate adjustment control to several nanometers of sub- mirror.
The schematic diagram of existing lever nanoscale precise displacement actuator is as shown in Figure 1,4 points of lever mechanism A, B, C, D
Trapezoidal, the stretching motion of electronic or hydraulic equal length telescoping components 2 and voice coil motor 3 can make position by compressed spring 4
Output shaft 1 is moved to move up and down.The characteristics of program is that power output can also be thin by lever ratio by lever amplification, displacement resolution
Point, while the gap in lever joint can also be amplified, all 22 joints of this scheme are all disappeared using installation flexible pivot thus
Except joint backlash, the unit price of flexible pivot is relatively high, while the processing cost of numerous rod pieces is also high, and entire scheme is made
Valence is naturally relatively high, and in addition the output shaft of this scheme can be with the lifting micro beat in left and right.
For the deficiency for solving existing lever nanoscale precise displacement actuator, the present invention proposes a kind of to use worm and gear
The mechanism that pair, ball screw assembly, spline pair are constituted makees telescopic device；And compression spring mechanism, voice coil motor, telescopic
The new departure of device all with output shaft coaxial arrangement.Lever and all multi-joint of the new departure without complicated shape, when output shaft is gone up and down
Without beat, overall mechanical design is more conventional, and manufacturing cost is lower, is easy to implement batch production.
Summary of the invention
The object of the present invention is to provide a kind of nanoscale precise displacement actuators of large-scale segmented mirror optical telescope.This
Invention eliminates the buying expenses of flexible pivot without lever and joint, also eliminates the Milling Process expense of complicated shape lever piece；
And without beat when output shaft lifting, overall mechanical design is more conventional, is easy production, is able to satisfy large-scale segmented mirror optics and looks in the distance
Mirror largely uses the requirement of nanoscale precise displacement actuator.
The technical solution for accomplishing the above inventive task is that: a kind of nanoscale precision position of large size segmented mirror optical telescope
Displacement actuator, output shaft couple with sub- mirror and mirror cell's assembly, and the weight of sub- mirror and mirror cell's assembly acts on compression spring mechanism
Output shaft on；It is characterized in that, the top of compression spring mechanism and output shaft are coaxially provided with voice coil motor；Compression spring mechanism
Lower section be equipped with telescopic device made by the mechanism that worm couple, ball screw assembly, spline pair are constituted；The compressed spring
Mechanism, voice coil motor, telescopic device are all coaxially disposed with output shaft.
The working principle of the invention is: coil connection anchor ear first couples with the coil of voice coil motor, then holds output shaft；
Compression spring mechanism, voice coil motor, son are pushed with the mechanical drive mode that worm couple, ball screw assembly, and spline pair are constituted
Mirror and mirror cell's assembly etc. compensate the position of mirror surface to submillimeter level, then enable voice coil motor to compensate the position of mirror surface to nanometer
Grade.
The composition of the compression spring mechanism is: upper and lower compressed spring 13A, 13B is positioned in output shaft lower end piston ring
Partial two sides up and down, then by outer cylinder upper end cover pre-pressing in outer cylinder, spring outer cylinder lower end inside has carrying compressed spring
The inner convex platform of 13B, convenient for by spring outer cylinder, compressed spring 13A, 13B, output shaft, guide piston ring, spin-ended piece, rolling bearing,
Outer cylinder upper end cover is individually assembled into a compression spring mechanism component.
The composition of the telescopic device is: being driven by a motor worm screw rotation, worm screw drives worm gear rotation, and worm gear is fixed
In in the rotating nuts of ball screw assembly, rotating nuts upper and lower ends by bearing support, lower end be equipped with one group it is back-to-back to
Heart thrust bearing, bearing outer ring side are positioned at the shaft shoulder of worm gear case, and the bearing outer ring other side is by outer ring clamp nut
Positioning is fixed, and bearing inner race side abuts the shaft shoulder of rotating nuts, and inner ring clamp nut is screwed in the external screw thread of rotating nuts tail portion
On, and bearing inner race is abutted, by adjusting the degree of tightening of the inner ring clamp nut, eliminates the clearance of two bearings rolling element, and
So that rotating nuts are clamped between two bearings inner ring, the axial backlash of rotating nuts is eliminated, in the upper end of rotating nuts
One radial ball bearing is installed, centering support is used for, abuts the shaft shoulder of rotating nuts on the downside of the inner ring of radial ball bearing, on inner ring
Side is positioned with axis with retainer ring, and outer ring is not fixed as axial limiting, and the lower end outside of worm gear case is equipped with bottom end seal
Lid.
Worm screw drives worm gear rotation, and worm gear is fixed in the rotating nuts of ball screw assembly, since rotating nuts are axially solid
Fixed, ball-screw can only move up and down, and ball-screw upper end is unified into coaxial one, spline tube and worm gear case with splined shaft
Connection, ball-screw are rotated by limitation, can only be vertically moved up and down, and the square hole of splined shaft top square axis and lifting output cylinder joins
It connects, lifting output cylinder is also limited rotation, ball-screw can only be followed to vertically move up and down, lifting output cylinder and spring outer cylinder
Connection.
The position of the voice coil motor is with structure: magnet steel connecting plate first couples with the magnet steel of voice coil motor, then with outer cylinder
Upper end cover connection, coil connection anchor ear first couples with the coil of voice coil motor, then holds output shaft.
In other words, the present invention proposes a kind of new coaxial-type nanoscale precise displacement actuator.Motor rotation drives worm screw
Rotation, worm screw drive worm gear rotation, and the rotating nuts consubstantiality of worm gear and ball-screw, the rotating nuts both ends of ball-screw are by axis
Holding supports, and one end installs one group of back-to-back radial thrust bearing, so that ball-screw rotating nuts are clamped in two axis
Hold axially position between inner ring；The ball-screw rotating nuts other end is equipped with radial ball bearing, is used for centering support, inside and outside
Circle two sides are not fixed simultaneously.Ball-screw upper end is unified into coaxial one with splined shaft, and splined shaft and spline tube constitute spline pair,
Spline tube is fixed with worm gear case, and splined shaft is connected in one by the square axis of the upper end and the square hole of lifting output cylinder
It rises.Spring outer cylinder is linked together with lifting output cylinder, and two compressed springs are positioned in the two sides of output shaft piston ring portion,
Then by outer cylinder upper end cover pre-pressing in spring outer cylinder, output shaft can be in rolling bearing, guide piston ring, spin-ended piece of guiding
Under move up and down, be fixed with grating scale on spin-ended piece, grating scale opposite side is reading head.Magnet steel connecting plate elder generation and voice coil motor magnetic
Steel connection, then couple with outer cylinder upper end cover, coil connection anchor ear first couples with voice coil motor coil, then holds output shaft.It is defeated
Shaft upper end couples with sub- mirror and mirror cell's assembly in a certain way, and the weight of sub- mirror and mirror cell's assembly acts in compressed spring.
The working principle of nanoscale precise displacement actuator be it is such, first say the mirror surface of mirror mirror of looking in the distance to mirror surface
The requirement that base position is adjusted, it is assumed that the weight Mg of sub- mirror and mirror cell's assembly, when telescope height angular variable, sub- mirror and mirror cell
Assembly acts on power F=Mg*Sin α on output shaft, as shown in Fig. 2, the decrement of spring is caused to change, i.e., mirror surface deviates
Mirror surface base position, installation precise displacement actuator are exactly so that the mirror surface is returned to mirror surface benchmark position in order to correct this displacement
It sets.As stress F=Mg of output shaft, lower compressed spring is compressed, and mirror surface can deviate mirror surface base position toward moving down-X, this
When to restore the mirror surface of sub- mirror arrive mirror surface base position, motor drives worm screw to rotate, and ball-screw up moves, while driving liter
The whole X that up moves such as drop output cylinder, spring outer cylinder, voice coil motor, output shaft, sub- mirror and mirror cell's assembly is to submillimeter level essence
Degree, since the precision that conventional mechanical transmission mode compensates X is not high enough, then enables voice coil motor to compensate X to nanoscale；When
When the stress F of output shaft tends to 0, i.e., when telescope elevation angle becomes smaller, the decrement of lower compressed spring is reduced, and mirror surface can up be run
X, to make the mirror surface of sub- mirror be maintained at mirror surface base position, ball screw system moves down, and drives lifting output cylinder, spring
Outer cylinder, voice coil motor, output shaft, sub- mirror and mirror cell's assembly etc. integrally move down-X to submillimeter level precision, then enable sound
Circle motor arrives nanoscale to compensate-X.I.e. most of adjustment conventional mechanical transmission mechanism and compressed spring loaded and be displaced
It carries, fraction weight and displacement are balanced and generated by voice coil motor, reach the mirror surface for being precisely controlled sub- mirror in mirror surface base
The purpose that level is set.
In other words, nanoscale precise displacement actuator of the invention, by worm couple, ball screw assembly, spline pair, pressure
The composition such as contracting spring mechanism, voice coil motor, grating ruler reading head system, including worm gear case, lifting output cylinder, sliding axle
It holds, bottom end seal lid, outer ring clamp nut, inner ring clamp nut, radial thrust bearing, radial ball bearing, spring outer cylinder, roll
Bearing, output shaft, guide piston ring, the composition such as spin-ended piece.The worm couple, ball screw assembly, constitute power transmitting and subtract
Fast part；The compositions such as spline pair, sliding bearing, lifting output cylinder, which slide axially, is oriented to displacement output par, c；The compression bullet
Spring mechanism includes spring outer cylinder, output shaft, compressed spring, rolling bearing, guide piston ring, spin-ended piece, the structures such as outer cylinder upper end cover
At the load carrier of gravity load, compression spring mechanism and lifting output cylinder are coaxial；The spring outer cylinder lower end inside is held
Carry compressed spring inner convex platform, convenient for by spring outer cylinder, compressed spring, output shaft, guide piston ring, spin-ended piece, rolling bearing,
Outer cylinder upper end cover is individually assembled into a compression spring mechanism component, convenient for assembling and maintenance；The work of the output shaft lower end
Plug ring part is equipped with guide piston ring and is capable of fixing spin-ended piece, and spring outer tube side wall is provided with axially directed slot, rolling bearing,
Guide piston, spin-ended piece, the guide groove of spring outer tube side wall constitute output shaft move up and down guiding；The voice coil motor with
Output shaft coaxial arrangement；The worm screw and ball-screw rotating nuts is supported by radial thrust bearing and radial ball bearing
In worm gear case body；The ball-screw upper end is unified into coaxial one with splined shaft；The splined shaft and spline tube
Constitute spline pair；The splined shaft is linked together by the square axis of the upper end and the square hole of lifting output cylinder.
As another alternative solution of the invention, the voice coil motor non-coaxial can also be installed with output shaft, pass through company
The power output of voice coil motor is connected to output shaft by fishplate bar form.
The beneficial effects of the present invention are: nanoscale precise displacement actuator its worm couple, ball screw assembly, and spline
Power transmitting, deceleration and the lifting guide mechanism (i.e. telescopic device) and compression spring mechanism that pair is constituted are coaxially disposed, pressure
Contracting spring mechanism and output shaft are coaxially disposed, and voice coil motor is also coaxially disposed with output shaft, are compared to lever nanoscale essence
Its is relatively simple for structure for dense bit displacement actuator, eliminates the buying expenses of flexible pivot cradle head, also eliminates complicated shape
The Milling Process of lever piece is taken, and the present invention is largely turning part, and turnery processing is more high-efficient than Milling Process, and price is naturally just
Preferably, the cost that can reduce actuator in this way is able to satisfy large-scale segmented mirror optical telescope and largely uses nanoscale accurate displacement
The requirement of actuator.
Detailed description of the invention
Fig. 1 is the simplified structure diagram of existing lever nanoscale precise displacement actuator；
Fig. 2 mirror and actuator output shaft stress relation schematic diagram when being the variation of telescope elevation angle；
Fig. 3 is the structural schematic diagram of nanoscale precise displacement actuator of the invention.
Specific embodiment
It is described further with reference to the accompanying drawings and examples:
Embodiment 1, referring to Fig. 3, precise displacement actuator is driven by a motor the rotation of worm screw 24, and worm screw drives worm gear 25 to rotate, snail
Wheel is fixed in the rotating nuts 23 of ball screw assembly, and for 23 upper and lower ends of rotating nuts by bearing support, lower end is equipped with one group
Back-to-back radial thrust bearing 16, bearing outer ring side are positioned at the shaft shoulder of worm gear case 17, the bearing outer ring other side
It is positioned and fixes by outer ring clamp nut 18, bearing inner race side abuts the shaft shoulder of rotating nuts 23, and inner ring clamp nut 19 is screwed in
On the external screw thread of 23 tail portion of rotating nuts, and bearing inner race is abutted, tightens degree by adjust the inner ring clamp nut 19, disappear
Except the clearance of two bearings rolling element, and rotating nuts 23 are clamped between two bearings inner ring, eliminate rotating nuts 23
Axial backlash, rotating nuts 23 upper end install a radial ball bearing 15, be used for centering support, radial ball bearing 15
The shaft shoulder of rotating nuts 23 is abutted on the downside of inner ring, is positioned on the upside of inner ring with axis retainer ring 36, outer ring is not fixed as axial limiting,
The lower end outside of worm gear case 17 is equipped with bottom end seal lid 20.
Worm screw 24 drives worm gear 25 to rotate, and worm gear is fixed in the rotating nuts 23 of ball screw assembly, due to rotating nuts
23 axial restraints, ball-screw 22 can only move up and down, and ball-screw upper end is unified into coaxial one, spline tube 26 with splined shaft 27
Couple with worm gear case 17, ball-screw by limitation rotate, can only vertically move up and down, 27 top square axis of splined shaft with
The square hole connection of output cylinder 28 is gone up and down, lifting output cylinder 28 is also limited rotation, and about 22 ball-screw can only be followed vertical
Mobile, lifting output cylinder 28 couples with spring outer cylinder 12, and upper and lower compressed spring 13A, 13B is positioned in 5 lower end piston of output shaft
The two sides up and down of loop section, then by 11 pre-pressing of outer cylinder upper end cover in outer cylinder, 12 lower end inside of spring outer cylinder has carrying to press
The inner convex platform of contracting spring 13B, convenient for by spring outer cylinder 12, compressed spring 13A, 13B, output shaft 5, guide piston ring 29, spin-ended
Block 32, rolling bearing 10, outer cylinder upper end cover 11 are individually assembled into a compression spring mechanism component, are conducive to overall package and dimension
It repairs；The piston ring portion of 5 lower end of output shaft is equipped with guide piston ring 29, and is capable of fixing spin-ended piece 32,12 side of spring outer cylinder
Wall is provided with axially directed slot, rolling bearing 10, guide piston ring 29, spin-ended piece 32, the guide groove of 12 side wall of spring outer cylinder constitutes
Output shaft 5 moves up and down guiding.Fixed grating ruler 31 on spin-ended piece 32, grating scale opposite side are reading head 30.Magnet steel connecting plate 9
First couple with the magnet steel 8 of voice coil motor, then couple with outer cylinder upper end cover 11, coil connects the first coil 7 with voice coil motor of anchor ear 6
Connection, then hold output shaft 5.Output shaft couples with sub- mirror and mirror cell's assembly 33 in a certain way, sub- mirror and mirror cell's assembly 33
Weight acted in compressed spring 13A, 13B by output shaft 5, the position of the mirror surface 34 of sub- mirror changes therewith, with worm gear snail
Mechanical drive mode push the spring outer cylinder, output shaft, sub- mirror and the mirror cell's assembly etc. that bar pair, ball screw assembly, and spline pair are constituted
Mechanism generates displacement, compensates the position of mirror surface 34 of sub- mirror to submillimeter level, then enable voice coil motor to compensate the mirror surface of sub- mirror
34 position is to nanoscale.The mirror surface of sub- mirror and the deviation of mirror surface base position 35 are supplied to control by external detection device feedback
System, the practical compensation rate of voice coil motor feed back to control by optical-mechanical system.
Claims (7)
1. a kind of nanoscale precise displacement actuator of large size segmented mirror optical telescope, output shaft and sub- mirror and mirror cell are total
At connection, the weight of sub- mirror and mirror cell's assembly is acted on the output shaft of compression spring mechanism；It is characterized in that, compressed spring machine
The top of structure and output shaft are coaxially provided with voice coil motor；The lower section of compression spring mechanism is equipped with by worm couple, ball-screw
The mechanism that secondary, spline pair is constituted makees telescopic device；The compression spring mechanism, voice coil motor, telescopic device all with
Output shaft coaxial arrangement.
2. the nanoscale precise displacement actuator of large size segmented mirror optical telescope according to claim 1, feature
Be, the composition of the compression spring mechanism is: upper and lower compressed spring (13A, 13B) is positioned in output shaft lower end piston ring
Partial two sides up and down, then by outer cylinder upper end cover pre-pressing in outer cylinder, spring outer cylinder lower end inside has carrying compressed spring
The inner convex platform of (13B) is convenient for spring outer cylinder, compressed spring (13A, 13B), output shaft, guide piston ring, spin-ended piece, rolling
Bearing, outer cylinder upper end cover are individually assembled into a compression spring mechanism component.
3. the nanoscale precise displacement actuator of large size segmented mirror optical telescope according to claim 1, feature
It is, the composition of the telescopic device is: is driven by a motor worm screw rotation, worm screw drives worm gear rotation, and worm gear is fixed on
In the rotating nuts of ball screw assembly, rotating nuts upper and lower ends by bearing support, lower end be equipped with one group it is back-to-back centripetal
A radial ball bearing is installed in thrust bearing, upper end, and the lower end outside of worm gear case is equipped with bottom end seal lid；Worm screw band
Dynamic worm gear rotation, worm gear are fixed in the rotating nuts of ball screw assembly, and due to rotating nuts axial restraint, ball-screw can only
It moves up and down, ball-screw upper end is unified into coaxial one with splined shaft, and spline tube couples with worm gear case, ball-screw quilt
Limitation rotation, can only vertically move up and down, and splined shaft top square axis couples with the square hole of lifting output cylinder, go up and down output cylinder
Rotation is limited, ball-screw can only be followed to vertically move up and down, lifting output cylinder couples with spring outer cylinder.
4. the nanoscale precise displacement actuator of large size segmented mirror optical telescope according to claim 1, feature
Be, the position of the voice coil motor is with structure: magnet steel connecting plate first couples with the magnet steel of voice coil motor, then with outer cylinder upper end
Lid connection, coil connection anchor ear first couples with the coil of voice coil motor, then holds output shaft.
5. the nanoscale precise displacement actuator of large size segmented mirror optical telescope according to claim 1, feature
It is, the piston ring portion of the output shaft lower end is equipped with guide piston ring, and is capable of fixing spin-ended piece, spring outer tube side wall
Be provided with axially directed slot, rolling bearing, guide piston ring, spin-ended piece, the guide groove of spring outer tube side wall constitute the upper of output shaft
Lower mobile guide.
6. the nanoscale precise displacement actuator of large-scale segmented mirror optical telescope described in one of -5 according to claim 1,
It is characterized in that, spin-ended piece of upper fixed grating ruler, grating scale opposite side are reading head；Magnet steel connecting plate elder generation and the voice coil motor
Magnet steel connection, then couple with outer cylinder upper end cover, coil connection anchor ear first couples with the coil of the voice coil motor, then hugs residence
State output shaft.
7. a kind of nanoscale precise displacement actuator of large size segmented mirror optical telescope, output shaft and sub- mirror and mirror cell are total
At connection, the weight of sub- mirror and mirror cell's assembly is acted on the output shaft of compression spring mechanism；It is characterized in that, compressed spring machine
The top of structure and output shaft are coaxially provided with voice coil motor；The lower section of compression spring mechanism is equipped with by worm couple, ball-screw
The mechanism that secondary, spline pair is constituted makees telescopic device；The voice coil motor and output shaft is non-coaxial installation, is to pass through company
The power output of voice coil motor is connected to output shaft by fishplate bar form.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910413873.8A CN110133820B (en) | 2019-05-17 | 2019-05-17 | Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910413873.8A CN110133820B (en) | 2019-05-17 | 2019-05-17 | Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope |
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| CN110133820A true CN110133820A (en) | 2019-08-16 |
| CN110133820B CN110133820B (en) | 2021-03-05 |
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| CN201910413873.8A Active CN110133820B (en) | 2019-05-17 | 2019-05-17 | Nanometer-scale precision displacement actuator of large-scale spliced mirror surface optical telescope |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113050250A (en) * | 2021-03-22 | 2021-06-29 | 中国科学院国家天文台南京天文光学技术研究所 | High-precision micro-displacement actuator utilizing threaded parallel structure |
| CN113687489A (en) * | 2021-09-16 | 2021-11-23 | 中国科学院国家天文台南京天文光学技术研究所 | Flexible displacement actuator for large optical infrared telescope splicing mirror surface |
| CN116509625A (en) * | 2023-06-06 | 2023-08-01 | 广东麦特维逊医学研究发展有限公司 | Displacement actuating device and working method thereof |
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| CN113687489A (en) * | 2021-09-16 | 2021-11-23 | 中国科学院国家天文台南京天文光学技术研究所 | Flexible displacement actuator for large optical infrared telescope splicing mirror surface |
| CN116509625A (en) * | 2023-06-06 | 2023-08-01 | 广东麦特维逊医学研究发展有限公司 | Displacement actuating device and working method thereof |
| CN116509625B (en) * | 2023-06-06 | 2023-11-07 | 广东麦特维逊医学研究发展有限公司 | Displacement actuating device and working method thereof |
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