CN110133019A - It is a kind of for the multipurpose specimen holder of Nanoprobe-FIB-TEM failure analysis and its application - Google Patents
It is a kind of for the multipurpose specimen holder of Nanoprobe-FIB-TEM failure analysis and its application Download PDFInfo
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- CN110133019A CN110133019A CN201910339547.7A CN201910339547A CN110133019A CN 110133019 A CN110133019 A CN 110133019A CN 201910339547 A CN201910339547 A CN 201910339547A CN 110133019 A CN110133019 A CN 110133019A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/2005—Preparation of powder samples therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
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- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
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- Analytical Chemistry (AREA)
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- General Health & Medical Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The present invention relates to a kind of multipurpose specimen holders for Nanoprobe-FIB-TEM failure analysis, comprising: semilune sample stage is the semicircle silicon wafer with window, and TEM chip sample is fixed on the window；Pedestal includes ontology, the first pillar for installing Nanoprobe sample and the second pillar for installing semilune sample stage, and the first pillar and the second pillar are fixedly connected on the body, and ontology has the first pedestal through hole and the second pedestal through hole；Deck has the first deck through hole and the second deck through hole；First deck through hole is adapted to the first pedestal through hole or the second pedestal through hole, and the second deck through hole is adapted to FIB sample card seat stand.The present invention also provides the applications of above-mentioned multipurpose specimen holder.Multipurpose specimen holder according to the present invention is suitable for Nanoprobe, FIB, TEM multiple instruments, eliminates the step of frequently replacing sample stage in different instruments.
Description
Technical field
The present invention relates to Nanoprobe-FIB-TEM failure analyses, relate more specifically to a kind of for Nanoprobe-
The multipurpose specimen holder of FIB-TEM failure analysis and its application.
Background technique
As the characteristic size of super large-scale integration constantly reduces, the integrity problem of electronic component increasingly by
To attention, it is also more more and more urgent that corresponding component failure analyzes demand.Conventional failure analysis method is to first pass through electrical testing
(EMMI, OBIRCH, TIVA etc.) carries out circuit diagnostics, positions defect failure position；Then by physical analysis (SEM, FIB,
TEM etc.) it discloses and characterizes defect, and propose failure basic reason.In this conventional method, electrical testing is in device macroscopic view
Fault Isolation is carried out in structure, is tracked according to electric signal to determine invalid position.However for device microstructural flaws and device
The failure analysis of part soft fault defect, such as metal-oxide-semiconductor exception output characteristics, FET exception output characteristics are needed using more high-resolution
The electrical testing means of rate, such as nano-probe (Nanoprobe) carry out more accurately electrical testing and defect location.
In Nanoprobe test, can be carried out according to demand in sample plane or side surface direction.Nanaoprobe test
After completion, according to the defect found, TEM is carried out (thoroughly using FIB (focused ion beam, Focused Ion beam) technology
Penetrate electron microscope, Transmission electron microscope) sample preparation, such as TEM planar sample, the section TEM
Sample.Tem analysis is finally carried out, failure analysis work is completed.Therefore, in entire Nanoprobe-FIB-TEM failure analysis
Cheng Zhong, the analytical procedure to be passed through of sample is more, and when sample is tested and characterized in different instruments, needs replacing not
Same specimen holder, so cumbersome operating process are easy to cause to damage to sample.This environmental damage is irreversible broken to sample
Damage, and often the device example of carried out failure analysis is also unique.
Summary of the invention
In order to solve the above-mentioned problems of the prior art, the present invention is intended to provide a kind of be used for Nanoprobe-FIB-
The multipurpose specimen holder of TEM failure analysis and its application.
Multipurpose specimen holder of the present invention for Nanoprobe-FIB-TEM failure analysis, comprising: for installing
To the semilune sample stage of TEM sample fixed station, which is the semicircle silicon wafer with window, TEM sheet-like
Product are fixed on the window；Pedestal, the pedestal include ontology, the first pillar for installing Nanoprobe sample and for pacifying
Fill the second pillar of semilune sample stage, wherein the first pillar and the second pillar are fixedly connected on the body, and ontology has first
Pedestal through hole and the second pedestal through hole；For installing to the card of Nanoprobe sample card seat stand and FIB sample card seat stand
Seat, the deck have the first deck through hole and the second deck through hole；Wherein, the first deck through hole and the first pedestal penetrate through
Pedestal installation is fixed to deck, the second deck through hole and FIB sample card seat stand are suitable for hole or the second pedestal through hole adaptation
It is equipped with and deck installation is fixed to FIB sample card seat stand.Preferably, which is TEM planar sample and the section TEM
Sample.
Preferably, which includes pedestal top surface and base bottom surface relative to each other, the first pillar and the second pillar
It is each attached on pedestal top surface, the first pedestal through hole runs through the pedestal top surface and base bottom surface；Ontology further includes that
This opposite front surface and rear surface, be all set between pedestal top surface and base bottom surface and connect pedestal top surface and
Base bottom surface, the second pedestal through hole run through the front surface and rear surface.
Preferably, which includes deck top surface and abutment surface relative to each other, which, which has, uses
In the groove for accommodating pedestal.Preferably, which also has third deck through hole, is located at the second deck through hole
The two sides of groove.
Preferably, the material of pedestal and deck is aluminum titanium alloy.
Preferably, the thickness of the semilune sample stage is less than 200um.
Preferably, the size of the window is 15um long and 10um wide.
The present invention also provides the applications of above-mentioned multipurpose specimen holder, comprising: by Nanoprobe sample and semilune sample
Platform is separately fixed on the first pillar and the second pillar of pedestal, and the first pedestal through hole is aligned simultaneously with the first deck through hole
Pedestal installation is fixed to deck, then deck is directly installed on Nanoprobe sample card seat stand, realizes Nanoprobe
Plane test；Deck is fixed to FIB sample card seat stand by the installation of the second deck through hole, realizes that TEM is flat based on FIB technique
Face sample preparation；Nanoprobe sample and semilune sample stage are removed from pedestal, the TEM planar sample prepared is with half
The moon, shape sample stage was directly installed on TEM sample fixed station, and realization TEM is observed.
The present invention also provides the applications of above-mentioned multipurpose specimen holder, comprising: by Nanoprobe sample and semilune sample
Platform is separately fixed on the first pillar and the second pillar of pedestal, and the first pedestal through hole is aligned simultaneously with the first deck through hole
Pedestal installation is fixed to deck, then deck is directly installed on Nanoprobe sample card seat stand, realizes Nanoprobe
Plane test；Deck is fixed to FIB sample card seat stand by the installation of the second deck through hole, realizes that TEM is cut based on FIB technique
Face sample preparation；Nanoprobe sample and semilune sample stage are removed from pedestal, the TEM cross-sectional sample prepared is with half
The moon, shape sample stage was directly installed on TEM sample fixed station, and realization TEM is observed.
The present invention also provides the applications of above-mentioned multipurpose specimen holder, comprising: by Nanoprobe sample and semilune sample
Platform is separately fixed on the first pillar and the second pillar of pedestal, and the second pedestal through hole is aligned simultaneously with the first deck through hole
Pedestal installation is fixed to deck, then deck is directly installed on Nanoprobe sample card seat stand, realizes Nanoprobe
Side test；Deck is fixed to FIB sample card seat stand by the installation of the second deck through hole, realizes that TEM is cut based on FIB technique
Face sample preparation；Nanoprobe sample and semilune sample stage are removed from pedestal, the TEM cross-sectional sample prepared is with half
The moon, shape sample stage was directly installed on TEM sample fixed station, and realization TEM is observed.
Nanoprobe sample and semilune sample stage pass through the first pillar and the second pillar that silver paste is fixed on pedestal respectively
On, Nanoprobe sample and semilune sample stage are removed from pedestal finally by acetone soln immersion
Multipurpose specimen holder according to the present invention is suitable for Nanoprobe, FIB, TEM multiple instruments, eliminates in different instrument
The step of sample stage is frequently replaced in device.This multipurpose sample stage is applied to Nanoprobe-FIB-TEM FAILURE ANALYSIS TECHNOLOGY,
The more flexible realization various dimensions sample preparation of energy and observing capacity, are more effectively completed device microstructural flaws positioning-table
Sign-analysis series of tasks.
Detailed description of the invention
Fig. 1 show according to a preferred embodiment of the present invention for Nanoprobe-FIB-TEM failure analysis
The preparation flow of the semilune sample stage of multipurpose specimen holder；
Fig. 2 is according to a preferred embodiment of the present invention for the multi-purpose of Nanoprobe-FIB-TEM failure analysis
The schematic diagram of the pedestal of way specimen holder；
Fig. 3 is according to a preferred embodiment of the present invention for the multi-purpose of Nanoprobe-FIB-TEM failure analysis
The schematic diagram of the deck of way specimen holder；
Fig. 4 show according to a preferred embodiment of the present invention for Nanoprobe-FIB-TEM failure analysis
The pedestal of multipurpose specimen holder and the first installation condition of deck；
Fig. 5 show according to a preferred embodiment of the present invention for Nanoprobe-FIB-TEM failure analysis
The pedestal of multipurpose specimen holder and the second installation condition of deck；
Fig. 6 show according to a preferred embodiment of the present invention for Nanoprobe-FIB-TEM failure analysis
Installation condition of the thin slice on semilune sample stage is slightly thinned in the FIB of multipurpose specimen holder.
Specific embodiment
With reference to the accompanying drawing, presently preferred embodiments of the present invention is provided, and is described in detail.
Fig. 1 show according to a preferred embodiment of the present invention for Nanoprobe-FIB-TEM failure analysis
The preparation flow of the semilune sample stage 1 of multipurpose specimen holder, specifically includes: diameter is cut on silicon wafer using Ultrasound Instrument
The circular substrate 11 of 3mm, it is 200um that substrate back, which is thinned to substrate integral thickness, and then diametrically cleavage, obtains semicircle
Substrate 12 (semilune that is otherwise known as substrate) polishes cleavage surface；Using vapour deposition process, sink on the surface of semicircle substrate 12
The Si of one layer of 300nm thickness of product3N4Film；In FIB system, along the diameter of semicircle substrate 12, with ion beam by substrate table
Si in face 15um long, the region 10um wide 12a3N4Film layer is thinned, and exposes following silicon substrate；It is put into KOH solution, reveals
Silicon substrate out is eroded completely by KOH solution, forms the window 1a of a 15um long, 10um wide to get to semilune sample
Platform 1.
Fig. 2 is according to a preferred embodiment of the present invention for the multi-purpose of Nanoprobe-FIB-TEM failure analysis
The schematic diagram of the pedestal 2 of way specimen holder, the pedestal 2 include ontology 21, the first pillar for installing Nanoprobe sample 22a
22 and the second pillar 23 for installing semilune sample stage 1, wherein the first pillar 22 and the second pillar 23 are fixedly connected on this
On body 21.Specifically, ontology 21 includes pedestal top surface 211 and base bottom surface 212 relative to each other, the first pillar 22 and the
Two pillars 23 are each attached on pedestal top surface 211, and ontology 21, which also has, runs through the pedestal top surface 211 and base bottom surface
212 the first pedestal through hole 21a.Ontology 21 further includes front surface 213 and rear surface 214 relative to each other, is all set in
Between pedestal top surface 211 and base bottom surface 212 and pedestal top surface 211 and base bottom surface 212 are connected, ontology 21 also has
There is the second pedestal through hole 21b through the front surface 213 and rear surface 214.In the present embodiment, the material of the pedestal 2 is
Aluminum titanium alloy.
Fig. 3 is according to a preferred embodiment of the present invention for the multi-purpose of Nanoprobe-FIB-TEM failure analysis
The schematic diagram of the deck 3 of way specimen holder, the deck 3 include deck top surface 31 and abutment surface 32 relative to each other, the card
Seat top surface 31 has the groove 31a for accommodating pedestal 2.The deck 3 has the bottom wall and abutment surface of through-going recess 31a
32 the first deck through hole 3a.In the two sides of groove 31a, which, which also has, runs through deck top surface 31 and deck bottom table
The second deck through hole 3b and third deck through hole 3c in face 32.In the present embodiment, the material of the deck 3 is the conjunction of aluminium titanium
Gold.First deck through hole 3a can be adapted to so that the installation of pedestal 2 is fixed to deck 3 with the first pedestal through hole 21a, can also
The installation of pedestal 2 is fixed to deck 3 to be adapted to the second pedestal through hole 21b.The second deck through hole 3b and third card
Seat through hole 3c is adapted to so that the installation of deck 3 is fixed to FIB sample card seat stand with FIB sample card seat stand.
The multipurpose sample for Nanoprobe-FIB-TEM failure analysis according to a preferred embodiment of the present invention
Seat specifically used method include:
Nanoprobe sample 22a and semilune sample stage 1 are separately fixed to the first pillar 22 of pedestal 2 by silver paste
On the second pillar 23, as shown in Figure 2；
First pedestal through hole 21a of pedestal 2 is aligned with the first deck through hole 3a (referring to Fig. 3) and pacifies pedestal 2
Dress is fixed to deck 3, and then deck 3 is directly installed on Nanoprobe sample card seat stand, Nanoprobe sample may be implemented
The test of the in-plane of product 22a, as shown in Figure 4；And/or the second pedestal through hole 21b of pedestal 2 and the first deck are penetrated through
The installation of pedestal 2 is simultaneously fixed to deck 3 by hole 3a (referring to Fig. 3) alignment, and deck 3 is then directly installed on Nanoprobe sample
On deck platform, the test of the side surface direction of Nanoprobe sample 22a may be implemented, as shown in Figure 5；
After Nanoprobe sample test completion, TEM sample making course is carried out directly on sample, i.e., is passed through deck 3
Second deck through hole 3b and third deck through hole 3c (referring to Fig. 3) installation is fixed to FIB sample card seat stand, will
Nanoprobe sample 22a carries out rough be thinned and obtains FIB slightly thinned thin slice, and FIB is slightly thinned to thin slice 22b from Nanoprobe sample
It extracts, is pasted to the window 1a of semilune sample stage 1 in product 22a, as shown in fig. 6, being carried out using method for making sample in situ
FIB reduces the number of thin, completion TEM chip sample preparation；
It is impregnated by acetone soln, Nanoprobe sample 22a and semilune sample stage 1 is removed from pedestal 2, in this way, system
The TEM chip sample got ready can be directly installed on TEM sample fixed station with semilune sample stage 1, to realize that TEM is characterized.
In this way, work as semilune sample stage 1 and pedestal 2, when with the installation of the surface normal direction of semilune sample stage 1, i.e., the
One pedestal through hole 21a is overlapped with the first deck through hole 3a, locks two screw holes, at this point, Nanoprobe plane survey can be carried out
Examination, the TEM planar sample preparation based on FIB technique, TEM observation；And the test of Nanoprobe plane, based on FIB technique
The preparation of TEM cross-sectional sample, TEM observation.When semilune sample stage 1 and pedestal 2, with the surface method perpendicular to semilune sample stage 1
When line direction is installed, i.e. the second pedestal through hole 21b is overlapped with the first deck through hole 3a, locks two screw holes, at this point, can be into
The test of the side row Nanoprobe, the TEM cross-sectional sample preparation based on FIB technique, TEM observation.
Above-described, only presently preferred embodiments of the present invention, the range being not intended to limit the invention, of the invention is upper
Stating embodiment can also make a variety of changes.Made by i.e. all claims applied according to the present invention and description
Simply, equivalent changes and modifications fall within the claims of the invention patent.The not detailed description of the present invention is
Routine techniques content.
Claims (10)
1. a kind of multipurpose specimen holder for Nanoprobe-FIB-TEM failure analysis characterized by comprising
For installing to the semilune sample stage of TEM sample fixed station, which is the semicircle silicon with window
Piece, TEM chip sample are fixed on the window；
Pedestal, the pedestal include ontology, the first pillar for installing Nanoprobe sample and for installing semilune sample stage
The second pillar, wherein the first pillar and the second pillar are fixedly connected on the body, and ontology has the first pedestal through hole and the
Two pedestal through holes；
For installing to the deck of Nanoprobe sample card seat stand and FIB sample card seat stand, which penetrates through with the first deck
Hole and the second deck through hole；
Wherein, the first deck through hole is adapted to so that pedestal installation to be fixed to the first pedestal through hole or the second pedestal through hole
Deck, the second deck through hole are adapted to so that deck installation is fixed to FIB sample card seat stand with FIB sample card seat stand.
2. multipurpose specimen holder according to claim 1, which is characterized in that the ontology includes pedestal top table relative to each other
Face and base bottom surface, the first pillar and the second pillar are each attached on pedestal top surface, and the first pedestal through hole runs through the base
Seat top surface and base bottom surface；Ontology further includes front surface and rear surface relative to each other, is all set in pedestal top surface
Between base bottom surface and pedestal top surface and base bottom surface are connected, the second pedestal through hole runs through the front surface and rear table
Face.
3. multipurpose specimen holder according to claim 1, which is characterized in that the deck includes deck top table relative to each other
Face and abutment surface, the deck top surface have the groove for accommodating pedestal.
4. multipurpose specimen holder according to claim 1, which is characterized in that the material of pedestal and deck is aluminum titanium alloy.
5. multipurpose specimen holder according to claim 1, which is characterized in that the thickness of the semilune sample stage is less than
200um。
6. multipurpose specimen holder according to claim 1, which is characterized in that the size of the window is 15um long and 10um
It is wide.
7. the application of multipurpose specimen holder according to claim 1 to 6 characterized by comprising
Nanoprobe sample and semilune sample stage are separately fixed on the first pillar and the second pillar of pedestal, by first
Pedestal through hole is aligned with the first deck through hole and pedestal installation is fixed to deck, is then directly installed on deck
On Nanoprobe sample card seat stand, the test of Nanoprobe plane is realized；
Deck is fixed to FIB sample card seat stand by the installation of the second deck through hole, TEM plane sample is realized based on FIB technique
Product preparation；
Nanoprobe sample and semilune sample stage are removed from pedestal, the TEM planar sample prepared is with semilune sample
Platform is directly installed on TEM sample fixed station, realizes TEM observation.
8. the application of multipurpose specimen holder according to claim 1 to 6 characterized by comprising
Nanoprobe sample and semilune sample stage are separately fixed on the first pillar and the second pillar of pedestal, by first
Pedestal through hole is aligned with the first deck through hole and pedestal installation is fixed to deck, is then directly installed on deck
On Nanoprobe sample card seat stand, the test of Nanoprobe plane is realized；
Deck is fixed to FIB sample card seat stand by the installation of the second deck through hole, the section TEM sample is realized based on FIB technique
Product preparation；
Nanoprobe sample and semilune sample stage are removed from pedestal, the TEM cross-sectional sample prepared is with semilune sample
Platform is directly installed on TEM sample fixed station, realizes TEM observation.
9. the application of multipurpose specimen holder according to claim 1 to 6 characterized by comprising
Nanoprobe sample and semilune sample stage are separately fixed on the first pillar and the second pillar of pedestal, by second
Pedestal through hole is aligned with the first deck through hole and pedestal installation is fixed to deck, is then directly installed on deck
On Nanoprobe sample card seat stand, the test of the side Nanoprobe is realized；
Deck is fixed to FIB sample card seat stand by the installation of the second deck through hole, the section TEM sample is realized based on FIB technique
Product preparation；
Nanoprobe sample and semilune sample stage are removed from pedestal, the TEM cross-sectional sample prepared is with semilune sample
Platform is directly installed on TEM sample fixed station, realizes TEM observation.
10. the application of the multipurpose specimen holder according to any one of claim 7-9, which is characterized in that Nanoprobe sample
Product and semilune sample stage pass through silver paste respectively and are fixed on the first pillar and the second pillar of pedestal, finally by acetone soln
Nanoprobe sample and semilune sample stage are removed in immersion from pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910339547.7A CN110133019A (en) | 2019-04-25 | 2019-04-25 | It is a kind of for the multipurpose specimen holder of Nanoprobe-FIB-TEM failure analysis and its application |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910339547.7A CN110133019A (en) | 2019-04-25 | 2019-04-25 | It is a kind of for the multipurpose specimen holder of Nanoprobe-FIB-TEM failure analysis and its application |
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| CN110133019A true CN110133019A (en) | 2019-08-16 |
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| CN201910339547.7A Pending CN110133019A (en) | 2019-04-25 | 2019-04-25 | It is a kind of for the multipurpose specimen holder of Nanoprobe-FIB-TEM failure analysis and its application |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116642915A (en) * | 2023-06-16 | 2023-08-25 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Bearing device, sample preparation equipment and sample preparation method |
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| CN107084869A (en) * | 2011-12-01 | 2017-08-22 | Fei 公司 | High-throughput TEM preparation technologies and hardware that dorsal part for viewgraph of cross-section thin layer is thinned |
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| CN116642915A (en) * | 2023-06-16 | 2023-08-25 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Bearing device, sample preparation equipment and sample preparation method |
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