CN110132942B - Metal in-situ analyzer based on irregular sample analysis - Google Patents

Metal in-situ analyzer based on irregular sample analysis Download PDF

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CN110132942B
CN110132942B CN201910493488.9A CN201910493488A CN110132942B CN 110132942 B CN110132942 B CN 110132942B CN 201910493488 A CN201910493488 A CN 201910493488A CN 110132942 B CN110132942 B CN 110132942B
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notch
pillar
metal
wall
screw thread
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CN110132942A (en
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左晓剑
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University of Science and Technology Beijing USTB
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University of Science and Technology Beijing USTB
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges

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Abstract

The invention provides a metal in-situ analyzer based on analysis of irregular samples, which relates to the technical field of metal in-situ analysis, and can be used for carrying out in-situ analysis on regular metals and irregular metals; the analyzer comprises an analyzer body, a power mechanism and a detection mechanism, wherein the power mechanism and the detection mechanism are arranged at the top of the analyzer body; the power mechanism is connected with the detection mechanism; the detection mechanism comprises a detection notch, and a control platform, a regular sample detection structure and an irregular sample detection structure which can move up and down under the action of power are arranged in the detection notch; a spark light source excitation hole is formed in the bottom of the detection notch; the power mechanism is connected with the control platform, the regular sample detection structure and the irregular sample detection structure through a transmission structure. The technical scheme provided by the invention is suitable for the in-situ analysis process of regular and irregular metal samples.

Description

Metal in-situ analyzer based on irregular sample analysis
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of metal in-situ analysis, in particular to a metal in-situ analyzer based on irregular sample analysis.
[ background of the invention ]
The metal in-situ analyzer is characterized in that a scanning system is used for clamping a sample to realize continuous moving excitation, a spectrum radiated by the sample after being excited by a spark light source is transmitted to a grating of a dispersion system through an incident slit, each monochromatic light is focused on a focal plane after being split to form a spectrum, a plurality of emergent slits are arranged on the focal plane, each slit corresponds to an element with a specific wavelength, a characteristic spectral line is projected onto a photomultiplier through the emergent slits to convert an optical signal into an electric signal, and after a weak signal is amplified, the spectral line intensity of each channel is simultaneously acquired by a high-speed data acquisition system; and synchronously recording each spark discharge and the relative position thereof, thereby carrying out quantitative analysis, segregation degree analysis, porosity degree analysis and qualitative analysis of inclusions on each element.
The existing metal in-situ analyzer realizes synchronous analysis of spark light source excitation and mechanical arm scanning through software control, and the mechanical arm can only realize movement in X and Y directions, namely, an analysis area can only be a regular rectangle. When a sample with irregular shape needs to be analyzed in a full coverage mode, the analysis cannot be carried out.
Accordingly, there is a need to develop an in situ metal analyzer based on analyzing irregular specimens that addresses the deficiencies of the prior art to address or mitigate one or more of the problems set forth above.
[ summary of the invention ]
In view of this, the invention provides a metal in-situ analyzer based on an irregular sample analysis, which can perform in-situ analysis on regular metals and irregular metals.
On one hand, the invention provides a metal in-situ analyzer based on an irregular sample analysis, which is characterized by comprising an analyzer body, a power mechanism and a detection mechanism, wherein the power mechanism and the detection mechanism are arranged at the top of the analyzer body; the power mechanism is connected with the detection mechanism;
the detection mechanism comprises a detection notch, and a regular sample clamping structure, an irregular sample clamping structure and a control platform capable of moving up and down under the action of power are arranged in the detection notch; a spark light source excitation hole is formed in the bottom of the detection notch;
the power mechanism is connected with the control platform, the regular sample clamping structure and the irregular sample clamping structure through a transmission structure.
The above aspect and any possible implementation manner further provide an implementation manner, where the power mechanism includes a first stepping motor and a second stepping motor, and drive rods of the first stepping motor and the second stepping motor are arranged in a cross shape; a long shell is arranged on the periphery of the driving rod of the second stepping motor and fixedly connected with the driving rod of the first stepping motor; one end of the transmission structure is connected with the long shell, and the other end of the transmission structure is connected with the detection mechanism.
The above aspects and any possible implementations further provide an implementation, in which the transmission structure includes a support pillar vertically disposed above the elongated housing and a support bar disposed around a periphery of the support pillar; the supporting bars can move up and down along the supporting pillars; the support bar through external connecting rod with control the platform and be connected, through the slope fixed block with regular sample clamping structure connects, through external screw thread pillar with irregular sample clamping structure connects.
The above aspects and any possible implementation manners further provide an implementation manner, wherein the irregular sample clamping structure comprises an inclined magnetic stripe and a magnetic block which are respectively arranged at the end side and the lateral side of the detection groove opening, a fixed disk which is arranged in the detection groove opening in parallel, a supporting pillar which is vertically arranged on the fixed disk, and a rotating unit which is connected with the transmission structure; the rotating unit is connected with the supporting strut, and the supporting strut is connected with the fixed disc in a sliding manner; the periphery of the rotating unit is provided with a gear-shaped rotating disc, and the rotating disc is connected with a motor driving disc.
The above aspect and any possible implementation manner further provide an implementation manner, the rotation unit includes a rotating rod and an external threaded pillar, the external threaded pillar is in threaded connection with the transmission structure, a via hole is formed in the bottom of the rotating rod, an insertion pillar is arranged in the via hole in a penetrating manner, and the insertion pillar is connected with the supporting pillar.
The aspect and any possible implementation manner described above further provide an implementation manner, the fixed disk is arranged on the fixed disk support, the periphery of the fixed disk support is sleeved with the adsorption magnetic blocks, and the adsorption magnetic blocks are connected with the irregular samples.
In the aspect and any possible implementation manner described above, there is further provided an implementation manner, where a slot is provided on the fixed disk, and a long-strip slot block having one end extending out of the slot is provided in the slot; the bottom of support pillar is equipped with the embedding cylinder in the fluting, the lateral wall of cylinder is equipped with protruding cylinder, protruding cylinder with the inner wall sliding connection of rectangular groove block.
In the aspect and any possible implementation manner described above, an implementation manner is further provided, in which an arc groove is formed on the peripheral wall of the external threaded pillar, and arc grooves are formed at both the upper end and the lower end of the arc groove; the arc-shaped groove is characterized in that a vertical rod is connected in the groove opening of the arc-shaped groove in a sliding mode, an external connecting rod is fixedly connected to the outer side of the vertical rod, and the external connecting rod is fixedly connected with the control platform.
The above aspect and any possible implementation manner further provide an implementation manner, wherein the regular sample clamping structure comprises a left bracket and a right bracket which are arranged in parallel, and a mesh plate which is arranged between the left bracket and the right bracket and is used for placing the regular sample; a displacement rod parallel to the left support is arranged on the outer side of the left support and movably connected with the transmission structure; and two ends of the left support are respectively provided with a fixed strut vertical to the left support, and the fixed struts are movably connected with the displacement rod.
The above aspect and any possible implementation further provide an implementation in which the height of the fixing strut is higher than the height of the left bracket and the right bracket.
Compared with the prior art, the invention can obtain the following technical effects: the device can analyze and detect regular metal samples and irregular metal samples, and one device has multiple purposes, so that the detection cost is saved; the detection method is simple, the equipment structure concept is ingenious, and technical resources are developed for metal in-situ analysis equipment.
Of course, it is not necessary for any one product in which the invention is practiced to achieve all of the above-described technical effects simultaneously.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a metal in-situ analyzer based on an irregular sample analysis according to an embodiment of the present invention;
FIG. 2 is a diagram of the internal structure of a spark light control box according to an embodiment of the present invention;
FIG. 3 is a diagram of a detection slot provided in one embodiment of the present invention;
FIG. 4 is an enlarged view of the embodiment provided in FIG. 3 at B;
FIG. 5 is an enlarged view of the embodiment provided in FIG. 3 at D;
FIG. 6 is an enlarged view of the embodiment provided in FIG. 4 at C;
FIG. 7 is an enlarged view of the embodiment provided in FIG. 1 at A;
fig. 8 is a diagram illustrating the intermittent operation of an externally threaded post according to one embodiment of the present invention.
Wherein, in the figure:
1. an analyzer body; 2. a first stepper motor; 3. a spark light source control box; 4. placing the notch; 5. a second stepping motor; 6. an elongated housing; 7. a support block; 8. a support pillar; 9. detecting a notch; 10. a spark light source excitation hole; 11. a console; 12. welding the strips; 13. an input conduit; 14. a magnetic block; 15. a supporting strip; 16. an external threaded pillar; 17. a threaded hole is arranged inside; 18. inclining the magnetic strip; 19. a metal sample; 20. inserting a support column; 21. rotating the rod; 22. a support pillar; 23. a strip groove block; 24. fixing the disc; 25. an adsorption magnetic block; 26. a projecting cylinder; 27. a slider; 28. a strip slot; 29. a projecting pillar; 30. rotating the disc; 31. a right bracket; 32. a limiting block; 33. a motor drive disk; 34. inclining the fixed block; 35. fixing a strut; 36. a cross bolt; 37. a displacement rod; 38. a left bracket; 39. a detachable opening plate; 40. an external connecting rod; 41. a vertical rod; 42. an arc groove; 43. an arc-shaped groove.
[ detailed description ] embodiments
For better understanding of the technical solutions of the present invention, the following detailed descriptions of the embodiments of the present invention are provided with reference to the accompanying drawings.
It should be understood that the described embodiments are only some embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the examples of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
As shown in fig. 1, the invention provides a metal in-situ analyzer for analyzing irregular samples, which comprises an analyzer body 1, wherein a placing notch 4 is formed in the top of the analyzer body 1, a first stepping motor 2 is installed in the notch of the placing notch 4, a second stepping motor 5 is installed on the top of the analyzer body 1, and the second stepping motor 5 is located above the placing notch 4 and is in a cross shape with the placing notch 4. A long shell 6 is installed at the rotating shaft end (namely, the driving rod) of the second stepping motor 5, and the long shell 6 and the placing notch 4 are in a cross shape. The long shell 6 is connected with a driving rod of the second stepping motor 5 in a non-displacement mode in the extending direction of the driving rod, so that the driving rod of the second stepping motor drives the long shell 6 to synchronously stretch when stretching; the driving rod of the long shell 6 and the driving rod of the second stepping motor 5 are movably connected in the direction perpendicular to the driving rod, and the outer wall of the driving rod of the first stepping motor 2 is welded with the outer wall of the long shell 6, so that when the first stepping motor 2 pushes, the long shell 6 moves back and forth (namely, can move along the direction perpendicular to the driving rod of the second stepping motor 5). A supporting block 7 is fixedly connected above the long shell 6, one side of the supporting block 7 is concave, a supporting pillar 8 is installed in the concave opening, and the supporting pillar 8 and the supporting block 7 are both vertical to the upper surface of the long shell 6. The spark light source control box 3 is installed to the one end of keeping away from second step motor 5 in the top of analysis appearance body 1, and detection notch 9 has been seted up on the top of spark light source control box 3. The detection notch 9 and the spark light source control box 3 are both cuboid-shaped, and the long edge of the cuboid is parallel to the placement notch 4.
As shown in fig. 2, a console 11 is installed between inner walls of both end sides of the detection slot 9, a spark light source excitation hole 10 is opened at a top end of the console 11, and welding strips 12 are fixedly connected to both side sides of the console 11. The input conduit 13 is arranged at the bottom of the spark light source exciting hole 10, and the detachable opening plate 39 is arranged above the detection notch 9.
As shown in fig. 3-6, a support strip 15 is disposed around the support post 8, the support strip 15 is a zigzag shape, one end of the support strip 15 is movably connected to the support post 8, and the other end extends to the upper side of the detection slot 9. The supporting bar 15 above the detection notch 9 is provided with a built-in threaded hole 17. An inclined magnetic strip 18 is arranged on the inner wall of one end side of the detection notch 9, a magnetic block 14 is installed on the inner wall of one side of the detection notch 9, and preferably, the magnetic block 14 is arranged on the side close to the placing notch 4.
An external threaded pillar 16 is installed in the notch of the internal threaded hole 17, and a rotating rod 21 is fixedly connected to the bottom of the external threaded pillar 16. The lower end of the rotating rod 21 is provided with a through hole, an inserting support column 20 is inserted in the through hole, one end of the inserting support column 20 is connected with a supporting support column 22, and the connecting mode is welding. The support strut 22 is disposed in parallel with the rotating rod 21.
The bottom of the support pillar 22 is provided with a fixing plate 24, and the upper surface of the fixing plate 24 is provided with a slot. The support struts 22 are seated on the slots. The bottom end of the support post 22 is a cylinder having a diameter less than the width of the slot and the cylinder is inserted into the slot. The two opposite sides of the cylinder are respectively provided with a protruding cylinder 26, and the protruding end of the protruding cylinder 26 is fixedly connected with a sliding block 27. A strip groove block 23 is arranged in the groove, and one end of the strip groove block 23 extends out of the groove. The two sides of the long-strip groove block 23 are provided with long-strip notches 28. The slide block 27 is fitted in the elongated slot 28 and can slide along the elongated slot 28. The sliding block 27 is matched with the size of the long strip notch 28, and the length of the long strip groove block 23 is equal to the diameter of the two fixed disks 24.
The process of realizing the rotation and the lifting of the external thread strut 16 is as follows: the external threaded strut 16 is stressed on the rotating rod 21, the rotating rod 21 is stressed on the supporting strut 22, the supporting strut 22 is stressed on the fixed disk 24, and the fixed disk 24 is stressed on the adsorption magnetic block 25 and rotates.
An adsorption cylinder is arranged below the fixed disk 24, and an adsorption magnetic block 25 is arranged on the periphery of the adsorption cylinder. When the external threaded pillar 16 rotates in the internal threaded hole 17 and moves up and down, the adsorption magnetic block 25 is driven to rotate and simultaneously moves along with the ascending or descending. During detection, the adsorption magnetic block 25 is always in a state of covering the spark light source excitation hole 10. The magnetic adsorption block 25 is driven by the stepping motor, and the magnetic adsorption block 25 rotates above the spark light source excitation hole 10 by a small circle and slowly disperses to rotate by a large circle by combining the adsorption force of the inclined magnetic strip 18 and the magnetic block 14. When the outer edge of the adsorption magnetic block 25 is irregular, the irregular metal sample can be detected due to the repulsion action of the magnetic block 14, so that the detection surface of the device is wider.
The arc groove 42 has been seted up on the lateral wall of external screw thread pillar 16, and the arc wall 43 has all been seted up to the upper and lower end of arc groove 42, and sliding connection has montant 41 in the notch of arc groove 43, fixedly connected with external connecting rod 40 on the outer wall of montant 41, and external connecting rod 40 is its bottom and controls platform 11 welded connection after buckling the form and passing support bar 15. The external connecting rod 40 and the additional structure thereof are arranged, so that the adsorption magnetic block 25 can always cover the upper part of the spark light source excitation hole 10.
Two avris and both ends side that use in this application are for rectangular shape or cuboid, and the side at the long limit place of rectangular shape or cuboid is the avris, and the side at the broadside place of rectangular shape or cuboid is distolateral (the side at both ends place of rectangular shape or cuboid that also is).
As shown in fig. 7, a right bracket 31 and a left bracket 38 are attached to the top left and right sides (both sides) of the spark light source control box 3. The two ends of the right bracket 31 and the left bracket 38 are respectively provided with a fixed pillar 35, and the height of the left bracket 38 and the right bracket 31 is less than that of the fixed pillar 35. The outside of left socle 38 is provided with displacement rod 37, and the upper surface of displacement rod 37 is equipped with the fluting, is equipped with the slider in the fluting. Both ends of the displacement rod 37 are slidably connected to the two fixed pillars 35, respectively, so that the displacement rod 37 can slide along the fixed pillars 35 by an external force. The slidable connection of the displacement rod 37 to the fixed support 35 is: the fixed support 35 is inserted into a through hole at the end of the displacement rod 37. When the device analyzes a regular sample, the sample is fixed by the mechanism in fig. 7, and then the two stepping motors and the power transmission device are matched, so that the mechanism in fig. 7 drives the sample to move in the X and Y directions, and the analysis of a regular area is realized.
The end part of the supporting bar 15 above the detection notch 9 is provided with an inclined fixing block 34, one end of the inclined fixing block 34 is fixedly connected with the supporting bar 15, and the other end is provided with a cross bolt 36. The bolt cap of the cross bolt 36 is connected with the inclined fixing block 34, the bolt head penetrates through the inclined fixing block 34 and extends into the groove of the displacement rod 37, and the bolt head is connected with the sliding block, so that the support bar 15 can slide along the direction of the displacement rod 37 when moving, or the displacement rod 37 can be pulled or pushed to move in the direction perpendicular to the displacement rod 37.
As shown in fig. 8, the external threaded pillar 16 is provided with a rotating disc 30 at the periphery thereof, a motor driving disc 33 is disposed at the side of the rotating disc 30, and a protruding pillar 29 is fixedly disposed at the outer side of the upper surface of the motor driving disc 33. Two limit blocks 32 are fixedly arranged on the periphery of the motor driving disk 33. The rotating disc 30 is integrally gear-shaped, and one tooth of the gear is located between the two limit blocks 32. The motor driving disk 33 drives the protruding support 29 to rotate, the protruding support 29 is located on the peripheral tooth quality inspection of the rotating disk 30, and the external threaded support 16 can generate intermittent action on the rotating disk 30 when rotating.
Pre-treating: regular metal samples and irregular metal samples need to be classified, and the first type detects the regular metal samples.
The working principle is as follows: set up a set of notch 4 of placing through the upper surface at analysis appearance body 1, and place first step motor 2 of notch 4 interior installation, meanwhile at analysis appearance body 1's upper surface reinstallation second step motor 5, wherein place notch 4 and second step motor 5 and present the cross form, control first step motor 2 and second step motor 5, first step motor 2's effect lies in driving second step motor 5 displacement from front to back, and second step motor 5's effect lies in driving supporting shoe 7 displacement from front to back, supporting bar 15 is gone up in the support post 8 cooperation of being connected by the left side of supporting shoe 7, can realize supporting bar 15 about and displacement from top to bottom.
By placing the metal sample above the right bracket 31 and the left bracket 38, the sample with a width larger than the distance between the left bracket 38 and the right bracket 31 is certainly aimed at, and a group of mesh plates which are not metal are arranged between the right bracket 31 and the left bracket 38 and are used for supporting the metal sample. When the support bar 15 moves backwards, the displacement rod 37 can be pulled to displace back and forth on the outer walls of the two groups of fixed pillars 35, and then when the support bar 15 displaces left and right, the cross bolt 36 can be controlled to displace left and right in the notch above the outer wall of the displacement rod 37, so that the rectangular analysis of the spark light source excitation hole 10 on the surface of the metal sample is realized. In the analysis process, the detachable opening plate 39 is detached, the external threaded support column 16 is controlled to rotate and ascend, the control platform 11 connected with the detachable opening plate is made to ascend and is located at the uppermost end of the inner cavity of the detection notch 9, and the regular metal sample covers the spark light source excitation hole 10 to be detected.
The above description is only for samples in which the analysis area is a regular rectangle. If the metal sample of the irregular region of analysis, through dismantling detachable opening plate 39, and rotate through controlling the motor drive dish 33 drive shaft, protruding pillar 29 also can rotate when motor drive dish 33 rotates, and contact the teeth of a cogwheel on the external wall of external screw thread pillar 16, make rolling disc 30 carry out intermittent type formula and rotate, final purpose causes external screw thread pillar 16 to carry out intermittent type formula and rotates, because external screw thread pillar 16 and built-in screw hole 17 are the thread groove connection, external screw thread pillar 16 upwards displaces when external screw thread pillar 16 rotates clockwise, external screw thread pillar 16 downwards displaces when external screw thread pillar 16 anticlockwise rotates.
Considering that the external threaded strut 16 displaces downwards, the rotating rod 21 is pushed to displace downwards, when the rotating rod 21 displaces downwards, the metal sample 19 is pushed to rotationally displace downwards, if the metal sample 19 is irregular, when the metal sample 19 rotates, the irregular part of the metal is in a convex state, or the irregular part of the metal sample is in a concave state, the metal sample is contacted with the magnetic block 14 to be attracted, no matter which one, the magnetic block 14 is used for performing arc rotation on the rotated metal sample, so that when the spark light source excitation hole 10 detects the metal sample 19, firstly, the metal sample 19 is detected from the periphery of the metal sample 19, and the inclined magnetic strip 18 displaces downwards through the rotation of the external threaded strut 16, the inclined magnetic strip 18 is inclined, the metal sample 19 is slowly repelled outwards, and when the uppermost end of the inclined magnetic strip 18 is contacted with the metal sample 19, the metal sample 19 is attracted to move towards the direction of the inclined magnetic strip 18, the spark light source excitation hole 10 is scanned on the rightmost side of the bottom of the metal sample 19 and rotates, after the metal sample 19 slowly moves downwards, the metal sample 19 is repelled outwards, when the metal sample is repelled, the support pillar 22 is used for moving in the direction from inside to outside of the strip-shaped groove block 23, the spark light source excitation hole 10 is enabled to scan the inner side of the periphery of the metal sample 19, one circle of scanning is achieved from the outer ring to the inner ring, and finally the whole analysis is conducted on the surface of the irregular metal sample. In the analysis process, external screw strut 16 upwards displaces when rotating, will drive external connecting rod 40 upwards displacement, but external connecting rod 40 can not rotate, montant 41 that is connected through external connecting rod 40's top is for going into the arc wall 43 for the card in, when external screw strut 16 is carrying out the pivoted time, montant 41 can not rotate, can realize carrying out upwards displacement to external connecting rod 40 that montant 41 outer wall side is connected, the platform 11 upwards displacement is controlled in the pulling simultaneously, make the spark light source who controls on the platform 11 arouse the hole 10 and be covered by the metal specimen when the metal specimen removes all the time.
The sample to be detected that this application is directed against is iron-based metal material, and when carrying out the detection of irregular sample, irregular sample adsorbs on adsorbing magnetic path 25. And the magnetic block 14 and the inclined magnetic strip 18 are arranged for irregular sample detection, and the magnetic block 14 and the inclined magnetic strip 18 need to be detached for avoiding magnetic interference of the regular sample during regular sample detection.
When the magnetic block 14 attracts the metal sample 19, the metal sample 19 displaces towards the magnetic block 14, and the inserting support column 20 is caused to displace towards the right of the through hole below the outer wall of the rotating rod 21, so that the attraction effect is realized, and the irregular metal protruding part or the irregular metal recessed part is scanned.
The invention has the advantages that:
1. according to the invention, the test sample is placed above the right support rod and the left support bracket, the test sample with the width larger than the width of the left support rod and the right support rod is certainly aimed at, a group of non-metal screen plates are arranged between the right support rod and the left support bracket and are used for supporting the test sample, when the support bar moves backwards, the displacement rod is pulled to move forwards and backwards on the outer walls of the two groups of fixed supports, and when the support bar moves leftwards and rightwards, the cross bolt is controlled to move leftwards and rightwards on the notch above the outer wall of the displacement rod, so that rectangular scanning is realized, and the spark light source is used for exciting the hole to;
2. according to the invention, the detachable opening plate can also rotate when the motor driving disk is controlled to rotate and is contacted with the rack on the outer wall of the external threaded strut, so that the rotating disk rotates intermittently, and finally the external threaded strut rotates intermittently, because the external threaded strut and the internal threaded hole are connected by the threaded groove, the external threaded strut moves upwards when the external threaded strut rotates clockwise, and the external threaded strut moves downwards when the external threaded strut rotates anticlockwise;
3. when the spark light source excitation hole is used for detecting a metal sample, the metal sample is firstly detected from the periphery of the metal sample, the metal sample is downwards displaced by rotating the external threaded support, the inclined magnetic strip is inclined and can be slowly repelled outwards, the metal sample can be attracted to be displaced towards the inclined magnetic strip after the uppermost end of the inclined magnetic strip is contacted with the metal sample, the spark light source excitation hole can be scanned at the rightmost side of the bottom of the metal sample and can be rotated, the metal sample can be repelled outwards after the inclined magnetic strip is slowly downwards displaced, the metal sample can be displaced from inside to outside by the support in the repelling process, the spark light source excitation hole can excite the inner side of the periphery of the metal sample, the number of slowly scanned circles is reduced, and the purpose of exciting and scanning irregular metal is achieved;
4. according to the invention, when the external threaded strut moves upwards in a rotating manner, the external connecting rod is driven to move upwards, but the external connecting rod cannot rotate, the vertical rod connected through the top of the external connecting rod is clamped into the arc-shaped groove, and when the external threaded strut rotates, the vertical rod cannot rotate, so that the external connecting rod connected to the outer wall side of the vertical rod can be moved upwards, and meanwhile, the console is pulled to move upwards, so that the spark light source excitation hole on the console is always covered by the metal sample when the metal sample moves;
5. when the regular metal sample is detected, the detachable opening plate is detached, the external threaded strut is controlled to rotate and ascend, so that the control platform connected with the detachable opening plate ascends and is positioned at the uppermost end of the inner cavity of the detection notch, and the regular metal sample always covers the excitation hole to be detected;
6. the equipment provided by the invention fills the blank of detecting irregular metal in the field, and the scheme provided by the invention adopts few mechanical mechanisms, most of the mechanical mechanisms adopt magnetic attraction, so that the cost is effectively controlled.
The metal in-situ analyzer based on irregular sample analysis provided by the embodiment of the application is described in detail above. The above description of the embodiments is only for the purpose of helping to understand the method of the present application and its core ideas; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
As used in the specification and claims, certain terms are used to refer to particular components. As one skilled in the art will appreciate, manufacturers may refer to a component by different names. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. "substantially" means within an acceptable error range, and a person skilled in the art can solve the technical problem within a certain error range to substantially achieve the technical effect. The description which follows is a preferred embodiment of the present application, but is made for the purpose of illustrating the general principles of the application and not for the purpose of limiting the scope of the application. The protection scope of the present application shall be subject to the definitions of the appended claims.
It is also noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a good or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such good or system. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a commodity or system that includes the element.
It should be understood that the term "and/or" as used herein is merely one type of association that describes an associated object, meaning that three relationships may exist, e.g., a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
The foregoing description shows and describes several preferred embodiments of the present application, but as aforementioned, it is to be understood that the application is not limited to the forms disclosed herein, but is not to be construed as excluding other embodiments and is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the application as described herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the application, which is to be protected by the claims appended hereto.

Claims (1)

1. The utility model provides a metal in situ analyzer based on analyze irregular sample, includes metal in situ analyzer body (1), its characterized in that: a placing notch (4) is arranged on the front surface of the top of the metal in-situ analyzer body (1), a first stepping motor (2) is arranged in the notch of the placing notch (4), a second stepping motor (5) is fixedly arranged on the front surface of the top of the metal in-situ analyzer body (1), the second stepping motor (5) is positioned above the placing notch (4), and is crossed with the placing notch (4), the front end of the second stepping motor (5) is provided with a long shell (6), a supporting block (7) is fixedly connected on the front surface of the top of the long shell (6), the left wall of the supporting block (7) is concave, a supporting strut (8) is arranged in the notch, a supporting strip (15) is arranged on the outer wall of the supporting strut (8), a built-in threaded hole (17) is formed in the left side of the front face of the top of the supporting bar (15); the metal in-situ analyzer comprises a metal in-situ analyzer body (1), wherein a spark light source control box (3) is installed on the front left side of the top of the metal in-situ analyzer body, a detection notch (9) is formed in the top end of the spark light source control box (3), a console (11) is installed between the inner walls of the left side and the right side of the detection notch (9), a spark light source excitation hole (10) is formed in the top end of the console (11), welding strips (12) are fixedly connected to the left side and the right side of the console (11), an input line tube (13) is installed at the bottom of the spark light source excitation hole (10), a detachable opening plate (39) is installed above the detection notch (9), a right support rod (31) and a left support (38) are installed on the front left side and the right side of the top of the spark light source control box (3), and a, the height of left socle (38) is less than the height of fixed stay (35), the left side of left socle (38) is provided with displacement pole (37), the outer wall top of displacement pole (37) is the fluting form, slope fixed block (34) is installed at the top of support bar (15), the positive left side fixedly connected with cross bolt (36) in top of slope fixed block (34), the bottom of cross bolt (36) is run through the top of slope fixed block (34) openly to be located in the notch of the outer wall top of displacement pole (37), install external screw thread pillar (16) in the notch of built-in screw hole (17), the bottom fixedly connected with rotary rod (21) of external screw thread pillar (16), the outer wall below of rotary rod (21) is to the perforation form, install grafting pillar (20) in the perforation of the outer wall below of rotary rod (21), the bottom welding of grafting pillar (20) has support pillar (22), the bottom fixedly connected with protrusion cylinder (26) of support pillar (22), the bulge fixedly connected with sliding block (27) of protrusion cylinder (26), the bottom of support pillar (22) is provided with fixed disk (24), the top of fixed disk (24) openly is the fluting form to lie in the notch and install rectangular groove block (23), rectangular notch (28) have all been seted up to the left and right sides of rectangular groove block (23), the middle part of external screw thread pillar (16) has seted up circular arc groove (42), arc wall (43) have all been seted up to the upper and lower extreme of circular arc groove (42), sliding connection has montant (41) in the notch of arc wall (43), fixedly connected with external connecting rod (40) on the outer wall of montant (41), the bottom of external connecting rod (40) with control platform (11) welding, the bottom fixedly connected with of fixed disk (24) adsorbs magnetic path (25), the bottom magnetism that adsorbs magnetic path (25) is connected with metal specimen (19), fixedly connected with slope magnetic stripe (18) on the inner chamber wall of detection notch (9), detect right side inner wall top of notch (9) and install magnetic path (14), rolling disc (30) is installed to external screw thread pillar (16), the right side of rolling disc (30) is provided with motor drive dish (33), outside fixedly connected with protrusion pillar (29) on the top of motor drive dish (33) is openly, fixedly connected with stopper (32) on the outer wall of motor drive dish (33), the outer wall of rolling disc (30) is rack-shaped, the actuating lever outer wall of first step motor (2) with the outer wall welding of microscler shell (6), make first step motor (2) when promoting, displacement around microscler shell (6), if the metal sample of the irregular region of analysis, through dismantling detachable opening plate, and it is rotatory through control motor drive dish drive shaft, protrusion pillar also can rotate when motor drive dish carries out the pivoted, and contact the rack on the external screw thread pillar outer wall, make the rolling disc carry out intermittent type formula and rotate, final purpose causes external screw thread pillar to carry out intermittent type formula and rotates, because external screw thread pillar and built-in screw hole are the thread groove connection, external screw thread pillar upwards displacement when external screw thread pillar is clockwise pivoted, external screw thread pillar downwards displacement when external screw thread pillar anticlockwise rotates.
CN201910493488.9A 2019-06-06 2019-06-06 Metal in-situ analyzer based on irregular sample analysis Active CN110132942B (en)

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CN207866627U (en) * 2018-02-08 2018-09-14 深圳市环宇昌电子有限公司 A kind of elastomeric check device
CN109609921A (en) * 2018-12-19 2019-04-12 中南大学 The magnetic force control device and vacuum equipment of vacuum system
CN208826393U (en) * 2018-07-13 2019-05-07 苏州焜原光电有限公司 Slide glass fixture for MBE equipment

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1370987A (en) * 2002-04-01 2002-09-25 钢铁研究总院 In-situ metal analyzer
CN2590274Y (en) * 2002-12-03 2003-12-03 谭文芳 Double magnet type magnetic suspension rotating apparatus
CN1513752A (en) * 2002-12-31 2004-07-21 中国科学院生物物理研究所 Biomolecule motor magnetic regulating and controlling device
CN201256139Y (en) * 2008-08-01 2009-06-10 攀钢集团研究院有限公司 Special fixture for scanning electronic microscope
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