CN110132139A - A kind of detection device for foreign matter - Google Patents
A kind of detection device for foreign matter Download PDFInfo
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- CN110132139A CN110132139A CN201910401201.5A CN201910401201A CN110132139A CN 110132139 A CN110132139 A CN 110132139A CN 201910401201 A CN201910401201 A CN 201910401201A CN 110132139 A CN110132139 A CN 110132139A
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- foreign matter
- glass substrate
- detection device
- emitter
- reception device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
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- General Physics & Mathematics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention provides a kind of detection device for foreign matter, including detection device and glass substrate.Foreign matter of the detection device on glass substrate described in Scanning Detction；The detection device includes emitter and reception device；The emitter is set to the side of the glass substrate, the direction of travel of the source light direction of illumination of the emitter perpendicular to the glass substrate；And the reception device is set to the other side of the glass substrate, the reception device is corresponding with the emitter, and the camera lens of reception device is offset downward.Detection device for foreign matter of the invention improves the detectability of detection device for foreign matter, reduces the cost of equipment, increases the light source service life of emitter.
Description
Technical field
The present invention relates to testing equipment field, in particular to a kind of detection device for foreign matter.
Background technique
CF (Color Filter, color membrane substrates) foreign body checking machine is different from other inspection measurement equipments, in usual factory
Inspection measurement equipment is detected and is judged both for properties of product, to guarantee that kinds of goods reach quality function demand, but foreign matter out
The purpose for checking machine testing is different.Foreign body checking machine, which is mainly responsible for, carries out height detection to the foreign matter on CF glass substrate,
To guarantee that the Mask (exposure mask) of proximity exposure machine is injury-free, so foreign body checking machine is usually mounted in exposure machine or puts
Before exposure machine.
The light source that foreign body checking machine in the industry uses at present is LED light (light-emitting diode, light-emitting diodes
Pipe), the structure of foreign body checking machine is substantially divided to two kinds.The first design is as shown in Figure 1, the light source 201 on emitter 2 is LED
Light source is radiated at the surface of glass substrate 1 perpendicular to the direction of travel of glass substrate 1 obliquely.Reception device 3 is CCD
(Charge Coupled Device, charge-coupled device) is shot in the upper side of glass substrate 1.Second of design is such as
Shown in Fig. 2, light source 201 is LED light source, is parallel to the direction of travel of glass substrate 1, irradiates obliquely.Emitter 2 distinguishes frame
The two sides of glass substrate 1 are located at, reception device 3 is shot right above glass.
Although two kinds of design structures are not identical, the testing principle of the two is roughly the same.Glass substrate 1 is being advanced
During, reception device 3 (is herein constantly scanned the surface of glass substrate 1 for CCD) and takes pictures.When glass substrate 1
On there are when foreign matter 4, light can there is a phenomenon where reflect and scattering, the light intensity that CCD is received change, the ash in foreign matter region
Grayscale at rank and normal region will generate difference.According to grayscale difference, so that it may find out the area that foreign matter is projected out, then lead to
It crosses software service to be handled, and converts it into approximate circle, at this time the area of round area approximation foreign matter.Such as Fig. 3 institute
Show, virtual diameter of a circle is approximately that foreign matter height is denoted as a, exposure mask between glass substrate 1 at a distance from be denoted as b, as a >=b, when
The judgement of sheet glass substrate 1 is done over again, and follow-up process is terminated；As a < b, when sheet glass substrate 1 determines normally, to flow after continuation, with this
Method guarantees that exposure mask is injury-free.
The defect place of the above method is that the height that foreign body checking machine is detected not is the actual height of foreign matter, only root
According to the numerical value that foreign matter projected area approximation obtains, there are the risks of erroneous judgement.In some cases, very big risk can be caused.
Such as very sharp foreign matter, the foreign matter under photoresist, the foreign matter under glass, the height and reality measured at this time by such method
Actual value is far from each other, or even will appear the case where inspection does not measure, and risk is quite high.
Summary of the invention
The purpose of the present invention is to provide a kind of detection device for foreign matter, by the way that emitter is set to the one of glass substrate
The light source of side, emitter is parallel to the direction of travel of glass substrate.Reception device corresponding with emitter is set to glass
The other side of glass substrate, and the camera lens of reception device is offset downward.The detectability for improving detection device for foreign matter, reduces
The cost of equipment increases the light source service life of emitter.
To achieve the above object, the present invention provides a kind of detection device for foreign matter, including detection device and glass substrate,
In, foreign matter of the detection device on glass substrate described in Scanning Detction；The detection device includes emitter and connects
Receiving apparatus；The emitter is set to the side of the glass substrate, and the source light direction of illumination of the emitter hangs down
Directly in the direction of travel of the glass substrate；And the reception device is set to the other side of the glass substrate, it is described to connect
Receiving apparatus is corresponding with the emitter.
Further, the emitter is used for the surface emitting light towards the glass substrate.
Further, the Ray obliquity is in the surface of the glass substrate.
Further, the reception device is used to receive the light of the emitter transmitting.
Further, the light received is converted to electric signal by the reception device.
Further, when the glass substrate is in traveling process, the reception device is constantly to the glass base
The surface of plate is scanned shooting.
Further, the camera lens of the reception device favours the surface of the glass substrate.
Further, the light source of the emitter is LED light.
Further, the reception device is charge-coupled device.
It further, further include software service, the electric signal that the software service is converted according to the reception device,
The foreign matter is handled.
It is an advantage of the current invention that a kind of detection device for foreign matter is provided, by the way that emitter is set to glass substrate
Side, the direction of travel of the source light direction of illumination of emitter perpendicular to glass substrate.It is corresponding with emitter
Reception device is set to the other side of glass substrate, and the camera lens of reception device is offset downward.Improve detection device for foreign matter
Detectability so that the foreign matter height detected is closer to its actual height；The cost of equipment is reduced, this structure only needs
Want a reception device, so that it may complete the front scan to glass substrate；Increase the light source service life of emitter, one
As brightness can satisfy the use demand, light source need not high brightness running at full capacity.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those skilled in the art, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 show a kind of structural schematic diagram of detection device for foreign matter in the prior art；
Fig. 2 show another structural schematic diagram of detection device for foreign matter in the prior art；
Fig. 3 show the schematic illustration of the detection foreign matter height of the detection device for foreign matter in Fig. 1 and Fig. 2；
Fig. 4 show the structural schematic diagram of detection device for foreign matter in one embodiment of the invention；
Fig. 5 show the schematic illustration of the detection foreign matter height of the detection device for foreign matter in Fig. 4；
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description.Obviously, described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those skilled in the art's every other implementation obtained without making creative work
Example, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise " is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of
The description present invention and simplified description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with spy
Fixed orientation construction and operation, therefore be not considered as limiting the invention.In addition, term " first ", " second " are only used for
Purpose is described, relative importance is not understood to indicate or imply or implicitly indicates the quantity of indicated technical characteristic.
" first " is defined as a result, the feature of " second " can explicitly or implicitly include one or more feature.?
In description of the invention, the meaning of " plurality " is two or more, unless otherwise specifically defined.
Following disclosure provides many different embodiments or example is used to realize different structure of the invention.In order to
Simplify disclosure of the invention, hereinafter the component of specific examples and setting are described.Certainly, they are merely examples, and
And it is not intended to limit the present invention.In addition, the present invention can in different examples repeat reference numerals and/or reference letter,
This repetition is for purposes of simplicity and clarity, itself not indicate between discussed various embodiments and/or setting
Relationship.In addition, the present invention provides various specific techniques and material example, but those of ordinary skill in the art can be with
Recognize the application of other techniques and/or the use of other materials.
The present invention provides a kind of detection device for foreign matter, including detection device and glass substrate 1.Detection device is for scanning
The foreign matter 4 on glass substrate 1 is detected, detection device includes emitter 2 and reception device 3.Specifically, as shown in figure 4, Fig. 4
For the structural schematic diagram of detection device for foreign matter in one embodiment of the invention, comprising: glass substrate 1, emitter 2, reception device 3
And foreign matter 4.
Emitter 2 includes the light source 201 for emitting light.Preferably, in the present embodiment, light source 201 is set to
Emitter 2 is close to one end of glass substrate 1.Emitter 2 is set to the side of glass substrate 1, the light irradiation of light source 201
Direction of travel of the direction perpendicular to glass substrate 1.The Ray obliquity that light source 201 issues is in the surface of glass substrate 1, light irradiation
Angle (not shown) is formed to the surface of glass substrate 1, and with the surface of glass substrate 1, in order to more accurately detect
Foreign matter 4 on glass substrate 1, it is preferable that the angle of the angle is less than 45 degree.Comprehensively consider the service life of light source 201, using ring
The factors such as border, price, in the present embodiment, light source 201 use LED light.
The light that reception device 3 is launched for the light source 201 of receiving and transmitting unit 2 receives after receiving light
Light can be electric signal by optical signal conversion by device 3.In addition to this, glass substrate 1 is during traveling, reception device 3
Constantly the surface of glass substrate 1 can be scanned and be taken pictures.Reception device 3 is corresponding with emitter 2, is set to glass base
The other side of plate 1.Likewise, the light source 201 with emitter 2 is opposite, the camera lens (not shown) of reception device 3 is favoured
The surface of glass substrate 1, slightly offsets downward.
Above-mentioned structure design can reduce the cost of equipment, as soon as because the design of this structure only needs a reception device 3,
The detection of the whole surface to glass substrate 1 may be implemented.Traditional structure needs are counted according to the size of glass substrate 1
It calculates, the number of reception device 3 is more than or equal to one.In addition to this, this structure is also little for the brightness demand of light source 201,
General sufficient brightness is to satisfy the use demand, it is not necessary to use high brightness running at full capacity, the covert use longevity for improving light source 201
Life.
Preferably, in the present embodiment, reception device 3 is CCD (Charge Coupled Device, charge-coupled device
Part) imaging sensor.Ccd image sensor can directly convert optical signals into electric signal, and the current signal is by amplification
With analog-to-digital conversion etc., acquisition, storage, transmission, processing and the reproduction of image are realized.In addition to this, ccd image sensor is significant
Advantage includes: 1. small in volume；2. small power consumption, operating voltage is low, and shock resistance and vibration, performance are stablized, and the service life is long；3. spirit
Sensitivity is high, and noise is low, and dynamic range is big；4. fast response time has self-scanning function, pattern distortion is small, no image retention；5. application is super
The production of lsi technology technology, the degree of integration of pixel is high, accurate size, and merchandized handling is at low cost.Therefore, many is adopted
The instrument of outer diameter is optically measured, using ccd image sensor as photelectric receiver, the present embodiment can also select CCD
Imaging sensor is as photelectric receiver.
Specifically, in the presence of not having foreign matter on glass substrate 1, ccd image sensor during the scanning process, substantially can
It is completely received what LED light source issued, the light reflected on the surface by glass substrate 1, and in the whole process,
The light signal kept stable that ccd image sensor receives.When, there are when foreign matter 4, light source 201 is sent out on glass substrate 1
The light meeting glass substrate 1 of injection and the surface of foreign matter 4 there is a phenomenon where reflection and reflect, what ccd image sensor received
Light signal will change, and the electric signal being converted to changes correspondingly.The grayscale in 4 region of foreign matter and normal glass substrate 1
The grayscale in region will generate difference, and software service receives the electric signal that ccd image sensor is converted to, to the letter of foreign matter 4
Breath carries out processing calculating.
As shown in figure 5, Fig. 5 is the schematic illustration of the detection device for foreign matter detection foreign matter height in Fig. 4.Software service root
It is different according to light grayscale numerical difference, it can soon calculate position and the area of foreign matter 4.According to Fig. 5 as can be seen that when height is 0
When, that is, when do not have foreign matter 4 on glass substrate 1, grayscale numerical value is basicly stable.When detecting foreign matter 4, grayscale numerical value
Can be with the height fluctuation of foreign matter 4, the section of fluctuation corresponds to the actual height of foreign matter 4.Standard particle is reused to carry out constantly
Detection calibration, adjustment parameter reduces error, the last available foreign matter height more accurate compared with traditional design.Compared with
Traditional structure design, the design of this structure improve detectability, the height detected closer to foreign matter 4 actual height, i.e.,
It is that the foreign matter under sharp foreign matter, photoresist, the foreign matter under glass substrate can also detect.
It is an advantage of the current invention that a kind of detection device for foreign matter is provided, by the way that emitter is set to glass substrate
Side, the direction of travel of the source light direction of illumination of emitter perpendicular to glass substrate.It is corresponding with emitter
Reception device is set to the other side of glass substrate, and the camera lens of reception device is offset downward.Improve detection device for foreign matter
Detectability so that the foreign matter height detected is closer to its actual height；The cost of equipment is reduced, this structure only needs
Want a reception device, so that it may complete the front scan to glass substrate；Increase the light source service life of emitter, one
As brightness can satisfy the use demand, light source need not high brightness running at full capacity.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (10)
1. a kind of detection device for foreign matter, which is characterized in that including detection device and glass substrate,
Wherein, foreign matter of the detection device on glass substrate described in Scanning Detction；
The detection device includes emitter and reception device；
The emitter is set to the side of the glass substrate, the source light direction of illumination of the emitter perpendicular to
The direction of travel of the glass substrate；And
The reception device is set to the other side of the glass substrate, and the reception device is corresponding with the emitter.
2. detection device for foreign matter according to claim 1, which is characterized in that the emitter is used for towards the glass base
The surface emitting light of plate.
3. detection device for foreign matter according to claim 2, which is characterized in that the light direction of illumination and the glass base
The angle that the surface of plate is formed is less than 45 degree.
4. detection device for foreign matter according to claim 1, which is characterized in that the reception device is for receiving the transmitting
The light of device transmitting.
5. detection device for foreign matter according to claim 4, which is characterized in that the light that the reception device will receive
Line is converted to electric signal.
6. detection device for foreign matter according to claim 5, which is characterized in that when the glass substrate is in traveling process
In, the reception device is constantly scanned shooting to the surface of the glass substrate.
7. detection device for foreign matter according to claim 6, which is characterized in that the camera lens of the reception device favours described
The surface of glass substrate.
8. detection device for foreign matter according to claim 1, which is characterized in that the light source of the emitter is LED
Lamp.
9. detection device for foreign matter according to claim 1, which is characterized in that the reception device is charge-coupled device.
10. detection device for foreign matter according to claim 1, which is characterized in that it further include software service, the software service
The electric signal converted to the foreign matter image that the reception device receives is handled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910401201.5A CN110132139A (en) | 2019-05-15 | 2019-05-15 | A kind of detection device for foreign matter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910401201.5A CN110132139A (en) | 2019-05-15 | 2019-05-15 | A kind of detection device for foreign matter |
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| CN110132139A true CN110132139A (en) | 2019-08-16 |
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| CN201910401201.5A Pending CN110132139A (en) | 2019-05-15 | 2019-05-15 | A kind of detection device for foreign matter |
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| CN102680496A (en) * | 2011-04-15 | 2012-09-19 | 京东方科技集团股份有限公司 | Foreign body detection device and method |
| CN203083536U (en) * | 2012-12-28 | 2013-07-24 | 京东方科技集团股份有限公司 | Foreign matter detection device |
| CN106814072A (en) * | 2017-03-10 | 2017-06-09 | 昆山华辰重机有限公司 | Roll dressing surface defects detection system and its detection method |
| CN107228841A (en) * | 2016-03-23 | 2017-10-03 | 旭硝子株式会社 | The manufacture method of detection device for foreign matter, foreign matter detecting method and glass plate |
-
2019
- 2019-05-15 CN CN201910401201.5A patent/CN110132139A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101074915A (en) * | 2006-05-15 | 2007-11-21 | 欧姆龙株式会社 | Device, method and program for detecting impurities in a fluid |
| CN101614680A (en) * | 2008-06-26 | 2009-12-30 | 株式会社阿迪泰克工程 | Defect detecting device and method |
| CN101963586A (en) * | 2009-07-23 | 2011-02-02 | 林嘉宏 | Float glass online ripple detection device |
| CN102680496A (en) * | 2011-04-15 | 2012-09-19 | 京东方科技集团股份有限公司 | Foreign body detection device and method |
| CN203083536U (en) * | 2012-12-28 | 2013-07-24 | 京东方科技集团股份有限公司 | Foreign matter detection device |
| CN107228841A (en) * | 2016-03-23 | 2017-10-03 | 旭硝子株式会社 | The manufacture method of detection device for foreign matter, foreign matter detecting method and glass plate |
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Application publication date: 20190816 |