CN110118537A - Deformation and strain synchronized measurement system and measurement method based on speckle interference - Google Patents
Deformation and strain synchronized measurement system and measurement method based on speckle interference Download PDFInfo
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- CN110118537A CN110118537A CN201910505296.5A CN201910505296A CN110118537A CN 110118537 A CN110118537 A CN 110118537A CN 201910505296 A CN201910505296 A CN 201910505296A CN 110118537 A CN110118537 A CN 110118537A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
- G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
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Abstract
The present invention provides a kind of deformation based on speckle interference and strain synchronized measurement system and measurement method, is related to technical field of optical test.It is characterized by comprising laser and beam splitter, the laser of the laser transmitting is divided into transmitted light and reflected light through the beam splitter；The transmitted light exposes to measured object formation after beam expanding lens expands and diffuses；The reflected light successively enters optical path as reference light after optical fiber and Amici prism；It is described to diffuse successively after diaphragm, imaging len, Amici prism and Michelson shear, obtain the two beam object lights with shearing displacement；The reference light that the optical fiber introduces obtains the two beam reference lights with shearing displacement after Michelson shear；The two beam object lights with shearing displacement and the two beam reference lights with shearing displacement are interfered on the target surface of CCD camera, form speckle interference figure.The present invention can carry out speckle to measured object and the synchronous dynamic of shearing detects, and be a kind of lossless, whole audience, high-precision measuring system.
Description
Technical field
The present invention relates to technical field of optical test, and in particular to a kind of deformation and the same pacing of strain based on speckle interference
Amount system and measurement method.
Background technique
Digital speckle interference and digital cutting imagination are all a kind of real-time, whole audience, non-contacting measuring method, in recent years
To be widely used in terms of the NDT of composite of automobile and aerospace industry and play positive effect.Wherein
Speckle interference system only can measure deformation information, and digital cutting imagination system then measures the first derivative of deformation, i.e. strain letter
Breath.In practical applications, whether deformation information or strain information, contribute to the key parameter of defects detection and assessment.
In general, deformation and strain can be converted mutually.Deformation calculates the available components of strain by deriving, and strains
It can be deformed by numerical integration.However, simple calculating numerically is typically more complicated, and it is easy accumulated error,
It cannot get ideal result.Therefore, it develops while measuring the shared measuring system of deformation and strain to cope with the need of practical application
Asking just is particularly important.
Summary of the invention
(1) the technical issues of solving
In view of the deficiencies of the prior art, the present invention provides a kind of deformations based on speckle interference and strain synchro measure system
System and measurement method can be realized the synchronous dynamic detection of the deformation and strain to measured object, simple in measurement system structure, measurement
Method is convenient.
(2) technical solution
In order to achieve the above object, the present invention is achieved by the following technical programs:
On the one hand, a kind of deformation based on speckle interference and strain synchronized measurement system, the measuring system include:
Laser；
The laser of beam splitter, the laser transmitting is divided into transmitted light and reflected light through the beam splitter；
The transmitted light exposes to measured object formation after beam expanding lens expands and diffuses；The reflected light is successively through optical fiber
It is used as reference light to enter optical path with after Amici prism；
It is described to diffuse successively after diaphragm, imaging len, Amici prism and Michelson shear, had
Two beam object lights of shearing displacement；
The reference light that the optical fiber introduces obtains the two beam reference lights with shearing displacement after Michelson shear；
The two beam object lights with shearing displacement and the two beam reference lights with shearing displacement are done on the target surface of CCD camera
It relates to, forms speckle interference figure.
Preferably, the system also includes 4f system supplementary lens and 4f system postposition lens；
Described diffuse successively is sheared through diaphragm, imaging len, Amici prism, 4f system supplementary lens and Michelson
After device, the two beam object lights with shearing displacement are obtained；
After 4f system supplementary lens and Michelson shear, obtain has centainly the reference light that the optical fiber introduces
Two beam reference lights of shearing displacement；
The two beam object lights with shearing displacement and the two beam reference lights with shearing displacement jointly through 4f system postposition lens,
And interfere on the target surface of CCD camera, form speckle interference figure.
Preferably, the Michelson shear includes reflecting mirror and Amici prism.
Preferably, the laser is three laser light sources with different wave length；The beam splitter and beam expanding lens are three
It is a to correspond to different laser light sources；The optical fiber is three and corresponds to different beam splitters；The Amici prism is three right
It should be in different optical fiber；The CCD camera is color camera.
On the other hand, a kind of deformation and strain method for synchronously measuring based on speckle interference, carries out as follows:
Step 1: acquiring the two beam object lights with shearing displacement and the two beam reference lights with shearing displacement in CCD camera
Interfere the intensity I of the speckle interference figure of formation on target surface；
Step 2: Fourier transformation being carried out to the intensity I of the speckle interference image and obtains the space frequency of speckle interference image
It composes FT (I)；
Step 3: setting filter window extracts the portions of the spectrum containing phase information, carries out in Fu to the spectral regions of extraction
Leaf inverse transformation can get the phase distribution of speckle interference and speckle-shearing interferometry；
Step 4: calculating separately the phase difference of testee deformation front and back speckle interference and speckle-shearing interferometry, be tested
Object deformation and strain information.
Preferably, the intensity I of the speckle interference image may be expressed as:
Wherein, * indicates conjugate operation.u1、u2For the two beam reference lights with shearing displacement；u3、u4For two with shearing displacement
Beam object light.
Preferably, the spatial frequency spectrum FT (I) of the speckle interference image may be expressed as:
Wherein,Indicate convolution algorithm；
Its middle termBackground optical information is represented, center is located at coordinate original
Point；
?WithInformation comprising speckle-shearing interferometry, center are located at (f1, 0) and (- f1,
0)；
?WithIt is generated after Michelson shear by reference light, center is located at (f1, 0) and
(-f1,0)；
?WithInformation comprising digital speckle interference, center are located at (f1+fx-f0x,fy-
f0y) and (- f1-fx+f0x,-fy+f0y)；
?WithFor the superposition in two groups of digital speckle interference regions, Wu Fayong
In resolving, center is located at (fx-f0x,fy-f0y) and (f0x-fx,-fy+f0y)；
?WithInformation comprising digital speckle interference, center are located at (- f1+fx-f0x,fy-
f0y) and (f1-fx+f0x,-fy+f0y)。
Preferably, the f0x、f0y、f1It may be expressed as:
Wherein, θ0xAnd θ0yRespectively indicating the component of angle in the x and y direction, θ between reference light and CCD target surface normal is
Michelson shears the angle of shear of shear, and λ is laser wavelength.
Preferably, the phase distribution of the speckle interference and speckle-shearing interferometry may be expressed as:
Wherein, Im and Re respectively indicates the imaginary part and real part of plural number.
Preferably, the phase difference of the speckle interference and speckle-shearing interferometry may be expressed as:
Wherein,For the deformed phase information of measured object；
With the phase differenceWithDeformation and the strain information for characterizing measured object respectively, as testing result.
(3) beneficial effect
The present invention provides a kind of deformations based on speckle interference and strain synchronized measurement system and measurement method.With it is existing
Technology is compared, have it is following the utility model has the advantages that
The present invention is embedded in 4f system, improves the area of single measurement, measurement efficiency can be improved.Mikey is used simultaneously
The inferior interference system of that makes system compact, simple, easily adjusting as shear.To realize to the same of tested composition deformation and strain
Walk dynamic detection, the present invention use spatial carrier technology, realize spectrum reuse, can from single width speckle pattern obtain speckle interference and
The phase information of shear interference.
In addition, color camera can measure the amount on three directions of measured object x, y, z simultaneously, invention is made more to meet practical application
Demand.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the light path schematic diagram of one group of laser of the embodiment of the present invention；
Fig. 2 is the light path schematic diagram of three groups of lasers of the embodiment of the present invention；
Fig. 3 is the structural schematic diagram of one group of laser of the embodiment of the present invention；
Fig. 4 is the schematic diagram of spatial frequency spectrum of the embodiment of the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, to the technology in the embodiment of the present invention
Scheme is clearly and completely described, it is clear that and described embodiments are some of the embodiments of the present invention, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are obtained without creative efforts
The every other embodiment obtained, shall fall within the protection scope of the present invention.
The embodiment of the present application is by providing a kind of deformation based on speckle interference and strain synchronized measurement system and measurement side
Method, the synchronous dynamic that can be realized the deformation and strain to measured object detect, simple in measurement system structure, and measurement method is convenient.
In order to better understand technical solution, in conjunction with appended figures and specific embodiments to technical side
Case is described in detail.
In a first aspect, the embodiment of the present invention provides a kind of deformation based on speckle interference and strain synchronized measurement system, such as
Shown in Fig. 1~3, for the measuring system for detecting measured object 4, affiliated measuring system includes laser 1, beam splitter 2, beam expanding lens
3, diaphragm 5, imaging len 6, optical fiber 7, Amici prism 8,4f system supplementary lens 9, Michelson shear 11, after 4f system
Set lens 10, CCD camera 12.
In specific implementation process, laser 1 can be used as lighting source；The laser that the laser 1 is emitted is through beam splitter 2
After be divided into transmitted light and reflected light；The specific laser 1 can use He-Ne laser, it should be noted that can be it
His laser；
Surface of the transmitted light after beam expanding lens 3 expands as illumination measured object 4, the reflected light successively pass through
Enter optical path as reference light after optical fiber 7 and Amici prism 8；Wherein transmitted light irradiates measured object surface after beam expanding lens is spread,
For the object light of the information of carrying measured object, another beam reflected light is the reference light for not carrying measured object information；
It is described to diffuse successively after diaphragm 5, imaging len 6, Amici prism 8 and Michelson shear 11, it obtains
There must be two beam object lights of shearing displacement；
After the reference light that the optical fiber 7 introduces enters Michelson shear 11, obtaining, there are two beams of shearing displacement to join
Examine light；
The two beam object lights with shearing displacement and the two beam reference lights with shearing displacement are jointly in the target surface of CCD camera 12
Upper interference forms speckle interference figure.
In one embodiment, as shown in Figures 1 to 3, the system also includes 4f system supplementary lens 9 and 4f system postposition lens
10；
It is described to diffuse successively through diaphragm 5, imaging len 6, Amici prism 8,4f system supplementary lens 9 and Michelson
After shear 11, the two beam object lights with shearing displacement are obtained；
The reference light that the optical fiber 7 introduces is had after 4f system supplementary lens 9 and Michelson shear 11
Two beam reference lights of certain shearing displacement；
The two beam object lights with shearing displacement and the two beam reference lights with shearing displacement are jointly through 4f system postposition lens
10, and interfere on the target surface of CCD camera 12, form speckle interference figure.
Supplementary lens 9 and postposition lens 10 constitute 4f system in above-described embodiment, specifically, assuming supplementary lens 9 with after
The focal length for setting lens 10 is f, then the distance of imaging len 6 to supplementary lens 9 is the focal length f ' of f+ imaging len 6, preposition
The distance of mirror 9 to reflecting mirror M2 are f, and the distance of postposition lens 10 to reflecting mirror M1 is f, postposition lens 10 to CCD target surface away from
From for f.Wherein the optical path between supplementary lens 9 and postposition lens 10 be parallel light path, improve the area of single measurement, make be
Unified test amount efficiency improves.
In one embodiment, the Michelson shear includes reflecting mirror and Amici prism.As shown in Figures 1 to 3, specifically
, M1 and M2 are reflecting mirror, the reflectivity of the Amici prism: transmissivity 50:50.
In one embodiment, the laser 1 is three lasers, as shown in Fig. 2, specifically, when the laser is three
When, three optical fiber 7 of beam expanding lens 3, three of beam splitter 2, three of corresponding needs and three Amici prisms 8, CCD camera are
Color camera.
In one embodiment, three lasers 1 launch the laser of different wave length respectively, and optical path is three-dimensional optical path, can
It realizes upwardly-deformed to three sides of measured object x, y, z and strain synchro measure, system is made more to meet the demand of practical application.
7 adjustable space carrier frequency of diaphragm 5 and optical fiber in above-described embodiment, i.e. speckle size on control CCD target surface
With the frequency spectrum size in Fourier.
Reference light is introduced before Michelson shear by optical fiber in above-described embodiment, through Michelson shear
The two beam reference lights with certain shearing displacement are obtained afterwards, and are interfered two-by-two on CCD target surface with two beam object lights.Then in Fourier
In have 16 items, correspond to frequency spectrum in 11 spectrum.The wherein phase diagram of four extractable speckle interferences, two extractable shearings
The phase diagram of measurement.
Second aspect, the embodiment of the present invention also provide a kind of method realized tested composition deformation and strain synchro measure, tool
Body carries out as follows:
Step 1: acquiring the two beam object lights with shearing displacement and the two beam reference lights with shearing displacement jointly in CCD phase
Interfere the intensity I of the speckle interference figure of formation on the target surface of machine 12；
Step 2: Fourier transformation being carried out to the intensity I of the speckle interference image and obtains the space frequency of speckle interference image
It composes FT (I)；
Step 3: setting filter window extracts the portions of the spectrum containing phase information, carries out in Fu to the spectral regions of extraction
Leaf inverse transformation can get the phase distribution of speckle interference and speckle-shearing interferometry；
Step 4: calculating separately the phase difference of testee deformation front and back speckle interference and speckle-shearing interferometry, be tested
Object deformation and strain information.
The intensity I of speckle interference image described in above-described embodiment may be expressed as:
In formula (1), * indicates conjugate operation.u1、u2For the two beam reference lights with shearing displacement；u3、u4For with shearing displacement
Two beam object lights.
The spatial frequency spectrum FT (I) of speckle interference image described in above-described embodiment may be expressed as:
In formula (2),Indicate convolution algorithm.
As shown in figure 4,11 spectrum correspond respectively to 16 items in Fourier in frequency spectrum.
Region A respective itemsBackground optical information is represented, center is located at
Coordinate origin；
B and B ' respectively correspond item in regionWithInformation comprising speckle-shearing interferometry, center difference
Positioned at (f1, 0) and (- f1,0)；
C and C ' respectively correspond item in regionWithIt is generated after Michelson shear by reference light,
Its center is located at (f1, 0) and (- f1,0)；
D and D ' respectively correspond item in regionWithInformation comprising digital speckle interference, center difference
Positioned at (f1+fx-f0x,fy-f0y) and (- f1-fx+f0x,-fy+f0y)；
E and E ' respectively correspond item in regionWithFor two groups of digital speckle interferences
The superposition in region is not used to resolve, and center is located at (fx-f0x,fy-f0y) and (f0x-fx,-fy+f0y)；
F and F ' respectively correspond item in regionWithInformation comprising digital speckle interference, center difference
Positioned at (- f1+fx-f0x,fy-f0y) and (f1-fx+f0x,-fy+f0y)。
F described in above-described embodiment0x、f0y、f1It may be expressed as:
In formula (3), θ0xAnd θ0yThe component of angle in the x and y direction between reference light and CCD target surface normal is respectively indicated,
θ is the angle of shear that Michelson shears shear, and λ is laser wavelength.
The phase distribution of speckle interference described in above-described embodiment and speckle-shearing interferometry may be expressed as:
In formula (3), Im and Re respectively indicate plural imaginary part and real part.
The phase difference of speckle interference described in above-described embodiment and speckle-shearing interferometry may be expressed as:
In formula (4),For the deformed phase information of measured object.
With the phase differenceWithDeformation and the strain information for characterizing measured object respectively, as testing result.
In conclusion compared with prior art, have it is following the utility model has the advantages that
The present invention is embedded in 4f system, improves the area of single measurement, measurement efficiency can be improved.
Michelson interference system is used simultaneously as shear, makes system compact, simple, easily adjusting.To realize
Synchronous dynamic detection to tested composition deformation and strain, the present invention use spatial carrier technology, realize spectrum reuse, can be from list
The phase information of width speckle pattern acquisition speckle interference and shear interference.In addition, color camera can measure measured object x, y, z three simultaneously
Amount on a direction makes invention more meet the demand of practical application.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation
Technical solution documented by example is modified or equivalent replacement of some of the technical features；And these modification or
Replacement, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of deformation based on speckle interference and strain synchronized measurement system, which is characterized in that the measuring system includes:
Laser (1)；
The laser of beam splitter (2), the laser transmitting is divided into transmitted light and reflected light through the beam splitter；
The transmitted light exposes to measured object (4) formation after beam expanding lens (3) expands and diffuses；The reflected light is successively through light
Fine (7) and Amici prism (8) enter optical path as reference light afterwards；
It is described to diffuse successively through diaphragm (5), imaging len (6), Amici prism (8) and Michelson shear (11)
Afterwards, the two beam object lights with shearing displacement are obtained；
After Michelson shear (11), obtaining, there are the reference light that the optical fiber (7) introduces two beams of shearing displacement to refer to
Light；
The two beam object lights with shearing displacement and the two beam reference lights with shearing displacement are done on the target surface of CCD camera (12)
It relates to, forms speckle interference figure.
2. the deformation based on speckle interference and strain synchronized measurement system as described in claim 1, which is characterized in that the system
It further include 4f system supplementary lens (9) and 4f system postposition lens (10)；
It is described to diffuse successively through diaphragm (5), imaging len (6), Amici prism (8), 4f system supplementary lens (9) and mikey
After your inferior shear (11), the two beam object lights with shearing displacement are obtained；
The reference light that the optical fiber introduces is had after 4f system supplementary lens (9) and Michelson shear (11)
Two beam reference lights of certain shearing displacement；
The two beam object lights with shearing displacement and the two beam reference lights with shearing displacement jointly through 4f system postposition lens (10),
And interfere on the target surface of CCD camera (12), form speckle interference figure.
3. the deformation based on speckle interference and strain synchronized measurement system as described in claim 1, which is characterized in that the mikey
Your inferior shear (11) includes reflecting mirror and Amici prism.
4. the deformation based on speckle interference and strain synchronized measurement system as described in claim 1, which is characterized in that the laser
Device (1) is three laser light sources with different wave length；The beam splitter (2) and beam expanding lens (3) are three corresponding to different
Laser light source；The optical fiber (7) is three and corresponds to different beam splitters (2)；The Amici prism (8) is three and corresponds to not
Same optical fiber (7)；The CCD camera (12) is color camera.
5. a kind of measurement method of deformation and strain synchronized measurement system such as any one of Claims 1 to 4 based on speckle interference,
Characterized by comprising the following steps:
Step 1: acquiring the two beam object lights with shearing displacement and the two beam reference lights with shearing displacement in the target surface of CCD camera (12)
The intensity I for the speckle interference figure that upper interference is formed；
Step 2: Fourier transformation being carried out to the intensity I of the speckle interference image and obtains the spatial frequency spectrum FT of speckle interference image
(I)；
Step 3: setting filter window extracts the portions of the spectrum containing phase information, and it is inverse to carry out Fourier to the spectral regions of extraction
Transformation can get the phase distribution of speckle interference and speckle-shearing interferometry；
Step 4: calculating separately the phase difference of testee deformation front and back speckle interference and speckle-shearing interferometry, obtain testee
Deformation and strain information.
6. measurement method as claimed in claim 5, which is characterized in that the intensity I of the speckle interference image may be expressed as:
Wherein, * indicates conjugate operation；u1、u2For the two beam reference lights with shearing displacement；u3、u4For the two beam objects with shearing displacement
Light.
7. measurement method as claimed in claim 5, which is characterized in that the spatial frequency spectrum FT (I) of the speckle interference image can table
It is shown as:
Wherein,Indicate convolution algorithm；
Its middle termBackground optical information is represented, center is located at coordinate origin；
?WithInformation comprising speckle-shearing interferometry, center are located at (f1, 0) and (- f1,0)；
?WithIt is generated after Michelson shear by reference light, center is located at (f1, 0) and (- f1,
0)；
?WithInformation comprising digital speckle interference, center are located at (f1+fx-f0x,fy-f0y) and
(-f1-fx+f0x,-fy+f0y)；
?WithFor the superposition in two groups of digital speckle interference regions, it is not used to solve
It calculates, center is located at (fx-f0x,fy-f0y) and (f0x-fx,-fy+f0y)；
?WithInformation comprising digital speckle interference, center are located at (- f1+fx-f0x,fy-f0y) and
(f1-fx+f0x,-fy+f0y)。
8. measurement method as claimed in claim 7, which is characterized in that the f0x、f0y、f1It may be expressed as:
Wherein, θ0xAnd θ0yRespectively indicating the component of angle in the x and y direction, θ between reference light and CCD target surface normal is mikey
Er Xun shears the angle of shear of shear, and λ is laser wavelength.
9. measurement method as claimed in claim 5, which is characterized in that the phase distribution of the speckle interference and speckle-shearing interferometry
It may be expressed as:
Wherein, Im and Re respectively indicates the imaginary part and real part of plural number.
10. measurement method as claimed in claim 5, which is characterized in that the phase difference of the speckle interference and speckle-shearing interferometry
It may be expressed as:
Wherein,For the deformed phase information of measured object；
With the phase differenceWithDeformation and the strain information for characterizing measured object respectively, as testing result.
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| CN111964601A (en) * | 2020-07-31 | 2020-11-20 | 盐城工学院 | Speckle interference multi-parameter measuring system and method based on Taffy optical path |
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| CN113237430A (en) * | 2021-04-25 | 2021-08-10 | 河南大学 | Shearing speckle interference multi-dimensional strain synchronous measurement system and method based on color camera |
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| CN114322808A (en) * | 2021-12-02 | 2022-04-12 | 上海大学 | Multi-dimensional speckle interference system and real-time measurement method |
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