CN110116559A - Vacuum dryer - Google Patents
Vacuum dryer Download PDFInfo
- Publication number
- CN110116559A CN110116559A CN201910326774.6A CN201910326774A CN110116559A CN 110116559 A CN110116559 A CN 110116559A CN 201910326774 A CN201910326774 A CN 201910326774A CN 110116559 A CN110116559 A CN 110116559A
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- CN
- China
- Prior art keywords
- porous
- cowling panel
- vacuum dryer
- pore size
- distribution density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
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- Drying Of Solid Materials (AREA)
Abstract
The present invention discloses a kind of vacuum dryer, and the vacuum dryer includes: a cavity, a microscope carrier, a porous cowling panel, a porous temperature-adjusting device and a gas extraction arrangement.The vacuum dryer is mainly air-flow variation and the temperature change when adjusting pumping by porous cowling panel and porous temperature-adjusting device, and then makes having good membranes surface uniformity after vacuum drying through the ink-jet film surface on the substrate of inkjet printing.
Description
Technical field
The invention relates to a kind of drying equipments, in particular to a kind of vacuum dryer.
Background technique
In the production process of organic luminescent device, typographical display technology (such as inkjet printing (Ink jet
Printing, IJP)) it quickly grows.The advantages such as inkjet printing has stock utilization high, and equipment price is low.It is beaten using ink-jet
Print method is prepared in organic luminescent device, and key is the adjusting of each thicknesses of layers, because thicknesses of layers (or pattern) is equal
Even property will have a direct impact on the service life of device.
However, during the substrate 11 after inkjet printing is dried using existing vacuum dryer 10, due to
The gas that vacuum pump 12 and pumping outlet valve 13 can all be set to below cavity 14 (as shown in Figure 1A), therefore be formed when pumping
Stream 15 can impact ink surface.Although position is in the thickness or pattern of the film surface 16 of the middle section 11A of the substrate 11
Uniform (as shown in Figure 1B), but 15 meeting of the air-flow so that position the marginal portion 11B of the substrate 11 film surface 16
Thickness or pattern are uneven, and then influence the film surface uniformity (as shown in Figure 1 C) of the substrate 11.
Therefore, it is necessary to a kind of vacuum dryer is provided, to solve the problems of prior art.
Summary of the invention
In view of this, the present invention provides a kind of vacuum dryer, to solve caused by existing vacuum dryer
The problem of film surface lack of uniformity.
A purpose of the present invention is that providing a kind of vacuum dryer, the spray on the substrate through inkjet printing can be made
Ink film face is having good membranes surface uniformity after vacuum drying.
To reach foregoing purpose of the invention, one embodiment of the invention provides a kind of vacuum dryer, wherein the envelope
Vacuum dryer includes: a cavity, a microscope carrier, a porous cowling panel, a porous temperature-adjusting device and gas extraction dress
It sets.The cavity has an accommodating space.The microscope carrier is located in the accommodating space.The porous cowling panel is located at the appearance
In emptying and position is in the top of the microscope carrier, wherein a lower surface of the porous cowling panel faces the microscope carrier, Yi Jisuo
Stating porous cowling panel includes the pore size distribution density reduced towards the outside from center.The porous temperature-adjusting device is located at the appearance
In emptying an and upper surface of the contact porous cowling panel.The gas extraction arrangement is located at the porous temperature and adjusts dress
The accommodating space of the top and the connection cavity set.
In one embodiment of this invention, a material of the porous cowling panel includes ceramics.
In one embodiment of this invention, the pore size distribution density from the center of the porous cowling panel be continuous towards the outside
Decrescence.
In one embodiment of this invention, the center of the pore size distribution density from the porous cowling panel is the stage towards the outside
Formula is decrescence.
In one embodiment of this invention, the porous temperature-adjusting device is a porous cold plate.
In one embodiment of this invention, a temperature adjusting range of the porous cold plate is between 2 to 30 DEG C.
In one embodiment of this invention, the gas extraction arrangement include a mechanical pump and a molecule pumping in extremely
Few one kind.
In one embodiment of this invention, the porous cowling panel includes the multiple regions being distributed towards the outside from center, institute
Stating multiple regions includes: a first area, a second area and a third region.The first area position is in the porous rectification
The center of plate and have one first pore size distribution density.The second area abuts the first area and has one second pore size distribution
Density, wherein the second pore size distribution density is less than the first pore size distribution density.Secondth area described in the third area adjacency
Domain and have a third pore size distribution density, wherein the third pore size distribution density be less than the second pore size distribution density.
In one embodiment of this invention, the multiple region respectively has an area, wherein the area in the multiple region
It is to reduce towards the outside from center.
To reach foregoing purpose of the invention, another embodiment of the present invention provides a kind of vacuum dryers, include: a chamber
Body, a microscope carrier, a ceramic porous cowling panel, a porous cold plate and a gas extraction arrangement.The cavity has an accommodating empty
Between.The microscope carrier is located in the accommodating space.The ceramic porous cowling panel is located in the accommodating space and position is described
The top of microscope carrier, wherein a lower surface of the ceramic porous cowling panel faces the microscope carrier and the ceramic porous rectification
Plate includes the pore size distribution density reduced towards the outside from center.The porous cold plate is located in the accommodating space and contact institute
State a upper surface of ceramic porous cowling panel.The gas extraction arrangement is located at described in the top of the porous cold plate and connection
The accommodating space of cavity.
Compared with prior art, vacuum dryer of the invention mainly passes through porous cowling panel and porous temperature
Regulating device adjusts air-flow variation and the temperature change when pumping, and then the ink-jet film surface on the substrate through inkjet printing is made to exist
Has good membranes surface uniformity after vacuum drying.
For above content of the invention can be clearer and more comprehensible, preferred embodiment is cited below particularly, and cooperate institute's accompanying drawings, makees
Detailed description are as follows:
Detailed description of the invention
Figure 1A is the schematic diagram of existing vacuum dryer.
Figure 1B is after process is dried to substrate using existing vacuum dryer, the middle section of the substrate
The schematic diagram of film surface.
Fig. 1 C is after process is dried to substrate using existing vacuum dryer, the marginal portion of the substrate
The schematic diagram of film surface.
Fig. 2 is the diagrammatic cross-section of the vacuum dryer of one embodiment of the invention.
Specific embodiment
The explanation of following embodiment is to can be used to the particular implementation of implementation to illustrate the present invention with reference to additional schema
Example.Furthermore the direction term that the present invention is previously mentioned, for example, above and below, top, bottom, front, rear, left and right, inside and outside, side, surrounding, in
Centre, it is horizontal, laterally, vertically, longitudinally, axial direction, radial direction, top layer or lowest level etc., be only the direction with reference to annexed drawings.Cause
This, the direction term used is to illustrate and understand the present invention, rather than to limit the present invention.
Shown in referring to figure 2., the vacuum dryer 20 of one embodiment of the invention includes a cavity 21, a microscope carrier 22, one
Porous cowling panel 23, a porous temperature-adjusting device 24 and a gas extraction arrangement 25.The cavity 21 has an accommodating space
211, the accommodating space 211 can be used for accommodating the microscope carrier 22, the porous cowling panel 23 is adjusted with the porous temperature and filled
Set 24.
The microscope carrier 22 of the vacuum dryer 20 of one embodiment of the invention is located in the accommodating space 211, the microscope carrier
22 are mainly used for carrying a substrate 90.In one embodiment, the substrate 90 is, for example, after inkjet printing steps and a surface
The upper substrate 90 with unseasoned ink.In another embodiment, the microscope carrier 22 can have one fixed device (not being painted), example
The substrate as described in fixed by vacuum attraction mode.
The porous cowling panel 23 of the vacuum dryer 20 of one embodiment of the invention is located in the accommodating space 211 and position
In the top of the microscope carrier 22, wherein a lower surface 23A of the porous cowling panel 23 is in face of the microscope carrier 22 and described more
Hole cowling panel 23 includes the pore size distribution density reduced towards the outside from center.In one embodiment, the porous cowling panel 23
Position corresponds to the position of substrate of the position on the microscope carrier 22.Specifically, since the porous cowling panel 23 has from center
The pore size distribution density reduced towards the outside, therefore the substrate, when carrying out vacuum drying step, most of air-flow can flow to institute
The central part of porous cowling panel 23 is stated, and fraction air-flow is then the exterior section for flowing to the porous cowling panel 23.Pass through
Aforesaid way, the ink on the substrate can have excellent film surface uniformity after carrying out vacuum drying step.
In one embodiment, a material of the porous cowling panel 23 includes ceramics.In an example, the porous rectification
Plate 23 is a ceramic porous cowling panel.In another embodiment, the pore size distribution density is from the center of the porous cowling panel 23
Be towards the outside it is continuous decrescence or it is stage decrescence.Hole point in an example, at the center of the porous cowling panel 23
Cloth density is, for example, 70 percentages by volume, and with far from continuous decrescence to 1 percentage by volume at center.In another model
In example, the pore size distribution density at the center of the porous cowling panel 23 is, for example, 70 percentages by volume, and with far from center
Place and it is stage be decrescence 65,60,55,50,45,40,35,30,25,20,15,10,5 or 1 percentage by volume.
In one embodiment, the porous cowling panel 23 includes the multiple regions 231 being distributed towards the outside from center, described more
A region 231 includes: a first area 231A, a second area 231B and a third region 231C.The first area 231A
Position the porous cowling panel 23 center and have one first pore size distribution density.The second area 231B adjacent described first
Region 231A and have one second pore size distribution density, wherein the second pore size distribution density be less than the first pore size distribution density.
The third region 231C abuts the second area 231B and has a third pore size distribution density, wherein the third hole point
Cloth density is less than the second pore size distribution density.In the present embodiment, by the pore size distribution density with reduction (with far from institute
State the center of porous cowling panel 23), it can make the edge of the substrate that there is good membranes surface uniformity.Here it is to be noted that institute
Region greater than three, such as four, five or six or more can be had by stating multiple regions 231, wherein with further away from first
Region 231A and have smaller pore size distribution density.In another embodiment, the multiple region 231 respectively has an area,
Described in multiple regions 231 area from center towards the outside be reduce.Such as it is with the gross area of the porous cowling panel 23
100% calculates, and the area of the first area 231A is that 60%, the second area 231B is 30% and the third region
231C is 10%.In another embodiment, the area in the multiple region 231 is according to set by substrate size.
The porous temperature-adjusting device 24 of the vacuum dryer 20 of one embodiment of the invention is located at the accommodating space 211
Interior and the contact porous cowling panel 23 a upper surface 23B.In one embodiment, the porous temperature-adjusting device 24 is for example
It is a porous cold plate, can be used for controlling the temperature of the porous cowling panel 23.In an example, the porous cold plate can be wrapped
Contain condenser pipe, coolant liquid and compressor.In another example, a temperature adjusting range of the porous cold plate between 2 to
Between 30 DEG C, such as temperature can be adjusted to 3,4,5,7,10,15,20,25,27,28 or 29 DEG C according to the variation of air-flow, so that
Ink on the substrate can have excellent film surface uniformity after carrying out vacuum drying step.Specifically, passing through reduction
The temperature of the porous cowling panel 23 is condensed after ink can be made to volatilize, and then adjusts the atmosphere near film surface.For example, therefrom
The temperature in the multiple region 231 that the heart is distributed towards the outside is continuous or stage reduction, so that position is on the side of the substrate
Has excellent film surface uniformity at edge.
The gas extraction arrangement 25 of the vacuum dryer 20 of one embodiment of the invention is located at the porous temperature and adjusts dress
Set the accommodating space 211 of 24 top and the connection cavity 21.In one embodiment, the gas extraction arrangement 25 includes one
At least one of mechanical pump and molecule pumping.The vacuum dryer 20 of one embodiment of the invention is taken out by the gas
The extraction for the gas for taking device 25 to carry out in the cavity 21, so that the air-flow of the cavity 21 sequentially passes through the porous rectification
Plate 23 (interior hole 232), the porous temperature-adjusting device 24 (interior hole (not being painted)) and be passed to the cavity 21
Except.
From the foregoing, it will be observed that the vacuum dryer 20 of one embodiment of the invention is at least by porous cowling panel 23 and porous temperature
Regulating device 24 is spent to adjust air-flow variation and the temperature change when pumping, and then makes the ink-jet film on the substrate through inkjet printing
Face is having good membranes surface uniformity after vacuum drying.
In entire application, various embodiments are presented in a range format in the present invention.It should be understood that range
The description of form is for convenience and simplicity only, and is not necessarily to be construed as imposing restrictions on the scope of the present invention.Therefore, range
Description should be considered having specifically disclosed the single number in all possible subrange and range.For example, range
Description, from 1 to 6 should be taken into account with specifically disclosed subrange, such as from 1 to 3, from 1 to 4, from 1 to 5, from 2 to 4, from 2 to
6, from 3 to 6 etc. and number in the range, such as 1,2,3,4,5 and 6, no matter the width of range is all applicable in.
The present invention is described by above-mentioned related embodiment, however above-described embodiment is only to implement example of the invention.
It must be noted that, it has been disclosed that embodiment be not limiting as the scope of the present invention.On the contrary, being contained in the spirit of claims
And range modification and impartial setting be included in the scope of the present invention.
Claims (10)
1. a kind of vacuum dryer, it is characterised in that: the vacuum dryer includes:
One cavity has an accommodating space;
One microscope carrier is located in the accommodating space;
One porous cowling panel, is located in the accommodating space and position is in the top of the microscope carrier, wherein the porous cowling panel
A lower surface includes the pore size distribution density reduced towards the outside from center in face of the microscope carrier and the porous cowling panel;
One porous temperature-adjusting device is located in the accommodating space and contacts a upper surface of the porous cowling panel;And
One gas extraction arrangement is located at the accommodating space of the porous thermostatic top and the connection cavity.
2. vacuum dryer as described in claim 1, it is characterised in that: a material of the porous cowling panel includes pottery
Porcelain.
3. vacuum dryer as described in claim 1, it is characterised in that: the pore size distribution density is from the porous cowling panel
Center be towards the outside it is continuous decrescence.
4. vacuum dryer as described in claim 1, it is characterised in that: the pore size distribution density is from the porous cowling panel
Center be towards the outside it is stage decrescence.
5. vacuum dryer as described in claim 1, it is characterised in that: the porous temperature-adjusting device is one porous cold
Solidifying plate.
6. vacuum dryer as claimed in claim 5, it is characterised in that: a temperature adjusting range of the porous cold plate
Between 2 to 30 DEG C.
7. vacuum dryer as described in claim 1, it is characterised in that: the gas extraction arrangement includes a mechanical pump
And one molecule pumping at least one of.
8. vacuum dryer as described in claim 1, it is characterised in that: the porous cowling panel include from center towards the outside
The multiple regions of distribution, the multiple region includes:
One first area, position the porous cowling panel center and have one first pore size distribution density;
One second area abuts the first area and has one second pore size distribution density, wherein the second pore size distribution density
Less than the first pore size distribution density;And
One third region abuts the second area and has a third pore size distribution density, wherein the third pore size distribution density
Less than the second pore size distribution density.
9. vacuum dryer as claimed in claim 8, it is characterised in that: the multiple region respectively has an area, wherein
The area in the multiple region is to reduce towards the outside from center.
10. a kind of vacuum dryer, it is characterised in that: the vacuum dryer includes:
One cavity has an accommodating space;
One microscope carrier is located in the accommodating space;
One ceramic porous cowling panel is located in the accommodating space and position is in the top of the microscope carrier, wherein described ceramic porous
A lower surface of cowling panel includes the hole reduced towards the outside from center in face of the microscope carrier and the ceramic porous cowling panel
Distribution density;
One porous cold plate is located in the accommodating space and contacts a upper surface of the ceramic porous cowling panel;And
One gas extraction arrangement is located at the accommodating space of the top of the porous cold plate and the connection cavity.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910326774.6A CN110116559A (en) | 2019-04-23 | 2019-04-23 | Vacuum dryer |
PCT/CN2019/098164 WO2020215512A1 (en) | 2019-04-23 | 2019-07-29 | Vacuum drying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910326774.6A CN110116559A (en) | 2019-04-23 | 2019-04-23 | Vacuum dryer |
Publications (1)
Publication Number | Publication Date |
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CN110116559A true CN110116559A (en) | 2019-08-13 |
Family
ID=67521384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910326774.6A Pending CN110116559A (en) | 2019-04-23 | 2019-04-23 | Vacuum dryer |
Country Status (2)
Country | Link |
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CN (1) | CN110116559A (en) |
WO (1) | WO2020215512A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110867529A (en) * | 2019-10-22 | 2020-03-06 | 深圳市华星光电半导体显示技术有限公司 | Vacuum cooling drying apparatus and display functional layer drying method |
CN111452517A (en) * | 2020-04-15 | 2020-07-28 | Tcl华星光电技术有限公司 | Reduced pressure drying device and reduced pressure drying method |
CN111873648A (en) * | 2019-08-16 | 2020-11-03 | 广东聚华印刷显示技术有限公司 | Inkjet printing vacuum drying device and inkjet printing method |
CN114122302A (en) * | 2021-11-15 | 2022-03-01 | 深圳市华星光电半导体显示技术有限公司 | Drying device |
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