CN110095858A - Self-adapting optical distorting lens Elastic mode aberration characterizing method - Google Patents

Self-adapting optical distorting lens Elastic mode aberration characterizing method Download PDF

Info

Publication number
CN110095858A
CN110095858A CN201811518306.0A CN201811518306A CN110095858A CN 110095858 A CN110095858 A CN 110095858A CN 201811518306 A CN201811518306 A CN 201811518306A CN 110095858 A CN110095858 A CN 110095858A
Authority
CN
China
Prior art keywords
formula
distorting lens
coordinate
distorting
elastic mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201811518306.0A
Other languages
Chinese (zh)
Other versions
CN110095858B (en
Inventor
王海仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Purple Mountain Observatory of CAS
Original Assignee
Purple Mountain Observatory of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Purple Mountain Observatory of CAS filed Critical Purple Mountain Observatory of CAS
Priority to CN201811518306.0A priority Critical patent/CN110095858B/en
Publication of CN110095858A publication Critical patent/CN110095858A/en
Application granted granted Critical
Publication of CN110095858B publication Critical patent/CN110095858B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012Optical design, e.g. procedures, algorithms, optimisation routines

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The present invention provides a kind of self-adapting optical distorting lens Elastic mode aberration characterizing method.Elastic mode aberration characterization method of the invention is derived from the deformation of distorting lens resonance mode itself, make each rank aberration of Elastic mode polynomial repressentation wavefront Difference Solution, since every mode aberration is all the natural vibration shape of distorting lens itself, correction residual error is smaller, corrects more efficient.

Description

Self-adapting optical distorting lens Elastic mode aberration characterizing method
Technical field
The invention belongs to adaptive optical technique field more particularly to a kind of self-adapting optical distorting lens Elastic mode aberrations Characterizing method.
Background technique
The purpose of adaptive optics is to repair the distortions of the factors to light wave wavefront such as atmospheric turbulance.Adaptive optics first has to Wavefront distorting event is detected, it is then real-time in face of wavefront by being mounted on one piece of small-sized deformable mirror at telescope focal plane rear It is corrected.
Adaptive corrective is carried out, resolves into a series of sum of orthogonal functions to wavefront difference u (r, θ) deformation first, it is as follows Formula:
In above formula, unm(r) cos (n θ) is orthonormal function, i.e. aberration;N indicates symmetry number;M indicates order.
Usually way is to characterize u using zernike polynomial aberration characterization method at presentnm(r) cos (n θ), the total aberration of optics are The sum of each rank aberration, therefore be that can be decomposed by zernike polynomial, however each aberration that this method is decomposed all is artificial Setting.According to adaptive optics General Principle, all aberrations that applies load and can manufacture to distorting lens itself can be rectified Just, it conversely, applying the aberration that load cannot be manufactured to distorting lens itself, then cannot correct, therefore, this method is often deposited It is difficult to correct in some residual errors.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of self-adapting optical distorting lens Elastic mode aberration characterization side Method.In order to which some aspects of the embodiment to disclosure have a basic understanding, simple summary is shown below.The summary portion Dividing is not extensive overview, nor to determine key/critical component or describe the protection scope of these embodiments.It is unique Purpose is that some concepts are presented with simple form, in this, as the preamble of following detailed description.
The present invention adopts the following technical scheme:
In some alternative embodiments, a kind of self-adapting optical distorting lens Elastic mode aberration characterizing method is provided, is wrapped It includes:
The vibration shape differential equation for constructing distorting lens, solves the vibration shape differential equation, derives the bullet of distorting lens Property modal polynomials;
The Elastic mode multinomial is normalized;
Each aberration of Elastic mode multinomial and wavefront Difference Solution after normalization corresponds, and keeps Elastic mode multinomial Each rank aberration of formula expression wavefront Difference Solution.
In some alternative embodiments, the vibration shape differential equation of the building distorting lens, to the vibration shape differential equation It is solved, derives that the polynomial process of the Elastic mode of distorting lens includes:
Cylindrical coordinate, z coordinate direction vertical deformation mirror surface are established, r is distorting lens radial coordinate, and θ is distorting lens circumference Direction angular coordinate;
Obtain distorting lens each components of stress everywhere;
To distorting lens, each components of stress integrate to obtain each coordinate direction of unit length along distorting lens thickness direction everywhere Moment of flexure, further obtains r the and θ coordinate direction shearing of distorting lens unit length, so that the vibration shape differential equation of distorting lens is obtained, The vibration shape differential equation is carried out to solve the Elastic mode multinomial for deriving distorting lens.
In some alternative embodiments, the process for obtaining distorting lens each components of stress everywhere includes:
Each components of strain of distorting lens are obtained by distorting lens amount of deflection, such as formula 1:
Formula 1:
In formula 1, z is distorting lens vertical direction coordinate, and r is distorting lens radial coordinate, and θ is distorting lens circumferencial direction angle seat Mark, wzIt (r) is distorting lens amount of deflection;
When distorting lens is bonded by two layers of different materials, each components of stress are quilting material everywhere, such as formula 2:
Formula 2:
In formula 2, EsAnd vsRespectively indicate quilting material Young's modulus and Poisson's ratio, εr、εθ、εIt is answered for each point of distorting lens Variation amount;
When distorting lens is bonded by two layers of different materials, each components of stress are primer everywhere, such as formula 3:
Formula 3:
In formula 3, EpAnd vpRespectively indicate primer Young's modulus and Poisson's ratio, εr、εθ、εIt is answered for each point of distorting lens Variation amount;
When distorting lens generally same material, E in formula 2 and formula 3 is enableds=Ep, vs=vp
In some alternative embodiments, it is described to distorting lens everywhere each components of stress along distorting lens thickness direction integrate The each coordinate direction moment of flexure of unit length is obtained, r the and θ coordinate direction shearing of distorting lens unit length is further obtained, thus The vibration shape differential equation of distorting lens is obtained, the vibration shape differential equation solve and derives that the Elastic mode of distorting lens is polynomial Process includes:
The neutral surface of distorting lens is defined, if top thickness is h on neutral surface to distorting lensm1, neutral surface to distorting lens bottom Face with a thickness of hm2, then hm1And hm2It indicates are as follows:
Formula 4:
In formula 4, EsIndicate quilting material Young's modulus, EpIndicate primer Young's modulus, hsFor the thickness of quilting material Degree, hpFor the thickness of primer;
To distorting lens, each components of stress integrate to obtain each coordinate direction of unit length along distorting lens thickness direction everywhere Moment of flexure, such as formula 5:
Formula 5:
In formula 5, DsAnd DpMeet formula 6, as follows:
Formula 6:
In formula 5 and formula 6, εr、σθ、σFor distorting lens each components of stress everywhere;hm1It is thick for top surface on neutral surface to distorting lens Degree;hm2For neutral surface to the thickness of distorting lens bottom surface;Z is distorting lens vertical direction coordinate;R is distorting lens radial coordinate;θ is Distorting lens circumferencial direction angular coordinate;wzIt (r) is distorting lens amount of deflection;vsIndicate quilting material Poisson's ratio;vpIndicate primer Poisson Than;EsIndicate quilting material Young's modulus;EpIndicate primer Young's modulus;hsFor the thickness of quilting material;hpFor backsheet The thickness of material;
When distorting lens generally same material, the E in formula 4, formula 5 and formula 6 is enableds=Ep, vs=vp, h=hs+hp
R the and θ coordinate direction shearing that distorting lens unit length is further obtained by formula 6, such as formula 7:
Formula 7:
In formula 7, Mr、Mθ、MθrFor each coordinate direction moment of flexure of distorting lens unit length;
Equivalent shear force is further obtained, such as formula 8:
Formula 8:
In formula 8, Qr、QθIt is sheared for r the and θ coordinate direction of distorting lens unit length;Mr、Mθ、MθrFor distorting lens unit length Each coordinate direction moment of flexure;
The then motion control equation of distorting lens, such as formula 9:
Formula 9:
In formula 9, Qr、QθIt is sheared for r the and θ coordinate direction of distorting lens unit length;
In formula 9, ξ=ρshsphp, formula 10 is obtained according to formula 5, formula 7 and formula 9, as follows:
Formula 10:
In formula 10, wzIt (r) is distorting lens amount of deflection;ξ=ρshsphpD=Ds+Dp, Ds、DpSuch as formula 6;
Due to being simple harmonic oscillation, amount of deflection is formula 11 with complex representation:
Formula 11:wz(r, θ, t)=Re { Wz(r, θ) exp (i ω t) };
Formula 12 is obtained according to formula 10, as follows:
Formula 12:
If the solution of equation 12 is formula 13, as follows:
Formula 13:Wz(r, θ)=un(r)cos(nθ);N indicates symmetry number;
13 substitution formula 12 of wushu obtains formula 14, as follows:
Formula 14:
In formula 14,
The solution of equation 14 is write as the form such as formula 15, as follows:
Formula 15:un(r)=A1, nJn(λr)+A2, nYn(λr)+A3, nIn(λr)+A4, nKn(λr);
In formula 15, λ42ξ/D;Jn(λr)、Yn(λr)、In(λr)、Kn(λ r) be respectively the n rank first kind, the second class of n rank, Correct the n rank first kind and amendment n rank bessel function of the second kind;
In formula 15, Yn(λ r) and Kn(λ r) be it is infinite, enable A2,n=A4,n=0, then formula 15 rewrites an accepted way of doing sth 16, as follows:
Formula 16:un(r)=A1, nJn(λr)+A3, nIn(λr);
Matrix equation is obtained, such as formula 19:
As can be seen that two unknown number A to be asked from equation 191,n、A3,nλ is all relied on, formula 19 has trivial solution, then There is formula 20:
Formula 20:
The value of λ a series of is obtained according to formula 20, the value of each λ is substituted into formula 19, obtains two unknown number A1,n、A3,nOne As related solution, one of unknown number can indicate with another unknown number, A3,nBy A1,nIt is indicated multiplied by related coefficient.
In some alternative embodiments, the process Elastic mode multinomial being normalized includes:
20 particular solution of formula isM indicates the order of mode, and m depends on λ, when taking A1,n=1, general normalized solution is such as Formula 21:
Formula 21:
In formula 21,
The utility model has the advantages that Elastic mode aberration characterization method of the invention is derived from distorting lens mode of resonance itself brought by of the invention The deformation of state makes each rank aberration of Elastic mode polynomial repressentation wavefront Difference Solution, since every mode aberration is all distorting lens The natural vibration shape itself, correction residual error is smaller, corrects more efficient.
For the above and related purposes, one or more embodiments include being particularly described below and in claim In the feature that particularly points out.Certain illustrative aspects are described in detail in the following description and the annexed drawings, and its instruction is only Some modes in the utilizable various modes of the principle of each embodiment.Other benefits and novel features will be under The detailed description in face is considered in conjunction with the accompanying and becomes obvious, the disclosed embodiments be all such aspects to be included and they Be equal.
Detailed description of the invention
Fig. 1 be distorting lens edge of the present invention be free state when distorting lens configuration;
Fig. 2 is the configuration of distorting lens of the present invention distorting lens when simple support at edge r=a;
Fig. 3 is distorting lens of the present invention under free boundary condition, the distorting lens deformation function u as the order m=1 of modemn (r) with radius r variation diagram;
Fig. 4 is distorting lens of the present invention under the conditions of simply support boundary, the distorting lens deformation letter as the order m=1 of mode Number umn(r) with radius r variation diagram;
Fig. 5 is distorting lens of the present invention under free boundary condition, the deformation as the order m=1 of mode and symmetry number n=0 Function umn(r,θ);
Fig. 6 is distorting lens of the present invention under free boundary condition, the deformation as the order m=2 of mode and symmetry number n=0 Function umn(r,θ);
Fig. 7 is distorting lens of the present invention under free boundary condition, the deformation as the order m=1 of mode and symmetry number n=1 Function umn(r,θ);
Fig. 8 is distorting lens of the present invention under free boundary condition, the deformation as the order m=2 of mode and symmetry number n=1 Function umn(r,θ);
Fig. 9 is distorting lens of the present invention under free boundary condition, the deformation as the order m=3 of mode and symmetry number n=1 Function umn(r,θ);
Figure 10 is distorting lens of the present invention under free boundary condition, the deformation as the order m=4 of mode and symmetry number n=1 Function umn(r,θ);
Figure 11 is distorting lens of the present invention under simply support boundary condition, as the order m=1 of mode and symmetry number n=0 Deformation function umn(r,θ);
Figure 12 is distorting lens of the present invention under simply support boundary condition, as the order m=2 of mode and symmetry number n=0 Deformation function umn(r,θ);
Figure 13 is distorting lens of the present invention under simply support boundary condition, as the order m=1 of mode and symmetry number n=1 Deformation function umn(r,θ);
Figure 14 is distorting lens of the present invention under simply support boundary condition, as the order m=2 of mode and symmetry number n=1 Deformation function umn(r,θ);
Figure 15 is distorting lens of the present invention under simply support boundary condition, as the order m=3 of mode and symmetry number n=1 Deformation function umn(r,θ);
Figure 16 is distorting lens of the present invention under simply support boundary condition, as the order m=4 of mode and symmetry number n=1 Deformation function umn(r,θ);
Figure 17 is Elastic mode deformation function pair under zernike polynomial Z4 and two arbitrary boundary conditions of the invention and when n=0 Than figure;
Figure 18 is Elastic mode deformation function pair under zernike polynomial Z7 and two arbitrary boundary conditions of the invention and when n=1 Than figure;
Figure 19 is zernike polynomial Z5, Z9, Z14 and distorting lens of the present invention under two arbitrary boundary conditions of free boundary condition And Elastic mode deformation function comparison diagram when n=2, n=3 and n=4;
Figure 20 be zernike polynomial Z12, Z18, Z19 and distorting lens of the present invention carry simply support boundary under the conditions of and n =2, Elastic mode deformation function comparison diagram when n=3 and n=4.
Specific embodiment
The following description and drawings fully show specific embodiments of the present invention, to enable those skilled in the art to Practice them.Other embodiments may include structure, logic, it is electrical, process and other change.Embodiment Only represent possible variation.Unless explicitly requested, otherwise individual components and functionality is optional, and the sequence operated can be with Variation.The part of some embodiments and feature can be included in or replace part and the feature of other embodiments.This hair The range of bright embodiment includes equivalent obtained by the entire scope of claims and all of claims Object.
In some illustrative embodiments, a kind of self-adapting optical distorting lens Elastic mode aberration characterizing method is provided, It is to be manually set relative to zernike polynomial, the essence of Elastic mode aberration characterizing method of the invention is derived from mirror itself The deformation of resonance mode.
Adaptive optics is to compensate each rank aberration by changing the shape of distorting lens, since zernike polynomial is people For setting, mirror to be made to become aberration represented by zernike polynomial i.e. shape, it is relatively difficult, but mirror to be made to become elasticity The aberration that mode indicates is easier, because of shape when this shape originally resonates from mirror itself.
Elastic mode aberration characterizing method of the invention includes:
S1: constructing the vibration shape differential equation of distorting lens, solves to the vibration shape differential equation, derives distorting lens Elastic mode multinomial.
The Elastic mode polynomial equation of distorting lens is derived based on dynamic elasticity.
S2: the Elastic mode multinomial is normalized.Elastic mode multinomial after normalization is by inexhaustible number Multinomial complete set composition, it there are two variable, r and θ, it is continuous orthogonal inside unit circle.
S3: each aberration of Elastic mode multinomial and wavefront Difference Solution after normalization corresponds, and makes Elastic mode Each rank aberration of polynomial repressentation wavefront Difference Solution.
Wherein, the process of S1 includes:
Cylindrical coordinate, z coordinate direction vertical deformation mirror surface are established, r is distorting lens radial coordinate, and θ is distorting lens circumference Direction angular coordinate;
Obtain distorting lens each components of stress everywhere;
To distorting lens, each components of stress integrate to obtain each coordinate direction of unit length along distorting lens thickness direction everywhere Moment of flexure, further obtains r the and θ coordinate direction shearing of distorting lens unit length, so that the vibration shape differential equation of distorting lens is obtained, The vibration shape differential equation is carried out to solve the Elastic mode multinomial for deriving distorting lens.
As illustrated in fig. 1 and 2, when distorting lens is bonded by two layers of different materials, respectively quilting material and backsheet Material, such as quilting material are glass material, and primer is piezoceramic material.Set glass material layer with a thickness of hs, pressure Electroceramics material layer with a thickness of hp, distorting lens diameter is 2a.When distorting lens generally same material, distorting lens integral thickness For h, h=h at this times+hp
Cylindrical coordinate is established, z coordinate direction vertical deformation mirror surface, distorting lens thickness direction is consistent, and r is that distorting lens is radial Coordinate, θ are distorting lens circumferencial direction angular coordinate.
Assuming that (hs+hp)/a < < 1, then each components of strain of distorting lens are obtained by distorting lens amount of deflection are as follows:
Formula 1:
In formula 1, z is distorting lens vertical direction coordinate, and r is distorting lens radial coordinate, and θ is distorting lens circumferencial direction angle seat Mark, wzIt (r) is distorting lens amount of deflection.
It is each everywhere to obtain quilting material when distorting lens is bonded by two layers of different materials according to theory of elastic mechanics The components of stress:
Formula 2:
In formula 2, EsAnd vsRespectively indicate quilting material Young's modulus and Poisson's ratio;εr、εθ、γγθIt is answered for each point of distorting lens Variation amount.
When distorting lens is bonded by two layers of different materials, primer each components of stress everywhere are as follows:
Formula 3:
In formula 3, EpAnd vpRespectively indicate primer Young's modulus and Poisson's ratio;εγ、εθ、γγθFor each point of distorting lens The components of strain.
When distorting lens generally same material, E in formula 2 and formula 3 is enableds=Ep, vs=vp
The neutral surface of distorting lens is defined, neutral surface is the neutral surface for neither shortening nor extending, i.e., is not pressurized and not Tension, neutral surface are the interfaces of drawing zone and compressional zone on round distorting lens.
If top thickness is h on neutral surface to distorting lensm1, neutral surface is to distorting lens bottom surface with a thickness of hm2, then hm1With hm2It is expressed as formula 4:
Formula 4:
In formula 4, EsIndicate quilting material Young's modulus;EpIndicate primer Young's modulus;hsFor the thickness of quilting material Degree;hpFor the thickness of primer.
To distorting lens, each components of stress integrate to obtain each coordinate direction of unit length along distorting lens thickness direction everywhere Moment of flexure, such as formula 5:
Formula 5:
In formula 5, DsAnd DpMeet formula 6, as follows:
Formula 6:
In formula 5 and formula 6, σr、σθ、τγθFor distorting lens each components of stress everywhere;hm1It is thick for top surface on neutral surface to distorting lens Degree;hm2For neutral surface to the thickness of distorting lens bottom surface;Z is distorting lens vertical direction coordinate;R is distorting lens radial coordinate;θ is Distorting lens circumferencial direction angular coordinate;wzIt (r) is distorting lens amount of deflection;vsIndicate quilting material Poisson's ratio;vpIndicate primer Poisson Than;EsIndicate quilting material Young's modulus;EpIndicate primer Young's modulus;hsFor the thickness of quilting material;hpFor backsheet The thickness of material.
When distorting lens generally same material, the E in formula 4, formula 5 and formula 6 is enableds=Ep, vs=vp, h=hs+hp
R the and θ coordinate direction shearing that distorting lens unit length is further obtained by formula 6, such as formula 7:
Formula 7:
In formula 7, Mr、Mθr、MθrFor each coordinate direction moment of flexure of distorting lens unit length.
Equivalent shear force is further obtained, such as formula 8:
Formula 8:
In formula 8, Qr、QθIt is sheared for r the and θ coordinate direction of distorting lens unit length;Mr、Mθ、MθrFor distorting lens unit length Each coordinate direction moment of flexure.
The then motion control equation of distorting lens, such as formula 9:
Formula 9:
In formula 9, Qr、QθIt is sheared for r the and θ coordinate direction of distorting lens unit length.
In formula 9, ξ=ρshsphp, formula 10 is obtained according to formula 5, formula 7 and formula 9, as follows:
Formula 10:
In formula 10, wzIt (r) is distorting lens amount of deflection;ξ=ρshsphpD=Ds+Dp, Ds、DpSuch as formula 6.
Due to being simple harmonic oscillation, amount of deflection can be formula 11 with complex representation:
Formula 11:wz(r, θ, t)=Re { Wz(r, θ) exp (i ω t) };
Formula 12 is obtained according to formula 10, as follows:
Formula 12:
If the solution of equation 12 is formula 13, as follows:
Formula 13:Wz(r, θ)=un(r)cos(nθ);N indicates symmetry number.
13 substitution formula 12 of wushu obtains formula 14, as follows:
Formula 14:
In formula 14,
The solution of equation 14 is write as the form such as formula 15, as follows:
Formula 15:un(r)=A1, nJn(λr)+A2, nYn(λr)+A3, nIn(λr)+A4, nKn(λr)。
In formula 15, λ42ξ/D;Jn(λr)、Yn(λr)、In(λr)、Kn(λ r) be respectively the n rank first kind, the second class of n rank, Correct the n rank first kind and amendment n rank bessel function of the second kind.
In formula 15, Yn(λ r) and Kn(λ r) be it is infinite, enable A2,n=A4,n=0, then formula 15 rewrites an accepted way of doing sth 16, as follows:
Formula 16:un(r)=A1, nJn(λr)+A3, nIn(λr);
Here consider two arbitrary boundary conditions.
First arbitrary boundary conditions then have formula 17 as shown in Figure 1, distorting lens edge is free state:
Formula 17:Mr(a)=0, Vr(a)=0;
Second arbitrary boundary conditions then have formula 18 as shown in Fig. 2, distorting lens is simply supported in r=a:
Formula 18:un(a)=0, Mr(a)=0;
Matrix equation can be obtained by two arbitrary boundary conditions, such as formula 19:
As can be seen that two unknown number A to be asked from equation 191,n、A3,nλ is all relied on, formula 19 has trivial solution, then There is formula 20:
Formula 20:
The value of λ a series of is obtained according to formula 20, the value of each λ is substituted into formula 19, obtains two unknown number A1,n、A3,nOne As related solution, one of unknown number can indicate with another unknown number.So A3,nIt can be by A1,nMultiplied by related coefficient To indicate.
20 particular solution of formula isM indicates that the order of mode, m depend on λ.When taking A1,n=1, general normalized solution is such as Formula 21:
Formula 21:
In formula 21,
Therefore, wavefront difference u (r, θ) can be decomposed into, such as formula 22:
Formula 22:
In formula 22, n indicates symmetry number, and m indicates order.
Carry out numerical simulation explanation.
For being 165mm bimorph deformable mirror with a bore.
The parameter of glass material: Es=190GPa;νs=0.30;ρS=2350kg/m3;hs=1mm.
Piezoelectric material selects PZT-5H, material parameter: Ep=55GPa;νp=0.40;hp=2mm.
Provide the smaller two-dimensional deformation function u of symmetry number nmn(r) and three-dimensional deformation function umn(r,θ).It can from Fig. 3 Fig. 4 To find out deformation function umn(r) radius r is depended on.From formula 19 and formula 20 it is known that for different n value umn(r) mutually just It hands over.For identical n, umnIt (r) is also orthogonal for different rank m.What is presented from the edge Fig. 3 is free vibration mode.From Shown in Fig. 4, it can be seen that distorting lens edge is fixed.Fig. 5 to Figure 16 is three-dimensional deformation function figure, umn(r, θ) is orthogonal Function.Fig. 5 to Figure 10 is similar zernike polynomial Z4, Z11, Z7, Z5, Z9 and Z14 respectively.Figure 11 to Figure 16 is analogous respectively to Zernike polynomial Z4, Z11, Z7, Z12, Z18 and Z25.
As can be seen from Figure 17 Z4 and distorting lens of the present invention Elastic mode deformation under free boundary condition and when n=0 Function coincide substantially, with distorting lens of the present invention simply support boundary under the conditions of and n=0 Elastic mode deformation function have one it is whole Body rigid displacement.
As can be seen from Figure 18 Z7 and distorting lens of the present invention are under free boundary condition and n=1 Elastic mode deformation letter Base sheet is coincide, and with distorting lens of the present invention under the conditions of simply support boundary and n=1 Elastic mode deformation function in peak value and Difference is obvious on marginal value.
As can be seen from Figure 19 Z5, Z9, Z14 curvature of curve are respectively than distorting lens of the present invention at two kinds of free boundary condition Elastic mode deformation function curvature is slightly big under boundary condition and when n=2, n=3 and n=4, but variation tendency is almost the same.
As can be seen from Figure 20 distorting lens of the present invention is under the conditions of carrying simple support boundary and when n=2, n=3 and n=4 Curve values are both greater than 0, and in addition to being 0 at r=0 and r=1, and Z12, Z1 and Z19 are negative in edge.
As shown in Fig. 3 to Figure 20, it can be seen that zernike polynomial aberration characterization method and distorting lens of the present invention are in free margins Elastic mode aberration method under the conditions of boundary is coincide substantially, but with simply support boundary under the conditions of Elastic mode aberration difference ratio It is larger.Therefore, zernike polynomial aberration characterization method is used to handle aberration table when distorting lens is simple support boundary condition Sign is not optimal, preferably proposed by the invention Elastic mode aberration characterizing method.
It should also be appreciated by one skilled in the art that various illustrative logical boxs, mould in conjunction with the embodiments herein description Electronic hardware, computer software or combinations thereof may be implemented into block, circuit and algorithm steps.In order to clearly demonstrate hardware and Interchangeability between software surrounds its function to various illustrative components, frame, module, circuit and step above and carries out It is generally described.Hardware is implemented as this function and is also implemented as software, depends on specific application and to entire The design constraint that system is applied.Those skilled in the art can be directed to each specific application, be realized in a manner of flexible Described function, still, this realization decision should not be construed as a departure from the scope of protection of this disclosure.

Claims (5)

1. self-adapting optical distorting lens Elastic mode aberration characterizing method characterized by comprising
The vibration shape differential equation for constructing distorting lens, solves the vibration shape differential equation, derives the springform of distorting lens State multinomial;
The Elastic mode multinomial is normalized;
Each aberration of Elastic mode multinomial and wavefront Difference Solution after normalization corresponds, and makes Elastic mode polynomial table Each rank aberration of Difference Solution before oscillography.
2. self-adapting optical distorting lens Elastic mode aberration characterizing method according to claim 1, which is characterized in that described The vibration shape differential equation for constructing distorting lens, solves the vibration shape differential equation, derives that the Elastic mode of distorting lens is more The process of formula includes:
Cylindrical coordinate, z coordinate direction vertical deformation mirror surface are established, r is distorting lens radial coordinate, and θ is distorting lens circumferencial direction Angular coordinate;
Obtain distorting lens each components of stress everywhere;
To distorting lens, each components of stress integrate to obtain each coordinate direction moment of flexure of unit length along distorting lens thickness direction everywhere, R the and θ coordinate direction shearing for further obtaining distorting lens unit length, so that the vibration shape differential equation of distorting lens is obtained, to vibration The type differential equation carries out solving the Elastic mode multinomial for deriving distorting lens.
3. self-adapting optical distorting lens Elastic mode aberration characterizing method according to claim 2, which is characterized in that described The process for obtaining distorting lens each components of stress everywhere includes:
Each components of strain of distorting lens are obtained by distorting lens amount of deflection, such as formula 1:
Formula 1:
In formula 1, z is distorting lens vertical direction coordinate, and r is distorting lens radial coordinate, and θ is distorting lens circumferencial direction angular coordinate, wz It (r) is distorting lens amount of deflection;
When distorting lens is bonded by two layers of different materials, each components of stress are quilting material everywhere, such as formula 2:
Formula 2:
In formula 2, EsAnd vsRespectively indicate quilting material Young's modulus and Poisson's ratio, εr、εθ、γFor each point Ying Bianfen of distorting lens Amount;
When distorting lens is bonded by two layers of different materials, each components of stress are primer everywhere, such as formula 3:
Formula 3:
In formula 3, EpAnd vpRespectively indicate primer Young's modulus and Poisson's ratio, εr、εθ、γFor each point Ying Bianfen of distorting lens Amount;
When distorting lens generally same material, E in formula 2 and formula 3 is enableds=Ep, vs=vp
4. self-adapting optical distorting lens Elastic mode aberration characterizing method according to claim 3, which is characterized in that described To distorting lens, each components of stress integrate to obtain each coordinate direction moment of flexure of unit length along distorting lens thickness direction everywhere, into one Step obtains r the and θ coordinate direction shearing of distorting lens unit length, so that the vibration shape differential equation of distorting lens is obtained, it is micro- to the vibration shape Divide equation to carry out solution and derives that the polynomial process of the Elastic mode of distorting lens includes:
The neutral surface of distorting lens is defined, if top thickness is h on neutral surface to distorting lensm1, neutral surface to distorting lens bottom surface With a thickness of hm2, then hm1And hm2It indicates are as follows:
Formula 4:
In formula 4, EsIndicate quilting material Young's modulus, EpIndicate primer Young's modulus, hsFor the thickness of quilting material, hpFor The thickness of primer;
To distorting lens, each components of stress integrate to obtain each coordinate direction moment of flexure of unit length along distorting lens thickness direction everywhere, Such as formula 5:
Formula 5:
In formula 5, DsAnd DpMeet formula 6, as follows:
Formula 6:
In formula 5 and formula 6, σr、σθ、τFor distorting lens each components of stress everywhere;hm1For top thickness on neutral surface to distorting lens;hm2 For neutral surface to the thickness of distorting lens bottom surface;Z is distorting lens vertical direction coordinate;R is distorting lens radial coordinate;θ is deformation Mirror circumferencial direction angular coordinate;wzIt (r) is distorting lens amount of deflection;vsIndicate quilting material Poisson's ratio;vpIndicate primer Poisson's ratio; EsIndicate quilting material Young's modulus;EpIndicate primer Young's modulus;hsFor the thickness of quilting material;hpFor primer Thickness;
When distorting lens generally same material, the E in formula 4, formula 5 and formula 6 is enableds=Ep, vs=vp, h=hs+hp
R the and θ coordinate direction shearing that distorting lens unit length is further obtained by formula 6, such as formula 7:
Formula 7:
In formula 7, Mr、Mθ、MθrFor each coordinate direction moment of flexure of distorting lens unit length;
Equivalent shear force is further obtained, such as formula 8:
Formula 8:
In formula 8, Qr、QθIt is sheared for r the and θ coordinate direction of distorting lens unit length;Mr、Mθ、MθrIt is each for distorting lens unit length Coordinate direction moment of flexure;
The then motion control equation of distorting lens, such as formula 9:
Formula 9:
In formula 9, Qr、QθIt is sheared for r the and θ coordinate direction of distorting lens unit length;
In formula 9, ξ=ρshsphp, formula 10 is obtained according to formula 5, formula 7 and formula 9, as follows:
Formula 10:
In formula 10, wzIt (r) is distorting lens amount of deflection;ξ=ρshsphpD=Ds+Dp, Ds、Dp Such as formula 6;
Due to being simple harmonic oscillation, amount of deflection is formula 11 with complex representation:
Formula 11:wz(r, θ, t)=Re { Wz(r, θ) exp (i ω t) };
Formula 12 is obtained according to formula 10, as follows:
Formula 12:
If the solution of equation 12 is formula 13, as follows:
Formula 13:Wz(r, θ)=un(r)cos(nθ);N indicates symmetry number;
13 substitution formula 12 of wushu obtains formula 14, as follows:
Formula 14:
In formula 14,
The solution of equation 14 is write as the form such as formula 15, as follows:
Formula 15:un(r)=A1, nJn(λr)+A2, nYn(λr)+A3, nIn(λr)+A4, nKn(λr);
In formula 15, λ42ξ/D;Jn(λr)、Yn(λr)、In(λr)、Kn(λ r) is the n rank first kind, the second class of n rank, amendment respectively The n rank first kind and amendment n rank bessel function of the second kind;
In formula 15, Yn(λ r) and Kn(λ r) be it is infinite, enable A2,n=A4,n=0, then formula 15 rewrites an accepted way of doing sth 16, as follows:
Formula 16:un(r)=A1, nJn(λr)+A3, nIn(λr);
Matrix equation is obtained, such as formula 19:
As can be seen that two unknown number A to be asked from equation 191,n、A3,nλ is all relied on, formula 19 has trivial solution, then has formula 20:
Formula 20:
The value of λ a series of is obtained according to formula 20, the value of each λ is substituted into formula 19, obtains two unknown number A1,n、A3,nGeneral phase Guan Xie, one of unknown number can indicate with another unknown number, A3,nBy A1,nIt is indicated multiplied by related coefficient.
5. self-adapting optical distorting lens Elastic mode aberration characterizing method according to claim 4, which is characterized in that institute Stating the process that Elastic mode multinomial is normalized includes:
20 particular solution of formula isM indicates the order of mode, and m depends on λ, when taking A1,n=1, general normalized solution such as formula 21:
Formula 21:
In formula 21,
CN201811518306.0A 2018-12-12 2018-12-12 Self-adaptive optical deformable mirror elastic modal aberration characterization method Active CN110095858B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811518306.0A CN110095858B (en) 2018-12-12 2018-12-12 Self-adaptive optical deformable mirror elastic modal aberration characterization method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811518306.0A CN110095858B (en) 2018-12-12 2018-12-12 Self-adaptive optical deformable mirror elastic modal aberration characterization method

Publications (2)

Publication Number Publication Date
CN110095858A true CN110095858A (en) 2019-08-06
CN110095858B CN110095858B (en) 2021-06-08

Family

ID=67443677

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811518306.0A Active CN110095858B (en) 2018-12-12 2018-12-12 Self-adaptive optical deformable mirror elastic modal aberration characterization method

Country Status (1)

Country Link
CN (1) CN110095858B (en)

Citations (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4043644A (en) * 1976-07-15 1977-08-23 Humphrey Instruments, Inc. Elastically compensated off-axis mirror
CN1274839A (en) * 1999-05-19 2000-11-29 松下电器产业株式会社 Lens evaluation method and device, optical unit and lens-adjusting method and device thereof
CN1429090A (en) * 2000-03-20 2003-07-09 加利福尼亚技术学院 Application of wavefront sensor to lenses capable of post-fabrication power modification
JP2004226457A (en) * 2003-01-20 2004-08-12 Ricoh Co Ltd Wave aberration correction mirror and optical pickup
WO2004105012A2 (en) * 2003-05-26 2004-12-02 Wilhelmus Versteegen Information storage based on carbon nanotubes
US20040257679A1 (en) * 2003-05-21 2004-12-23 Yuji Sudoh Retainer, exposure apparatus, and device fabrication method
WO2005024809A2 (en) * 2003-09-04 2005-03-17 Matsushita Electric Industrial Co., Ltd. Optical pick-up aberration correcting mirror, aberration correcting method and optical pick-up
CN1780786A (en) * 2003-12-25 2006-05-31 佳能株式会社 Micro-oscillating member, light-deflector, and image-forming apparatus
CN1993643A (en) * 2004-07-30 2007-07-04 索尼株式会社 Deformable mirror device, deformable mirror plate
CN101162294A (en) * 2007-11-06 2008-04-16 中国科学院光电技术研究所 Method for measuring and correcting all-optical path aberration of inertial confinement fusion device
CN101248487A (en) * 2005-08-26 2008-08-20 松下电器产业株式会社 Actuator, optical head device, and optical information device
CN101344639A (en) * 2008-08-27 2009-01-14 中国科学院光电技术研究所 Self-adaptive optical system based on ant colony algorithm
CN101685192A (en) * 2008-09-26 2010-03-31 中国科学院西安光学精密机械研究所 Supporting and adjusting method for inhibiting large mirror surface astigmatic deformation
CN102150068A (en) * 2008-09-10 2011-08-10 卡尔蔡司Smt有限责任公司 Imaging optical system
US20110309900A1 (en) * 2008-10-15 2011-12-22 Com Dev International Ltd. Dielectric resonator and filter with low permittivity material
CN102460070A (en) * 2009-04-30 2012-05-16 大陆-特韦斯贸易合伙股份公司及两合公司 Method for the precise measuring operation of a micromechanical rotation rate sensor
CN102620917A (en) * 2012-04-11 2012-08-01 长春理工大学 Photoinduced thermal deformation image quality analyzing method of transmission-type optical element
CN102753085A (en) * 2010-02-12 2012-10-24 庄臣及庄臣视力保护公司 Apparatus and method to obtain clinical ophthalmic high order optical aberrations
CN103278935A (en) * 2013-05-20 2013-09-04 复旦大学 Color separation method of carrying out aberration compensation by applying free-form surface color separation film
CN105373646A (en) * 2015-09-18 2016-03-02 中国科学院紫金山天文台 Variable-mesh composite optimization method for primary mirror shaft support of astronomical optics telescope
CN105576116A (en) * 2015-11-20 2016-05-11 中国科学院紫金山天文台 Wide-range high-resonant frequency piezoelectric actuator
EP2245499B1 (en) * 2008-01-30 2016-08-24 The Regents of The University of California Method and apparatus for correcting optical aberrations using a deformable mirror
CN106104360A (en) * 2014-03-10 2016-11-09 业纳光学***有限公司 For compensating the adjustable deformable mirror of the scrambling of beam
CN205809412U (en) * 2016-05-16 2016-12-14 中国科学院紫金山天文台 A kind of with beam type piezoelectric actuator for the distorting lens driven
EP3144715A1 (en) * 2015-09-15 2017-03-22 Samara State Technical University / SSTU Method for compensating optical aberrations with a deformable mirror
CN107220403A (en) * 2017-04-20 2017-09-29 南京航空航天大学 The control association modeling method of aircraft Elastic mode

Patent Citations (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4043644A (en) * 1976-07-15 1977-08-23 Humphrey Instruments, Inc. Elastically compensated off-axis mirror
CN1274839A (en) * 1999-05-19 2000-11-29 松下电器产业株式会社 Lens evaluation method and device, optical unit and lens-adjusting method and device thereof
CN1429090A (en) * 2000-03-20 2003-07-09 加利福尼亚技术学院 Application of wavefront sensor to lenses capable of post-fabrication power modification
JP2004226457A (en) * 2003-01-20 2004-08-12 Ricoh Co Ltd Wave aberration correction mirror and optical pickup
US20040257679A1 (en) * 2003-05-21 2004-12-23 Yuji Sudoh Retainer, exposure apparatus, and device fabrication method
WO2004105012A2 (en) * 2003-05-26 2004-12-02 Wilhelmus Versteegen Information storage based on carbon nanotubes
WO2005024809A2 (en) * 2003-09-04 2005-03-17 Matsushita Electric Industrial Co., Ltd. Optical pick-up aberration correcting mirror, aberration correcting method and optical pick-up
CN1780786A (en) * 2003-12-25 2006-05-31 佳能株式会社 Micro-oscillating member, light-deflector, and image-forming apparatus
CN1993643A (en) * 2004-07-30 2007-07-04 索尼株式会社 Deformable mirror device, deformable mirror plate
CN101248487A (en) * 2005-08-26 2008-08-20 松下电器产业株式会社 Actuator, optical head device, and optical information device
CN101162294A (en) * 2007-11-06 2008-04-16 中国科学院光电技术研究所 Method for measuring and correcting all-optical path aberration of inertial confinement fusion device
EP2245499B1 (en) * 2008-01-30 2016-08-24 The Regents of The University of California Method and apparatus for correcting optical aberrations using a deformable mirror
CN101344639A (en) * 2008-08-27 2009-01-14 中国科学院光电技术研究所 Self-adaptive optical system based on ant colony algorithm
CN102150068A (en) * 2008-09-10 2011-08-10 卡尔蔡司Smt有限责任公司 Imaging optical system
CN101685192A (en) * 2008-09-26 2010-03-31 中国科学院西安光学精密机械研究所 Supporting and adjusting method for inhibiting large mirror surface astigmatic deformation
US20110309900A1 (en) * 2008-10-15 2011-12-22 Com Dev International Ltd. Dielectric resonator and filter with low permittivity material
CN102460070A (en) * 2009-04-30 2012-05-16 大陆-特韦斯贸易合伙股份公司及两合公司 Method for the precise measuring operation of a micromechanical rotation rate sensor
CN102753085A (en) * 2010-02-12 2012-10-24 庄臣及庄臣视力保护公司 Apparatus and method to obtain clinical ophthalmic high order optical aberrations
CN102620917A (en) * 2012-04-11 2012-08-01 长春理工大学 Photoinduced thermal deformation image quality analyzing method of transmission-type optical element
CN103278935A (en) * 2013-05-20 2013-09-04 复旦大学 Color separation method of carrying out aberration compensation by applying free-form surface color separation film
CN106104360A (en) * 2014-03-10 2016-11-09 业纳光学***有限公司 For compensating the adjustable deformable mirror of the scrambling of beam
EP3144715A1 (en) * 2015-09-15 2017-03-22 Samara State Technical University / SSTU Method for compensating optical aberrations with a deformable mirror
CN105373646A (en) * 2015-09-18 2016-03-02 中国科学院紫金山天文台 Variable-mesh composite optimization method for primary mirror shaft support of astronomical optics telescope
CN105576116A (en) * 2015-11-20 2016-05-11 中国科学院紫金山天文台 Wide-range high-resonant frequency piezoelectric actuator
CN205809412U (en) * 2016-05-16 2016-12-14 中国科学院紫金山天文台 A kind of with beam type piezoelectric actuator for the distorting lens driven
CN107220403A (en) * 2017-04-20 2017-09-29 南京航空航天大学 The control association modeling method of aircraft Elastic mode

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
HAIREN WANG ET,AL: "Modelling and analysis of circular bimorph piezoelectric actuator for deformable mirror", 《APPLIED MATHEMATICS AND MECHANICS》 *
L.NOETHE: "Use of Minimum-energy Modes for Modal-active Optics Corrections of Thin Meniscus Mirrors", 《JOURNAL OF MODERN OPTICS》 *
周琼 等: "内光路***的缩放模型及其热变形像差的波前预补偿", 《中国激光》 *

Also Published As

Publication number Publication date
CN110095858B (en) 2021-06-08

Similar Documents

Publication Publication Date Title
CN104508541B (en) The improvement of deformable film assembly
US11740392B1 (en) Optical lens assemblies and related methods
US4119366A (en) Mirrors with a variable focal distance
Nelson et al. Stressed mirror polishing. 2: Fabrication of an off-axis section of a paraboloid
Vogl et al. Natural vibration of unsymmetric cross-ply laminates
BR112019027960A2 (en) adaptive lens
Alaluf et al. Unimorph mirror for adaptive optics in space telescopes
US9964755B2 (en) Optimized actuators for ultra-thin mirrors
Radaelli et al. Isogeometric shape optimization for compliant mechanisms with prescribed load paths
CN110095858A (en) Self-adapting optical distorting lens Elastic mode aberration characterizing method
TWI747913B (en) Adjustable fluid lens with reduced aberration
Williams et al. Advancement of the segment support system for the Thirty Meter Telescope primary mirror
CN109933882A (en) Annular primary mirror free vibration mode aberration characterizing method
US20230194897A1 (en) Electroactive Lenses with Cylinder Rotational Control
Hadipour et al. Vibrating membrane mirror concept for adaptive optics
Patterson Lightweight deformable mirrors for future space telescopes
Bastaits et al. Segmented bimorph mirrors for adaptive optics: morphing strategy
Genberg et al. Optical interface for MSC. Nastran
Chen et al. Experimental evaluation of a positive-voltage-driven unimorph deformable mirror for astronomical applications
Alaluf et al. Bimorph mirrors for adaptive optics in space telescopes
Cheng et al. Sparse sampling algorithm for deformable mirror control
Gray et al. Minimizing high spatial frequency residual error in active space telescope mirrors
US6033070A (en) Variable focal length lens
Wang et al. Applications of the elastic modes of a circular plate in wavefront correction of the adaptive optics and the active optics
Han et al. Low-order aberration correction of the TMT tertiary mirror prototype based on a warping harness

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant