CN110082296A - Optical signal measurement system - Google Patents
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- CN110082296A CN110082296A CN201810075807.XA CN201810075807A CN110082296A CN 110082296 A CN110082296 A CN 110082296A CN 201810075807 A CN201810075807 A CN 201810075807A CN 110082296 A CN110082296 A CN 110082296A
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- 238000005259 measurement Methods 0.000 title claims abstract description 94
- 238000001069 Raman spectroscopy Methods 0.000 claims abstract description 104
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The present invention relates to a kind of optical signal measurement system, which includes: light output arrangement, delay line device, the first light reflecting device, the second light reflecting device and signal collection device；Light output arrangement, for exporting Raman light to delay line device output femtosecond infrared light and picosecond visible light, and to sample to be tested；Delay line device so that the optical path difference between femtosecond infrared light and adjusted picosecond of visible light is equal to 0, and femtosecond infrared light and adjusted picosecond of visible light is exported simultaneously to sample to be tested surface for adjusting the light path of picosecond visible light；First light reflecting device, for will be through Raman light signal reflex that sample to be tested reflects to signal collection device；Second light reflecting device will reflex to signal collection device for will obtain through sample to be tested surface reflection and frequency optical signal.When measuring sample message with above system, not only available sample interior information, can also obtain the information of sample surface and interface, to improve measurement efficiency.
Description
Technical field
The present invention relates to spectral measurement methods fields, more particularly to a kind of optical signal measurement system.
Background technique
With the continuous development of laser technology, spectral measurement system has been obtained unprecedented perfect and has been promoted, using light
The relevant information that spectral measurement system measures sample becomes mainstream technology in the industry.Wherein, spectral measurement system measurement is directlyed adopt
When sample, the atom and electronics cloud structure of the available sample interior are real when above-mentioned spectral measurement system is coupled to micro-nano
It tests in measuring device, the molecule surface and interface of available sample or the information at interface, which is the sample and other objects
Contact interface when contact.
In traditional technology, when needing to obtain the information of sample interior and sample surfaces or interface, need first to use
Then the spectral detection system is coupled company with micro-nano experimental measurement by the information inside spectral detection system test sample
It connects, measures the information at sample surfaces perhaps interface again to obtain the information at sample interior and sample surfaces or interface.
But the above method is in sample message detection process, needs to toggle measuring system, measurement efficiency compared with
It is low, and the spectral signal measured is relatively simple.
Summary of the invention
Based on this, the embodiment of the present invention provides a kind of optical signal measurement system, to solve in traditional technology in detection sample
It needs to toggle measuring system when product information, measurement efficiency is lower, and the relatively simple technology of spectral signal measured is asked
Topic.
The embodiment of the present invention provides a kind of optical signal measurement system, light output arrangement, delay line device, the first light reflection dress
It sets, the second light reflecting device and signal collection device；
The light output arrangement, for exporting femtosecond infrared light and picosecond visible light, Yi Jixiang to the delay line device
Sample to be tested exports Raman light；
The delay line device, for adjusting the light path of picosecond visible light, so that the femtosecond infrared light and adjustment
The optical path difference between picosecond visible light afterwards is equal to 0, and the femtosecond infrared light and adjusted picosecond of visible light is defeated simultaneously
Out to sample to be tested surface；
First light reflecting device, Raman light signal reflex for that will reflect through the sample to be tested is to described
Signal collection device；Wherein, the Raman optical signal carries the structural information inside the sample to be tested；
Second light reflecting device will be reflexed to for will obtain through the sample to be tested surface reflection and frequency optical signal
The signal collection device；Wherein, described and frequency optical signal carries the surface and interface structural information or described of the sample to be tested
The structural information of contact interface when interface to be measured and other object contacts.
In one of the embodiments, the delay line device be displacement platform, the first reflector element, the second reflector element,
The displacement platform includes pedestal and the movable supporting frame that is arranged on the guide rail of the pedestal, is provided on the movable supporting frame
First reflecting mirror and the second reflecting mirror；
First reflecting mirror and second reflecting mirror, form 180 ° of reversion optical paths, visible for adjusting described picosecond
The light path of light, so that the optical path difference between the femtosecond infrared light and adjusted picosecond of visible light is equal to 0；
First reflector element is used for the femtosecond infrared light reflection to the sample to be tested surface；
Second reflector element is used for the adjusted picosecond of visible light output reflection to the sample to be tested table
Face.
First reflector element includes third reflecting mirror and the 4th reflecting mirror in one of the embodiments,；
The third reflecting mirror is used for the femtosecond infrared light reflection to the 4th reflecting mirror；
4th reflecting mirror, the femtosecond infrared light reflection for will be reflected from the third reflecting mirror is extremely
The sample to be tested surface.
Second reflector element includes the 5th reflecting mirror and the 6th reflecting mirror in one of the embodiments,；
5th reflecting mirror is used for the adjusted picosecond of visible light output reflection to the 6th reflecting mirror；
6th reflecting mirror, for will be from the adjusted picosecond of visible reflectance of the 5th reflecting mirror
To the sample to be tested surface.
First light reflecting device includes: third reflecting unit and the 4th reflector element in one of the embodiments,；
The third reflecting unit, Raman light reaction for exporting the light output arrangement to the sample to be tested table
Face, and by the Raman light signal reflex after sample to be tested reflection to the 4th reflector element；
4th reflector element is used for the Raman light signal reflex to the signal collection device.
The third reflecting unit includes: the 7th reflecting mirror, beam splitter and the 8th reflection in one of the embodiments,
Mirror；
7th reflecting mirror, Raman light reaction for exporting the light output arrangement to the beam splitter；
The beam splitter, for by from the Raman light reaction of the 7th reflecting mirror to the sample to be tested surface,
And the Raman optical signal after sample to be tested reflection is transmitted through the 8th reflecting mirror；
8th reflecting mirror is used for the Raman light signal reflex to the 4th reflector element.
Second light reflecting device includes: the 9th reflecting mirror and the tenth reflecting mirror in one of the embodiments,；
9th reflecting mirror, for reflexing to obtain from the sample to be tested surface reflection and frequency optical signal
Tenth reflecting mirror；
Tenth reflecting mirror, for described and frequency optical signal to be reflexed to the signal collection device.
The signal collection device includes: the first spectrometer, the second spectrometer, half-wave plate in one of the embodiments,
And polarization beam apparatus；
The polarization beam apparatus, for exporting the p-polarization optical signal in the Raman optical signal to first spectrum
Instrument, and for exporting the p-polarization optical signal in described and frequency optical signal to second spectrometer；
The half-wave plate, for the s polarized light signal in the Raman optical signal and described and frequency optical signal to be converted to p
After polarized light signal, output to the polarization beam apparatus.
The optical signal measurement system in one of the embodiments, further include: bread board, half-reflecting mirror and it is micro- at
As device, the bread board is vertically fixed on the sample stage for placing sample to be tested, and the half-reflecting mirror is detachably mounted to
On the bread board；
The half-reflecting mirror, white light reflection for issuing white light source to the sample to be tested surface, and will come from
The microscopic imaging device is reflexed to again in the micro- optical signal transmission of the sample to be tested surface reflection.
The optical signal measurement system in one of the embodiments, further include: the half-reflecting mirror side is set
11st reflecting mirror；
11st reflecting mirror, white light reflection for issuing the white light source to the half-reflecting mirror.
The light output arrangement includes: laser generation module, spectral module in one of the embodiments,；
The laser generation module, for generating initial laser；
The spectral module, for the initial laser to be divided, obtain the femtosecond infrared light, described picosecond can
The light-exposed and described Raman light.
Optical signal measurement system provided by the invention, the system include: that light output arrangement, delay line device, the first light are anti-
Injection device, the second light reflecting device and signal collection device export three-beam by light output arrangement first, and wherein femtosecond is infrared
To delay line device, Raman light is directly output to sample to be tested for light and picosecond visible light output；Then pass through delay line device tune
Whole picosecond of visible light light path, so that the optical path difference of adjusted picosecond of visible light and femtosecond infrared light is 0, and by skin adjusted
Second visible light and femtosecond infrared light are exported simultaneously to sample to be tested surface, are then passed through by the second light reflecting device from sample to be tested
Surface reflection goes out and frequency optical signal reflexes to signal collection device；In addition, by light output arrangement output Raman light output extremely
Sample to be tested, by the first light reflecting device by the Raman light signal reflex reflected through sample to be tested to signal collection device.
That is, in the present embodiment, signal collection device can be directly collected into structural information inside sample to be tested and to be measured
The structural information of contact interface when the surface and interface structural information or sample to be tested and other object contacts of sample, using this reality
The optical signal measurement system of example offer is applied when detecting to sample to be tested, without toggling measuring system, is greatly improved
The detection efficiency of sample to be tested, also, Raman optical signal collected is different with the spectrum of frequency optical signal, and which raises light
Signal Measurement System measurement spectral signal it is rich.
Detailed description of the invention
Fig. 1 is the knot journey schematic diagram for the optical signal measurement system that one embodiment provides；
The structural schematic diagram of delay line device in the optical signal measurement system that Fig. 2 provides for one embodiment；
The structure of delay line device and the second light reflecting device in the optical signal measurement system that Fig. 3 provides for one embodiment
Schematic diagram；
The structural schematic diagram of first light reflecting device in the optical signal measurement system that Fig. 4 provides for one embodiment；
Fig. 5 is the structural schematic diagram for the signal measurement apparatus that one embodiment provides；
Fig. 6 is the structural schematic diagram for the optical signal measurement system that another embodiment provides；
Fig. 7 is the knot journey schematic diagram for the optical signal measurement system that another embodiment provides；
Fig. 7 a is the 4f laser pulse forming system structural schematic diagram that one embodiment provides.
Description of symbols:
101: picosecond visible light；102: femtosecond infrared light；103: Raman light；
104: adjusted picosecond visible lights；105: Raman optical signal；106: and frequency optical signal；
111: light output arrangement；112: delay line device；113: the first light reflecting devices；
114: the second light reflecting devices；115: signal collection device；211: displacement platform；
201: pedestal；202: movable supporting frame；221: the first reflecting mirrors；
222: the second reflecting mirrors；203: the first reflector elements；204: the second reflector elements；
212: sample to be tested；231: third reflecting mirror；232: the four reflecting mirrors；
241: the five reflecting mirrors；242: the six reflecting mirrors；301: the nine reflecting mirrors；
302: the ten reflecting mirrors；401: third reflecting unit；402: the four reflector elements；
411: the seven reflecting mirrors；412: beam splitter；413: the eight reflecting mirrors；
511: the first spectrometers；512: the second spectrometers 502: half-wave plate；
503: polarization beam apparatus；601: bread board；602: half-reflecting mirror；
603: microscopic imaging device；604: white light；605: the ten one reflecting mirrors；
606: micro- optical signal；607: sample stage；701: laser generation module；
715: seed light；716: pump light；702: spectral module；
711: initial laser；712: oscillator stage pulse laser；
713: laser pump source；714: amplifying stage laser；
731: laser parameter amplifier；732: conversion mixer；724: slit；
733:4f laser pulse forming system；721: beam splitting system；722: plane mirror；
723: cylindrical lens；735: second harmonic bandwidth compression set；
725: grating；726: filter plate.
Specific embodiment
Optical signal measurement system provided in this embodiment can be used for atom and electronics cloud structure inside test sample,
The information of son can be punished with test sample surface and interface, which is contact interface when sample and other objects contact, can be with
Be solid contacted with solid sample interface, be also possible to interface that solid contacts with fluid sample, can also be steam and liquid
The interface of body sample contact.Light signal detection system provided in this embodiment not only can detecte sample surface and interface molecular structure
Information, the structural information of interface information and sample interior molecule when can be contacted with test sample and other objects.
In traditional technology, when the structure for the atom and electron cloud for needing to measure sample interior, spectrum survey can be directly used
Amount system when interface information when the molecular surface or sample that need to obtain sample and other objects contact, then needs handle
Spectral measurement system is coupled in micro-nano experimental measurement.But when need to obtain sample interior and sample surfaces or
It when the information at interface, needs to toggle measuring system using traditional technology, so that measurement efficiency is lower.The present invention provides
Optical signal measurement system aim to solve the problem that the technical problem as above of traditional technology.
In order to which the objects, technical solutions and advantages of the embodiment of the present invention are more clearly understood, simultaneously by following embodiments
In conjunction with attached drawing, technical solution in the embodiment of the present invention is described in further details.It should be appreciated that described herein specific
Embodiment only to explain the present invention, is not intended to limit the present invention.These specific embodiments can be combined with each other below,
The same or similar concept or process may be repeated no more in certain embodiments.
Fig. 1 is the structural schematic diagram for the optical signal measurement system that one embodiment provides.As shown in Figure 1, the optical signal is examined
Examining system includes: light output arrangement 111, delay line device 112, the first light reflecting device 113,114 and of the second light reflecting device
Signal collection device 115；The light output arrangement 111, for exporting 102 He of femtosecond infrared light to the delay line device 112
Picosecond visible light 101, and Raman light 103 is exported to sample to be tested 212；The delay line device 112, for adjusting the skin
The light path of second visible light 101, so that the optical path difference etc. between the femtosecond infrared light 102 and adjusted picosecond of visible light 104
It is exported simultaneously in 0, and by the femtosecond infrared light 102 and adjusted picosecond of visible light 104 to 212 surface of sample to be tested；Institute
The first light reflecting device 113 is stated, it is described for reflexing to the Raman optical signal 105 obtained through the sample to be tested 212 reflection
Signal collection device 115；Wherein, the Raman optical signal 105 carries the structural information inside the sample to be tested 212；It is described
Second light reflecting device 114 will reflex to institute for will obtain through 212 surface reflection of sample to be tested and frequency optical signal 106
State signal collection device 115；Wherein, described and frequency optical signal 106 carry the sample to be tested 212 surface and interface structural information or
The structural information of contact interface when sample to be tested described in person and other object contacts.
Specifically, light signal detection system provided by the present embodiment include light output arrangement 111, delay line device 112,
First light reflecting device 113, the second light reflecting device 114 and signal collection device 115, wherein light output arrangement 111 is used as and mentions
For picosecond visible light 101, femtosecond infrared light 102, Raman light 103 laser source, optionally, light output arrangement 111 export three
Beam light can be exported by three lasers respectively respectively, be also possible to be exported by a laser, by correspondingly handling, be obtained
Three-beam needed for optical signal detecting experiment: a branch of picosecond of visible light 101, a branch of femtosecond infrared light 102, a branch of Raman light 103.
It should be noted that the laser for the three-beam that the present embodiment exports light output arrangement 111 and without limitation, as long as the laser
Three-beam needed for device energy output optical signal test experience.
Wherein, a branch of picosecond of visible light 101, a branch of femtosecond infrared light 102, a branch of Raman of the output of light output arrangement 111
Light 103 is adjusted wherein picosecond visible light 101 and femtosecond infrared light 102 are output to delay line device 112 by delay line device 112
The light path of whole picosecond of visible light 101, so that femtosecond infrared light 102 and adjusted picosecond of visible light 104 are exported simultaneously to be measured
Available and frequency optical signal 106 is reflected through sample to be tested 212 in 212 surface of sample, should and frequency optical signal 106 can be by the
Two light reflecting devices 114 reflex to signal collection device 115.In addition, the Raman light 103 that above-mentioned light output arrangement 111 exports can
To be directly output to sample to be tested 212, the Raman optical signal 105 obtained after sample to be tested reflects carries sample to be tested 212
Internal structural information, the Raman optical signal 105 can reflex to signal collection device by above-mentioned first light reflecting device 113
115.Optionally, above-mentioned sample to be tested 212 can be solid sample to be tested, is also possible to fluid test sample, can also be gas
Body sample to be tested, the present embodiment to the type of the sample to be tested 212 without limitation.Optionally, the knot inside the sample to be tested 212
Structure information can be atom and electron cloud structural information inside solid sample to be tested, be also possible to inside fluid test sample
Atom and electron cloud structural information can also be atom and electron cloud structural information inside gas sample to be tested.
It should be noted that in the optical path actually built, the three-beam exported by light output arrangement 111, wherein skin
The second light path of visible light 101 is shorter, however the light path of femtosecond infrared light 102 is longer, only when picosecond visible light 101 and femtosecond are red
When outer light 102 while output to 212 surface of sample to be tested, it could be obtained through 212 surface reflection of sample to be tested and frequency optical signal
106, thus in order to obtain sample to be tested 212 and frequency optical signal, then need to adjust picosecond visible light 101 and femtosecond infrared light
102 optical path difference adjusts the light path of picosecond visible light 101 in the present embodiment, so that femtosecond infrared light by delay line device 112
102 and the optical path difference of adjusted picosecond of visible light 104 be 0, and exported simultaneously to 212 surface of sample to be tested, so obtain from
212 surface reflection of sample to be tested goes out and frequency optical signal 106.This carries the surface and interface of sample to be tested 212 with frequency optical signal 106
The structural information of contact interface when structural information or sample to be tested and other object contacts.Optionally, the sample to be tested 212
Surface and interface structural information in " surface and interface structure " can be the surface and interface structure of solid sample to be tested, be also possible to liquid and wait for
The surface and interface structure of sample.
Optionally, the sample to be tested 212 in the structural information of contact interface when other object contacts " other are right
As " it can be solid sample, it can also can also be gaseous sample with fluid sample.
Optionally, the first light reflecting device 113 may include that a reflecting mirror multiple reflecting mirrors or can also perhaps wrap
Include other devices that can be used to reflected light, the present embodiment to this and without limitation, as long as the first light reflecting device 113 being capable of general
Obtain through the sample to be tested 212 reflection and frequency optical signal 106 reflexes to signal collection device 115.
Optionally, the second light reflecting device 114 may include that a reflecting mirror multiple reflecting mirrors or can also perhaps wrap
Include other devices that can be used to reflected light, the present embodiment to this and without limitation, as long as the second light reflecting device 114 being capable of general
The Raman optical signal 105 obtained through the sample to be tested 212 reflection reflexes to signal collection device 115.Wherein, Raman light
Signal 105 carries the structural information inside sample to be tested 212.
Seen from the above description, by above-mentioned light output arrangement 111, delay line device 112, the first light reflecting device 113,
The effect of second light reflecting device 114, signal collection device 115 can be collected into Raman optical signal 105 and with frequency optical signal
106, i.e. signal collection device 115 can be directly collected into structural information and sample to be tested 212 inside sample to be tested 212
Surface and interface structural information or sample to be tested 212 and contact interface when other object contacts structural information.That is,
When being detected using optical signal measurement system provided in this embodiment to sample to be tested 212, without toggling measuring system,
It greatly improves the detection efficiency of sample to be tested 212, also, Raman optical signal 105 collected and with frequency optical signal 106
Spectrum is different, and which raises the rich of the spectral signal of optical signal measurement system measurement.
Optical signal measurement system provided in this embodiment, comprising: light output arrangement, delay line device, the first light reflection dress
Set, the second light reflecting device and signal collection device, three-beam exported by light output arrangement first, wherein femtosecond infrared light and
To delay line device, Raman light is directly output to sample to be tested for picosecond visible light output；Then skin is adjusted by delay line device
Second visible light light path, so that the optical path difference of adjusted picosecond of visible light and femtosecond infrared light is 0, and can by adjusted picosecond
Light-exposed and femtosecond infrared light is exported simultaneously to sample to be tested surface, is then passed through by the second light reflecting device from sample to be tested surface
Reflect and frequency optical signal reflexes to signal collection device；In addition, by the Raman light output of light output arrangement output to be measured
Sample, by the first light reflecting device by the Raman light signal reflex reflected through sample to be tested to signal collection device.Also
It is to say, in the present embodiment, signal collection device can be directly collected into structural information and sample to be tested inside sample to be tested
Surface and interface structural information or sample to be tested and contact interface when other object contacts structural information, using the present embodiment
When the optical signal measurement system of offer detects sample to be tested, without toggling measuring system, it greatly improves to
The detection efficiency of sample, also, Raman optical signal collected is different with the spectrum of frequency optical signal, and which raises optical signals
Measuring system measurement spectral signal it is rich.
The structural schematic diagram of delay line device in the optical signal measurement system that Fig. 2 provides for one embodiment.Such as Fig. 2 institute
Show, on the basis of above-mentioned embodiment illustrated in fig. 1, above-mentioned delay line device include: displacement platform 211, the first reflector element 203,
Second reflector element 204, the displacement platform 211 include pedestal 201 and the removable branch being arranged on the guide rail of the pedestal 201
Frame 202 is provided with the first reflecting mirror 221 and the second reflecting mirror 222 on the movable supporting frame 202；First reflecting mirror 221
With second reflecting mirror 222,180 ° of reversion optical paths are formed, for adjusting the light path of picosecond visible light 101, so that described
Optical path difference between femtosecond infrared light 102 and adjusted picosecond of visible light 104 is equal to 0；First reflector element 203 is used
In the femtosecond infrared light 102 is reflexed to 212 surface of sample to be tested；Second reflector element 204, being used for will be described
Adjusted picosecond of 104 output reflection of visible light is to 212 surface of sample to be tested.
Specifically, delay line device 112 is anti-including displacement platform 211, the first reflector element 203 and second in the present embodiment
Unit 204 is penetrated, picosecond visible light 101 exported by above-mentioned light output arrangement 111 adjusts above-mentioned by above-mentioned delay line device 112
The light path of picosecond visible light 101.Optionally, displacement platform 211 can be manual displacement platform, be also possible to automatic displacement platform.It is above-mentioned
Displacement platform 211 includes pedestal 201 and movable supporting frame 202, there is guide rail on above-mentioned pedestal 201, and above-mentioned movable supporting frame 202 is arranged
On the guide rail of above-mentioned pedestal 201, the first reflecting mirror 221 and the second reflecting mirror 222 are provided on above-mentioned movable supporting frame 202.
Angle between first reflecting mirror 221 and the second reflecting mirror 222 is 90 °, and which constitute one 180 ° of reversion optical paths, will be come from
The second reflecting mirror 222 is reflexed to through the first reflecting mirror 221 in picosecond visible light 101 of light output arrangement 111, it is then anti-from second
Penetrate the side of the direction of picosecond visible light 101 that mirror 222 reflects just with picosecond visible light 101 for entering the first reflecting mirror 221
To on the contrary, picosecond visible light 101 passes through the adjustment of above-mentioned first reflecting mirror 221 and the second reflecting mirror 222, light path becomes accordingly
It is long, to make the optical path difference 0 of adjusted picosecond of visible light 104 and femtosecond infrared light 102.In the first reflector element 203
Under effect, it can be reflected onto 212 surface of sample to be tested from the femtosecond infrared light 102 of light output arrangement 111, it is anti-second
It penetrates under the action of unit 204, above-mentioned adjusted picosecond of visible light 104 can be by output reflection to 212 surface of sample to be tested.Cause
This, the femtosecond infrared light 102 and adjusted picosecond of visible light 104 after the surface reflection of sample to be tested 212, it is available on
It states and frequency optical signal 106.
Optionally, the shape of above-mentioned pedestal 201 can be box-shaped, is also possible to cylinder, can also be bar shaped, this reality
Example is applied to the shape of pedestal 201 and movable supporting frame 202 without limitation, as long as movable supporting frame 202 can be along on pedestal 201
Guide rail is mobile.First reflecting mirror 221 and the second reflecting mirror 222, which can be, is fixed on above-mentioned removable branch according to measurement demand
On frame 202.
Optionally, above-mentioned first reflector element 203 may include a reflecting mirror perhaps multiple reflecting mirrors or can be with
Including the device that other are capable of reflecting light, above-mentioned second reflector element 204 may include a reflecting mirror or multiple reflecting mirrors,
Or can also include other devices for being capable of reflecting light, the present embodiment to this and without limitation, as long as the first reflector element 203
Corresponding light output can be reflexed to 212 surface of sample to be tested with the second reflector element 204.
Optical signal measurement system provided in this embodiment, the system include: light output arrangement, delay line device, the first light
Reflection unit, the second light reflecting device and signal collection device.Wherein the delay line device in the system includes: displacement platform,
One reflector element, the second reflector element.The present embodiment passes through the first reflecting mirror and second on the displacement platform in delay line device
180 ° of the reversion optical path that reflecting mirror is constituted adjusts the light path of picosecond visible light, so that adjusted picosecond of visible light and femtosecond
The optical path difference of infrared light is 0, wherein femtosecond infrared light reflexes to sample to be tested surface by the first reflector element, adjusted
Picosecond visible light reflexes to sample to be tested surface by the second reflector element, available after the surface reflection of sample to be tested
Above-mentioned and frequency optical signal so that optical signal measurement system can collect sample to be tested surface and interface structural information or to
The structural information of contact interface when sample and other object contacts, while the effect based on above-mentioned first light reflecting device,
The internal structural information of optical signal measurement system also available sample to be tested.That is, using light provided in this embodiment
When Signal Measurement System detects sample to be tested, without toggling measuring system, it greatly improves samples to be tested
Detection efficiency；Meanwhile the delay line device structure in the present embodiment is simple, further improves and imitates with the acquisition of frequency optical signal
Rate.
The structure of delay line device and the second light reflecting device in the optical signal measurement system that Fig. 3 provides for one embodiment
Schematic diagram.As shown in figure 3, on the basis of above-mentioned embodiment illustrated in fig. 2, optionally, above-mentioned first reflector element 203 includes the
Three reflecting mirrors 231 and the 4th reflecting mirror 232；The third reflecting mirror 231, for the femtosecond infrared light 102 to be reflexed to institute
State the 4th reflecting mirror 232；4th reflecting mirror 232, it is described winged for will be reflected from the third reflecting mirror 231
Second infrared light 102 reflexes to 212 surface of sample to be tested.Optionally, above-mentioned second reflector element 204 includes the 5th reflecting mirror
241 and the 6th reflecting mirror 242；5th reflecting mirror 241 is used for 104 output reflection of the adjusted picosecond of visible light
To the 6th reflecting mirror 242；6th reflecting mirror 242, for will be from the adjustment of the 5th reflecting mirror 241
Picosecond visible light 104 afterwards reflexes to 212 surface of sample to be tested.In addition, above-mentioned second light is anti-as shown in figure 3, optional
Injection device 114 may include: the 9th reflecting mirror 301 and the tenth reflecting mirror 302；9th reflecting mirror 301, for will be from
212 surface reflection of sample to be tested obtains and frequency optical signal 106 reflexes to the tenth reflecting mirror 302；Tenth reflecting mirror
302, for described and frequency optical signal 106 to be reflexed to the signal collection device 115.
Specifically, the first reflector element 203 includes two reflecting mirrors, i.e. third reflecting mirror 231 and the 4th in the present embodiment
Reflecting mirror 232, third reflecting mirror 231 will reflex to the 4th reflecting mirror from the femtosecond infrared light 102 of light output arrangement 111
232, and then reflected by the 4th reflecting mirror 232, so that the femtosecond infrared light 102 reflected through the 4th reflecting mirror 232 be reflected
To 212 surface of sample to be tested.Second reflector element 204 includes two reflecting mirrors, i.e. the 5th reflecting mirror 241 and the 6th reflecting mirror
242, the 5th reflecting mirror 241 will reflex to the 6th reflecting mirror 242 from through 211 adjusted picoseconds of visible lights of displacement platform 104,
And then reflected by the 6th reflecting mirror 242, thus the adjusted picosecond of visible light 104 that will be reflected through the 6th reflecting mirror 242
Reflex to 212 surface of sample to be tested.
In addition, the second light reflecting device 114 includes two reflecting mirrors, i.e. the 9th reflecting mirror 301 and the tenth reflecting mirror 302,
9th reflecting mirror 301 is used to reflect from sample to be tested surface 212 and frequency optical signal 106 reflexing to the tenth reflecting mirror 302,
And then reflect from the tenth reflecting mirror 302 and frequency optical signal 106 is reflexed into signal collection device 115.
In the present embodiment, the reflecting mirror being arranged by the first reflector element and the second reflector element, by delayed line apparatus
Adjusted picosecond of visible light and femtosecond infrared light reflex to sample to be tested surface simultaneously, anti-by the first reflector element and second
The reflecting mirror in unit is penetrated, optical path direction can be preferably changed, facilitates the use of optical signal measurement system, and the letter of its structure
It is single, improve the efficiency of optical signal measurement system acquisition and frequency optical signal.In addition, the present embodiment passes through in the second light reflecting device
Two reflecting mirrors, can preferably control the direction of optical signal, so preferably facilitate signal collection device collect and frequency light
Signal enables optical signal measurement system rapidly to detect the information of sample to be tested surface and interface or contact interface, into one
Step improves the efficiency of optical signal measurement system detection sample to be tested.
The structural schematic diagram of first light reflecting device in the optical signal measurement system that Fig. 4 provides for one embodiment.Such as Fig. 4
Shown, on the basis of any of the above-described illustrated embodiment, optionally, first light reflecting device 113 includes: that third reflection is single
Member 401 and the 4th reflector element 402；The third reflecting unit 401, the Raman for exporting the light output arrangement 111
Light 103 reflexes to 212 surface of sample to be tested, and by the Raman optical signal 105 after the sample to be tested 212 reflection
Reflex to the 4th reflector element 402；4th reflector element 402, for the Raman optical signal 105 to be reflexed to institute
State signal collection device 115.Optionally, above-mentioned third reflecting unit 401 includes: the 7th reflecting mirror 411, beam splitter 412 and
Eight reflecting mirrors 413；7th reflecting mirror 411, the Raman light 103 for exporting the light output arrangement 111 reflex to institute
State beam splitter 412；The beam splitter 412, it is described for will be reflexed to from the Raman light 103 of the 7th reflecting mirror 411
212 surface of sample to be tested, and the Raman optical signal 105 after the sample to be tested 212 reflection is transmitted through the described 8th
Reflecting mirror 413；8th reflecting mirror 413, for the Raman optical signal 105 to be reflexed to the 4th reflector element 402.
Specifically, the first light reflecting device 113 includes third reflecting unit 401 and the 4th reflector element 402, third reflection
Unit 401 is used to reflex to the Raman light 103 exported 212 surface of sample to be tested from light output arrangement 111, and the 4th reflection is single
Member 402 is for reflexing to signal collection device 115 for the Raman optical signal 105 after the reflection of sample to be tested 212.Optionally,
Three reflector elements 401 may include a reflecting mirror perhaps multiple reflecting mirrors or also may include a beam splitter or more
A beam splitter, either can with multiple reflecting mirrors or multiple beam splitters, the present embodiment to this and without limitation, as long as third is anti-
The Raman light 103 that light output arrangement 111 exports can be reflexed in 212 surface of sample to be tested, above-mentioned figure by penetrating unit 113
The structure of third reflecting unit 401 shown in 4 is only a kind of example.
Optionally, the 4th reflector element 402 may include that a reflecting mirror perhaps multiple reflecting mirrors or can also include
Other can be used to the device of reflected light, the present embodiment to this and without limitation, as long as the 4th reflector element 402 can be by the drawing
Graceful optical signal 105 reflexes to the signal collection device 115.The structure of above-mentioned 4th reflector element 402 shown in Fig. 4 is only
It is a kind of example.
Continue by taking above-mentioned Fig. 4 as an example, above-mentioned third reflecting unit 401 includes two reflecting mirrors and a beam splitter, i.e., the
Seven reflecting mirrors 411, beam splitter 412 and the 8th reflecting mirror 413；The Raman light that 7th reflecting mirror 411 exports light output arrangement 111
103 reflex to beam splitter 412, and Raman light 103 is then reflexed to sample to be tested 212 through beam splitter 412, from sample to be tested 212
The Raman optical signal 105 reflected is transmitted through the 8th reflecting mirror 413 by beam splitter 412.4th reflector element 402 will be through
The Raman optical signal 105 that eight reflecting mirrors 413 reflect reflexes to the 4th reflector element 402.
Optionally, above-mentioned beam splitter 412 can be semi-transparent semi-reflecting beam splitter, be also possible to other beam splitters, as long as can be anti-
Penetrate light and optical signal transmissive.
In the present embodiment, pass through the third reflecting unit being arranged in the first light reflecting device and the 4th reflector element, third
The Raman light reaction that reflector element exports light output arrangement will be reflected from sample to be tested to the sample to be tested surface
Then Raman light signal reflex afterwards passes through the 4th reflector element for Raman light signal reflex to the letter to the 4th reflector element
Number collection device, wherein by the reflection of third reflecting unit and the 4th reflector element, it can preferably change optical path direction,
Facilitate the use of optical signal measurement system, and its structure is simple, improves optical signal measurement system and obtain Raman optical signal
Efficiency.In addition, reflecting mirror and beam splitter that the present embodiment is arranged by third reflecting unit and the 4th reflector element, it can be more preferable
Control optical signal direction, and then preferably facilitate signal collection device collect Raman optical signal so that optical signal measurement system
System can rapidly detect sample to be tested internal structural information, further improve optical signal measurement system detection sample to be tested
Efficiency.
Fig. 5 is the structural schematic diagram for the signal collection device that one embodiment provides.As shown in figure 5, in any of the above-described institute
On the basis of showing embodiment, optionally, the signal collection device 115 include: the first spectrometer 511, the second spectrometer 512,
Half-wave plate 502 and polarization beam apparatus 503；The polarization beam apparatus 503, for by the p-polarization light in the Raman optical signal 105
Signal is exported to first spectrometer 511, and for by the p-polarization optical signal in described and frequency optical signal 106 export to
Second spectrometer 512；The half-wave plate 502, for will be in the Raman optical signal 105 and described and frequency optical signal 106
S polarized light signal be converted to p-polarization optical signal after, output is to the polarization beam apparatus 503.
Specifically, above-mentioned first spectrometer 511 and the second spectrometer 512 can be electronics times in the present embodiment of Fig. 5
Increase charge coupled cell (Electron-Multiplying Charge-coupled Device, EMCCD) detector formula spectrum
Instrument is also possible to portable spectrometer, can also be the spectrometer of hand-held；Above-mentioned half-wave plate 502 is half wave plate, should
The material of half-wave plate 502 can be the half-wave plate of crystal production, be also possible to the half-wave plate of quartz glass production, the present embodiment pair
The material of half-wave plate 502 and without limitation, as long as the half-wave plate 502 has birefringence.Above-mentioned polarization beam apparatus 503
It is also polarization splitting prism (Polarization beam splitter, PBS) that incident non-polarized light can be divided into two beams and hung down
Straight line polarisation.Wherein p-polarization light can pass through polarization beam apparatus completely, and s polarised light is then anti-by polarization beam apparatus with 45° angle
Penetrate, thus the present embodiment using half-wave plate 502 s polarised light is converted into p-polarization light after can pass through polarization beam apparatus completely
503。
It should be noted that above-mentioned Raman optical signal 105 includes Raman light p-polarization signal and Raman light s polarization signal, and
Frequency optical signal 106 include and frequency light p-polarization signal and with frequency light s polarization signal.Above-mentioned first spectrometer 511 can receive Raman
Light p-polarization optical signal and Raman light s polarized light signal, above-mentioned second spectrometer 512 can receive with frequency light p-polarization signal and and
Frequency light s polarization signal.It therefore, can be by adjusting the angle between half-wave plate 502 and polarization beam apparatus 503 in practical operation
It spends to come so that Raman light p-polarization signal, Raman light s polarization signal and frequency light p-polarization signal and frequency light s polarization signal are logical
Polarization beam apparatus is crossed, to be received by corresponding spectrometer.Specifically: when 502 fast axle of half-wave plate and polarization beam apparatus 503 are flat
When row, Raman light p-polarization signal and the first spectrum can be arrived separately at by polarization beam apparatus 503 with frequency light p-polarization signal
Instrument 511 and the second spectrometer 512, it is p-polarization originally that the first spectrometer 511, which can receive in Raman optical signal 105, at this time
The signal in direction, the second spectrometer 512 can receive and the signal that in frequency optical signal 106 is originally p-polarization direction.But
It also include Raman light s polarization signal and frequency optical signal 106 since Raman optical signal 105 not only includes Raman light p-polarization signal
It not only include and frequency light p-polarization signal also including and frequency light s polarization signal, therefore in order to allow above-mentioned first spectrometer 511 to receive
To the Raman light s polarization signal in Raman optical signal, and in order to allow the second spectrometer 512 to receive and the sum in frequency optical signal
Above-mentioned half-wave plate 502 is then rotated 45 ° by frequency light s polarization signal, and it is inclined to be converted to p for the polarization direction of Raman light s polarization signal at this time
Shake direction, and then reaches the first spectrometer 511, also, the polarization direction with frequency light s polarization signal by polarization beam apparatus 503
P-polarization direction is converted to, and then the second spectrometer 512 is reached by polarization beam apparatus 503.Based on the above process, the first spectrum
The available complete Raman optical signal 105 of instrument 511, the available complete and frequency optical signal 106 of the second spectrometer 512.
In the present embodiment, by the way that optical signal enters the half-wave plate being arranged before spectrometer in signal collection device and polarization divides
Beam device, by adjusting half-wave plate and polarization beam apparatus angle, thus can make the detection of the first spectrometer is all Raman light p-polarization
Optical signal, the second spectrometer detection be all with frequency light p-polarization optical signal, to ensure that the first spectrometer not only can detecte
Complete Raman optical signal, the second spectrometer not only can detecte complete and frequency optical signal, can also avoid the first spectrometer
The distortion to actual signal come with response difference different band of second spectrometer to different polarization optical signal, further improves
Optical signal measurement system measurement spectral signal it is rich, and measure spectral signal information it is more accurate.
Fig. 6 is the structural schematic diagram for the optical signal measurement system that another embodiment provides.As shown in fig. 6, at above-mentioned
On the basis of one illustrated embodiment, above-mentioned optical signal measurement system further include: bread board 601, half-reflecting mirror 602 and it is micro- at
As device 603, the bread board 601 is vertically fixed on the sample stage 607 for placing sample to be tested 212, the half-reflecting mirror 602
It is detachably mounted on the bread board 601；The half-reflecting mirror 602, the white light 604 for issuing white light source reflect
Extremely 212 surface of sample to be tested, and will be from the transmission of the micro- optical signal 606 of 212 surface reflection of sample to be tested again
Reflex to the microscopic imaging device 603；Optionally, above-mentioned optical signal measurement system further include: be arranged in the half-reflecting mirror
11st reflecting mirror 605 of 602 sides；11st reflecting mirror 605, the white light 604 for issuing the white light source
Reflex to the half-reflecting mirror 602.
Specifically, in the present embodiment, above-mentioned half-reflecting mirror 602 can with reflected light or optical signal, can also with transmitted light or
Person's optical signal, above-mentioned microscopic imaging device 603 can be microscope, be also possible to charge coupled cell (Charge-coupled
Device, CCD) imaging sensor, it can also be other microscopic imaging devices.It should be noted that white light in the present embodiment
Light source without limitation, as long as can generate micro-imaging experiment needed for white light 604.The white light 604 can be by a white light
Desk lamp generates, and can also be mixed by feux rouges, blue light and yellow light three primary colors.Optionally, the white light that above-mentioned white light source issues
604 can directly be reflected on above-mentioned half-reflecting mirror 602, can also be reflected by the 11st reflecting mirror 605 being added in optical path
The white light 604 issued from white light source is reflexed to half-reflecting mirror 602, in the present embodiment specific on half-reflecting mirror 602
Mode is without limitation.
Wherein, it is reflexed on half-reflecting mirror 602 by the white light 604 that white light source issues, white light 604 passes through half-reflecting mirror
602 reflex to sample to be tested 212, reflect available micro- optical signal 606 through sample to be tested 212, which passes through
The transmission and reflection for crossing half-reflecting mirror 602 are finally entered to microscopic imaging device 603.The micro- optical signal 606 carries to be measured
The sample surfaces macroscopic structure information of sample 212, so as to observe the topographical information of sample to be tested 212.
In order to better understand optical signal measurement system provided in this embodiment, optical signal is measured now in conjunction with Fig. 1 and Fig. 6
The overall work principle of system is introduced, the optical path which includes above-mentioned Raman optical signal 105 and with frequency optical signal 106:
First by light output arrangement 111 export three-beam, a branch of picosecond of visible light 101, a branch of femtosecond infrared light 102,
Then a branch of Raman light 103 adjusts the light path of picosecond visible light 101, so that adjusted picosecond can by delay line device 112
Light-exposed 104 light path and the optical path difference of femtosecond infrared light 102 are 0, and adjusted picosecond of visible light 104 is passed through the 5th reflection
Mirror 241 reflexes to the 6th reflecting mirror 242, and the 6th reflecting mirror 242 further reflexes to adjusted picosecond of visible light 104 to be measured
212 surface of sample；Femtosecond infrared light 102 is reflexed into the 4th reflecting mirror 232, the 4th reflecting mirror 232 by third reflecting mirror 231
Femtosecond infrared light 102 is further reflexed into 212 surface of sample to be tested；It is available after the surface reflection of sample to be tested 212
With frequency optical signal 106, and the 9th reflecting mirror 301 will be reflexed to frequency optical signal 106, through the 9th further reflection of reflecting mirror 301
To the tenth reflecting mirror 302, signal collection device 115 then is reflexed to through the tenth reflecting mirror 302.It should be noted that in Fig. 6
Third reflecting mirror 231, the 4th reflecting mirror 232, the 5th reflecting mirror 241 and the 6th reflecting mirror 242 belong to the delay line device in Fig. 1
The 9th reflecting mirror 301 and the tenth reflecting mirror 302 in 112, Fig. 6 belong to the second light reflecting device 114 in Fig. 1.By light output
The Raman light 103 that device 111 exports reflexes to beam splitter 412 by the 7th reflecting mirror 411, reflexes to through beam splitter 412 to be measured
Sample 212, after the reflection of sample to be tested 212, available Raman optical signal 105, and Raman optical signal 105 is reflexed to point
Beam mirror 412 is transmitted through the 8th reflecting mirror 413 through beam splitter 412, then reflexes to the 4th reflector element through the 8th reflecting mirror 413
402, signal collection device 115 is reflexed to by the 4th reflector element 402.It should be noted that beam splitter 412 in Fig. 6,
Eight reflecting mirrors 413 and the 4th reflector element 402 belong to the first light reflecting device 113 in Fig. 1.It is issued by white light source white
Light 604 reflexes to the 11st reflecting mirror 605, reflexes to half-reflecting mirror 602 through the 11st reflecting mirror 605, anti-through half-reflecting mirror 602
It is incident upon sample to be tested 212, after the reflection of sample to be tested 212, available micro- optical signal 606 will be through sample to be tested 212
Micro- optical signal 606 after reflection is transmitted through half-reflecting mirror 602, then reflexes to microscopic imaging device through half-reflecting mirror 602
603.It should be noted that can use micro- when the half-reflecting mirror 602 on bread board 601 moves into optical signal measurement system
The micro- optical signal 606 of 603 test sample of imaging device；When the half-reflecting mirror 602 on bread board 601 removes optical signal measurement system
When system, the Raman optical signal 105 of 115 test sample of signal collection device can use.Believe in optical signal measurement system and frequency light
Numbers 106 can collect all the time by signal collection device 115 and detect.
In the present embodiment, when half-reflecting mirror move into optical signal measurement system when, can use microscopic imaging device collect to
The micro- optical signal of sample can use signal collection device and collect sample when half-reflecting mirror removes optical signal measurement system
The Raman optical signal of product, no matter half-reflecting mirror moves into optical signal measurement system or removes optical signal measurement system, sample to be tested
And frequency optical signal information can be collected all the time by signal collection device.Middle optical signal measurement system through this embodiment, no
It only can detecte the internal structural information of sample to be tested, also can detecte the structural information of the surface and interface of sample, can also detect
The surface macroscopic structure information of sample to be tested, detects sample to be tested using optical signal measurement system provided in this embodiment
When, without toggling measuring system, it greatly improves the detection efficiencies of sample to be tested, also, Raman light collected is believed
Number different with the spectrum of frequency optical signal and micro- optical signal, this further improves the spectrum letters of optical signal measurement system measurement
Number it is rich.
Fig. 7 is the knot journey schematic diagram for the optical signal measurement system that another embodiment provides.As shown in fig. 7, at above-mentioned
On the basis of one illustrated embodiment, optionally, above-mentioned light output arrangement 111 includes: laser generation module 701, spectral module
702；The laser generation module 701, for generating initial laser 711；The spectral module 702, for described will initially swash
Light 711 is divided, and the femtosecond infrared light 102, described picosecond of visible light 101 and the Raman light 103 are obtained.
Specifically, the laser in above-mentioned laser generation module 701 can be femto-second laser in the present embodiment, it can also
To be semiconductor laser, free electron laser can also be, the present embodiment is to the laser class in laser generation module 701
Type is without limitation.The initial laser 711 that above-mentioned laser generation module 701 generates, by the beam splitting system in spectral module 702
721, above-mentioned initial laser 711 is divided into three beams of laser, is respectively used to generate femtosecond infrared light 102, picosecond visible light 101 and draw
Graceful light 103.Following laser that initial laser 711 will be generated in using powerful femto-second laser as laser generation module 701
Device is to exemplify.
Optionally, above-mentioned femto-second laser generation initial laser 711 needs a branch of seed light 715 and a branch of pump light 716,
Seed light 715 is generated by oscillator stage pulse laser 712, and pump light 716 is generated by laser pump source 713, by seed light 715
It is input to amplifying stage laser 714 simultaneously with pump light 716, seed light 715 is coupled with pump light 716, and final output is above-mentioned just
Beginning laser 711.
Optionally, above-mentioned beam splitting system 721 can be the beam splitting system being made of multiple reflecting mirrors and multiple beam splitters
721, the present embodiment to 721 type of beam splitting system without limitation, as long as the beam splitting system 721 can divide above-mentioned initial laser 711
At three beams of laser needed for spectrum experiment, wherein beam of laser is for generating femtosecond infrared light 102, beam of laser for producing
Rawhide second visible light 101, beam of laser are for generating Raman light 103.
Optionally, the beam of laser in above-mentioned 3 beam laser is after laser parameter amplifier 731, available same light path
Two beam frequencies similar in shoot laser, after this two beams laser enters conversion mixer 732 together, by a difference frequency crystal,
The frequency of laser is exported as the difference of the frequency of two incident lasers, then available longer wavelengths of infrared light, is adjusted by computer
The output wavelength of laser parameter amplifier 731, femtosecond infrared light 102 needed for available spectrum experiment.
Optionally, the beam of laser in above-mentioned 3 beam laser obtains spectrum experiment institute after 4f laser pulse forming system 733
Picosecond visible light 101 needed, wherein 4f laser pulse forming system is as shown in Figure 7a, and the system is by grating 725, cylindrical lens 723, flat
Face reflecting mirror 722 and slit 724 form.Grating 725 is passed through after 711 dispersion of initial laser that femto-second laser exports
It crosses the collimation of cylindrical lens 723 to be output on plane mirror 722, wherein slit 724 only allows the light of wherein sub-fraction wavelength logical
It crosses, the light reflected from plane mirror 722 is along backtracking, so that the bandwidth reduction to femto-second laser pulse is realized, into
And obtain picosecond visible light 101 needed for spectrum experiment.
Optionally, the beam of laser in above-mentioned 3 beam laser is after second harmonic bandwidth compression set 735, then conduct
Pump light 716 enters laser parameter amplifier 731, obtains shoot laser similar in two beam frequencies, then passes through filter plate 726
Selective transmission filters wherein light beam, retains light beam as Raman light 103 needed for spectrum experiment.
In the present embodiment, initial laser 711 is generated by the laser generation module 701 in light output arrangement 111, by being divided
Above-mentioned initial laser 711 is divided by module 702, obtains testing required femtosecond infrared light 102,101 and of picosecond visible light
Raman light 103.Since the photoelectricity second order susceptibility coefficient of general specimen material is extremely weak, so being only improved the energy of incident light
The sample and frequency optical signal that can be observed can be obtained, thus selects to use high-power femto-second laser as laser generation module
Laser in 701, so as to measure the information of the internal structural information of more Multi-example and the surface and interface of sample, also, institute
The Raman optical signal 105 of acquisition is different with the spectrum of frequency optical signal 106, and which raises the spectrum of optical signal measurement system measurement
Signal it is rich.
Optical signal measurement system provided in this embodiment, comprising: light output arrangement, delay line device, the first light reflection dress
It sets, the second light reflecting device and signal collection device, initial laser is generated by the laser generation module in light output arrangement, by
Above-mentioned initial laser is divided by spectral module, obtains testing required femtosecond infrared light, picosecond visible light and Raman light.By
It is extremely weak in the photoelectricity second order susceptibility coefficient of general specimen material, so the energy for being only improved incident light could be obtained and can be seen
The sample and frequency optical signal of survey, thus the laser for using high-power femto-second laser as laser generation module is selected, thus
The more information of sample can be measured.When being detected using optical signal measurement system provided in this embodiment to sample to be tested,
Without toggling measuring system, it greatly improves the detection efficiency of sample to be tested, and the sample to be tested of the present embodiment measurement
Type it is more abundant, further improve the rich of the spectral signal of optical signal measurement system measurement.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
Limitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention
Protect range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (11)
1. a kind of optical signal measurement system characterized by comprising light output arrangement, delay line device, the first light reflection dress
It sets, the second light reflecting device and signal collection device；
The light output arrangement, for exporting femtosecond infrared light and picosecond visible light to the delay line device, and to be measured
Sample exports Raman light；
The delay line device, for adjusting the light path of picosecond visible light, so that the femtosecond infrared light and adjusted
Optical path difference between picosecond visible light is equal to 0, and the femtosecond infrared light and adjusted picosecond of visible light are exported extremely simultaneously
Sample to be tested surface；
First light reflecting device, Raman light signal reflex for that will be reflected through the sample to be tested to the signal
Collection device；Wherein, the Raman optical signal carries the structural information inside the sample to be tested；
Second light reflecting device will reflex to described for will obtain through the sample to be tested surface reflection and frequency optical signal
Signal collection device；Wherein, described and frequency optical signal carries the surface and interface structural information or described to be measured of the sample to be tested
The structural information of contact interface when interface and other object contacts.
2. optical signal measurement system according to claim 1, which is characterized in that the delay line device is displacement platform, the
One reflector element, the second reflector element, the displacement platform include pedestal and the removable branch that is arranged on the guide rail of the pedestal
Frame is provided with the first reflecting mirror and the second reflecting mirror on the movable supporting frame；
First reflecting mirror and second reflecting mirror, form 180 ° of reversion optical paths, for adjusting picosecond visible light
Light path, so that the optical path difference between the femtosecond infrared light and adjusted picosecond of visible light is equal to 0；
First reflector element is used for the femtosecond infrared light reflection to the sample to be tested surface；
Second reflector element is used for the adjusted picosecond of visible light output reflection to the sample to be tested surface.
3. optical signal measurement system according to claim 2, which is characterized in that first reflector element includes that third is anti-
Penetrate mirror and the 4th reflecting mirror；
The third reflecting mirror is used for the femtosecond infrared light reflection to the 4th reflecting mirror；
4th reflecting mirror, the femtosecond infrared light reflection for will be reflected from the third reflecting mirror is to described
Sample to be tested surface.
4. optical signal measurement system according to claim 2, which is characterized in that second reflector element includes the 5th anti-
Penetrate mirror and the 6th reflecting mirror；
5th reflecting mirror is used for the adjusted picosecond of visible light output reflection to the 6th reflecting mirror；
6th reflecting mirror, for will be from the adjusted picosecond of visible reflectance of the 5th reflecting mirror to institute
State sample to be tested surface.
5. optical signal measurement system according to claim 1-4, which is characterized in that first light reflecting device
It include: third reflecting unit and the 4th reflector element；
The third reflecting unit, Raman light reaction for exporting the light output arrangement to the sample to be tested surface,
And by the Raman light signal reflex after sample to be tested reflection to the 4th reflector element；
4th reflector element is used for the Raman light signal reflex to the signal collection device.
6. optical signal measurement system according to claim 5, which is characterized in that the third reflecting unit includes: the 7th
Reflecting mirror, beam splitter and the 8th reflecting mirror；
7th reflecting mirror, Raman light reaction for exporting the light output arrangement to the beam splitter；
The beam splitter, for by from the Raman light reaction of the 7th reflecting mirror to the sample to be tested surface, and will
Raman optical signal after sample to be tested reflection is transmitted through the 8th reflecting mirror；
8th reflecting mirror is used for the Raman light signal reflex to the 4th reflector element.
7. optical signal measurement system according to claim 1-4, which is characterized in that second light reflecting device
It include: the 9th reflecting mirror and the tenth reflecting mirror；
9th reflecting mirror, for obtain from the sample to be tested surface reflection and frequency optical signal to be reflexed to the tenth
Reflecting mirror；
Tenth reflecting mirror, for described and frequency optical signal to be reflexed to the signal collection device.
8. optical signal measurement system according to claim 1-4, which is characterized in that the signal collection device packet
It includes: the first spectrometer, the second spectrometer, half-wave plate and polarization beam apparatus；
The polarization beam apparatus, for exporting the p-polarization optical signal in the Raman optical signal to first spectrometer, with
And for exporting the p-polarization optical signal in described and frequency optical signal to second spectrometer；
The half-wave plate, for the s polarized light signal in the Raman optical signal and described and frequency optical signal to be converted to p-polarization
After optical signal, output to the polarization beam apparatus.
9. optical signal measurement system according to claim 1-4, which is characterized in that the optical signal measurement system
Further include: bread board, half-reflecting mirror and microscopic imaging device, the bread board are vertically fixed on the sample for placing sample to be tested
On platform, the half-reflecting mirror is detachably mounted on the bread board；
The half-reflecting mirror, white light reflection for issuing white light source to the sample to be tested surface, and will be from institute
The micro- optical signal transmission for stating sample to be tested surface reflection reflexes to the microscopic imaging device again.
10. optical signal measurement system according to claim 9, which is characterized in that the optical signal measurement system further include:
11st reflecting mirror of the half-reflecting mirror side is set；
11st reflecting mirror, white light reflection for issuing the white light source to the half-reflecting mirror.
11. optical signal measurement system according to claim 1-4, which is characterized in that the light output arrangement packet
It includes: laser generation module, spectral module；
The laser generation module, for generating initial laser；
The spectral module obtains the femtosecond infrared light, described picosecond of visible light for the initial laser to be divided
With the Raman light.
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