CN110081815B - Low-coherence interference fringe distortion correction method based on white light LED - Google Patents

Low-coherence interference fringe distortion correction method based on white light LED Download PDF

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CN110081815B
CN110081815B CN201910340846.2A CN201910340846A CN110081815B CN 110081815 B CN110081815 B CN 110081815B CN 201910340846 A CN201910340846 A CN 201910340846A CN 110081815 B CN110081815 B CN 110081815B
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江俊峰
王双
刘铁根
王润东
刘琨
王雪
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
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    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
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Abstract

The invention discloses a low coherence interference fringe distortion correction method based on a white light LED, which comprises the steps of firstly carrying out Fourier transform on interference signals to obtain frequency domain information corresponding to different spectral ranges; then obtaining a relational expression between wave numbers corresponding to different spectral ranges and sampling points; uniformly resampling the two groups of frequency domain signals respectively through cubic spline interpolation to realize dispersion compensation of the signals; and finally, aligning and superposing according to the position relation of the two fringes to realize the distortion correction of the interference fringes. The method is not only suitable for the distortion correction of the interference fringes of the single-Gaussian light source demodulation system, but also suitable for the double-Gaussian or even multi-Gaussian light source demodulation system; based on the central wave number of each Gaussian light source, the dispersion distortion correction of the interference fringes corresponding to each Gaussian light source is realized, meanwhile, the alignment of multiple groups of interference fringe centers can be realized, and the problem of interference fringe distortion introduced by multiple Gaussian light sources is solved; compared with the original interference fringe, the demodulation precision of the corrected interference fringe is obviously improved.

Description

Low-coherence interference fringe distortion correction method based on white light LED
Technical Field
The invention belongs to the field of optical fiber sensing, and particularly relates to an interference fringe distortion correction method for a low-coherence interference system taking a white light LED as a light source.
Background
The white light LED is one of important broadband light sources, has the advantages of low power consumption, high efficiency, high brightness, small volume, low price and the like, and is widely applied to low-coherence interference systems. The low-coherence interference system is an effective method for measuring absolute displacement with high precision, and is mainly applied to the fields of surface three-dimensional contour detection, optical coherence tomography and optical fiber sensing.
Generally, methods of demodulating a low-coherence interference signal are classified into an interference pattern method and a phase information method. The methods are based on the obtained low-coherence interference signal, or directly extract the peak position of the interference fringe, or perform discrete Fourier transform to extract phase information so as to realize demodulation. Obtaining a high quality undistorted interference signal pattern is the key to achieving high accuracy demodulation. In a polarization low coherence interference system using birefringent crystals, combined with a white LED light source of double gaussian spectrum, the shape of the interference fringes is severely distorted due to the variation of birefringence difference with the variation of wave number. The distortion of the interference fringes can greatly reduce the demodulation precision, which directly causes that the traditional demodulation methods based on interference patterns, such as an envelope peak method, a central peak position method and the like, are not feasible any more, and in addition, the phase demodulation method of a Space Frequency Domain Algorithm (SFDA) generates nonlinear errors due to the simultaneously generated frequency domain nonlinear effect. It is a very important problem to achieve distortion correction of interference fringes before demodulation to obtain a high quality interference signal.
Disclosure of Invention
The invention aims to solve the problem of interference fringe distortion of a low-coherence interference system based on a multi-Gaussian spectrum light source, and provides a low-coherence interference fringe distortion correction method for a white light LED (light-emitting diode). based on a method of nonlinear correction of a wave number domain and offset correction of interference fringe positions corresponding to different central wave numbers, the low-coherence interference fringes with high quality and high accuracy are obtained, and further the demodulation precision of the low-coherence interference is improved; the method is suitable for solving the problem of interference fringe distortion of a low-coherence interference system containing a double-Gaussian spectrum light source or a multi-Gaussian spectrum light source.
The invention discloses a distortion correction method of low coherence interference fringes based on a white light LED, which adopts the white light LED as a light source, wherein the light source has the characteristic of double Gaussian spectra, a Fabry-Perot (F-P) sensor senses the pressure change of outside air, two surfaces of an F-P cavity form a sensing interferometer, an optical wedge is used as an optical path difference space scanning element to form a receiving interferometer, interference fringes are formed in a local area with zero optical path difference and are received by a linear array CCD (charge coupled device), and three times of spline interpolation is used for carrying out uniform resampling on non-uniform frequency spectrum signals to realize signal distortion correction, and the method specifically comprises the following implementation steps:
step 1, firstly, carrying out discrete Fourier transform on an acquired low-coherence interference fringe signal to obtain an amplitude-frequency signal and a phase signal mixed in (-pi, pi), wherein two obvious Gaussian peak values exist in an amplitude-frequency characteristic curve of the interference fringe signal and respectively correspond to two Gaussian peaks in the amplitude-frequency signal in a white light LED light source;
step 2, respectively extracting frequency domain signals corresponding to two groups of interference fringe signals at different central wave numbers of a Gaussian spectrum of a light source according to two Gaussian spectrum peak values in amplitude-frequency signals of the interference fringe signals;
and 3, respectively carrying out the following operations on the two groups of frequency domain signals: calculating an ideal uniform wave number value sequence corresponding to the frequency domain signal sampling point sequence by taking the birefringence difference corresponding to the central wave number of the single Gaussian spectrum as a reference; performing linear approximation in a single Gaussian spectral range according to a dispersion formula in a visible light range, and calculating an actual non-uniform wave number value sequence corresponding to a frequency domain signal sampling point sequence according to an approximation result;
the ideal uniform wave numerical value sequence k in the step 3i ideal ofThe specific calculation formula of (2) is as follows:
ki ideal of＝2πi/(nNΔd)
Wherein i is a sampling point sequence, i is 1,2,3,4, N is the total number of sampling points, Δ d is the difference between the thicknesses of the optical wedges corresponding to adjacent sampling points, and N is the difference between the birefringence of the optical wedges;
sequence of substantially non-uniform wave number values kIrealityThe following equation can be used to calculate and linearly approximate the difference in birefringence n (k) as a function of the wavenumber k:
kireality＝2πi/[n(kIreality)NΔd]，n(k)＝n0+α(k-k0)
Where α is the slope of the birefringent dispersion, k0Is the central wave number of the Gaussian spectrum, n0Is the central wave number k0A corresponding birefringence difference;
step 4, on the basis of the step 3, uniformly resampling the frequency domain signals according to the calculated ideal uniform wave number value sequence by using a cubic spline interpolation method to obtain corrected frequency domain signals, and then performing inverse discrete Fourier transform to obtain two groups of corrected interference fringes;
step 5, correcting the position of the central peak of another interference fringe by taking the position of the central peak of a certain interference fringe as a reference according to the relation between the birefringence difference corresponding to two central wave numbers of the Gaussian spectrum and the position of the central peak of the interference fringe, aligning the positions of the central peaks of the two groups of interference fringes, and finally superposing the two groups of fringes to obtain the finally corrected interference fringes; the step 5 is further as follows: central wave number k1And k2Central peak position d of corrected interference fringe corresponding to gaussian light1And d2Is calculated as follows, where h is the cavity length of the F-P sensor and n is1Is the central wave number k1Corresponding difference in birefringence, n2Is the central wave number k2The corresponding birefringence difference:
n1(k1)d1＝n2(k2)d2＝2h
ΔL＝[(n1(k1)-n2(k2))d1/n2(k2)]/Δd
and after the central peak value position deviation Delta L of the two groups of interference fringes is obtained through calculation, the two groups of interference fringes are aligned and superposed to obtain the final interference fringes after distortion correction. The step 4 is further as follows: and taking the ideal uniform wave number sequence as a new sampling point, and carrying out cubic spline interpolation uniform resampling on the frequency spectrum signal to obtain the frequency spectrum signal after dispersion correction.
The step 4 is further as follows: and taking the ideal uniform wave number sequence as a new sampling point, and carrying out cubic spline interpolation uniform resampling on the frequency spectrum signal to obtain the frequency spectrum signal after dispersion correction.
Compared with the prior art, the invention has the beneficial effects and advantages that:
1. the method is not only suitable for correcting the distortion of the interference fringes of the single-Gaussian light source demodulation system, but also suitable for the double-Gaussian or even multi-Gaussian light source demodulation system;
2. the method realizes the dispersion distortion correction of the interference fringes corresponding to each Gaussian light source based on the central wave number of each Gaussian light source, can realize the alignment of the centers of a plurality of groups of interference fringes and solves the problem of interference fringe distortion introduced by a plurality of Gaussian light sources;
3. compared with the original interference fringe, the interference fringe corrected by the method of the invention has the advantage that the demodulation precision is obviously improved when the envelope peak method is used for demodulation.
Drawings
FIG. 1 is a schematic diagram of a spatial scanning type low coherence interference fiber sensing atmospheric pressure demodulation device based on a white light LED;
FIG. 2 is a diagram of interference signals and Fourier transform spectrum signals acquired by an actual system, (a) interference signals actually acquired under a pressure of 105kpa, and (b) effective areas of amplitude-frequency signals after Fourier transform;
FIG. 3 is a comparison graph of interference fringes before and after being adjusted using a distortion correction algorithm, (a) interference fringes before and after blue light correction, (b) interference fringes before and after yellow light correction, and (c) total interference fringes before and after correction;
FIG. 4 is a comparison graph of the demodulation results using a phase demodulation algorithm, an envelope peak method, and a distortion correction algorithm;
fig. 5 is a demodulation error comparison graph of the envelope peak method and the distortion correction algorithm, (a) a demodulation error graph of the distortion correction algorithm, and (b) a demodulation error graph of the envelope peak method.
Detailed Description
The technical solution of the present invention is described in detail below with reference to the accompanying drawings and examples.
According to the low coherence interference fringe distortion correction method based on the white light LED, firstly, Fourier transformation is carried out on interference signals to obtain frequency domain information corresponding to different spectral ranges; then obtaining a relational expression between wave numbers corresponding to different spectral ranges and sampling points according to a dispersion formula; uniformly resampling the two groups of frequency domain signals respectively through cubic spline interpolation to realize dispersion compensation of the signals; and finally, aligning and superposing according to the position relation of the two fringes to realize the distortion correction of the interference fringes.
Fig. 1 shows a diagram of a low coherence interference demodulation device based on white light LED for external atmospheric pressure measurement according to the method of the present invention. The device selects a white light LED containing double Gaussian spectrums as a light source, a Fabry-Perot sensor as a sensing element for sensing external air pressure change, and an optical wedge as an optical path difference space scanning element, and generates interference fringes near zero optical path difference based on a double-beam interference principle. The light emitted by the white light LED light source 1 enters the optical fiber F-P sensor 3 through the 3dB coupler 2, the optical fiber F-P sensor is used as a sensing probe for sensing the external atmospheric pressure to convert the change of the external pressure into the change of the cavity length, two surfaces of the F-P cavity form a sensing interferometer, an optical signal modulated by the F-P sensor is transmitted out of an outlet of the coupler 2 and sequentially transmitted through the cylindrical mirror 4, the polarizer 5, the birefringent wedge 6 and the analyzer 7 to finally reach the linear array CCD 8, the birefringent wedge 6 provides optical path difference of spatial scanning distribution, and when the optical path difference caused by the optical path difference 6 is matched with the optical path difference caused by the optical path difference 3, obvious low-coherence interference fringes can be generated in a corresponding local area of the linear array CCD 8.
The low coherence interference fringe distortion correction method based on the white light LED is verified by the following experiments, and the verification results are specifically shown in figures 2 to 5.
The pressure change required in the experiment was generated by a high precision, highly stable pressure controller that could achieve a control precision of 10Pa, with the control pressure monotonically increasing from 3kPa to 230kPa at 1kPa intervals and with the time interval for pressure change being 5 minutes. The effective pixel number of the linear array CCD is 3000, the pixel synchronous pulse of the CCD is used as an external sampling clock of an acquisition card to perform high-speed scanning sampling on interference optical signals, a digital signal obtained after analog-to-digital conversion is composed of 3000 discrete data points, and a CCD pixel interval is represented between every two adjacent data.
Step 1, firstly, the interference fringe signal output by the acquisition card is subjected to discrete Fourier transform to convert a time domain signal x (n) into a frequency domain X (k), wherein
Figure GDA0002766935410000051
Fig. 2 shows that 105kpa is taken as an effective region of a frame of low coherence interference signal collected by the CCD and an amplitude-frequency characteristic curve after discrete fourier transform, the start frequency sampling point 34 and the end frequency sampling point 57 are extracted as effective frequency intervals, interference fringes corresponding to different central wave numbers, namely, blue light interference fringes and yellow light interference fringes are respectively extracted, and noise signals of other frequency bands are simultaneously filtered.
And 2, decomposing the filtered frequency domain signal into an amplitude-frequency signal and a phase-frequency signal, and then performing phase expansion on the two sections of phase-frequency signals by taking the frequency sampling point 41 and the sampling point 54 as reference phases respectively, wherein the phase expansion is performed according to the following recursive expression:
Figure GDA0002766935410000061
wherein u () is a step function,
Figure GDA0002766935410000062
is the relative phase, ΩiAre frequency sampling points.
And step 3, respectively calculating ideal uniform wave number value sequences k corresponding to two central wave numbers according to the formula and the sampling point sequences (i is 1,2,3,4., 3000)i ideal ofAnd a substantially non-uniform sequence of wave number values kIrealityThe calculation formula is as follows:
ki ideal of＝2πi/(nNΔd)
kIreality＝2πi/[n(kIreality)NΔd]
Wherein n (k) is n0+α(k-k0)。
And 4, resampling the amplitude-frequency signals corresponding to the two central wave numbers and the expanded phase-frequency signals respectively according to the uniform wave numerical sequence by using a cubic spline interpolation method to obtain two groups of corrected frequency signals.
Step 5, the frequency domain signal X (k) is converted into a time domain signal x (n) by carrying out inverse Fourier transform on the corrected frequency spectrum signal to obtain corrected interference fringes, wherein
Figure GDA0002766935410000063
And respectively obtaining the corrected interference fringes of the blue light and the yellow light.
In step 6, the positions of the central peaks of the interference fringes of the blue light and the yellow light can be related by the following formula:
n1(k1)d1＝n2(k2)d2＝2h
wherein n is1(k1) And n2(k2) The difference in birefringence values corresponding to the central wavenumbers of the yellow light and the blue light, respectively, so that the difference in the central distances of the interference fringes of the blue light and the yellow light can be obtained by the following formula:
ΔL＝[(n1(k1)-n2(k2))d1/n2(k2)]/Δd
the blue and yellow central peaks are aligned and then superimposed to obtain the corrected total interference fringe, as shown in figure 3. Obviously, the center peak value of the corrected interference fringes is aligned, the symmetry is improved, the center peak value is aligned with the envelope peak value, and the intensity of the center peak value is improved.
In order to verify the feasibility of the method provided by the invention, the interference fringes before and after correction are demodulated by using an envelope peak method and are demodulated by using a phase demodulation method for comparison, and the obtained demodulation result is shown in fig. 4, so that the linearity of the envelope peak position curve of the interference fringes after correction is obviously improved compared with that before correction, and the problem of jump of phase demodulation is avoided. Fig. 5 is an error contrast diagram after polynomial fitting is performed on the external pressure and the envelope peak position data of the interference fringes before and after correction, and it can be seen from the diagram that the maximum error after correction is 0.058kpa, the maximum error before correction is 1.665kpa, and the demodulation accuracy is improved by about 28 times.

Claims (2)

1. A low coherence interference fringe distortion correction method based on a white light LED is characterized in that the white light LED is adopted as a light source, the light source has the characteristic of double Gaussian spectrums, a Fabry-Perot F-P sensor senses the pressure change of outside air, two surfaces of an F-P cavity form a sensing interferometer, an optical wedge is used as an optical path difference space scanning element to form a receiving interferometer, interference fringes are formed in a local area with zero optical path difference and received by a linear array CCD (charge coupled device), and three-time spline interpolation is used for carrying out uniform resampling on non-uniform spectrum signals to realize signal distortion correction, and the method specifically comprises the following steps:
step 1, firstly, carrying out discrete Fourier transform on an acquired low-coherence interference fringe signal to obtain an amplitude-frequency signal and a phase signal mixed in (-pi, pi), wherein two obvious Gaussian peak values exist in an amplitude-frequency characteristic curve of the interference fringe signal and respectively correspond to two Gaussian peaks in the amplitude-frequency signal in a white light LED light source;
step 2, respectively extracting frequency domain signals corresponding to two groups of interference fringe signals at different central wave numbers of a Gaussian spectrum of a light source according to two Gaussian spectrum peak values in amplitude-frequency signals of the interference fringe signals;
and 3, respectively carrying out the following operations on the two groups of frequency domain signals: calculating an ideal uniform wave number value sequence corresponding to the frequency domain signal sampling point sequence by taking the birefringence difference corresponding to the central wave number of the single Gaussian spectrum as a reference; performing linear approximation in a single Gaussian spectral range according to a dispersion formula in a visible light range, and calculating an actual non-uniform wave number value sequence corresponding to a frequency domain signal sampling point sequence according to an approximation result;
the ideal uniform wave numerical value sequence k in the step 3i ideal ofThe specific calculation formula of (2) is as follows:
ki ideal of＝2πi/(nNΔd)
Wherein i is a sampling point sequence, i is 1,2,3,4, N is the total number of sampling points, Δ d is the difference between the thicknesses of the optical wedges corresponding to adjacent sampling points, and N is the difference between the birefringence of the optical wedges;
sequence of substantially non-uniform wave number values kIrealityThe following equation can be used to calculate and linearly approximate the difference in birefringence n (k) as a function of the wavenumber k:
kireality＝2πi/[n(kIreality)NΔd]，n(k)＝n0+α(k-k0)
Where α is the slope of the birefringent dispersion, k0Is the central wave number of the Gaussian spectrum, n0Is the central wave number k0A corresponding birefringence difference;
step 4, on the basis of the step 3, uniformly resampling the frequency domain signals according to the calculated ideal uniform wave number value sequence by using a cubic spline interpolation method to obtain corrected frequency domain signals, and then performing inverse discrete Fourier transform to obtain two groups of corrected interference fringes;
step 5, correcting the position of the central peak of another interference fringe by taking the position of the central peak of a certain interference fringe as a reference according to the relation between the birefringence difference corresponding to two central wave numbers of the Gaussian spectrum and the position of the central peak of the interference fringe, aligning the positions of the central peaks of the two groups of interference fringes, and finally superposing the two groups of fringes to obtain the finally corrected interference fringes; the step 5 is further as follows: central wave number k1And k2Central peak position d of corrected interference fringe corresponding to gaussian light1And d2Is calculated as follows, where h is the cavity length of the F-P sensor and n is1Is the central wave number k1Corresponding difference in birefringence, n2Is the central wave number k2The corresponding birefringence difference:
n1(k1)d1＝n2(k2)d2＝2h
ΔL＝[(n1(k1)-n2(k2))d1/n2(k2)]/Δd
and after the central peak value position deviation Delta L of the two groups of interference fringes is obtained through calculation, the two groups of interference fringes are aligned and superposed to obtain the final interference fringes after distortion correction.
2. The method of claim 1, wherein the method further comprises,
the step 4 is further as follows: and taking the ideal uniform wave number sequence as a new sampling point, and carrying out cubic spline interpolation uniform resampling on the frequency spectrum signal to obtain the frequency spectrum signal after dispersion correction.
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Publication number Priority date Publication date Assignee Title
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CN112525070B (en) * 2020-11-18 2022-04-01 南京理工大学 Vibration-resistant white light interference measurement method based on non-uniform sampling correction
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CN115931022B (en) * 2023-01-04 2023-05-23 北京佰为深科技发展有限公司 Demodulation system of optical fiber Fabry-Perot sensor

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA956495A (en) * 1971-07-19 1974-10-22 John B. Clark Aberation free compensator for use in interferometry
GB2326231B (en) * 1997-05-09 2001-07-25 Deutsch Zentr Luft & Raumfahrt Method for calibrating spectroradiometers
CN1309759A (en) * 1998-06-02 2001-08-22 探索研究院 Method and apparatus for confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation
CN101031830A (en) * 2004-09-20 2007-09-05 奥普森斯公司 Optical sensor using low-coherence interferometry
CN102620665A (en) * 2011-01-26 2012-08-01 株式会社三丰 Method and apparatus for performing film thickness measurements using white light scanning interferometry
CN102680010A (en) * 2012-05-07 2012-09-19 天津大学 Quick and high-precision low coherence interference demodulation method based on calibration algorithm and phase shift technology
CN103267536A (en) * 2013-05-07 2013-08-28 天津大学 Low coherent interference demodulation method based on chromatic dispersion characteristic and envelopment peak value
CN103398732A (en) * 2013-08-08 2013-11-20 天津大学 Low-coherence interferometric demodulation method based on spectrum nonlinear effect dispersion compensation
CN103528524A (en) * 2013-09-16 2014-01-22 广东工业大学 Device and method of perspective measurement of distribution of out-of-plane displacement field in resin matrix composite
CN103759748A (en) * 2014-01-08 2014-04-30 天津大学 Fast low-coherence interference demodulation method based on position related dispersion characteristics
CN104215176A (en) * 2014-09-17 2014-12-17 中国科学院上海光学精密机械研究所 High accuracy optical interval measurement device and method
CN105300290A (en) * 2015-09-28 2016-02-03 北京交通大学 Absolute distance measurement system based on wavenumber resolution low coherence interferometry
CN107328740A (en) * 2017-06-06 2017-11-07 中国科学院上海光学精密机械研究所 Polarize domain optical coherence tomography spectroscopic calibration method
US9915520B2 (en) * 2015-09-14 2018-03-13 Thorlabs, Inc. Apparatus and methods for one or more wavelength swept lasers and the detection of signals thereof
CN109099943A (en) * 2018-09-21 2018-12-28 中国人民解放军国防科技大学 Self-calibration and self-compensation type white light path matching differential interference phase demodulation system and method thereof
CN109211415A (en) * 2018-11-20 2019-01-15 电子科技大学 A kind of Wavelength calibration method based on light source light spectrum characteristic wavelength

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA956495A (en) * 1971-07-19 1974-10-22 John B. Clark Aberation free compensator for use in interferometry
GB2326231B (en) * 1997-05-09 2001-07-25 Deutsch Zentr Luft & Raumfahrt Method for calibrating spectroradiometers
CN1309759A (en) * 1998-06-02 2001-08-22 探索研究院 Method and apparatus for confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation
CN101031830A (en) * 2004-09-20 2007-09-05 奥普森斯公司 Optical sensor using low-coherence interferometry
CN102620665A (en) * 2011-01-26 2012-08-01 株式会社三丰 Method and apparatus for performing film thickness measurements using white light scanning interferometry
CN102680010A (en) * 2012-05-07 2012-09-19 天津大学 Quick and high-precision low coherence interference demodulation method based on calibration algorithm and phase shift technology
CN103267536A (en) * 2013-05-07 2013-08-28 天津大学 Low coherent interference demodulation method based on chromatic dispersion characteristic and envelopment peak value
CN103398732A (en) * 2013-08-08 2013-11-20 天津大学 Low-coherence interferometric demodulation method based on spectrum nonlinear effect dispersion compensation
CN103528524A (en) * 2013-09-16 2014-01-22 广东工业大学 Device and method of perspective measurement of distribution of out-of-plane displacement field in resin matrix composite
CN103759748A (en) * 2014-01-08 2014-04-30 天津大学 Fast low-coherence interference demodulation method based on position related dispersion characteristics
CN104215176A (en) * 2014-09-17 2014-12-17 中国科学院上海光学精密机械研究所 High accuracy optical interval measurement device and method
US9915520B2 (en) * 2015-09-14 2018-03-13 Thorlabs, Inc. Apparatus and methods for one or more wavelength swept lasers and the detection of signals thereof
CN105300290A (en) * 2015-09-28 2016-02-03 北京交通大学 Absolute distance measurement system based on wavenumber resolution low coherence interferometry
CN107328740A (en) * 2017-06-06 2017-11-07 中国科学院上海光学精密机械研究所 Polarize domain optical coherence tomography spectroscopic calibration method
CN109099943A (en) * 2018-09-21 2018-12-28 中国人民解放军国防科技大学 Self-calibration and self-compensation type white light path matching differential interference phase demodulation system and method thereof
CN109211415A (en) * 2018-11-20 2019-01-15 电子科技大学 A kind of Wavelength calibration method based on light source light spectrum characteristic wavelength

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Determination of fringe order in white-light interference microscopy;Peter de Groot，et al;《APPLIED OPTICS》;20020801;第41卷(第22期);全文 *
空间扫描型光纤法布里-泊罗传感解调中LED光源的影响研究;江俊峰等;《光学学报》;20140228;第34卷(第2期);全文 *
航空光纤压力偏振低相干干涉解调的理论与方法研究;王双;《中国博士学位论文全文数据库（信息科技辑）》;20151115(第11期);全文 *

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