CN110076128A - The cleaning device of single-layer capacitor process - Google Patents
The cleaning device of single-layer capacitor process Download PDFInfo
- Publication number
- CN110076128A CN110076128A CN201910481287.7A CN201910481287A CN110076128A CN 110076128 A CN110076128 A CN 110076128A CN 201910481287 A CN201910481287 A CN 201910481287A CN 110076128 A CN110076128 A CN 110076128A
- Authority
- CN
- China
- Prior art keywords
- npp
- groove body
- fast
- hollow
- inlet pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000003990 capacitor Substances 0.000 title claims abstract description 16
- 239000002356 single layer Substances 0.000 title claims abstract description 16
- 239000007921 spray Substances 0.000 claims abstract description 44
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 28
- 230000005587 bubbling Effects 0.000 claims abstract description 23
- 238000007654 immersion Methods 0.000 claims abstract description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 11
- 238000005507 spraying Methods 0.000 abstract description 4
- 239000012530 fluid Substances 0.000 abstract description 3
- 238000005406 washing Methods 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000013019 agitation Methods 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a kind of cleaning devices of single-layer capacitor process, the spray equipment that is connected including NPP groove body and respectively with controller, bubbling device, fast arranging device and impregnate water inlet pipe.The spray equipment that the present invention uses, spraying effect are good；The bubbling device of use, improves air bubble intensity uniformity, and cleaning effect is good；The fast arranging device used is effectively taken away medical fluid foreign matter for being attached to product surface etc. by the quick drain washed；The present invention realizes immersion, overflow, spray, bubbling, the fast combined type cleaning for arranging basic function.
Description
Technical field
The present invention relates to single-layer capacitor manufacturing technology field more particularly to a kind of cleanings of single-layer capacitor process
Device.
Background technique
Single layer capacitor belongs to semicon industry, and the cleaning of product surface is particularly important, and common cleaning way at all can not
The cleannes requirement for reaching the industry seriously affects product quality to will appear Abnormal Insulation, the problems such as capacitance is abnormal.
Common cleaning device is generally immersion, overflow or spray, sputter, plating, develop in capacitor process,
It removes photoresist, etch etc. and being required to clean product surface after processing steps, because single layer capacitor packages are light and short, common is clear
It washes mode easily to generate fragment and secretly split, seriously affects product qualification rate and product quality.How cleaning effect and product guaranteed
Quality is that the problem of facing is needed in each single-layer products technical process.
Summary of the invention
The present invention is to solve the above problems, provide a kind of cleaning device of single-layer capacitor process.
In order to solve the above technical problems, the technical scheme is that the cleaning device of single-layer capacitor process, packet
Include NPP groove body and the spray equipment being connected respectively with controller, bubbling device, fast arranging device and immersion water inlet pipe；
NPP groove body is open-topped cavity cuboid structure；
Spray equipment includes the spray tube for being mounted on two sides at the top of NPP groove body, and the outer wall of spray tube is arranged at intervals with several
A nozzle, one end of spray tube are connected with spray wig-wag, and the other end of spray tube is connected with spray water inlet pipe；
Bubbling device includes the bubbling wig-wag being mounted at the top of connecting bracket, and the bottom of connecting bracket is equipped with hollow drum
Plate is steeped, there are gaps between the hollow surrounding for being bubbled plate and the inner wall of NPP groove body, and hollow bubbling plate divides the interior of NPP groove body
Chamber is epicoele and cavity of resorption, and the hollow upper surface for being bubbled plate offers several bubble holes, each bubble holes with hollow bubbling plate
Hollow cavity be connected, the hollow quadrangle for being bubbled plate is connected with nitrogen inlet duct, and nitrogen inlet duct and the hollow plate that is bubbled
Hollow cavity is connected；
Fast arranging device includes the fast exclusive shell for being mounted on NPP groove body bottom, is connected in turn from the bottom to top in fast exclusive shell
Operated pneumatic valve arranges pallet fastly, arranges sealing ring fastly, and the bottom surface of the NPP groove body above fast row's sealing ring offers fast row's mouth；
It impregnates water inlet pipe and is mounted on the bottom of NPP groove body, and impregnate water inlet pipe and be connected with the cavity of resorption of NPP groove body.
Further, overflow port is offered at the top of NPP groove body.
Further, operated pneumatic valve and fast row's pallet telescopic connection.
Further, the operated pneumatic valve air inlet pipe of operated pneumatic valve bottom is pierced by the bottom surface of fast exclusive shell.
Further, it is U-shaped for impregnating water inlet pipe, and the both ends for impregnating water inlet pipe are distributed in the diagonal of NPP groove body bottom
On line.
The spray equipment that the present invention uses, spraying effect are good；The bubbling device of use improves air bubble intensity uniformity, clearly
It is good to wash effect；The fast arranging device used will effectively be attached to medical fluid foreign matter of product surface etc. and pass through the quick drain of washing
And it takes away；The present invention realizes immersion, overflow, spray, bubbling, the fast combined type cleaning for arranging basic function.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention one；
Fig. 2 is schematic structural view of the invention two；
Fig. 3 is schematic structural view of the invention three.
Wherein: 1-NPP groove body, 2- spray equipment, 3- bubbling device, the fast arranging device of 4-, 5- overflow port, 6- impregnate water inlet
Pipe, 201- nozzle, 202- spray wig-wag, 203- spray tube, and 204- sprays water inlet pipe, and 301- is bubbled wig-wag, 302- connection
Bracket, 303- nitrogen inlet duct, the hollow bubbling plate of 304-, exclusive shell, 402- operated pneumatic valve, 403- arrange pallet to 401- fastly fastly,
404- arranges sealing ring, 405- operated pneumatic valve air inlet pipe fastly.
Specific embodiment
Specific embodiments of the present invention will be further explained by 1-3 with reference to the accompanying drawing.
The cleaning device of single-layer capacitor process, the spray dress being connected including NPP groove body 1 and respectively with controller
It sets 2, bubbling device 3, fast arranging device 4 and impregnates water inlet pipe 6；
NPP groove body 1 is open-topped cavity cuboid structure；
Spray equipment 2 includes the spray tube 203 for being mounted on 1 top two sides of NPP groove body, and the outer wall interval of spray tube 203 is set
Several nozzles 201 are equipped with, one end of spray tube 203 is connected with spray wig-wag 202, and the other end of spray tube 203 is connected with
Spray water inlet pipe 204；
Bubbling device 3 includes the bubbling wig-wag 301 for being mounted on 302 top of connecting bracket, the bottom peace of connecting bracket 302
Equipped with hollow bubbling plate 304, there are gap between the hollow surrounding for being bubbled plate 304 and the inner wall of NPP groove body 1, and hollow drum
Bubble plate 304 divides the inner cavity of NPP groove body 1 to be epicoele and cavity of resorption, and the hollow upper surface for being bubbled plate 304 offers several bubble holes,
Each bubble holes are connected with the hollow hollow cavity for being bubbled plate 304, and the hollow quadrangle for being bubbled plate 304 is connected with nitrogen inlet duct
303, and nitrogen inlet duct 303 is connected with the hollow hollow cavity for being bubbled plate 304；
Fast arranging device 4 includes the fast exclusive shell 401 for being mounted on 1 bottom of NPP groove body, in fast exclusive shell 401 from the bottom to top according to
It is secondary to be connected with operated pneumatic valve 402, fast row's pallet 403, fast row's sealing ring 404, the NPP groove body 1 above fast row's sealing ring 404
Bottom surface offer fast row's mouth；
It impregnates water inlet pipe 6 and is mounted on the bottom of NPP groove body 1, and impregnate water inlet pipe 6 and be connected with the cavity of resorption of NPP groove body 1
It is logical.
The top of NPP groove body 1 offers overflow port 5.
Operated pneumatic valve 402 and fast row's 403 telescopic connection of pallet.
The operated pneumatic valve air inlet pipe 405 of 402 bottom of operated pneumatic valve is pierced by the bottom surface of fast exclusive shell 401.
It is U-shaped for impregnating water inlet pipe 6, and the both ends for impregnating water inlet pipe 6 are distributed on the diagonal line of 1 bottom of NPP groove body.
Spray equipment 2, using a pair of of spray tube 203, and every spray tube 203 can individually carry out spray angles adjustment, spray
Leaching angle can fix or the cycle rotation within the scope of certain angle, two spray tubes 203 can synchronize or be staggered,
The cleaning that this design can all be sprayed the different height of product can also avoid two spray tubes 203 by setting
Spraying effect caused by spray weakens problem, maximumlly plays spraying effect.
Bubbling device 3, this device is hollow design, bubble holes, quadrangle air inlet are opened in surface, improves air bubble intensity uniformity.
Mainly play a role in soaking process, nitrogen allowed to float in ejected wash water agitation, allow cleaning effect more preferably, and bubbling device
3 are swung left and right in the case where being bubbled wig-wag 301 and driving, and make agitation distribution more uniform, reach better cleaning effect, use nitrogen
The reason of be that product surface is avoided to generate problem of oxidation, nitrogen gas purity is high, and the inside not oil-containing, aqueous vapor etc. avoid pollution.
Fast arranging device 4, after operated pneumatic valve 402 is connected to controller instruction, valve is pulled open in movement rapidly, and ejected wash water is in 3-5
It is all emptied in second, this function will can effectively be attached to medical fluid foreign matter of product surface etc. and pass through the quick drain of washing
It takes away, realizes that cleaning effect, operated pneumatic valve 402 can also be used as drain valve when individually spray cleaning when normally opened.
Overflow port 5 plays a role in soaking and water washing, when impregnating new water from the injection of the immersion water inlet pipe 6 of bottom, cleaning
Water is overflowed from overflow port 5 afterwards, achievees the effect that take away pollutant.
The specific structure and program of controller are what those skilled in the art can voluntarily implement.
A cleaning step for realizing this cleaning device is illustrated, after program is arranged in controller end, cleaning device will
It is run by following procedure, the settable different cleaning procedures of different product are all to combine attainable function by this apparatus function
It is accordingly to be regarded as protection scope of the present invention.
| Step | It sprays/waves | Water filling | Fast row | It is bubbled/waves |
| 1 | 30S/30S | OFF | ON | OFF |
| 2 | OFF | 40S | OFF | 40S/40S |
| 3 | OFF | OFF | ON | OFF |
| 4 | 20S/20S | 20S | OFF | 20S/20S |
| 5 | OFF | 20S | OFF | 20S/20S |
| 6 | OFF | OFF | ON | OFF |
| 7 | 10S/10S | OFF | ON | OFF |
| 8 | OFF | 20S | OFF | 20S/20S |
| 9 | OFF | OFF | ON | OFF |
| 10 | 10S/10S | OFF | ON | OFF |
More than, it is merely preferred embodiments of the present invention, but scope of protection of the present invention is not limited thereto, it is any
Those familiar with the art within the technical scope of the present disclosure, according to the technique and scheme of the present invention and its invents
Design is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (5)
1. the cleaning device of single-layer capacitor process, which is characterized in that including NPP groove body (1) and respectively with controller
Connected spray equipment (2), bubbling device (3), fast arranging device (4) and immersion water inlet pipe (6)；
NPP groove body (1) is open-topped cavity cuboid structure；
Spray equipment (2) includes the spray tube (203) for being mounted on two sides at the top of NPP groove body (1), between the outer wall of spray tube (203)
Every being provided with several nozzles (201), one end of spray tube (203) is connected with spray wig-wag (202), spray tube (203)
The other end is connected with spray water inlet pipe (204)；
Bubbling device (3) includes the bubbling wig-wag (301) being mounted at the top of connecting bracket (302), the bottom of connecting bracket (302)
Portion is equipped with hollow bubbling plate (304), there are gap between the hollow surrounding for being bubbled plate (304) and the inner wall of NPP groove body (1),
And hollow be bubbled plate (304) divide the inner cavity of NPP groove body (1) to be epicoele and cavity of resorption, and the hollow upper surface for being bubbled plate (304) opens up
There are several bubble holes, each bubble holes are connected with the hollow hollow cavity for being bubbled plate (304), hollow bubbling plate (304)
Quadrangle is connected with nitrogen inlet duct (303), and nitrogen inlet duct (303) is connected with the hollow hollow cavity for being bubbled plate (304)；
Fast arranging device (4) includes the fast exclusive shell (401) for being mounted on NPP groove body (1) bottom, in fast exclusive shell (401) by down toward
On be connected with operated pneumatic valve (402) in turn, arrange pallet (403) fastly, arrange sealing ring (404) fastly, be located on fast row sealing ring (404)
The bottom surface of the NPP groove body (1) of side offers fast row's mouth；
It impregnates water inlet pipe (6) and is mounted on the bottom of NPP groove body (1), and impregnate the cavity of resorption phase of water inlet pipe (6) with NPP groove body (1)
Connection.
2. the cleaning device of single-layer capacitor process as described in claim 1, which is characterized in that the NPP groove body (1)
Top offer overflow port (5).
3. the cleaning device of single-layer capacitor process as described in claim 1, which is characterized in that the operated pneumatic valve
(402) pallet (403) telescopic connection is arranged with fast.
4. the cleaning device of single-layer capacitor process as described in claim 1, which is characterized in that the operated pneumatic valve
(402) the operated pneumatic valve air inlet pipe (405) of bottom is pierced by the bottom surface of fast exclusive shell (401).
5. the cleaning device of single-layer capacitor process as described in claim 1, which is characterized in that the immersion water inlet
It is U-shaped for managing (6), and the both ends for impregnating water inlet pipe (6) are distributed on the diagonal line of NPP groove body (1) bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910481287.7A CN110076128A (en) | 2019-06-04 | 2019-06-04 | The cleaning device of single-layer capacitor process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910481287.7A CN110076128A (en) | 2019-06-04 | 2019-06-04 | The cleaning device of single-layer capacitor process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110076128A true CN110076128A (en) | 2019-08-02 |
Family
ID=67423481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910481287.7A Pending CN110076128A (en) | 2019-06-04 | 2019-06-04 | The cleaning device of single-layer capacitor process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110076128A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112599449A (en) * | 2020-12-16 | 2021-04-02 | 国镓芯科(深圳)半导体科技有限公司 | Etching device for gallium nitride wafer |
| CN112845293A (en) * | 2020-12-31 | 2021-05-28 | 上海至纯洁净***科技股份有限公司 | Automatic change wafer tong and spray abluent washing tank equipment |
| CN113600534A (en) * | 2021-07-26 | 2021-11-05 | 张家港市晨艺电子有限公司 | Coating pretreatment device and pretreatment method for aviation aluminum parts |
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| KR20080020031A (en) * | 2006-08-30 | 2008-03-05 | 세메스 주식회사 | Semiconductor cleaning equipment and method for controlling quick drain thereof |
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| CN208098758U (en) * | 2017-07-18 | 2018-11-16 | 东莞东聚电子电讯制品有限公司 | Three-dimensional ultrasonic cleaning equipment |
| CN108878321A (en) * | 2018-06-25 | 2018-11-23 | 扬州思普尔科技有限公司 | A kind of semiconductor crystal wafer cleaning fast row's flushing tank of energy conservation |
| CN209998006U (en) * | 2019-06-04 | 2020-01-31 | 大连达利凯普科技有限公司 | Cleaning device for single-layer capacitor machining process |
-
2019
- 2019-06-04 CN CN201910481287.7A patent/CN110076128A/en active Pending
Patent Citations (7)
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| KR20080020031A (en) * | 2006-08-30 | 2008-03-05 | 세메스 주식회사 | Semiconductor cleaning equipment and method for controlling quick drain thereof |
| CN101972747A (en) * | 2010-06-30 | 2011-02-16 | 张家港市超声电气有限公司 | Swinging spray device |
| CN103224332A (en) * | 2013-04-24 | 2013-07-31 | 浙江金指科技有限公司 | Groove structure for etching glass |
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| CN208098758U (en) * | 2017-07-18 | 2018-11-16 | 东莞东聚电子电讯制品有限公司 | Three-dimensional ultrasonic cleaning equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112599449A (en) * | 2020-12-16 | 2021-04-02 | 国镓芯科(深圳)半导体科技有限公司 | Etching device for gallium nitride wafer |
| CN112845293A (en) * | 2020-12-31 | 2021-05-28 | 上海至纯洁净***科技股份有限公司 | Automatic change wafer tong and spray abluent washing tank equipment |
| CN113600534A (en) * | 2021-07-26 | 2021-11-05 | 张家港市晨艺电子有限公司 | Coating pretreatment device and pretreatment method for aviation aluminum parts |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190802 |