CN110066935A - Foam metal preparation facilities and preparation method - Google Patents
Foam metal preparation facilities and preparation method Download PDFInfo
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- CN110066935A CN110066935A CN201810065456.4A CN201810065456A CN110066935A CN 110066935 A CN110066935 A CN 110066935A CN 201810065456 A CN201810065456 A CN 201810065456A CN 110066935 A CN110066935 A CN 110066935A
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- rotation axis
- metal
- foam metal
- foam
- die plate
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/08—Alloys with open or closed pores
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/08—Alloys with open or closed pores
- C22C1/081—Casting porous metals into porous preform skeleton without foaming
- C22C1/082—Casting porous metals into porous preform skeleton without foaming with removal of the preform
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0005—Separation of the coating from the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Abstract
A kind of foam metal preparation facilities is provided, a kind of foam metal preparation facilities, including vacuum evacuation device, chamber, target supporting piece, Igniting unit and work rest, the vacuum evacuation device is used to carry out vacuumize process to chamber, the target supporting piece is placed in the chamber interior for bearing metal targets, the Igniting unit is electrically connected with the target supporting piece, arc discharge is formed for exciting the metal targets to generate metal ion, the workpiece is placed on the chamber interior, the work rest includes frame body, first rotation axis and the second rotation axis, second rotation axis is arranged on the frame body, first rotation axis is for driving the frame body and second rotation axis to rotate integrally, first rotation axis is not overlapped with the axis of second rotation axis.A kind of preparation method preparing foam metal with above-mentioned apparatus is also provided.
Description
Technical field
The present invention relates to the present invention relates to foam metal, more particularly to one kind are golden for foam metal preparation facilities and foam
Belong to preparation method.
Background technique
There are different types of porous structure, such as float stone, timber, bone, the presence of these porous structures in nature
Lower density and good structural and functional characteristic are provided for material.It is inspired by this, people are for utilization porous structure
Good characteristic is prepared for a large amount of artificial porous articles.Wherein, foam metal is a class formation and function integration material, both
There are higher specific strength, specific stiffness, and can effectively absorb energy, bumper and absorbing shock, also there is good flame retardant property, be easily recycled
It recycles.In addition to this, foam metal also sound absorption, heat dissipation, electromagnetic shielding, in terms of obtained researcher's
Concern.Therefore, before foam metal possesses wide application in fields such as building decoration, road traffic, aerospace, bio-medicals
Scape.
Nineteen twenty-five, French De Meller are put forward for the first time the concept of foam metal.1948, the Benjamin in the U.S.
Soknik starts to be unfolded to study to foamed aluminium, and mercury is added first with the difference of boiling point between two kinds of substances in he in aluminum melt,
Apply high pressure, then reduce pressure near aluminium fusing point, promote the volatilization of mercury, finally leave hole, prepares in the world the
One block of foamed aluminium, and applied for patent US2434775.1956, U.S. BRL (Bjorksten Research
Laboratories) Elliott of research department has prepared bubble using Melt Direct Foaming in patent US2751289 for the first time
Foam aluminium, he imagines is added a kind of foaming agent in aluminum melt, and gas is generated in melt using the gas that foaming agent thermal decomposition generates
Bubble can form hole-closing structure foamed aluminium after cooling, that foaming agent is selected is TiH2Or ZrH2, at present the preparation process be still
Prepare one of the important process of foam metal.As people gradually recognize that foam metal is that a kind of highly important high-tech is new
Material, there is a very extensive application prospect, and porous foam metal material has become countries in the world and tries to be the first the material of exploitation.Mesh
Before, the U.S., Germany, Japan and other countries foam metal material preparation, in terms of research be gradually improved, and apply
Numerous patents have led the development of foam metal material.Since 21 century, foam metal research field present " a hundred flowers blossom, hundred
Family contends " posture, new preparation method continues to bring out, and the development of foam metal has welcome the period of full bloom.
The main preparation methods of existing foam metal material can be divided into four major class: one, melt method；Two, casting；
Three, powder metallurgic method；Four, metaliding.
The first kind: melt method mainly includes foam melt method and gas-blowing foaming method.The basic principle of foam melt method be
Foaming agent is added in metal bath, foaming agent is discharged gas by thermal decomposition at high temperature, bubble is left in metal bath, cooling
Foam metal is formed after solidification；Gas-blowing foaming method is that gas is directly blown into to be mixed with SiC, MgO contour molten by certain device
In the short grained metal bath of point ceramics, gas is floated in the melt, is accumulated, being frozen into foams, and is received by certain way
Collection.Melt method is primarily adapted for use in low-melting-point metal, such as aluminium, zinc, tin, major advantage be preparation process equipment it is simple, can industry
Change large scale preparation, the disadvantage is that technical process is difficult to control, the pore opening of formation is uneven, and fluctuation range is big.
Second class: casting mainly includes gypsum type melting mould founding method and particle infiltration casting.Gypsum type melting mould founding
Method technique under pressure penetrates into molten metal in matrix porosity, molten again after cooling to remove refractory material to get arriving and gathering
Close the identical foam metal of object foaming structure；Particle infiltration casting is to utilize solvable, high-temperature resistant particle material (such as NaCl
Grain) it is used as seepage flow skeleton, molten metal is penetrated into the gap of particle under stress, dissolves particle after metal freezing
Obtain the foam metal opposite with seepage flow skeleton structure.Casting is general to be applicable in due to being limited by placeholder material fusing point
In low-melting-point metal.
Third class: powder metallurgic method is divided into powder compacting foam process and sintering-precipitation method.The former be by metal powder and
Blowing agent powder is uniformly mixed by certain mode, compacting, foams to generate porous structure；And the latter is by metal powder
It prepares, mix in proportion with readily soluble high-temperature resistant particle material, obtain foaming structure after sintering.Powder metallurgic method advantage is just
In adjustment pore structure and porosity, complex-shaped workpiece and sandwich boards can be prepared, while high-melting-point foam can be prepared
Metal, such as titanium foam and nickel foam, the disadvantage is that high process cost, pore-size distribution is uneven.
4th class: metaliding is divided into electro-deposition (plating) method and vapour deposition process.Electrodeposition process uses organic foam
As electro-deposition matrix, advantage can prepare that high porosity, aperture be tiny, the uniform foam metal of structure；Vapour deposition process includes
Chemical and physical vapor deposition, advantage are the foam metals that can prepare a variety of small-bores, high porosity, but due to gold
It is higher to belong to vapor (steam) temperature, therefore very high requirement is proposed to the heat resistance of substrate, to large scale preparation can not be carried out and answered
With.
In addition, the preparation of above-mentioned every a kind of method only applicable part foam metal, such as the first and second class are suitable only for low melting point
The preparation of foam metal；Although and third class is suitble to the preparation of high-melting-point foam metal, lives for not easy-sintering, chemical property
Bold and vigorous metal, such as aluminium and magnesium, then technique is subject to certain restrictions；Electrodeposition process in 4th class technique is not suitable for electrode potential ratio
The also negative metal of hydrogen, such as aluminium, and chemical vapour deposition technique is usually suitable only for the preparation of nickel foam.
Summary of the invention
Based on this, it is necessary to provide the preparation dress of foam metal that is a kind of easier and being suitble to various different metal materials
It sets and preparation method.
A kind of foam metal preparation facilities, a kind of foam metal preparation facilities, including vacuum evacuation device, chamber, target are provided
Material supporting piece, Igniting unit and work rest, the vacuum evacuation device are used to carry out vacuumize process to chamber, and the target supporting piece is placed in
The chamber interior is used for bearing metal targets, and the Igniting unit is electrically connected with the target supporting piece, for exciting the metal
Target generates metal ion and forms arc discharge, and the workpiece is placed on the chamber interior, and the work rest includes frame body, the
One rotation axis and the second rotation axis, second rotation axis are arranged on the frame body, and first rotation axis is for driving institute
It states frame body and second rotation axis rotates integrally, first rotation axis is not overlapped with the axis of second rotation axis.
First rotation axis is arranged in parallel with second rotation axis in one of the embodiments,.
Second rotation axis is multiple in one of the embodiments, is equally spaced about first rotation axis and sets
It sets.
Second rotation axis is for driving foraminous die plate to rotate in one of the embodiments,.
In one of the embodiments, the target supporting piece be it is multiple, the target supporting piece be in same level height and
It is arranged evenly around the work rest.
The target supporting piece and the horizontal distance of first rotation axis and described second turn in one of the embodiments,
The ratio of horizontal distance between moving axis and first rotation axis is 2:1-5:1.
The Target material tray number of packages amount is 4-16 in one of the embodiments,.
It in one of the embodiments, further include metal mesh, the metal mesh encloses around work rest, and is located at described
Between work rest and the metal targets.
It in one of the embodiments, further include negative biasing unit, the negative biasing unit cathode and work rest electricity
Connection, for controlling the direction of motion of the metal ion.
A kind of preparation method of foam metal is also provided, any one of the above foam metal preparation facilities system is used
It is standby, comprising the following steps:
S1: foraminous die plate and metal targets are provided；
S2: by the foraminous die plate and the second rotation axis connection, the metal targets are installed on the Target material tray
Part；
S3: vacuumize process is carried out to the chamber and rotates the work rest then to protective gas is passed through in chamber
First rotation axis and second rotation axis；
S4: exciting the metal targets to generate metal ion by arc discharge, is attached to the metal ion described
On foraminous die plate.
In one of the embodiments, further include step S5: anaerobic heat is carried out to the foam metal that the step S4 is obtained
Processing, to remove the foraminous die plate
The step S1 further includes pre-processing to the foraminous die plate in one of the embodiments, the pre- place
Reason includes being cleaned to the foraminous die plate, removing foreign gas inside the foraminous die plate, the removal foraminous die plate certainly
At least one step in spacer film inside body stress, the elimination foraminous die plate.
The material of the metal targets is selected from by a kind of in Al, Mg, Cu, Ni, Ag, Fe, Ti in one of the embodiments,
Or the metal material of multiple element composition.
The foraminous die plate is sponge in one of the embodiments,.
The sponge is selected from polyester, polyethylene, polystyrene, polyphenol, polystyrene or poly- in one of the embodiments,
At least one of flexible foam, rigid foam or semi-rigid foam of imines ester.
The pore diameter range of the sponge is 0.1-5mm, porosity ranges 60-99% in one of the embodiments,.
The revolving speed of first rotation axis is 20-120r/min in one of the embodiments, second rotation axis
Revolving speed is 20-60r/min.
The preparation facilities and preparation method of above-mentioned foam metal, by opening Igniting unit for the metal targets in target supporting piece
It is excited into metal ion, and the first rotation axis and the second rotation axis are set on work rest, the first rotation axis drives work rest
Frame body and the second rotation axis rotate integrally to form revolution, and the second rotation axis itself rotatably forms revolution, it is only necessary in the second rotation
Foraminous die plate to be deposited is installed on axis, metal ion can be uniformly deposited on foraminous die plate, can easily be prepared
Foam metal out, and there is no limit use solid-state metallic material to the material of this preparation facilities and preparation method to metal targets
As target, can be used for easily preparing different types of foam metal material.
Detailed description of the invention
Fig. 1 is the schematic diagram of the foam metal preparation facilities of the embodiment of the present invention；
Fig. 2 is the top view of the foam metal preparation facilities chamber interior of the embodiment of the present invention；
Fig. 3 is the flow chart of the foam metal preparation method of the embodiment of the present invention；
Fig. 4 is the optical photograph of the foamed aluminium of preparation of the embodiment of the present invention；
Fig. 5 is the optical photograph of the amplification of the foamed aluminium of preparation of the embodiment of the present invention.
Appended drawing reference:
100- vacuum evacuation device
200- chamber
300- target supporting piece
400- work rest
The first rotation axis of 401-
The second rotation axis of 402-
500- foraminous die plate
600- metal mesh
700- negative biasing unit
800- excitation power source
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, by the following examples, it and combines attached
Figure, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this hair
It is bright, it is not intended to limit the present invention.
Fig. 1 and Fig. 2 is please referred to, the present invention provides a kind of foam metal preparation facilities, including vacuum evacuation device 100, chamber
200, target supporting piece 300, Igniting unit and work rest 400, the vacuum evacuation device 100 is for carrying out chamber 200 to vacuumize place
Reason, the Igniting unit are electrically connected with the target supporting piece 300, form arc light for exciting the metal targets to generate metal ion
Electric discharge, the work rest 400 is placed in inside the chamber 200, and the work rest 400 includes frame body, the first rotation axis 401 and the
One rotation axis 401, shown second rotation axis 402 are arranged on the frame body, and first rotation axis 401 is for driving the frame
Body and second rotation axis rotate integrally, and first rotation axis 401 is not overlapped with the axle center of second rotation axis 402.
Metal targets in target supporting piece 300 are excited by the preparation facilities of above-mentioned foam metal by opening Igniting unit
Metal ion, and the first rotation axis 401 and the second rotation axis 402 are set on work rest 400,401 band of the first rotation axis is started building
The frame body of part frame 400 and the second rotation axis 402, which rotate integrally, forms revolution, and the second rotation axis 402 itself rotatably forms revolution,
Foraminous die plate 500 to be deposited need to be only installed in the second rotary shaft 404, metal ion can be in the effect of revolution and rotation
Under, it is uniformly deposited on foraminous die plate 500, can easily prepare foam metal, and this preparation facilities is to metallic target
There is no limit use solid-state metallic material as target, can be used for easily preparing different types of bubble the material of material
Foam metal material.
Further, above-mentioned apparatus further includes excitation power source 800, the excitation power source 800 and Igniting unit and target supporting piece
Electrical connection, the energy for exciting raw metal ion for providing metal targets.
Preferably, the second rotation axis 402 is for driving foraminous die plate 500 to rotate.
Preferably, the second rotation axis 402 is multiple, is equally spaced about the setting of the first rotation axis 401, ensure that and be mounted on
Foraminous die plate 500 in second rotation axis 402 is equal with the horizontal distance of the first rotation axis of work rest 400, due to second turn
Moving axis 402 for drive foraminous die plate 500 rotate, correspondingly, foraminous die plate 500 may be set to be it is multiple, in this way, can make
It obtains in chamber 200 and prepares multiple foam metal samples simultaneously, keep the preparation efficiency of foam metal higher, meanwhile, it is equally spaced to set
Set the foam metal sample consistency with higher for also assuring and preparing.
Preferably, first rotation axis 401 is arranged in parallel with second rotation axis 402, when the first rotation axis 401 with
When second rotation axis 402 is arranged in parallel, foraminous die plate on work rest 400, foraminous die plate be subject to by the first rotation axis 401 and
The centrifugal force that the rotation of second rotation axis 402 generates in same level so that metal ion when being deposited on foraminous die plate more
It is uniformly more stable.
Preferably, target supporting piece 300 is set as multiple, and the target supporting piece 300 is in same level height and uniformly encloses
It is arranged around the work rest 400.The setting of multiple target supporting pieces 300 can effectively improve the preparation efficiency of foam metal, separately
On the one hand, due to being provided with multiple target supporting pieces 300, the placement of each metal targets be again it is independent, nothing interferes with each other, institute
Different types of metal material can be used with the metal targets of different location, in this way, packet can be prepared according to actual needs
Target supporting piece 300 is set to sustained height and evenly around work rest 400, guarantee by the foam metal containing Determination of multiple metal elements
This process units is for when producing multiple foam metal samples, the amount of the metal ion deposited on each foraminous die plate to be substantially
It is equal, thus when ensure that prepared by batch, the consistency of sample.
Preferably, above-mentioned foam metal preparation facilities further includes having metal mesh 600, and the metal mesh 600 is enclosed set on workpiece
Around frame 400, and between the work rest 400 and the metal targets, the foraminous die plate on work rest 400 is formed and is protected
On the one hand the setting of shield, metal mesh 600 to form biggish heat loss through convection area between foraminous die plate and air, on the other hand
Part blocking is carried out to metal ion, protects metal ion when depositing on foraminous die plate, when foraminous die plate is unlikely to because of gold
The depositing temperature of category ion is excessively high and carbonization occurs and even gasifies, and then ensure that the integrality for the foam metal prepared, excellent
Choosing, the aperture of the metal mesh is 0.1-5mm, and aperture is excessive, and metal mesh is not enough to provide good heat dissipation effect, aperture mistake
It is small, it is easy that metal ion is caused seriously to obstruct, metal ion is made to be difficult to effectively deposit on foraminous die plate.It is furthermore preferred that
Metal mesh 600 is copper mesh, and copper mesh is selected to protect foraminous die plate, because copper has good thermal conductivity.
Preferably, 300 quantity of target supporting piece is 4-16, the target supporting piece 300 and first rotation axis 401
Horizontal distance and second rotation axis 402 and first rotation axis 401 between horizontal distance ratio be 2:1-5:
1, it is highly preferred that horizontal distance between target supporting piece 300 and the first rotation axis is 20-50cm, target supporting piece 300 and second turn
The horizontal distance of moving axis is 10-20cm, i.e., horizontal distance of the foraminous die plate from metal targets is 10-20cm.Target supporting piece 300 with
First rotation axis is apart from excessive or too small, the direction of motion of uncontrollable direction of an electric field and metal ion, target supporting piece 300
With it is excessive at a distance from the second rotation axis, metal ion is difficult to deposit on foraminous die plate, target supporting piece 300 and the second shaft distance
Too small, foraminous die plate is easy to be generated gasification by the high temperature generated in discharge process.
Refering to Fig. 3, the embodiment of the present invention also provides a kind of preparation method of foam metal, standby using foregoing foams made of metal
It is prepared by device, comprising the following steps:
S1: foraminous die plate and metal targets are provided；
S2: by the foraminous die plate and the second rotation axis connection, the metal targets are installed on the Target material tray
Part；
S3: vacuumize process is carried out to the chamber and rotates the work rest then to protective gas is passed through in chamber
First rotation axis and second rotation axis；
S4: exciting the metal targets to generate metal ion by arc discharge, is attached to the metal ion described
On foraminous die plate.
Metal targets in target supporting piece 300 are excited into gold by opening Igniting unit by above-mentioned foam metal preparation method
Belong to ion arc discharge, and the first rotation axis 401 and the second rotation axis 402 are set on work rest 400, the first rotation axis 401
It drives the frame body of work rest 400 and the second rotation axis 402 to rotate integrally and forms revolution, the second rotation axis 402 itself can be rotated shape
At revolution, the foraminous die plate 500 being fixedly connected with the second rotation axis 402 is allowed to be deposited uniformly upper metal, forms bubble
Foam metal material.To sum up, this preparation method can quickly and easily prepare foam metal, and this preparation method is to gold
There is no limit for the material of category target, as long as solid-state metallic material, so this preparation method can easily be prepared not
Congener foam metal material.
Preferably, above-mentioned foam metal preparation method further includes step S5: the foam metal that the step S4 is obtained into
The heat treatment of row anaerobic, to remove the foraminous die plate, obtains pure foam metal material.It is simple by anaerobic heat-treating methods
Foraminous die plate is effectively removed, relative to heat treatment methods such as traditional sintering or calcining, anaerobic heat treatment ensure that foam
Oxidation will not occur during heat treatment for metal, to ensure that the quality of foam metal finished product.
Preferably, the foraminous die plate is sponge, and sponge has porous structure similar with foam metal, and the kind of sponge
The selectivity of class and size is more, is also easy to obtain, by select the sponge of different pore size and porosity as foraminous die plate i.e.
Aperture and the corresponding foam metal of porosity can be prepared, and sponge is a kind of mould being easy to by being simply heat-treated removal
Plate.Specifically, the sponge is selected from the soft bubble of polyester, polyethylene, polystyrene, poly- polyphenol, polystyrene, polyurethane
At least one of foam, rigid foam or semi-rigid foam, these are all to be easily obtained on the market and lower-cost sponge.It is excellent
The pore diameter range of selection of land, the sponge is 0.1-5mm, porosity ranges 60-99%, with the sponge in this aperture and porosity
The foam metal of preparation has good mechanical property.
It preferably, further include the pretreatment to further including being pre-processed to the foraminous die plate in the step S1
Including foreign gas inside the foraminous die plate, the removal foraminous die plate itself are cleaned, removed to the foraminous die plate
At least one step in spacer film inside stress, the elimination foraminous die plate.More selection of land is 15%- by concentration range
40% NaOH solution dries 6-8h after impregnating, and to implement the pretreatment to foraminous die plate, is carried out clearly with reaching to foraminous die plate
Clean, removal foraminous die plate inside foreign gas and itself stress eliminate the purpose of spacer film inside foraminous die plate.Using only one
Kind reagent, which can reach, carries out pretreated multiple purposes to foraminous die plate, is simple and efficient, and NaOH is a kind of very common
Reagent has many advantages, such as to be easily obtained.If NaOH solution concentration is too low, it is not enough to remove the spacer film inside sponge, causes
Metal ion can not deposit to inside sponge completely；If NaOH solution excessive concentration, sponge can be caused to corrode, influence template
Quality, and then influence foam metal final product quality.
Preferably, the material of the metal targets one or more element groups in by Al, Mg, Cu, Ni, Ag, Fe, Ti
At metal material.In principle.Any solid metallic all can serve as metal targets and be used to prepare corresponding foam metal, these
Material is opposite during the preparation process to have better controllability and stability.
Preferably, in above-mentioned foam metal preparation method, the revolving speed of first rotation axis 401 is 20-120r/min, the
The revolving speed of two rotation axis 402 is 20-60r/min, within the scope of this.The revolving speed of first rotation axis and the second rotation axis 402 is got over
It is big better, however, the centrifugal force that foraminous die plate is subject to is bigger if revolving speed is excessively high, it is easy to cause metal ion on foraminous die plate
Attachment is not tight, so as to cause the problem of foam metal final product quality difference.
Preferably, vacuum degree in chamber 200 is made to reach 1.3*10 in vacuum evacuation device 100-4When above, it is passed through protection gas
Body, it is preferable that the protective gas being passed through is inert gas, more preferably argon gas.Impurity in the case of this, in chamber 200
Gas remnants are less, are effective to ensure that metal targets will not be aoxidized after being excited into metal ion by foreign gas, Jin Erbao
The quality of foam metal finished product is demonstrate,proved；It is highly preferred that reaching 1.3*10 in vacuum degree-4-1.3*10-2When be passed through argon gas, it is theoretical
On, vacuum degree it is more high can guarantee it is not oxidized after metal targets are excited into metal ion, however, vacuum degree is higher, device fortune
Row cost is higher, so, reach 1.3*10 in vacuum degree-4-1.3*10-2When be passed through argon gas, on the one hand ensure that foam metal
Final product quality, on the other hand, ensure that the operating cost of device is lower.
Preferably, vacuum degree reaches 4.0*10 after argon gas being passed through in chamber 200-2-4.0*10-1Shi Jifa metal targets,
In this vacuum degree, the deposition enough to metal ion on foraminous die plate forms protection to the amount of argon gas.
Preferably, in above-mentioned foam metal preparation method, argon flow when being passed through the argon gas is 500-700sccm,
Argon flow is too small, then is not enough to the deposition to metal ion on foraminous die plate and generates protection, argon flow is excessive, then can mention
High preparation cost.
Preferably, in the foam metal preparation method, exciting source current used in the metal targets is 70-
130A, when electric current is too small, so that the ion arc that metal is formed in excitation process is discontinuous, if electric current is excessive, the gold that generates
It is excessively high to belong to ion temperature, foraminous die plate can be caused to damage, influence the yield of foam metal finished product.
Preferably, the voltage that negative biasing unit 700 generates is 30-70V, which can effectively allow the metal ion side of having
Accelerate to deposit on foraminous die plate to tropism.If voltage is too small, metal ion can not generate enough acceleration, to can not have
Effect arrives at foraminous die plate；If voltage is excessive, on the one hand metal ion excessive velocities penetrate readily through foraminous die plate and cause deposition not
On consequence, another aspect metal ion will possess higher temperature and be easy to make foraminous die plate surface that gasification occurs and hinders ion
Deposition.
Preferably, the sedimentation time of metal ion is 2-10h, is selected according to the thickness of the foam metal of required preparation corresponding
Sedimentation time, sedimentation time is too short, then the thickness low LCL of the foam metal formed, so as to cause finished product mechanical property owe
Good problem.Sedimentation time is too long, then the foam metal thickness formed is excessive, and porosity reduces.
Preferably, the temperature of the anaerobic heat treatment is 250-500 degrees Celsius, and temperature is too low, then can not completely remove more
Hole template, temperature is excessively high, then foam metal is easy to happen deformation.
Preferably, the time of the anaerobic heat treatment is 2-5h, and heat treatment time is too short, can not completely remove multiple-hole die
Plate, overlong time then will increase preparation cost.
Embodiment 1
4 pieces of commercial-purity aluminiums (purity 99.7%) are selected to be used as metal targets, selecting 4 pieces of three-dimensional dimensions is 80mm*80mm*
10mm, aperture are 0.5mm, 1mm, 1.5mm, 2mm respectively, and porosity is 95.3%, 96.7%, 98.1%, 98.5% respectively
Three-dimensional through hole sponge as foraminous die plate,
Then 6h is dried after the NaOH solution that concentration is 40% is impregnated, 4 pieces of sponges is fixed on 4 of work rest 400
In second rotation axis 402.4 metal targets are evenly distributed on 400 surrounding of work rest, and first apart from work rest 400 goes to axis
401 be 30cm, the copper metal coating net of one layer of cylinder on the outer shroud of work rest 400.
Then, it opens vacuum evacuation device 100 to vacuumize chamber 200, when vacuum degree reaches 1.3* in chamber 200
10-4After, it is passed through argon gas, vacuum degree is made to reach 4.0*10-2, excite metal to make a good deal of money using the power supply that size of current is 120A, together
When adjust negative biasing unit 700 voltage be 50V, send out the first rotation axis 401 of work rest 400 with the second rotation axis 402
Raw rotation, the speed of rotation of the first rotation axis 401 of work rest 400 are 60r/min, the second rotation axis 402 select rate for
40r/min makes metal targets release metal ion and deposits on sponge with having direction, sedimentation time 5h.
Close power supply, close negative biasing unit 700, close vacuum evacuation device, discharge argon gas, can aluminium-sponge complex,
Carrying out anaerobic heat treatment 3h at 300 degrees Celsius to obtained aluminium-sponge complex again can be obtained foamed aluminium, refering to Fig. 4 and
Fig. 5, the macroscopical schematic diagram of the first of foamed aluminium manufactured in the present embodiment and second macroscopical schematic diagram, it is seen then that the foamed aluminium prepared
Aperture be 0.5-2mm.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
Limitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention
Protect range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (17)
1. a kind of foam metal preparation facilities, including vacuum evacuation device, chamber, target supporting piece, Igniting unit and work rest, the pumping
Vacuum plant is used to carry out chamber vacuumize process, and the target supporting piece is placed in the chamber interior for bearing metallic target
Material, the Igniting unit are electrically connected with the target supporting piece, are put for exciting the metal targets to generate metal ion formation arc light
Electricity, the workpiece are placed on the chamber interior, it is characterised in that:
The work rest includes frame body, the first rotation axis and the second rotation axis, and second rotation axis is arranged on the frame body,
First rotation axis is for driving the frame body and second rotation axis to rotate integrally, first rotation axis and described the
The axis of two rotation axis is not overlapped.
2. foam metal preparation facilities according to claim 1, which is characterized in that first rotation axis and described second
Rotation axis is arranged in parallel.
3. foam metal preparation facilities according to claim 1, which is characterized in that second rotation axis be it is multiple, etc.
It is arranged intermittently around first rotation axis.
4. foam metal preparation facilities according to claim 1, which is characterized in that second rotation axis is more for driving
The rotation of hole template.
5. foam metal preparation facilities according to claim 1, which is characterized in that the target supporting piece be it is multiple, it is described
Target supporting piece is in same level height and is arranged evenly around the work rest.
6. foam metal preparation facilities according to claim 5, which is characterized in that the target supporting piece and described first turn
The ratio of horizontal distance between the horizontal distance of moving axis and second rotation axis and first rotation axis is 2:1-5:1.
7. foam metal preparation facilities according to claim 5, which is characterized in that the Target material tray number of packages amount is 4-16
It is a.
8. foam metal preparation facilities according to claim 1, which is characterized in that it further include metal mesh, the metal mesh
It encloses and is set to around work rest, and between the work rest and the metal targets.
9. foam metal preparation facilities according to claim 1, which is characterized in that it further include negative biasing unit, it is described negative
Biasing device cathode is electrically connected with the work rest, for controlling the direction of motion of the metal ion.
10. a kind of foam metal preparation method, which is characterized in that use the described in any item foam metal systems of claim 1-9
It is prepared by standby device, comprising the following steps:
S1: foraminous die plate and metal targets are provided；
S2: by the foraminous die plate and the second rotation axis connection, the metal targets are installed on the target supporting piece；
S3: vacuumize process is carried out to the chamber and rotates the described of the work rest then to protective gas is passed through in chamber
First rotation axis and second rotation axis；
S4: it excites the metal targets to generate metal ion by arc discharge, is attached to the metal ion described porous
In template.
11. foam metal preparation method according to claim 10, which is characterized in that further include step
S5: anaerobic heat treatment is carried out to the foam metal that the step S4 is obtained, to remove the foraminous die plate.
12. foam metal preparation method according to claim 10, which is characterized in that the step S1 further includes to described
Foraminous die plate is pre-processed, and the pretreatment includes being cleaned, being removed inside the foraminous die plate to the foraminous die plate
Foreign gas, removal foraminous die plate itself stress eliminate at least one of spacer film inside foraminous die plate step
Suddenly.
13. foam metal preparation method according to claim 10, which is characterized in that the material of the metal targets is selected from
The metal material being made of elements one or more in Al, Mg, Cu, Ni, Ag, Fe, Ti.
14. the preparation method of foam metal according to claim 10, which is characterized in that the foraminous die plate is sponge.
15. foam metal preparation method according to claim 14, which is characterized in that the sponge is selected from polyester, poly- second
At least one in alkene, polystyrene, polyphenol, the flexible foam of polystyrene or polyurethane, rigid foam or semi-rigid foam
Kind.
16. foam metal preparation method according to claim 14, which is characterized in that the pore diameter range of the sponge is
0.1-5mm, porosity ranges 60-99%.
17. foam metal preparation method according to claim 10, which is characterized in that the revolving speed of first rotation axis is
20-120r/min, the revolving speed of second rotation axis are 20-60r/min.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113355647A (en) * | 2021-06-07 | 2021-09-07 | 江苏中天科技股份有限公司 | Porous metal, and method and apparatus for producing same |
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