CN110055491A - The preparation method of complete gold-plated high reflection infrared heating hollow pipe - Google Patents
The preparation method of complete gold-plated high reflection infrared heating hollow pipe Download PDFInfo
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- CN110055491A CN110055491A CN201910396678.9A CN201910396678A CN110055491A CN 110055491 A CN110055491 A CN 110055491A CN 201910396678 A CN201910396678 A CN 201910396678A CN 110055491 A CN110055491 A CN 110055491A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/085—Oxides of iron group metals
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
Abstract
The present invention provides a kind of preparation methods of complete gold-plated high reflection infrared heating hollow pipe, include the following steps: for clean hollow transparent glass tube to be put into the vacuum system of filming equipment, filming equipment is vacuumized, the heating device in vacuum system is opened；It is filled with high pure oxygen and high-purity argon into filming equipment, is then turned on ion source and hollow transparent glass pipe surface is handled；Plated film is evaporated to membrane material, Coating Materials is di-iron trioxide and silica, and the two alternate plating, the surface of half plates reflective coating or transmission film layer along its kernel of section line to hollow glass tube；It is put into high temperature furnace and carries out high temperature ageing；Transmission film layer or reflective coating are plated to the other half surface of above-mentioned hollow transparent glass with above-mentioned same step again；Finally aging obtains half surface with reflective coating, the other half infrared heating pipe with transmission film layer again.The firmness of infrared ray heating tube heating efficiency height and film layer of the invention is good.
Description
Technical field
The present invention relates to the technical fields of infrared ray heating tube, more specifically, it is red to be related to a kind of complete gold-plated high reflection
The preparation method of outside line heating hollow pipe.
Background technique
With getting worse for energy crisis, energy-saving and emission-reduction have become the social concern to attract people's attention.Production at present
In the heating equipment that usually uses much heated using infrared heating fluorescent tube.Infrared heating fluorescent tube is to use
The mode of heat radiation makes heated material absorb energy, to aggravate molecular motion, thus the equipment for promoting temperature.Currently, general
Infrared heating fluorescent tube be the heating efficiency of infrared lamp is improved by coating reflecting layer on fluorescent tube, but due to
General reflecting layer reflection efficiency is not high, and cause has substantial portion of thermal energy to radiate by fluorescent tube in use scatters and disappears
Fall, causes the waste of the energy.
In addition, currently, the reflecting layer of a big chunk infrared ray heating tube is by spraying oxide layer in heating pipe surface
Obtained from, thus there is some problems: first is that the reflectivity in the reflecting layer of general infrared heating pipe surface at present
It is lower, can gradually it decay less than 50%, and with the increase of use time；Second is that the oxide layer poor adhesive force of spraying, easily de-
It falls, and works since infrared ray heating tube is chronically under high temperature, accelerate the aging of oxide layer and fall off, to reduce
Its service life.And only reflecting layer is arranged in one side on many infrared heating fluorescent tubes, and another side is transparent fluorescent tube, will
The light that filament issues is concentrated to be projected from fluorescent tube hyaline layer, since Transparent lamp tube all heats itself are lossy, so further making
At heat waste.
Summary of the invention
In view of the above problems, the object of the present invention is to provide a kind of complete gold-plated high reflection infrared heating hollow pipes
Preparation method causes energy waste and infrared heating lamp pipe coating to reflect to solve the infrared heating fluorescent tube of the prior art
The problem of rate is low, poor adhesive force.
What the present invention was realized by technical solution below:
A kind of preparation method of complete gold-plated high reflection infrared heating hollow pipe, includes the following steps:
S1: the hollow transparent glass tube of appropriate size is chosen, and its surface clean is clean；
S2: the both ends of the hollow transparent glass tube after cleaning are clamped with fixture, are put into the heating of filming equipment kind
On turntable in device, turntable is in rotary state always so that hollow transparent glass tube exists when filming equipment works
It is rotated under the drive of turntable, filming equipment is vacuumized, while opening the heating device in vacuum system, so that vacuum
Vacuum degree in system is 1.5-2.0 × 10-3MP, and temperature reaches 185-200 DEG C；
S3: high pure oxygen and high-purity argon are filled with into filming equipment, the charge of high pure oxygen is 15-20cc, and high-purity argon is filled
Entering amount is also 15-20cc, and the ion source being then turned in filming equipment carries out bombardment processing to hollow transparent glass pipe surface, from
The ion beam current of component is 150-200ma；
S4: plated film is evaporated to membrane material, Coating Materials is di-iron trioxide and silica, and the two replaces back and forth
Plated film, to hollow transparent glass tube, along its kernel of section line, the surface of half plates reflective coating/transmission film layer；
S5: the hollow glass tube that film has been plated on above-mentioned half surface is put into high temperature furnace and carries out high temperature ageing, in high temperature furnace
Temperature maintain 450-500 DEG C, ageing time 25-35min；
S6: above-mentioned hollow glass tube is placed on the turntable in filming equipment with clamp again, unlocking turntable makes
It is in rotary state so that above-mentioned hollow glass tube rotates under the drive of turntable, vacuumizes to filming equipment,
So that the vacuum degree in filming equipment is 1.5-2.0 × 10-3MP, temperature reaches 200-220 DEG C；
S9: high pure oxygen and high-purity argon are filled with into filming equipment, the charge of high pure oxygen is 15-20cc, and high-purity argon is filled
Entering amount is also 15-20cc, and the ion source being then turned in filming equipment carries out bombardment processing to hollow transparent glass pipe surface, from
The ion beam current of component is 150-200ma；
S10: plated film is evaporated to membrane material, Coating Materials is di-iron trioxide and silica, and the two replaces back and forth
Plated film plates transmission film layer/reflective coating to the other half surface of above-mentioned hollow transparent glass；
S11: being put into high temperature furnace from taking-up hollow glass tube in vacuum coating equipment carry out high temperature ageing again, high temperature furnace
Interior temperature maintains 450-500 DEG C, ageing time 30-35min, the high reflection infrared heating hollow pipe so far plated entirely
Preparation is completed, and the surface for preparing the hollow glass tube half of completion has reflective coating, the other half surface has transmission film
Layer.
Further, hollow transparent glass tube surface clean uses concentration clear for the hydrofluoric acid solution of 3-4% in step S1
It washes or is cleaned using supersonic wave cleaning machine.
Further, for columned hollow glass tube, in step S4 plated film, in the table of hollow glass tube half
4 layers of reflective coating is first plated on face, then in step slo, 8 layers of transmission film layer are plated to entire hollow glass tube, to finally exist
12 layers of reflective coating are formed on the surface of hollow glass tube half, form 8 layers of transmission film layer on the other half surface.
Further, the membrane system of 4 layers of reflective coating is followed successively by 0.5L, 2.5H, 2.5L, 2.5H, 8 layers of transmission film layer
Membrane system be followed successively by L, 0.5H, L, H, L, H, L, H.
Further, it for circular hollow transparent glass tube or other hollow transparent glass tubes of abnormity, is plated in step S4
When film, first the surface of hollow transparent glass tube half is covered, 8 layers of transmission film is then plated on the other half surface
Layer, then in step slo, the surface for being coated with transmission film layer to hollow glass tube covers, and plates on the surface of non-film plating layer
Upper 12 layers of reflective coating, to finally form 12 layers of reflective coating, the other half surface on the surface of hollow glass tube half
8 layers of transmission film layer of upper formation.
Further, for circular hollow glass tube or other special-shaped hollow glass tubes, in step S4 plated film, first
The surface of hollow glass tube half is covered, first plates 12 layers of reflective coating on the other half surface, then in step
In S10, the surface for being coated with reflective coating to hollow glass tube is covered, and 8 layers of transmission film are plated on the surface of non-film plating layer
Layer forms 8 layers thoroughly to finally form 12 layers of reflective coating on the surface of hollow glass tube half on the other half surface
Penetrate film layer.
Further, the membrane system of 8 layers of transmission film layer is followed successively by L, 0.5H, L, H, L, H, L, H, 12 layers of reflection
The membrane system 0.5L, 2.5H, 2.5L, 2.5H, L, 0.5H, L, H, L, H, L, H of film layer.
Compared with prior art, the present invention at least has the advantages that
1) present invention plates 12 layers of reflective coating in the half of hollow transparent glass tube, the other half plates 8 layers of transmission film
Layer, the number of plies design and thicknesses of layers in the reflecting layer on glass tube make the reflective coating be high reflection material, and reflectivity is remote
Much higher than the reflectivity in common infrared heating pipe reflecting layer, the number of plies design and thicknesses of layers of the transmission layer on glass tube can be most
Big degree the heat on fluorescent tube is transmitted away, the transmission layer is small to heat absorption, to increase substantially the infrared heating
The heating efficiency of fluorescent tube；The present inventor is found by experiment that its heating efficiency of 700 watts of infrared lamps prepared by the present invention and general
900-950w infrared heating fluorescent tube heating efficiency it is suitable；In addition, fluorescent tube of the invention is at work, the heat that fluorescent tube generates
Amount half appears to heat the object for needing to heat on working space from transmission layer；The other half heat is then irradiated to instead
It penetrates on layer, the heat of the part, which is reflected at filament to project from transmission layer again by reflecting layer, heats object, to be formed secondary
Reflection, is greatly improved the heating efficiency of the fluorescent tube, reduces the waste of the energy, to reduce production cost；
2) plating reflectance coating of the invention is to carry out under vacuum conditions, and vacuum degree is 1.5-2.0 × 10-3MP, plated film
Temperature is 185-220 DEG C, and the evaporation rate of membrane material can be improved in this way, so that the consistency of the film layer on glass tube is improved,
Stress in thin film is reduced, prevents it from working at high temperature easy to fall off；The present invention is complete, and gold-plated infrared heating pipe half is reflectance coating
Layer, the other half is transmission film layer, sets 150-200ma for the ion beam current of ion source in plated film, can greatly improve two
The adhesive force of a film layer and the fastness of film layer interface prevent its cracking and demoulding；The present inventor obtains this by experimental test
The film layer invented on infrared ray heating tube obtained is resistant to 750 DEG C of high temperature and does not fall off, therefore preparation method of the invention makes
It obtains film layer firmness largely to be improved, substantially prolongs the service life of infrared ray heating tube.
To the accomplishment of the foregoing and related purposes, one or more aspects of the present invention includes being particularly described below spy
The feature that do not point out.Certain illustrative aspects of the invention is described in detail in following explanation.However, what these aspects indicated
Some of the various ways in the principles of the present invention only can be used.In addition, the present invention is intended to include all these sides
Face and their equivalent.
Specific embodiment
Specific embodiments of the present invention are described in detail below.
Embodiment 1:
A kind of preparation method of complete gold-plated high reflection infrared heating hollow pipe, includes the following steps:
S1: the hollow transparent glass tube of annular shape of appropriate size is chosen, cylindric hollow transparent glass tube is put in ultrasound
It is in wave cleaning agent that its surface clean is clean, it takes out, the moisture removed thereon is spare；
S2: circular hollow transparent glass tube is put into matched mold and makes circular hollow transparent glass
Pipe half along its kernel of section line is covered by mold, the other half is exposed to outside mold, then will be circular hollow with fixture
Bright glass tube is fixed in mold；
S3: being provided with turntable in the heating device of the vacuum system in vacuum coating equipment, and fixture and circle will be used in step S2
The mold that annular hollow transparent glass tube clamps is placed on turntable；
S4: vacuumizing vacuum coating equipment, so that the vacuum degree in vacuum coating equipment is about 2.5 × 10-3MP, together
Heating device in Shi Kaiqi filming equipment is heated, so that the temperature in baking oven reaches 200 DEG C or so, heating device exists
Turntable is in rotary state always to drive circular hollow transparent glass tube rotation during heating；
S5: being persistently filled with high pure oxygen and high-purity argon into vacuum coating equipment, and the charge of high pure oxygen is 15cc, high-purity argon
Charge be also 16cc, the ion source opened in vacuum coating equipment later carries out circular hollow transparent glass pipe surface
Bombardment processing, wherein the ion beam current of ion source is 150ma；
S6: plated film is evaporated to membrane material, Coating Materials is di-iron trioxide and silica, and the two replaces back and forth
Plated film, in total 8 layers of plated film, membrane system are followed successively by L, 0.5H, L, H, L, H, L, H, and when plated film reversely starts plated film, and wherein H represents three
Two iron are aoxidized, L represents silica；The central wavelength of membrane system is 500nm, and according to formula nd=1/4 × λ, wherein n is membrane material
The refractive index of material, the refractive index n of di-iron trioxide are 2.6, and the refractive index n of silica is 1.46, λ 500nm, therefore every
Physical thickness d=10 × λ/4n of tunic, therefore the physical thickness of every tunic is corresponded to from the bottom up successively are as follows: This membrane system and thickness are the present inventor
What the test of many times of process was decided, it is minimum to the absorption of heat, so that the material can farthest transmit heat
It goes out；
S7: taking out mold from vacuum coating equipment, is then removed from the molds circular hollow glass tube, Zhi Houyong again
Alcohol cleans the surface of circular hollow glass tube, places into and carries out high temperature ageing 35min in the high temperature furnace that temperature is 450 DEG C
Afterwards, it takes out；
S8: the circular hollow glass tube of above-mentioned plated film is turned and is placed in a mold so that plated film
Half is located in mold to be covered by mold, the other half transparent is exposed to outside mold, and circular hollow glass tube and mold are used
Clamp is placed on the turntable in vacuum coating equipment, and unlocking turntable is at rotary state so that circular empty
Heart glass tube rotates under the drive of turntable, vacuumizes to vacuum coating equipment, so that the vacuum degree in vacuum coating equipment is
2.0×10-3MP, while opening the heating device in filming equipment and being heated, so that the temperature in baking oven reaches 220 DEG C；
S9: being persistently filled with high pure oxygen and high-purity argon into vacuum coating equipment, and the charge of high pure oxygen is 20cc, high-purity argon
Charge be also 20cc, the ion source opened in vacuum coating equipment later carries out cylindric hollow transparent glass pipe surface
Bombardment processing, wherein the ion beam current of ion source is 175ma；
S10: plated film is evaporated to membrane material, Coating Materials is di-iron trioxide and silica, and the two replaces back and forth
Plated film, in total 12 layers of plated film, membrane system are followed successively by 0.5L, 2.5H, 2.5L, 2.5H, L, 0.5H, L, H, L, H, L, H, and when plated film is anti-
To plated film is started, wherein H represents di-iron trioxide, and L represents silica；The central wavelength of membrane system is 500nm, according to formula
Nd=1/4 × λ, wherein n is the refractive index of membrane material, and the refractive index n of di-iron trioxide is 2.6, the refractive index n of silica
For 1.46, λ 500nm, therefore physical thickness d=10 × λ/4n of every tunic, therefore the object of every tunic is corresponded to from the bottom up
Manage thickness successively are as follows:
S11: taking out cylindric hollow glass tube from vacuum coating equipment again, is put into the high temperature furnace that temperature is 500 DEG C
High temperature ageing 30min is carried out, the high reflection infrared heating hollow pipe preparation so far plated entirely is completed, and is prepared the infrared of completion and is added
Heat pipe half has 12 layers of reflecting layer, the other half has 8 layers of transmission layer.
Embodiment 2:
A kind of preparation method of complete gold-plated high reflection infrared heating hollow pipe, includes the following steps:
S1: choosing the cylindric hollow transparent glass tube of appropriate size, and cylindric hollow transparent glass tube is put in concentration
To be cleaned in 3% hydrofluoric acid solution, thus its surface clean is clean, it takes out later, the moisture removed thereon is spare；
S2: cylindric hollow transparent glass tube after cleaning is along its kernel of section line with golden finger adhesive tape by the cylinder
The shaded surface of the hollow transparent glass tube half of shape is lived, and vacuum coating equipment, the heating of the vacuum system in vacuum coating equipment are opened
It is provided with turntable in device, is clamped the both ends for the cylindric hollow transparent glass tube that half covers in fixture, then
It places it on turntable；
S3: vacuumizing vacuum coating equipment, so that the vacuum degree in vacuum coating equipment is 2.0 × 10-3MP, simultaneously
The heating device opened in filming equipment is heated, so that the temperature in baking oven reaches 185 DEG C, is opened in heating device
Turntable is at rotary state, and clamps the fixture of cylindric hollow transparent glass tube also around own rotation and then cylinder
The hollow transparent glass tube of shape is not only revolved under the drive of turntable also under the drive of fixture around own axes rotation；
S4: being persistently filled with high pure oxygen and high-purity argon into vacuum coating equipment, and the charge of high pure oxygen is 16cc, high-purity argon
Charge be also 15cc, the ion source opened in vacuum coating equipment later carries out cylindric hollow transparent glass pipe surface
Bombardment processing, wherein the ion beam current of ion source is 180ma；
S5: plated film is evaporated to membrane material, Coating Materials is di-iron trioxide and silica, and the two replaces back and forth
Plated film, 4 layers of plated film, membrane system is followed successively by 0.5L, 2.5H, 2.5L, 2.5H, and when plated film reversely starts plated film, and wherein H represents three oxygen
Change two iron, L represents silica；The central wavelength of membrane system is 500nm, and according to formula nd=1/4 × λ, wherein n is membrane material
Refractive index, the refractive index n of di-iron trioxide is 2.6, and the refractive index n of silica is 1.46, λ 500nm, therefore every layer
Physical thickness d=10 × λ/4n of film, therefore the physical thickness of every tunic is corresponded to from the bottom up successively are as follows:
S6: taking out cylindric hollow glass tube from vacuum coating equipment, will be on the cylindric hollow glass tube that plate film
Adhesive tape removes and then is scrubbed the surface of cylindric hollow transparent glass tube with alcohol；
S7: the cylindric hollow transparent glass tube after scrubbing, which is put into the high temperature furnace that temperature is 500 DEG C, carries out height
After warm aging 30min, take out；
S8: the cylindric hollow glass tube of above-mentioned plated film is placed in vacuum coating equipment with fixture clamping again and is turned
On disk, unlocking turntable is at rotary state and clamps the fixture of cylindric hollow transparent glass tube also around own rotation
And then cylindric hollow transparent glass tube not only revolve under the drive of turntable also under the drive of fixture around own axes from
Turn, vacuum coating equipment is vacuumized, so that the vacuum degree in vacuum coating equipment is 1.8 × 10-3MP, while opening plated film
Heating device in equipment is heated, so that the temperature in baking oven reaches 220 DEG C；
S9: being persistently filled with high pure oxygen and high-purity argon into vacuum coating equipment, and the charge of high pure oxygen is 20cc, high-purity argon
Charge be also 20cc, the ion source opened in vacuum coating equipment later carries out cylindric hollow transparent glass pipe surface
Bombardment processing, wherein the ion beam current of ion source is 200ma；
S10: plated film is evaporated to membrane material, Coating Materials is di-iron trioxide and silica, and the two replaces back and forth
Plated film, in total 8 layers of plated film, membrane system are followed successively by L, 0.5H, L, H, L, H, L, H, and when plated film reversely starts plated film, and wherein H represents three
Two iron are aoxidized, L represents silica；The central wavelength of membrane system is 500nm, and according to formula nd=1/4 × λ, wherein n is membrane material
The refractive index of material, the refractive index n of di-iron trioxide are 2.6, and the refractive index n of silica is 1.46, λ 500nm, therefore every
Physical thickness d=10 × λ/4n of tunic, therefore the physical thickness of every tunic is corresponded to from the bottom up successively are as follows:
S11: taking out cylindric hollow glass tube from vacuum coating equipment again, is put into the high temperature furnace that temperature is 500 DEG C
High temperature ageing 30min is carried out, the high reflection infrared heating hollow pipe preparation so far plated entirely is completed, and is prepared the infrared of completion and is added
Heat pipe half has 12 layers of reflecting layer, the other half has 8 layers of transmission layer.
Embodiment 3:
A kind of preparation method of complete gold-plated high reflection infrared heating hollow pipe, includes the following steps:
S1: choosing the hollow transparent glass tube of U-shaped of appropriate size, and it is 3% that the hollow transparent glass tube of U-shaped, which is put in concentration,
Hydrofluoric acid solution in clean, so that its surface clean is clean, it is spare to take out the moisture of removal thereon later；
S2: the hollow transparent glass tube of U-shaped is put into matched mold and makes the hollow transparent glass tube of U-shaped along it
Half is covered by mold at kernel of section line, the other half is exposed to outside mold, then with fixture by the hollow transparent glass tube of U-shaped
It is clamped in mold；
S3: being provided with turntable in the heating device of the vacuum system in vacuum coating equipment, and fixture and U will be used in step S2
The mold that the hollow transparent glass tube of shape clamps is placed on turntable；
S4: vacuumizing vacuum coating equipment, so that the vacuum degree in vacuum coating equipment is about 1.8 × 10-3MP, together
Heating device in Shi Kaiqi filming equipment is heated, so that the temperature in baking oven reaches 200 DEG C or so, heating device exists
Turntable is in rotary state always to drive the hollow transparent glass tube rotation of U-shaped during heating；
S5: being persistently filled with high pure oxygen and high-purity argon into vacuum coating equipment, and the charge of high pure oxygen is 20cc, high-purity argon
Charge be also 20cc, the ion source opened in vacuum coating equipment later carries out circular hollow transparent glass pipe surface
Bombardment processing, wherein the ion beam current of ion source is 190ma；
S6: plated film is evaporated to membrane material, Coating Materials is di-iron trioxide and silica, and the two replaces back and forth
Plated film, in total 12 layers of plated film, membrane system are followed successively by 0.5L, 2.5H, 2.5L, 2.5H, L, 0.5H, L, H, L, H, L, H, and when plated film is anti-
To plated film is started, wherein H represents di-iron trioxide, and L represents silica；The central wavelength of membrane system is 500nm, according to formula
Nd=1/4 × λ, wherein n is the refractive index of membrane material, and the refractive index n of di-iron trioxide is 2.6, the refractive index n of silica
For 1.46, λ 500nm, therefore physical thickness d=10 × λ/4n of every tunic, therefore the object of every tunic is corresponded to from the bottom up
Manage thickness successively are as follows:
S7: taking out mold from vacuum coating equipment, is then removed from the molds U-shaped hollow glass tube again, uses alcohol later
The surface for cleaning circular hollow glass tube places into the high temperature furnace that temperature is 450 DEG C after carrying out high temperature ageing 35min, takes
Out；
S8: the U-shaped hollow glass tube of above-mentioned plated film is turned into placement in a mold so that the half of plated film
It is covered in mold by mold, the other half transparent is exposed to outside mold, by circular hollow glass tube and mold fixture
It clamps on the turntable being placed in vacuum coating equipment, unlocking turntable is at rotary state so that U-shaped hollow glass tube
It revolves under the drive of turntable, vacuum coating equipment is vacuumized, so that the vacuum degree in vacuum coating equipment is 1.5 × 10- 3MP, while opening the heating device in filming equipment and being heated, so that the temperature in baking oven reaches 220 DEG C；
S9: being persistently filled with high pure oxygen and high-purity argon into vacuum coating equipment, and the charge of high pure oxygen is 20cc, high-purity argon
Charge be also 20cc, the ion source opened in vacuum coating equipment later carries out cylindric hollow transparent glass pipe surface
Bombardment processing, wherein the ion beam current of ion source is 200ma；
S10: plated film is evaporated to membrane material, Coating Materials is di-iron trioxide and silica, and the two replaces back and forth
Plated film, in total 8 layers of plated film, membrane system are followed successively by L, 0.5H, L, H, L, H, L, H, and when plated film reversely starts plated film, and wherein H represents three
Two iron are aoxidized, L represents silica；The central wavelength of membrane system is 500nm, and according to formula nd=1/4 × λ, wherein n is membrane material
The refractive index of material, the refractive index n of di-iron trioxide are 2.6, and the refractive index n of silica is 1.46, λ 500nm, therefore every
Physical thickness d=10 × λ/4n of tunic, therefore the physical thickness of every tunic is corresponded to from the bottom up successively are as follows:
S11: taking out cylindric hollow glass tube from vacuum coating equipment again, is put into the high temperature furnace that temperature is 500 DEG C
High temperature ageing 30min is carried out, the high reflection infrared heating hollow pipe preparation so far plated entirely is completed, and is prepared the infrared of completion and is added
Heat pipe half has 12 layers of reflecting layer, the other half has 8 layers of transmission layer.
Complete gold-plated infrared heating hollow pipe made from Example 1, embodiment 2 and embodiment 3 tests its plated film
Film layer is to the reflectivity of the infrared light that wavelength is 750-1550nm, and to be heat-treated 3 to it at 750 DEG C to four kinds of products small
When test film layer thereon high temperature resistance, obtain the test result such as following table:
It can be seen by upper table, reflecting layer reflectivity prepared by the present invention reaches 90% or so, therefore it can will be big on fluorescent tube
Partial heat reflection is to be utilized, therefore infrared ray heating tube heating effect produced by the present invention is fabulous；Furthermore there is upper table
As can be seen that film firmness of the invention is obviously increased relative to control group, to improve the use longevity of infrared heating pipe
Life.
In addition, the common commercially available infrared heating pipe of the infrared heating pipe of inventor's Example 1 and same shape carries out
The heating efficiency of the two is tested, which is applied to printing industry simultaneously and heated by inventor, as a result, it has been found that general
Leading to commercially available infrared heating pipe needs the fluorescent tube of 900-950 watts of power to can be only achieved heating requirements, and with the fluorescent tube of embodiment 1
The heating requirements can be reached by only needing 700 watts, it can be seen that infrared heating pipe of the invention substantially increases heating
Efficiency.
The system of complete gold-plated high reflection infrared heating hollow pipe according to the present invention is described above with reference to exemplary mode
Preparation Method.It will be understood by those skilled in the art, however, that the complete gold-plated high reflection proposed for aforementioned present invention is infrared
Line heats the preparation method of hollow pipe, and various improvement can also be made on the basis of not departing from the content of present invention.Therefore, originally
The protection scope of invention should be determined by the content of appended claims.
Claims (7)
1. a kind of preparation method of complete gold-plated high reflection infrared heating hollow pipe, which comprises the steps of:
S1: the hollow transparent glass tube of appropriate size is chosen, and its surface clean is clean；
S2: the both ends of the hollow transparent glass tube after cleaning are clamped with fixture, are put into the heating device of filming equipment kind
On interior turntable, turntable is in rotary state always so that hollow transparent glass tube is in turntable when filming equipment works
Lower rotation is driven, filming equipment is vacuumized, while opening the heating device in vacuum system, so that in vacuum system
Vacuum degree is 1.5-2.0 × 10-3MP, temperature reach 185-200 DEG C；
S3: being filled with high pure oxygen and high-purity argon into filming equipment, and the charge of high pure oxygen is 15-20cc, the charge of high-purity argon
It also is 15-20cc, the ion source being then turned in filming equipment carries out bombardment processing to hollow transparent glass pipe surface, ion source
Ion beam current is 150-200ma；
S4: being evaporated plated film to membrane material, and Coating Materials is di-iron trioxide and silica, the two alternate plating back and forth,
To hollow transparent glass tube, along its kernel of section line, the surface of half plates reflective coating/transmission film layer；
S5: the hollow glass tube that film has been plated on above-mentioned half surface being put into high temperature furnace and carries out high temperature ageing, the temperature in high temperature furnace
Degree maintains 450-500 DEG C, ageing time 25-35min；
S6: above-mentioned hollow glass tube is placed on the turntable in filming equipment with clamp again, unlocking turntable makes at its
In rotary state so that above-mentioned hollow glass tube rotates under the drive of turntable, filming equipment is vacuumized, so that
Vacuum degree in filming equipment is 1.5-2.0 × 10-3MP, temperature reach 200-220 DEG C；
S9: being filled with high pure oxygen and high-purity argon into filming equipment, and the charge of high pure oxygen is 15-20cc, the charge of high-purity argon
It also is 15-20cc, the ion source being then turned in filming equipment carries out bombardment processing to hollow transparent glass pipe surface, ion source
Ion beam current is 150-200ma；
S10: being evaporated plated film to membrane material, and Coating Materials is di-iron trioxide and silica, the two alternate plating back and forth,
Transmission film layer/reflective coating is plated to the other half surface of above-mentioned hollow transparent glass；
S11: being put into high temperature furnace from taking-up hollow glass tube in vacuum coating equipment carry out high temperature ageing again, the temperature in high temperature furnace
Degree maintains 450-500 DEG C, ageing time 30-35min, prepared by the high reflection infrared heating hollow pipe so far plated entirely
At the surface for preparing the hollow glass tube half of completion has reflective coating, the other half surface has transmission film layer.
2. the preparation method of complete gold-plated high reflection infrared heating hollow pipe as described in claim 1, which is characterized in that step
Hollow transparent glass tube surface clean uses concentration for the cleaning of the hydrofluoric acid solution of 3-4% or using ultrasonic cleaning in rapid S1
Machine cleaning.
3. the preparation method of complete gold-plated high reflection infrared heating hollow pipe as described in claim 1, which is characterized in that right
In columned hollow glass tube, in step S4 plated film, 4 layers of reflectance coating is first plated on the surface of hollow glass tube half
Layer, then in step slo, 8 layers of transmission film layer are plated to entire hollow glass tube, thus finally on the surface of hollow glass tube half
12 layers of reflective coating of upper formation form 8 layers of transmission film layer on the other half surface.
4. the preparation method of complete gold-plated high reflection infrared heating hollow pipe as claimed in claim 3, which is characterized in that institute
The membrane system for stating 4 layers of reflective coating is followed successively by the membrane system that 0.5L, 2.5H, 2.5L, 2.5H, 8 layers transmit film layers and is followed successively by L, 0.5H, L,
H, L, H, L, H.
5. the preparation method of complete gold-plated high reflection infrared heating hollow pipe as described in claim 1, which is characterized in that right
In circular hollow transparent glass tube or other hollow transparent glass tubes of abnormity, in step S4 plated film, first by hollow transparent glass
The surface of glass pipe half is covered, and 8 layers of transmission film layer is then plated on the other half surface, then in step slo, to sky
The surface that heart glass tube is coated with transmission film layer is covered, and 12 layers of reflective coating is plated on the surface of non-film plating layer, thus most
12 layers of reflective coating are formed on the surface of hollow glass tube half eventually, form 8 layers of transmission film layer on the other half surface.
6. the preparation method of complete gold-plated high reflection infrared heating hollow pipe as described in claim 1, which is characterized in that right
In circular hollow glass tube or other special-shaped hollow glass tubes, in step S4 plated film, first by the table of hollow glass tube half
Face is covered, and 12 layers of reflective coating is first plated on the other half surface, then in step slo, be coated with to hollow glass tube
The surface of reflective coating is covered, and 8 layers of transmission film layer is plated on the surface of non-film plating layer, thus finally in hollow glass tube
12 layers of reflective coating are formed on the surface of half, form 8 layers of transmission film layer on the other half surface.
7. such as the preparation method of complete gold-plated high reflection infrared heating hollow pipe described in claim 5 or 6, feature exists
In, the membrane systems of 8 layers of transmission film layer are followed successively by L, 0.5H, L, H, L, H, L, H, the membrane system 0.5L of 12 layers of reflective coating,
2.5H, 2.5L, 2.5H, L, 0.5H, L, H, L, H, L, H.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115094388A (en) * | 2022-07-08 | 2022-09-23 | 广东信大科技有限公司 | Heating pipe coating method and rose gold pipe and gold pipe prepared by same |
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