CN110050229A - Wavelength converter - Google Patents
Wavelength converter Download PDFInfo
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- CN110050229A CN110050229A CN201780075736.7A CN201780075736A CN110050229A CN 110050229 A CN110050229 A CN 110050229A CN 201780075736 A CN201780075736 A CN 201780075736A CN 110050229 A CN110050229 A CN 110050229A
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- laser beam
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- light beam
- temperature
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/05—Function characteristic wavelength dependent
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- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Wavelength converter (1) has: the 1st nonlinear dielectric (11), and i.e. the 2nd light beam (22) of higher hamonic wave for i.e. the 1st light beam (21) Xiang Jibo of fundamental wave that impulse hunting is generated is converted；2nd nonlinear dielectric (12) generates the 3rd light beam (23) based on the 1st light beam of the 1st nonlinear dielectric of the 2nd light beam and transmission；And unit (30) are adjusted, it is adjusted to from the 1st light beam to the transfer efficiency of the 2nd light beam.In the case where changing the impulse hunting frequency of the 1st light beam, transfer efficiency is adjusted by adjusting unit, to which the temperature dependency of the intensity of the 3rd light beam in the temperature of the 1st nonlinear dielectric shows single largest value, and maintain the temperature for the 1st nonlinear dielectric for showing maximum value and the intensity of the 2nd light beam that the identical state of the temperature of the 1st nonlinear dielectric of maximum value is shown.
Description
Technical field
The present invention relates to the Wavelength converters exported to the higher hamonic wave generated in nonlinear dielectric.
Background technique
Currently, it is known that following Wavelength converter, the Wavelength converter have the non-of the 2nd higher hamonic wave for generating fundamental wave
Linear medium and generate fundamental wave and the 2nd higher hamonic wave and frequency be the 3rd higher hamonic wave nonlinear dielectric.2nd higher hamonic wave
For the higher hamonic wave of a half-wavelength of the wavelength of fundamental wave.3rd higher hamonic wave is that the high order of 1/3rd wavelength of the wavelength of fundamental wave is humorous
Wave.The intensity of the known higher hamonic wave exported from Wavelength converter depends on the temperature of nonlinear dielectric and generates variation.?
In Wavelength converter, the temperature control of nonlinear dielectric is carried out sometimes, so that the intensity of the higher hamonic wave of output improves, and
Obtain the higher hamonic wave of stable intensity.
It is brilliant Patent Document 1 discloses (Third Harmonic Generation, THG) is generated with the 3rd higher hamonic wave
Based on the output of body, to the 2nd higher hamonic wave generate (Second Harmonic Generation, SHG) crystal temperature into
The technology of row setting.SHG crystal is the nonlinear dielectric for generating the 2nd higher hamonic wave.THG crystal is to produce the 3rd higher hamonic wave
Raw nonlinear dielectric.SHG crystal and THG Crystallization are the temperature in SHG crystal and the 3rd high order from the output of THG crystal
Multiple peak values of the intensity of the 3rd higher hamonic wave are generated in the corresponding relationship of the intensity of harmonic wave.The temperature of SHG crystal be set as with it is more
Temperature among the corresponding temperature of a peak value.It is greater than or equal to some strength by that will be set as exporting from Wavelength converter
The range of temperature of SHG crystal of the 3rd higher hamonic wave of intensity expand, Wavelength converter can reduce by SHG crystal
To the influence of the intensity of the 3rd higher hamonic wave caused by the variation of temperature.
Patent document 1: Japanese Unexamined Patent Publication 2013-205426 bulletin
Summary of the invention
According to the technology of patent document 1, by the way that the temperature of SHG crystal to be set as to the peak with the intensity of the 3rd higher hamonic wave
The temperature being worth except corresponding temperature, the strength reduction of the 3rd higher hamonic wave exported compared with intensity when peak value.Except this it
Outside, it in the case where the temperature of SHG crystal is set as temperature corresponding with the peak value of intensity of the 3rd higher hamonic wave, can reduce
The range of the temperature of the SHG crystal of the 3rd higher hamonic wave more than or equal to some strength can be exported.In this case, by SHG
Influence caused by the variation of the temperature of crystal to the intensity of the 3rd higher hamonic wave is big.Therefore, Wavelength converter is difficult to take into account defeated
The stabilisation of the intensity of the raising and higher hamonic wave of the intensity of higher hamonic wave out.
In the conversion from pulse laser beam, that is, fundamental wave to higher hamonic wave, when the impulse hunting frequency of fundamental wave is certain value,
The peak value of the intensity of 3rd higher hamonic wave of the temperature relative to SHG crystal is single peak value.From the state, by light source
Mean power is set as certain and makes the value of impulse hunting frequency in the case where low value change, from the fundamental wave of SHG crystal to the 2nd
The high conversion efficiency of higher hamonic wave.Since transfer efficiency is got higher, the peak value of the intensity of the 3rd higher hamonic wave is sometimes from single
Peak value is to multiple peak changes.In this case, due to the strength reduction of the fundamental wave projected from SHG crystal, by THG crystal
The intensity of the 3rd higher hamonic wave generated is lower.In addition, having since the peak value of the intensity of the 3rd higher hamonic wave is multiple peak values
When the intensity of the 3rd higher hamonic wave as caused by the temperature change of SHG crystal variation it is big.Therefore, Wavelength converter is difficult to simultaneous
Care for the stabilisation of the raising of the intensity of the higher hamonic wave of output and the intensity of higher hamonic wave.
The present invention is exactly to propose in view of the above problems, and its object is to obtain can be realized the higher hamonic wave of output
The raising of intensity and stabilized Wavelength converter.
In order to solve the above problems, reach purpose, Wavelength converter of the present invention has: the 1st nonlinear dielectric,
Its fundamental wave i.e. the 1st light beam for generating impulse hunting is converted to i.e. the 2nd light beam of higher hamonic wave of fundamental wave；2nd nonlinear dielectric,
Based on the 1st light beam by the 2nd light beam and through the 1st nonlinear dielectric, generate the 3rd light beam；And adjust unit, to from
1st light beam is adjusted to the transfer efficiency of the 2nd light beam.In the case where changing the impulse hunting frequency of the 1st light beam, pass through
It adjusts unit transfer efficiency is adjusted, thus the temperature-independent of the intensity of the 3rd light beam in the temperature of the 1st nonlinear dielectric
Property single largest value is shown, and the temperature of the 1st nonlinear dielectric for showing maximum value and the intensity of the 2nd light beam is maintained to show most
The identical state of temperature for the 1st nonlinear dielectric being worth greatly.
The effect of invention
Wavelength converter of the present invention obtains the raising and stabilization that can be realized the intensity of higher hamonic wave of output
The effect of change.
Detailed description of the invention
Fig. 1 is the figure of the outline structure for the Wavelength converter for indicating that embodiments of the present invention 1 are related to.
Fig. 2 is the 1st figure for illustrating the laser beam in SHG crystal shown in FIG. 1.
Fig. 3 is the 2nd figure for illustrating the laser beam in SHG crystal shown in FIG. 1.
Fig. 4 is the 1st figure of the relationship of the temperature for indicating SHG crystal shown in FIG. 1 and the intensity of laser beam.
Fig. 5 is the 2nd figure of the relationship of the temperature for indicating SHG crystal shown in FIG. 1 and the intensity of laser beam.
Fig. 6 is the 3rd figure of the relationship of the temperature for indicating SHG crystal shown in FIG. 1 and the intensity of laser beam.
Fig. 7 is the process for indicating the example of the sequence that the transfer efficiency of SHG crystal is adjusted in embodiment 1
Figure.
Fig. 8 is the figure of the example of the relationship of the temperature change for indicating SHG crystal shown in FIG. 1 and the intensity of laser beam.
Fig. 9 is the figure for indicating the variation of the adjusting carried out about mobile mechanism as shown in Figure 1.
Figure 10 is the figure of the outline structure for the Wavelength converter for indicating that embodiments of the present invention 2 are related to.
Figure 11 is the 1st figure for illustrating the laser beam in SHG crystal shown in Fig. 10.
Figure 12 is the 2nd figure for illustrating the laser beam in SHG crystal shown in Fig. 10.
Figure 13 is the process for indicating the example of the sequence that the transfer efficiency of SHG crystal is adjusted in embodiment 2
Figure.
Figure 14 is the figure of the outline structure for the Wavelength converter for indicating that embodiments of the present invention 3 are related to.
Figure 15 is the figure of the outline structure for the Wavelength converter for indicating that embodiments of the present invention 4 are related to.
Specific embodiment
In the following, the Wavelength converter that embodiments of the present invention are related to is described in detail based on attached drawing.In addition, simultaneously
It is not to be limited the invention by the embodiment.
Embodiment 1.
Fig. 1 is the figure of the outline structure for the Wavelength converter 1 for indicating that embodiments of the present invention 1 are related to.Wavelength convert
Device 1 has: i.e. the 2nd higher hamonic wave of the 1st nonlinear dielectric generates (SHG) crystal 11, and the fundamental wave for generating impulse hunting is i.e.
1st light beam is converted to i.e. the 2nd light beam of higher hamonic wave of fundamental wave；And the 2nd i.e. the 3rd higher hamonic wave of nonlinear dielectric generate (THG)
Crystal 12 generates the 3rd light beam based on the 1st light beam of the 2nd light beam and transmission SHG crystal 11.In the embodiment 1,
3rd light beam be fundamental wave and higher hamonic wave and frequency.
Wavelength converter 1, which has, projects the 1st light beam i.e. laser light source 10 of laser beam 21.In the following description, have
When the wavelength of laser beam 21 is known as the 1st wavelength.In the embodiment 1, the 1st wavelength is 1064nm.
Laser light source 10 is YAG laser or YVO4 laser.YAG laser is by yttrium (Yttrium), aluminium (Aluminum) and stone
Garnet (Garnet) is used as the Solid State Laser of laser medium.YVO4 laser is by yttrium (Yttrium) and four vanadium oxide (Vanadium
Tetraoxide, VO4) it is used as the Solid State Laser of laser medium.In 1 example, laser light source 10 makes to swash by Q-switch oscillation
Light beam 21 generates.Q-switch oscillation be vibrate it after atom increase by the excitation state in laser medium, thus
The oscillation method for improving the intensity of the laser generated.In addition, laser light source 10 is also possible to except YAG laser and YVO4 laser
Solid State Laser.
Condensing optical system 13 is set between laser light source 10 and SHG crystal 11.Condensing optical system 13, which has, to be passed through
SHG crystal 11 makes the convergent optical element of laser beam 21 i.e. lens 15.Lens 15 that condensing optical system 13 is included are simultaneously unlimited
In 1 situation, or multiple.
If SHG crystal 11 is launched into the laser beam 21 from laser light source 10, produce the 2nd light beam i.e. laser beam 22
It is raw.SHG crystal 11 converts fundamental wave, that is, laser beam 21 to 2 higher hamonic waves, that is, laser beam 22.The wavelength of laser beam 22 i.e. the 2nd wave
The half of a length of 1st wavelength.In the embodiment 1, the 2nd wavelength is 532nm.SHG crystal 11 projects the laser beam 22 generated.Separately
Outside, SHG crystal 11, which projects, does not convert and remaining laser beam 21 to laser beam 22.In SHG crystal 11, lbo crystal is used
(LiB3O5), ktp crystal (KTiPO4), bbo crystal (β-BaB2O4) or other nonlinear optical crystals.
Condensing optical system 14 is set between SHG crystal 11 and THG crystal 12.Condensing optical system 14, which has, to be passed through
THG crystal 12 makes laser beam 21,22 convergent optical elements i.e. lens 16.The lens 16 that condensing optical system 14 is included are not
It is limited to 1 situation, or multiple.In addition, condensing optical system 14 can also be not provided in Wavelength converter 1.
THG crystal 12 makes the 3rd light beam i.e. laser based on the laser beam 21 and laser beam 22 injected from SHG crystal 11
Beam 23 generates.THG crystal 12 is by fundamental wave, that is, laser beam 21 and 2 higher hamonic waves, that is, laser beam 22 to as the 3rd high order with frequency
Harmonic wave, that is, laser beam 23 is converted.The wavelength of laser beam 23 i.e. the 3rd wavelength is 1/the 3 of the 1st wavelength.In the embodiment 1,
3 wavelength are 355nm.THG crystal 12 projects the laser beam 23 generated.It is not converted to laser beam 23 in addition, THG crystal 12 projects
And remaining laser beam 21,22.In THG crystal 12, lbo crystal, YCOB crystal (YCa are used4O(BO3)3), bbo crystal,
Clbo crystal (CsLiB6O10) or other nonlinear optical crystals.
Wavelength separated element 17, which has, penetrates the light of the wavelength domain comprising the 1st wavelength and the 2nd wavelength, and to including the
The characteristic that the light of the wavelength domain of 3 wavelength is reflected.Wavelength separated element 17 makes the laser beam 21,22,23 from THG crystal 12
It is separated into laser beam 23 and laser beam 21,22.1 example of wavelength separated element 17 is dichronic mirror.
Wavelength converter 1 projects the laser beam 23 reflected by wavelength separated element 17.Damper 18 is to from wavelength point
Laser beam 21,22 from element 17 is absorbed.Laser beam 21,22 from wavelength separated element 17 by damper 18 to
Thermal energy conversion.The light of the 1st wavelength and the light of the 2nd wavelength are reflected in addition, wavelength separated element 17 can also have, and
The characteristic for penetrating the light of the 3rd wavelength.Difference of the wavelength separated element 17 based on wavelength and separate light, be also possible to point
Optical element except Look mirror.Wavelength separated element 17 is also possible to make using the difference of the refractive index of the light as caused by wavelength
The prism of light separation.
Wavelength converter 1 has the temperature controller 24 controlled to the temperature of SHG crystal 11, to THG crystal 12
The temperature controller 25 that is controlled of temperature.Temperature controller 24 monitors the temperature of SHG crystal 11, by SHG crystal
11 temperature is adjusted to pre-set temperature.Temperature controller 25 monitors the temperature of THG crystal 12, by THG crystalline substance
The temperature of body 12 is adjusted to pre-set temperature.In 1 example, temperature controller 24,25, which has, carries out heat supply and suction
Thermoelectric element, that is, Peltier's element, the temperature sensor, that is, thermistor of receipts.The set temperature and THG crystal 12 of SHG crystal 11
Set temperature can set independently of one another.
Also, Wavelength converter 1 has the mobile mechanism 30 for keeping lens 15 mobile, which is to receive laser beam 21
The optical element held back.Mobile mechanism 30 is to adjust to the slave laser beam 21 in SHG crystal 11 to the transfer efficiency of laser beam 22
The adjusting unit of section.Mobile mechanism 30 moves the bracket 31 for keeping lens 15 in the straight direction.It is mobile in 1 example
Mechanism 30 includes motor, makes the rotary motion of motor to the mechanism of linear motion conversion.
Control circuit 26 be by according to order execute processing and the entirety of Wavelength converter 1 is controlled it is hard
Part.Control circuit 26 controls temperature controller 24 according to the set temperature of SHG crystal 11.Control circuit 26 is according to THG
The set temperature of crystal 12 controls temperature controller 25.In addition, driving and shifting of the control circuit 26 to laser light source 10
The driving of motivation structure 30 is controlled.Control circuit 26 is also possible to CPU (Central Processing Unit) or microcomputer
Calculation machine.
Photodetector 27 examines the intensity of laser beam 23 in the adjusting of the transfer efficiency carried out by mobile mechanism 30
It surveys.Photodetector 27 is set to swashing from Wavelength converter 1 in the adjusting of the transfer efficiency carried out by mobile mechanism 30
The position that light beam 23 is injected.In addition, photodetector 27 is not limited to be set to the outside of Wavelength converter 1, also can be set
In the inside of Wavelength converter 1.Wavelength converter 1 can also have make it is outer from THG crystal 12 to Wavelength converter 1
The beam splitter of a part of branch of the laser beam 23 in portion.Photodetector 27 can also be carried out to by the light after beam splitter branch
Detection.
The phase of the generation of laser beam 22 in SHG crystal 11 mismatches Δ k and is indicated by following formula (1).In formula (1), k1
For the size of the wave-number vector of laser beam 21, k2For the size of the wave-number vector of laser beam 22, λ1For wavelength i.e. of laser beam 21
1 wavelength.n1For the refractive index of the SHG crystal 11 about laser beam 21, n2For the refractive index of the SHG crystal 11 about laser beam 22.
[mathematical expression 1]
The efficiency eta of laser beam 22 in SHG crystal 11 is maximum when meeting Δ k=0.Δ k=0 indicates SHG crystal
11 phase matched.SHG crystal 11 is in the case where the polarization direction of fundamental wave is perpendiculared to one another with the polarization direction of the 2nd higher hamonic wave
, the phase matched of so-called Class1 when generate laser beam 22.The efficiency eta of laser beam 22 in SHG crystal 11 indicates
It will be obtained from the intensity from the intensity for the laser beam 22 that SHG crystal 11 projects divided by the laser beam 21 injected to SHG crystal 11
As a result.In addition, the temperature of the SHG crystal 11 when meeting phase-matching condition becomes the phase-matching temperatures of SHG crystal 11.
Due to refractive index n1And n2Dependent on the temperature of SHG crystal 11, thus by formula (1) indicate phase mismatch Δ k according to
Rely in the temperature of SHG crystal 11.The efficiency eta of laser beam 22 in SHG crystal 11 and the laser beam 21 in SHG crystal 11
Intensity I1Relationship by following formula (2) indicate.In formula (2), L is the length of SHG crystal 11.In addition, the relationship indicated by formula (2)
Subtract by the intensity of the laser beam injected to SHG crystal 11 21 and the difference of the intensity of the laser beam 21 projected from SHG crystal 11
It is small to the degree that can be ignored, set up in the case where the efficiency eta of laser beam 22 is low.
[mathematical expression 2]
According to formula (2), efficiency eta and phase mismatch Δ k and intensity I1It is directly proportional.Due to phase mismatch Δ k according to
Rely in the temperature of SHG crystal 11, therefore efficiency eta depends on the temperature of SHG crystal 11.Furthermore it is known that in the pass with formula (2)
In the case where being tied to form efficiency eta height of the vertical situation compared to laser beam 22, efficiency eta depends on the temperature of SHG crystal 11
Laser beam 21 intensity I1.In addition, the transfer efficiency of the laser beam 23 in THG crystal 12 dependent on THG crystal 12 temperature,
Each intensity of the laser beam 21 and laser beam 22 injected to THG crystal 12.
Fig. 2 is the 1st figure for illustrating the laser beam 21 in SHG crystal 11 shown in FIG. 1.In the following description, X-axis, Y
Axis, Z axis are 3 axis perpendicular to one another.Z axis is the axis parallel with the optical axis of the optical system of Wavelength converter 1.X-axis is water
Square to axis.Y-axis is the axis of vertical direction.Central axis 32 indicates the center of the light beam of laser beam 21.Central axis 32 and Z axis are flat
Row.Positive Z-direction is the direction parallel with Z axis, for from the plane of incidence 33 of SHG crystal 11 to the direction of outgoing plane 34.Negative Z direction is
The direction opposite with positive Z-direction.Length L is the length of the SHG crystal 11 in Z-direction, be the plane of incidence 33 and outgoing plane 34 it
Between length.
Here, as shown in following formula (3), to the beam effective diameter W of the laser beam 21 in SHG crystal 11effIt is defined.
Beam effective diameter WeffFor the index of the degree of convergence of the laser beam 21 in expression SHG crystal 11.In formula (3), w (z) is Z
The beam diameter of the laser beam 21 of the position z of axis direction.The position of the z=0 expression plane of incidence 33.The position of z=L expression outgoing plane 34
It sets.In 1 example, beam effective diameter WeffIndicate being averaged for the beam diameter w (z) of the laser beam 21 in SHG crystal 11
Value.
[mathematical expression 3]
In 1 example, beam diameter w (z) is the standard deviation of the intensity distribution of X-direction or the light beam in Y direction
4 times of width of poor σ, that is, D4 σ width.D4 σ width by width of light beam ISO (International Organization for
Standardization international standard definition).In addition, beam diameter w (z) may not be D4 σ width, it is also possible to one
Half overall with or 1/e2Width.Beam effective diameter WeffAlso it can be used by the definition except formula (3).The convergence journey of laser beam 21
Degree can also be by beam effective diameter WeffExcept index expression.
Laser beam 21 is spread after the inside of SHG crystal 11 is temporarily restrained.The beam diameter w (z) of laser beam 21 with from
The plane of incidence 33 is advanced and is reduced, minimum at beam waist.Beam diameter w (z) is with from beam waist 35 to 34 row of outgoing plane
And then expand.In Fig. 2, the position of the convergent position, that is, beam waist 35 of laser beam 21 is the position of z=L/2.Z=L/2's
Position is the center of the SHG crystal 11 in Z-direction.In addition, directional light, that is, laser beam 21 is incident in lens shown in Fig. 2
15.The laser beam 21 injected to lens 15 is not limited to directional light, is also possible to restrain light or spreads light.
Fig. 3 is the 2nd figure for illustrating the laser beam 21 in SHG crystal 11 shown in FIG. 1.By moving from state shown in Fig. 2
It is mobile to positive Z-direction that motivation structure 30 makes lens 15, so that the distance between lens 15 and SHG crystal 11 be made to generate variation.Pass through
Keep lens 15 mobile to positive Z-direction, so that the position of the beam waist 35 of SHG crystal 11 is mobile from z=L/2 to positive Z-direction.It moves
The center of SHG crystal 11 of the motivation structure 30 from Z-direction keeps the position of beam waist 35 mobile.In Fig. 3, in z=
Position between L/2 and z=L shows the state for keeping beam waist 35 mobile.By keeping beam waist 35 mobile, and shown in Fig. 2
State compare beam effective diameter WeffIncrease.In this way, mobile mechanism 30 is by keeping lens 15 mobile to Z-direction, to make
The degree of convergence of laser beam 21 in SHG crystal 11 generates variation.
As shown in above-mentioned formula (2), the intensity I of the laser beam 21 in efficiency eta and SHG crystal 111It is directly proportional.By making
Beam effective diameter WeffIncrease, so that the degree of convergence of the laser beam 21 in SHG crystal 11 reduces, therefore efficiency eta drops
It is low.In this way, mobile mechanism 30 is adjusted efficiency eta and keeping the position of beam waist 35 mobile.By to conversion
Efficiency eta is adjusted, so that the intensity of the laser beam 22 projected from SHG crystal 11 be adjusted.In addition, in light-gathering optics system
In the case that system 13 has multiple lens 15, mobile mechanism 30 can also be such that each lens 15 individually move.It is multiple to making below
The variation for the situation that lens 15 individually move is described.
Fig. 4 is the 1st figure of the relationship of the temperature for indicating SHG crystal 11 shown in FIG. 1 and the intensity of laser beam 21,22,23.
By the relationship of the temperature of graphical representation SHG crystal 11 and the intensity of laser beam 21,22,23 in Fig. 4.The horizontal axis of figure indicates
The temperature of SHG crystal 11.The intensity of longitudinal axis expression laser beam 21,22,23.The intensity of laser beam 21,22 shown in Fig. 4 be from
The intensity for the laser beam 21,22 that SHG crystal 11 projects.The intensity of laser beam 23 shown in Fig. 4 be projected from THG crystal 12 swash
The intensity of light beam 23.
Beam effective diameter W is shown in FIG. 4effWhen for minimum value, i.e. the convergence journey of laser beam 21 in SHG crystal 11
Spend the relationship of the temperature and intensity in maximum situation.Here, as shown in Fig. 2, being in the position of z=L/2 in beam waist 35
When, beam effective diameter WeffFor minimum value.
When the temperature of SHG crystal 11 is Ta1, the intensity of the laser beam 22 projected from SHG crystal 11 is peak value.In SHG
When the temperature of crystal 11 is near Ta1, the efficiency eta in SHG crystal 11 is high.Since efficiency eta is higher, in SHG crystalline substance
More laser beams 21 is converted to laser beam 22 in body 11, therefore the strength reduction of the laser beam 21 projected from SHG crystal 11.
The set temperature of SHG crystal 11 is being set as Ta1, the actual temperature of SHG crystal 11 generates variation near Ta1
In the case of, the variation of the intensity of the laser beam 21,22 projected from SHG crystal 11 is smaller.Due to the laser injected to THG crystal 12
The variation of the intensity of beam 21,22 is small, therefore the variation of the intensity of the laser beam 23 projected from THG crystal 12 is also small.
In addition, in relationship shown in Fig. 4, when the temperature of SHG crystal 11 is Ta1, since SHG crystal 11 swashs majority
Light beam 21 is converted to laser beam 22, therefore the laser beam 21 that can utilize of the generation of the laser beam 23 in THG crystal 12 is strong
Degree is lower.Therefore, compared with intensity Pb1 when peak value, the intensity Pa1 drop of the laser beam 23 when the temperature of SHG crystal 11 is Ta1
It is low.In THG crystal 12, the intensity for the laser beam 21 that can be utilized by the generation of laser beam 23 is lower, laser beam
23 generation does not utilize and the intensity of remaining laser beam 22 is got higher.
In the temperature, that is, Tb1 lower than Ta11There is 1 peak value of the intensity of laser beam 23 in place.At the peak value, laser beam
23 intensity is Pb1.In addition, in temperature, that is, Tb1 than Ta1 high2There is another 1 peak value of the intensity of laser beam 23 in place.In Fig. 4
In laser beam 23 is shown the peak value of intensity be 2 examples.The peak value of the intensity of laser beam 23 may also be more than 2.In this way,
In beam effective diameter WeffIn the smallest situation, in the corresponding relationship of the intensity of the temperature and laser beam 23 of SHG crystal 11,
Occurs the peak value of the intensity of multiple laser beams 23 at the temperature near Ta1.
The set temperature of SHG crystal 11 is being set as Tb11In the case where, with set temperature be Ta1 the case where variation phase
Than the actual temperature of SHG crystal 11 is in Tb11The variation for nearby generating the intensity of the laser beam 21,22 when variation is big.Due to
The variation of the intensity for the laser beam 21,22 injected to THG crystal 12 is big, therefore the laser beam 23 projected from THG crystal 12 is strong
The variation of degree is also big.
The Wavelength converter 1 of embodiment 1 passes through movement in the initial stage of the adjusting of the beam diameter of laser beam 21
The position of lens 15 is adjusted in mechanism 30, so that beam effective diameter WeffAs minimum value.Mobile mechanism 30 as a result,
Peak value to the intensity of the laser beam 23 in the corresponding relationship of the temperature of the intensity and SHG crystal 11 of laser beam 23 is multiple peak values
State set.Mobile mechanism 30 from the state by keeping lens 15 mobile, to make the efficient beam in SHG crystal 11
Diameter WeffExpand.In addition, the adjusting in the initial stage is not limited to beam effective diameter WeffIt is set as the adjusting of minimum value.?
In the adjusting of initial stage, the peak value of the intensity of laser beam 23 can be set as the state of multiple peak values, can also will be had
Imitate beam diameter WeffThe value being set as except minimum value.
Fig. 5 is the 2nd figure of the relationship of the temperature for indicating SHG crystal 11 shown in FIG. 1 and the intensity of laser beam 21,22,23.
Being shown in FIG. 5 makes beam effective diameter WeffFrom the relationship of temperature and intensity in the case where minimum value increase.At this point, such as Fig. 3
Shown, beam waist 35 is in the position between z=L/2 and z=L.Compared with when the initial stage, projected from SHG crystal 11
The strength reduction of laser beam 22.Along with the reduction of the intensity of laser beam 22, the intensity of the laser beam 21 projected from SHG crystal 11
Increase.
When the temperature of SHG crystal 11 is Ta2, the intensity of the laser beam 22 projected from SHG crystal 11 is peak value.At this point,
Compared with the intensity when temperature in relationship shown in Fig. 4 is Ta1, the intensity of the laser beam 21 projected from SHG crystal 11 increases.
In THG crystal 12, the intensity for the laser beam 21 that the generation of laser beam 23 can utilize compared with the initial stage increases, and
Compared with the initial stage generation of laser beam 23 do not utilize and from THG crystal 12 project laser beam 22 strength reduction.
In relationship shown in Fig. 5, the peak value of the intensity of laser beam 23 is 1.It, will by the adjusting in mobile mechanism 30
The intensity of laser beam 23 in the corresponding relationship of the temperature of the intensity and SHG crystal 11 of the laser beam 23 projected from THG crystal 12
Peak value be set as single peak value.That is, by the adjusting in mobile mechanism 30, the laser beam 23 of the temperature about SHG crystal 11
Intensity temperature dependency have single maximum value.Here, temperature dependency is the temperature and light beam of nonlinear dielectric
The relationship of intensity.Maximum value is that the temperature of nonlinear dielectric is set as horizontal axis, and the intensity of light beam is set as the longitudinal axis and indicates temperature
The value of the intensity of peak value in the figure of dependence.The efficiency eta for the SHG crystal 11 that mobile mechanism 30 passes through is adjusted,
To carry out the adjusting for making the peak value of the intensity of laser beam 23 from multiple peak values to the single peak change for indicating maximum value.
The value of efficiency eta depends on the intensity for the laser beam 21 injected to SHG crystal 11 or the section shape of laser beam 21
Shape.In the case where the efficiency eta of SHG crystal 11 is certain certain value, the laser beam 23 when the temperature of SHG crystal 11 is Tb2
Intensity be peak value.Intensity, that is, maximum value of peak value is Pb2.SHG crystal 11 when the intensity of laser beam 23 is maximum value, that is, Pb2
Temperature, that is, Tb2 with from SHG crystal 11 project laser beam 22 intensity be maximum value when SHG crystal 11 temperature, that is, Ta2
It is identical.Temperature in the case that efficiency eta when by being Tb2 by the temperature of SHG crystal 11 is set as the relationship with Fig. 4 is
Tb11When efficiency eta it is equivalent, when intensity, that is, Pb2 when can be by the peak value of laser beam 23 is set as with peak value shown in Fig. 4
The equivalent intensity of intensity, that is, Pb1.
The set temperature of SHG crystal 11 is being set as Ta2, the actual temperature of SHG crystal 11 generates variation near Ta2
In the case of, the variation of the intensity of the laser beam 21,22 projected from SHG crystal 11 is smaller.Due to the laser injected to THG crystal 12
The variation of the intensity of beam 21,22 is small, therefore the variation of the intensity of the laser beam 23 projected from THG crystal 12 is also small.
Fig. 6 is the 3rd figure of the relationship of the temperature for indicating SHG crystal 11 shown in FIG. 1 and the intensity of laser beam 21,22,23.
It is shown in FIG. 6, according to figure 5 the state of corresponding relationship, further increases beam effective diameter WeffIn the case where temperature
The relationship of degree and intensity.Compared with when corresponding relationship shown in fig. 5, the efficiency eta of SHG crystal 11 is reduced.
When the temperature of SHG crystal 11 is Ta3, the intensity of the laser beam 22 projected from SHG crystal 11 is peak value.Laser beam
Temperature, that is, Tb3 when 23 intensity is peak value is identical as Ta3.Compared with Fig. 5 the case where, the laser beam that is projected from SHG crystal 11
22 strength reduction.By the strength reduction for the laser beam 22 that the generation of the laser beam 23 in THG crystal 12 can utilize, because
Compared with this is with Fig. 5 the case where, the strength reduction of the laser beam 23 generated in THG crystal 12.
In relationship shown in Fig. 6, the peak value of the intensity of laser beam 23 is 1.Compared with Fig. 5 the case where, in THG crystal
The strength reduction of the laser beam 23 generated in 12.Due to laser beam 23 intensity peak value, that is, Pb3 than laser beam 23 shown in fig. 5
Intensity peak value, that is, Pb2 it is small, therefore Pb3 < Pb2 relationship set up.In the case of fig. 6, Wavelength converter 1 and Fig. 5
Situation is compared, the strength reduction of the laser beam 23 of output.
Wavelength converter 1 is as shown in figure 5, by the adjusting in mobile mechanism 30, to will project from THG crystal 12
The peak value of the intensity of laser beam 23 in the corresponding relationship of the temperature of the intensity and SHG crystal 11 of laser beam 23 is set as single peak
Value.In Wavelength converter 1, the intensity for the laser beam 21 that the generation by being capable of increasing laser beam 23 can utilize, because
This can be improved the intensity of the laser beam 23 of output.In addition, when Wavelength converter 1 is by being peak value by the intensity of laser beam 22
Temperature be set as the set temperature of SHG crystal 11, in the case where can reduce with the temperature change near the set temperature
The variation of the intensity of laser beam 23.
Fig. 7 is the process for indicating the example of the sequence that the transfer efficiency of SHG crystal 11 is adjusted in embodiment 1
Figure.In mobile mechanism 30 shown in Fig. 2, the position of lens 15 is carried out to be set so that the position that beam waist 35 is z=L/2
It sets, by the beam effective diameter W of the laser beam 21 in SHG crystal 11effIt is set as minimum value.As a result, in step sl, moving machine
Structure 30 is multiple to the peak value of the intensity of 3 light beams, that is, laser beam 23 and the intensity in the corresponding relationship of the temperature of SHG crystal 11
The state of peak value is set.Pass through the setting of step S1, the corresponding relationship of the temperature of the intensity and SHG crystal 11 of laser beam 23
For corresponding relationship illustrated by Fig. 4.
The maximum value of the intensity of the laser beam 23 in the state of the setting of step S1 has been carried out as Pmax.It is shown in Fig. 4
In relationship, Pmax is that the temperature of SHG crystal 11 is Tb11When laser beam 23 intensity, that is, Pb1.
In step s 2, mobile mechanism 30 is mobile from the position of z=L/2 to positive Z-direction by making lens 15, to make the
Beam effective diameter W in the SHG crystal 11 of 1 light beam, that is, laser beam 21effExpand.Mobile mechanism 30 is by keeping efficient beam straight
Diameter WeffExpand, to be adjusted to the slave laser beam 21 in SHG crystal 11 to the efficiency eta of 2 light beams, that is, laser beam 22
Section.In addition, in step s 2, mobile mechanism 30 can also substitute positive Z-direction and keep lens 15 mobile to negative Z direction.In the feelings
Under condition, mobile mechanism 30 can also make beam effective diameter WeffExpand.
In step s3, according to set temperature, temperature controller 24 controls the temperature of SHG crystal 11, light detection
Device 27 measures the intensity of laser beam 23 corresponding with set temperature.Setting of the photodetector 27 to each SHG crystal 11
The intensity of the laser beam 23 of temperature measures.In step s 4, it is surveyed in the set temperature of SHG crystal 11 with by photodetector 27
In the corresponding relationship of the intensity of the laser beam 23 measured, whether the peak value to the intensity of laser beam 23 is that single peak value is sentenced
It is disconnected.
In the case where the peak value of intensity is non-single (step S4:No), due to the peak value or multiple peak values of intensity,
Back to the sequence of step S2.Mobile mechanism 30 is carried out again by beam effective diameter WeffThe efficiency eta that is formed of expansion
It adjusts.
In the case where the peak value of intensity is single (step S4:Yes), the sequence of S5 is entered step.In step s 5, right
Whether the intensity when peak value of laser beam 23, which is greater than or equal to Pmax- Δ P, is judged.Δ P is the strength reduction of laser beam 23
Allowance.In addition, when intensity when corresponding relationship illustrated by Fig. 5 is the peak value of laser beam 23 is greater than or equal to Pmax- Δ P
Laser beam 23 intensity and SHG crystal 11 temperature corresponding relationship.Corresponding relationship illustrated by Fig. 6 is the peak of laser beam 23
The corresponding relationship of the temperature of the intensity and SHG crystal 11 of laser beam 23 when intensity when value is less than Pmax- Δ P.Δ P can be set
It is set to any.
In the case that intensity in the peak value of laser beam 23 is greater than or equal to Pmax- Δ P (step S5:Yes), in step
In S6, the temperature when intensity of laser beam 23 is peak value by control circuit 26 is set as the set temperature of SHG crystal 11.As a result,
Wavelength converter 1 terminates adjusting of the slave laser beam 21 to the efficiency eta of laser beam 22 in SHG crystal 11.
In the case that intensity in the peak value of laser beam 23 is less than Pmax- Δ P (step S5:No), in the step s 7, move
Motivation structure 30 is by keeping lens 15 mobile to negative Z direction, to make the beam effective diameter of the laser beam 21 in SHG crystal 11
WeffIt reduces.Mobile mechanism 30 is by making beam effective diameter WeffIt reduces, to be carried out to the efficiency eta in SHG crystal 11
It adjusts again.Then, back to the sequence of step S3.
In 1 example, implement the wavelength convert that sequence according to figure 7 carries out when Wavelength converter 1 dispatches from the factory
The adjusting of device 1.It can implement the adjusting when non-wavelength conversion equipment 1 dispatches from the factory, it can also be in maintaining wavelength conversion equipment 1
Implement.Wavelength converter 1 can also be executed in the program for parsing and executing for according to figure by CPU or microcomputer
The function of the adjusting sequentially carried out shown in 7 all or part of.Wavelength converter 1, which can also have, stores program
Memory.Wavelength converter 1 can also be executed on the hardware formed by wired logic for sequence according to figure 7 into
The function of capable adjusting all or part of.
Fig. 8 is the example of the relationship of the temperature change for indicating SHG crystal 11 shown in FIG. 1 and the intensity of laser beam 23
Figure.In fig. 8 by the relationship of the temperature change of graphical representation SHG crystal 11 and the intensity of laser beam 23.The horizontal axis of figure indicates
The temperature change of SHG crystal 11.The unit of temperature is degree Celsius.The longitudinal axis indicates the strong of the laser beam 23 projected from THG crystal 12
Degree.The unit of intensity is arbitrary.The graphical representation of dotted line implements the Wavelength converter 1 that sequence according to figure 7 carries out
Adjusting before relationship.After the graphical representation of solid line implements the adjusting for the Wavelength converter 1 that sequence according to figure 7 carries out
Relationship.
As shown in figure 8, occurring 2 peaks in the intensity of laser beam 23 in the relationship before the adjusting of Wavelength converter 1
Value.1 peak value appears in the temperature change near -0.5 DEG C.Intensity at the peak value is the maximum of the intensity of laser beam 23
Value.Another 1 peak value appears in the temperature change near 0.5 DEG C.In the relationship before the adjusting of Wavelength converter 1, laser
The intensity of beam 23 be greater than or equal to maximum value 90% in the case where SHG crystal 11 temperature range be ± 0.2 or so.
In the relationship after the adjusting of Wavelength converter 1, occurs 1 peak value in the intensity of laser beam 23.The peak value
It appears in the temperature change near 0 DEG C.In the relationship after the adjusting of Wavelength converter 1, the intensity of laser beam 23 is greater than
Or equal to maximum value 90% in the case where SHG crystal 11 temperature range be ± 0.6 or so.Compared with before adjusting, expand
The temperature range of the laser beam 23 of 90% intensity more than or equal to maximum value can be projected.In this way, Wavelength converter 1
The adjusting carried out by sequence according to figure 7 can reduce the laser beam 23 as caused by the temperature change of SHG crystal 11
The variation of intensity can make the intensity stabilization of laser beam 23.
Also, the maximum value of the intensity of the laser beam 23 after the adjusting of Wavelength converter 1 and the laser beam 23 before adjusting
Intensity maximum value it is equivalent.Even if carrying out the adjusting of sequence progress according to figure 7, Wavelength converter 1 also can be defeated
High-intensitive laser beam 23 out.
In 1 example, SHG crystal 11 is noncritical phase matching (the noncritical phase of Class1
Matching, NCPM) under the conditions of carry out the lbo crystal of wavelength convert, in the case that the 1st wavelength of laser beam 21 is 1064nm,
The set temperature of SHG crystal 11 is about 150 DEG C.In wavelength convert under the conditions of NCPM, it is humorous with high order to can reduce fundamental wave
The offset of the direction of travel of wave deviates, and angle can be made to allow width expansion.In this way, SHG crystal 11 set temperature with
In the case that the temperature difference of room temperature is big, since the temperature for being difficult to SHG crystal 11 is accurately controlled, SHG crystal
11 temperature is easy to change from set temperature.Even if in the case where the temperature of SHG crystal 11 is easily varied, embodiment 1
Wavelength converter 1 can also make the intensity stabilization of laser beam 23, and can export high-intensitive laser beam 23.
According to embodiment 1, Wavelength converter 1 is carried out by the mobile mechanism 30 for keeping lens 15 mobile by laser beam
The peak value of 23 intensity is set as the adjusting of single peak value.Wavelength converter 1 passes through the adjusting that is carried out by mobile mechanism 30, energy
Enough variations for reducing the intensity of laser beam 23 as caused by the temperature change of SHG crystal 11.In addition, Wavelength converter 1 can
Export high-intensitive laser beam 23.The intensity that Wavelength converter 1 obtains the higher hamonic wave that can make output as a result, improves and steady
Surely the effect changed.
Fig. 9 is the figure for indicating the variation of the adjusting carried out about mobile mechanism 30 as shown in Figure 1.In variation,
Mobile mechanism 30 is by changing the beam diameter of the laser beam 21 in SHG crystal 11, thus to the slave laser in SHG crystal 11
Beam 21 is adjusted to the efficiency eta of laser beam 22.
In variation, Wavelength converter 1 substitutes condensing optical system 13 shown in FIG. 1, has comprising multiple lens
15 condensing optical system 36.Condensing optical system 36 shown in Fig. 9 has optical element i.e. 3 lens 15A, 15B, 15C.Respectively
Lens 15A, 15B, 15C are kept by bracket 31.
Mobile mechanism 30 can be such that each lens 15A, 15B, 15C individually moves in the Z-axis direction.Mobile mechanism 30 passes through
It moves each lens 15A, 15B, 15C individually, expands and reduce beam waist so as to not make beam waist 35 mobile
Beam diameter in 35.In addition, the quantity for the optical element that condensing optical system 36 has is not limited to 3, or 2
It is a or be greater than or equal to 4.
Mobile mechanism 30 is by changing the beam diameter of the laser beam 21 in SHG crystal 11, to keep efficient beam straight
Diameter WeffVariation.In variation, also with keep beam waist 35 mobile situation in the same manner, be able to carry out by mobile mechanism 30 into
The adjusting of capable Wavelength converter 1.
Embodiment 2.
Figure 10 is the figure of the outline structure for the Wavelength converter 40 for indicating that embodiments of the present invention 2 are related to.In wavelength
In conversion equipment 40, the mobile mechanism 30 that substitution keeps lens 15 shown in FIG. 1 mobile, setting keeps the i.e. SHG of the 1st nonlinear dielectric brilliant
The mobile mobile mechanism 41 of body 11.Identical symbol is marked to part same as embodiment 1, the repetitive description thereof will be omitted.
Mobile mechanism 41 is the tune that the slave laser beam 21 in SHG crystal 11 is adjusted to the transfer efficiency of laser beam 22
Save unit.Mobile mechanism 41 moves the bracket 42 for keeping SHG crystal 11 in the straight direction.In 1 example, mobile mechanism
41 include motor, the mechanism for converting the rotary motion of motor to linear motion.Control circuit 26 is to mobile mechanism 41
Driving is controlled.
Figure 11 is the 1st figure for illustrating the laser beam 21 in SHG crystal 11 shown in Fig. 10.Figure 12 be illustrate it is shown in Fig. 10
2nd figure of the laser beam 21 in SHG crystal 11.
If mobile mechanism 41 makes SHG crystal 11, the state shown in Figure 11 is mobile to positive Z-direction, in SHG crystal 11
Beam waist 35 position it is mobile to negative Z direction.By keeping beam waist 35 mobile, the state shown in Figure 11 is compared to effective
Beam diameter WeffIncrease.In this way, mobile mechanism 41 is by keeping SHG crystal 11 mobile to Z-direction, to make in SHG crystal 11
Laser beam 21 degree of convergence generate variation.In embodiment 2, mobile mechanism 41 does not make swashing after SHG crystal 11
The expansion of light beam 21 generates variation, and the degree of convergence of the laser beam 21 in SHG crystal 11 can be made to generate variation.
Figure 13 is the stream for indicating the example of the sequence that the transfer efficiency of SHG crystal 11 is adjusted in embodiment 2
Cheng Tu.Mobile mechanism 41 shown in Figure 11 sets the position of SHG crystal 11, so that the position of beam waist 35 is Z
The center of the SHG crystal 11 of axis direction, by the beam effective diameter W of the laser beam 21 in SHG crystal 11effIt is set as minimum
Value.As a result, in step s 11, pair of the mobile mechanism 41 to the intensity of 3 light beams, that is, laser beam 23 and the temperature of SHG crystal 11
The peak value of intensity in should being related to is that the state of multiple peak values is set.Pass through the setting of step S11, the intensity of laser beam 23
Corresponding relationship with the temperature of SHG crystal 11 is corresponding relationship illustrated by Fig. 4.In the state of the setting for having carried out step S11
Laser beam 23 intensity maximum value be Pmax.
In step s 12, mobile mechanism 41 is mobile to negative Z direction by making SHG crystal 11, so that the 1st light beam be made to swash
Beam effective diameter W in the SHG crystal 11 of light beam 21effExpand.Mobile mechanism 41 is by making beam effective diameter WeffExpand,
To which the slave laser beam 21 in SHG crystal 11 be adjusted to the efficiency eta of 2 light beams, that is, laser beam 22.In addition, in step
In rapid S12, mobile mechanism 41, which can also substitute negative Z direction, keeps SHG crystal 11 mobile to positive Z-direction.In this case, moving machine
Structure 41 can also make beam effective diameter WeffExpand.
In step s 13, according to set temperature, temperature controller 24 controls the temperature of SHG crystal 11, light detection
Device 27 measures the intensity of laser beam 23 corresponding with set temperature.Setting of the photodetector 27 to each SHG crystal 11
The intensity of the laser beam 23 of temperature measures.In step S14, in the set temperature of SHG crystal 11 and by photodetector 27
In the corresponding relationship of the intensity for the laser beam 23 measured, whether the peak value to the intensity of laser beam 23 is that single peak value carries out
Judgement.
In the case where the peak value of intensity is non-single (step S14:No), due to the peak value or multiple peak values of intensity, because
This returns to the sequence of step S12.Mobile mechanism 41 is carried out again by beam effective diameter WeffExpansion formed transfer efficiency
The adjusting of η.
In the case where the peak value of intensity is single (step S14:Yes), the sequence of S15 is entered step.In step S15
In, whether intensity when to the peak value of laser beam 23, which is greater than or equal to Pmax- Δ P, judges.
In the case that intensity in the peak value of laser beam 23 is greater than or equal to Pmax- Δ P (step S15:Yes), in step
In rapid S16, the temperature when intensity of laser beam 23 is peak value by control circuit 26 is set as the set temperature of SHG crystal 11.By
This, Wavelength converter 40 terminates adjusting of the slave laser beam 21 to the efficiency eta of laser beam 22 in SHG crystal 11.
In the case that intensity in the peak value of laser beam 23 is less than Pmax- Δ P (step S15:No), in step S17,
Mobile mechanism 41 is by keeping SHG crystal 11 mobile to positive Z-direction, to make the efficient beam of the laser beam 21 in SHG crystal 11
Diameter WeffIt reduces.Mobile mechanism 41 is by making beam effective diameter WeffIt reduces, thus to the efficiency eta in SHG crystal 11
It is adjusted again.Then, back to the sequence of step S13.
According to embodiment 2, Wavelength converter 40 will swash by the mobile mechanism 41 for keeping SHG crystal 11 mobile
The peak value of the intensity of light beam 23 is set as the adjusting of single peak value.Wavelength converter 40 passes through the tune that is carried out by mobile mechanism 41
Section, can reduce the variation of the intensity of laser beam 23 as caused by the temperature change of SHG crystal 11.In addition, Wavelength converter
40 can export high-intensitive laser beam 23.Wavelength converter 40 obtains the intensity that can make the higher hamonic wave of output as a result,
It improves and stabilized effect.
Embodiment 3.
Figure 14 is the figure of the outline structure for the Wavelength converter 50 for indicating that embodiments of the present invention 3 are related to.In wavelength
In conversion equipment 50,1 nonlinear dielectric, that is, SHG crystal 11 and 2 nonlinear dielectrics, that is, THG crystal 12 are set to optical resonator
Inside.Identical symbol is marked to part identical with embodiment 1 or 2, the repetitive description thereof will be omitted.
Wavelength converter 50 has: excitation light source 51 projects excitation light 60；And laser medium 56, by motivating
Light 60 motivates, and outgoing laser beam 21, laser beam 21 is the pulse laser beam as the 1st light beam.In addition, Wavelength converter 50 has
It is standby that laser medium 56, SHG crystal 11, THG crystal 12 are configured to internal optical resonator 61.2 resonance mirrors 55,59 constitute light
Resonator 61.
1 example for motivating light source 51 is semiconductor laser.In embodiment 3, the wavelength of excitation light 60 is
808nm.The driving of 26 pairs of control circuit excitation light sources 51 controls.The excitation light 60 projected from excitation light source 51 is in optical fiber 52
Middle propagation.Actuated optical system 54 restrains the excitation light 60 projected from the ejecting end 53 of optical fiber 52.Resonance mirror 55 has and makes to wrap
The light of the wavelength domain of wavelength containing excitation light 60 penetrates, and anti-to carrying out comprising the light of the 1st wavelength and the wavelength domain of the 2nd wavelength
The characteristic penetrated.Resonance mirror 55 penetrates the excitation light 60 from actuated optical system 54.
Laser medium 56, Q-switch element 57, wavelength separated element 58, THG crystal 12, SHG crystal 11 be set to 2 it is humorous
Optical path between galvanometer 55,59.Laser medium 56 by absorb excitation light 60 become excitation state, along with from excitation state
Energy state transformation and generate nature transmitting light.Laser medium 56 by stimulated emission make 2 resonance mirrors 55,59 it
Between reciprocal natural transmitting light amplification, injection fundamental wave, that is, laser beam 21.Laser medium 56 is the laser crystal for being doped with neodymium or ytterbium
That is YAG crystal or YVO4 crystal.
Q-switch element 57 generates laser beam 21 by Q-switch oscillation.In addition, in Wavelength converter 50, it can also
To be not provided with Q-switch element 57.
Wavelength separated element 58 is set between Q-switch element 57 and THG crystal 12.Wavelength separated element 58 has and makes to wrap
The light of wavelength domain containing the 3rd wavelength penetrates, and to the spy that the light comprising the 1st wavelength and the wavelength domain of the 2nd wavelength is reflected
Property.Wavelength separated element 58 makes the laser beam 21,22,23 from THG crystal 12 be separated into laser beam 23 and laser beam 21,22.
In addition, wavelength separated element 58 makes the laser beam 21,22 from Q-switch element 57 advance to THG crystal 12.Wavelength separated element
58 1 example is dichronic mirror.
Wavelength converter 50 projects the laser beam 23 for penetrating wavelength separated element 58.In addition, wavelength separated element 58
The characteristic that can have and the light of the 3rd wavelength is reflected, and penetrate the light of the 1st wavelength and the light of the 2nd wavelength.Wavelength point
Difference from element 58 based on wavelength and separate light, the optical element being also possible to except dichronic mirror.Wavelength separated member
Part 58 is also possible to the prism for separating light using the difference of the refractive index of the light as caused by wavelength.
Resonance mirror 59 has the characteristic reflected the light comprising the 1st wavelength and the wavelength domain of the 2nd wavelength.Carry out self-resonance
The laser beam 21 of mirror 59,22, the laser beam 21,22 from THG crystal 12 are incident upon SHG crystal 11.SHG crystal 11 is by laser beam
21 convert to pulse laser beam, that is, laser beam 22 as the 2nd light beam.SHG crystal 11 project generate laser beam 22, not to
Laser beam 22 is converted and remaining laser beam 21.In addition, SHG crystal 11 makes the laser injected from THG crystal 12 or resonance mirror 59
Beam 22 penetrates.
Laser beam 21 from wavelength separated element 58,22, the laser beam 21,22 from SHG crystal 11 are incident upon THG crystalline substance
Body 12.THG crystal 12 converts laser beam 21,22 to pulse laser beam, that is, laser beam 23 as the 3rd light beam.THG crystal 12
Project generate laser beam 23, to laser beam 23 conversion and remaining laser beam 21,22.
Laser beam 21,22 is reciprocal between 2 resonance mirrors 55,59.2 resonance mirrors 55,59 can also be set as setting
The curve form of radius of curvature, so that forming beam waist in SHG crystal 11.
Also, Wavelength converter 50 is identically as embodiment 2, has the mobile mechanism 41 for keeping SHG crystal 11 mobile.
Unit, that is, mobile mechanism 41 is adjusted by keeping SHG crystal 11 mobile, thus to the slave laser beam 21 in SHG crystal 11 to laser beam
22 transfer efficiency is adjusted.In addition, mobile mechanism 50 can also substitute mobile mechanism 41, has moving machine shown in FIG. 1
Structure 30.In this case, unit, that is, mobile mechanism 30 is adjusted identically as embodiment 1, by keeping lens 15 mobile, thus right
Efficiency eta in SHG crystal 11 is adjusted, which is to make the convergent optical element of laser beam 21.Mobile mechanism 30
It can also identically as the variation of embodiment 1, to conversion and moving the i.e. multiple lens 15 of optical element individually
Efficiency eta is adjusted.
According to embodiment 3, Wavelength converter 50 identically as embodiment 1 or 2, obtains the high order that can make output
The intensity of harmonic wave improves and stabilized effect.
Embodiment 4.
Figure 15 is the figure of the outline structure for the Wavelength converter 70 for indicating that embodiments of the present invention 4 are related to.In wavelength
In conversion equipment 70, the laser light source 10 in embodiment 2 shown in Fig. 10 is substituted, pulsed laser light source 71 and frequency control are set
Device 72 processed.The structure except pulsed laser light source 71 and frequency controller 72 in Wavelength converter 70 is related to embodiment 2
And Wavelength converter 40 in laser light source 10 except structure it is identical.Part identical with embodiment 1 or 2 is marked
Identical symbol, the repetitive description thereof will be omitted.
Pulsed laser light source 71 is the pulse laser beam i.e. laser light source of laser beam 21 projected as the 1st light beam.Frequency
Controller 72 is adjusted by the driving timing to pulsed laser light source 71, to project laser to from pulsed laser light source 71
The frequency of beam 21, that is, impulse hunting frequency is controlled.Control circuit 26 controls frequency controller 72.SHG crystal 11 will
Laser beam 21 is converted to pulse laser beam, that is, laser beam 22 as the 2nd light beam.THG crystal 12 is by laser beam 21,22 to conduct
Pulse laser beam, that is, laser beam 23 of 3rd light beam is converted.
Also, Wavelength converter 70 is identically as embodiment 2, has the mobile mechanism 41 for keeping SHG crystal 11 mobile.
Mobile mechanism 41 is by keeping SHG crystal 11 mobile, thus to conversion of the slave laser beam 21 to laser beam 22 in SHG crystal 11
The adjusting unit that efficiency eta is adjusted.In embodiment 4, mobile mechanism 41 is in addition to imitating conversion identically as embodiment 2
Except rate η is adjusted, also efficiency eta is adjusted in the case where changing the impulse hunting frequency of laser beam 21.
Mobile mechanism 41 is in the case where changing the impulse hunting frequency of laser beam 21, by the way that efficiency eta is adjusted, thus
The temperature dependency of the intensity of laser beam 23 in the temperature of SHG crystal 11 shows single maximum value, and maintains to show this
The temperature of the SHG crystal 11 of maximum value and the intensity of laser beam 22 show the identical state of the temperature of SHG crystal 11 of maximum value.
In the case where the average output of pulsed laser light source 71 is certain, impulse hunting frequency is higher, each to swash from pulse
The intensity of the laser beam 21 for the pulse that radiant 71 projects more reduces.It gets higher due to impulse hunting frequency, is penetrated to SHG crystal 11
In the case where the strength reduction of the laser beam 21 entered, the slave laser beam 21 in SHG crystal 11 becomes to the efficiency eta of laser beam 22
It is low.In addition, impulse hunting frequency is lower in the case where the average output of pulsed laser light source 71 is certain, it is each to swash from pulse
The intensity of the laser beam 21 for the pulse that radiant 71 projects more increases.Due to impulse hunting frequencies go lower, penetrated to SHG crystal 11
In the raised situation of the intensity of the laser beam 21 entered, the slave laser beam 21 in SHG crystal 11 becomes to the efficiency eta of laser beam 22
It is high.
Here, in the case where certain value, that is, F1 is set as impulse hunting frequency, by sequence shown in Figure 13 to wavelength
Conversion equipment 70 is adjusted.In the Wavelength converter 70 of the adjusting sequentially carried out according to shown in Figure 13, make
Impulse hunting frequency is in the case where the change of the value than F1 high, that is, F2, and slave laser beam 21 in SHG crystal 11 is to laser beam 22
Efficiency eta is lower.Since efficiency eta is lower, maintaining the peak value of the intensity of laser beam 23 is single peak value, but is had
When laser beam 23 intensity maximum value ratio Pmax it is low.In this case, the laser beam exported sometimes from Wavelength converter 70
23 intensity is lower.
The case where i.e. F2 of value of F1 high of the Wavelength converter 70 when making impulse hunting frequency to than crossing de-regulation is changed
Under, the efficiency eta in SHG crystal 11 can be adjusted again by sequence shown in Figure 13.Due to maintaining laser beam
The peak value of 23 intensity is single peak value, therefore in adjusting again, can also skip step S11 shown in Figure 13 to step
S14 implements the sequence from step S15.
On the other hand, in the Wavelength converter 70 of the adjusting sequentially carry out according to shown in Figure 13, make arteries and veins
Frequency of oscillation is rushed in the case where lower than F1 value i.e. F3 change, the slave laser beam 21 in SHG crystal 11 turns to laser beam 22
Efficiency eta is changed to get higher.Since efficiency eta is got higher, the peak value of the intensity of laser beam 23 is sometimes from single peak value to multiple
Peak change.In this case, it due to the strength reduction of the laser beam 21 projected from SHG crystal 11, is produced by THG crystal 12
The intensity of raw laser beam 23 is lower.In addition, since the peak value of the intensity of laser beam 23 is multiple peak values, sometimes by SHG
The variation of the intensity of laser beam 23 caused by the temperature change of crystal 11 is big.
Wavelength converter 70 is the case where changing impulse hunting frequency to the value i.e. F3 lower than F1 when crossing de-regulation
Under, the efficiency eta in SHG crystal 11 can be adjusted again by sequence shown in Figure 13.Due to sometimes from laser beam
The peak value of 23 intensity is single peak value to multiple peak changes, therefore in adjusting again, identically as embodiment 2, real
Apply the sequence from step S11.
In this way, Wavelength converter 70 is in the case where changing impulse hunting frequency, by turning in SHG crystal 11
It changes efficiency eta to be adjusted again, high-intensitive laser beam 23 can be exported, and can reduce by the temperature change of SHG crystal 11
The variation of the intensity of caused laser beam 23.
In addition, mobile mechanism 70 can also substitute mobile mechanism 41, has mobile mechanism 30 shown in FIG. 1.In the situation
Under, in Wavelength converter 70, the laser light source 10 in embodiment 1 shown in FIG. 1 is substituted, pulsed laser light source 71 is set
With frequency controller 72.The structure and implementation except pulsed laser light source 71 and frequency controller 72 in Wavelength converter 70
Structure except the laser light source 10 in Wavelength converter 1 that mode 1 is related to is identical.
Unit, that is, mobile mechanism 30 is adjusted in the case where changing the frequency of outgoing laser beam 21, by moving lens 15
Dynamic, so that the slave laser beam 21 in SHG crystal 11 be adjusted to the efficiency eta of laser beam 22, which is to make to swash
The convergent optical element of light beam 21.Identically as embodiment 1, mobile mechanism 30 makes beam waist like that as shown in Figures 2 and 3
35 position is mobile, makes the beam effective diameter W of the laser beam 21 in SHG crystal 11effVariation.As a result, mobile mechanism 30 to turn
Efficiency eta is changed to be adjusted.
Identically as the variation of embodiment 1, mobile mechanism 30 can also make the i.e. multiple lens 15 of optical element individually
Ground is mobile.In the example shown in Fig. 9, mobile mechanism 30 is in the condensing optical system 36 for having 3 lens 15A, 15B, 15C
In, move each lens 15A, 15B, 15C individually.Mobile mechanism 30 is by making each lens 15A, 15B, 15C
It individually moves, so as to expand and reduce the beam diameter in beam waist 35.Mobile mechanism 30 does not make beam waist 35
It is mobile, and make the beam effective diameter W of the laser beam 21 in SHG crystal 11effVariation.Mobile mechanism 30 is to transfer efficiency as a result,
η is adjusted.
The Wavelength converter 50 of embodiment 3 is the case where changing the frequency of the Q-switch oscillation in Q-switch element 57
Under, can also be identical as the Wavelength converter 70 of embodiment 4 efficiency eta is adjusted again.Wavelength converter
50 adjusting unit, that is, mobile mechanism 41 or mobile mechanism 30 are in the case where changing the frequency of outgoing laser beam 21, to conversion
Efficiency eta is adjusted.Wavelength converter 50 can export high-intensitive laser beam 23, and can reduce by SHG crystal 11
Temperature change caused by laser beam 23 intensity variation.
According to embodiment 4, Wavelength converter 70 passes through tune in the case where changing the frequency of outgoing laser beam 21
Efficiency eta is adjusted in section unit.Wavelength converter 70 can reduce by the way that efficiency eta is adjusted by SHG
The variation of the intensity of laser beam 23 caused by the temperature change of crystal 11.In addition, Wavelength converter 70 can export high intensity
Laser beam 23.The intensity that Wavelength converter 70 obtains the higher hamonic wave that can make output as a result, improves and stabilized effect
Fruit.
Representation shown in above embodiment be the contents of the present invention an example, can also be with others
Well known technical combinations can also omit a part of structure in the range for not departing from purport of the invention, be changed.
The explanation of label
1,40,50,70 Wavelength converter, 10 laser light sources, 11 SHG crystals, 12 THG crystal, 13,14,36 optically focused
Optical system, 15,15A, 15B, 15C, 16 lens, 17,58 wavelength separated elements, 18 dampers, 21,22,23 laser beams, 24,
25 temperature controllers, 26 control circuits, 27 photodetectors, 30,41 mobile mechanisms, 31,42 brackets, 32 central axises, 33 planes of incidence,
34 outgoing planes, 35 beam waists, 51 excitation light sources, 52 optical fiber, 53 ejecting ends, 54 actuated optical systems, 55,59 resonance mirrors, 56
Laser medium, 57 Q-switch elements, 60 excitation lights, 61 optical resonators, 71 pulsed laser light sources, 72 frequency controllers.
Claims (10)
1. a kind of Wavelength converter, which is characterized in that have:
1st nonlinear dielectric, higher hamonic wave i.e. 2nd light of fundamental wave i.e. the 1st light beam that impulse hunting is generated to the fundamental wave
Beam conversion；
2nd nonlinear dielectric, based on the 1st light beam of the 2nd light beam and transmission the 1st nonlinear dielectric,
Generate the 3rd light beam；And
Unit is adjusted, is adjusted to from the 1st light beam to the transfer efficiency of the 2nd light beam,
In the case where changing the impulse hunting frequency of the 1st light beam, by the adjusting unit to the transfer efficiency
Be adjusted, thus the temperature dependency of the intensity of the 3rd light beam in the temperature of the 1st nonlinear dielectric show it is single
Maximum value, and the temperature of the 1st nonlinear dielectric for showing the maximum value and the intensity of the 2nd light beam is maintained to show
The identical state of temperature of the 1st nonlinear dielectric of maximum value.
2. Wavelength converter according to claim 1, which is characterized in that
The adjusting unit make the peak value of the intensity of the 3rd light beam from multiple peak values to showing the single of the maximum value
Peak change adjusting.
3. Wavelength converter according to claim 1 or 2, which is characterized in that
1st light beam is restrained by the 1st nonlinear dielectric,
The adjusting unit is mobile by making the convergent position of the 1st light beam, so that the transfer efficiency be adjusted.
4. Wavelength converter according to claim 1 or 2, which is characterized in that
Have optical element, which restrain the 1st light beam by the 1st nonlinear dielectric,
The adjusting unit is by changing the distance between the optical element and the 1st nonlinear dielectric, thus to institute
Transfer efficiency is stated to be adjusted.
5. Wavelength converter according to claim 4, which is characterized in that
The unit that adjusts is the mobile mechanism for keeping the optical element mobile.
6. Wavelength converter according to claim 4, which is characterized in that
The unit that adjusts is the mobile mechanism for keeping the 1st nonlinear dielectric mobile.
7. Wavelength converter according to any one of claim 3 to 6, which is characterized in that
The adjusting unit makes the convergent position of the 1st light beam from the described 1st on the direction of the central axis of the 1st light beam
The center of nonlinear dielectric is mobile.
8. Wavelength converter according to claim 1 or 2, which is characterized in that
The adjusting unit is by changing the beam diameter of the 1st light beam in the 1st nonlinear dielectric, thus to institute
Transfer efficiency is stated to be adjusted.
9. Wavelength converter according to any one of claim 1 to 8, which is characterized in that
Has the pulsed laser light source for projecting the 1st light beam.
10. Wavelength converter according to any one of claim 1 to 8, it is characterised in that have:
Light source is motivated, excitation light is projected；
Laser medium projects the 1st light beam by the excitation light stimulus；And
Optical resonator is configured with the laser medium, the 1st nonlinear dielectric and the 2nd nonlinear dielectric in inside.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2017/018569 WO2018211637A1 (en) | 2017-05-17 | 2017-05-17 | Wavelength conversion apparatus |
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| CN110050229A true CN110050229A (en) | 2019-07-23 |
| CN110050229B CN110050229B (en) | 2020-06-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780075736.7A Active CN110050229B (en) | 2017-05-17 | 2017-05-17 | Wavelength conversion device |
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| Country | Link |
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| JP (1) | JP6272597B1 (en) |
| KR (1) | KR102033657B1 (en) |
| CN (1) | CN110050229B (en) |
| TW (1) | TWI675247B (en) |
| WO (1) | WO2018211637A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116266026A (en) * | 2022-06-15 | 2023-06-20 | 深圳市通甪吉祥科技有限合伙企业(有限合伙) | Laser processing device and laser ablation equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115210973B (en) * | 2020-03-10 | 2023-08-01 | 三菱电机株式会社 | Wavelength conversion laser device and wavelength conversion laser processing machine |
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- 2017-05-17 WO PCT/JP2017/018569 patent/WO2018211637A1/en active Application Filing
- 2017-05-17 CN CN201780075736.7A patent/CN110050229B/en active Active
- 2017-05-17 KR KR1020197016176A patent/KR102033657B1/en active IP Right Grant
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| JP2007072134A (en) * | 2005-09-06 | 2007-03-22 | Mitsubishi Electric Corp | Wavelength conversion laser device |
| CN204086767U (en) * | 2011-05-31 | 2015-01-07 | 三菱电机株式会社 | Higher hamonic wave laser oscillator |
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| Publication number | Publication date |
|---|---|
| TW201907216A (en) | 2019-02-16 |
| JPWO2018211637A1 (en) | 2019-06-27 |
| CN110050229B (en) | 2020-06-09 |
| KR20190068635A (en) | 2019-06-18 |
| KR102033657B1 (en) | 2019-10-18 |
| JP6272597B1 (en) | 2018-01-31 |
| TWI675247B (en) | 2019-10-21 |
| WO2018211637A1 (en) | 2018-11-22 |
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