CN110043485A - A kind of turbo-molecular pump rotor and its diffusion welding method - Google Patents
A kind of turbo-molecular pump rotor and its diffusion welding method Download PDFInfo
- Publication number
- CN110043485A CN110043485A CN201910408773.6A CN201910408773A CN110043485A CN 110043485 A CN110043485 A CN 110043485A CN 201910408773 A CN201910408773 A CN 201910408773A CN 110043485 A CN110043485 A CN 110043485A
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- Prior art keywords
- rotor
- wing plate
- turbo
- molecular pump
- stage portion
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- 238000003466 welding Methods 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000009792 diffusion process Methods 0.000 title claims abstract description 16
- 239000000463 material Substances 0.000 claims description 14
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 239000007769 metal material Substances 0.000 claims description 6
- 239000002356 single layer Substances 0.000 claims description 6
- 238000005476 soldering Methods 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 238000004321 preservation Methods 0.000 claims description 3
- 230000013011 mating Effects 0.000 claims description 2
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 239000012530 fluid Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 13
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000007781 pre-processing Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910000883 Ti6Al4V Inorganic materials 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
- B23K20/026—Thermo-compression bonding with diffusion of soldering material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/12—Light metals
- F05D2300/121—Aluminium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/13—Refractory metals, i.e. Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W
- F05D2300/133—Titanium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/174—Titanium alloys, e.g. TiAl
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The invention discloses a kind of turbo-molecular pump rotor and its diffusion welding methods, are related to gaseous fluid field.The turbo-molecular pump rotor includes the rotor body that multiple groups stack setting, and every group rotor ontology includes two rotor rings and a wing plate of coaxial arrangement, and wing plate is set between two rotor rings；Rotor ring has stage portion and notch portion, one end of wing plate with the side wall of stage portion for abutting, the other end extends to the direction far from stage portion, and when wing plate is located between two rotor rings, the notch portion of the rotor ring of top is used to be sheathed on the stage portion of the rotor ring of lower section.By the stage portion that the notch portion of top rotor ring is sheathed on to lower section rotor ring, and wing plate is located between two rotor rings, so that the turbo-molecular pump rotor is when carrying out weld job, it is assisted without using any frock clamp, it can guarantee good center precision, to can guarantee that postwelding turbo-molecular pump rotor has high dimensional accuracy.
Description
Technical field
The present invention relates to gaseous fluid fields, in particular to a kind of turbo-molecular pump rotor and its Diffusion Welding side
Method.
Background technique
Since the rotor of the turbomolecular pump evacuated for ultrahigh vacuum for nuclear fusion device etc. is high speed rotation
Body rotates tens of thousands of turns per minute, to keep the spin balancing of entire rotor, it is necessary to assure the precision of entire rotor center axis
Well.
The manufacturing process of conventional turbine molecular pump are as follows: firstly, the multiple rotor rings 2 and wing plate 1 of preprocessing, then sequentially
Stack and integrated, finally using welding method by its it is high-strength be connected as overall structure, Fig. 1 shows diffusion welding (DW) in the prior art
Assembly longitudinal section view before welding.But the technical problem solved is needed to have: 1) after the 1 precision machining of rotor ring 2 and wing plate, also
It needs to use with the outer diameter of rotor internal diameter alignment high-precision processing assembling fixture 3 to be otherwise difficult to ensure to guarantee concentricity
Rotor obtains enough center precision.2) since there are coefficient of thermal expansion differences between titanium alloy rotor pedestal and steel assembling fixture
Different, when the temperature increases, fixture generates the thermal stress expanded outward, causes weld interface to be easy the presence of non-soldering defect, connection
Limited strength, and it is difficult to ensure the dimensional accuracy of rotor.
Summary of the invention
The purpose of the present invention is to provide a kind of turbo-molecular pump rotor, which is installing and is welding
It can guarantee good center precision without introducing any frock clamp i.e. when operation, to can guarantee turbomolecular pump rotor
Postwelding dimensional accuracy.
Another object of the present invention is to provide a kind of diffusion welding methods of turbo-molecular pump rotor, and this method is to upper
The turbo-molecular pump rotor stated is diffused weld job, can guarantee good center precision without using frock clamp, from
And it can guarantee the dimensional accuracy of turbo-molecular pump rotor itself.
The embodiment of the present invention is achieved in that
A kind of turbo-molecular pump rotor, comprising:
Multiple groups stack the rotor body of setting, and every group rotor ontology includes two rotor rings and a wing of coaxial arrangement
Plate, and wing plate is set between two rotor rings；
Rotor ring has stage portion and notch portion, and one end of wing plate with the side wall of stage portion for abutting, and the other end is to remote
Direction from stage portion extends, and when one end of wing plate is abutted with the side wall of stage portion, the notch portion of the rotor ring of top can
It is sheathed in the stage portion of the rotor ring of lower section.
Further, in the preferred embodiment, wing plate has blade part and leaf dish portion, and leaf dish portion is arranged
Between two rotor rings, and the end in leaf dish portion is abutted with the side wall of stage portion, and blade part prolongs towards the direction far from rotor ring
It stretches.
Further, in the preferred embodiment, the height of stage portion is greater than the thickness in leaf dish portion.
Further, in the preferred embodiment, the height of stage portion is equal to depth and the leaf dish portion of notch portion
The sum of thickness.
Further, in the preferred embodiment, the height of stage portion and the depth of notch portion be 1~
50mm；
Rotor ring and wing plate with a thickness of 1~100mm.
Further, in the preferred embodiment, the material of rotor ring and wing plate is aluminum metallic material, aluminium conjunction
Any one of golden material, titanium metal material and titanium alloy material.
Further, in the preferred embodiment, when the material of rotor ring is titanium or titanium alloy material, turn
The thickness in monolayer of subring be 1~100mm, when the material of wing plate be titanium or titanium alloy material when, wing plate thickness in monolayer be 1~
50mm。
Further, in the preferred embodiment, stage portion includes in the multiple of multiple array settings annular in shape
Protrusion, wing plate are equipped with close to the one end in leaf dish portion for the through slot with multiple most male cooperations；
When rotor ring and wing plate are stacked, protrusion is mating with through slot.
A kind of diffusion welding method of turbo-molecular pump rotor, comprising:
Wing plate is set between two rotor rings, and makes the notch portion of the rotor ring of top that can be sheathed on lower section
Rotor body is obtained after in the stage portion of rotor ring；
It stacks and obtains assembly after multiple rotor bodies are set；
Assembly is diffused weld job.
Further, in the preferred embodiment, assembly weld job is diffused to specifically include:
Assembly is fitted into diffusion in vacuum soldering equipment, in 1e-3~1e-4Under the vacuum degree of Pa, it is heated, is added
Pressure, welding temperature are 950 ± 10 DEG C, and welding pressure is 3~5MPa, and heat preservation, dwell time are 2~3h.
The embodiment of the present invention at least have following advantages or the utility model has the advantages that
The embodiment provides a kind of turbo-molecular pump rotors comprising and multiple groups stack the rotor body of setting,
Every group rotor ontology includes two rotor rings and a wing plate of coaxial arrangement, and wing plate is set between two rotor rings；Turn
Subring has stage portion and notch portion, and one end of wing plate with the side wall of stage portion for abutting, and the other end is to separate stage portion
Direction extends, and when wing plate is located between two rotor rings, the notch portion of the rotor ring of top is used to be sheathed on lower section
In the stage portion of rotor ring.By the way that the notch portion of top rotor ring to be sheathed on to the stage portion of lower section rotor ring, and make wing plate
Between two rotor rings, so that the turbo-molecular pump rotor is when carrying out weld job, without using any frock clamp
It is assisted, that is, can guarantee good center precision, to can guarantee the dimensional accuracy of turbomolecular pump rotor itself.
The diffusion welding method for the turbo-molecular pump rotor that the embodiment of the present invention provides, this method is to above-mentioned turbine
Molecular pump rotor is diffused weld job, can guarantee good center precision without using frock clamp, to can guarantee
The postwelding dimensional accuracy of turbo-molecular pump rotor.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment
Attached drawing is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not to be seen as
It is the restriction to range, it for those of ordinary skill in the art, without creative efforts, can be with
Other relevant attached drawings are obtained according to these attached drawings.
Fig. 1 is the structural schematic diagram for the turbo-molecular pump rotor that the prior art provides；
Fig. 2 is the structural schematic diagram for the turbomolecular pump that the embodiment of the present invention provides；
Fig. 3 is the planar structure schematic diagram for the first rotor ring that the embodiment of the present invention provides；
Fig. 4 is the diagrammatic cross-section at the A-A of Fig. 3；
Fig. 5 is the planar structure schematic diagram for the first wing plate that the embodiment of the present invention provides；
Fig. 6 is the diagrammatic cross-section at the B-B of Fig. 5；
Fig. 7 is the planar structure schematic diagram for second of rotor ring that the embodiment of the present invention provides；
Fig. 8 is the diagrammatic cross-section at the C-C of Fig. 7；
Fig. 9 is the planar structure schematic diagram for second of wing plate that the embodiment of the present invention provides.
Icon: 1- wing plate；2- rotor ring；3- assembling fixture；100- turbo-molecular pump rotor；101- rotor ring；The 103- wing
Plate；105- stage portion；107- notch portion；109- leaf dish portion；111- blade part；113- groove；115- protrusion；116- through slot.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.Therefore, of the invention to what is provided in the accompanying drawings below
The detailed description of embodiment is not intended to limit the range of claimed invention, but is merely representative of of the invention select
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art institute without creative efforts
The every other embodiment obtained, shall fall within the protection scope of the present invention.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain item exists
It is defined in one attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the embodiment of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right",
The orientation or positional relationship of the instructions such as "vertical", "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings,
Either the invention product using when the orientation or positional relationship usually put, be merely for convenience of the description present invention and simplify
Description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific orientation construct and
Operation, therefore be not considered as limiting the invention.In addition, term " first ", " second ", " third " etc. are only used for distinguishing
Description, is not understood to indicate or imply relative importance.
In the description of the embodiment of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term
" setting ", " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, be also possible to detachably connect
It connects, or is integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, centre can also be passed through
Medium is indirectly connected, and can be the connection inside two elements.It for the ordinary skill in the art, can be specific
Situation understands the concrete meaning of above-mentioned term in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature can be on or below second feature
It is directly contacted including the first and second features, also may include that the first and second features are not direct contacts but pass through them
Between other characterisation contact.Moreover, fisrt feature is on second feature, top and above include fisrt feature the
Right above two features and oblique upper, or first feature horizontal height is merely representative of higher than second feature.Fisrt feature is second
Under feature, lower section and fisrt feature included below be directly below and diagonally below the second feature, or be merely representative of fisrt feature water
Flat height is less than second feature.
Fig. 1 is the structural schematic diagram for the turbo-molecular pump rotor that the prior art provides.Referring to Fig. 1, making in the prior art
Make the process of turbo-molecular pump rotor are as follows: the multiple rotor rings 2 and wing plate 1 of preprocessing, then sequence is stacked and integrated, finally
Using welding method by its it is high-strength be connected as overall structure, the process manufactured in this way can have the following problems, 1) 2 He of rotor ring
After the accurate machining of wing plate 1, it is also necessary to use with the outer diameter of rotor internal diameter alignment high-precision processing assembling fixture 3 to protect
Concentricity is demonstrate,proved, is otherwise difficult to ensure that rotor obtains enough center precision.2) due to titanium alloy rotor pedestal and steel assembling fixture
There are thermal expansion coefficient differences between 3, and when the temperature increases, fixture generates the thermal stress expanded outward, and weld interface is caused to hold
Easily there is non-soldering defect, bonding strength is limited, and is difficult to ensure the dimensional accuracy of rotor.
Fig. 2 is the structural schematic diagram of turbomolecular pump provided in this embodiment.Referring to Fig. 2, in order to solve the prior art
The problem of, the turbo-molecular pump rotor 100 after present embodiments providing a kind of structural improvement.It includes that multiple groups stack setting
Rotor body, every group rotor ontology include two rotor rings 101 and a wing plate 103 of coaxial arrangement.
Fig. 3 is the planar structure schematic diagram of the first rotor ring 101 provided in this embodiment；Fig. 4 is at the A-A of Fig. 3
Diagrammatic cross-section；Fig. 5 is the planar structure schematic diagram of the first wing plate 103 provided in this embodiment；Fig. 6 is at the B-B of Fig. 5
Diagrammatic cross-section.Fig. 1 to Fig. 6 is please referred to, in detail, in each rotor body, wing plate 103 is set to two rotor rings
Between 101.Rotor ring 101 has stage portion 105 and notch portion 107, and one end of wing plate 103 is for the side wall with stage portion 105
It abuts, the other end extends to the direction far from stage portion 105, and when wing plate 103 is located between two rotor rings 101, top
Rotor ring 101 notch portion 107 be used for be sheathed on lower section rotor ring 101 stage portion 105.By by top rotor
The notch portion 107 of ring 101 is sheathed on the stage portion 105 of lower section rotor ring 101, and wing plate 103 is made to be located at two rotor rings
Between 101, so that the turbo-molecular pump rotor 100 when carrying out weld job, carries out auxiliary without using any frock clamp
It helps, that is, can guarantee good center precision, to can guarantee the dimensional accuracy of turbomolecular pump rotor 100 itself.
Referring to Fig. 1 to Fig. 6, in the present embodiment, wing plate 103 has blade part 111 and leaf dish portion 109, and leaf
Pan portion 109 is set between two rotor rings 101, and the end of blade part 111 is abutted with the side wall of stage portion 105, leaf dish portion
109 extend towards the direction far from rotor ring 101.It should be noted that blade part 111 can be set to complete annular shape,
When wing plate 103 is set between two rotor rings 101 up and down, the available steadily extruding force in the leaf dish portion 109 of wing plate 103,
Consequently facilitating carrying out subsequent weld job.
Fig. 7 is the planar structure schematic diagram for second of rotor ring 101 that the embodiment of the present invention provides；Fig. 8 is Fig. 3's
Diagrammatic cross-section at C-C；Fig. 9 is the planar structure schematic diagram for second of wing plate 103 that the embodiment of the present invention provides.?
In the other embodiment of the present invention, in order to further improve center precision, stage portion 105 is arranged including multiple annular arrays
Protrusion 115, notch portion 107 include multiple annular arrays setting groove 113；The one end of wing plate 103 close to leaf dish portion 109
It is equipped with the through slot 116 for matching with multiple raised 115.By the protrusion 115 and through slot 116 of ring-type setting, so that turning
When subring 101 and wing plate 103 cooperate, the center precision of the two is improved, to effectively guarantee the center of entire assembly
Precision.
Fig. 1 to Fig. 9 is please referred to, in the present embodiment, in order to guarantee in installation diagram assembling process, the rotor ring 101 of top
Notch portion 107 be sheathed on lower section rotor ring 101 stage portion 105 on, in this embodiment, the height of stage portion 105 is greater than
The thickness in leaf dish portion 109.
Preferably, the tight fit in order to guarantee each layer rotor ring 101 and wing plate 103, the height of stage portion 105
Equal to the depth of notch portion 107 and the sum of the thickness in leaf dish portion 109.The stage portion 105 of rotor ring 101 is interior with leaf dish portion 109
Diameter is processed as fit dimension, and meets 105 height H1 > leaf dish portion of stage portion, 109 thickness D, while by the recessed of rotor ring 101
The stage portion 105 and leaf dish portion 109 of oral area 107 and rotor ring 101 are processed as fit dimension.Form through the above structure, turbine
Molecular pump rotor 100 does not introduce any frock clamp i.e. during diffusion welding (DW) and can guarantee good center precision.Also,
In specific parameter selection, the height of stage portion 105 and the height of notch portion 107 are 1~50mm；Rotor ring 101 and the wing
Plate 103 with a thickness of 1~100mm.Certainly, in other embodiments of the invention, the height of stage portion 105 and notch portion 107
And the thickness of rotor ring 101 and wing plate 103 can be selected according to demand, implementation of the invention is without limitation.
As a preferred option, in the present embodiment, the material of rotor ring 101 and wing plate 103 is aluminum metallic material, aluminium
Any one of alloy material, titanium metal material and titanium alloy material.And when the material of rotor ring 101 is titanium or titanium alloy
When material, the thickness in monolayer of rotor ring 101 is 1~100mm, when the material of wing plate 103 is titanium or titanium alloy material, wing plate
103 thickness in monolayer are 1~50mm.In other embodiments of the invention, according to different materials it is also an option that different thickness
Degree, the embodiment of the present invention is without limitation.
The embodiments of the present invention also provide a kind of diffusion welding methods of turbo-molecular pump rotor 100, comprising: by wing plate
103 are set between two rotor rings 101, and make the notch portion 107 of the rotor ring 101 of top that can be sheathed on turning for lower section
Rotor body is obtained after in the stage portion 105 of subring 101；It stacks and obtains assembly after multiple rotor bodies are set；By assembly
It is diffused weld job.
It as a preferred option, can also be before welding to rotor ring to be welded in order to guarantee the welding quality of assembly
101 and wing plate 103 welded before mechanically and chemically clear up, be then sequentially overlapped rotor ring 101 and wing plate 103 respectively again, assemble
It is structure as a whole.
Wherein, assembly is diffused weld job to specifically include: assembly is fitted into diffusion in vacuum soldering equipment,
In 1e-3~1e-4Under the vacuum degree of Pa, it is heated, is pressurizeed, welding temperature be 950 ± 10 DEG C, welding pressure be 3~
5MPa, heat preservation, dwell time are 2~3h.
Used welding parameter specific to the present embodiment institute is described in detail below:
In the present embodiment, rotor ring 101 and 103 material of wing plate are Ti6Al4V.Above-mentioned assembly is packed into vacuum to expand
It dissipates in soldering equipment, vacuum degree 1e-3Pa, 950 DEG C of welding temperature, and apply the axial welding pressure of 4MPa, subsequent heat-insulation pressure keeping
2h.Certainly, in other embodiments of the invention, the parameter of welding can also be selected according to demand, reality of the invention
Apply example without limitation.
In conclusion the turbo-molecular pump rotor 100 that the embodiment of the present invention provides comprising multiple groups stack setting
Rotor body, every group rotor ontology includes two rotor rings 101 and a wing plate 103 of coaxial arrangement, and wing plate 103 is arranged
Between two rotor rings 101；Rotor ring 101 has stage portion 105 and notch portion 107, and one end of wing plate 103 is used for and platform
The side wall in rank portion 105 abuts, and the other end extends to the direction far from stage portion 105, and when wing plate 103 is located at two rotor rings
When between 101, the notch portion 107 of the rotor ring 101 of top is used to be sheathed on the stage portion 105 of the rotor ring 101 of lower section.
By the way that the notch portion 107 of top rotor ring 101 to be sheathed on to the stage portion 105 of lower section rotor ring 101, and make wing plate 103
Between two rotor rings 101, so that the turbo-molecular pump rotor 100 is when carrying out weld job, without using any work
Clamps are assisted, that is, can guarantee good center precision, to can guarantee the postwelding size of turbomolecular pump rotor 100
Precision.
The diffusion welding method for the turbo-molecular pump rotor 100 that the embodiment of the present invention provides, this method is to above-mentioned whirlpool
Wheel molecular pump rotor 100 is diffused weld job, can guarantee good center precision without using frock clamp, thus
It can guarantee the postwelding dimensional accuracy of turbo-molecular pump rotor 100.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any
Modification, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of turbo-molecular pump rotor characterized by comprising
Multiple groups stack the rotor body of setting, and every group rotor ontology includes two rotor rings and a wing plate of coaxial arrangement, and
The wing plate is set between two rotor rings；
The rotor ring has stage portion and notch portion, and one end of the wing plate with the side wall of the stage portion for abutting, separately
One end extends to the direction far from the stage portion, and when one end of the wing plate is abutted with the side wall of the stage portion, on
The notch portion of the rotor ring of side is used to be sheathed on the stage portion of the rotor ring of lower section.
2. turbo-molecular pump rotor according to claim 1, it is characterised in that:
The wing plate has blade part and leaf dish portion, and the leaf dish portion is set between two rotor rings, and the leaf
The end of pan portion is abutted with the side wall of the stage portion, and the blade part extends towards the direction far from the rotor ring.
3. turbo-molecular pump rotor according to claim 2, it is characterised in that:
The height of the stage portion is greater than the thickness in the leaf dish portion.
4. turbo-molecular pump rotor according to claim 3, it is characterised in that:
The height of the stage portion is equal to the depth of the notch portion and the sum of the thickness in leaf dish portion.
5. turbo-molecular pump rotor according to any one of claim 1 to 4, it is characterised in that:
The depth of the height of the stage portion and the notch portion is 1~50mm；
The rotor ring and the wing plate with a thickness of 1~100mm.
6. turbo-molecular pump rotor according to claim 5, it is characterised in that:
The material of the rotor ring and the wing plate is aluminum metallic material, aluminum alloy materials, titanium metal material and titanium alloy material
Any one of material.
7. turbo-molecular pump rotor according to claim 6, it is characterised in that:
When the material of the rotor ring is titanium or titanium alloy material, the thickness in monolayer of the rotor ring is 1~100mm, works as institute
When the material for stating wing plate is titanium or titanium alloy material, the wing plate thickness in monolayer is 1~50mm.
8. turbo-molecular pump rotor according to any one of claim 2 to 4, it is characterised in that:
The stage portion includes in the protrusion of multiple array settings annular in shape, and an end ring of the wing plate close to the leaf dish portion is set
Have for the through slot with multiple male cooperations；
When the rotor ring and the wing plate are stacked, the protrusion is mating with the through slot.
9. a kind of diffusion welding method of the turbo-molecular pump rotor as described in any one of claims 1 to 8, which is characterized in that packet
It includes:
The wing plate is set between two rotor rings, and the notch portion of the rotor ring of top can be sheathed on
Rotor body is obtained after in the stage portion of the rotor ring of lower section；
It stacks and obtains assembly after multiple rotor bodies are set；
The assembly is diffused weld job.
10. the diffusion welding method of turbo-molecular pump rotor according to claim 9, which is characterized in that by the assembly
Weld job is diffused to specifically include:
Assembly is fitted into diffusion in vacuum soldering equipment, in 1e-3~1e-4Under the vacuum degree of Pa, it is heated, is pressurizeed, is welded
Jointing temp is 950 ± 10 DEG C, and welding pressure is 3~5MPa, and heat preservation, dwell time are 2~3h.
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| CN201910408773.6A CN110043485A (en) | 2019-05-16 | 2019-05-16 | A kind of turbo-molecular pump rotor and its diffusion welding method |
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| CN201910408773.6A CN110043485A (en) | 2019-05-16 | 2019-05-16 | A kind of turbo-molecular pump rotor and its diffusion welding method |
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| US6561755B1 (en) * | 1999-11-22 | 2003-05-13 | Pfeiffer Vacuum Gmbh | Turbomolecular pump |
| US20080148566A1 (en) * | 2005-02-10 | 2008-06-26 | Mtu Aero Engines Gmbh | Method And Apparatus For Producing And/Or Repairing An Integrally Bladed Rotor By Inductive Diffusion Welding |
| CN105697395A (en) * | 2014-12-15 | 2016-06-22 | 普发真空有限公司 | Rotor assembly for a vacuum pump and method for producing the same |
| CN106735780A (en) * | 2017-01-18 | 2017-05-31 | 上海电气核电设备有限公司 | The joint design and welding method of a kind of tube butt welding |
| CN107953020A (en) * | 2017-11-23 | 2018-04-24 | 中国航发航空科技股份有限公司 | A kind of fixture for being used for multistage blisk electron beam welding |
| CN209838714U (en) * | 2019-05-16 | 2019-12-24 | 江苏博联硕焊接技术有限公司 | Turbo molecular pump rotor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0683990U (en) * | 1993-05-06 | 1994-12-02 | セイコー精機株式会社 | Turbo molecular pump |
| US6561755B1 (en) * | 1999-11-22 | 2003-05-13 | Pfeiffer Vacuum Gmbh | Turbomolecular pump |
| US20080148566A1 (en) * | 2005-02-10 | 2008-06-26 | Mtu Aero Engines Gmbh | Method And Apparatus For Producing And/Or Repairing An Integrally Bladed Rotor By Inductive Diffusion Welding |
| CN105697395A (en) * | 2014-12-15 | 2016-06-22 | 普发真空有限公司 | Rotor assembly for a vacuum pump and method for producing the same |
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