CN110040766A - The gas-sensitive nano material and gas sensor of high moisture resistance - Google Patents
The gas-sensitive nano material and gas sensor of high moisture resistance Download PDFInfo
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- CN110040766A CN110040766A CN201910259579.6A CN201910259579A CN110040766A CN 110040766 A CN110040766 A CN 110040766A CN 201910259579 A CN201910259579 A CN 201910259579A CN 110040766 A CN110040766 A CN 110040766A
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G19/00—Compounds of tin
- C01G19/02—Oxides
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G9/00—Compounds of zinc
- C01G9/02—Oxides; Hydroxides
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
Abstract
A kind of gas-sensitive nano material of high moisture resistance, is prepared by following steps: (1) mixed stannic chloride pentahydrate with deionized water；(2) sodium hydroxide is added into stannic chloride pentahydrate and the mixture of deionized water, pH value is made to remain 10-11；(3) it is stirred at room temperature, generates precipitating；(4) precipitating of step (3) and Zinc oxide nanoparticle are codissolved in deionized water and are stirred and form solution；(5) solution of step (4) is placed in autoclave and heats 12h at 200 DEG C；(6) it is centrifuged taking precipitate after the solution after heating in step (5) cooling, is centrifuged repeatedly cleaning precipitating with deionized water and dehydrated alcohol；(7) precipitating is dried at 80 DEG C, obtains the gas-sensitive nano material of Zinc oxide doped tin oxide.The present invention also provides the gas sensors containing the high moisture resistance gas-sensitive nano material, and it is suitable for detecting SF6Failure decomposes gas CO, has high moisture resistance and high sensitivity.
Description
Technical field
The invention belongs to gas sensor technical fields, and in particular to the gas-sensitive nano material of high moisture resistance and including should
The gas sensor of high moisture resistance gas sensitive.
Background technique
Sensor being capable of SF in real-time measurement GIS6Failure decomposed gas component is the core key of on-line monitoring equipment,
It directly affects SF6Failure is decomposed gas analysis and is set with the accuracy of on-line monitoring system result, the stability of equipment and the whole series
Standby service life.Gas sensor refer to when in its surrounding working environment there are when certain density sensitive gas, gas with
Certain chemical reaction, which occurs, for material contact surface causes its resistance to change, thus the device of output signal.
SnO2It is typical broad-band gap n-type semiconductor, there is unique physics and chemical characteristic, and belongs to surface control
Molding material can improve surface gas adsorbance by changing the appearance structure of material.SnO2Material in transformer oil to dissolving
H2、CO、CO2、CH4、C2H4、C2H2、C2H6Seven kinds of fault characteristic gases are sensitive, are currently prepare gas sensor important
Material.But SnO2Sensor is there are poor selectivity, sensitivity is not high, easy poisoning, the service life is short, lacks vulnerable to extraneous factor interference etc.
Point seriously constrains using and developing for it.
In addition, the sensor in work needs to be chronically exposed in working environment, the humidity of environment can largely effect on sensing
The performance of device.Normal environment air humidity is generally 40%~70%, this, which is equivalent in air, contains 11440 μ L/L-20019 μ
The vapor of L/L concentration, water vapour molecule are adsorbed on gas sensitive surface, form competitive relation with object gas to be detected, sternly
Ghost image rings being normally carried out for gas-sensitive reaction, even results in sensor signal wrong report.
Therefore, it is highly desirable to develop a kind of gas sensitive of high moisture resistance, be used to prepare with high anti humility performance and height
The gas sensor of sensitivity.
Summary of the invention
The purpose of the present invention is to provide a kind of gas sensitive of high moisture resistance and including the high moisture resistance gas sensitive
Gas sensor, which can be used for carrying out SF6Failure decomposes the in situ detection of gas, can directly detect CO and a variety of SF6
Failure decomposes gas, has many advantages, such as that accuracy is high, easy to operate, at low cost.
On the one hand, the present invention provides a kind of high moisture resistance gas sensitive, which is the nanometer of Zinc oxide doped tin oxide
Gas sensitive, is prepared by following steps: (1) being mixed stannic chloride pentahydrate with deionized water；(2) tetra- chlorination of Xiang Wushui
Sodium hydroxide is added in tin and the mixture of deionized water, pH value is made to remain 10-11；(3) it is stirred at room temperature, so that
Generate precipitating；(4) precipitating that step (3) obtains is codissolved in deionized water with Zinc oxide nanoparticle and stir formed it is molten
Liquid；(5) solution of step (4) is placed in autoclave and heats 12h at 200 DEG C；(6) by the solution after heating in step (5)
It is centrifuged taking precipitate after cooling, is centrifuged repeatedly cleaning sediment with deionized water and dehydrated alcohol；(7) it is dried at 80 DEG C
Sediment obtains the gas-sensitive nano material of the Zinc oxide doped tin oxide.
Preferably, tin zinc atom ratio is 1:1 in the gas-sensitive nano material of the Zinc oxide doped tin oxide.
Preferably, in above-mentioned steps (1), in the ratio of every 2mmol stannic chloride pentahydrate and the mixing of 30ml deionized water
Stannic chloride pentahydrate is mixed with deionized water.
Preferably, in above-mentioned steps (5), temperature is linearly increasing with 2 DEG C in heating process.
Preferably, the Zinc oxide nanoparticle through the following steps that preparation: (I) sets zinc chloride and deionized water
In beaker；(II) sodium hydroxide that mole is twice of zinc chloride mole, magnetic agitation 30min is added；(III) at room temperature
Ultrasonic 20min；(IV) above-mentioned solution is poured into and heats 16h in autoclave at 180 DEG C, temperature is linear with 2 DEG C in heating process
Increase；(V) it is transferred in centrifuge tube, is centrifuged with deionized water and dehydrated alcohol clear after the product in step (IV) cooling
It washes；(VI) sediment is dried at 80 DEG C, obtain the Zinc oxide nanoparticle.
Preferably, in above-mentioned steps (I), the ratio that mixes in every 1mmol zinc chloride and 50ml deionized water is by chlorination
Zinc and deionized water are placed in a beaker.
Preferably, in above-mentioned steps (II), the speed control of magnetic agitation is 300rpm.
On the other hand, the present invention also provides a kind of gas sensor, the gas sensor includes ceramic insulating layer, signal
Electrode layer and the gas sensitive layer being made of aforementioned high moisture resistance gas-sensitive nano material, wherein signal electrode layer setting exists
On the ceramic insulating layer.
Preferably, the signal electrode layer is silver-palladium signal electrode of interdigitated.
Preferably, the gas sensor is the sensor crossed through aging process.
Provided gas sensor of the invention can realize SF6Failure decomposes gas in situ detection, and accuracy is high, operation
Simply, at low cost and can directly detect CO and a variety of SF6Failure decomposes gas.
Moreover, including the gas-sensitive nano material of high moisture resistance in gas sensor provided by the present invention, help to solve
Metal Oxide Semiconductor Gas Sensing sensor sensitivity is low and vulnerable in air the problem of aqueous vapor molecules influence in transformer oil.Especially
It is that gas sensor of the invention has high anti humility performance and high sensitivity when dissolving CO gas in oil for detecting,
In to the high sensitivity of 100ppm CO up to 12.045, Monitoring lower-cut can reach 1-2ppm, at the same also have respond faster it is extensive
It is multiple.In addition, such gas sensor has good selectivity and repeatability, detected in Gases Dissolved in Transformer Oil CO
And transformer equipment online evaluation field has broad application prospects.
Detailed description of the invention
Fig. 1 is the preparation flow figure of high moisture resistance gas-sensitive nano material.
Fig. 2 a and Fig. 2 b are the figures for showing the exemplary structure of gas sensor of the invention, and wherein Fig. 2 a is to show air-sensitive
The schematic, exploded of material layer, signal electrode layer and ceramic insulating layer, Fig. 2 b are to show the gas sensor made
The figure of structure.
Fig. 3 be pure zirconia tin is shown as gas sensitive sensor under different humidity to the curve of the sensitivity of CO.
Fig. 4 be palladium doped stannum oxide is shown as gas sensitive sensor under different humidity to the song of the sensitivity of CO
Line.
Fig. 5 be Zinc oxide doped tin oxide nanoparticles are shown as gas sensitive sensor under different humidity to CO
Sensitivity curve.
Fig. 6 is that CO is adsorbed on SnO2(110) density of states figure behind face, wherein curve (b) corresponds to pure SnO2, curve (c)
Corresponding to palladium doped stannum oxide, curve (d) corresponds to the nano particle of Zinc oxide doped tin oxide.
Specific embodiment
A specific embodiment of the invention is described in detail below with reference to attached drawing.
High moisture resistance gas-sensitive nano material of the invention is the Zinc oxide doped oxidation sijna prepared by two one-step hydrothermals
Rice grain material, wherein the ratio of zinc and tin atom is 1:1.In preparation process, pre-reaction material zinc oxide nano powder is prepared
When hydrothermal temperature be lower than hydrothermal temperature when preparing Zinc oxide doped tin oxide nanoparticles.
The preparation process of pre-reaction material Zinc oxide nanoparticle is as follows: (I) is by zinc chloride and deionized water in beaker
It is uniformly mixed；(II) sodium hydroxide that mole is twice of zinc chloride mole, magnetic agitation 30min is added；(III) at room temperature
Ultrasonic 20min；(IV) above-mentioned solution is poured into and heats 16h in autoclave at 180 DEG C, temperature is linear with 2 DEG C in heating process
Increase；(V) it is transferred in centrifuge tube, is centrifuged with deionized water and dehydrated alcohol clear after the product in step (IV) cooling
It washes；(VI) sediment is dried at 80 DEG C, obtain the Zinc oxide nanoparticle.
The preparation process of the gas-sensitive nano material of above-mentioned Zinc oxide doped tin oxide is as follows: (1) by stannic chloride pentahydrate with
Deionized water mixing；(2) sodium hydroxide is added into stannic chloride pentahydrate and the mixture of deionized water, remains pH value
10-11；(3) it is stirred at room temperature, generates precipitating；(4) precipitating for obtaining step (3) and Zinc oxide nanoparticle are molten altogether
In deionized water and stirring forms solution；(5) solution of step (4) is placed in autoclave and heats 12h at 200 DEG C；(6)
It is centrifuged taking precipitate after solution after heating in step (5) is cooled, is centrifuged repeatedly clearly with deionized water and dehydrated alcohol
Wash sediment；(7) sediment is dried at 80 DEG C, obtains Zinc oxide doped tin oxide nanoparticles.
Gas sensor provided by the present invention includes ceramic insulating layer, signal electrode layer and by aforementioned high moisture resistance
The gas sensitive layer that gas-sensitive nano material is constituted, wherein signal electrode layer is arranged on ceramic insulating layer.Signal electrode layer is preferred
It is to be made of the silver of interdigitated-palladium signal electrode.
In order to help to further understand technical solution of the present invention, several embodiments presented below.
Embodiment 1: Zinc oxide nanoparticle is prepared
Zinc oxide nanoparticle as pre-reaction material is prepared by following steps:
(1) by 0.136g zinc chloride (ZnCl2) and 50ml deionized water mixed in beaker；
(2) sodium hydroxide 0.08g, the magnetic agitation 30min under 300rpm revolving speed is added；
(3) at room temperature, 20min is ultrasonically treated under the supersonic frequency of 20kHz ± 1kHz；
(4) above-mentioned solution is poured into 50ml autoclave and heats 16h at 180 DEG C；
(5) reaction product is transferred in centrifuge tube after cooling, centrifuging and taking is heavy under the revolving speed of 6000-7000rpm
Starch is centrifuged repeatedly cleaning sediment with deionized water and dehydrated alcohol；
(6) sediment is dried at 80 DEG C, obtains Zinc oxide nanoparticle.
Embodiment 2: the gas-sensitive nano material of high moisture resistance is prepared --- ZnO-SnO2Nanometer powder
The gas-sensitive nano material of high moisture resistance is prepared by following steps:
(1) by 0.7012g stannic chloride pentahydrate (SnCl4·5H2O it) is mixed in beaker with 30ml deionized water；
(2) sodium hydroxide is added makes pH value remain 10-11；
(3) with magnetic stirring apparatus room temperature, 300rpm revolving speed under stir 0.5h；
(4) precipitating of formation and 0.1620g Zinc oxide nanoparticle are codissolved in deionized water, and stir formed it is molten
Liquid；
(5) above-mentioned solution is poured into the autoclave of 50ml, heats 12h at 200 DEG C；
(6) be transferred in centrifuge tube after the reactant of step (5) cooling, under the revolving speed of 6000-7000rpm from
Heart taking precipitate is centrifuged repeatedly cleaning sediment with deionized water and dehydrated alcohol；
(7) sediment is dried at 80 DEG C, obtains ZnO-SnO2Nanometer powder.
Comparative example 1: control material is prepared --- microspheroidal SnO2Powder
(1) by 0.7012g stannic chloride pentahydrate (SnCl4·5H2O it) is uniformly mixed in beaker with 30ml deionized water；
(2) sodium hydroxide is added makes pH value remain 10-11；
(3) with magnetic stirring apparatus room temperature, 300rpm revolving speed under stir 1h；
(4) above-mentioned solution is poured into 50ml autoclave, heats 14h at 180 DEG C；
(5) reactant of step (5) is cooled to room temperature, is centrifuged taking precipitate；
(6) deionized water and dehydrated alcohol are centrifuged repeatedly washing precipitate；
(7) dry sediment at 60 DEG C, obtains microspheroidal SnO2Powder.
Comparative example 2: control material is prepared --- Pd-SnO2Nanometer powder
(1) by 0.7012g stannic chloride pentahydrate (SnCl4·5H2O it) is uniformly mixed in beaker with 30ml deionized water；
(2) sodium hydroxide is added makes pH value remain 11；
(3) 0.5h is stirred under the revolving speed in room temperature, 300rpm with magnetic stirring apparatus；
(4) suspension that collection step (3) is formed, centrifuging and taking precipitating；
(5) precipitating of step (4) is codissolved in deionized water and is stirred with 0.2128g simple substance palladium；
(6) 20min is ultrasonically treated under the supersonic frequency of 20kHz ± 1kHz；
(7) mixture of step (6) is moved to 50ml to hold in autoclave, heats 12h at 180 DEG C.
(8) will step (7) reactant it is cooling after be transferred in centrifuge tube, centrifuging and taking precipitating, with deionized water and anhydrous
Ethyl alcohol is centrifuged repeatedly cleaning precipitating；
(9) in 60 DEG C of dry sediments, Pd-SnO is obtained2Nanometer powder.
Embodiment 3: gas sensor is prepared
The present embodiment describes the production of gas sensor by taking plane gas sensor as an example, plane gas sensor
Structure includes gas sensitive layer, signal electrode layer and plane ceramic insulating layer, as shown in Figure 2 a and 2 b.Wherein, to implement
Nanometer powder prepared by example 2 has made the exemplary gas sensor of the application as gas sensitive layer, with comparative example 1 and right
Nanometer powder prepared by ratio 2 has made two kinds of control sensors as gas sensitive layer.Signal electrode layer is by interdigitated
Silver-palladium signal electrode constitute, be to be made using screen printing technique.
The detailed process for making plane gas sensor is as follows:
(1) ceramic insulating layer for being provided with signal electrode layer shown in Fig. 2 a and Fig. 2 b is put into first and fills appropriate trichlorine
In the beaker of vinyl solution, then beaker is placed in ultrasonator, oscillation 30min is kept, then takes out, use dehydrated alcohol
Replace cleaning respectively with deionized water to dry in the shade afterwards twice；
(2) it takes suitable nanometer powder as gas sensitive to be put into agate to be ground, sufficiently rear addition to be ground
Suitable deionized water and dehydrated alcohol are modulated into uniformly mixed pasty slurry；
(3) the gas sensitive slurry mixed up is evenly coated at the ceramic insulation provided with signal electrode layer with coating pen
On layer, so that at least part of signal electrode layer and ceramic insulating layer is coated with gas sensitive layer, gas sensitive slurry coating
Sensor is put into baking oven after the completion and carries out low temperature drying, is taken out after cooling, that is, completes the production of plane gas sensor,
The plane gas sensor configuration schematic diagram made is as shown in Figure 2 b；
(4) carry out aging process finally to promote the stability and repeatability of sensor, can by 200 DEG C to biography
Sensor heating carries out aging process over 3 days.
Above-mentioned gas sensor as CO gas sensor, its working principle is that: free state CO absorption SnO2(110) table
Its density of states figure is mobile toward conduction band direction is deviateed on the whole behind face, i.e., mobile to low energy end, and each characteristic peak has reduction.Such as figure
Shown in 6, Pd/SnO2(110) face Adsorption Model is negative moves at most, can illustrate CO molecule and SnO2(110) fierceness is generated when face is adsorbed
Interaction, there is significant electric charge transfer.When CO is adsorbed on SnO2Behind sill (110) face, density of states figure goes out at low energy end
Different degrees of widthization phenomenon is showed, this is beneficial to the progress of CO gas molecule adsorption reaction.
Three kinds of sensors of above-mentioned preparation have been carried out with the gas-sensitive property test of material.
Fig. 3 show pure zirconia tin as gas sensitive sensor under different humidity to the curve of the sensitivity of CO.
As shown in figure 3, in 400 μ L/L, sensor using pure zirconia tin as gas sensitive to the Sensitirity va1ue of CO from low humidity to
High humility is followed successively by 4.12,3.8,3.2,2.351,2.084.Since humidity be 10% start it is every promotion 20% humidity sensitive value according to
It is secondary to reduce by 0.32,0.6,0.849,0.267.Within the scope of the gas concentration of 1 μ L/L-100 μ L/L, sensor material Sensitirity va1ue
Increment 2.61,1.436,1.59,1.377,1.121 are followed successively by from low humidity to high humility, can be clearly seen wet 10%
Gas sensitive sensitivity amplification is maximum when spending.
Fig. 4 show palladium doped stannum oxide as gas sensitive sensor under different humidity to the song of the sensitivity of CO
Line.As shown, the sensor using palladium doped stannum oxide as gas sensitive is followed successively by the Sensitirity va1ue of CO from high to low
8.58,7.97,6.58,5.9,5.3, factor of merit successively reduces by 0.61,1.39,0.68,0.6, it can be seen that in addition to 50% humidity
And 10% poor 1.39 between humidity, other sensitivity number differences are all little, and the variation of all differences is no more than 1, can recognize
Five curves are linearly to reduce under high CO gas concentration, and the sensitivity in 30% humidity, high gas concentration is big
Sensitivity under other humidity.Within the scope of the gas concentration of 1 μ L/L-100 μ L/L, sensor gas sensitive Sensitirity va1ue
Increment is followed successively by 3.2,2.72,2.39,2.012,1.121, it can be seen that the sensitivity amplification of gas sensitive in 30% humidity
It is maximum.
Fig. 5 be Zinc oxide doped tin oxide is shown as gas sensitive sensor under different humidity to the sensitivity of CO
Curve.As shown, the Sensitirity va1ue of sensor using Zinc oxide doped stannic oxide nano material as gas sensitive to CO
It is followed successively by 12.045,9.63,9.06,8.54,6.98 from high to low, factor of merit successively reduces by 2.415,0.57,0.52,1.56,
Can visually see and be greater than other two value there are two value, illustrative graph this at two sensitivity difference be bigger
's.Within the scope of the gas concentration of 1 μ L/L-100 μ L/L, the increment of sensor sensitivity value is followed successively by 4.92,4.291,
3.802,3.347,2.488, it can be seen that the sensitivity amplification of gas sensitive is maximum when 50% humidity.
From the above it is found that Zinc oxide doped tin oxide nanoparticles material is to the sensitive of CO prepared by embodiment 2
Material prepared by much higher than two comparative examples of degree, and can guarantee in high humility, the inspection in 50ppm CO gaseous environment
Survey Sensitirity va1ue is 11-13.It can be seen that sensor can be improved in high moisture resistance gas-sensitive nano material provided by the present invention
Sensitivity and moisture-resistant degree ability.
While there has been shown and described that some exemplary embodiments of the invention, those skilled in the art should manage
It, can be right in the case where solution, the principle of the invention limited in without departing substantially from claim and their equivalent scheme and spirit
These exemplary embodiments make variation.Without departing from the scope and spirit of illustrated each embodiment, for this
Many modifications and changes are obvious for the those of ordinary skill of technical field.The selection of term used herein,
It is intended to best explain the principle of each embodiment, practical application or to the technological improvement in market, or makes the art
Other those of ordinary skill can understand each embodiment disclosed herein.
Claims (10)
1. a kind of gas-sensitive nano material of high moisture resistance, the high moisture resistance gas-sensitive nano material is Zinc oxide doped tin oxide
Gas-sensitive nano material is prepared by following steps:
(1) stannic chloride pentahydrate is mixed with deionized water；
(2) sodium hydroxide is added into stannic chloride pentahydrate and the mixture of deionized water, pH value is made to remain 10-11；
(3) it is stirred at room temperature, so that generating precipitating；
(4) precipitating and Zinc oxide nanoparticle that step (3) obtains are codissolved in deionized water and are stirred and form solution；
(5) solution of step (4) is placed in autoclave and heats 12h at 200 DEG C；
(6) it is centrifuged taking precipitate after the solution after heating in step (5) cooling, repeatedly with deionized water and dehydrated alcohol
Eccentric cleaning sediment；
(7) sediment is dried at 80 DEG C, obtains the gas-sensitive nano material of the Zinc oxide doped tin oxide.
2. high moisture resistance gas-sensitive nano material according to claim 1, which is characterized in that the Zinc oxide doped tin oxide
Gas-sensitive nano material in tin zinc atom ratio be 1:1.
3. high moisture resistance gas-sensitive nano material according to claim 1, it is characterised in that:
In step (1), the ratio that mixes in every 2mmol stannic chloride pentahydrate and 30ml deionized water by stannic chloride pentahydrate with
Deionized water is mixed.
4. high moisture resistance gas-sensitive nano material according to claim 1, which is characterized in that in step (5), heating process
Middle temperature is linearly increasing with 2 DEG C.
5. high moisture resistance gas-sensitive nano material according to claim 1, which is characterized in that the Zinc oxide nanoparticle is
It is prepared by following steps:
(I) zinc chloride and deionized water are placed in a beaker；
(II) sodium hydroxide that mole is twice of zinc chloride mole, magnetic agitation 30min is added；
(III) it is ultrasonically treated 20min at room temperature；
(IV) above-mentioned solution is poured into and heats 16h in autoclave at 180 DEG C, temperature is linearly increasing with 2 DEG C in heating process；
(V) it is transferred in centrifuge tube, is centrifuged with deionized water and dehydrated alcohol clear after the product in step (IV) cooling
It washes；
(VI) sediment is dried at 80 DEG C, obtain the Zinc oxide nanoparticle.
6. high moisture resistance gas-sensitive nano material according to claim 5, it is characterised in that:
In step (I), zinc chloride and deionized water are placed in the ratio that every 1mmol zinc chloride and 50ml deionized water mix
In beaker.
7. high moisture resistance gas-sensitive nano material according to claim 5, it is characterised in that: in step (II), magnetic force is stirred
The speed control mixed is 300rpm.
8. a kind of gas sensor, it is characterised in that:
The gas sensor includes ceramic insulating layer, signal electrode layer and by height according to any one of claims 1 to 5
The gas sensitive layer that moisture resistance gas-sensitive nano material is constituted, wherein the signal electrode layer is arranged on the ceramic insulating layer.
9. gas sensor according to claim 8, it is characterised in that: the signal electrode layer is silver-palladium of interdigitated
Signal electrode.
10. gas sensor according to claim 8, it is characterised in that: the gas sensor is through aging process mistake
Sensor.
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| CN110395761A (en) * | 2019-07-26 | 2019-11-01 | 北京化工大学 | A kind of surface Co-doped ZnO composite material and preparation method and application |
| CN110487847A (en) * | 2019-08-26 | 2019-11-22 | 济南大学 | A kind of ZnO/Sn3O4Gas sensitive and preparation method thereof and application in the sensor |
| CN111044582A (en) * | 2019-12-04 | 2020-04-21 | 中国工程物理研究院化工材料研究所 | Fluorocarbon film/metal oxide gas-sensitive film composite laminated device and preparation method thereof |
| CN112255278A (en) * | 2020-09-14 | 2021-01-22 | 重庆大学 | Based on Ti3C2Tx/WO3Room-temperature ammonia gas sensor made of composite nano material, and preparation method and application thereof |
| CN114428106A (en) * | 2021-12-09 | 2022-05-03 | 杭州电子科技大学 | Preparation method of CO gas sensor |
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