CN110036292A - Atomic Absorption SpectrophotometerICP and elemental analysis method - Google Patents
Atomic Absorption SpectrophotometerICP and elemental analysis method Download PDFInfo
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- CN110036292A CN110036292A CN201780074869.2A CN201780074869A CN110036292A CN 110036292 A CN110036292 A CN 110036292A CN 201780074869 A CN201780074869 A CN 201780074869A CN 110036292 A CN110036292 A CN 110036292A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/12—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using combustion
Abstract
In order to steadily be calibrated and be able to carry out than previous more acurrate and higher precision analysis, Atomic Absorption SpectrophotometerICP (100) carries out quantitative analysis to hydrogen contained by metal material, the Atomic Absorption SpectrophotometerICP (100) includes: heating mechanism, for heating in heating furnace (1) to the metal material being put into crucible (R)；Oxidator (31), the H that will be generated from the metal material being heated2Gas is oxidized to H2O gas；Non-dispersion infrared detector (32), detection aoxidize obtained H by oxidator (31)2O gas；And control device (5), heating mechanism is controlled, to defined H2In the calibration procedure that the calibration gas of concentration is measured, to before importing calibration gas in heating furnace (1), control device (5) controls heating mechanism come to being heated in heating furnace (1) and carry out the degassing in heating furnace (1).
Description
Technical field
The present invention relates to Atomic Absorption SpectrophotometerICPs and elemental analysis method.
Background technique
As shown in Patent Document 1, the Atomic Absorption SpectrophotometerICP analyzed as the hydrogen for being included to measurement sample has as follows
A kind of device: measurement sample is put into the graphite crucible for flowing through pulse current and generating Joule heat and adds the measurement sample
The element measured in sample is detected and is carried out as gas componant using non-dispersion infrared detector (NDIR) by thermal melting
Quantitative analysis.
In the case where being analyzed using the Atomic Absorption SpectrophotometerICP the hydrogen (H) in measurement sample, by measuring sample
Heating melt and using graphite crucible to hydrogen (H) carry out reduction decomposition and generate hydrogen (H2Gas), utilize the oxidation of rear class
Device is by hydrogen (H2) it is oxidized to water (H2O) and to H2O is detected.
In this way, by using non-dispersion infrared detector in the detection of hydrogen (H), using the non-dispersion infrared detector,
Other than hydrogen (H), additionally it is possible to be analyzed with an Atomic Absorption SpectrophotometerICP the multiple elements such as oxygen (O) and nitrogen (N).
But in previous Atomic Absorption SpectrophotometerICP, in order to reduce the aging generation because of non-dispersion infrared detector etc.
Evaluated error, it is equal before analysis procedure to carry out calibration procedure.Specifically, in the calibration procedure, it is unheated in heating furnace
Under state, flows into inactive gas in heating furnace and purified (purge) processing, hereafter, imported for example into heating furnace
Calibration gas known to hydrogen (H) concentration carries out device calibration.In addition, importing calibration gas under the unheated state of heating furnace
The reason of be that graphite crucible is avoided to react with hydrogen, due to this reason, it is previous there is no before the importing of calibration gas to heating
The idea that furnace is heated.
Existing technical literature
Patent document
Patent document 1: Japanese Patent Laid-Open Publication 2013-160594
Summary of the invention
The technical problem to be solved in the present invention
But although being calibrated to reduce evaluated error in the above described manner, previous element is being used
In the case where analytical equipment, if the measurement sample less to the content of hydrogen (H) is analyzed, result is analyzed there are deviation,
Evaluated error is big.As a result, in the case where less (such as counting ppm or less) the measurement sample of the content to hydrogen (H) is analyzed,
Perhaps the analysis precision of hydrogen is sacrificed or in other process by for analyzing the oligomict special analytical apparatus of hydrogen to hydrogen
It is analyzed.If using the oligomict analytical equipment of hydrogen in other process, analysis time is elongated, and it also requires flower
Expense buys the expense of the oligomict analytical equipment of hydrogen.
The present invention is main mesh of the invention obtained from the result attentively studied the reason of said determination error
Be by the hydrogen (H) in metal material as H2In the Atomic Absorption SpectrophotometerICP that O detected, school can be steadily carried out
Standard, and be able to carry out than previous more acurrate and higher precision analysis.
Solve the technical solution of technical problem
Hereinafter, being illustrated to the result attentively studied.
The present inventor has found for the first time: since above-mentioned Atomic Absorption SpectrophotometerICP is by hydrogen (H2) it is oxidized to water (H2O it) and is detected,
So causing calibration gas institute if making the moisture being mixed into atmosphere in heating furnace because of the either on or off of such as heating furnace
It include one of error, the reason of this is above-mentioned evaluated error in the detected value of hydrogen (H) concentration contained.Its result has distinguished that: such as
Fruit for example makes more than moisture or is lacked because of measurement period, determination of the environment, then is short of the stability of calibration, this can be in the content of hydrogen (H)
Analysis precision is caused to decline in the analysis of less measurement sample.
According to the above results, the present inventor has obtained the present invention.
That is, Atomic Absorption SpectrophotometerICP of the invention, carries out quantitative analysis, the elemental analysis to hydrogen contained by metal material
Device includes: heating mechanism, for heating in heating furnace to the metal material being put into crucible；Oxidator, will be from quilt
The H that warmed-up metal material generates2Gas is oxidized to H2O gas；Non-dispersion infrared detector, detection pass through the oxidator
Aoxidize obtained H2O gas；And control device, the heating mechanism is controlled, to defined H2The calibration gas of concentration
In the calibration procedure that body is measured, before importing the calibration gas into the heating furnace, the control device control
The heating mechanism in the heating furnace come to being heated and carry out the degassing in the heating furnace.
According to this Atomic Absorption SpectrophotometerICP, to adding in heating furnace when due to degassing in the heating furnace of calibration procedure
Heat, so in calibration when the concentration of hydrogen (H) contained by testing calibration gas heating can be adsorbed in as fully eliminating
The state of the moisture of the inner wall and crucible of furnace.Thereby, it is possible to steadily be calibrated, and then compared with the past it can be improved analysis
Precision.
As the specific embodiment of device, can enumerate following composition: the heating mechanism has described in clamping
Crucible simultaneously applies alive a pair of electrodes, carries out electrified regulation to the crucible.
In addition, in the case where carrying out calibration procedure after analysis procedure, in order to make point obtained by analysis procedure
Analysis result becomes the data that can confidently use, is utilized calibration factor obtained by calibration procedure etc. to passing through
The series of processes that the analysis result that analysis procedure obtains is modified.
In contrast, in order to shorten the time until starting analysis procedure to the data for obtaining confidently using,
Preferably, analysis procedure is carried out after the calibration procedure.
Thereby, it is possible to precompute calibration factor etc. by calibration procedure, point obtained by analysis procedure can be made
Analysis result becomes the data after being corrected using calibration factor etc., so as to shorten to obtain reliable data when
Between.
In addition, elemental analysis method of the invention, determines hydrogen contained by metal material using Atomic Absorption SpectrophotometerICP
Amount analysis, the Atomic Absorption SpectrophotometerICP includes: heating mechanism, for carrying out in heating furnace to the metal material being put into crucible
Heating；Oxidator, the H that will be generated from the metal material being heated2Gas is oxidized to H2O gas；And non-dispersion infrared detection
Device detects the H aoxidized by the oxidator2O gas, the elemental analysis method is to defined H2The calibration of concentration
In the calibration procedure that gas is measured, before importing the calibration gas into the heating furnace in the heating furnace into
Row heating.
According to this elemental analysis method, function and effect same as above-mentioned Atomic Absorption SpectrophotometerICP can be obtained.
As the specific analytical method for carrying out accurate and high-precision analysis, following method can be enumerated: being utilized
The detection intensity obtained by the calibration procedure is modified to detection intensity obtained from the metal material is analyzed.
If the hydrogen containing ratio of the metal material is less than 10ppm, above-mentioned elemental analysis dress can be played more significantly
Set the function and effect with elemental analysis method.
Invention effect
According to the present invention constituted in the above described manner, can steadily be calibrated, be able to carry out than previous more acurrate and
The analysis of higher precision.
Detailed description of the invention
Fig. 1 is the schematic diagram for indicating the structure of Atomic Absorption SpectrophotometerICP of one embodiment of the present invention.
Fig. 2 is the flow chart for indicating the analysis procedure of same embodiment.
Fig. 3 is the flow chart for indicating the calibration procedure of same embodiment.
Fig. 4 is the experimental result for indicating the effect of Atomic Absorption SpectrophotometerICP of same embodiment.
Description of symbols
100 ... Atomic Absorption SpectrophotometerICPs
1 ... heating furnace
2 ... dirt catchers
3 ... elemental analysis portions
31 ... oxidators
32 ... non-dispersion infrared detectors
41 ... gauge lines
4a ... valve
4b ... valve
5 ... control devices
R ... graphite crucible
L1 ... guiding in channel
L2 ... exports runner
L3 ... calibration gas runner
Specific embodiment
In the following, being illustrated referring to attached drawing to a kind of embodiment of Atomic Absorption SpectrophotometerICP of the invention.
<device composition>
The Atomic Absorption SpectrophotometerICP 100 of present embodiment at least to as measurement sample metal material contained by hydrogen into
Row analysis passes through by the graphite crucible R of a pair of electrodes clamping receiving measurement sample as heating mechanism in heating furnace 1
Directly apply voltage to crucible R, the measurement sample in crucible R and crucible R is heated, to resulting sample air
It carries out analysis and quantitative analysis is carried out to hydrogen contained by measurement sample.
In addition, as measurement sample, if be in metal material the extremely low hydrogen of needs assessment (H) concentration (such as count ppm
Degree) steel material, then can be suitble to the Atomic Absorption SpectrophotometerICP 100 using present embodiment.
Specifically, as shown in Figure 1, the Atomic Absorption SpectrophotometerICP 100 includes: guiding in channel L1, for by helium (He) or argon
(Ar) etc. inactive gas import the heating furnace 1 as carrier gas；And export runner L2, for being exported from the heating furnace 1
It is mixed with the mixed gas of the sample air and the carrier gas, at least provided with 2 He of dirt catcher on the export runner L2
The elemental analysis portion 3 that element contained by the mixed gas is analyzed.In addition, the Atomic Absorption SpectrophotometerICP of present embodiment
100 further include calibration gas runner L3, which is used to import (example known to hydrogen (H) concentration into heating furnace 1
Such as 1% degree) calibration gas.Here, being provided with the gauge line 41 of prescribed volume on calibration gas runner L3 and being set to it
Valve 4a, 4b of upstream and downstream connect guiding in channel L1 and calibration gas runner L3 by each valve 4a, 4b.Pass through opening as a result,
Each valve 4a, 4b, a part of carrier gas return again to guiding in channel L1 after flowing in calibration gas runner L3, and rule are included in carrier gas
Determine that the carrier gas is imported heating furnace 1 in the state of the hydrogen of concentration.
It is respectively set alternatively, it is also possible to be not connected to calibration gas runner L3 and the guiding in channel L1, concurrently to adding
Hot stove 1 supplies carrier gas and calibration gas.
The elemental analysis portion 3 is configured to have oxidator 31 and configuration at least one non-dispersive in 31 downstream of oxidator
Infrared detector 32, by the oxidator 31 by H contained by sample air2Gas is oxidized to H2After O gas, by described
Non-dispersion infrared detector 32 detects H2O.In addition, the oxidator 31 of present embodiment uses such as copper oxide (CuO), specifically
It says and is made up of the particle or powder of filling copper oxide (CuO) into quartz ampoule.
In addition, the Atomic Absorption SpectrophotometerICP 100 of present embodiment includes control device 5, the control device 5 has CPU, deposits
Reservoir and A/D converter etc. are cooperateed with according to the program for the predetermined region for being stored in the memory by CPU and peripheral equipment and are moved
Make, the control device 5 executes analysis procedure and calibration procedure.
<setting and movement>
The setting and movement of the Atomic Absorption SpectrophotometerICP 100 constituted in the above described manner are illustrated.
Firstly, being illustrated referring to Fig. 2 to analysis procedure.
In analysis procedure, graphite crucible R is placed in heating furnace 1 by crucible feedway (not shown) first
(S11).In addition, not being put into measurement sample etc. to graphite crucible R and being empty state.
Then, carrier gas is imported into heating furnace 1 by guiding in channel L1, using the carrier gas to being de-gassed in heating furnace 1
(S12).At this point, closing valve 4a, 4b by the control device 5.In the degassing, the control device 5 passes through clamping graphite
A pair of electrodes of crucible R applies voltage to graphite crucible R, will be heated to 2800 DEG C~3000 DEG C in graphite crucible R and heating furnace 1
Degree (S12).Being set as such temperature is to reliably remove suction to being heated in graphite crucible R and heating furnace 1
Invest the hydrogen (H), oxygen (O), nitrogen (N) of the inner wall of graphite crucible R and heating furnace 1.Heating time at this time is (i.e. logical to a pair of electrodes
The conduction time of electricity) it is set as the predetermined time, it is set as 55 seconds or more herein.
If the degassing process terminates, measurement sample is put into graphite crucible R (S13), to measurement in graphite crucible R
Sample carries out heating melting.Heating temperature at this time is according to the temperature for measuring sample and being suitably set by user, e.g.
2000 DEG C~2500 DEG C degree.
In addition, the sample air generated from measurement sample is guided together with carrier gas to non-dispersion infrared detector 32,
This detects H by non-dispersion infrared detector 322O (S14), the control device 5 is based on the detected value to contained by measurement sample
Hydrogen (H) carries out quantitative analysis (S15).
The analysis result is by the display output of control device 5 on such as display or paper etc..
Finally, using the cleaning agency (not shown) for for example having brush etc. to being cleaned in heating furnace 1 and terminate to analyze
Process (S16).
Then, referring to Fig. 3, the calibration procedure carried out before above-mentioned analysis procedure is illustrated.
Furthermore it is possible to carry out calibration procedure after analysis procedure and carry out school to the assay value obtained by analysis procedure
It is quasi-.
The calibration procedure is for reducing the non-dispersion infrared detector 32 that has by elemental analysis portion 3 and (not shown)
The aging of light source etc. and the evaluated error generated, for example, carry out within one day primary or a few hours carry out it is primary.In addition, calibration procedure can
It is primary to be carried out before or after analysis procedure, it can also be carried out continuously repeatedly.
Specifically, firstly, graphite crucible R is placed in heating furnace 1 using crucible feedway (not shown)
(S21).In addition, will not measure sample etc. is put into graphite crucible R but empty state.
Then, carrier gas is imported in heating furnace 1 by guiding in channel L1, using the carrier gas to being de-gassed in heating furnace 1
(S22).At this point, closing valve 4a, 4b by the control device 5.
In the present embodiment, when degassing in the calibration procedure, the control device 5 passes through the pair of electrode pair
Graphite crucible R applies voltage, to being heated (S22) in graphite crucible R and heating furnace 1.
Specifically, heating time (i.e. to the conduction time of a pair of electrodes) at this time be set as in above-mentioned analysis procedure
Degassing when heating time it is identical (being herein 55 seconds or more), 2800 DEG C~3000 DEG C degree will be heated in heating furnace.By
This, can reliably remove the hydrogen (H) etc. of the inner wall He the graphite crucible R being housed in heating furnace 1 that are adsorbed in heating furnace 1.
If the degassing process terminates, in order to carry out so-called gasometry supply (gas dosing), the control
Device 5 opens valve 4a, 4b, flows a part of carrier gas to calibration gas runner L3, and by the hydrogen comprising normal concentration
The carrier gas of gas guides (S23) into heating furnace 1.At this point, remaining defined pressure, temperature (such as room temperature journey in heating furnace 1
Degree), in this state by oxidator 31 to H contained by calibration gas2It is aoxidized, is examined by non-dispersion infrared detector 32
Survey H2O(S24).In addition, if hydrogen contained by the carbon and calibration gas of graphite crucible R reacts and generates methane gas, then
Error can be generated in the testing result of non-dispersion infrared detector 32, therefore the carbon of graphite crucible R and calibration gas in order to prevent
The reaction of hydrogen contained by body, in the steps for importing (S23) of calibration gas in the case where not heated to graphite crucible R example
Such as calibration gas is imported in backward heating furnace within 5~10 seconds since stopping heating.Alternatively, it is also possible to not exclusively stop heating and
Calibration gas is imported into heating furnace after the heating temperature decline for setting control device.
In addition, the control device 5 calculates calibration gas based on the detected value obtained by non-dispersion infrared detector 32
Contained H2Concentration or quality, and by make the calculated value and target value it is consistent in a manner of find out calibration factor etc. (S25).
Finally, using above-mentioned cleaning agency to being cleaned in heating furnace 1 and terminate calibration procedure (S26).
In the present embodiment, based on making H contained by calibration gas in above-mentioned calibration procedure2The school for aoxidizing and detecting
Quasi- detection intensity I0, to make in analysis procedure measure sample contained by H2The analysis detection intensity I for aoxidizing and detecting1It carries out
Amendment finds out detection intensity I after amendment2, and based on detection intensity I after the amendment2To calculate the dense of hydrogen contained by measurement sample
Degree.
Specifically, finding out the benchmaring intensity I that should be detected to the known concentration of hydrogen contained by calibration gasSWith
The calibration detection intensity I0Ratio k=I0/IS, and with analysis detection intensity I1Divided by ratio k, examined after thus calculating amendment
Survey intensity I2=I1/k。
<effect of present embodiment>
According to the Atomic Absorption SpectrophotometerICP 100 of the present embodiment constituted in the above described manner, in the heating furnace 1 of calibration procedure
Degassing process in being heated in heating furnace 1, therefore as contained by 32 testing calibration gas of non-dispersion infrared detector
H2When, it can make to become the state for being substantially removed moisture in heating furnace 1.
As a result, it is possible to carry out stable calibration, and then compared with the past it can be improved analysis precision.
Here, Fig. 4 expression is compared the Atomic Absorption SpectrophotometerICP 100 of present embodiment and previous Atomic Absorption SpectrophotometerICP
Experimental result.In addition, the experimental result indicates the steel control sample (control sample) to the hydrogen comprising 2.0ppm
The result of ten measurements is repeated.
It can distinguish from the experimental result, in previous analytical equipment, the average value ratio 2.0ppm of measurement result is low.Separately
On the one hand, in the Atomic Absorption SpectrophotometerICP of present embodiment 100, the average value of measurement result is compared with the past closer
2.0ppm is considered as compared with the past improving analysis precision.
In addition, in Fig. 4 2.00ppm it is upper and lower shown in straight line indicate the concentration based on hydrogen contained by steel control sample
Probabilistic analytical error permissible range, can distinguish: the survey obtained by the Atomic Absorption SpectrophotometerICP 100 of present embodiment
Definite value in the range, is able to carry out high-precision analysis.
Further, since heating time identical setting when analysis procedure being made to deaerate and when calibration procedure deaerates, so
The heating when degassing in two processes can be carried out with identical timing (sequence).
Further, since automatic cleaning is carried out to the dust in heating furnace 1 using cleaning agency, so right manually with user's use
The case where being cleaned in heating furnace 1 is compared, and the cleaning state in heating furnace 1 can be remained identical state, can dropped
The evaluated error of the low difference due to the cleaning state in heating furnace 1.
Especially in the present embodiment, due in the degassing of calibration procedure to being heated in heating furnace 1, so logical
It crosses using cleaning agency to the dust progress automatic cleaning generated at this time, in the heating furnace 1 after capable of completing calibration procedure
Cleaning state remains identical state, can start analysis procedure hereafter with identical state.
Moreover, because graphite crucible R is placed in heating furnace 1 using crucible feedway (not shown), used with user
The case where placing graphite crucible R manually is compared, and the installation condition of graphite crucible R can be remained identical state, can dropped
The evaluated error of the difference of the low installation condition due to graphite crucible R.
In addition, the present invention is not limited to the embodiments.
For example, in said embodiment, in the degassing process of analysis procedure and calibration procedure, control device is to a pair
Electrode applies voltage to be powered to graphite crucible, but the heaters such as heater can also be arranged in the peripheral part of heating furnace
Structure, and in the degassing process of calibration procedure makes heating mechanism movement come to adding in heating furnace by control device
Heat.
Further, since the Atomic Absorption SpectrophotometerICP that can be analyzed hydrogen (H), oxygen (O) and nitrogen (N) etc. with one makes to try
Sample gas aoxidizes oxygen (O), nitrogen (N) by oxidator, so hydrogen (H) is also oxidized and becomes H at this time2O.It is previous as a result,
When wanting to detect hydrogen (H), oxygen (O), nitrogen (N) with an Atomic Absorption SpectrophotometerICP, the analysis precision of hydrogen is perhaps sacrificed or in addition
Process in by analyzing for analyzing the oligomict special analytical apparatus of hydrogen hydrogen.
In contrast, if the elemental analysis portion 3 of the embodiment is made to have multiple non-dispersion infrared detectors, in addition to
H2Carbon monoxide (CO), carbon dioxide (CO can also be detected other than O2), nitrogen (N2) etc., then it can not only use an analytical equipment
Hydrogen (H), oxygen (O), nitrogen (N) are analyzed, and accurately hydrogen (H) can be analyzed.
In addition, can be carried out without departing from the spirit and scope of the present invention the present invention is not limited to the embodiment
Various modifications.
Industrial applicibility
It according to the present invention, can steadily be calibrated, be able to carry out than previous more acurrate and higher precision analysis.
Claims (7)
1. a kind of Atomic Absorption SpectrophotometerICP carries out quantitative analysis, the spy of the Atomic Absorption SpectrophotometerICP to hydrogen contained by metal material
Sign is,
The Atomic Absorption SpectrophotometerICP includes:
Heating mechanism, for being heated in heating furnace to the metal material being put into crucible；
Oxidator, the H that will be generated from the metal material being heated2Gas is oxidized to H2O gas；
Non-dispersion infrared detector detects the H aoxidized by the oxidator2O gas；And
Control device controls the heating mechanism,
To defined H2In the calibration procedure that the calibration gas of concentration is measured, the school is being imported into the heating furnace
Before quasi- gas, the control device controls the heating mechanism come to being heated in the heating furnace and carry out the heating
Degassing in furnace.
2. Atomic Absorption SpectrophotometerICP according to claim 1, which is characterized in that
The heating mechanism, which has, to be clamped the crucible and applies alive a pair of electrodes, and be powered to the crucible adds
Heat.
3. Atomic Absorption SpectrophotometerICP according to claim 1 or 2, which is characterized in that
It is configured to carry out analysis procedure after the calibration procedure.
4. Atomic Absorption SpectrophotometerICP as claimed in any of claims 1 to 3, which is characterized in that
The hydrogen containing ratio of the metal material is less than 10ppm.
5. a kind of elemental analysis method, which is characterized in that the elemental analysis method is using Atomic Absorption SpectrophotometerICP to metal material
Contained hydrogen carries out quantitative analysis, and the Atomic Absorption SpectrophotometerICP includes: heating mechanism, in heating furnace to being put into crucible
Metal material heated；Oxidator, the H that will be generated from the metal material being heated2Gas is oxidized to H2O gas；And
Non-dispersion infrared detector detects the H aoxidized by the oxidator2O gas,
The elemental analysis method is to defined H2In the calibration procedure that the calibration gas of concentration is measured, add to described
To being heated in the heating furnace before the calibration gas is imported in hot stove.
6. elemental analysis method according to claim 5, which is characterized in that
Using the detection intensity obtained by the calibration procedure, carried out to detection intensity obtained from the metal material is analyzed
Amendment.
7. elemental analysis method according to claim 5 or 6, which is characterized in that
The hydrogen containing ratio of the metal material is less than 10ppm.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016244163A JP6744205B2 (en) | 2016-12-16 | 2016-12-16 | Elemental analysis device and elemental analysis method |
| JP2016-244163 | 2016-12-16 | ||
| PCT/JP2017/045051 WO2018110689A1 (en) | 2016-12-16 | 2017-12-15 | Element analysis device and element analysis method |
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| CN110036292A true CN110036292A (en) | 2019-07-19 |
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| CN112166321A (en) * | 2018-05-25 | 2021-01-01 | 株式会社堀场制作所 | Element analysis device and element analysis method |
| EP4145126A1 (en) * | 2020-11-02 | 2023-03-08 | HORIBA, Ltd. | Element analysis method, element analysis device, and program for element analysis device |
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| JP6744205B2 (en) | 2020-08-19 |
| WO2018110689A1 (en) | 2018-06-21 |
| JP2018096926A (en) | 2018-06-21 |
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