CN110031102A - A kind of high speed spectrometer - Google Patents

A kind of high speed spectrometer Download PDF

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Publication number
CN110031102A
CN110031102A CN201910412938.7A CN201910412938A CN110031102A CN 110031102 A CN110031102 A CN 110031102A CN 201910412938 A CN201910412938 A CN 201910412938A CN 110031102 A CN110031102 A CN 110031102A
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CN
China
Prior art keywords
oxide semiconductor
complementary metal
high speed
imaging sensor
control module
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CN201910412938.7A
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Chinese (zh)
Inventor
李谦
王睿
张春峰
肖敏
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Nanjing University
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Nanjing University
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Priority to CN201910412938.7A priority Critical patent/CN110031102A/en
Publication of CN110031102A publication Critical patent/CN110031102A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/423Spectral arrangements using lasers, e.g. tunable

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The embodiment of the invention discloses a kind of high speed spectrometers.The high speed spectrometer includes: dispersion compensation module, for carrying out dispersion to detection light;Complementary metal oxide semiconductor COMS imaging sensor, for detecting the detection light for being irradiated to complementary metal oxide semiconductor COMS imaging sensor after dispersion is handled;Control module, it is electrically connected with complementary metal oxide semiconductor COMS imaging sensor, for controlling the work of complementary metal oxide semiconductor COMS imaging sensor, and the detection signal exported according to complementary metal oxide semiconductor COMS imaging sensor, the spectrum of detection light is obtained.The technical solution of the embodiment of the present invention can work with Gao Zhongying Laser synchronisation, improve ultrafast laser spectral measurement speed, precision and signal-to-noise ratio.

Description

A kind of high speed spectrometer
Technical field
The present invention relates to field of measuring technique more particularly to a kind of high speed spectrometers.
Background technique
Ultrafast laser spectroscopy is exactly that the theory and method of applied spectroscopy probes into substance fortune in ultrashort limit time scale Dynamic and change procedure.It is very widely used, is excitation state, photocatalysis and photochemistry, the energy in material and charge transmission The important research in the fields such as process, the characterization of nano material, protein material dynamics, superconduction, spintronics, biomedicine Means.It permeates to more fields, is grasped by more and more R&D institutions and enterprise simultaneously.
Ultrafast transient absorption spectra, ultrafast two-dimensional Fourier transform electronic spectrum are the most common of ultrafast laser spectroscopy Two kinds of application forms.The measurement method of transient absorption spectra is generally as follows: using pulse laser as light source, by the light source point For two beams, become pump light and detection light by the amplification of nonlinear optics parameter respectively.The wherein pulse recurrence frequency of pump light It is the half for detecting light frequency by optical chopper frequency-division modulation, the two same point at sample converges.Pump light is used to swash Sample is sent out, detection light is detected through sample by high speed spectrometer.Sample is excited and without pump light by having detected pump light respectively It excites detecting light spectrum when sample through sample to change, obtains transient absorption signal.The general very little of the variation of detecting light spectrum, therefore The signal of transient absorption is generally some thousandths of even ten thousand/a few magnitudes.Change pump light by delay line and detects the phase of light To delay, it can obtain the dynamic evolution image of transient absorption spectra.The ultrafast two-dimensional Fourier transform electricity of pumping-detection type Sub-light spectral apparatus is developed based on transient absorption spectra, but more complicated.
However, in presently commercially available spectrometer, for meeting ultrafast laser spectral measurement, shortage the following conditions:
Spectra collection rate is low.General way is repeatedly to measure and be averaged low to obtain in ultrafast laser spectroscopy at present The signal of noise generally requires hundreds of times averagely, for the signal of a ten thousandth, generally for the signal of one thousandth magnitude It needs tens of thousands of secondary average.This needs spectrometer to have the speed of detection being exceedingly fast.The high speed spectrometer collection spectrum speed of mainstream at present Degree rests on 1KHz level, is unable to satisfy and the work of 5KHz or even 40KHz Gao Zhongying laser synchronization is to improve wanting for signal-to-noise ratio It asks.
Lack high-precision.The signal of transient absorption is generally some thousandths of, ten thousand/several, even more small magnitude needs to visit Surveying device at least has 16 (65536) precision.It is generally mostly 14 or 12 precision, Wu Faman in existing high speed spectrometer The requirement of foot measurement high-precision ultrafast laser spectrum.
Lack synchronous triggering signal function.Lack the judgement signal for receiving Laser synchronisation signal and chopper, with same Step reads the function of having pump light and the detecting light spectrum without pump light excitation sample.
Summary of the invention
The embodiment of the present invention provides a kind of high speed spectrometer, to improve spectrographic detection speed and precision.
The embodiment of the invention provides a kind of high speed spectrometers, comprising:
Dispersion compensation module, for carrying out dispersion to detection light;
Complementary metal oxide semiconductor COMS imaging sensor is irradiated to complementary metal after dispersion is handled for detecting The detection light of oxide semiconductor COMS imaging sensor;
Control module is electrically connected, for controlling complementary metal with complementary metal oxide semiconductor COMS imaging sensor The work of oxide semiconductor COMS imaging sensor, and according to the output of complementary metal oxide semiconductor COMS imaging sensor Signal is detected, the spectrum of detection light is obtained.
Further, dispersion compensation module is monochromator, and monochromator includes entrance slit, the plane mirror, concave surface along optical path setting Mirror, grating and exit slit.
Further, control module is connect with pulse laser, and control module is for often receiving pulsatile once laser When the trigger signal of device output, control complementary metal oxide semiconductor cmos image sensor carries out one to current detection light Secondary acquisition, wherein the laser pulse synchronization and one-to-one correspondence of trigger signal and pulse laser transmitting.
Further, control module is connect with the optical chopper in pump probe device, and control module is cut according to optics The copped wave synchronization signal of wave device output determines the detection light type of current detection signal.
It further, further include computer, control module is connect by cable with computer, and computer is used for according to user Datagram protocol obtains the spectroscopic data that control module is sent.
Further, computer is also used to show spectral waveform.
Further, complementary metal oxide semiconductor COMS imaging sensor includes the multiple photosensitive lists being arranged in array Member, any photosensitive unit include photosensitive structure and buffering enlarged structure.
Further, control module includes voltage ratio computing circuit, analog-digital converter and controller, voltage ratio operation The input terminal of circuit is electrically connected with complementary metal oxide semiconductor COMS imaging sensor, the output of voltage ratio computing circuit End is electrically connected with the input terminal of analog-digital converter, and the output end of analog-digital converter is electrically connected with the controller, and analog-digital converter is used for The detection signal that complementary metal oxide semiconductor COMS imaging sensor exports is converted into 16 digital signals, controller For obtaining the spectrum of detection light according to digital signal.
Further, controller includes field programmable gate array.
Further, detection light is pulsed light.
The technical solution of the embodiment of the present invention is detected by complementary metal oxide semiconductor COMS imaging sensor through color Dissipate the detection light that complementary metal oxide semiconductor COMS imaging sensor is irradiated to after module dispersion is handled;Control module and mutually The electrical connection of metal-oxide semiconductor (MOS) COMS imaging sensor is mended, is passed for controlling complementary metal oxide semiconductor COMS image Sense device working, and the detection signal exported according to complementary metal oxide semiconductor COMS imaging sensor obtain detection light Spectrum, each photosensitive unit of complementary metal oxide semiconductor COMS imaging sensor independently have amplifier, charge conversion Work at voltage is carried out in each pixel, and conversion speed is fast, is solved using charge coupled device ccd sensor when institute There is photosensitive unit to pass sequentially through a common amplifier and carry out voltage conversion, speed is slower when causing to detect detection light The problem of, make high speed spectrometer that can work with Gao Zhongying Laser synchronisation, thus improve the measuring speed of ultrafast laser spectrum, Precision and signal-to-noise ratio.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of high speed spectrometer provided in an embodiment of the present invention;
Fig. 2 is a kind of complementary metal oxide semiconductor COMS imaging sensor 200 provided in an embodiment of the present invention along Fig. 1 The structural schematic diagram in the direction middle AA ';
Fig. 3 is a kind of structural schematic diagram of monochromator provided in an embodiment of the present invention;
Fig. 4 is a kind of test scene of high speed spectrometer provided in an embodiment of the present invention;
Fig. 5 is a kind of electrical block diagram of control module provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
The embodiment of the present invention provides a kind of high speed spectrometer.Fig. 1 is a kind of high speed spectrometer provided in an embodiment of the present invention Structural schematic diagram.The high speed spectrometer includes: dispersion compensation module 100, complementary metal oxide semiconductor COMS imaging sensor 200 and control module 300.
Dispersion compensation module 100 is used to carry out dispersion to detection light;Complementary metal oxide semiconductor COMS imaging sensor 200 For detecting the detection light for being irradiated to complementary metal oxide semiconductor COMS imaging sensor 200 after dispersion is handled;Control Module 300 is electrically connected with complementary metal oxide semiconductor COMS imaging sensor 200, and control module 300 is for controlling complementation Metal-oxide semiconductor (MOS) COMS imaging sensor 200 works, and according to complementary metal oxide semiconductor COMS image sensing The detection signal that device 200 exports obtains the spectrum of detection light.
Wherein, which can be used for measuring the spectrum of visible light.Optionally, detection light can be pulsed light.It is optional , which can be used for measuring the spectrum of the laser pulse of pulse laser sending.The dispersion compensation module 100 may include rib Mirror or grating etc..Detection light is the polychromatic light with certain frequency range, detects light after 100 dispersion of dispersion compensation module light splitting, It is arranged successively by the monochromatic light that dispersion is opened by wavelength (or frequency) size, to realize the spatial discrimination of wavelength.Different frequency Light will be radiated at the different positions of the photosensitive region of COMS imaging sensor.COMS imaging sensor 200 utilizes photoelectric effect Light intensity is converted into electric signal.Fig. 2 is that a kind of complementary metal oxide semiconductor COMS image provided in an embodiment of the present invention passes The structural schematic diagram in the direction AA ' along Fig. 1 of sensor 200.Referring to figs. 1 and 2, complementary metal oxide semiconductor COMS schemes As sensor 200 is fixed in control module 100, complementary metal oxide semiconductor COMS imaging sensor 200 and control mould Block 300 is located at the inside of protective shell 1, and the protective shell 1 is opposite with complementary metal oxide semiconductor COMS imaging sensor 200 Aperture is provided on surface, so that the photosensitive region 201 of complementary metal oxide semiconductor COMS imaging sensor 200 is exposed to Outside, so that the detection light after 100 dispersion of dispersion compensation module, is irradiated to complementary metal oxide semiconductor COMS imaging sensor On 200 photosensitive region 201, so that light intensity is converted to telecommunications by complementary metal oxide semiconductor COMS imaging sensor 200 Number.
Wherein, cmos image sensor includes the multiple photosensitive units being arranged in array, and any photosensitive unit includes photosensitive Structure and buffering enlarged structure, the output end of photosensitive structure are connect with the input terminal of Hyblid Buffer Amplifier structure, Hyblid Buffer Amplifier structure Output end is the output end of COMS imaging sensor.The photosensitive unit for the position being irradiated by light converts optical signals into voltage letter Number.There is a Hyblid Buffer Amplifier knot by charge conversion for voltage signal in each photosensitive unit of COMS imaging sensor 200 Structure, the work that charge is converted into voltage is carried out on each photosensitive unit, and conversion speed is fast, and read-out speed is high.And tradition electricity Lotus coupled apparatus (Charge Coupled Device, CCD) sensor is that the photon signal of each photosensitive unit is converted into electronics Packet, and sequence is transmitted to a common export structure, charge is successively then converted into voltage, by the letter at ccd sensor edge Number amplifier amplifies output, and conversion speed is slow.In previous some spectrometers, if multiple ccd sensors are spliced into One complete imaging sensor is also able to achieve higher spectra collection speed.But the linearity of different ccd sensors is different, Reading of the same spectrum on different ccd sensors is different, therefore there are problems that spectral signal deformation.With ccd sensor phase Than COMS imaging sensor conversion speed is fast, at low cost, low in energy consumption, solves all photosensitive units of traditional ccd sensor successively Voltage conversion is carried out by a common amplifier, causes to carry out detection speed per hour to detection light in ultrafast laser spectral measurement Slower problem is spent, makes high speed spectrometer that can work with Gao Zhongying Laser synchronisation, to improve the survey of ultrafast laser spectrum Measure speed, precision and signal-to-noise ratio.
The technical solution of the present embodiment is detected by complementary metal oxide semiconductor COMS imaging sensor through dispersion mould The detection light of complementary metal oxide semiconductor COMS imaging sensor is irradiated to after block dispersion processing;Control module with it is complementary gold Belong to the electrical connection of oxide semiconductor COMS imaging sensor, for controlling complementary metal oxide semiconductor COMS imaging sensor Work, and the detection signal exported according to complementary metal oxide semiconductor COMS imaging sensor, obtain the spectrum of detection light, An amplifier can be arranged in each photosensitive unit of complementary metal oxide semiconductor COMS imaging sensor, and charge is converted into The work of voltage is carried out in each pixel, and conversion speed is fast, solves and owns using when charge coupled device ccd sensor Photosensitive unit passes sequentially through a common amplifier and carries out voltage conversion, slow when causing to detect detection light Problem, to improve the measuring speed of ultrafast laser spectrum.
Optionally, dispersion compensation module 100 can be monochromator.Monochromator can be prism monochromator or grating monochromator.It is optional , on the basis of the above embodiments, Fig. 3 is a kind of structural schematic diagram of monochromator provided in an embodiment of the present invention, monochromator Including entrance slit 110, plane mirror 120, concave mirror 130, grating 140 and the exit slit 150 being arranged along optical path.Wherein, it visits It surveys light and is irradiated to plane mirror 120 through entrance slit 110, be reflected on concave mirror 130 through plane mirror 120, adjusted through concave mirror 130 It converges through concave mirror 130, is projected through exit slit 150, image in COMS image by 140 diffraction dispersion of grating for directional light The photosensitive region 201 of sensor, the optical dispersion of different wave length is in different positions, to realize the resolution of wavelength.
Fig. 4 is a kind of test scene of high speed spectrometer provided in an embodiment of the present invention.Optionally, control module 300 with Pulse laser 400 connects, and control module 300 is used for when often receiving the trigger signal of the output of pulsatile once laser 400, Control complementary metal oxide semiconductor cmos image sensor 200 carries out one acquisition, trigger signal to current detection light The laser pulse synchronization and one-to-one correspondence emitted with pulse laser 400.The pulse recurrence frequency of pulse laser 400 can be 5KHz。
Wherein, Fig. 4 is a kind of transient absorption device figure based on the high speed spectrometer.The every transmitting one of pulse laser 400 While a laser pulse, a trigger signal is sent to control module 300, so that control module 300 is to current laser arteries and veins Punching is acquired, so that high speed spectrometer is synchronous with the trigger signal of pulse laser 400, i.e., receives pulse laser every time Spectrum is read when 400 trigger signal (issuing with laser pulse synchronization).Control module 300 pass sequentially through light-coupled isolation chip and Snap-fit connector (Bayonet Nut Connector, BNC) is connect with pulse laser 400.Light-coupled isolation chip tool There is isolation interference.Optionally, on the basis of the above embodiments, it is visited with continued reference to Fig. 4, control module 300 and pumping The optical chopper 510 surveyed in device 500 connects, and control module 300 is according to the synchronous letter of copped wave that optical chopper 510 exports Number, determine the detection light type of current detection signal.
Wherein, optical chopper passes through snap-fit connector (Bayonet Nut Connector, BNC) and optocoupler Isolating chip is connect with control module.Pump probe device 500 is the dress that sample transient absorption spectra is detected using pulse laser It sets, incident light is pulse laser, and emergent light is the detection light for having pump light excitation sample being alternately present and swashs without pump light Send out the detection light of sample.Detection light type includes to pump light activated detection light and without the light activated detection light of pumping.In order to Differentiation has pump light and without light activated detecting light spectrum is pumped, and control module needs synchronous judgement of the reception from optical chopper Signal (above-mentioned copped wave synchronization signal), thus by spectral classification.
Optionally, with continued reference to Fig. 4, pump probe device 500 further includes beam splitting chip 520, the first optical parametric amplifier 530, the second optical parametric amplifier 540, delay line 550 and sample 560, the triggering end and pulse laser of optical chopper 510 Device 400 connects.
Wherein, beam splitting chip 520 is used to the laser pulse that pulse laser 400 issues being divided into the first light beam and the second light Beam;First optical parametric amplifier 530 is used to the first light beam optically erasing obtaining pump light;The amplification of second optical parameter Device 540 is used to the carry out optically erasing of the second light beam obtaining detection light;Optical chopper 510 is used for basis and receives arteries and veins The trigger signal for rushing the output of laser 400, to all odd-times in the first amplified light beam or all even-times Laser pulse carries out shading treatment, wherein trigger signal and the laser pulse synchronization of the transmitting of pulse laser 400 and an a pair It answers;Delay line 550 for changing the first light beam (pump light) and the second light beam (detection light) relative delay;Through optical chopper 510 treated the first light beams (pump light) and the second amplified light beam (detection light) are irradiated to the same position of sample Afterwards, the second light beam (detection light) penetrates sample, injects dispersion compensation module 100.
Wherein, optical chopper 510 receive pulse laser 400 output odd-times trigger signal while, Shading treatment is carried out to the laser pulse of odd-times in the first amplified light beam;Optical chopper 510 is receiving arteries and veins While rushing the even-times trigger signal of the output of laser 400, to the laser of even-times in the first amplified light beam Pulse directly passes through.Alternatively, optical chopper 510 is receiving the even-times trigger signal of the output of pulse laser 400 Meanwhile shading treatment is carried out to the laser pulse of even-times in the first amplified light beam;Optical chopper 510 is receiving To pulse laser 400 export odd-times trigger signal while, to odd-times in the first amplified light beam Laser pulse directly passes through.Pulse recurrence frequency through optical chopper treated the first light beam is the pulse weight of the second light beam The half of complex frequency.High speed spectrometer detection odd-times detection light and even-times detection light be different, it is adjacent twice Detecting optical pulses in, one is the detecting optical pulses for having pump light excitation sample, the other is without pump light excitation sample Detecting optical pulses.Pump light is the half of detection light frequency by optical chopper frequency dividing, that is, has pump light to excite and without pump light The detection light of sample is excited alternately quickly to occur, high speed spectrometer needs to detect each detecting optical pulses.
Optionally, if optical chopper laser arteries and veins of odd-times or even-times in the first amplified light beam While rushing in row shading treatment, copped wave synchronization signal is exported, control module can connect while receiving copped wave synchronization signal It receives without the light activated detection light of pumping;If optical chopper is not hiding the light pulse in the first amplified light beam When light processing, copped wave synchronization signal is not exported, and control module can receive pump light when not receiving copped wave synchronization signal The detection light of excitation, thus by spectral classification.
Optionally, on the basis of the above embodiments, with continued reference to Fig. 4, which further includes computer 600, Control module 300 is connect by cable with computer 600, and computer 600 is used to obtain control mould according to User Datagram Protocol The spectroscopic data that block 300 is sent.
Wherein, for showing interactive interface, which is realized computer by Labview software editing.The interaction The detecting parameter function that interface can be shown includes: external trigger/integral mode switching, in the spectrum number/time of integration, spectroscopic data The substrate value of deduction, the waveform diagram for judging bit value, spectroscopic data, spectroscopic data.User can be by needed for computer installation Detecting parameter.Wherein, external trigger mode is to receive the trigger signal of laser, reading spectrum synchronous with pulse laser;Product Merotype is the independent setting time of integration to read spectrum;It is the spectrum number once read that spectrum number, which is under external trigger mode, integral Time is under integral mode is the time of integration, judges bit value to distinguish and having pump light to excite and spectrum without sharp pump light hair Value, such as can be to be represented to have with 0 and pump light activated spectrum, 65535 represent without the light activated spectrum of pumping.Computer 600 The detecting parameter of user setting can be sent to control module 300, to control the operating mode of control module 300.Optionally, it counts Calculation machine 600 is also used to show spectral waveform.
Optionally, on the basis of the above embodiments, Fig. 5 is a kind of circuit of control module provided in an embodiment of the present invention Structural schematic diagram, control module 300 include voltage ratio computing circuit 330, analog-digital converter 310 and controller 320, voltage ratio The input terminal of example computing circuit 330 is electrically connected with complementary metal oxide semiconductor COMS imaging sensor 200, voltage ratio fortune The output end for calculating circuit 330 is electrically connected with the input terminal of analog-digital converter 310, the output end and controller of analog-digital converter 310 320 electrical connections, analog-digital converter 310 are used for the detection for exporting complementary metal oxide semiconductor COMS imaging sensor 200 Signal is converted into 16 digital signals, and controller is used to obtain the spectrum of detection light according to digital signal.
Wherein, voltage operational circuit 330 is used to export complementary metal oxide semiconductor COMS imaging sensor 200 Voltage signal zooms in or out, to export to analog-digital converter 310, to match the operating voltage model of analog-digital converter 310 It encloses.Optionally, voltage operational circuit includes operational amplifier, the input terminal complementary metal oxide semiconductor of operational amplifier COMS imaging sensor 200 is electrically connected, and the output end of operational amplifier is electrically connected with the input terminal of analog-digital converter 310.Modulus Converter 310 is 16 high-speed AD converters.The signal of ultrafast laser spectrum, as the signal of transient absorption is generally thousand/ Several, ten thousand/several, even more small magnitude, needing detector at least has 16 (65536) precision, and traditional high speed spectrometer produces In product, A/D conversion accuracy is even lower generally at 14.16 are used in high speed spectrometer provided in an embodiment of the present invention High-speed AD converter, solve the problems, such as in ultrafast laser spectrum to detection light carry out inspection time difference method it is low, to improve Ultrafast laser spectrographic detection precision.
Wherein, controller 320 may include micro-control unit (Microcontroller Unit, MCU).Optionally, it controls Device 300 processed includes field programmable gate array (Field-Programmable Gate Array, FPGA).FPGA conduct can compile Journey hardware circuit, the speed of service directly depend on crystal oscillator speed, can be easily reached 200M or more high primary frequency, to meet high speed The design requirement of circuit.Control module is connect by gigabit network cable with computer, using User Datagram Protocol (User Datagram Protocol, UDP), to guarantee the rate of control module and data transfer of computer.
To sum up, the control module in the high speed spectrometer in the embodiment of the present invention, passes through bnc interface, opto-coupler chip and arteries and veins It rushes laser to connect with optical chopper, and portion writes control program within the control module, realizes ultrafast laser spectrographic detection Middle reception trigger signal function.It is read when receiving trigger signal (the issuing with laser pulse synchronization) of pulse laser every time Spectrum;And the judgement signal from optical chopper is received, differentiation has pump light and without pumping light activated detecting light spectrum.
A kind of high speed spectrometer workflow provided in an embodiment of the present invention: user is defeated into computer Labview program Enter operation, detecting parameter needed for making computer obtain work;Computer passes through control mould of the Ethernet into high speed spectrometer Block sends spectra collection instruction corresponding with detecting parameter;Control module receives the spectrum from computer using udp protocol and adopts Collection instruction;Portion carries out the reading and deposit of computer instruction within the control module;Control module, which receives, carrys out self-pulsing laser Trigger signal, control module generate COMS imaging sensor control signal;COMS imaging sensor, which receives, at this time comes from The light that its surface is irradiated to after monochromator dispersion is converted to voltage signal by the signal of control module, COMS imaging sensor; The voltage signal carries out voltage conversion through voltage ratio computing circuit, and converted voltage is input to analog-digital converter;Control module The control signal of analog-digital converter is generated, voltage signal is converted to 16 digital signals by control AD conversion unit, according to The copped wave synchronization signal of optical chopper is by spectral data classification;The data are encapsulated as ethernet frame inside control module;Control Too net frame data are sent to computer by Ethernet according to udp protocol by molding root tuber;If computer instruction requires to read multiple light Spectrum, then repeat the above process;After the completion of spectrum is all read, control module enters standby mode;Labview program in computer Spectroscopic data is received by Ethernet, reads spectrum, the subsequent processings such as mapping;After the completion of whole spectra collections, high speed spectrometer Shutdown.
The technical solution of the embodiment of the present invention, can be with by setting complementary metal oxide semiconductor COMS imaging sensor Detection speed is improved, by the way that 16 high-speed AD converters are arranged, is guaranteeing to improve detection accuracy while detecting speed, in turn Interior at a fixed time more multiple groups spectrum can be detected, to seek the average value of low noise, so as to improve spectral measurement Signal-to-noise ratio.Therefore the technical solution of the embodiment of the present invention can work asynchronously with Gao Zhongying laser (highest 80KHz), improve ultrafast Measuring speed, precision and the signal-to-noise ratio of laser spectrum.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation, It readjusts, be combined with each other and substitutes without departing from protection scope of the present invention.Therefore, although by above embodiments to this Invention is described in further detail, but the present invention is not limited to the above embodiments only, is not departing from present inventive concept In the case of, it can also include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.

Claims (10)

1. a kind of high speed spectrometer characterized by comprising
Dispersion compensation module, for carrying out dispersion to detection light;
Complementary metal oxide semiconductor COMS imaging sensor is irradiated to the complementary metal for detecting after dispersion is handled The detection light of oxide semiconductor COMS imaging sensor;
Control module is electrically connected, for controlling the complementation with the complementary metal oxide semiconductor COMS imaging sensor The work of metal-oxide semiconductor (MOS) COMS imaging sensor, and according to the complementary metal oxide semiconductor COMS image sensing The detection signal of device output obtains the spectrum of the detection light.
2. high speed spectrometer according to claim 1, which is characterized in that the dispersion compensation module is monochromator, the monochrome Instrument includes entrance slit, plane mirror, concave mirror, grating and the exit slit along optical path setting.
3. high speed spectrometer according to claim 1, which is characterized in that the control module is connect with pulse laser, The control module is used to control the complementary metal when often receiving the trigger signal of the primary pulse laser output Oxide semiconductor cmos image sensor carries out one acquisition to current detection light, wherein the trigger signal with it is described The laser pulse synchronization and one-to-one correspondence of pulse laser transmitting.
4. high speed spectrometer according to claim 1, which is characterized in that in the control module and pump probe device Optical chopper connection, the copped wave synchronization signal that the control module is exported according to the optical chopper determine current inspection Survey the detection light type of signal.
5. high speed spectrometer according to claim 1, which is characterized in that further include computer, the control module passes through Cable is connect with the computer, and the computer is used to obtain what the control module was sent according to User Datagram Protocol Spectroscopic data.
6. high speed spectrometer according to claim 5, which is characterized in that the computer is also used to show spectral waveform.
7. high speed spectrometer according to claim 1, which is characterized in that the complementary metal oxide semiconductor COMS figure As sensor includes the multiple photosensitive units being arranged in array, any photosensitive unit includes photosensitive structure and Hyblid Buffer Amplifier knot Structure.
8. high speed spectrometer according to claim 1, which is characterized in that the control module includes voltage ratio operation electricity Road, analog-digital converter and controller, the input terminal and the complementary metal oxide semiconductor of the voltage ratio computing circuit The electrical connection of COMS imaging sensor, the input terminal of the output end and the analog-digital converter of the voltage ratio computing circuit are electrically connected It connects, the output end of the analog-digital converter is electrically connected with the controller, and the analog-digital converter is used for the complementary metal The detection signal of oxide semiconductor COMS imaging sensor output is converted into 16 digital signals, and the controller is used for root According to the digital signal, the spectrum of the detection light is obtained.
9. high speed spectrometer according to claim 8, which is characterized in that the controller includes field-programmable gate array Column.
10. high speed spectrometer according to claim 1, which is characterized in that the detection light is pulsed light.
CN201910412938.7A 2019-05-17 2019-05-17 A kind of high speed spectrometer Pending CN110031102A (en)

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