CN110031100A - A kind of various dimensions short-wave infrared light spectrum image-forming detection device - Google Patents

A kind of various dimensions short-wave infrared light spectrum image-forming detection device Download PDF

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Publication number
CN110031100A
CN110031100A CN201910360420.3A CN201910360420A CN110031100A CN 110031100 A CN110031100 A CN 110031100A CN 201910360420 A CN201910360420 A CN 201910360420A CN 110031100 A CN110031100 A CN 110031100A
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China
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imaging
light
target
spectrum
wave infrared
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CN201910360420.3A
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CN110031100B (en
Inventor
何晓英
周锦松
冯蕾
李雅灿
景娟娟
魏立冬
付锡禄
杨雷
徐丽
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Academy of Opto Electronics of CAS
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Academy of Opto Electronics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

The invention discloses a kind of various dimensions short-wave infrared light spectrum image-forming detection devices, in which: the target position of the adjustable parallel light pipe of focal plane can be adjusted in a certain range;Optical filter is arranged at the light-emitting window of the adjustable parallel light pipe of the focal plane;The tested spectrum imaging system is placed behind the optical filter;Imaging analog board of practising physiognomy is placed in the position of practising physiognomy of the tested spectrum imaging system, and places the reflective imaging microscopic system in the practise physiognomy another side of analog board of the imaging;The shortwave imaging detector is placed at the light-emitting window of the reflective imaging microscopic system, receives the reflective imaging microscopic system by the shortwave imaging detector treated image.The device can effectively solve short-wave infrared optical design theoretical validation and structure adjustment verifying, and device overlap joint is simple, greatly improves detection accuracy, and reduce detection difficulty.

Description

A kind of various dimensions short-wave infrared light spectrum image-forming detection device
Technical field
The present invention relates to precision instrument detection technique fields more particularly to a kind of various dimensions short-wave infrared light spectrum image-forming to detect Device.
Background technique
Infrared remote sensing is another the optical remote sensing means to grow up after visual remote sensing, it can pass through detection The infrared energy of target obtains target for information about, has the advantages that not limited and penetrated cloud and mist by dark night.With red Outer Detection Techniques are constantly progressive, and infrared remote sensing ability constantly enhances, and infrared remote sensing has been widely used for military field and ground The civil fields such as ball exploration, weather forecast, forest fire monitoring.
Imaging spectral is with high spectral resolution while to obtain continuous object spectrum image in special spectrum field, this makes Space development, quantitative analysis epigeosphere biophysical chemistry process and parameter can be carried out in spectrum dimension by obtaining remote sensing application. In recent years, the development of infrared detector technology and the development of various ancillary equipments, to develop high performance Infrared Imaging Spectrometer Possibility is provided, but infrared band is due to the restriction by detector performance and own characteristic, to the development of short-wave infrared instrument Bring considerable restraint.
Summary of the invention
The object of the present invention is to provide a kind of various dimensions short-wave infrared light spectrum image-forming detection device, which can effectively be solved Certainly short-wave infrared optical design theoretical validation and structure adjustment verifying, and device overlap joint is simple, greatly improves detection accuracy, And reduce detection difficulty.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of various dimensions short-wave infrared light spectrum image-forming detection device, including the adjustable parallel light pipe of focal plane, tested light spectrum image-forming System, reflective imaging microscopic system, shortwave imaging detector, microscope, imaging are practised physiognomy analog board, optical filter, regulating platform, target Mark, broad spectrum light source and target wheel, in which:
The target position of the adjustable parallel light pipe of focal plane can be adjusted in a certain range, pass through difference where adjusting target surface Position, make its issue light diverging light, directional light or converging light;
The regulating platform, target and target wheel are wholy set in the light inlet of the adjustable parallel light pipe of the focal plane as one Between broad spectrum light source;Wherein, different targets is mounted on the target wheel, and the target wheel is installed on regulating platform, Position to guarantee the target is adjustable;
The optical filter is arranged at the light-emitting window of the adjustable parallel light pipe of the focal plane;
Place the tested spectrum imaging system behind the optical filter, and the tested spectrum imaging system enters Optical port is directed at the optical filter;
The position of practising physiognomy that analog board of practising physiognomy is imaged and is placed in the tested spectrum imaging system, in the imaging phase face mould The another side of quasi- plate places the reflective imaging microscopic system, and the light inlet of the reflective imaging microscopic system is directed at institute Imaging is stated to practise physiognomy analog board;
The microscope is located in the reflective imaging microscopic system, is put axis information by the microscope Greatly;
The shortwave imaging detector is placed at the light-emitting window of the reflective imaging microscopic system, passes through the shortwave Imaging detector treated receiving reflective imaging microscopic system image, and the tested spectrum is judged with this The image quality of imaging system.
Described device further includes having industrial personal computer, and the controlling cable of the shortwave imaging detector and target wheel is connected to described On industrial personal computer, for controlling, target is adjusted the industrial personal computer, detector image-forming is shown and the adjusting of various parameters.
The analog board of practising physiognomy that is imaged is further installed on multivariant adjustment frame, utilizes the multivariant adjustment Frame keeps the position various dimensions that analog board of practising physiognomy is imaged adjustable.
The detection device is built on high-precision optic test platform, and different regulations are selected according to use demand Optic test platform.
Manual target can be mounted directly on the target wheel.
As seen from the above technical solution provided by the invention, above-mentioned apparatus can effectively solve short-wave infrared optics and set Theoretical validation and structure adjustment verifying are counted, and device overlap joint is simple, greatly improves detection accuracy, and it is difficult to reduce detection Degree, can be widely applied to the detection of various infrared optics designs.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this For the those of ordinary skill in field, without creative efforts, it can also be obtained according to these attached drawings other Attached drawing.
Fig. 1 is the structural schematic diagram of various dimensions short-wave infrared light spectrum image-forming detection device provided in an embodiment of the present invention;
Fig. 2 is in example of the present invention by the resulting imaging schematic diagram of the direct docking probe of examining system;
Fig. 3 is using the imaging schematic diagram after described device of the embodiment of the present invention.
Specific embodiment
With reference to the attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this The embodiment of invention, every other implementation obtained by those of ordinary skill in the art without making creative efforts Example, belongs to protection scope of the present invention.
The embodiment of the present invention is described in further detail below in conjunction with attached drawing, is implemented as shown in Figure 1 for the present invention The structural schematic diagram for the various dimensions short-wave infrared light spectrum image-forming detection device that example provides, which mainly includes that focal plane is adjustable Parallel light tube 1, tested spectrum imaging system 2, reflective imaging microscopic system 3, shortwave imaging detector 5, microscope 6, imaging Practise physiognomy analog board 8, optical filter 9, regulating platform 10, target 11, broad spectrum light source 12 and target wheel 13, wherein the connection of each component and Work relationship specifically:
The target position of the adjustable parallel light pipe 1 of focal plane can be adjusted in a certain range, by adjusting target surface place not Same position, light diverging light, directional light or the converging light for issuing it;The adjustable parallel light pipe 1 of the focal plane is according to optical Object-image relation is special to be formed, and main function is exactly the position that detector is first fixed on to imaging spectral, adjustable using focal plane The regulated quantity of 1 target position of parallel light tube converses the position at system optimum image plane, cuts pad to disposably determine to repair Thickness, it is easy to operate, it is time saving and energy saving.
The regulating platform 10, target 11 and target wheel 13 are set to the adjustable parallel light pipe 1 of the focal plane as a whole Light inlet and broad spectrum light source 12 between;Wherein, different targets 11 is mounted on the target wheel 13, the target wheel 13 It is installed on regulating platform 10, the position to guarantee the target 11 is adjustable;In the specific implementation, the mechanism of the target wheel 13 can letter Change processing, can be mounted directly manual target.
The optical filter 9 is arranged at the light-emitting window of the adjustable parallel light pipe 1 of the focal plane;
The tested spectrum imaging system 2, and the tested spectrum imaging system 2 are placed behind the optical filter 9 Light inlet be directed at the optical filter 9;
The position of practising physiognomy that analog board 8 of practising physiognomy is imaged and is placed in the tested spectrum imaging system 2, practises physiognomy in the imaging The another side of analog board 8 places the reflective imaging microscopic system 3, and the light inlet of the reflective imaging microscopic system 3 The imaging is directed to practise physiognomy analog board 8;
The microscope 6 is located in the reflective imaging microscopic system 3, by the microscope 6 by axis information into Row amplification;In the specific implementation, since the general pixel of short-wave infrared detector is larger, and the diffusion of point image of Optical System Design is almost In a pixel, if therefore directly detector is docked with optical system, can not detect system-wide resolve minutiae and Point disperse shape of spot, which aberration also can not further judge spectrum imaging system mainly has, thus need to by this it is reflective at As microscopic system 3 amplifies details, to facilitate the judge of subsequent image quality;
The shortwave imaging detector 5 is placed at the light-emitting window of the reflective imaging microscopic system 3, by described short Treated receiving the reflective imaging microscopic system 3 image of wave imaging detector 5, and it is described tested to judge with this The image quality of spectrum imaging system 2.
In addition, in the specific implementation, the device, which may also include, industrial personal computer 4, the shortwave imaging detector 5 and target wheel 13 Controlling cable be connected on the industrial personal computer 4, the industrial personal computer 4 for control target adjust, detector image-forming show and respectively The adjusting of kind parameter.In the specific implementation, the industrial personal computer can make a kind of enhanced computer of reinforcing, wherein being equipped with various behaviour Make system.
Above-mentioned imaging analog board 8 of practising physiognomy can also be further installed on multivariant adjustment frame 7, how free using this The adjustment frame 7 of degree keeps the position various dimensions that analog board 8 of practising physiognomy is imaged adjustable.
Above-mentioned detection device can be built on high-precision optic test platform, and different rule are selected according to use demand The optic test platform of system.
It is described in detail below with test process of the specific example to above-mentioned apparatus:
Before tested optical spectrum imagers are placed in the adjustable parallel light pipe of focal plane first, the object space of work is adjustable towards focal plane Parallel light tube places resolution chart on the adjustable parallel light pipe object lens focal plane of focal plane, adjusts tested optical spectrum imagers, is looked for microscope To the most clear position of target picture, resolution chart imaging is observed;
Can microscopical enlargement ratio select to be subject to offer a clear explanation when eye-observation, adjusts the adjustable parallel light pipe of focal plane With the angle of tested optical spectrum imagers, the asterism picture of tested optical spectrum imagers maximum field of view is measured.
Regard monochromatic integrating sphere one (or monochromatic source can also) as light source, according to the focal length of tested optical spectrum imagers and The focal length of the adjustable parallel light pipe of focal plane, convert tested optical spectrum imagers corresponding one group of line width on differentiating resolution chart.
It is illustrated in figure 2 the resulting imaging schematic diagram of the direct docking probe of examining system in example of the present invention, As can be seen from Figure 2: without amplification, the details of contrast can not be observed.
It is illustrated in figure 3 using the imaging schematic diagram after described device of the embodiment of the present invention, as shown in Figure 3: micro- through 5 times After amplification, the contrast for differentiating tested optical spectrum imagers can be understood than section.Similarly, the target of the adjustable parallel light pipe of focal plane is changed Star tester can measure the aberration characteristic of the system.
It is worth noting that, the content being not described in detail in the embodiment of the present invention belongs to professional and technical personnel in the field's public affairs The prior art known.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, Within the technical scope of the present disclosure, any changes or substitutions that can be easily thought of by anyone skilled in the art, It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims Subject to enclosing.

Claims (5)

1. a kind of various dimensions short-wave infrared light spectrum image-forming detection device, which is characterized in that including the adjustable parallel light pipe of focal plane, be tested Spectrum imaging system, reflective imaging microscopic system, shortwave imaging detector, microscope, imaging practise physiognomy analog board, optical filter, Regulating platform, target, broad spectrum light source and target wheel, in which:
The target position of the adjustable parallel light pipe of focal plane can be adjusted in a certain range, by adjusting the different position in target surface place It sets, light diverging light, directional light or the converging light for issuing it;
The regulating platform, target and target wheel are wholy set in the light inlet and width of the adjustable parallel light pipe of the focal plane as one Between spectroscopic light source;Wherein, different targets is mounted on the target wheel, and the target wheel is installed on regulating platform, to protect The position for demonstrate,proving the target is adjustable;
The optical filter is arranged at the light-emitting window of the adjustable parallel light pipe of the focal plane;
The tested spectrum imaging system, and the light inlet of the tested spectrum imaging system are placed behind the optical filter It is directed at the optical filter;
Imaging analog board of practising physiognomy is placed in the position of practising physiognomy of the tested spectrum imaging system, and practises physiognomy analog board in the imaging Another side place the reflective imaging microscopic system, and the reflective imaging microscopic system light inlet alignment it is described at As analog board of practising physiognomy;
The microscope is located in the reflective imaging microscopic system, is amplified axis information by the microscope;
The shortwave imaging detector is placed at the light-emitting window of the reflective imaging microscopic system, is imaged by the shortwave Detector treated receiving reflective imaging microscopic system image, and the tested light spectrum image-forming is judged with this The image quality of system.
2. various dimensions short-wave infrared light spectrum image-forming detection device according to claim 1, which is characterized in that described device is also wrapped Industrial personal computer is included, the controlling cable of the shortwave imaging detector and target wheel is connected on the industrial personal computer, the industrial personal computer For controlling, target is adjusted, detector image-forming is shown and the adjusting of various parameters.
3. various dimensions short-wave infrared light spectrum image-forming detection device according to claim 1, which is characterized in that the imaging is practised physiognomy Analog board is further installed on multivariant adjustment frame, so that the imaging is practised physiognomy simulation using the multivariant adjustment frame The position various dimensions of plate are adjustable.
4. various dimensions short-wave infrared light spectrum image-forming detection device according to claim 1, which is characterized in that
The detection device is built on high-precision optic test platform, and the optics of different regulations is selected according to use demand Test platform.
5. various dimensions short-wave infrared light spectrum image-forming detection device according to claim 1, which is characterized in that
Manual target can be mounted directly on the target wheel.
CN201910360420.3A 2019-04-30 2019-04-30 Multi-dimensional short wave infrared spectrum imaging detection device Active CN110031100B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111707449A (en) * 2020-05-21 2020-09-25 中国科学院西安光学精密机械研究所 Multi-spectral optical axis parallelism testing device and testing method
CN113804296A (en) * 2021-09-30 2021-12-17 上海卫星装备研究所 Performance detection device and method for imaging spectrometer in vacuum low-temperature environment

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Publication number Priority date Publication date Assignee Title
CN103424189A (en) * 2013-08-24 2013-12-04 西安电子科技大学 Device and method for detecting infrared spectral imaging system performance
CN105092048A (en) * 2015-08-19 2015-11-25 天津中环创新科技有限公司 Infrared image imager detector and infrared imaging detection method
CN105784681A (en) * 2016-04-15 2016-07-20 中国科学院上海技术物理研究所 Multifunctional system for LIBS spectrum detection and microimaging
CN106768391A (en) * 2016-11-21 2017-05-31 上海卫星工程研究所 Imager difference focal plane spectral coverage registration accuracy method of testing
CN109387284A (en) * 2018-09-28 2019-02-26 西安应用光学研究所 Imaging spectrometer radiation parameter and imaging parameters robot scaling equipment and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103424189A (en) * 2013-08-24 2013-12-04 西安电子科技大学 Device and method for detecting infrared spectral imaging system performance
CN105092048A (en) * 2015-08-19 2015-11-25 天津中环创新科技有限公司 Infrared image imager detector and infrared imaging detection method
CN105784681A (en) * 2016-04-15 2016-07-20 中国科学院上海技术物理研究所 Multifunctional system for LIBS spectrum detection and microimaging
CN106768391A (en) * 2016-11-21 2017-05-31 上海卫星工程研究所 Imager difference focal plane spectral coverage registration accuracy method of testing
CN109387284A (en) * 2018-09-28 2019-02-26 西安应用光学研究所 Imaging spectrometer radiation parameter and imaging parameters robot scaling equipment and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111707449A (en) * 2020-05-21 2020-09-25 中国科学院西安光学精密机械研究所 Multi-spectral optical axis parallelism testing device and testing method
CN111707449B (en) * 2020-05-21 2021-05-14 中国科学院西安光学精密机械研究所 Multi-spectral optical axis parallelism testing device and testing method
CN113804296A (en) * 2021-09-30 2021-12-17 上海卫星装备研究所 Performance detection device and method for imaging spectrometer in vacuum low-temperature environment

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