CN110023859A - 太阳能电池生产设备的工艺编辑、获取、保护方法及装置 - Google Patents
太阳能电池生产设备的工艺编辑、获取、保护方法及装置 Download PDFInfo
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- CN110023859A CN110023859A CN201880001488.6A CN201880001488A CN110023859A CN 110023859 A CN110023859 A CN 110023859A CN 201880001488 A CN201880001488 A CN 201880001488A CN 110023859 A CN110023859 A CN 110023859A
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- 238000000034 method Methods 0.000 title claims abstract description 488
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 314
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- 238000009792 diffusion process Methods 0.000 claims description 11
- 238000001312 dry etching Methods 0.000 claims description 11
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/4093—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by part programming, e.g. entry of geometrical information as taken from a technical drawing, combining this with machining and material information to obtain control information, named part programme, for the NC machine
- G05B19/40937—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by part programming, e.g. entry of geometrical information as taken from a technical drawing, combining this with machining and material information to obtain control information, named part programme, for the NC machine concerning programming of machining or material parameters, pocket machining
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/408—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by data handling or data format, e.g. reading, buffering or conversion of data
- G05B19/4083—Adapting programme, configuration
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0426—Programming the control sequence
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/408—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by data handling or data format, e.g. reading, buffering or conversion of data
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/60—Protecting data
- G06F21/606—Protecting data by securing the transmission between two devices or processes
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/60—Protecting data
- G06F21/62—Protecting access to data via a platform, e.g. using keys or access control rules
- G06F21/6209—Protecting access to data via a platform, e.g. using keys or access control rules to a single file or object, e.g. in a secure envelope, encrypted and accessed using a key, or with access control rules appended to the object itself
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32926—Software, data control or modelling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32161—Object oriented control, programming
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- G—PHYSICS
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- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/36—Nc in input of data, input key till input tape
- G05B2219/36542—Cryptography, encrypt, access, authorize with key, code, password
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3321—CVD [Chemical Vapor Deposition]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
- H01J2237/3341—Reactive etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y04—INFORMATION OR COMMUNICATION TECHNOLOGIES HAVING AN IMPACT ON OTHER TECHNOLOGY AREAS
- Y04S—SYSTEMS INTEGRATING TECHNOLOGIES RELATED TO POWER NETWORK OPERATION, COMMUNICATION OR INFORMATION TECHNOLOGIES FOR IMPROVING THE ELECTRICAL POWER GENERATION, TRANSMISSION, DISTRIBUTION, MANAGEMENT OR USAGE, i.e. SMART GRIDS
- Y04S40/00—Systems for electrical power generation, transmission, distribution or end-user application management characterised by the use of communication or information technologies, or communication or information technology specific aspects supporting them
- Y04S40/20—Information technology specific aspects, e.g. CAD, simulation, modelling, system security
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Human Computer Interaction (AREA)
- Software Systems (AREA)
- Health & Medical Sciences (AREA)
- Bioethics (AREA)
- General Health & Medical Sciences (AREA)
- Computer Security & Cryptography (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Quality & Reliability (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Geometry (AREA)
- Photovoltaic Devices (AREA)
- General Factory Administration (AREA)
- Chemical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (22)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711086468.7 | 2017-11-07 | ||
CN201711086468.7A CN107942945A (zh) | 2017-11-07 | 2017-11-07 | 太阳能电池生产设备的工艺编辑、获取、保护方法及装置 |
PCT/CN2018/100752 WO2019091173A1 (zh) | 2017-11-07 | 2018-08-16 | 太阳能电池生产设备的工艺编辑、获取、保护方法及装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110023859A true CN110023859A (zh) | 2019-07-16 |
Family
ID=61933493
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201711086468.7A Pending CN107942945A (zh) | 2017-11-07 | 2017-11-07 | 太阳能电池生产设备的工艺编辑、获取、保护方法及装置 |
CN201880001488.6A Pending CN110023859A (zh) | 2017-11-07 | 2018-08-16 | 太阳能电池生产设备的工艺编辑、获取、保护方法及装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201711086468.7A Pending CN107942945A (zh) | 2017-11-07 | 2017-11-07 | 太阳能电池生产设备的工艺编辑、获取、保护方法及装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20190137971A1 (zh) |
EP (1) | EP3480722A1 (zh) |
JP (1) | JP2019087234A (zh) |
KR (1) | KR20190051778A (zh) |
CN (2) | CN107942945A (zh) |
WO (1) | WO2019091173A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107942945A (zh) * | 2017-11-07 | 2018-04-20 | 君泰创新(北京)科技有限公司 | 太阳能电池生产设备的工艺编辑、获取、保护方法及装置 |
CN109101826A (zh) * | 2018-08-08 | 2018-12-28 | 君泰创新(北京)科技有限公司 | 一种光伏设备的工艺数据保护方法及装置 |
CN112286154A (zh) * | 2020-10-29 | 2021-01-29 | 常州捷佳创精密机械有限公司 | 生产设备的工艺配方配置方法及配置***、存储介质 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006005678A (ja) * | 2004-06-17 | 2006-01-05 | Ricoh Co Ltd | 画像処理方法、画像処理プログラム、記録媒体及び画像処理システム |
JP2006048250A (ja) * | 2004-08-02 | 2006-02-16 | Kyocera Mita Corp | プログラム実行装置、プログラム及びプログラム実行方法 |
JP2008067162A (ja) * | 2006-09-08 | 2008-03-21 | Pit:Kk | 制御システムおよびシステムの制御方法 |
CN102449786A (zh) * | 2009-05-22 | 2012-05-09 | 奥罗拉控制技术有限公司 | 用于改进光电产品生产的方法 |
CN102542143A (zh) * | 2010-12-27 | 2012-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 工艺数据的获取、存储方法和装置以及工艺数据处理*** |
CN104243420A (zh) * | 2013-06-18 | 2014-12-24 | 沈阳中科博微自动化技术有限公司 | 用于集成电路工厂自动化***与设备通讯的数据加密方法 |
JP2015156105A (ja) * | 2014-02-20 | 2015-08-27 | 株式会社Screenホールディングス | 制御方法および基板処理装置 |
US20150355620A1 (en) * | 2014-06-04 | 2015-12-10 | Kinsus Interconnect Technology Corp. | Management system for process recipe |
CN105491144A (zh) * | 2015-12-16 | 2016-04-13 | 新奥光伏能源有限公司 | 一种太阳能电池生产线及其远程控制方法与*** |
CN106959674A (zh) * | 2017-03-02 | 2017-07-18 | 北京北方华创微电子装备有限公司 | 一种半导体工艺配方的管理***和方法 |
CN107209503A (zh) * | 2014-12-30 | 2017-09-26 | 数据输入输出公司 | 具有作业封装机构的自动化制造***及其操作方法 |
CN107291055A (zh) * | 2016-04-13 | 2017-10-24 | 洛克威尔自动控制技术股份有限公司 | 装置专用加密内容保护 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100543762C (zh) * | 2007-10-19 | 2009-09-23 | 江苏科技大学 | 基于硬件环境的计算机辅助设计数据加密保护方法 |
CN107871698A (zh) * | 2017-11-07 | 2018-04-03 | 君泰创新(北京)科技有限公司 | 太阳能电池生产设备的工艺编辑、获取、保护方法及装置 |
CN107942945A (zh) * | 2017-11-07 | 2018-04-20 | 君泰创新(北京)科技有限公司 | 太阳能电池生产设备的工艺编辑、获取、保护方法及装置 |
-
2017
- 2017-11-07 CN CN201711086468.7A patent/CN107942945A/zh active Pending
-
2018
- 2018-08-16 WO PCT/CN2018/100752 patent/WO2019091173A1/zh active Application Filing
- 2018-08-16 CN CN201880001488.6A patent/CN110023859A/zh active Pending
- 2018-09-14 KR KR1020180109999A patent/KR20190051778A/ko not_active Application Discontinuation
- 2018-09-22 US US16/138,979 patent/US20190137971A1/en not_active Abandoned
- 2018-09-24 EP EP18196327.3A patent/EP3480722A1/en not_active Withdrawn
- 2018-09-27 JP JP2018181903A patent/JP2019087234A/ja active Pending
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006005678A (ja) * | 2004-06-17 | 2006-01-05 | Ricoh Co Ltd | 画像処理方法、画像処理プログラム、記録媒体及び画像処理システム |
JP2006048250A (ja) * | 2004-08-02 | 2006-02-16 | Kyocera Mita Corp | プログラム実行装置、プログラム及びプログラム実行方法 |
JP2008067162A (ja) * | 2006-09-08 | 2008-03-21 | Pit:Kk | 制御システムおよびシステムの制御方法 |
CN102449786A (zh) * | 2009-05-22 | 2012-05-09 | 奥罗拉控制技术有限公司 | 用于改进光电产品生产的方法 |
CN102542143A (zh) * | 2010-12-27 | 2012-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 工艺数据的获取、存储方法和装置以及工艺数据处理*** |
CN104243420A (zh) * | 2013-06-18 | 2014-12-24 | 沈阳中科博微自动化技术有限公司 | 用于集成电路工厂自动化***与设备通讯的数据加密方法 |
JP2015156105A (ja) * | 2014-02-20 | 2015-08-27 | 株式会社Screenホールディングス | 制御方法および基板処理装置 |
US20150355620A1 (en) * | 2014-06-04 | 2015-12-10 | Kinsus Interconnect Technology Corp. | Management system for process recipe |
CN107209503A (zh) * | 2014-12-30 | 2017-09-26 | 数据输入输出公司 | 具有作业封装机构的自动化制造***及其操作方法 |
CN105491144A (zh) * | 2015-12-16 | 2016-04-13 | 新奥光伏能源有限公司 | 一种太阳能电池生产线及其远程控制方法与*** |
CN107291055A (zh) * | 2016-04-13 | 2017-10-24 | 洛克威尔自动控制技术股份有限公司 | 装置专用加密内容保护 |
CN106959674A (zh) * | 2017-03-02 | 2017-07-18 | 北京北方华创微电子装备有限公司 | 一种半导体工艺配方的管理***和方法 |
Also Published As
Publication number | Publication date |
---|---|
US20190137971A1 (en) | 2019-05-09 |
KR20190051778A (ko) | 2019-05-15 |
JP2019087234A (ja) | 2019-06-06 |
CN107942945A (zh) | 2018-04-20 |
WO2019091173A1 (zh) | 2019-05-16 |
EP3480722A1 (en) | 2019-05-08 |
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