CN110018215A - Miniature chloride ion sensor and its method based on Fick diffusion law - Google Patents
Miniature chloride ion sensor and its method based on Fick diffusion law Download PDFInfo
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- CN110018215A CN110018215A CN201910255197.6A CN201910255197A CN110018215A CN 110018215 A CN110018215 A CN 110018215A CN 201910255197 A CN201910255197 A CN 201910255197A CN 110018215 A CN110018215 A CN 110018215A
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- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- G01N27/333—Ion-selective electrodes or membranes
- G01N27/3335—Ion-selective electrodes or membranes the membrane containing at least one organic component
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
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Abstract
The invention discloses a kind of miniature chloride ion sensor and its method based on Fick diffusion law, the chloride ion sensor for using the method for the invention to prepare is sheet type, all solid state miniature chloride ion sensor, have the advantages that small in size, structural stability is good, high reliablity, good airproof performance, any test position of instrument and equipment can be placed in, it is influenced by extraneous factor small, is particularly suitable for the real-time monitoring of aircraft corrosion condition under the micro- liquid film environment of high humidity with high salt.A variety of disadvantages such as passive measurement signal is weak before the present invention can make up for it, stability is poor, the service life is short, the response time is long, and the chlorine ion concentration under micro- liquid film state is measured, it can be applied to aircraft salt air corrosion and protection, improve aircraft service life.
Description
Technical field
The present invention relates to chloride ion sensor field more particularly to a kind of chloride ion sensors based on Fick diffusion law
And its method.
Background technique
Corrosion is one of the principal mode of Flight Vehicle Structure damage, accounts for the 20% of entire infrastructure damage.Flight Vehicle Structure is rotten
Erosion is the accumulation chemical loss and break that component is occurred under the micro- liquid film environment of atmospheric corrosion by chemistry or electrochemical action
It is bad.In corrosion early period of origination, corrosion location is difficult to detect, will more than other lesion developments if not being controlled after its germinating
Fastly, more serious.The corrosion damage of aircraft directly affects the rate of attendance of aircraft, more drastically influences the life peace of pilot
Entirely.Therefore, it is necessary to take positive safeguard procedures, aircraft extent of corrosion is estimated ahead of time, to reduce aircraft maintenance cost and keep away
Exempt from the generation of tragedy.
Deposits in Eastern Coastal China area is either civilian or military aircraft, due to for a long time high salt fog, high humility etc. it is severe,
Aerial mission is executed under complex environment, aircraft surface even cockpit is not suffering from various corruption all the time
Erosion.These corrosion are in early period of origination human eye overview less than until discovery, aircraft surface has been had been subjected to seriously
Corrosion, this will reduce the service life of aircraft, and the life safety that will seriously threaten pilot significantly.
Currently, China to the corrosion protection of aircraft also only to seal water proof and based on body inspects periodically, tradition inspection
Survey mode efficiency is lower, high expensive, assesses the corruption of aircraft etc. although also having been reported that through technologies such as ultrasound, infrared imagings
Erosion situation, but these methods are all just to have detected corrosion location, low efficiency in the case where aircraft has been corroded and has compared serious conditions
Lower and higher cost.The etching detection to aircraft domestic at present is mainly based on pH value, since chloride ion is to aircraft
Corrosion rate is lower than hydrogen ion to the corrosion rate of aircraft, so not starting to grind always to the corrosion protection of chloride ion both at home and abroad
Study carefully, but corrosion rate of the chloride ion to aircraft in coastal environments, this with high salt, high humidity of island environment, weak acid environment
It is almost multiplied, there is an urgent need to the sensors that a kind of pair of chlorine ion concentration is monitored in aircraft.
Summary of the invention
The technical problem to be solved by the present invention is to provide one kind and be based on for defect involved in background technique
The chloride ion sensor and its method of Fick diffusion law.
The present invention uses following technical scheme to solve above-mentioned technical problem:
Miniature chloride ion sensor based on Fick diffusion law includes polyimide substrate, auxiliary electrode, impression
Electrode, reference electrode and to electrode；
The auxiliary electrode experiences electrode, reference electrode, is arranged on the polyimide substrate to electrode,
Comprising sensitive member, conducting wire and the solder joint being connected by conducting wire with sensitive member；
The sensitivity member for experiencing electrode is in interdigitated；The sensitivity member of the auxiliary electrode is in rectangle, which is provided with and is used for
Place the groove for experiencing electrode sensitive member；The sensitive member for experiencing electrode is placed in the groove of the sensitive member of auxiliary electrode；
It is the reference electrode, in long strip to the sensitivity member of electrode, it is separately positioned on the sensitive member two of the auxiliary electrode
Side first side of two sides sensitive with auxiliary electrode is parallel, and vertical with the interdigital length direction for experiencing the sensitive member of single machine；
The sensitivity member of the auxiliary electrode, the sensitivity member for experiencing electrode, the sensitive member of reference electrode include from bottom to up
Ti adhesion layer, Pt electrode layer and Au film layer；The sensitivity member to electrode includes Ti adhesion layer and Pt electrode from bottom to up
Layer；
It is thin that Ag is coated in the sensitivity member of the sensitivity of the auxiliary electrode is first, experiences electrode sensitivity member, reference electrode
Film layer, and AgCl film layer is coated in Ag film layer；
The auxiliary electrode experiences electrode, reference electrode, to not contacting between electrode.
As the present invention is based on the miniature further prioritization scheme of chloride ion sensor of Fick diffusion law, the impressions
The interdigital number of the sensitivity member of electrode is 3, and interdigital width is 5 μm, and interdigital spacing is 1mm, and interdigital length is 3mm；The impression electricity
The conducting wire line width of pole is 70 μm, and the solder joint for experiencing electrode is the rectangle of 1*1.5mm；
The rectangle that the sensitivity member of the auxiliary electrode is 8*4mm；Auxiliary electrode is sensitive first and experiences electrode sensitive member
Distance is 5 μm；The conducting wire line width of the auxiliary electrode is 70 μm, and the auxiliary electrode solder joint is the rectangle of 1*1.5mm；
The rectangle that the sensitivity member of the reference electrode is 70*3000 μm；The sensitive member of reference electrode and auxiliary electrode are sensitive
The distance between member is 70 μm；The reference electrode conducting wire line width is 70 μm, and the reference electrode solder joint is the rectangular of 1*1.5mm
Shape；
The rectangle that the sensitivity member to electrode is 70*3000 μm；It is described sensitive with auxiliary electrode to electrode sensitive member
The distance between member is 70 μm；Described is 70 μm to electrode cable line width, the rectangle for being 1*1.5mm to electrode pads.
As the present invention is based on the miniature further prioritization schemes of chloride ion sensor of Fick diffusion law, also comprising the
One to the 4th connector；
One end of first to fourth connector respectively with auxiliary electrode, experience electrode, reference electrode, Pt to electrode
Solder joint is connected, and the other end is used to be connected with the external world；
The auxiliary electrode experiences electrode, reference electrode, Pt to being equipped with insulating layer on the conducting wire and solder joint of electrode.
Originally it returns and discloses a kind of measurement method of miniature chloride ion sensor with this based on Fick diffusion law, include
Following steps:
Step 1), setting current source, function generator and potential test device, wherein the control of current source terminates function
Generator generates isopulse constant current by function generator, and the anode of current source connects the solder joint to electrode, and current source is born
Pole connects the solder joint of auxiliary electrode；The anode of potential test device connects the solder joint for experiencing electrode, and the cathode of potential test device connects ginseng
Than the solder joint of electrode；
Step 2) obtains the potential curve that electrode is experienced in miniature chloride ion sensor by potential test device measurement；
Step 3) obtains the derivative curve of potential curve to potential curve derivation, enables the derivative curve peak value corresponding time
For transit time τ；
Step 4) calculates the chlorine ion concentration C that miniature chloride ion sensor measures according to the following formula* O:
In formula, DOIt is chloride diffusion coefficient, A is the surface area of auxiliary electrode, and F is a farad accommodation coefficient, and I is that current source is applied
The electric current added.
The invention also discloses a kind of preparation methods for being somebody's turn to do the miniature chloride ion sensor based on Fick diffusion law, include
Following steps:
Step A), Ti adhesion layer, Pt electrode layer are successively sputtered on polyimide substrate using magnetron sputtering method；
Step B), using the polyimide substrate based on photoetching technique after sputtering Ti adhesion layer, Pt electrode layer
Above carry out line pattern transfer, formed reference electrode, experience electrode, auxiliary electrode, to electrode in Ti adhesion layer and Pt electrode
Pattern on layer；
Step C), using electric plating method reference electrode, experience electrode, auxiliary electrode pattern Pt electrode layer it is enterprising
Row plating Au, forms Au film layer；
Step D), using electric plating method in reference electrode, experience and be electroplated in the Au film layer of electrode, auxiliary electrode
Ag forms Ag film layer；
Step E), using electric plating method in reference electrode, experience and be electroplated in the Ag film layer of electrode, auxiliary electrode
AgCl forms AgCl film layer.
The invention adopts the above technical scheme compared with prior art, has following technical effect that
Stability of the present invention is high, sensitivity is good, can carry out real-time monitoring, solution to chloride ion in faintly acid salt mist environment
Determined current atmospheric monitoring based on traditional monitoring website, website is few, area coverage is few, data update real-time it is poor, can not
Actual response goes out the problem of real air quality information that people contact at one's side.
Detailed description of the invention
Fig. 1 is the overall structure diagram of miniature chloride ion sensor provided by the invention.
Fig. 2 is the partial enlarged view in Fig. 1 at A；
Fig. 3 is miniature chloride ion sensor sputtering provided by the invention, lithography solution figure；
Fig. 4 is that chloride ion sensor provided by the invention tests circuit connection diagram；
Fig. 5 is miniature chloride ion sensor pulse current function figure provided by the invention；
Fig. 6 is miniature chloride ion sensor Nernst theoretical potential curve graph provided by the invention；
Fig. 7 be the miniature chloride ion sensor of the embodiment of the present invention respectively 0.1,0.3,0.5,0.7,1mol/L chloride ion it is dense
Spend the graph of relation that potential value and time obtain after signal processing under the conditions of micro- liquid film；
Fig. 8 be the miniature chloride ion sensor of the embodiment of the present invention respectively 0.1,0.3,0.5,0.7,1mol/L chloride ion it is dense
Spend test result derivative figure under the conditions of micro- liquid film；
Fig. 9 be the miniature chloride ion sensor of the embodiment of the present invention respectively 0.1,0.3,0.5,0.7,1mol/L chloride ion it is dense
It spends micro- liquid film condition and carries out the ten transit time calibration curves and theoretical equation comparison diagram for testing to obtain.
In figure, sensitivity member of the 1- to electrode, conducting wire of the 2- to electrode, solder joint of the 3- to electrode, the sensitivity of 4- auxiliary electrode
Member, the conducting wire of 5- auxiliary electrode, the solder joint of 6- auxiliary electrode, 7- experience the sensitivity member of electrode, and 8- experiences the conducting wire of electrode, 9-
Experience the solder joint of electrode, the sensitivity of 10- reference electrode is first, the conducting wire of 11- reference electrode, the solder joint of 12- reference electrode, and 13- is poly-
Acid imide sheet substrate.
Specific embodiment
Technical solution of the present invention is described in further detail with reference to the accompanying drawing:
The present invention can be embodied in many different forms, and should not be assumed that be limited to the embodiments described herein.On the contrary,
It is thorough and complete to these embodiments are provided so that the disclosure, and model of the invention will be given full expression to those skilled in the art
It encloses.In the accompanying drawings, for the sake of clarity it is exaggerated component.
As shown in Figure 1, the invention discloses a kind of miniature chloride ion sensor based on Fick diffusion law, includes polyamides
Imines sheet substrate, auxiliary electrode experience electrode, reference electrode and to electrode；
The auxiliary electrode experiences electrode, reference electrode, is arranged on the polyimide substrate to electrode,
Comprising sensitive member, conducting wire and the solder joint being connected by conducting wire with sensitive member；
As shown in Fig. 2, the sensitivity member for experiencing electrode is in interdigitated；The sensitivity member of the auxiliary electrode is in rectangle,
It is equipped with for placing the groove for experiencing electrode sensitive member；The sensitive member for experiencing electrode is placed on the sensitive member of auxiliary electrode
In groove；
It is the reference electrode, in long strip to the sensitivity member of electrode, it is separately positioned on the sensitive member two of the auxiliary electrode
Side first side of two sides sensitive with auxiliary electrode is parallel, and vertical with the interdigital length direction for experiencing the sensitive member of single machine；
The sensitivity member of the auxiliary electrode, the sensitivity member for experiencing electrode, the sensitive member of reference electrode include from bottom to up
Ti adhesion layer, Pt electrode layer and Au film layer；The sensitivity member to electrode includes Ti adhesion layer and Pt electrode from bottom to up
Layer；
It is thin that Ag is coated in the sensitivity member of the sensitivity of the auxiliary electrode is first, experiences electrode sensitivity member, reference electrode
Film layer, and AgCl film layer is coated in Ag film layer；
The auxiliary electrode experiences electrode, reference electrode, to not contacting between electrode.
As the present invention is based on the miniature further prioritization scheme of chloride ion sensor of Fick diffusion law, the impressions
The interdigital number of the sensitivity member of electrode is 3, and interdigital width is 5 μm, and interdigital spacing is 1mm, and interdigital length is 3mm；The impression electricity
The conducting wire line width of pole is 70 μm, and the solder joint for experiencing electrode is the rectangle of 1*1.5mm；
The rectangle that the sensitivity member of the auxiliary electrode is 8*4mm；Auxiliary electrode is sensitive first and experiences electrode sensitive member
Distance is 5 μm；The conducting wire line width of the auxiliary electrode is 70 μm, and the auxiliary electrode solder joint is the rectangle of 1*1.5mm；
The rectangle that the sensitivity member of the reference electrode is 70*3000 μm；The sensitive member of reference electrode and auxiliary electrode are sensitive
The distance between member is 70 μm；The reference electrode conducting wire line width is 70 μm, and the reference electrode solder joint is the rectangular of 1*1.5mm
Shape；
The rectangle that the sensitivity member to electrode is 70*3000 μm；It is described sensitive with auxiliary electrode to electrode sensitive member
The distance between member is 70 μm；Described is 70 μm to electrode cable line width, the rectangle for being 1*1.5mm to electrode pads.
As the present invention is based on the miniature further prioritization schemes of chloride ion sensor of Fick diffusion law, also comprising the
One to the 4th connector；
One end of first to fourth connector respectively with auxiliary electrode, experience electrode, reference electrode, Pt to electrode
Solder joint is connected, and the other end is used to be connected with the external world；
The auxiliary electrode experiences electrode, reference electrode, Pt to being equipped with insulating layer on the conducting wire and solder joint of electrode.
The invention also discloses a kind of preparation methods for being somebody's turn to do the miniature chloride ion sensor based on Fick diffusion law, include
Following steps:
Step A), Ti adhesion layer, Pt electrode layer are successively sputtered on polyimide substrate using magnetron sputtering method；
Step B), using the polyimide substrate based on photoetching technique after sputtering Ti adhesion layer, Pt electrode layer
Above carry out line pattern transfer, formed reference electrode, experience electrode, auxiliary electrode, to electrode in Ti adhesion layer and Pt electrode
Pattern on layer；
Step C), using electric plating method reference electrode, experience electrode, auxiliary electrode pattern Pt electrode layer it is enterprising
Row plating Au, forms Au film layer；
Step D), using electric plating method in reference electrode, experience and be electroplated in the Au film layer of electrode, auxiliary electrode
Ag forms Ag film layer；
Step E), using electric plating method in reference electrode, experience and be electroplated in the Ag film layer of electrode, auxiliary electrode
AgCl forms AgCl film layer.
The polyimide substrate is the rectangular structure base board of 15*10*1mm.Material used in the polyimide substrate
Material is polyimides (Polyimide, PI), and polyimides (PI) has high temperature resistant (up to 400 DEG C), excellent mechanical performance, height
Radiation-resistant property, good soda acid chemical stability and the advantages that flexibility.Polyimides is used to sense as chloride ion
Device baseplate material can be improved sensor use temperature range, and reducing extraneous corrosive environment influences chloride ion sensor, improve
Stability and reliability of the sensor under complex environment.Furthermore polyimides is flexible material, can widen chloride ion sensing
Device application field and application range.
Fig. 3 is miniature chloride ion sensor sputtering provided by the invention, lithography solution figure.
Originally it returns and discloses a kind of measurement method of miniature chloride ion sensor with this based on Fick diffusion law, include
Following steps:
Step 1), as shown in figure 4, setting current source, function generator and potential test device, wherein the control of current source
System termination function generator generates isopulse constant current by function generator, and the anode of current source connects the solder joint to electrode,
The cathode of current source connects the solder joint of auxiliary electrode；The anode of potential test device connects the solder joint for experiencing electrode, potential test device
Cathode connect the solder joint of reference electrode；
Step 2) obtains the potential curve that electrode is experienced in miniature chloride ion sensor by potential test device measurement；
Step 3) obtains the derivative curve of potential curve to potential curve derivation, enables the derivative curve peak value corresponding time
For transit time τ；
Step 4) calculates the chlorine ion concentration C that miniature chloride ion sensor measures according to the following formula* O:
In formula, DOIt is chloride diffusion coefficient, A is the surface area of auxiliary electrode, and F is a farad accommodation coefficient, and I is that current source is applied
The electric current added.
Fig. 5 is miniature chloride ion sensor pulse current function figure provided by the invention；Referring to Fig. 5, the pulse current
For direct current signal, and it is identical to change over time rule；Pulse current is timing, and sensor starts measurement and obtains a current potential at any time
Between the S type curve that changes, a corresponding transit time is calculated by test interface in software, and pulse current is negative
When, sensor stays cool, and current potential gradually returns to zero fluctuation；
Fig. 6 is miniature chloride ion sensor Nernst theoretical potential curve graph provided by the invention；Referring to Fig. 6, τ be chlorine from
The transit time of sub- concentration, theoretically as t=τ, current potential is infinity, is shown as measuring device potential threshold in figure；
Fig. 7 be the miniature chloride ion sensor of the embodiment of the present invention respectively 0.1,0.3,0.5,0.7,1mol/L chloride ion it is dense
Spend the graph of relation that potential value and time obtain after signal processing under the conditions of micro- liquid film；Referring to Fig. 7, the sensor exists
The potential-time curve measured under micro- liquid film environment is S type curve, and with the raising of concentration, S type curve is gradually moved back,
And concentration is higher, curve is more smooth, and point of inflexion on a curve (transit time) is more clear；
Fig. 8 be the miniature chloride ion sensor of the embodiment of the present invention respectively 0.1,0.3,0.5,0.7,1mol/L chloride ion it is dense
Spend test result derivative figure under the conditions of micro- liquid film；Referring to Fig. 8, the sensor is respectively in 0.1,0.3,0.5,0.7,1mol/L
Test result derivative curve peak value under the conditions of the micro- liquid film of chlorine ion concentration is it is obvious that can seek derivative by automatic peak-seeking function
The peak value of curve, peak value are transit time value；
Fig. 9 be the miniature chloride ion sensor of the embodiment of the present invention respectively 0.1,0.3,0.5,0.7,1mol/L chloride ion it is dense
It spends micro- liquid film condition and carries out the ten transit time calibration curves and theoretical equation comparison diagram for testing to obtain；Referring to Fig. 9, the biography
The transit time calibration curve that sensor takes multiple measurements is identical as theoretical equation rule, and stability is preferable.
Those skilled in the art can understand that unless otherwise defined, all terms used herein (including skill
Art term and scientific term) there is meaning identical with the general understanding of those of ordinary skill in fields of the present invention.Also
It should be understood that those terms such as defined in the general dictionary should be understood that have in the context of the prior art
The consistent meaning of meaning will not be explained in an idealized or overly formal meaning and unless defined as here.
Above-described specific embodiment has carried out further the purpose of the present invention, technical scheme and beneficial effects
It is described in detail, it should be understood that being not limited to this hair the foregoing is merely a specific embodiment of the invention
Bright, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the present invention
Protection scope within.
Claims (5)
1. the miniature chloride ion sensor based on Fick diffusion law, which is characterized in that include polyimide substrate, auxiliary
Electrode experiences electrode, reference electrode and to electrode；
The auxiliary electrode experiences electrode, reference electrode, is arranged on the polyimide substrate to electrode, wraps
Containing sensitive member, conducting wire and the solder joint being connected by conducting wire with sensitive member；
The sensitivity member for experiencing electrode is in interdigitated；The sensitivity member of the auxiliary electrode is in rectangle, be which is provided with for placing
Experience the groove of electrode sensitive member；The sensitive member for experiencing electrode is placed in the groove of the sensitive member of auxiliary electrode；
It is the reference electrode, in long strip to the sensitivity member of electrode, be separately positioned on the sensitive first two sides of the auxiliary electrode and
The side of the sensitive first two sides of auxiliary electrode is parallel, and vertical with the interdigital length direction for experiencing the sensitive member of single machine；
The sensitivity member of the auxiliary electrode, the sensitivity member for experiencing electrode, the sensitivity member of reference electrode are viscous comprising Ti from bottom to up
Attached layer, Pt electrode layer and Au film layer；The sensitivity member to electrode includes Ti adhesion layer and Pt electrode layer from bottom to up；
It is coated with Ag film layer in the sensitivity member of the sensitivity of the auxiliary electrode is first, experiences electrode sensitivity member, reference electrode,
And AgCl film layer is coated in Ag film layer；
The auxiliary electrode experiences electrode, reference electrode, to not contacting between electrode.
2. the miniature chloride ion sensor according to claim 1 based on Fick diffusion law, which is characterized in that the sense
Interdigital number by the sensitivity member of electrode is 3, and interdigital width is 5 μm, and interdigital spacing is 1mm, and interdigital length is 3mm；The impression
The conducting wire line width of electrode is 70 μm, and the solder joint for experiencing electrode is the rectangle of 1*1.5mm；
The rectangle that the sensitivity member of the auxiliary electrode is 8*4mm；The sensitive member of auxiliary electrode and the distance for experiencing electrode sensitive member
It is 5 μm；The conducting wire line width of the auxiliary electrode is 70 μm, and the auxiliary electrode solder joint is the rectangle of 1*1.5mm；
The rectangle that the sensitivity member of the reference electrode is 70*3000 μm；The sensitive member of reference electrode sensitive member with auxiliary electrode
Between distance be 70 μm；The reference electrode conducting wire line width is 70 μm, and the reference electrode solder joint is the rectangle of 1*1.5mm；
The rectangle that the sensitivity member to electrode is 70*3000 μm；It is described to sensitive with the auxiliary electrode member of electrode sensitive member it
Between distance be 70 μm；Described is 70 μm to electrode cable line width, the rectangle for being 1*1.5mm to electrode pads.
3. the miniature chloride ion sensor according to claim 1 based on Fick diffusion law, which is characterized in that also include
First to fourth connector；
One end of first to fourth connector respectively with auxiliary electrode, experience electrode, reference electrode, Pt to the solder joint of electrode
It is connected, the other end is used to be connected with the external world；
The auxiliary electrode experiences electrode, reference electrode, Pt to being equipped with insulating layer on the conducting wire and solder joint of electrode.
4. based on the measurement method of the miniature chloride ion sensor described in claim 1 based on Fick diffusion law, feature
It is comprising the steps of:
Step 1), setting current source, function generator and potential test device, wherein the control of current source terminates function
Device generates isopulse constant current by function generator, and the anode of current source connects the solder joint to electrode, and the cathode of current source connects
The solder joint of auxiliary electrode；The anode of potential test device connects the solder joint for experiencing electrode, and the cathode of potential test device connects reference electricity
The solder joint of pole；
Step 2) obtains the potential curve that electrode is experienced in miniature chloride ion sensor by potential test device measurement；
Step 3) obtains the derivative curve of potential curve to potential curve derivation, enables the derivative curve peak value corresponding time be
Cross time τ；
Step 4) calculates the chlorine ion concentration C that miniature chloride ion sensor measures according to the following formula* O:
In formula, DOIt is chloride diffusion coefficient, A is the surface area of auxiliary electrode, and F is a farad accommodation coefficient, and I is that current source applies
Electric current.
5. based on the preparation method of the miniature chloride ion sensor described in claim 1 based on Fick diffusion law, feature
It is comprising the steps of:
Step A), Ti adhesion layer, Pt electrode layer are successively sputtered on polyimide substrate using magnetron sputtering method；
Step B), using the polyimide thereon based on photoetching technique after sputtering Ti adhesion layer, Pt electrode layer
Carry out line pattern transfer, formed reference electrode, experience electrode, auxiliary electrode, to electrode on Ti adhesion layer and Pt electrode layer
Pattern；
Step C), using electric plating method reference electrode, experience electrode, auxiliary electrode pattern Pt electrode layer on carry out electricity
Au is plated, Au film layer is formed；
Step D), using electric plating method in reference electrode, experience and carry out plating Ag in the Au film layer of electrode, auxiliary electrode,
Form Ag film layer；
Step E), using electric plating method in reference electrode, experience and be electroplated in the Ag film layer of electrode, auxiliary electrode
AgCl forms AgCl film layer.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040118682A1 (en) * | 2002-12-11 | 2004-06-24 | Murray George M. | Techniques for sensing chloride ions in wet or dry media |
| CN104515732A (en) * | 2014-12-19 | 2015-04-15 | 北京科技大学 | Hydrogen permeability testing device for metal material under high liquid pressure |
| CN106990032A (en) * | 2017-02-24 | 2017-07-28 | 中交四航工程研究院有限公司 | Concrete under chloride environment structural life-time Forecasting Methodology based on prototype monitoring data |
| CN107907474A (en) * | 2017-11-20 | 2018-04-13 | 江苏科技大学 | A kind of novel sensor and its manufacture method and implementation |
| CN109001273A (en) * | 2018-06-22 | 2018-12-14 | 南京航空航天大学 | A kind of minisize pH sensor and preparation method thereof |
| CN210401309U (en) * | 2019-04-01 | 2020-04-24 | 南京航空航天大学 | Miniature chloride ion sensor based on Fick diffusion law |
-
2019
- 2019-04-01 CN CN201910255197.6A patent/CN110018215B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040118682A1 (en) * | 2002-12-11 | 2004-06-24 | Murray George M. | Techniques for sensing chloride ions in wet or dry media |
| CN104515732A (en) * | 2014-12-19 | 2015-04-15 | 北京科技大学 | Hydrogen permeability testing device for metal material under high liquid pressure |
| CN106990032A (en) * | 2017-02-24 | 2017-07-28 | 中交四航工程研究院有限公司 | Concrete under chloride environment structural life-time Forecasting Methodology based on prototype monitoring data |
| CN107907474A (en) * | 2017-11-20 | 2018-04-13 | 江苏科技大学 | A kind of novel sensor and its manufacture method and implementation |
| CN109001273A (en) * | 2018-06-22 | 2018-12-14 | 南京航空航天大学 | A kind of minisize pH sensor and preparation method thereof |
| CN210401309U (en) * | 2019-04-01 | 2020-04-24 | 南京航空航天大学 | Miniature chloride ion sensor based on Fick diffusion law |
Non-Patent Citations (4)
| Title |
|---|
| JEFF DEMO 等: "Development of a Wireless Miniaturized Smart Sensor Network for Aircraft Corrosion Monitoring", IEEE, pages 1 - 9 * |
| O. DOLGIKH 等: "Influence of the electrolyte film thickness and NaCl concentration onthe oxygen reduction current on platinum", CORROSION SCIENCE, vol. 102, pages 338, XP029323638, DOI: 10.1016/j.corsci.2015.10.025 * |
| 安清波 等: "全固态离子选择性电极研究进展", 中国科学: 化学, vol. 47, no. 5, pages 524 - 531 * |
| 张颖 等: "海岛盐雾含量自动测量***设计", 传感器与微***, vol. 37, no. 1, pages 102 - 107 * |
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