CN109990710A - Bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method and device - Google Patents
Bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method and device Download PDFInfo
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- CN109990710A CN109990710A CN201910320390.3A CN201910320390A CN109990710A CN 109990710 A CN109990710 A CN 109990710A CN 201910320390 A CN201910320390 A CN 201910320390A CN 109990710 A CN109990710 A CN 109990710A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
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Abstract
Bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method and device disclosed by the invention belong to confocal microscopic imaging, inertial confinement fusion and accurate technical field of electro-optical measurement.The present invention is by the bilateral dislocation differential confocal technology of laser in conjunction with three-dimensional revolving scanning technology, accurate chromatography fixed-focus is carried out using inner and outer surfaces of the bilateral dislocation differential confocal technology of laser to laser fusion target shell, orthogonal revolution driving is carried out to pellet using three-dimensional revolving scanning technology, the parameters such as radius of curvature, surface circle contour and three-D profile, shell thickness and its distributed in three dimensions on acquisition pellet inside/outside surface are resolved and reconstructed by the fixed-focus information to pellet surfaces externally and internally each point, realize target capsule of fusion geometric parameter composite measurement.The present invention can screen for inertial confinement fusion Simulating Test Study, pellet Study on Preparation and pellet and provide data basis and detection means.
Description
Technical field
The invention belongs to confocal microscopic imaging, inertial confinement fusion and accurate technical field of electro-optical measurement, will swash
The bilateral dislocation differential confocal technology of light is related to a kind of confocal laser nuclear fusion pellet geometric parameters in conjunction with three-dimensional revolving scanning technology
Number synthesis measurement method and device are widely used in inertial confinement fusion, high-energy physics and Precision measurement field
Prospect.
Background technique
Inertial confinement fusion (ICF) is that the important means of manual simulation's nuclear blast and cosmogony and the mankind visit
The important directions of rope future clean energy resource, therefore there is particularly significant scientific research and Practical significance.Inertial confinement fusion is real
In testing, the hollow laser fusion target of inside filling deuterium tritium (DT) gas is its core devices, multi-path laser simultaneously to pellet into
The centripetal compression ignition of line convergence causes nuclear blast, and the quality of laser fusion target is to determine whether laser-produced fusion experiment successfully closes
Key.One main cause of the ICF test failure that American National igniter (NIF) carries out is that pellet is asymmetric in ignition process
Compress and then cause the reduction of its center pressure and temperature and its internal deuterium tritium (DT) fuel to mix unbalanced, pellet shell and table
The tiny flaw in face is likely to be amplified the asymmetric compression of generation and then leads to loss of ignition.Therefore precise measurement laser-produced fusion
The geometrical morphology and physical attribute parameter of pellet are for guaranteeing that the success of inertial confinement fusion experiment is of great significance.
At present in the world for the parameter measurement of laser fusion target geometrical morphology method mainly use all kinds of microscopes into
Row observation, including scanning electron microscope method, atomic force microscopy, x-ray method, optical fiber point-diffraction method and interferometry etc., the above method
Measurement resolution has reached nanometer scale, but can only carry out nondestructive measurement to pellet outer surface profile (measurement inner surface is logical at present
Measured after crossing destructive cutting), and it is helpless for the inner geometries parameter such as the Internal periphery of pellet, shell thickness.
With the development of inertial confinement fusion technology and the propulsion of engineering, the above method can no longer meet laser
The demand that inertial confinement fusion technical research measures pellet geometry and profile parameters, is primarily present following problem:
1) it is unable to nondestructive measurement pellet inner parameter, existing method needs to carry out pellet destructive cutting, target after measurement
Ball, which is destroyed, can not be applied to next step process or Targeting；
2) different parameters measurement process separates, and cannot disclose the knot occurred during pellet preparation and nuclear fusion reaction comprehensively
Structure variation phenomenon and rule；
3) composite measurement scarce capacity, every kind of instrument are only capable of measuring one, two kind of parameter, and pellet comprehensive parameter measuring need to be not
With adjustment repeatedly on instrument, inefficiency and magnitude benchmark disunity.
And in inertial confinement fusion research, the parameter of pellet is analog simulation to be carried out to nuclear fusion process and to target
The basis that ball preparation process is promoted, therefore how high-precision, lossless comprehensive survey are carried out to pellet geometry and profile parameters
Amount is the key technical problem in inertial confinement fusion country Important Project.
Confocal laser technology have unique optical tomography characteristic, it can be achieved that the shell surfaces externally and internally of pellet it is high-precision
Degree chromatography fixed-focus measurement, the high-precision nondestructive measurement for pellet geometry and profile parameters provide thinking.Based on this, the present invention is mentioned
A kind of bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method and device out, innovation are: by bilateral mistake
Position differential confocal chromatography fixed-focus technology and three-dimensional revolving scanning technology are introduced into pellet geometry and profile parameters measurement, in the world
On realize for the first time pellet Internal periphery nondestructive measurement and inside/outside surface curvature radius, inside/outside surface circle contour and three-D profile,
The geometric profiles parametric synthesis such as shell thickness and its distributed in three dimensions measurement.
Summary of the invention
It is difficult that the purpose of the present invention is to solve inertial confinement fusion pellet geometric parameter high-precision composite measurements
Topic provides a kind of bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method and device, to realize pellet
The parameters such as inside/outside surface curvature radius, inside/outside surface circle contour and three-D profile, shell thickness and its distributed in three dimensions, realize core
Target capsule of fusion geometric parameter composite measurement.
The present invention can provide effective technological means for the comprehensive detection of laser fusion target parameter, prepared by pellet,
Laser fusion experiment simulation, data analysis and technological innovation are of great significance.
The purpose of the present invention is what is be achieved through the following technical solutions.
Bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method of the invention, utilizes the bilateral dislocation of laser
Differential confocal technology carries out accurate chromatography fixed-focus to the inner and outer surfaces of target capsule of fusion shell, utilizes three-dimensional revolving scanning technology pair
Target capsule of fusion carries out orthogonal revolution driving, is gathered in conjunction with the bilateral dislocation differential confocal technology of laser and three-dimensional revolving scanning technology
Become the geometry and profile parameters composite measurement of pellet, the target capsule of fusion geometry and profile parameters include inner and outer surfaces curvature half
Diameter, inside/outside surface circle contour and three-D profile, shell thickness and its distributed in three dimensions, comprising the following steps:
Step 1: light-source system is collimated light beam by collimation lens collimation, collimated light beam is tested after spectroscope transmits
Amount object lens are converted into a bit, illuminate and reflected to target capsule of fusion；The reflected beams of target capsule of fusion information are carried through survey
Be split mirror reflection after amount object lens, and concentrated mirror, which enters, laterally subtracts each other confocal detection system；
Step 2: Measurement and Control System control object lens drive system drives measurement object lens to carry out axial sweep to target capsule of fusion
It retouches, is overlapped the focus of measuring beam with the outer surface vertex position of target capsule of fusion；It is scanned near outer surface vertices position poly-
The outer surface for becoming pellet will laterally subtract each other the confocal spy of big dummy pinhole of big dummy pinhole detection domain detection in confocal detection system
Linearity curve IB(z) and small dummy pinhole detects the confocal characteristic curve I of small dummy pinhole that domain is detectedS(z) it carries out subtracting each other processing,
Obtain the confocal characteristic curve I (z) of sharpening=I of halfwidth compressionS(z)-γIB(z), wherein z be axial coordinate, γ be adjust because
Son；
Step 3: confocal characteristic curve will be sharpened, transversely coordinate translation S obtains the confocal characteristic curve of translation sharpening, and makes
It sharpens confocal characteristic curve and translation sharpens confocal characteristic side and crosses；It is sharpened to sharpening confocal characteristic curve and translating
After confocal characteristic curve carries out the processing of same abscissa point interpolation respectively, then subtracted each other point by point processing obtain dislocation subtract each other it is differential total
Burnt characteristic curve ID(z)=I (z)-I (z ,-S) subtracts each other differential confocal characteristic to dislocation using differential confocal linear fit straight line
The linear segment data of curve carries out straight line fitting, is moved back by reversely moving back the position differential confocal linear fit straight line S/2
Differential confocal fitting a straight line, and measurement light is determined using the displacement fitting a straight line zero point of return differential confocal fitting a straight line come accurate
Beam fixed-focus is overlapped with target capsule of fusion appearance vertex of surface, and then determines target capsule of fusion outer surface vertex position Zo；
Step 4: Measurement and Control System control object lens drive system drives measurement object lens to carry out axial sweep to target capsule of fusion
It retouches, is overlapped the focus of measuring beam with the inner surface vertex of target capsule of fusion and sphere center position respectively, repeat step 3, successively
Inner surface vertex and the sphere center position Z of optical axis direction are corresponded to target capsule of fusioniAnd Zc, target capsule of fusion can be obtained and correspond to optical axis side
To outer, Inner surface measurement point and the centre of sphere axial optical coordinate Zo,ZiAnd Zc；
Step 5: outer surface and the sphere center position coordinate Z of the target capsule of fusion obtained to fixed-focus measurementoAnd ZcSubtracted each other i.e.
Obtain the outer surface curvature radius R of target capsule of fusiono；
Step 6: by the Shell Materials refractive index n and outer surface curvature radius R of target capsule of fusionoIt brings following formula into, calculates
Obtain the thickness t of the shell optical axis direction of target capsule of fusion；
Wherein NA is the numerical aperture for measuring object lens；
Step 7: utilizing the optical coordinate Z of the outer of target capsule of fusion, inner surface and the centre of sphereo,ZiAnd ZcIt can be counted with thickness t
It calculates and obtains the outer of target capsule of fusion, inner surface physical coordinates zo,ziWith interior surface curvature radius Ri:
Step 8: being carried out horizontal rotation one week using gyroscopic drive system driving target capsule of fusion, on the horizontal circumference of pellet
Each position repeat step 2 to step 7, successively obtain the surfaces externally and internally physical coordinates point of target capsule of fusion horizontal plane circumference
Gather (zo,zi)i；
Step 9: carrying out the orthogonal revolution driving of stepping using orthogonal rotary system driving target capsule of fusion, every drive moves a step again
Multiple step 2 successively obtains surfaces externally and internally three dimensional physical the coordinate point set { [(z of target capsule of fusion to step 8o,zi)i]j}；
Step 10: computer is to three dimensional physical coordinate point set { [(zo,zi)i]jCarry out three-dimensionalreconstruction and calculate to obtain
The inside/outside surface curvature radius of pellet, inside/outside surface circle contour and three-D profile, shell thickness and its distributed in three dimensions.
Bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method of the invention, it is confocal by laterally subtracting each other
Detection system obtains sharpening confocal characteristic process as follows:
A) during measuring objective scan, measurement Airy is detected by ccd detector, to measure the center of gravity of Airy
Centered on, on the every frame detection image of ccd detector optimum option a certain size big dummy pinhole detect domain, will needle virtual greatly
Intensity in the detection domain of hole in each pixel is integrated, and obtains the confocal characteristic curve of big dummy pinhole；
B) simultaneously centered on the measurement Airy center of gravity of ccd detector detection, one small dummy pinhole is selected to detect domain,
The size in the small dummy pinhole detection domain is less than the big dummy pinhole and detects domain, integrates the intensity in small dummy pinhole detection domain
Obtain the confocal characteristic curve of another small dummy pinhole, the confocal characteristic halfwidth of small dummy pinhole and peak strength are low
In the confocal characteristic curve of big dummy pinhole；
C) by the confocal characteristic curve of big dummy pinhole multiplied by regulatory factor γ, so that the confocal characteristic curve of big dummy pinhole is most
Big light intensity is 1/2 times of the confocal characteristic curve largest light intensity of small dummy pinhole；
D) the confocal characteristic curve of small dummy pinhole is subtracted bent multiplied by the confocal characteristic of big dummy pinhole after regulatory factor γ
Line obtains sharpening confocal characteristic curve；
Calculating process described in above-mentioned steps ten is also by three dimensional physical coordinate point set { [(zo,zi)i]jProgress in
The surfaces externally and internally radius of curvature average value R of target capsule of fusion is calculated in outer surface sphere surface fittingi-veAnd Ro-ve, five He of amendment step
The surfaces externally and internally radius of curvature value R that step 7 is calculatediAnd RoTo improve measurement accuracy.
Bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measurement device of the invention, including light-source system, edge
Light source exit direction be sequentially placed collimation lens, spectroscope, measurement object lens, positioned at light splitting specular reflection direction convergent mirror,
Laterally subtract each other confocal detection system, positioned at the quadrature drive of measurement objective lens exit direction and axis of rotation and measurement light shaft coaxle
Measurement object lens are carried out axially driving object lens and driven by the gyroscopic drive system that system, axis of rotation and measurement optical axis intersect vertically
Dynamic system and the Measurement and Control System for realizing system scanning and data acquisition；
The light-source system include laser, positioned at laser emitting direction light source convergent mirror, be located at light source convergent mirror
The light source pin hole of focal position.
The utility model has the advantages that
1) it proposes to detect laterally to subtract each other using large and small dummy pinhole in confocal measuring system to sharpen confocal characteristic curve,
Using the bilateral dislocation for sharpening confocal resonse characteristic it is differential subtract each other processing realize tested nuclear fusion pellet surfaces externally and internally and
The differential confocal bipolarity fixed-focus of sphere center position measures, so significantly improve differential confocal fixed-focus curve fixed-focus sensitivity and
Signal-to-noise ratio makes nuclear fusion pellet topographical profiles parameter measurement system have more high measurement accuracy.
2) compared to differential confocal measuring device, the present invention improves measurement essence in the case where not increasing hardware cost
Degree.
3) measurement method laterally subtracts each other processing detection by the virtual hot spot detecting area of size, effectively eliminates common-mode noise,
Improve the environment resistant interference performance of measuring system.
4) subtract each other processing acquisition actual zero point using the bilateral dislocation for sharpening confocal resonse characteristic is differential, to tested poly-
Become pellet inner surface and realize accurate chromatography fixed-focus, is able to solve the problem that pellet inner surface is difficult to nondestructive measurement at present.
5) using the bilateral dislocation differential confocal fixed-focus technology of laser to feature locations such as target capsule of fusion inner and outer surfaces and the centre ofs sphere
Precision positioning is carried out, it can be achieved that the geometric parameters composite measurement such as the inside and outside radius of curvature of target capsule of fusion, shell thickness.
6) subtract each other in treatment process using the bilateral dislocation for sharpening confocal resonse characteristic is differential using processing, Neng Gouyou
Effect inhibits the influence of pellet surface properties difference and system source power drift；
7) it is combined using confocal laser fixed-focus technology and three-dimensional revolving scanning technology, it can be to target capsule of fusion surfaces externally and internally wheel
Exterior feature is scanned, while obtaining the integrated informations such as the inside and outside three-D profile of target capsule of fusion and shell distribution.
8) being organically blended by multiple technologies, can same instrument, using principle of uniformity to target capsule of fusion difference
Parameter measures, and measuring basis is unified, measurement accuracy matches, and significantly improves the precision and efficiency of measurement, and can be fusion
The parameter conversion and characterization of pellet provide basis.
Detailed description of the invention
Fig. 1 is the bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method schematic diagram of the present invention；
Fig. 2 is that the confocal characteristic curve of size dummy pinhole of the present invention laterally subtracts each other sharpening schematic diagram；
Fig. 3, which is that the confocal bilateral dislocation of characteristic curve of present invention sharpening is differential, subtracts each other schematic diagram；
Fig. 4 is the bilateral dislocation differential confocal curve linear fitting triggering fixed-focus schematic diagram of the present invention；
Fig. 5 is the bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method schematic diagram of embodiment；
Fig. 6 is the bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measurement device schematic diagram of embodiment laser.
Fig. 7 is laser differential confocal pellet outer surface circle contour experiment curv；
Fig. 8 is laser differential confocal pellet inner surface circle contour experiment curv.
Wherein: 1- light-source system, 2- collimation lens, 3- spectroscope, 4- object lens drive system, 5- measurement object lens, 6- are assembled
Mirror, 7- laterally subtract each other confocal detection system, 8- microcobjective, 9-CCD detector, 10- measurement Airy, the big dummy pinhole of 11-
Detect domain, 12- small dummy pinhole detection domain, 13- target capsule of fusion, 14- quadrature drive system, 15- gyroscopic drive system, 16- survey
The confocal characteristic curve of the big dummy pinhole of differential confocal characteristic curve, 18-, the small virtual needle of 19- are subtracted each other in amount control system, 17- dislocation
The confocal characteristic curve in hole, 20- sharpen confocal characteristic curve, 21- translation sharpens confocal characteristic curve, 22- differential confocal Linear Quasi
Close straight line, 23- fitting a straight line zero point, 24- return differential confocal fitting a straight line, 25- displacement fitting a straight line zero point, 26- laser,
27- light source convergent mirror, 28- light source pin hole, 29- image capturing system, 30- main control computer.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and examples.
The present invention is carried out accurate using inner and outer surfaces of the bilateral dislocation differential confocal technology of laser to 13 shell of target capsule of fusion
Fixed-focus is chromatographed, orthogonal revolution driving is carried out to target capsule of fusion 13 using three-dimensional revolving scanning technology, it is poor in conjunction with the bilateral dislocation of laser
Dynamic confocal technology and three-dimensional revolving scanning technology obtain the geometry and profile parameters composite measurement of target capsule of fusion 13, the fusion target
13 geometry of ball and profile parameters include inner and outer surfaces radius of curvature, inside/outside surface circle contour and three-D profile, shell thickness and
Its distributed in three dimensions.
Embodiment 1
As shown in Figure 1, light-source system 1 selects point light source, the excitation beam of point light source outgoing is by the collimation of collimation lens 2
Collimated light beam, collimated light beam are measured object lens 5 after the transmission of spectroscope 3 and are converted into a bit, illuminated simultaneously to target capsule of fusion 13
It is reflected；The reflected beams of 13 information of target capsule of fusion are carried through the reflection of mirror 3 that is split after measurement object lens 5, concentrated mirror 6 enters
Laterally subtract each other confocal detection system 7.
Measuring process is as follows:
1) Measurement and Control System 16 controls the drive of object lens drive system 4 measurement object lens 5 and carries out axial sweep to target capsule of fusion 13
It retouches, is overlapped the focus of measuring beam with the outer surface vertex position of target capsule of fusion 13；It is scanned near outer surface vertices position
The outer surface of target capsule of fusion 13 will laterally subtract each other the big virtual needle that big dummy pinhole detection domain 11 detects in confocal detection system 7
The confocal characteristic curve 18I in holeB(z) and small dummy pinhole detects the confocal characteristic curve 19I of small dummy pinhole that domain 12 is detectedS
(z) it carries out subtracting each other processing, obtains the confocal characteristic curve 20I (z) of sharpening=I of halfwidth compressionS(z)-γIB(z), wherein z is
Axial coordinate, γ are regulatory factor；
As shown in Fig. 2, by laterally subtract each other confocal detection system 7 obtain sharpening confocal characteristic curve 20 process it is as follows:
A) in measurement 5 scanning process of object lens, measurement Airy 10 is detected by ccd detector 9, to measure Airy 10
Center of gravity centered on, on the every frame detection image of ccd detector 9 optimum option a certain size big dummy pinhole detect domain 11,
The intensity that big dummy pinhole detects in domain 11 in each pixel is integrated, obtains the confocal characteristic curve 18 of big dummy pinhole；
B) simultaneously centered on 10 center of gravity of measurement Airy that ccd detector 9 detects, one small dummy pinhole detection is selected
Domain 12, size are less than big dummy pinhole and detect domain 11, and the intensity for integrating small dummy pinhole detection domain 12 obtains another small void
The quasi- confocal characteristic curve 19 of pin hole, the halfwidth and peak strength of the small confocal characteristic curve 19 of dummy pinhole are below big virtual needle
The confocal characteristic curve 18 in hole；
C) by the confocal characteristic curve 18 of big dummy pinhole multiplied by regulatory factor γ, so that the confocal characteristic curve of big dummy pinhole
18 largest light intensities are 1/2 times of confocal 19 largest light intensity of characteristic curve of small dummy pinhole；
Big dummy pinhole detection domain diameter chooses 11 pixels in the present embodiment, and small dummy pinhole detection domain diameter chooses 5
A pixel, takes γ=0.5.
D) the confocal characteristic curve 19 of small dummy pinhole is subtracted multiplied by the confocal characteristic of big dummy pinhole after regulatory factor γ
Curve 18 obtains sharpening confocal characteristic curve 20.
2) as shown in figure 3, confocal characteristic curve 20 will be sharpened, transversely coordinate translation S obtains the confocal characteristic song of translation sharpening
Line 28, and the side for sharpening confocal characteristic curve 20 and the confocal characteristic curve 28 of translation sharpening is made to cross；To the confocal characteristic of sharpening
After curve 20 and the confocal characteristic curve 28 of translation sharpening carry out same abscissa point interpolation processing respectively, then subtracted each other processing point by point
It obtains dislocation and subtracts each other differential confocal characteristic curve 17ID(z)=I (z)-I (z ,-uS), utilize differential confocal linear fit straight line 29
Straight line fitting is carried out to the linear segment data that differential confocal characteristic curve 17 is subtracted each other in dislocation, it is linear by reversely moving back differential confocal
The position fitting a straight line 29S/2 obtains return differential confocal fitting a straight line 31, and utilizes the shifting of return differential confocal fitting a straight line 31
Position fitting a straight line 0. 32 accurately determines that measuring beam fixed-focus is overlapped with 13 appearance vertex of surface of target capsule of fusion, and then determination fusion
13 outer surface vertex position Z of pelleto；
3) Measurement and Control System 16 controls the drive of object lens drive system 4 measurement object lens 5 and carries out axial sweep to target capsule of fusion 13
It retouches, is overlapped the focus of measuring beam with the inner surface vertex of target capsule of fusion 13 and sphere center position respectively, repeat step 2, successively
Obtain inner surface vertex and the sphere center position Z of the corresponding optical axis direction of target capsule of fusion 13iAnd Zc, it is corresponding that target capsule of fusion 13 can be obtained
The inner and outer surfaces measurement point of optical axis direction and the axial optical coordinate Z of the centre of sphereo,ZiAnd Zc；
4) outer surface for the target capsule of fusion 13 that fixed-focus measurement is obtained and sphere center position coordinate ZoAnd ZcSubtracted each other and is obtained
The outer surface curvature radius R of target capsule of fusion 13o；
5) by the Shell Materials refractive index n of target capsule of fusion 13 and outer surface curvature radius RoIt brings following formula into, calculates
To the thickness t of the shell optical axis direction of target capsule of fusion 13；
Wherein NA is the numerical aperture for measuring object lens 5；
6) inner and outer surfaces of target capsule of fusion 13 and the optical coordinate Z of the centre of sphere are utilizedo,ZiAnd ZcIt can be calculated with thickness t
Obtain the inner and outer surfaces physical coordinates z of target capsule of fusion 13o,ziWith interior surface curvature radius Ri:
7) target capsule of fusion 13 is driven to carry out horizontal rotation one week using gyroscopic drive system 15, on the horizontal circumference of pellet
Each position repeats step 1 to step 6, successively obtains the surfaces externally and internally physical coordinates point set of 13 horizontal plane circumference of target capsule of fusion
Close (zo,zi)i；
8) the orthogonal revolution driving of stepping is carried out using orthogonal rotary system 14 driving target capsule of fusion 13, it is every to drive the repetition that moves a step
Step 1 successively obtains surfaces externally and internally three dimensional physical the coordinate point set { [(z of target capsule of fusion 13 to step 7o,zi)i]j}；
9) computer 30 is to three dimensional physical coordinate point set { [(zo,zi)i]jThree-dimensionalreconstruction and calculating are carried out, it can be by interior
The surfaces externally and internally radius of curvature average value R of target capsule of fusion 13 is calculated in outer surface sphere surface fittingi-veAnd Ro-ve, to aforementioned calculating
Obtained surfaces externally and internally radius of curvature value RiAnd RoIt is modified, and then obtains inside/outside surface curvature radius, the inside/outside table of pellet
Face circle contour and three-D profile, shell thickness and its distributed in three dimensions realize the synthesis of nuclear fusion pellet 13 geometry and profile parameters
Measurement.
The inside and outside circle contour difference of experiment measurement pellet is as shown in Figure 7 and Figure 8.
Embodiment 2
As shown in figure 5, light-source system 1 by laser 26, positioned at 26 exit direction of laser light source convergent mirror 27, be located at
The light source pin hole 28 of 27 focal position of light source convergent mirror forms.
Measurement process is same as Example 1.
Embodiment 3
As shown in fig. 6, bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measurement device of the invention, light source system
System 1 is by laser 26, the light source convergent mirror 27 positioned at 26 exit direction of laser, the light positioned at 27 focal position of light source convergent mirror
Source pin hole 28 forms.Collimation lens 2, spectroscope 3, measurement object lens 5 are sequentially placed along light source exit direction, it is anti-along spectroscope 3
It penetrates direction to be sequentially placed convergent mirror 6, laterally subtract each other confocal detection system 7, quadrature drive system 14 is located at measurement 5 side of outgoing of object lens
To and its axis of rotation and measurement light shaft coaxle, the axis of rotation of gyroscopic drive system 15 and measurement optical axis intersect vertically, sharp
It is carried out with 4 pairs of measurement object lens 5 of object lens drive system axially driving, using the Survey Software in main control computer 30, passes through image
Acquisition system 36 obtains by the collected measurement Airy 10 of ccd detector 9 and realizes system by Measurement and Control System 16
Scanning, rotary motion.
Measurement process is same as Example 1.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention.Protection scope of the present invention is limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (5)
1. bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method, it is characterised in that: utilize the bilateral mistake of laser
Position differential confocal technology carries out accurate chromatography fixed-focus to the inner and outer surfaces of target capsule of fusion (13) shell, utilizes three-dimensional revolving scanning
Technology carries out orthogonal revolution driving to target capsule of fusion (13), in conjunction with the bilateral dislocation differential confocal technology of laser and three-dimensional revolving scanning
Technology obtains the geometry and profile parameters composite measurement of target capsule of fusion (13), target capsule of fusion (13) geometry and profile parameters packet
Include inner and outer surfaces radius of curvature, inside/outside surface circle contour and three-D profile, shell thickness and its distributed in three dimensions, including following step
It is rapid:
Step 1: light-source system (1) is collimated light beam by collimation lens (2) collimation, collimated light beam is after spectroscope (3) transmit
It is measured object lens (5) to be converted into a bit, target capsule of fusion (13) illuminate and reflected；Carry target capsule of fusion (13) information
The reflected beams subtract each other confocal detection system into lateral through mirror (3) reflection that is split after measurement object lens (5), concentrated mirror (6)
(7)；
Step 2: Measurement and Control System (16) control object lens drive system (4) drive measurement object lens (5) to target capsule of fusion (13) into
Row axial scan is overlapped the focus of measuring beam and the outer surface vertex position of target capsule of fusion (13)；In outer surface vertices position
The outer surface for setting scanning target capsule of fusion (13) nearby will laterally subtract each other big dummy pinhole detection domain in confocal detection system (7)
(11) the confocal characteristic curve of big dummy pinhole (18) I detectedB(z) and small dummy pinhole detects the small void that domain (12) are detected
The quasi- confocal characteristic curve of pin hole (19) IS(z) it carries out subtracting each other processing, obtains the confocal characteristic curve of sharpening (20) I of halfwidth compression
(z)=IS(z)-γIB(z), wherein z is axial coordinate, and γ is regulatory factor；
Step 3: confocal characteristic curve (20) will be sharpened, transversely coordinate translation S will obtain the confocal characteristic curve (21) of translation sharpening,
And the side for sharpening confocal characteristic curve (20) and the confocal characteristic curve (21) of translation sharpening is made to cross；It is bent to confocal characteristic is sharpened
After line (20) and the confocal characteristic curve (21) of translation sharpening carry out same abscissa point interpolation processing respectively, then subtracted each other place point by point
Reason obtains dislocation and subtracts each other differential confocal characteristic curve (17) ID(z)=I (z)-I (z ,-uS) is straight using differential confocal linear fit
Line (22) carries out straight line fitting to the linear segment data that differential confocal characteristic curve (17) is subtracted each other in dislocation, differential by reversely moving back
Confocal linear fit straight line (22) position S/2 obtains return differential confocal fitting a straight line (24), and quasi- using return differential confocal
The displacement fitting a straight line zero point (25) of straight line (24) is closed accurately to determine that measuring beam fixed-focus and target capsule of fusion (13) outer surface are pushed up
Point is overlapped, and then determines target capsule of fusion (13) outer surface vertex position Zo；
Step 4: Measurement and Control System (16) control object lens drive system (4) drive measurement object lens (5) to target capsule of fusion (13) into
Row axial scan is overlapped the focus of measuring beam with the inner surface vertex of target capsule of fusion (13) and sphere center position respectively, repeats
Step 3 successively obtains the inner surface vertex and sphere center position Z of target capsule of fusion (13) corresponding optical axis directioniAnd Zc, can access
The axial optical coordinate Z of corresponding the outer of optical axis direction of target capsule of fusion (13), Inner surface measurement point and the centre of sphereo,ZiAnd Zc；
Step 5: outer surface and the sphere center position coordinate Z of the target capsule of fusion (13) obtained to fixed-focus measurementoAnd ZcSubtracted each other i.e.
Obtain the outer surface curvature radius R of target capsule of fusion (13)o；
Step 6: by the Shell Materials refractive index n and outer surface curvature radius R of target capsule of fusion (13)oIt brings following formula into, calculates
Obtain the thickness t of the shell optical axis direction of target capsule of fusion (13)；
Wherein NA is the numerical aperture for measuring object lens (5)；
Step 7: utilizing the optical coordinate Z of the outer of target capsule of fusion (13), inner surface and the centre of sphereo,ZiAnd ZcIt can be counted with thickness t
Calculation obtains the outer of target capsule of fusion (13), inner surface physical coordinates zo,ziWith interior surface curvature radius Ri:
Step 8: being carried out horizontal rotation one week using gyroscopic drive system (15) driving target capsule of fusion (13), in pellet horizontal circle
Step 2 is repeated on week point by point to step 7, successively obtains the surfaces externally and internally physical coordinates point of target capsule of fusion (13) horizontal plane circumference
Gather (zo,zi)i；
Step 9: carrying out the orthogonal revolution driving of stepping, every driving one using quadrature drive system (14) driving target capsule of fusion (13)
Step repeats step 2 to step 8, successively obtains surfaces externally and internally three dimensional physical the coordinate point set { [(z of target capsule of fusion (13)o,
zi)i]j}；
Step 10: main control computer (30) is to three dimensional physical coordinate point set { [(zo,zi)i]jCarry out three-dimensionalreconstruction and calculating, i.e.,
Obtain inside/outside surface curvature radius, inside/outside surface circle contour and three-D profile, shell thickness and the pellet shell thickness of pellet
Distributed in three dimensions completes composite measurement.
2. bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measuring method according to claim 1, feature
Be: by laterally subtract each other confocal detection system (7) obtain sharpening confocal characteristic curve (20) process it is as follows:
A) in measurement object lens (5) scanning process, measurement Airy (10) is detected by ccd detector (9), to measure Airy
(10) centered on center of gravity, big dummy pinhole detection domain (11) of optimum option on the every frame detection image of ccd detector (9) will
Intensity in big dummy pinhole detection domain (11) in each pixel is integrated, and obtains the confocal characteristic curve of big dummy pinhole
(18)；
B) simultaneously centered on measurement Airy (10) center of gravity of ccd detector (9) detection, one small dummy pinhole detection is selected
Domain (12), the size of small dummy pinhole detection domain (12) are less than big dummy pinhole detection domain (11), integrate small virtual
The intensity of pin hole detection domain (12) obtains the confocal characteristic curve of another small dummy pinhole (14), and the small confocal characteristic of dummy pinhole is bent
The halfwidth and peak strength of line (19) are below the confocal characteristic curve of big dummy pinhole (18)；
C) by the confocal characteristic curve of big dummy pinhole (18) multiplied by regulatory factor γ, so that the confocal characteristic curve of big dummy pinhole
(18) largest light intensity is 1/2 times of the confocal characteristic curve of small dummy pinhole (19) largest light intensity；
D) the confocal characteristic curve of small dummy pinhole (19) is subtracted bent multiplied by the confocal characteristic of big dummy pinhole after regulatory factor γ
Line (18) obtains sharpening confocal characteristic curve (20).
3. confocal laser nuclear fusion pellet geometric parameter comprehensive measuring method according to claim 1, it is further characterized in that:
Calculating process described in step 10 is also by three dimensional physical coordinate point set { [(zo,zi)i]jTo carry out surfaces externally and internally spherical surface quasi-
The interior surface curvature radius average value R of target capsule of fusion (13) is calculated in conjunctioni-veWith outer surface curvature radius average value Ro-ve；It repairs
The surfaces externally and internally radius of curvature value R that positive step 5 and step 7 are calculatediAnd RoTo improve measurement accuracy.
4. bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measurement device, it is characterised in that: including light-source system
(1), collimation lens (2), the spectroscope (3), measurement object lens (5) being sequentially placed along light source exit direction, is located at spectroscope (3)
The convergent mirror (6) of reflection direction laterally subtracts each other confocal detection system (7), is located at measurement object lens (5) exit direction and rotating shaft
The gyroscopic drive system that the quadrature drive system (14) of line and measurement light shaft coaxle, axis of rotation and measurement optical axis intersect vertically
(15), axially driving object lens drive system (4) is carried out to measurement object lens (5) and realizes that system scans the measurement with data acquisition
Control system (16).
5. bilateral dislocation differential confocal target capsule of fusion geometric parameter comprehensive measurement device according to claim 4, feature
Be: the light-source system (1) includes laser (26), the light source convergent mirror (27) for being located at laser (26) exit direction, position
Light source pin hole (28) in light source convergent mirror (27) focal position.
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Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1971333A (en) * | 2006-10-11 | 2007-05-30 | 南开大学 | Confocal micro imaging system using dummy pinhole |
| EP1992905A1 (en) * | 2007-05-16 | 2008-11-19 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Optical sensor with tilt error correction |
| CN101718531A (en) * | 2009-11-06 | 2010-06-02 | 北京理工大学 | Method and device for measuring appearance and wall thickness of sphere by combining differential confocal and point-diffraction interference |
| CN102175426A (en) * | 2011-02-15 | 2011-09-07 | 北京理工大学 | Method for fixing focus and measuring curvature radius by confocal interference |
| CN102768015A (en) * | 2012-07-05 | 2012-11-07 | 哈尔滨工业大学 | Fluorescence response follow-up pinhole microscopic confocal measuring device |
| CN103278093A (en) * | 2013-06-09 | 2013-09-04 | 哈尔滨工业大学 | Differential-motion double-area confocal axial measuring equipment |
| CN104568389A (en) * | 2015-01-12 | 2015-04-29 | 北京理工大学 | Bilateral dislocation differential confocal element parameter measuring method |
| CN104567674A (en) * | 2014-12-29 | 2015-04-29 | 北京理工大学 | Bilateral fitting confocal measuring method |
| CN104568390A (en) * | 2015-01-12 | 2015-04-29 | 北京理工大学 | Bilateral dislocation differential confocal measuring method |
| US20170018415A1 (en) * | 2015-07-17 | 2017-01-19 | Beijing Institute Of Technology | Divided-aperture laser differential confocal libs and raman spectrum-mass spectrum microscopic imaging method and device |
| CN107449756A (en) * | 2017-06-22 | 2017-12-08 | 浙江大学 | Ice sheet refractive index and the measuring method and device of thickness in a kind of ICF pellets |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN109253989A (en) * | 2018-11-13 | 2019-01-22 | 北京理工大学 | A kind of laser differential confocal chromatography fixed-focus method and apparatus |
-
2019
- 2019-04-19 CN CN201910320390.3A patent/CN109990710B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1971333A (en) * | 2006-10-11 | 2007-05-30 | 南开大学 | Confocal micro imaging system using dummy pinhole |
| EP1992905A1 (en) * | 2007-05-16 | 2008-11-19 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Optical sensor with tilt error correction |
| CN101718531A (en) * | 2009-11-06 | 2010-06-02 | 北京理工大学 | Method and device for measuring appearance and wall thickness of sphere by combining differential confocal and point-diffraction interference |
| CN102175426A (en) * | 2011-02-15 | 2011-09-07 | 北京理工大学 | Method for fixing focus and measuring curvature radius by confocal interference |
| CN102768015A (en) * | 2012-07-05 | 2012-11-07 | 哈尔滨工业大学 | Fluorescence response follow-up pinhole microscopic confocal measuring device |
| CN103278093A (en) * | 2013-06-09 | 2013-09-04 | 哈尔滨工业大学 | Differential-motion double-area confocal axial measuring equipment |
| CN104567674A (en) * | 2014-12-29 | 2015-04-29 | 北京理工大学 | Bilateral fitting confocal measuring method |
| CN104568389A (en) * | 2015-01-12 | 2015-04-29 | 北京理工大学 | Bilateral dislocation differential confocal element parameter measuring method |
| CN104568390A (en) * | 2015-01-12 | 2015-04-29 | 北京理工大学 | Bilateral dislocation differential confocal measuring method |
| US20170018415A1 (en) * | 2015-07-17 | 2017-01-19 | Beijing Institute Of Technology | Divided-aperture laser differential confocal libs and raman spectrum-mass spectrum microscopic imaging method and device |
| CN107449756A (en) * | 2017-06-22 | 2017-12-08 | 浙江大学 | Ice sheet refractive index and the measuring method and device of thickness in a kind of ICF pellets |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN109253989A (en) * | 2018-11-13 | 2019-01-22 | 北京理工大学 | A kind of laser differential confocal chromatography fixed-focus method and apparatus |
Non-Patent Citations (5)
| Title |
|---|
| LONGXIAO WANG等: "Laser differential confocal inner-surface profile measurement method for an ICF capsule", 《OPTICS EXPRESS》 * |
| LONGXIAO WANG等: "Laser differential confocal measurement of the outer surface profile of a laser inertial confinement fusion capsule", 《MEASUREMENT》 * |
| 王允等: "激光聚变靶丸形态性能参数高精度综合测量方法", 《第十七届全国光学测试学术交流会摘要集》 * |
| 王龙肖等: "激光聚变靶丸内表面轮廓高精度测量方法", 《第十七届全国光学测试学术交流会摘要集》 * |
| 马仙仙等: "激光聚变靶丸球度测量与评定", 《仪器仪表学报》 * |
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