CN109986776A - A kind of precision manufactureing process towards micro-structure part - Google Patents
A kind of precision manufactureing process towards micro-structure part Download PDFInfo
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- CN109986776A CN109986776A CN201910280996.9A CN201910280996A CN109986776A CN 109986776 A CN109986776 A CN 109986776A CN 201910280996 A CN201910280996 A CN 201910280996A CN 109986776 A CN109986776 A CN 109986776A
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- 238000000034 method Methods 0.000 title claims abstract description 145
- 239000007921 spray Substances 0.000 claims abstract description 72
- 238000012360 testing method Methods 0.000 claims abstract description 58
- 239000000463 material Substances 0.000 claims abstract description 35
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 27
- 238000000465 moulding Methods 0.000 claims abstract description 26
- 230000008021 deposition Effects 0.000 claims abstract description 14
- 238000002360 preparation method Methods 0.000 claims abstract description 11
- 238000007747 plating Methods 0.000 claims abstract description 9
- 239000003153 chemical reaction reagent Substances 0.000 claims description 47
- 239000004575 stone Substances 0.000 claims description 17
- 238000005516 engineering process Methods 0.000 claims description 16
- 238000000151 deposition Methods 0.000 claims description 13
- 238000004140 cleaning Methods 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims description 10
- 238000005406 washing Methods 0.000 claims description 9
- 230000001351 cycling effect Effects 0.000 claims description 8
- 230000005284 excitation Effects 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 6
- 238000012805 post-processing Methods 0.000 claims description 6
- 238000001125 extrusion Methods 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000003513 alkali Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
- 238000002242 deionisation method Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 238000007654 immersion Methods 0.000 claims description 3
- 238000007733 ion plating Methods 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000012216 screening Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000013519 translation Methods 0.000 claims description 3
- 238000002604 ultrasonography Methods 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 abstract description 15
- 238000004377 microelectronic Methods 0.000 abstract description 5
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000001746 injection moulding Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000005507 spraying Methods 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- BVPWJMCABCPUQY-UHFFFAOYSA-N 4-amino-5-chloro-2-methoxy-N-[1-(phenylmethyl)-4-piperidinyl]benzamide Chemical compound COC1=CC(N)=C(Cl)C=C1C(=O)NC1CCN(CC=2C=CC=CC=2)CC1 BVPWJMCABCPUQY-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011960 computer-aided design Methods 0.000 description 1
- 238000013499 data model Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000520 microinjection Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000002674 ointment Substances 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000000110 selective laser sintering Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
- B29C33/3892—Preparation of the model, e.g. by assembling parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/44—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/44—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles
- B29C33/46—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles using fluid pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/112—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using individual droplets, e.g. from jetting heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y40/00—Auxiliary operations or equipment, e.g. for material handling
Abstract
The present invention proposes a kind of precision manufactureing process towards micro-structure part, belongs to rapid shaping technique field.A kind of precision manufactureing process towards micro-structure part includes micro-structure scoring procedure, test specimen template preparation section, template pretreatment process, template plating release agent process, moulding material arrangement step, piezoelectric micromotor spray process, droplet deposition molding procedure and stripping process.The precision manufactureing technique of the micro-structure part has the advantages that easy to operate, cheap and equipment operation and maintenance is at low cost, shaping speed is fast, molding high resolution, operating noise is low and meets multiple material injection molding requirement, is with a wide range of applications in fields such as biologic medical, aerospace, material, chemistry and microelectronic components.
Description
Technical field
The invention belongs to rapid shaping technique fields, more particularly to a kind of precision manufactureing technique towards micro-structure part
Method.
Background technique
Rapid shaping technique based on " discrete/accumulation " thought " growth form " manufacturing method, usually by computer, swash
The modern means such as light, micro-injection, precision drive and numerical control, integrated computer Computer Aided Design and computer-aided manufacturing in one,
According to the three-dimensional data model designed on computers, product or sample can be directly manufactured within a very short time.Rapid shaping
Technology is a kind of completely new manufacturing philosophy, i.e. addition type increasing material manufacturing.With the mode phase of traditional subtraction formula removal material processing
Than addition type increasing material manufacturing mode machining accuracy is high, stock utilization is high and can manufacture arbitrarily complicated Shape Parts, has
Apparent advantage.Using rapid shaping technique, rapid forming equipment is only needed in whole process, gets rid of traditional processing side
Dependence of the method to a variety of machining tools, tooling and mold, processing technology simplify, and process velocity also significantly improves.
Currently, rapid shaping technique mainly includes photocureable rapid shaping, layer separated growth method, selective laser burning
Knot, fused glass pellet, piezo jet molding.It is burnt compared to photocureable rapid shaping, layer separated growth method, selective laser
Processing cost existing for knot and the technologies such as fused glass pellet is high, pollution environment, material deterioration inside is big, surface quality is poor and at
There is very fast shaping speed, molding high resolution, material to be applicable in model for technical problems, the piezo jet forming techniques such as type object is limited
The advantages that wide and pollution-free, noiseless is enclosed, has obtained more being widely applied in rapid shaping technique field.
In this regard, spraying forming technique based on piezoelectric micromotor, a kind of precision manufactureing technique towards micro-structure part is proposed, to meet
The demand that the related fieldss such as rapid shaping technique manufacture micro-structure, it appears especially urgent and needs.In biologic medical, aviation
The fields such as space flight, material, chemistry and microelectronic component are with a wide range of applications.
Summary of the invention
The invention aims to solve traditional photocureable rapid shaping, layer separated growth method, selective laser sintering
And processing cost existing for fused glass pellet etc. is high, pollution environment, material deterioration inside is big, surface quality is poor and molding object by
The technical problems such as limit, while to meet the fields such as biologic medical, aerospace, materials chemistry and microelectronic component to small knot
It is configured the technical need made, proposes a kind of precision manufactureing process towards micro-structure part.
The present invention is achieved by the following technical solutions, and the present invention proposes a kind of precision manufactureing towards micro-structure part
Process, the method includes pretreatment procedure, forming and hardening process and postprocessing working procedures；The pretreatment procedure includes micro-
Structure scoring procedure, test specimen template preparation section, template pretreatment process, template plating release agent process and moulding material configure work
Sequence；The forming and hardening process includes piezoelectric micromotor spray process and droplet deposition molding procedure；The postprocessing working procedures include demoulding
Process.
Further, the micro-structure scoring procedure is by multiple degrees of freedom postage-regulating mechanism 1-1, connection component 1-2 and gold
Hard rock carves what head 1-3 was realized；The multiple degrees of freedom postage-regulating mechanism 1-1 is fixedly connected with connection component 1-2, the connection component 1-
2 are fixedly connected with Buddha's warrior attendant stone inscription head 1-3；The multiple degrees of freedom postage-regulating mechanism 1-1 can be realized the fortune of the arbitrary trajectory in X/Y plane
It is dynamic, enable multiple degrees of freedom postage-regulating mechanism 1-1 to regulate and control Buddha's warrior attendant stone inscription head 1-3 in X/Y plane and delineates movement in test specimen template
The shape of track, and determine that Buddha's warrior attendant stone inscription head 1-3 delineates the size of track in test specimen template；The multiple degrees of freedom postage-regulating mechanism
1-1 can be realized the translation along Z axis, and multiple degrees of freedom postage-regulating mechanism 1-1 is enabled to regulate and control Buddha's warrior attendant stone inscription head 1- in the Z-axis direction
3 test specimen template surface cutting depths；It can tried in conjunction with Buddha's warrior attendant stone inscription head 1-3 by multiple degrees of freedom postage-regulating mechanism 1-1
The micro-structure delineation of arbitrary shape and structure size is realized in part template.
Further, the test specimen template preparation section is completed based on micro-structure scoring procedure, in test specimen template
Microstructure aspects are cylindrical structure or prism structure；Micro-structure Outside Dimensions parameter in test specimen template is between 1 μm~1mm
Between.
Further, the template pretreatment process includes that the cleaning of test specimen template and test specimen template are dry；
The test specimen template cleaning carries out Manual-cleaning to test specimen template using alcohol or acetone, or using ultrasonic wave to examination
Part template is cleaned；
The test specimen template is dry dry using test specimen template special-purpose drying equipment, and drying time is 5min~10min；Or
It is dried using the method for being dried with nitrogen；Test specimen template after drying is placed in vacuum sealing environment, to prevent air to test specimen
The pollution and corrosion of template.
Further, the template plating release agent process is in the test specimen template of prefabricated delineation track using vacuum evaporation
The release agent that coating technique is prepared with a thickness of 50nm, or the release agent with a thickness of 50nm is prepared using vacuum sputtering coating technology,
Or the release agent with a thickness of 50nm is prepared using vacuum ion plating membrane technology, to obtain the template of plating release agent, template is true
It is saved in empty or dry environment.
Further, the moulding material arrangement step includes that reagent prepares, reagent proportion and reagent screen three links；
Reagent is ready, carries out reagent proportion, and reagent proportion is matched according to the performance indicator for forming micro-structure；Reagent
After preparation, 3~6 hours are placed；The purpose of reagent screening is the selection in order to be filtered to the impurity particle in reagent
The precise filtering device that diameter is 20 μm~30 μm prevents impurity particle from blocking piezoelectricity micro-spray device.
Further, the piezoelectric micromotor spray process can be realized the injection of reagent material, fill by using different micro- sprays
Configuration, operating mode and excitation waveform are set, can be realized the accurate manipulation of micro fluid.
Further, the micro-spray device configuration includes shearing-type piezoelectricity micro-spray device 6-1, extrusion pressing type piezoelectricity micro-spray device
6-2, flexure type piezoelectricity micro-spray device 6-3, putter type piezoelectricity micro-spray device 6-4 and striker type piezoelectricity micro-spray device 6-5；The work
Operation mode includes drawing pushing manipulation and push or pull；The excitation waveform includes sine wave, triangular wave, square wave, trapezoidal wave, bipolar wave, M type
Wave and W type wave.
Further, the droplet deposition molding procedure sprays to the reagent material in reagent template piezoelectricity micro-spray device
It is deposited；The length of time of deposition depends on reagent type；In order to accelerate the speed of reagent material deposition cure, using cooling
Processing or high-temperature process assistant formation mode.
Further, it is aqueous molten that the test specimen template that the stripping process passes through the micro-structure that will have been deposited immerses deionization
In liquid, impregnate 30s, it can be achieved that micro-structure and test specimen template separation, micro-structure part can be obtained；
Or the stripping process uses circulation technology, the circulation technology includes cycling element, the cycling element are as follows: the
One step carries out ultrasonic releasing process, and second step carries out spray washing technique, and wherein spray washing technique includes immersion and spray work
Sequence；Cycling element is 5；Ultrasound demoulding technological parameter be voltage: 50V~200V, frequency: 16kHz~40kHz, when ultrasonic
Between be 20s~60s；The technological parameter of spray washing is soaking time: 10min~20min, spray time: 2min~5min；It is de-
The main component of film is water soluble alkali, and the concentration of release agent is 0.5mol/L~5mol/L, temperature when demoulding is 20 DEG C~
40℃。
The beneficial effects of the present invention are:
A kind of precision manufactureing process towards micro-structure part proposed by the present invention, with easy to operate, price is low
Honest and clean and equipment operation and maintenance is at low cost, shaping speed is fast, molding high resolution, operating noise is low and meets multiple material injection
The advantages of forming requirements, has in fields such as biologic medical, aerospace, material, chemistry and microelectronic components and widely answers
Use prospect.
Detailed description of the invention
Fig. 1 is a kind of process flow chart of precision manufactureing process towards micro-structure part；
Fig. 2 is a kind of micro-structure scoring procedure schematic diagram of precision manufactureing process towards micro-structure part；
Fig. 3 is a kind of five kinds of configurations signal of the piezoelectricity micro-spray device of precision manufactureing process towards micro-structure part
Figure；
Fig. 4 is a kind of two kinds of work signals of piezoelectricity micro-spray device of precision manufactureing process towards micro-structure part
Figure；
Fig. 5 is a kind of seven kinds of excitation waveforms of the piezoelectricity micro-spray device of precision manufactureing process towards micro-structure part
Schematic diagram.
Specific embodiment
Technical solution in the embodiment of the present invention that following will be combined with the drawings in the embodiments of the present invention carries out clear, complete
Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
In conjunction with Fig. 1, the present invention proposes a kind of precision manufactureing process towards micro-structure part, and the method includes preceding
Treatment process, forming and hardening process and postprocessing working procedures；The pretreatment procedure includes micro-structure scoring procedure, test specimen template system
Standby process, template pretreatment process, template plating release agent process and moulding material arrangement step；The forming and hardening process includes
Piezoelectric micromotor sprays process and droplet deposition molding procedure；The postprocessing working procedures include stripping process.
In conjunction with Fig. 2, the micro-structure scoring procedure is by multiple degrees of freedom postage-regulating mechanism 1-1, connection component 1-2 and Buddha's warrior attendant
What stone inscription head 1-3 was realized；The multiple degrees of freedom postage-regulating mechanism 1-1 is fixedly connected with connection component 1-2, the connection component 1-2
It is fixedly connected with Buddha's warrior attendant stone inscription head 1-3；The multiple degrees of freedom postage-regulating mechanism 1-1 can be realized the fortune of the arbitrary trajectory in X/Y plane
It is dynamic, enable multiple degrees of freedom postage-regulating mechanism 1-1 to regulate and control Buddha's warrior attendant stone inscription head 1-3 in X/Y plane and delineates movement in test specimen template
The shape of track, and determine that Buddha's warrior attendant stone inscription head 1-3 delineates the size of track in test specimen template；The multiple degrees of freedom postage-regulating mechanism
1-1 can be realized the translation along Z axis, and multiple degrees of freedom postage-regulating mechanism 1-1 is enabled to regulate and control Buddha's warrior attendant stone inscription head 1- in the Z-axis direction
3 test specimen template surface cutting depths；It can tried in conjunction with Buddha's warrior attendant stone inscription head 1-3 by multiple degrees of freedom postage-regulating mechanism 1-1
The micro-structure delineation of arbitrary shape and structure size is realized in part template.
The test specimen template preparation section is completed based on micro-structure scoring procedure, the microstructure aspects in test specimen template
For cylindrical structure or prism structure；Micro-structure Outside Dimensions parameter in test specimen template is between 1 μm~1mm.
The template pretreatment process includes that the cleaning of test specimen template and test specimen template are dry；
The test specimen template cleaning carries out Manual-cleaning to test specimen template using alcohol or acetone, or using ultrasonic wave to examination
Part template is cleaned；Purpose is to clean out the clast in micro-structure；
The test specimen template is dry dry using test specimen template special-purpose drying equipment, and drying time is 5min~10min；Or
It is dried using the method for being dried with nitrogen；Test specimen template after drying is placed in vacuum sealing environment, to prevent air to test specimen
The pollution and corrosion of template.
The template plating release agent process is in the test specimen template of prefabricated delineation track using vacuum evaporation coating membrane technology
The release agent with a thickness of 50nm is prepared, or the release agent with a thickness of 50nm is prepared using vacuum sputtering coating technology, or using true
Empty ion-plating technique preparation is with a thickness of the release agent of 50nm, to obtain the template of plating release agent, template is in vacuum or does
It is saved in dry environment.The release agent is divided into ointment paraffin wax type, film-type and solution-type three classes；From mold plastic property and metal
From the aspect of spraying, solution-type release agent is preferably used；The release agent should have cheap, nontoxic, good manufacturability, metal
The features such as being easy cleaning after spraying ideal, composite molding.
The moulding material arrangement step includes that reagent prepares, reagent proportion and reagent screen three links；Reagent prepares
It finishes, carries out reagent proportion, reagent proportion is matched according to the performance indicator for forming micro-structure；Preparation of reagents finishes
Afterwards, 3~6 hours are placed, it is therefore an objective to which the reagent mixed solution of proportion sufficiently dissolves, and promotes the uniformity consistency of reagent；Reagent
The purpose of screening is to select diameter to fill for 20 μm~30 μm of secondary filter to be filtered to the impurity particle in reagent
It sets, prevents impurity particle from blocking piezoelectricity micro-spray device.
The piezoelectric micromotor spray process can be realized the injection of reagent material, by using different micro-spray device configurations, work
Operation mode and excitation waveform can be realized the accurate manipulation of micro fluid.
The micro-spray device configuration includes shearing-type piezoelectricity micro-spray device 6-1, extrusion pressing type piezoelectricity micro-spray device 6-2, bending
Type piezoelectricity micro-spray device 6-3, putter type piezoelectricity micro-spray device 6-4 and striker type piezoelectricity micro-spray device 6-5, as shown in Figure 3；It is described
Shearing-type piezoelectricity micro-spray device 6-1, extrusion pressing type piezoelectricity micro-spray device 6-2, flexure type piezoelectricity micro-spray device 6-3 and putter type piezoelectricity
Micro-spray device 6-4 is mainly suitable for spraying the reagent material compared with low viscosity, the flexure type piezoelectricity micro-spray device 6-3 and putter type pressure
Electric micro-spray device 6-4 is the most universal in industrial application；Design feature of the striker type piezoelectricity micro-spray device 6-5 due to itself
It is very suitable to spray highly viscous reagent material with working method；
The operating mode includes drawing pushing manipulation and push or pull, as shown in Figure 4；Push or pull and drawing two kinds of drive modes of pushing manipulation
Feature is as follows:
A) it for given injection diameter, works in the case where drawing push-model, the diameter of droplets that piezoelectricity micro-spray device can generate
The about half of push-pull mode generation diameter of droplets；
B) work is in the case where drawing push-model, and the drop velocity that piezoelectricity micro-spray device generates is faster；
C) in the case where drawing push-model, it is only push-pull mode that piezoelectricity micro-spray device, which generates driving voltage required for droplet, for work
Half；
For drawing push-model, the reagent material that piezoelectricity micro-spray device is more suitable for spraying smaller particle diameter carries out micro-structure
The precision manufactureing of part；For push-pull mode, the reagent material progress that piezoelectricity micro-spray device is more suitable for spraying larger particles diameter is micro-
The precision manufactureing of structural features；
The excitation waveform includes sine wave (shown in such as Fig. 5 (a)), triangular wave (shown in such as Fig. 5 (b)), square wave (such as Fig. 5
(c) shown in), trapezoidal wave (such as Fig. 5 (d) shown in), bipolar wave (shown in such as Fig. 5 (e)), M type wave (shown in such as Fig. 5 (f)) and W type wave
(shown in such as Fig. 5 (g)).When being motivated using sine wave, triangular wave, square wave and trapezoidal wave to piezoelectricity micro-spray device, it is easy
Cause to generate residual oscillation in the cavity of piezoelectricity micro-spray device, influence the uniformity consistency of drop injection, and then influences molding essence
Degree, but the surface microfeatures molding not high for required precision, can be swashed using sine wave, triangular wave, square wave, trapezoidal wave
It encourages；Using the enough generations for preferably avoiding residual oscillation in cavity of bipolar wave, M type wave and W type wave energy, therefore, bipolar wave, M type
Wave and W type are to carry out excitation waveform preferred in the micro-structure forming process of molded target face.
The droplet deposition molding procedure, which sprays to the reagent material in reagent template piezoelectricity micro-spray device, to be deposited；
The length of time of deposition depends on reagent type；In order to accelerate the speed of reagent material deposition cure, using cooling treatment or height
Temperature processing assistant formation mode.
The test specimen template that the stripping process passes through the micro-structure that will have been deposited immerses in deionization aqueous solution, impregnates
30s, it can be achieved that micro-structure and test specimen template separation, micro-structure part can be obtained；
Or the stripping process uses circulation technology, the circulation technology includes cycling element, the cycling element are as follows: the
One step carries out ultrasonic releasing process, and second step carries out spray washing technique, and wherein spray washing technique includes immersion and spray work
Sequence；Cycling element is 5；Ultrasound demoulding technological parameter be voltage: 50V~200V, frequency: 16kHz~40kHz, when ultrasonic
Between be 20s~60s；The technological parameter of spray washing is soaking time: 10min~20min, spray time: 2min~5min；It is de-
The main component of film is water soluble alkali, and the concentration of release agent is 0.5mol/L~5mol/L, temperature when demoulding is 20 DEG C~
40℃。
In conclusion a kind of precision manufactureing process towards micro-structure part proposed by the present invention, the small knot
The precision manufactureing process of component includes micro-structure scoring procedure, test specimen template preparation section, template pretreatment process, template
Plate release agent process, moulding material arrangement step, piezoelectric micromotor spray process, droplet deposition molding procedure and stripping process.The technique
, shaping speed at low cost with easy to operate, cheap and equipment operation and maintenance be fast, molding high resolution, operating noise
It is low and the advantages of meet multiple material injection molding requirement, in biologic medical, aerospace, material, chemistry and microelectronics device
The fields such as part are with a wide range of applications.
Above to a kind of precision manufactureing process towards micro-structure part provided by the present invention, detailed Jie has been carried out
It continues, used herein a specific example illustrates the principle and implementation of the invention, and the explanation of above embodiments is only
It is to be used to help understand method and its core concept of the invention；At the same time, for those skilled in the art, according to this hair
Bright thought, there will be changes in the specific implementation manner and application range, in conclusion the content of the present specification should not manage
Solution is limitation of the present invention.
Claims (10)
1. a kind of precision manufactureing process towards micro-structure part, it is characterised in that: the method includes pretreatment procedure,
Forming and hardening process and postprocessing working procedures；The pretreatment procedure includes micro-structure scoring procedure, test specimen template preparation section, mould
Plate pretreatment process, template plating release agent process and moulding material arrangement step；The forming and hardening process includes piezoelectric micromotor spray
Process and droplet deposition molding procedure；The postprocessing working procedures include stripping process.
2. according to the method described in claim 1, it is characterized by: the micro-structure scoring procedure is raised wages by multiple degrees of freedom
What mechanism (1-1), connection component (1-2) and Buddha's warrior attendant stone inscription head (1-3) were realized；The multiple degrees of freedom postage-regulating mechanism (1-1) and company
Connected components (1-2) are fixedly connected, and the connection component (1-2) is fixedly connected with Buddha's warrior attendant stone inscription head (1-3)；The multiple degrees of freedom tune
Money mechanism (1-1) can be realized the movement of the arbitrary trajectory in X/Y plane, so that multiple degrees of freedom postage-regulating mechanism (1-1) can be flat in XY
Regulate and control Buddha's warrior attendant stone inscription head (1-3) in face and delineate the shape of motion profile in test specimen template, and determines that Buddha's warrior attendant stone inscription head (1-3) exists
The size of track is delineated in test specimen template；The multiple degrees of freedom postage-regulating mechanism (1-1) can be realized the translation along Z axis, so that more
It is deep in the delineation of test specimen template surface that freedom degree postage-regulating mechanism (1-1) can regulate and control Buddha's warrior attendant stone inscription head (1-3) in the Z-axis direction
Degree；It combines by multiple degrees of freedom postage-regulating mechanism (1-1) and Buddha's warrior attendant stone inscription head (1-3) and can realize arbitrary shape in test specimen template
It is delineated with the micro-structure of structure size.
3. according to the method described in claim 1, it is characterized by: the test specimen template preparation section is delineated based on micro-structure
What process was completed, the microstructure aspects in test specimen template are cylindrical structure or prism structure；Micro-structure in test specimen template
Outside Dimensions parameter is between 1 μm~1mm.
4. according to the method described in claim 1, it is characterized by: the template pretreatment process include test specimen template cleaning and
Test specimen template is dry；
The test specimen template cleaning carries out Manual-cleaning to test specimen template using alcohol or acetone, or using ultrasonic wave to test specimen mould
Plate is cleaned；
The test specimen template is dry dry using test specimen template special-purpose drying equipment, and drying time is 5min~10min；Or it uses
The method of being dried with nitrogen is dried；Test specimen template after drying is placed in vacuum sealing environment, to prevent air to test specimen template
Pollution and corrosion.
5. according to the method described in claim 1, it is characterized by: template plating release agent process is in prefabricated delineation track
Test specimen template on using vacuum evaporation coating membrane technology prepare with a thickness of 50nm release agent, or use vacuum sputtering coating technology
The release agent with a thickness of 50nm is prepared, or the release agent with a thickness of 50nm is prepared using vacuum ion plating membrane technology, to obtain
The template of release agent is plated, template saves in vacuum or the environment of drying.
6. according to the method described in claim 1, it is characterized by: the moulding material arrangement step includes that reagent prepares, tries
Agent proportion and reagent screen three links；Reagent is ready, carries out reagent proportion, and reagent proportion is according to molding micro-structure
Performance indicator matched；After preparation of reagents, 3~6 hours are placed；The purpose of reagent screening is in order to reagent
In impurity particle be filtered, select diameter for 20 μm~30 μm of precise filtering device, prevent impurity particle from blocking piezoelectricity
Micro-spray device.
7. according to the method described in claim 1, it is characterized by: piezoelectric micromotor spray process can be realized the spray of reagent material
It penetrates, by using different micro-spray device configuration, operating mode and excitation waveform, can be realized the accurate manipulation of micro fluid.
8. according to the method described in claim 7, it is characterized by: the micro-spray device configuration includes shearing-type piezoelectric micromotor spray dress
Set (6-1), extrusion pressing type piezoelectricity micro-spray device (6-2), flexure type piezoelectricity micro-spray device (6-3), putter type piezoelectricity micro-spray device (6-
And striker type piezoelectricity micro-spray device (6-5) 4)；The operating mode includes drawing pushing manipulation and push or pull；The excitation waveform includes just
String wave, triangular wave, square wave, trapezoidal wave, bipolar wave, M type wave and W type wave.
9. according to the method described in claim 1, it is characterized by: the droplet deposition molding procedure sprays piezoelectricity micro-spray device
The reagent material being incident upon in reagent template is deposited；The length of time of deposition depends on reagent type；In order to accelerate reagent material
The speed for expecting deposition cure, using cooling treatment or high-temperature process assistant formation mode.
10. according to the method described in claim 1, it is characterized by: the stripping process passes through the micro-structure that will have been deposited
Test specimen template immerse deionization aqueous solution in, impregnate 30s, it can be achieved that micro-structure and test specimen template separation, can obtain
To micro-structure part；
Or the stripping process uses circulation technology, the circulation technology includes cycling element, the cycling element are as follows: the first step
Ultrasonic releasing process is carried out, second step carries out spray washing technique, and wherein spray washing technique includes immersion and spray process；It follows
Ring element is 5；The technological parameter of ultrasound demoulding is voltage: 50V~200V, frequency: 16kHz~40kHz, ultrasonic time are
20s~60s；The technological parameter of spray washing is soaking time: 10min~20min, spray time: 2min~5min；Remover
Main component be water soluble alkali, the concentration of release agent is 0.5mol/L~5mol/L, and temperature when demoulding is 20 DEG C~40 DEG C.
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| CN107723752A (en) * | 2017-08-24 | 2018-02-23 | 江苏大学 | A kind of device and method of laser ablation glass mold layering micro electroforming |
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| Title |
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| 李锴: "压电微喷机构耦合特性及喷射性能研究", 《中国博士学位论文全文数据库 工程科技Ⅱ辑》 * |
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