CN109975214A - A kind of quartz optoacoustic spectroscopy gas concentration detection apparatus and method - Google Patents
A kind of quartz optoacoustic spectroscopy gas concentration detection apparatus and method Download PDFInfo
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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Abstract
A kind of quartz optoacoustic spectroscopy gas concentration detection apparatus and method, belongs to gas concentration detection field.Laser control module, semiconductor laser, collimation focusing lens group, sound wave enhancing are arranged with detecting module, control and data collection system and computer along direction of beam propagation；The operating temperature and electric current of laser control module setting semiconductor laser；Semiconductor laser outgoing laser beam；Collimation focusing lens group includes two non-spherical lenses, sound wave enhancing and detecting module include quartz tuning-fork and annulus, semiconductor laser output laser beam focus quartz tuning-fork it is interdigital between and be located at annulus center, quartz tuning-fork generates piezoelectric signal and is transmitted to data collection system, control and data collection system are demodulated and are acquired and is connect with computer to the piezoelectric signal of generation, and computer carries out real-time communication by upper computer software.Present invention improves gas concentration detection sensitivities, enhance sensor system signals, reduce system noise.
Description
Technical field
The present invention relates to a kind of quartzy optoacoustic spectroscopy gas concentration detection apparatus and methods, belong to gas concentration detection neck
Domain.
Background technique
Quartzy optoacoustic spectroscopy is a kind of gas detection method based on optoacoustic effect, compared to other kinds of
Spectral technique, it has many advantages, such as that high sensitivity, small in size, detectivity is strong, ambient noise is immune, has been widely used at present
In the fields such as atmospheric monitoring and industrial production.
In quartzy optoacoustic spectroscopy, it can be used and increase laser power or improve the method for acoustics coupling efficiency to improve
The detectivity of system.In terms of increasing laser power, quantum cascade laser has spectrum characteristic outstanding, and covers
The fundamental frequency of bulk gas molecule vibrational-rotational level absorbs, but the disadvantage is that structure is complicated, and high cost limits the laser
Device is widely used.Therefore, improving acoustics coupling efficiency is to improve a kind of low in cost of system detectivity and be easily achieved
Method.
In the prior art, mostly use quartz tuning-fork as acoustic detection element.Since photoacoustic signal is very faint,
Perpendicular to the tubulose acoustic resonance pipe coaxial with semiconductor laser beam is added on the interdigital in-plane of quartz tuning-fork, sound wave is realized
Enhancing.Coaxial type and abaxile can be divided into according to the shape of resonantron.In both structures, laser beam is from resonantron
Interior process, excited gas molecule generates sound wave in resonantron, realizes the detection to sound wave by quartz tuning-fork.However, existing
Resonantron can only carry out resonance increasing to (perpendicular on the interdigital in-plane of quartz tuning-fork, i.e. the direction z) in acoustic wavefield one-dimensional square
By force, and in optoacoustic spectroscopy the acoustic wavefield generated is spherical wave, therefore, (x and the side y on other two-dimensional directions in the prior art
To) acoustic wavefield is not utilized, causes sensing system detectivity relatively low, limit its practical application.Additionally, due to
Current resonantron does not consider acoustic standing wave condition, therefore in order to improve sound wave reinforcing effect, leads to currently used resonance
Bore is smaller (< 1mm), and with certain difficulty when adjusting, and resonantron blocks laser power, makes to reach quartz tuning-fork
Laser power between interdigital reduces, and affects system signal intensity and increases system noise.
Summary of the invention
To solve the problems in the background art, the present invention provides a kind of quartzy optoacoustic spectroscopy gas concentration detection apparatus
And method.
Realize that above-mentioned purpose, the present invention take following technical proposals: a kind of quartz optoacoustic spectroscopy gas concentration detection apparatus
And method, including the enhancing of laser control module, semiconductor laser, collimation focusing lens group, sound wave and detecting module, control
With data collection system and computer, the laser control module, semiconductor laser, collimation focusing lens group, sound wave
Enhancing is set gradually with detecting module, control and data collection system and computer along direction of beam propagation；The laser
Control module is used to be arranged the operating temperature and electric current of semiconductor laser；The semiconductor laser is used for outgoing laser beam；
The collimation focusing lens group include two non-spherical lenses, the focal length of described two non-spherical lenses be respectively 20-40mm and
30-60mm；The sound wave enhancing and detecting module include quartz tuning-fork and annulus, and the quartz tuning-fork is placed in annulus；It is described
Semiconductor laser output laser beam focus quartz tuning-fork it is interdigital between and be located at annulus center, the acoustic impedance of annulus
Greater than 100MPasm-1, quartz tuning-fork generate piezoelectric signal simultaneously piezoelectric signal is transmitted to data collection system, the control
It is demodulated and is acquired with piezoelectric signal of the data collection system to generation, and connect with computer, the computer passes through upper
Position machine software carries out real-time communication.
A kind of quartzy optoacoustic spectroscopy gas concentration detection apparatus of the invention and method, include the following steps:
Step 1: opening semiconductor laser, make its outgoing laser beam, by laser control module to temperature and electric current
Setting, adjust the output wavelength of semiconductor laser, make its complete blanketing gas Absorption Line；
Step 2: being scanned by control and data collection system to the resonant frequency of quartz tuning-fork, and with low frequency
The above-mentioned laser beam of signal common modulation after the sine-wave superimposed of sawtooth wave and high frequency；
Step 3: modulated laser beam enters to inject in annulus after collimation focusing lens group from annulus one end, laser
Beam focuses on the center of annulus, and excited gas molecule generates sound wave；
Step 4: the sound wave generated is transferred to the inner peripheral surface of annulus and is totally reflected, incident acoustic wave and reflected acoustic wave
Standing wave is generated after superposition, and forms acoustic resonance, enhances the acoustic signals of generation；
Step 5: quartz tuning-fork generates piezoelectric current signal after detecting the acoustic signals between fourchette；
Step 6: the piezoelectric current signal generated be transmitted to control and data collection system and by the software of computer into
Row data acquisition and relevant calculation obtain the concentration of probe gas.
Compared with prior art, the beneficial effects of the present invention are: quartz tuning-fork of the present invention is placed in annulus, sound wave is carried out
Enhancing, and then increase quartzy photo acoustic spectrometry system current signal strength, final to improve gas concentration detection sensitivity, sound wave is in circle
Ring internal reflection enhances and is formed standing wave, enhances sensor system signals, reduces system noise.
Detailed description of the invention
Fig. 1 is the overall structure diagram of quartzy optoacoustic spectroscopy gas concentration detection apparatus of the invention；
Fig. 2 is the connection relationship diagram of quartz tuning-fork and annulus；
Fig. 3 is the left view of Fig. 2；
Fig. 4 is that sound wave forms standing wave resonance schematic diagram.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, is clearly and completely retouched to the technical solution in the present invention
It states, it is clear that described embodiment is only a part of the embodiment of invention, instead of all the embodiments, based in the present invention
Embodiment, every other embodiment obtained by those of ordinary skill in the art without making creative efforts,
It shall fall within the protection scope of the present invention.
Specific embodiment 1: as shown in Figure 1 to 4, the invention discloses a kind of quartzy optoacoustic spectroscopy gas concentrations to examine
Survey device and method, including the enhancing of laser control module 1, semiconductor laser 2, collimation focusing lens group 3, sound wave and detection
Module 4, control and data collection system 5 and computer 6, the laser control module 1, semiconductor laser 2, collimation are poly-
Focus lens group 3, sound wave enhancing and detecting module 4, control and data collection system 5 and computer 6 along direction of beam propagation according to
Secondary setting；The laser control module 1 drives semiconductor laser 2, for be arranged the operating temperature of semiconductor laser 2 with
Electric current；The semiconductor laser 2 is used for outgoing laser beam；2 outgoing laser beam of semiconductor laser passes through collimation focusing lens
Group 3 after be transmitted to acoustic detection and enhancing module 4 in, the collimation focusing lens group 3 include two non-spherical lenses, described two
The focal length of a non-spherical lens is respectively 20-40mm and 30-60mm；The sound wave enhancing is placed under test gas with detecting module 4
In environment, sound wave enhancing and detecting module 4 include quartz tuning-fork 41 and annulus 42, and the quartz tuning-fork 41 is placed in annulus 42；
The laser beam focus that the semiconductor laser 2 exports quartz tuning-fork 41 it is interdigital between and be located at the center of annulus 42, circle
The acoustic impedance Z2 of ring 42 is greater than 100MPasm-1, sound wave enhances and formed standing wave, quartz tuning-fork 41 in 42 internal reflection of annular chamber
It generates piezoelectric signal and piezoelectric signal is transmitted to data collection system 5, the pressure of the control and 5 pairs of data collection system generations
Electric signal is demodulated and is acquired, and is connect with computer 6, and the computer 6 carries out real-time communication by upper computer software.
Specific embodiment 2: present embodiment is the further explanation made to specific embodiment one, it is described partly to lead
Body laser 2 is the laser of near-infrared continuously adjustable single longitudinal mode output.
Specific embodiment 3: present embodiment is the further explanation made to specific embodiment one, the quartz
The resonance frequency range of tuning fork 41 is 20kHz-70kHz, and quality factor is more than or equal to 10000.
Specific embodiment 4: present embodiment is the further explanation made to specific embodiment one, the annulus
42 material is copper.Its acoustic impedance Z2=420MPasm-1.42 material of annulus can be replaced the biggish material of other acoustic impedances
Material, such as titanium alloy.Annulus can be replaced other resonant cavities with sound wave reflection, such as spherical cavity.
Quartz tuning-fork 41 is placed in annulus 42 by the present invention, carries out the enhancing of sound wave, and then increases quartzy optoacoustic spectroscopy system
System current signal strength, it is final to improve gas concentration detection sensitivity.In view of pressure reflection ratio γ, to the material of annulus 42 into
Selection is gone.Pressure reflection ratio γ is defined as the ratio between back wave acoustic pressure pr and incidence wave acoustic pressure pi, and calculating formula is as follows.
As can be seen that the acoustic impedance Z of annulus material2Bigger, pressure reflection ratio γ is bigger.Due to ZCopper=420MPasm-1, ZAir=4 × 10-3MPa·s·m-1, when selecting copper as 42 material of annulus, pressure reflection ratio γ is about 100%.
Appoint specific embodiment 5: present embodiment discloses in a kind of one~specific embodiment of specific embodiment four
A kind of quartz optoacoustic spectroscopy gas concentration detection apparatus and method, the detection method include such as described in one specific embodiment
Lower step:
Step 1: opening semiconductor laser 2, make its outgoing laser beam, by laser control module 1 to temperature and electricity
The setting of stream adjusts the output wavelength of semiconductor laser 2, makes its complete blanketing gas Absorption Line；
Step 2: being scanned by controlling with resonant frequency of the data collection system 5 to quartz tuning-fork 41, and use low frequency
Sawtooth wave and high frequency sine wave the half of quartz tuning-fork resonant frequency (frequency be) superimposed signal common modulation it is above-mentioned
Laser beam；
Step 3: modulated laser beam enters to inject in annulus 42 after collimation focusing lens group 3 from 42 one end of annulus,
Laser beam focus generates sound wave in the center of annulus 42, excited gas molecule；
Step 4: the sound wave generated is transferred to the inner peripheral surface of annulus 42 and is totally reflected, incident acoustic wave and reflected sound
Spread speed, the frequency of wave are identical but contrary and meet phase-matching condition, incident acoustic wave and reflected acoustic wave superposition
After generate standing wave, and form acoustic resonance, enhance the acoustic signals of generation；
The relative position for adjusting quartz tuning-fork 41, so that sensor system signals maximum intensity；The radius of annulus 42 should expire
Sufficient formula (2) adjusts difficulty in order to avoid sonic transmissions are lost and reduce, and n should meet 2≤n≤10, and what is selected in this system is
N=2, i.e. radius are the annulus of 5.19mm；
Laser beam focus quartz tuning-fork 41 it is interdigital between, optoacoustic effect generate sound wave be transferred to 42 inner surface of annulus
And it is totally reflected, incident acoustic wave u1With reflected acoustic wave u2Spread speed, frequency it is identical but contrary.When two train waves
Phase matched when, incident acoustic wave u1With reflected acoustic wave u2Composite wave (standing wave) is generated after superposition, composite wave (usum) amplitude be
Originally 2 times.Since sound wave is transmitted to all directions, multidirectional standing wave further enhances the resonance in space, sound wave letter
Number reinforcing effect will be apparent from.
Standing wave is formed in order to meet sound wave, achievees the effect that resonant check, the constraint condition of copper annular radii is as follows:
Wherein, λsFor wave length of sound, v is acoustic speed, and f is quartz tuning-fork resonant frequency.It is f=with resonant frequency
For the quartz tuning-fork of 32.768kHz, under the conditions of environment temperature is 15 DEG C, acoustic speed 340m/s, wave length of sound is
10.38mm.Since the interdigital height of quartz tuning-fork is 3.9mm, the adjusting of quartz tuning-fork and the aerial loss of sound wave are considered,
The cavity radius of annulus uses 5.19mm (2 × 10.38/4, n=2).Interdigital with a thickness of 0.62mm, therefore the annulus of quartz tuning-fork
Thickness select 1.5mm.
Step 5: quartz tuning-fork 41 generates piezoelectric current signal after detecting the acoustic signals between fourchette；
Step 6: the piezoelectric current signal generated is transmitted to control and data collection system 5 and passes through the software of computer 6
Data acquisition and relevant calculation are carried out, obtains the concentration of probe gas.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in the form of others dress body.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that by all in the meaning and scope for the condition of equivalent for falling in claim
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (5)
1. a kind of quartz optoacoustic spectroscopy gas concentration detection apparatus, it is characterised in that: including laser control module (1), partly lead
Body laser (2), collimation focusing lens group (3), sound wave enhancing with detecting module (4), control with data collection system (5) and
Computer (6), the laser control module (1), semiconductor laser (2), collimation focusing lens group (3), sound wave enhancing with
Detecting module (4), control are set gradually with data collection system (5) and computer (6) along direction of beam propagation；The laser
Device control module (1) is used to be arranged the operating temperature and electric current of semiconductor laser (2)；The semiconductor laser (2) is used for
Outgoing laser beam；The collimation focusing lens group (3) includes two non-spherical lenses, the focal length point of described two non-spherical lenses
It Wei not 20-40mm and 30-60mm；Sound wave enhancing and detecting module (4) include quartz tuning-fork (41) and annulus (42), described
Quartz tuning-fork (41) is placed in annulus (42)；The laser beam focus of semiconductor laser (2) output is in quartz tuning-fork (41)
It is interdigital between and be located at the center of annulus (42), the acoustic impedance (Z2) of annulus (42) is greater than 100MPasm-1, quartz tuning-fork
(41) it generates piezoelectric signal and is transmitted to piezoelectric signal data collection system (5), the control is right with data collection system (5)
The piezoelectric signal of generation is demodulated and is acquired, and is connect with computer (6), the computer (6) by upper computer software into
Row real-time communication.
2. a kind of quartzy optoacoustic spectroscopy gas concentration detection apparatus according to claim 1 and method, it is characterised in that: institute
State the laser that semiconductor laser (2) are the output of near-infrared continuously adjustable single longitudinal mode.
3. a kind of quartzy optoacoustic spectroscopy gas concentration detection apparatus according to claim 1 and method, it is characterised in that: institute
The resonance frequency range for stating quartz tuning-fork (41) is 20kHz-70kHz, and quality factor is more than or equal to 10000.
4. a kind of quartzy optoacoustic spectroscopy gas concentration detection apparatus according to claim 1 and method, it is characterised in that: institute
The material for stating annulus (42) is copper.Its acoustic impedance Z2=420MPasm-1。
5. a kind of quartzy optoacoustic spectroscopy gas concentration detection apparatus and side described in any claim in -4 according to claim 1
Method, it is characterised in that: the detection method includes the following steps:
Step 1: opening semiconductor laser (2), make its outgoing laser beam, by laser control module (1) to temperature and electricity
The setting of stream adjusts the output wavelength of semiconductor laser (2), makes its complete blanketing gas Absorption Line；
Step 2: being scanned by controlling with resonant frequency of the data collection system (5) to quartz tuning-fork (41), and use low frequency
Sawtooth wave and high frequency sine-wave superimposed after the above-mentioned laser beam of signal common modulation；
Step 3: modulated laser beam enters to inject annulus (42) from annulus (42) one end after collimation focusing lens group (3)
In, laser beam focus generates sound wave in the center of annulus (42), excited gas molecule；
Step 4: the sound wave generated is transferred to the inner peripheral surface of annulus (42) and is totally reflected, incident acoustic wave and reflected acoustic wave
Standing wave is generated after superposition, and forms acoustic resonance, enhances the acoustic signals of generation；
Step 5: quartz tuning-fork (41) generates piezoelectric current signal after detecting the acoustic signals between fourchette；
Step 6: the piezoelectric current signal generated is transmitted to control and data collection system (5) and passes through the software of computer (6)
Data acquisition and relevant calculation are carried out, obtains the concentration of probe gas.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110646348A (en) * | 2019-10-15 | 2020-01-03 | 哈尔滨工业大学 | Quartz photoacoustic spectrum sensing system based on parallel incidence |
| CN111220551A (en) * | 2019-11-29 | 2020-06-02 | 哈尔滨工业大学 | Photo-thermal spectrum trace gas detection device and method based on tuning fork resonance |
| CN111735797A (en) * | 2020-07-08 | 2020-10-02 | 安徽大学 | Gas sensor based on ultrathin two-dimensional semiconductor material coated quartz tuning fork |
| CN112147076A (en) * | 2020-08-21 | 2020-12-29 | 西安电子科技大学 | Absorption optical path enhanced double-resonance photoacoustic spectrum trace gas detection system |
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