CN109974587B - Geometric error compensation method for laser tracker - Google Patents
Geometric error compensation method for laser tracker Download PDFInfo
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- CN109974587B CN109974587B CN201910320625.9A CN201910320625A CN109974587B CN 109974587 B CN109974587 B CN 109974587B CN 201910320625 A CN201910320625 A CN 201910320625A CN 109974587 B CN109974587 B CN 109974587B
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- G01—MEASURING; TESTING
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Abstract
The invention discloses a geometric error compensation method for a laser tracker, which comprises three parts of precision turntable rotation error measurement, laser tracker geometric error measurement and laser tracker geometric error compensation. The method can effectively compensate the system measurement error caused by the geometric error, improves the measurement precision of the laser tracker, and simultaneously ensures the reliability of the laser tracking measurement system based on the multilateral method. The method has the characteristics that the function relations of ep2, eq2 and eh2 and eb do not need to be analyzed respectively, only eb needs to be determined, and the calculation workload is simplified.
Description
Technical Field
The invention relates to the field of laser measurement, in particular to a geometric error compensation method for a laser tracker.
Background
The laser tracker is a high-precision large-size measuring instrument in the field of industrial measurement. The device has the characteristics of large measurement space, high measurement efficiency, high measurement precision, simplicity in operation and the like, is similar to a portable three-coordinate measuring machine, and is widely applied to the fields of ship manufacturing, automobile manufacturing, aircraft manufacturing and the like. The laser tracker is a measuring system based on the multilateral method principle, and is specially used for calibrating high-grade numerical control equipment such as a three-coordinate measuring machine, a numerical control machine tool and the like. Although the multilateral method is the method with the highest theoretical accuracy among various methods for calibrating numerical control equipment using a laser tracking measurement system, the laser tracker itself is also required to have higher measurement accuracy. However, there is no method and apparatus for compensating geometric errors of laser tracker. Therefore, the geometric error compensation method for the laser tracker can effectively improve the measurement accuracy of the system and simultaneously ensure the reliability of the laser tracking measurement system based on the multilateral method.
Disclosure of Invention
The invention aims to compensate the system measurement error of a laser tracker caused by geometric error (namely processing error and installation error), and provides a geometric error compensation method of the laser tracker.
According to the method for verifying that the standard spherical reflector of the laser tracking measurement system reduces the shafting run-out error, the rotation errors of the vertical rotation shafting and the horizontal rotation shafting cannot influence the measurement precision of the laser tracker. According to the geometric error compensation method of the laser tracking measurement system with the standard ball as the reflecting device, the system measurement accuracy of the laser tracker is determined only by various geometric errors and is irrelevant to the measured distance of the target mirror.
The invention adopts the technical scheme that the method for compensating the geometric error of the laser tracker comprises three parts, namely precision turntable rotation error measurement, laser tracker geometric error measurement and laser tracker geometric error compensation.
As shown in fig. 1, the positional relationship of the optical elements in the precision turret revolution error measuring section is as follows:
the precise rotary table 2, the magnetic meter stand 7 and the first computer 8 are arranged on the marble platform 1, and the level of the table surface of the marble platform 1 and the reference surface is ensured. An electric two-dimensional platform 3 is arranged on the table surface of the precision rotary table 2, and a magnetic gauge stand 4 and a standard ball 5 are fixed on the electric two-dimensional platform 3. The pen type grating 6 is installed on the magnetic force gauge stand 7, and simultaneously the pen type grating 6 is used to measure the spherical surface of the standard ball 5, and the measured data is transmitted to the first computer 8. Fourier analysis is carried out on the measured data, and a main error component e caused by the installation eccentricity of the standard ball 5 and the precision rotary table 2 is removedp1I.e. the first harmonic component. The other harmonic components include the sphericity error e of 5 standard spheresq1And the rotation error e of 2 shafting of the precision turntableh1. The sphericity error of the standard sphere 5 used in the present method is 50 nm.
The comprehensive error diagram of the sphericity error of the standard ball and the rotation error of the shafting of the precision turntable after the installation eccentricity errors of the standard ball 5 and the precision turntable 2 are removed is shown in fig. 2.
As shown in fig. 3, the positional relationship of the optical elements given to a part of the laser tracker geometry error measurement section is as follows:
the method comprises the steps of installing a precise rotary table 2 and a cat eye vertical movement structure 11 on a marble platform 1, ensuring that a table top of the marble platform 1 is horizontal to a reference surface, installing an electric two-dimensional platform 3 on the table top of the precise rotary table 2, fixing a laser tracker 9 on the electric two-dimensional platform 3, adjusting a laser beam 10 of the laser tracker 9 to be aligned with the center of a cat eye 25 of the cat eye vertical movement structure 11, adjusting an L-shaped connecting frame and a vertical sliding table 15 of the cat eye vertical movement structure 11, ensuring that a U-shaped connecting frame 34 can move from a lowest limit position to a highest limit position along a vertical direction in a fixed step length, completing rotation of plus and minus 180 degrees by the laser tracker 9 in each step of movement of the U-shaped connecting frame 34, and completing measurement of the movement amount of the cat eye 25 in the rotation process, wherein the laser tracker 9 takes 3 degrees as the rotation step lengthPreliminary data acquisition for the entire measurement volume as shown in fig. 4, where L T denotes the position of the laser tracker 9, T1And T2Two extreme measurement positions of the laser tracker 9 in the pitch direction, α, respectively1And α1The two rotation angles of the horizontal rotating shaft respectively correspond to the two extreme measurement positions.
The collected data comprises the laser tracker 9 and the installation eccentric error e of the precision rotary table 2p22-axis rotation error e of precision turntableh1And the amount of error e to be compensated for by the laser tracker 9b. Error e to be compensated for in the laser tracker 9bAn eccentric error e is arranged between a standard ball inside the laser tracker 9 and two perpendicular axesp2Sphericity error e of standard sphere inside laser tracker 9q2And the rotating error e of the 9 shaft system of the laser trackerh2And (4) forming.
As shown in fig. 5, the cat eye vertical movement structure 11 includes, from top to bottom, a cat eye 25, a U-shaped link 24, a total connection plate 23, a third manual two-dimensional slide table 28, a second manual two-dimensional slide table 26, a first manual two-dimensional slide table 22, a PSD connection plate 29, a support column 21, a two-dimensional angle adjustment frame 20, a PSD module 30, a plane mirror 19, an L-type link 27, a vertical slide table 15, a data line 34, a collimated laser beam 31, a positioning laser beam 18, a steel frame 14, a second computer 33, a positioning hole plate 12, a laser 32, a first pentagonal prism 13, a laser interferometer 17, and a second pentagonal prism 16.
The lateral surface of the steel frame 14 is provided with two symmetrical columns of sixteen through holes along the vertical direction, the back surface of the L type connecting frame 27 is provided with two columns of six threaded holes, the height position of the L type connecting frame 27 on the steel frame 14 can be changed through threaded connection, the vertical sliding table 15 is installed on the L type connecting frame 27 through threaded connection, the second manual two-dimensional sliding table 26 is installed at the upper end of the vertical sliding table 15 through threaded connection, the U-shaped connecting frame 24 is installed at the upper end of the second manual two-dimensional sliding table 26 through threaded connection, the cat eye 25 is installed inside the U-shaped connecting frame 24 through threaded connection, and the cat eye 25 can move in the full measuring space in the pitching direction of the laser tracker 9 by matching the connection sequence of the through holes of the steel frame 14 and the threaded holes of the L type connecting frame 27 and adjusting the vertical sliding table 15 up and.
The third manual two-dimensional sliding table 28 is mounted on the lower surface of the general connecting plate 23 in a threaded manner and is mounted together with the PSD module 30 through a PSD connecting plate 29. The collimated laser beam 31 emitted from the laser 32 is redirected by the first pentagonal prism 13 and then is irradiated onto the PSD module 30 in the vertical direction. The measurement data of the PSD module 30 is transmitted to a second computer 33 through a data line 34 for measuring the straightness error of the movement of the cat eye 25 in the vertical direction.
The first manual two-dimensional sliding table 22 is mounted on the lower surface of the general connecting plate 23 by means of screw connection and is mounted together with the plane mirror 19 by means of the two-dimensional angle adjusting frame 20. The positioning laser beam 18 from the laser interferometer 17 is redirected by the second pentaprism 16 and then irradiated onto the plane mirror 19 in the vertical direction. The measurement of the plane mirror 19 by using the laser interferometer 17 is used to realize the measurement of the positioning error of the movement of the cat eye 25 in the vertical direction.
After the laser tracker 9 finishes data acquisition in the whole measurement space as shown in fig. 4, a coordinate system O-xy.o point of the measurement system as shown in fig. 6 is established as the rotation center of the precision turntable 2, point L is the rotation center of the laser tracker 9, point T is the position of the cat eye 25, the y axis corresponds to the zero point position of the laser tracker 9, a and b are the eccentric distances of the laser tracker 9 in the x and y directions, and theta is thetaiFor the angle of rotation of the precision turntable 2,/θi+ c is the distance from the center of the laser tracker 9 to the center of the cat eye 25, lθiMeasured for the laser tracker 9 whenθiWhen c is 0, the initial distance from the center of the laser tracker 9 to the center of the cat eye 25, i.e., l is the radius of gyration of the fitted precision turret 2. The formula (1) is solved by a least square method, and a, b, c and l are calculated according to the formula (2).
For simplicity of expression, constant characters E, F, G are introduced to indicate the product of specified constants, i.e., E ═ al, F ═ bl, and G ═ c, respectively2-a2-b2-l2. Wherein i represents the number of measurements and N is the total number of measurements.
A, b, c and lθiSubstituting into the formula (3), can calculate l at any angleθ. At this time, |θContains two parts of information, namely the shafting rotation error e of the precision rotary table 2h1And the amount of error e to be compensated for by the laser tracker 9b。
As in equation (4), atθMiddle-eliminating 2-axis rotation error e of precision rotary tableh1Then, the error e to be compensated of the laser tracker 9 can be obtainedb。
eb＝lθ-eh1(4)
Compared with the prior art, the method for compensating the geometrical error of the laser tracker effectively compensates the system measurement error caused by the geometrical error, improves the measurement precision of the laser tracker, and simultaneously ensures the reliability of the laser tracking measurement system based on the multilateral method. The invention is characterized in that it is not necessary to analyze e separatelyp2、eq2And eh2And ebOnly the functional relationship of e needs to be determinedbThat is, the workload of calculation is simplified.
Drawings
FIG. 1 is a schematic view of a rotation error measuring part of a precision turntable.
FIG. 2 is a comprehensive error chart containing standard sphericity error and rotation error of a precise rotary table shafting.
Fig. 3 is a schematic diagram of a geometric error measuring part of the laser tracker.
Fig. 4 is a schematic view of the measurement space of the laser tracker.
Fig. 5 is a schematic view of the vertical movement structure of the cat eye.
Fig. 6 is a schematic diagram of the measurement of the geometric error of the laser tracker.
Fig. 7 is an error map of the laser tracker to be compensated.
The mark in the figure is 1-marble platform, 2-precise turntable, 3-electric two-dimensional platform, 4-magnetic gauge stand, 5-standard ball, 6-pen type grating, 7-magnetic gauge stand, 8-first computer, 9-laser tracker, 10-laser tracker laser beam, 11-cat eye vertical movement structure, 12-positioning orifice plate, 13-first pentagonal prism, 14-steel frame, 15-vertical sliding table, 16-second pentagonal prism, 17-laser interferometer, 18-positioning laser beam, 19-plane reflector, 20-two-dimensional angle adjusting stand, 21-support column, 22-first manual two-dimensional sliding table, 23-total connection plate, 24-U type connection frame, 25-cat eye, 26-second manual two-dimensional sliding table, 27-L type connection frame, 28-third manual two-dimensional sliding table, 29-PSD connection plate, 30-PSD module, 31-collimation laser beam, 32-laser, 33-second computer, 34-data line.
Detailed Description
The invention is described in further detail below with reference to the figures and the detailed description. However, it should not be understood that the scope of the above-described subject matter of the present invention is limited to the following embodiments, and any technique realized based on the present invention is within the scope of the present invention.
Another method of compensating for geometric errors using a laser tracker requires the use of two sets of equipment and performs three main steps. The main devices are a precision turntable rotation error measuring device shown in figure 1 and a laser tracker geometric error measuring device shown in figure 3 respectively.
As shown in fig. 1, the precision turntable rotation error measuring apparatus is provided as follows:
the precise rotary table 2, the magnetic meter stand 7 and the first computer 8 are arranged on the marble platform 1, and the level of the table surface of the marble platform 1 and the reference surface is ensured. An electric two-dimensional platform 3 is arranged on the table surface of the precision rotary table 2, and a magnetic gauge stand 4 and a standard ball 5 are fixed on the electric two-dimensional platform 3. The pen type grating 6 is installed on the magnetic force gauge stand 7, and simultaneously the pen type grating 6 is used to measure the spherical surface of the standard ball 5, and the measured data is transmitted to the first computer 8.
As shown in fig. 3 and 5, the laser tracker geometry error measuring device is set as follows:
an L-type connecting frame 27 is installed on a steel frame 14 through a threaded connection, a vertical sliding table 15 is installed on a L-type connecting frame 27 through a threaded connection, a second manual two-dimensional sliding table 26 is installed at the upper end of the vertical sliding table 15 through a threaded connection, a U-shaped connecting frame 24 is installed at the upper end of the second manual two-dimensional sliding table 26 through a threaded connection, a cat eye 25 is installed inside the U-shaped connecting frame 24 through a threaded connection, a third manual two-dimensional sliding table 28 is installed on the lower surface of a main connecting plate 23 through a threaded connection and is installed together with a PSD module 30 through a connecting plate 29, a collimated laser beam 31 emitted by a laser 32 is changed in direction by a first pentagonal prism 13 and then irradiates on the PSD module 30 in the vertical direction, measurement data of the PSD interferometer 30 is transmitted to a second computer 33 through a data line 34, a first manual two-dimensional sliding table 22 is installed on the lower surface of the main connecting plate 23 through a threaded connection and is installed together with a plane mirror 19 through a two-dimensional angle adjusting frame 20, and a positioning laser interferometer 18 emitted by a laser 17 is changed in the direction and irradiates on a plane mirror 19.
The measurement steps are as follows:
firstly, the measurement of the rotation error of the precision turntable 2 is completed by using a precision turntable rotation error measuring device. The measuring axis of the pen type grating 6 is roughly adjusted to pass through the rotation axis of the precision turntable 2, measuring data of three rotations of the precision turntable 2 are continuously collected, and the measuring data are transmitted to a first computer 8. Fourier analysis is carried out on the measured data, and error components e caused by installation eccentricity of the standard ball 5 and the precision rotary table 2 are removedp1I.e. the first harmonic component. The other harmonic components include the sphericity error e of 5 standard spheresq1And the rotation error e of 2 shafting of the precision turntableh1. The comprehensive error diagram of the sphericity error of the standard ball and the rotation error of the shafting of the precision turntable after the installation eccentricity errors of the standard ball 5 and the precision turntable 2 are removed is shown in fig. 2.
Secondly, the geometric error measuring device of the laser tracker is used for completing the rotation error of the 2 shafting of the precision turntableeh1And the laser tracker 9 to be compensated for error ebThe measurement of (2). As shown in fig. 3 and 4, the cat eye 25 is moved to the T2 position, the precision turret 2 completes the rotation of ± 180 °, and the measurement data of the laser tracker 9 is recorded. The cat's eye is then raised vertically from T2Position in fixed steps of 1mm towards T1The position moves, every time the precise rotary table 2 moves by one step length, the precise rotary table 2 completes +/-180-degree rotation, and meanwhile the laser tracker 9 completes measurement of the cat eye 25. In the process, the measurement data of the PSD module 30 is used to measure the straightness error of the movement of the cat eye 25 in the vertical direction, and the measurement data of the laser interferometer 17 is used to measure the positioning error of the movement of the cat eye 25 in the vertical direction. According to the straightness error, after each step of the movement of the cat eye 25, the second manual two-dimensional sliding table 26 is adjusted to align the cat eye 25 with the zero position of the vertical rotating shaft of the laser tracker 9 again. And simultaneously adjusting the third manual two-dimensional sliding table 28 to align the collimated laser beam 31 to the central position of the PSD module 30 again. According to the positioning error, after each step of the movement of the cat eye 25, the vertical sliding table 15 is adjusted to ensure the accuracy of the movement displacement of the cat eye 25.
After the laser tracker 9 finishes data acquisition in the whole measurement space as shown in fig. 4, a coordinate system O-xy.o point of the measurement system as shown in fig. 6 is established as the rotation center of the precision turntable 2, point L is the rotation center of the laser tracker 9, point T is the position of the cat eye 25, the y axis corresponds to the zero point position of the laser tracker 9, a and b are the eccentric distances of the laser tracker 9 in the x and y directions, and theta is thetaiFor the angle of rotation of the precision turntable 2,/θi+ c is the distance from the center of the laser tracker 9 to the center of the cat eye 25, lθiFor the laser tracker 9 measurement, c is the initial distance from the center of the laser tracker 9 to the center of the cat's eye 25, i.e., /)θiWhen 0, l is the radius of gyration of the fitted precision turntable 2. Equation (5) is solved by the least square method, and a, b, c and l are calculated according to equation (6).
For simplicity of expression, constant characters E, F, G are introduced to indicate the product of specified constants, i.e., E ═ al, F ═ bl, and G ═ c, respectively2-a2-b2-l2. Wherein i represents the number of measurements and N is the total number of measurements.
A, b, c and lθiSubstituting into equation (7), it is possible to calculate l at any angleθ. At this time, |θThe method mainly comprises two parts of information, namely a 2-axis rotation error e of the precision turntableh1And the amount of error e to be compensated for by the laser tracker 9b。
In lθMiddle-eliminating 2-axis rotation error e of precision rotary tableh1Then, the error e to be compensated of the laser tracker 9 can be obtainedb。
Here the sphericity error e of the standard sphere 5q1And the shafting rotation error e of the precision rotary table 2h1Mixed together, the method does not separate the two errors, because the sphericity error of the standard sphere 5 used in the method is 50nm, which can be ignored. I.e. the error e to be compensated for of the laser tracker 9bSee equation (8), the error compensation map is shown in FIG. 7.
eb＝lθ-(eh1+eq1) (8)
By using the geometric error compensation method of the laser tracker, the system measurement error caused by the geometric error can be effectively compensated, the measurement precision of the laser tracker is improved, and the reliability of the laser tracking measurement system based on the multilateral method is also ensured.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention, and many modifications are possible in the present embodiments, as those skilled in the art will recognize. The general principles defined in this method may be embodied in other specific embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (4)
1. A geometric error compensation method for a laser tracker is characterized by comprising the following steps: the steps of the compensation method are as follows,
firstly, a precision rotary table rotation error measuring device is used for measuring the rotation error of a precision rotary table (2); adjusting the measuring axis of the pen type grating (6) to pass through the rotation axis of the precision rotary table (2), continuously collecting the measuring data of three circles of rotation of the precision rotary table (2), and transmitting the measuring data to a first computer (8); fourier analysis is carried out on the measured data, and error components e caused by installation eccentricity of the standard ball (5) and the precise rotary table (2) are removedp1I.e. the first harmonic component; the rest order harmonic components comprise the sphericity error e of the standard sphere (5)q1And the rotation error e of the shaft system of the precise turntable (2)h1；
Secondly, the geometric error measuring device of the laser tracker is used for completing the rotation error e of the shafting of the precision turntable (2)h1And the laser tracker (9) to be compensated error ebMeasuring (2); firstly, moving the cat eye (25) to a T2 position, completing the rotation of +/-180 degrees by the precision turntable (2), and simultaneously recording the measurement data of the laser tracker (9); the cat's eye is then raised vertically from T2Position in fixed steps of 1mm towards T1The position is moved, every time the precise rotary table (2) moves by one step length, the precise rotary table (2) completes the rotation of +/-180 degrees, and meanwhile, the laser tracker (9) completes the measurement of the cat eye (25); in the process, the measurement data of the PSD module (30) is used for measuring the straightness error of the movement of the cat eye (25) along the vertical direction, and the measurement data of the laser interferometer (17) is used for measuring the positioning error of the movement of the cat eye (25) along the vertical direction; according to the straightness error, after each step of movement of the cat eye (25), adjusting a second manual two-dimensional sliding table (26) to enable the cat eye (25) to align with the zero position of the vertical rotating shaft of the laser tracker (9) again; meanwhile, a third manual two-dimensional sliding table (28) is adjusted to enable the collimated laser beam (31) to be aligned to the central position of the PSD module (30) again; according to the positioning error, after each step of the movement of the cat eye (25), the vertical sliding table (15) is adjusted to ensureAccuracy of displacement of the cat eye (25);
after the laser tracker (9) finishes data acquisition of the whole measurement space, a coordinate system O-xy of the measurement system is established, wherein a point O is the rotation center of the precision turntable (2), a point L is the rotation center of the laser tracker (9), a point T is the position of the cat eye (25), the y axis corresponds to the zero point position of the laser tracker (9), a and b are the eccentric distances of the laser tracker (9) in the x and y directions, and theta is thetaiFor the angle of rotation of the precision turntable (2) |θi+ c is the distance from the center of the laser tracker (9) to the center of the cat eye (25), lθiIs the measured value of the laser tracker (9), and c is the initial distance from the center of the laser tracker (9) to the center of the cat eye (25), i.e. whenθiWhen the value is equal to 0, l is the turning radius of the fitted precision turntable (2); solving a formula (1) by a least square method, and calculating a, b, c and l according to the formula (2);
for simplicity of expression, constant characters E, F, G are introduced to indicate the product of specified constants, i.e., E ═ al, F ═ bl, and G ═ c, respectively2-a2-b2-l2(ii) a Wherein i represents the number of times of measurement, and N is the total number of times of measurement;
a, b, c and lθiSubstituting into the formula (3), can calculate l at any angleθ(ii) a At this time, |θThe method comprises two parts of information, namely a precision turntable (2) shafting rotation error eh1And the amount of error e to be compensated for by the laser tracker (9)b；
In lθEliminating the rotation error e of the shafting of the precise rotary table (2)h1Then, the error e to be compensated of the laser tracker (9) can be obtainedb；
Here, the sphericity error e of the standard ball (5)q1And the shafting rotation error e of the precision rotary table (2)h1Mixed together, the method does not separate the two errors;
eb＝lθ-(eh1+eq1) (4) 。
2. the method of claim 1, wherein the method comprises the steps of:
the precision turntable rotation error measuring device is arranged as follows:
installing the precise rotary table (2), the magnetic meter frame (7) and the first computer (8) on the marble platform (1), and ensuring the table surface of the marble platform (1) to be horizontal to the reference surface; an electric two-dimensional platform (3) is arranged on the table surface of a precision turntable (2), and a magnetic gauge stand (4) and a standard ball (5) are fixed on the electric two-dimensional platform (3); the pen type grating (6) is arranged on a magnetic meter frame (7), the pen type grating (6) is used for measuring the spherical surface of the standard ball (5), and the measured data is transmitted to a first computer (8);
the laser tracker geometric error measuring device is set as follows:
an L-type connecting frame (27) is installed on a steel frame (14) through threaded connection, a vertical sliding table (15) is installed on a L-type connecting frame (27) through threaded connection, a second manual two-dimensional sliding table (26) is installed at the upper end of the vertical sliding table (15) through threaded connection, a U-shaped connecting frame (24) is installed at the upper end of the second manual two-dimensional sliding table (26) through threaded connection, a cat eye (25) is installed inside the U-shaped connecting frame (24) through threaded connection, a third manual two-dimensional sliding table (28) is installed on the lower surface of a main connecting plate (23) through threaded connection and is installed with a PSD module (30) through a PSD connecting plate (29), a collimation laser beam (31) emitted by a laser (32) is changed by a first pentagonal prism (13) and then is irradiated on the main connecting plate (30) in the vertical direction, measurement data of the PSD module (30) is transmitted to a second computer (33) through a data line (34), a first manual two-dimensional sliding table (22) is installed on the main connecting plate (19) through threaded connection and is positioned on a reflecting plane of a second laser mirror (19) through a reflecting mirror (19) and is irradiated on a vertical reflecting plane (19) through a second reflecting mirror (19) and is positioned by a second reflecting mirror (19).
3. The method of claim 1, wherein the method comprises the steps of:
the positional relationship of the optical elements in the precision turntable rotation error measuring section is as follows,
the precise rotary table (2), the magnetic meter frame (7) and the first computer (8) are arranged on the marble platform (1), and the table surface of the marble platform (1) is ensured to be horizontal to the reference surface; an electric two-dimensional platform (3) is arranged on the table surface of a precision turntable (2), and a magnetic gauge stand (4) and a standard ball (5) are fixed on the electric two-dimensional platform (3); the pen type grating (6) is arranged on a magnetic meter frame (7), the pen type grating (6) is used for measuring the spherical surface of the standard ball (5), and the measured data is transmitted to a first computer (8); fourier analysis is carried out on the measured data, and a main error component e caused by the installation eccentricity of the standard ball (5) and the precise rotary table (2) is removedp1I.e. the first harmonic component; the rest order harmonic components comprise the sphericity error e of the standard sphere (5)q1And the rotation error e of the shaft system of the precise turntable (2)h1(ii) a The sphericity error of the standard sphere (5) used in the method is 50 nm.
4. The method of claim 1, wherein the method comprises the steps of:
the positional relationship given to part of the optical elements in the geometric error measuring section of the laser tracker is as follows,
the precise rotary table (2) and the cat eye vertical moving structure (11) are arranged on the marble platform (1), and the table surface of the marble platform (1) is ensured to be horizontal to the reference surface; an electric two-dimensional platform (3) is arranged on the table top of a precision turntable (2), and a laser tracker (9) is fixed on the electric two-dimensional platform (3); adjusting a laser beam (10) of the laser tracker (9) to be aligned with the center of a cat eye (25) of the cat eye vertical movement structure (11); regulating deviceAn L-shaped connecting frame and a vertical sliding table (15) of a cat eye vertical moving structure (11) are connected, the U-shaped connecting frame (34) can be guaranteed to move to the highest limit position from the lowest limit position in a vertical direction in a fixed step length, each time the U-shaped connecting frame (34) moves by one step, a laser tracker (9) needs to complete rotation of plus or minus 180 degrees, and measurement of the moving amount of a cat eye (25) is completed in the rotation process, the laser tracker (9) takes 3 degrees as the rotation step length, and preliminary data collection of the whole measurement space is completed, wherein L T represents the position of the laser tracker (9), and T represents the position of the cat eye (9)1And T2Respectively representing two extreme measurement positions of the laser tracker (9) in the pitch direction, α1And α1The rotating angles of the horizontal rotating shaft respectively correspond to the two limit measuring positions;
the collected data comprises a laser tracker (9) and a mounting eccentric error e of the precision turntable (2)p2The rotation error e of the shafting of the precise rotary table (2)h1And the amount of error e to be compensated for by the laser tracker (9)b(ii) a Error e to be compensated for in the laser tracker (9)bAn eccentric error e is arranged between a standard ball inside the laser tracker (9) and two mutually vertical shaft systemsp2Sphericity error e of standard ball inside laser tracker (9)q2And the rotation error e of the laser tracker (9) axish2Forming;
the cat eye vertical moving structure (11) sequentially comprises a cat eye (25), a U-shaped connecting frame (24), a general connecting plate (23), a third manual two-dimensional sliding table (28), a second manual two-dimensional sliding table (26), a first manual two-dimensional sliding table (22), a PSD connecting plate (29), a support column (21), a two-dimensional angle adjusting frame (20), a PSD module (30), a plane reflector (19), an L-shaped connecting frame (27), a vertical sliding table (15), a data line (34), a collimated laser beam (31), a positioning laser beam (18), a steel frame (14), a second computer (33), a positioning hole plate (12), a laser (32), a first pentagonal prism (13), a laser interferometer (17) and a second pentagonal prism (16) from top to bottom;
the lateral surface of a steel frame (14) is provided with two symmetrical columns of sixteen through holes in the vertical direction, the back surface of an L-type connecting frame (27) is provided with two columns of six threaded holes, the height position of the L-type connecting frame (27) on the steel frame (14) can be changed through threaded connection, a vertical sliding table (15) is installed on a L-type connecting frame (27) in a threaded connection mode, a second manual two-dimensional sliding table (26) is installed at the upper end of the vertical sliding table (15) in a threaded connection mode, a U-shaped connecting frame (24) is installed at the upper end of the second manual two-dimensional sliding table (26) in a threaded connection mode, a cat eye (25) is installed inside the U-shaped connecting frame (24) in a threaded connection mode, and the cat eye (25) can move in the full measurement space in the pitching direction of a laser tracker (9) by matching the connection sequence of the through holes of the steel frame (14) and the threaded holes of the L-type connecting frame (27;
a third manual two-dimensional sliding table (28) is mounted on the lower surface of the main connecting plate (23) in a threaded connection mode and is mounted together with the PSD module (30) through a PSD connecting plate (29); a collimated laser beam (31) emitted by a laser (32) is changed in direction by a first pentagonal prism (13) and then irradiates a PSD module (30) along the vertical direction; the measurement data of the PSD module (30) is transmitted to a second computer (33) through a data line (34) and is used for measuring the straightness error of the movement of the cat eye (25) along the vertical direction;
a first manual two-dimensional sliding table (22) is arranged on the lower surface of a main connecting plate (23) in a threaded connection mode and is arranged together with a plane reflector (19) through a two-dimensional angle adjusting frame (20); a positioning laser beam (18) emitted by the laser interferometer (17) is changed in direction by the second pentagonal prism (16) and then irradiates the plane mirror (19) along the vertical direction; the measurement of the plane mirror (19) by using the laser interferometer (17) is used for realizing the measurement of the positioning error of the movement of the cat eye (25) along the vertical direction.
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