CN109970131B - A effluent treatment plant for nanometer chip production line - Google Patents
A effluent treatment plant for nanometer chip production line Download PDFInfo
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- CN109970131B CN109970131B CN201910119017.1A CN201910119017A CN109970131B CN 109970131 B CN109970131 B CN 109970131B CN 201910119017 A CN201910119017 A CN 201910119017A CN 109970131 B CN109970131 B CN 109970131B
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
- C02F2101/16—Nitrogen compounds, e.g. ammonia
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
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Abstract
The invention provides a wastewater treatment device for a nano chip production line, which improves the treatment effect by arranging a stirring device in a pretreatment tower, utilizes a transmission shaft to do up-and-down reciprocating motion, and a turning blade continuously turns over liquid at the lower part of the pretreatment tower, so that the liquid at the lower part enters a stirring area of the stirring blade, and no dead angle is ensured during stirring; the transmission shaft is utilized to drive the rotating shaft to rotate, so that the liquid in the preconditioning tower is stirred, sufficient reaction is ensured, and the reaction efficiency is improved; the plurality of annular spraying pipes correspond to the packing boxes one by one, so that the packing is ensured to fully perform gas-liquid exchange, and the stripping efficiency is improved; vibrating parts are arranged at the bottoms of the main stripping tower and the auxiliary stripping tower, and the vibrating cylinders are used for impacting the packing parts, so that the packing parts vibrate; utilize the body structure of packing, the transmissibility of vibration makes whole packing vibrate together, avoids the filler to block up, guarantees that main blows and takes off the mobility of the interior liquid of tower, vice blowing and takes off the tower and the permeability of air current, further improves the ammonia nitrogen and blows off the rate.
Description
Technical Field
The invention relates to the technical field of wastewater treatment, in particular to a wastewater treatment device for a nano chip production line.
Background
Nano materials are widely applied in the field of chips, the chips are also called semiconductor elements, the essence of the nano materials is a silicon chip, the silicon chip is an important carrier of integrated circuits and can play an important role in the field of electronic information technology, and chips with smaller nano-scale number mean better performance. In the manufacturing process of the nano chip, a series of processes such as photoetching, deposition, cleaning and the like are carried out, then packaging and electrical property testing are carried out, and finally a terminal product is formed. At present, in the manufacturing process of nano chip, can produce a large amount of industrial waste water, including containing ammonia waste water, fluorine-containing waste water, CMP waste water, acid-base waste water, organic waste water, waste gas washing tower waste water, wherein contain ammonia waste water and produce at washing, sculpture, degumming process, contain ammonia waste water including dense ammonia waste water and weak ammonia waste water, the main pollutant index in the dense ammonia waste water is ammonia nitrogen, but the ubiquitous shortcoming of blowing off tower filler easily blockked up, that gets rid of inefficiency of current dense ammonia waste water processing apparatus.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a wastewater treatment device for a nano chip production line, which has the characteristic of high removal efficiency.
The technical scheme for solving the problems comprises the following steps: a wastewater treatment device for a nano chip production line comprises a preconditioning tower, a main stripping tower, an auxiliary stripping tower, an absorption tower and a liquid storage tank;
the upper end of the preconditioning tower is provided with a liquid supplementing port which is connected with a liquid storage tank through a first pipeline, NaOH solution is arranged in the liquid storage tank, and a first valve is arranged on the first pipeline;
a liquid inlet is formed in the upper part of the preconditioning tower, a waste liquid port is formed in the lower end of the preconditioning tower, a liquid outlet is formed in the lower part of the preconditioning tower, the liquid outlet is communicated with a second pipeline, and a second valve and a first water pump are arranged on the second pipeline; a pH detection port is arranged on the preconditioning tower, and a pH probe is inserted into the pH detection port;
an opening is formed in the upper end face of the preconditioning tower, a driving shaft is arranged on one side of the opening and is of an L-shaped structure, one end of the driving shaft penetrates through the mounting seat to be connected with a first motor shaft, the first motor drives the driving shaft to rotate, and the driving shaft is rotatably connected with the mounting seat through a rolling bearing; the other end of the driving shaft is hinged with a connecting rod, and one end of the connecting rod, which is far away from the driving shaft, is hinged with the transmission shaft; the transmission shaft is provided with external threads and is positioned in the rotating shaft, and the transmission shaft is in threaded connection with the rotating shaft;
the rotating shaft is of a hollow structure, is positioned in the preconditioning tower, is fixed in the preconditioning tower through a supporting seat, and is rotationally connected with the supporting seat through a rolling bearing; the outer cylindrical surface of the rotating shaft is connected with a stirring device;
the upper end surface of the main stripping tower is provided with an air outlet which is connected with the absorption tower through a third pipeline, and the third pipeline is provided with a third valve; the lower part of the main stripping tower is provided with a gas inlet, the gas inlet is connected with the blower through a fourth pipeline, and a fourth valve is arranged on the fourth pipeline; an outlet is formed in the lower end face of the main stripping tower and connected with the auxiliary stripping tower through a fifth pipeline, and a fifth valve and a second water pump are arranged on the fifth pipeline;
an annular boss is arranged in the main stripping tower, a packing element is placed on the annular boss and comprises packing boxes and packing columns, the packing boxes are distributed along the Y direction, two adjacent packing boxes are connected through the packing columns, and the packing columns are arranged in an annular array around the central axis of the packing boxes; the stuffing boxes and the stuffing columns are of grid structures, and polyhedral hollow ball stuffing is arranged in the stuffing boxes and the stuffing columns;
an annular spraying pipe is arranged above each stuffing box, and a plurality of spraying nozzles are arranged on the annular spraying pipe; the annular spraying pipe is communicated with the second pipeline through a sixth pipeline; the bottom of the main stripping tower is provided with a vibrating piece;
the structure of the auxiliary stripping tower is completely the same as that of the main stripping tower, the outlet of the auxiliary stripping tower is connected with a wastewater pool through a seventh pipeline, and a sixth valve is arranged on the seventh pipeline; the gas outlet of the auxiliary stripping tower is connected with the absorption tower through an eighth pipeline, and a seventh valve is arranged on the eighth pipeline;
the absorption tower top is equipped with the gas vent, and the absorption tower bottom is equipped with the air inlet, is equipped with the shower nozzle in the absorption tower, and the shower nozzle is connected with sulphuric acid storage tank, and the shower nozzle sprays sulphuric acid to wash waste gas in to the absorption tower.
Furthermore, the stirring device comprises transition rods, stirring rods and stirring blades, the transition rods are annularly arrayed around the central axis of the rotating shaft, one end of each transition rod is connected with the rotating shaft, and the other end of each transition rod is connected with the stirring rod; be equipped with a plurality of stirring leaves on the puddler, the stirring leaf distributes along the Y direction, and the stirring leaf is V-arrangement structure, and the size of stirring leaf reduces along Y direction from the top down gradually, and crisscross distribution between two adjacent stirring leaves, contained angle are 90.
Furthermore, one end of the transmission shaft, which is far away from the connecting rod, is connected with a stirring shaft, the stirring shaft is provided with a plurality of turning blades, the turning blades are positioned in the stirring device and distributed along the Y direction, the turning blades are of a spherical structure, and the sizes of the turning blades are gradually increased from top to bottom along the Y direction.
Furthermore, the vibrating part comprises a base, a second motor, a crank, a sliding rod, a driving rod, an installation barrel and a vibrating barrel, wherein the crank is of an L-shaped structure and is rotatably connected with the base;
a first spring is arranged above the connecting ring, and two ends of the first spring are respectively connected with the connecting ring and the vibrating cylinder; a second spring is arranged below the connecting ring, and two ends of the second spring are respectively connected with the connecting ring and the vibration cylinder; the vibration cylinder is positioned in the installation cylinder, and a clamping ring is arranged on the outer cylindrical surface of the vibration cylinder;
the mounting cylinder is fixed on the base, a through hole is formed in the mounting cylinder, a first annular platform and a second annular platform are arranged in the through hole, and the first annular platform is located above the second annular platform; a third spring is arranged above the clamping ring, and two ends of the third spring are respectively connected with the clamping ring and the first annular platform; and a fourth spring is arranged below the clamping ring, and two ends of the fourth spring are respectively connected with the clamping ring and the second annular platform.
The invention has the following beneficial effects: the invention has good treatment effect and high stripping efficiency; the stirring device is arranged in the pretreatment tower, so that the treatment effect is improved, and a crank-slider structure is formed by utilizing the driving shaft, the connecting rod and the transmission shaft; the transmission shaft reciprocates up and down, the turning blade turns the liquid at the lower part of the preconditioning tower ceaselessly, so that the liquid at the lower part enters a stirring area of the stirring blade, no dead angle is ensured during stirring, the transmission shaft is utilized to drive the rotating shaft to rotate, the stirring rod performs circular motion, the liquid in the preconditioning tower is stirred, sufficient reaction is ensured, and the reaction efficiency is improved; the plurality of annular spraying pipes correspond to the packing boxes one by one, so that the packing is ensured to fully perform gas-liquid exchange, and the stripping efficiency is improved; vibrating parts are arranged at the bottoms of the main stripping tower and the auxiliary stripping tower, and the vibrating cylinders are used for impacting the packing parts, so that the packing parts vibrate; utilize the body structure of packing, the transmissibility of vibration makes whole packing vibrate together, avoids the filler to block up, guarantees that main blows and takes off the mobility of the interior liquid of tower, vice blowing and takes off the tower and the permeability of air current, further improves the ammonia nitrogen and blows off the rate.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Fig. 2 is a cross-sectional view of a preconditioning column of the present invention.
FIG. 3 is a cross-sectional view of a main stripping column of the present invention.
Fig. 4 is a sectional view of the vibrating member of the present invention.
In the figure: 1-a pre-adjusting tower, 2-a main stripping tower, 3-an auxiliary stripping tower, 4-an absorption tower, 5-a liquid storage tank, 6-a first pipeline, 7-a first valve, 8-a second pipeline, 9-a second valve, 10-a first water pump, 11-a third pipeline, 12-a third valve, 13-a fourth pipeline, 14-a fourth valve, 15-a fifth valve, 16-a fifth pipeline, 17-a second water pump, 18-a sixth pipeline, 19-a seventh pipeline, 20-a sixth valve, 21-an eighth pipeline, 22-a seventh valve, 23-a wastewater pond, 24-a blower, 101-a liquid supplementing port, 102-a wastewater port, 103-a liquid discharging port, 104-a PH probe, 105-a driving shaft, 106-a first motor, 107-connecting rod, 108-transmission shaft, 109-rotating shaft, 110-supporting seat, 111-stirring device, 112-transition rod, 113-stirring rod, 114-stirring blade, 115-stirring shaft, 116-stirring blade, 117-liquid inlet, 201-gas outlet, 202-annular boss, 203-filler part, 204-filler box, 205-filler column, 206-annular spray pipe, 207-spray nozzle, 208-vibration part, 209-base, 210-crank, 212-driving rod, 213-sliding rod, 214-vibration cylinder, 215-connecting ring, 216-first spring, 217-second spring, 218-mounting cylinder, 219-clamping ring, 220-through hole, 221-first annular platform, 222-second annular platform, 223-third spring, 224-fourth spring, 225-gas inlet, 401-gas outlet, 402-gas inlet, 403-shower head, 404-sulfuric acid storage tank.
Detailed Description
The invention is further described with reference to the following drawings and detailed description.
A wastewater treatment device for a nano chip production line comprises a preconditioning tower 1, a main stripping tower 2, an auxiliary stripping tower 3, an absorption tower 4 and a liquid storage tank 5;
the upper end of the preconditioning tower 1 is provided with a liquid supplementing port 101, the liquid supplementing port 101 is connected with a liquid storage tank 5 through a first pipeline 6, NaOH solution is arranged in the liquid storage tank 5, and a first valve 7 is arranged on the first pipeline 6;
a liquid inlet 117 is arranged at the upper part of the pre-adjusting tower 1, a waste liquid outlet 102 is arranged at the lower end of the pre-adjusting tower 1, a liquid outlet 103 is arranged at the lower part of the pre-adjusting tower 1, the liquid outlet 103 is communicated with a second pipeline 8, and a second valve 9 and a first water pump 10 are arranged on the second pipeline 8; a pH detection port is arranged on the preconditioning tower 1, and a pH probe 104 is inserted into the pH detection port;
an opening is formed in the upper end face of the pre-adjusting tower 1, a driving shaft 105 is arranged on one side of the opening, the driving shaft 105 is of an L-shaped structure, one end of the driving shaft 105 penetrates through the mounting seat to be connected with a first motor 106 in a shaft mode, the first motor 106 drives the driving shaft 105 to rotate, and the driving shaft 105 is rotatably connected with the mounting seat through a rolling bearing; the other end of the driving shaft 105 is hinged with the connecting rod 108107, and one end of the connecting rod 108107, which is far away from the driving shaft 105, is hinged with the transmission shaft; the transmission shaft is provided with external threads and is positioned in the rotating shaft 109, and the transmission shaft is in threaded connection with the rotating shaft 109;
the rotating shaft 109 is of a hollow structure, the rotating shaft 109 is positioned in the pre-adjusting tower 1, the rotating shaft 109 is fixed in the pre-adjusting tower 1 through a supporting seat 110, and the rotating shaft 109 is rotatably connected with the supporting seat 110 through a rolling bearing; the outer cylindrical surface of the rotating shaft 109 is connected with a stirring device 111, the stirring device 111 comprises transition rods 112, stirring rods 113 and stirring blades 114, the transition rods 112 surround the central axis of the rotating shaft 109 and are in an annular array, one end of each transition rod 112 is connected with the rotating shaft 109, and the other end of each transition rod 112 is connected with the stirring rod 113; a plurality of stirring blades 114 are arranged on the stirring rod 113, the stirring blades 114 are distributed along the Y direction, the stirring blades 114 are of a V-shaped structure, the size of each stirring blade 114 is gradually reduced from top to bottom along the Y direction, two adjacent stirring blades 114 are distributed in a staggered mode, and the included angle is 90 degrees;
one end of the transmission shaft, which is far away from the connecting rod 108107, is connected with a stirring shaft 115, the stirring shaft 115 is provided with a plurality of turning blades 116, the turning blades 116 are positioned in the stirring device 111, the turning blades 116 are distributed along the Y direction, the turning blades 116 are of a spherical structure, and the sizes of the turning blades 116 are gradually increased from top to bottom along the Y direction;
nitrogen-containing wastewater enters the pre-adjusting tower 1 from a liquid inlet 117, NaOH solution is input into the pre-adjusting tower 1 from a liquid supplementing port 101, and the pH value is detected by a pH probe 104 during adjustment; during the adjustment process, the first motor 106 is started, and the driving shaft 105 rotates; the driving shaft 105, the connecting rod 108107 and the transmission shaft form a crank 210 slider structure; the transmission shaft reciprocates up and down, the turning blade 116 turns the liquid at the lower part of the preconditioning tower 1 continuously, so that the liquid at the lower part enters the stirring area of the stirring blade 114, and no dead angle is ensured during stirring; the transmission shaft is in threaded connection with the rotating shaft 109 and drives the rotating shaft 109 to rotate, so that the stirring rod 113 performs circular motion to stir the liquid in the pre-adjusting tower 1, full reaction is guaranteed, and reaction efficiency is improved;
an air outlet 201 is formed in the upper end face of the main stripping tower 2, the air outlet 201 is connected with the absorption tower 4 through a third pipeline 11, and a third valve 12 is arranged on the third pipeline 11; the lower part of the main stripping tower 2 is provided with a gas inlet 225, the gas inlet 225 is connected with a blower 24 through a fourth pipeline 13, and the fourth pipeline 13 is provided with a fourth valve 14; an outlet is formed in the lower end face of the main stripping tower 2 and is connected with the auxiliary stripping tower 3 through a fifth pipeline 16, and a fifth valve 15 and a second water pump 17 are arranged on the fifth pipeline 16;
an annular boss 202 is arranged in the main stripping tower 2, a packing piece 203 is placed on the annular boss 202, the packing piece 203 comprises packing boxes 204 and packing columns 205, the packing boxes 204 are distributed along the Y direction, two adjacent packing boxes 204 are connected through the packing columns 205, and the packing columns 205 are arranged in an annular array around the central axis of the packing boxes 204; the stuffing box 204 and the stuffing column 205 are both of a grid structure, and polyhedral hollow ball stuffing is arranged in the stuffing box 204 and the stuffing column 205;
an annular spraying pipe 206 is arranged above each stuffing box 204, and a plurality of spraying nozzles 207 and 207 are arranged on the annular spraying pipe 206; the annular shower 206 communicates with the second duct 8 through a sixth duct 18;
the bottom of the main stripping tower 2 is provided with a vibrating piece 208, the vibrating piece 208 comprises a base 209, a second motor, a crank 210, a sliding rod 213, a driving rod 212, a mounting cylinder 218 and a vibrating cylinder 214, the crank 210 is of an L-shaped structure, the crank 210 is rotatably connected with the base 209, one end of the crank 210 penetrates through the base 209 to be connected with the second motor shaft, the other end of the crank 210 is hinged with the driving rod 212, one end, far away from the crank 210, of the driving rod 212 is hinged with the sliding rod 213, the sliding rod 213 is positioned in the vibrating cylinder 214, and one end, far away from the driving rod 212, of the sliding rod 213 is provided with a connecting ring 215;
a first spring 216 is arranged above the connecting ring 215, and two ends of the first spring 216 are respectively connected with the connecting ring 215 and the vibration cylinder 214; a second spring 217 is arranged below the connecting ring 215, and two ends of the second spring 217 are respectively connected with the connecting ring 215 and the vibration cylinder 214; the vibration cylinder 214 is positioned in the installation cylinder 218, and a snap ring 219 is arranged on the outer cylindrical surface of the vibration cylinder 214; the vibration cylinder 214 penetrates through the main stripping tower 2, the vibration cylinder 214 is connected with the main stripping tower 2 in a sliding mode, and the connection position is sealed;
the mounting cylinder 218 is fixed on the base 209, a through hole 220 is formed in the mounting cylinder 218, a first annular platform 221 and a second annular platform 222 are arranged in the through hole 220, and the first annular platform 221 is positioned above the second annular platform 222; a third spring 223 is arranged above the snap ring 219, and two ends of the third spring 223 are respectively connected with the snap ring 219 and the first annular platform 221; a fourth spring 224 is arranged below the snap ring 219, and two ends of the fourth spring 224 are respectively connected with the snap ring 219 and the second annular platform 222;
the structure of the auxiliary stripping tower 3 is completely the same as that of the main stripping tower 2, the outlet of the auxiliary stripping tower 3 is connected with a wastewater pool 23 through a seventh pipeline 19, and a sixth valve 20 is arranged on the seventh pipeline 19; the air outlet 201 of the auxiliary stripping tower 3 is connected with the absorption tower 4 through an eighth pipeline 21, and a seventh valve 22 is arranged on the eighth pipeline 21;
the top of the absorption tower 4 is provided with an exhaust port 401, the bottom of the absorption tower 4 is provided with an air inlet 402, a spray head 403 is arranged in the absorption tower 4, the spray head 403 is connected with a sulfuric acid storage tank 404, and the spray head 403 sprays sulfuric acid into the absorption tower 4 to wash waste gas;
after the nitrogenous wastewater is treated by the pre-adjusting tower 1, the pH value is changed, the nitrogenous wastewater is scattered into the main stripping tower 2 and the auxiliary stripping tower 3 through the annular spray pipes 206, and the annular spray pipes 206 correspond to the packing boxes 204 one by one, so that the sufficient gas-liquid exchange of the packing is ensured, and the stripping efficiency is improved; the vibrating pieces 208 are arranged at the bottoms of the main stripping tower 2 and the auxiliary stripping tower 3, the crank 210 is driven by the second motor to rotate, a crank 210 slider mechanism is formed among the crank 210, the driving rod 212 and the sliding rod 213, the sliding rod 213 moves up and down in the vibrating cylinder 214, the sliding rod 213 enables the first spring 216 and the second spring 217 to deform, the deformation quantities of the first spring 216 and the second spring 217 are different, so that force is generated to drive the vibrating cylinder 214 to move up and down in the mounting cylinder 218, the vibrating cylinder 214 enables the third spring 223 and the fourth spring 224 to deform, the vibrating cylinder 214 reciprocates up and down due to the different deformation quantities of the third spring 223 and the fourth spring 224, and when the vibrating cylinder 214 moves up, the filler pieces 203 are impacted, and the filler pieces 203 vibrate; by utilizing the integral structure of the packing member 203 and the transferability of vibration, the whole packing member 203 vibrates together, so that the packing blockage is avoided, the liquidity of liquid and the permeability of air flow in the main stripping tower 2 are ensured, and the ammonia nitrogen stripping rate is further improved;
many other changes and modifications can be made without departing from the spirit and scope of the invention. It is to be understood that the invention is not to be limited to the specific embodiments, but only by the scope of the appended claims.
Claims (3)
1. A wastewater treatment device for a nano chip production line is characterized by comprising a preconditioning tower, a main stripping tower, an auxiliary stripping tower, an absorption tower and a liquid storage tank;
the upper end of the preconditioning tower is provided with a liquid supplementing port which is connected with a liquid storage tank through a first pipeline, NaOH solution is arranged in the liquid storage tank, and a first valve is arranged on the first pipeline;
a liquid inlet is formed in the upper part of the preconditioning tower, a waste liquid port is formed in the lower end of the preconditioning tower, a liquid outlet is formed in the lower part of the preconditioning tower, the liquid outlet is communicated with a second pipeline, and a second valve and a first water pump are arranged on the second pipeline; a pH detection port is arranged on the preconditioning tower, and a pH probe is inserted into the pH detection port;
an opening is formed in the upper end face of the preconditioning tower, a driving shaft is arranged on one side of the opening and is of an L-shaped structure, one end of the driving shaft penetrates through the mounting seat to be connected with a first motor shaft, the first motor drives the driving shaft to rotate, and the driving shaft is rotatably connected with the mounting seat through a rolling bearing; the other end of the driving shaft is hinged with a connecting rod, and one end of the connecting rod, which is far away from the driving shaft, is hinged with the transmission shaft; the transmission shaft is provided with external threads and is positioned in the rotating shaft, and the transmission shaft is in threaded connection with the rotating shaft;
the rotating shaft is of a hollow structure, is positioned in the preconditioning tower, is fixed in the preconditioning tower through a supporting seat, and is rotationally connected with the supporting seat through a rolling bearing; the outer cylindrical surface of the rotating shaft is connected with a stirring device;
the upper end surface of the main stripping tower is provided with an air outlet which is connected with the absorption tower through a third pipeline, and the third pipeline is provided with a third valve; the lower part of the main stripping tower is provided with a gas inlet, the gas inlet is connected with the blower through a fourth pipeline, and a fourth valve is arranged on the fourth pipeline; an outlet is formed in the lower end face of the main stripping tower and connected with the auxiliary stripping tower through a fifth pipeline, and a fifth valve and a second water pump are arranged on the fifth pipeline;
an annular boss is arranged in the main stripping tower, a packing element is placed on the annular boss and comprises packing boxes and packing columns, the packing boxes are distributed along the Y direction, two adjacent packing boxes are connected through the packing columns, and the packing columns are arranged in an annular array around the central axis of the packing boxes; the stuffing boxes and the stuffing columns are of grid structures, and polyhedral hollow ball stuffing is arranged in the stuffing boxes and the stuffing columns;
an annular spraying pipe is arranged above each stuffing box, and a plurality of spraying nozzles are arranged on the annular spraying pipe; the annular spraying pipe is communicated with the second pipeline through a sixth pipeline; the bottom of the main stripping tower is provided with a vibrating piece;
the structure of the auxiliary stripping tower is completely the same as that of the main stripping tower, the outlet of the auxiliary stripping tower is connected with a wastewater pool through a seventh pipeline, and a sixth valve is arranged on the seventh pipeline; the gas outlet of the auxiliary stripping tower is connected with the absorption tower through an eighth pipeline, and a seventh valve is arranged on the eighth pipeline;
the top of the absorption tower is provided with an exhaust port, the bottom of the absorption tower is provided with an air inlet, the absorption tower is internally provided with a spray head, the spray head is connected with a sulfuric acid storage tank, and the spray head sprays sulfuric acid into the absorption tower to wash waste gas;
the vibrating piece comprises a base, a second motor, a crank, a sliding rod, a driving rod, an installation barrel and a vibrating barrel, wherein the crank is of an L-shaped structure and is rotatably connected with the base;
a first spring is arranged above the connecting ring, and two ends of the first spring are respectively connected with the connecting ring and the vibrating cylinder; a second spring is arranged below the connecting ring, and two ends of the second spring are respectively connected with the connecting ring and the vibration cylinder; the vibration cylinder is positioned in the installation cylinder, and a clamping ring is arranged on the outer cylindrical surface of the vibration cylinder;
the mounting cylinder is fixed on the base, a through hole is formed in the mounting cylinder, a first annular platform and a second annular platform are arranged in the through hole, and the first annular platform is located above the second annular platform; a third spring is arranged above the clamping ring, and two ends of the third spring are respectively connected with the clamping ring and the first annular platform; and a fourth spring is arranged below the clamping ring, and two ends of the fourth spring are respectively connected with the clamping ring and the second annular platform.
2. The wastewater treatment device for the nano chip production line as claimed in claim 1, wherein the stirring device comprises transition rods, stirring rods and stirring blades, the transition rods are annularly arrayed around the central axis of the rotating shaft, one end of each transition rod is connected with the rotating shaft, and the other end of each transition rod is connected with the stirring rod; be equipped with a plurality of stirring leaves on the puddler, the stirring leaf distributes along the Y direction, and the stirring leaf is V-arrangement structure, and the size of stirring leaf reduces along Y direction from the top down gradually, and crisscross distribution between two adjacent stirring leaves, contained angle are 90.
3. The wastewater treatment device for the nano chip production line as claimed in claim 2, wherein one end of the transmission shaft, which is far away from the connecting rod, is connected with a stirring shaft, the stirring shaft is provided with a plurality of turning blades, the turning blades are positioned in the stirring device and distributed along the Y direction, the turning blades are of a spherical structure, and the sizes of the turning blades are gradually increased from top to bottom along the Y direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201910119017.1A CN109970131B (en) | 2019-02-18 | 2019-02-18 | A effluent treatment plant for nanometer chip production line |
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| CN201910119017.1A CN109970131B (en) | 2019-02-18 | 2019-02-18 | A effluent treatment plant for nanometer chip production line |
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| CN109970131A CN109970131A (en) | 2019-07-05 |
| CN109970131B true CN109970131B (en) | 2021-09-14 |
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| CN111892114B (en) * | 2020-08-03 | 2021-04-27 | 南京市生态环境保护科学研究院 | Water treatment stripping tower and water treatment process |
| CN113292158B (en) * | 2021-05-10 | 2022-05-31 | 东北大学 | Horizontal vibrating baffling type sewage treatment device |
| ES2956933A1 (en) * | 2023-01-31 | 2024-01-04 | Tkin Orma S L | ABSORPTION TOWER AND PROCESS TO RECOVER NITROGENATED NUTRIENTS FROM WASTE FROM AGRIBUSINESS (Machine-translation by Google Translate, not legally binding) |
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| CN207861942U (en) * | 2018-01-26 | 2018-09-14 | 长沙环境保护职业技术学院 | A kind of compound stripping tower of the ammonia nitrogen of production wastewater treatment |
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