CN109962627A - 并联控制的等离子电源装置 - Google Patents

并联控制的等离子电源装置 Download PDF

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CN109962627A
CN109962627A CN201910284686.4A CN201910284686A CN109962627A CN 109962627 A CN109962627 A CN 109962627A CN 201910284686 A CN201910284686 A CN 201910284686A CN 109962627 A CN109962627 A CN 109962627A
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inverter
boost chopper
output end
circuit
transformer
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申旻浩
李文
姜彪
李明泽
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Yanbian Zhonggu Pioneer Power Technology Co Ltd
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Yanbian Zhonggu Pioneer Power Technology Co Ltd
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
    • H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
    • H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
    • H02M5/40—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc
    • H02M5/42—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters
    • H02M5/44—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac
    • H02M5/453—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M5/458—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0083—Converters characterised by their input or output configuration
    • H02M1/009—Converters characterised by their input or output configuration having two or more independently controlled outputs

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Plasma Technology (AREA)
  • Inverter Devices (AREA)

Abstract

并联控制的等离子电源装置，交流电源连接由二极管构成的整流电路的输入端，整流电路输出端并联连接至少一个逆变器，每个逆变器包括升压斩波电路、逆变电路和变压器，每个逆变器的升压斩波电路的输入端连接整流电路输出端，升压斩波电路的输出端连接逆变电路，逆变电路的输出端连接变压器，变压器的输出端连接负载；本发明的并联控制的等离子电源装置，采用同一个电源输入，实现多个并联输出，通过每一路设置单独的升压斩波电路和逆变电路，实现多个负载的独立控制，从而减少了元器件的应用，节约了成本，多个负载独立控制能够产生各负载的稳定的输出。

Description

并联控制的等离子电源装置
技术领域
本发明涉及电源技术领域，尤其涉及一种用于等离子设备的电源装置。
背景技术
等离子设备在洗涤、切割、焊接等领域得到越来越广泛的应用，比如采用高精度等离子洗涤装备对半导体以及LCD显示屏、光学装备、PCB、塑胶片等进行清洗来实现高精度的要求，用于洗涤的等离子气炬功率为2000W-10000W，工作电压为6-15KV，属于大功率设备。
现有的方法是利用一个电源装置来供给一个负载(气炬或DBD)的控制方式，每个电源每一个负载需要一路电源，从而增减了元器件的数量，导致电源装置体积和单价提高。
要实现多个负载的并联控制，现有技术中是通过在逆变器输出端并联设有与负载变量数量相等变压器，每个变压器连接一个负载，通过串联电容实现电压的分配，这种利用输出的变压器或者安装电容器进行分配的方式，不能实现各个负载的独立的控制，会出现随着负载(气炬)的阻抗变化在放电时断断续续的问题；并且利用电容器分配电压的方法会随着电容器的热化使电压分配得到变动，从而需要经常更换，影响了控制效果，提高了成本。
发明内容
为了解决现有等离子电源并联控制方式存在的上述问题，本发明提供了一种并联控制的等离子电源装置。
本发明为实现上述目的所采用的技术方案是：并联控制的等离子电源装置，包括交流电源AC、整流电路、升压斩波电路、逆变电路和变压器，交流电源连接由二极管构成的整流电路的输入端，整流电路输出端并联连接至少一个逆变器，每个逆变器包括升压斩波电路、逆变电路和变压器，每个逆变器的升压斩波电路的输入端连接整流电路输出端，升压斩波电路的输出端连接逆变电路，逆变电路的输出端连接变压器，变压器的输出端连接负载；交流电源AC的电流通过整流电路转化为直流电流，整流电路输出的直流通过每一路逆变器的升压斩波电路升压之后通过逆变电路将直流转化为交流输送给变压器，通过一个电源装置将多个并联的负载分别控制，根据每个负载的变化或电源效率的变化对每一路逆变电路的开关频率和脉冲幅度进行控制实现多个负载的独立控制。
所述整流电路输出端与各升压斩波电路之间设有LC过滤器。
所述LC过滤器输出端与各升压斩波电路之间设有降压变换器。
所述逆变器中变压器输入端串联连接电容C。
所述负载为气炬或DBD负载。
所述降压变换器采用软启动方法进行启动。
本发明的并联控制的等离子电源装置，采用同一个电源输入，实现多个并联输出，通过每一路设置单独的升压斩波电路和逆变电路，实现多个负载的独立控制，从而减少了元器件的应用，节约了成本，多个负载独立控制能够产生各负载的稳定的输出。
附图说明
图1是本发明并联控制的等离子电源装置电路图。
图2是本发明联控制的等离子电源装置降压变换器原理图。
图3是本发明联控制的等离子电源装置升压斩波电路原理图。
图4是本发明联控制的等离子电源装置逆变电路原理图。
具体实施方式
本发明的并联控制的等离子电源装置电路和原理如图1-4所示，包括交流电源AC、整流电路、升压斩波电路、逆变电路和变压器，交流电源连接由二极管构成的整流电路的输入端，整流电路输出端依次连接LC过滤器和降压变换器，降压变换器的输出端并联连接至少一个逆变器，每个逆变器包括升压斩波电路、逆变电路和变压器，每个逆变器的升压斩波电路的输入端连接整流电路输出端，每个升压斩波电路的输出端连接逆变电路，逆变电路的输出端连接变压器，逆变器中变压器输入端串联连接电容C，变压器的输出端连接负载，负载为气炬或DBD负载；交流电源AC的电流通过整流电路转化为直流电流，整流电路输出的直流通过每一路逆变器的升压斩波电路升压之后通过逆变电路将直流转化为交流输送给变压器，通过一个电源装置将多个并联的负载分别控制，根据每个负载的变化或电源效率的变化对每一路逆变电路的开关频率和脉冲幅度进行控制实现多个负载的独立控制。
本发明是以将AC电源提供的电压通过整流电路整流为DC电压，然后通过LC过滤器去除纹波电压、纹波电流，然后通过降压变换器防止初期励磁涌流，为了符合多个并联负载气炬的数量，分别独立设置多个由升压斩波电路和逆变电路构成的逆变器。为了降低配件成本和初期稳定的电源供给,使用单一降压变换器。降压变换器仅仅会执行电压控制，其他各部的升压斩波电路将共同的接收输入电压，会根据所使用的电流量来执行PFC(PowerFactor Corraection)控制，稳定的供给电源到输出的气炬上。
本发明在简单的利用变压器和电容器将电压进行分配方法的基础上，增加了分别独立控制的逆变器来根据负载气炬的阻抗变化和特性对负载分别进行控制，保证持续稳定的放电，将等离子的密度提高。电源装置中升压斩波电路将会符合各气炬的阻抗特性来独立控制，从而稳定的对气炬进行电源供给。与现有的控制方法不同的是，用一个降压变换器输出值采用独立的升压斩波电路进行升压，根据气炬的特性通过逆变电路对负载进行独立控制。为了防止初期的过电流，利用降压变换器(Buck converter)开始时用软起动进行输出，之后利用每个组件独立的逆变器(Boost Converter)按照每个气炬的相应特性控制输出。
降压变换器为了防止初期的励磁涌流，通过软启动方式从0电压开始慢慢的执行电压控制；在降压变换器中输出的310V的电压将利用升压斩波电路提升电压到输出所要求的电压(310～800V)；考虑等离子的温度和洗涤量，控制逆变器的周期比以及频率；为了提高功率密度，升压斩波电路随着输出电功率，控制电流来执行PFC控制；随着负载的电抗变化，控制升压斩波电路的输出使等离子放电能按照规定执行控制电压电流；如果气炬组件发生了短路的话，所相应组件的升压斩波电路和逆变器将会停止工作，防止降压变换器和输入整流电路的损坏。
本发明的等离子电源装置可用于气炬或者大功率的DBD(Dielectric BarrierDischarge，等离子发生装置)负载，如高精度等离子洗涤装备的电源供给，适用于半导体以及LCD显示屏、光学装备、PCB、塑胶片等清洗设备。常压等离子电源装置的气炬的种类是气炬DBD(Dielectric Barrier Discharge)正常工作电压为6～15KV。
本发明是通过实施例进行描述的，本领域技术人员知悉，在不脱离本发明的精神和范围的情况下，可以对这些特征和实施例进行各种改变或等效替换。另外，在本发明的教导下，可以对这些特征和实施例进行修改以适应具体的情况及材料而不会脱离本发明的精神和范围。因此，本发明不受此处所公开的具体实施例的限制，所有落入本申请的权利要求范围内的实施例都属于本发明的保护范围。

Claims (6)

1.并联控制的等离子电源装置，其特征在于：包括交流电源(AC)、整流电路、升压斩波电路、逆变电路和变压器，交流电源(AC)连接由二极管构成的整流电路的输入端，整流电路输出端并联连接至少一个逆变器，每个逆变器包括升压斩波电路、逆变电路和变压器，每个逆变器的升压斩波电路的输入端连接整流电路输出端，升压斩波电路的输出端连接逆变电路，逆变电路的输出端连接变压器，变压器的输出端连接负载；交流电源(AC)的电流通过整流电路转化为直流电流，整流电路输出的直流通过每一路逆变器的升压斩波电路升压之后通过逆变电路将直流转化为交流输送给变压器，通过一个电源装置将多个并联的负载分别控制，根据每个负载的变化或电源效率的变化对每一路逆变电路的开关频率和脉冲幅度进行控制实现多个负载的独立控制。
2.根据权利要求1所述的并联控制的等离子电源装置，其特征在于：所述整流电路输出端与各升压斩波电路之间设有LC过滤器。
3.根据权利要求2所述的并联控制的等离子电源装置，其特征在于：所述LC过滤器输出端与各升压斩波电路之间设有降压变换器。
4.根据权利要求1所述的并联控制的等离子电源装置，其特征在于：所述逆变器中变压器输入端串联连接电容(C)。
5.根据权利要求1所述的并联控制的等离子电源装置，其特征在于：所述负载为气炬或DBD负载。
6.根据权利要求3所述的并联控制的等离子电源装置，其特征在于：所述降压变换器采用软启动方法进行启动。
CN201910284686.4A 2019-03-07 2019-04-10 并联控制的等离子电源装置 Pending CN109962627A (zh)

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