CN109950283A - A kind of display drives the preparation method of mould group, display panel and display driving mould group - Google Patents
A kind of display drives the preparation method of mould group, display panel and display driving mould group Download PDFInfo
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- CN109950283A CN109950283A CN201910228271.5A CN201910228271A CN109950283A CN 109950283 A CN109950283 A CN 109950283A CN 201910228271 A CN201910228271 A CN 201910228271A CN 109950283 A CN109950283 A CN 109950283A
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Abstract
The present invention provides the preparation methods of a kind of display driving mould group, display panel and display driving mould group, the problem of solving when preparing metal layer in OLED production process, influenced illumination effect due to the migration of metal, reduced product yield.It include: a kind of display driving mould group, comprising: source electrode and drain electrode；Positioned at the active layer of the source electrode and the drain electrode side；Via hole filled with electrical connection material is used to form the source electrode or the drain electrode and being electrically connected between the active layer；And the extension active region being connect with the active layer, wherein the via hole is located inside the active layer in a part of the projection of plane where the active layer, another part is located inside the extension active region.
Description
Technical field
The present invention relates to display actuation techniques fields, and in particular to a kind of display driving mould group, display panel and display drive
The preparation method of dynamic model group.
Background technique
Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED) is due to its own power consumption that works
Small, the features such as light emission luminance is high, small to human body radiation of the service life is long, is widely used in display and the communications field.It is preparing
When OLED display, as technique influence so that display device edge pixel corresponding to active layer in driving circuit
Size it is relatively normal less than normal, therefore will lead to when filling metal layer in the via hole on active layer, metal leakage occur, out cash
The migration of category reduces product yield to influence the illumination effect of OLED.
Summary of the invention
In view of this, the present invention provides the preparation sides of a kind of display driving mould group, display panel and display driving mould group
Method solves when preparing metal layer in OLED production process, since the migration of metal influences illumination effect, reduces product yield
Problem.
The preparation method of a kind of display driving mould group, display panel and display driving mould group that one embodiment of the invention provides
Include:
A kind of display driving mould group, comprising: source electrode and drain electrode；Positioned at the active layer of the source electrode and the drain electrode side；
Via hole filled with electrical connection material is used to form the source electrode or the drain electrode and being electrically connected between the active layer；With
And the extension active region being connect with the active layer, wherein one in the projection of plane where the active layer of the via hole
Inside the active layer, another part is located inside the extension active region quartile.
In one embodiment, the extension active region and the active layer be in the same plane.
In one embodiment, the material of the extended area is polysilicon.
In one embodiment, the via hole is one of following shape or multiple combinations: round hole, rectangular opening and
Hexagonal hole.
In one embodiment, the material of the electrical connection material is one of following material or a variety of: molybdenum, silver,
Titanium and aluminium.
In one embodiment, further comprise insulating layer, setting the source electrode or it is described drain electrode with it is described active
Between layer, wherein the via hole filled with the electrical connection material is arranged in the insulating layer.
A kind of display panel drives mould group including any of the above-described display.
In one embodiment, the display driving mould group is used to drive the pixel at the display panel edge.
A kind of preparation method of display driving mould group, including a substrate is provided；The buffer layer is prepared on the substrate；
Active layer is prepared on the buffer layer；Prepare the extension active region of the active layer connection；It prepares on the active layer
Via hole；And in the via hole filling electrical connection material, be used to form the source electrode or it is described drain electrode with the active layer it
Between electrical connection；Wherein the via hole is located inside the active layer in a part of the projection of plane where the active layer,
Another part is located inside the extension active region.
In one embodiment, the extended area is made by exposure development technique.
A kind of display driving mould group, display panel and display provided in an embodiment of the present invention drive the preparation method of mould group,
It includes source electrode, drain electrode, active layer that the display, which drives mould group, and wherein active layer is located at the source electrode and the drain electrode side, this is aobvious
Show that mould group further includes the via hole filled with electrical connection material, is used to form between the source electrode or the drain electrode and the active layer
Electrical connection；And the extension active region being connect with the active layer, wherein the via hole is in plane where the active layer
A part of projection be located inside the active layer, another part is located inside the extension active region.By active
Setting extension active region, prevents the area due to active layer not big enough, so that a part of via hole is exposed to active layer on layer
Outside, when solving in OLED production process filling electrical connection material in the vias, metal is from being exposed in the via hole outside active layer
It leaks out, thus the problem of influencing illumination effect, reduce product yield.
Detailed description of the invention
Fig. 1 show a kind of structural schematic diagram of display driving mould group of one embodiment of the invention offer.
Fig. 2 show a kind of structural schematic diagram of display panel of one embodiment of the invention offer.
Fig. 3 show a kind of structural schematic diagram of display driving mould group of one embodiment of the invention offer.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that the described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
Fig. 1 show a kind of structural schematic diagram of display driving mould group of one embodiment of the invention offer.
As shown in Figure 1, display driving mould group includes source electrode 1, drain electrode 2 and active layer 3, active layer 3 is arranged in 1 He of source electrode
The side of drain electrode 2, active layer 3 and source electrode 1 can realize electrical connection, active layer 3 and leakage by the via hole 4 filled with electrical connection material
Pole 2 can realize electrical connection by the via hole 4 filled with electrical connection material.The display module further includes extension active region 5, extension
Active region 5 is connect with active layer 3, and extension active region 5 can be used as extending active region 5, it is possible to increase the area of active layer 3.
Wherein the inside of active layer 3 is arranged in a part of the projection of the plane of active region for via hole 4, and another part setting is extending
The inside of active region 5, that is, the bottom of via hole 4 are arranged simultaneously on active layer 3 and extension active region 5.By having
Setting extension active region 5, prevents the area due to active layer 3 not big enough, so that a part of via hole 4 is exposed in active layer 3
Outside active layer 3, when solving in OLED production process the filling electrical connection material in via hole 4, metal is from being exposed to outside active layer 3
Via hole 4 in leak out, to influence illumination effect, the problem of reducing product yield.
It is appreciated that extension active region 5 may be provided at the side that active layer 3 forms source electrode 1, active region 5 is extended
It may be provided at the side that active layer 3 forms drain electrode 2, active layer 3 can also be arranged in simultaneously and form 1 He of source electrode for extension active region 5
Active layer 3 forms the two sides of drain electrode 2.The where of active layer 3 is arranged in extension active region 5, can be according to actual production and use
Family demand is adjusted, and the where that the present invention is specifically located at active layer 3 to extension active region 5 is not construed as limiting.
It it is further appreciated that via hole 4 can be formed by photoetching process, can also be realized by other process means, form via hole 4
Specific technology mode can be adjusted according to production and user demand, and the present invention does not limit the concrete mode for forming via hole 4
It is fixed.Via hole 4 can be one of following shape or multiple combinations: round hole, rectangular opening and hexagonal hole or via hole 4 are also
It can be other shapes of hole, the shape of the via hole 4 of actual displayed driving mould group can be adjusted according to production and user demand,
The present invention is not construed as limiting the concrete shape of via hole 4.
It is further appreciated that the material of electrical connection material can be one of following material or a variety of: molybdenum, silver, titanium and aluminium,
On the basis of satisfaction electrical connection material can be realized the electrical connection between active layer 3 and source electrode 1 or drain electrode 2, it is electrically connected material
Material can according to production and user demand be adjusted, the present invention to electrical connection material specific material be not construed as limiting.
In one embodiment of the invention, extension active region 5 and active layer 3 in the same plane, extend the thickness of active region 5
The thickness of degree and active layer 3 can be identical.Extension active region 5 is disposed on the same plane with active layer 3, preparation process is not
Increase additional processing step, be simply easily achieved, and prepare identical extension active region 5 and active layer 3, can make
4 bottom of hole is arranged simultaneously on active layer 3 and extension active region 5, and a part of via hole 4 is preferably prevented to be exposed to active layer
Outside 3, so that metal is leaked out from the via hole 4 being exposed to outside active layer 3 when solving the filling electrical connection material in via hole 4, from
And the problem of influencing illumination effect, reducing product yield.
It is appreciated that the thickness of extension active region 5 can be equal to the thickness of active layer 3, or extend active region 5
Thickness can also be greater than the thickness of active layer 3.Specifically, the size of the thickness of the thickness and active layer 3 of extension active region 5,
It can be adjusted according to actual production technology and user demand, thickness and active layer 3 of the present invention to extension active region 5
The size of thickness is not construed as limiting.
In one embodiment of the invention, the material of active layer 3 is polysilicon, and the material of extension active region 5 can be polycrystalline
Silicon.The material of active layer 3 and extension active region 5 is all provided with and is set to polysilicon, simplifies processing step in the preparation, and do not increase
Add additional production cost.
It it is appreciated that the material of extension active region 5 can be polysilicon, or is its material.Extend the material of active area
Matter can be identical with the material of active layer 3, can also be different with the material of active layer 3.It can not influence display driving mould group
Various functions, and extend active region 5 can be realized prevent in via hole 4 be electrically connected material overflow under the premise of, the present invention couple
The specific material of extension active area is not construed as limiting.
In one embodiment of the invention, the display drive mould group further include insulating layer, setting source electrode 1 or drain electrode 2 with it is active
Between layer 3, wherein the via hole 4 filled with electrical connection material is arranged in insulating layer.Via hole 4 filled with electrical connection material can be with
The side that active layer 3 is connected with drain electrode 2 is set, the side or set simultaneously that active layer 3 is connected with source electrode 1 are perhaps set
It sets in the two sides that active layer 3 is connected with drain electrode 2, active layer 3 with source electrode 1.Insulating layer can be isolated source electrode 1 or drain electrode 2 with it is active
Layer 3 prevents short circuit phenomenon occur between source electrode 1, drain electrode 2 and active layer 3.
It is appreciated that the material of insulating layer can be one of following material or multiple combinations: silicon nitride and silica.
The material of insulating layer can need to be adjusted according to actual production and client, and the specific material of present invention insulating layer between first is not
It limits.
In one embodiment of the invention, it can also include substrate, buffer layer and passivation layer which, which drives mould group,.Buffer layer is set
It sets in the side of substrate, wherein side of the buffer layer far from substrate is arranged in active layer 3, and insulating layer setting is separate in active layer 3
Side of the insulating layer far from active layer 3 is arranged in the side of buffer layer, source electrode 1 and drain electrode 2, and passivation layer setting is in source electrode 1 and leakage
Side of the pole 2 far from insulating layer.Substrate can play a supporting role to display driving mould group；Buffer layer can increase display driving
The drop resistant of mould group beats characteristic；Passivation refers to that metal or alloy anodic process under specific condition is interrupted and loses chemical activity,
A kind of phenomenon of anti-corrosion state is generated, passivation layer is then the functional layer for having the formation of the metal or alloy, and passivation layer improves aobvious
The ability for showing the resistance to harsh environment of modular structure helps to improve display device photoelectric parameter performance.
It is appreciated that the material of substrate can be glass or other any materials that can be used as substrate, the present invention is to base
The specific material of plate is not construed as limiting.
It is further appreciated that the material of passivation layer can be silicon nitride, one of silica, rubber and resin or a variety of groups
It closes.The material of passivation layer can need to be adjusted according to actual production and client, and the present invention does not make the specific material of passivation layer
It limits.
Fig. 2 show a kind of structural schematic diagram of display panel of one embodiment of the invention offer.
As shown in Fig. 2, the display panel includes the driving mould group 01 of display described in above-described embodiment.Furthermore the display surface
Plate may also include luminescent layer 02, layer of polarizer 03 and touch layer 04.The side of display driving mould group 01 is arranged in luminescent layer 02, makees
Light is shown with to issue under the driving of display driving mould group 01；The setting of layer of polarizer 03 is in luminescent layer 02 far from display driving mould
The side of group 01；Side of the layer of polarizer 03 far from display driving mould group 01 is arranged in touch layer 04, acts on to realize touch-control function
Energy.It include pixel in luminescent layer 02, it is luminous that display driving mould group 01 can be used for driving the pixel at display panel edge to carry out.By
In technique influence so that display device edge pixel corresponding to active layer 3 in driving circuit size relatively it is normal partially
It is small, therefore will lead to when filling metal layer in the via hole on active layer 3, there is metal leakage, display panel of the invention by
In including that display described in above-described embodiment drives mould group 01, it includes source electrode 1, drain electrode 2, active layer which, which drives mould group 01,
3, wherein active layer 3 is located at 2 sides of the source electrode 1 and the drain electrode, which further includes filled with electrical connection material
Via hole 4 is used to form being electrically connected between the source electrode 1 or the drain electrode 2 and the active layer 3；And with the active layer 3
The extension active region 5 of connection, wherein the via hole 4 be located in a part of the projection of the 3 place plane of active layer it is described
Inside active layer 3, another part is located inside the extension active region 5.By the way that extension active region is arranged on active layer 3
5, it prevents the area due to active layer 3 not big enough, so that a part of via hole 4 is exposed to outside active layer 3, solves OLED production
In the process in via hole 4 when filling electrical connection material, metal is leaked out from the via hole 4 being exposed to outside active layer 3, to influence to send out
The problem of light effect, reduction product yield.
It is appreciated that the display driving mould group 01 of the display panel can be used for driving the pixel at display panel edge to issue
Show light, the pixel that can be used for driving display panel non-edge issues display light.The present invention drives mould to the display
The position for the pixel on display panel that group 01 specifically drives is not construed as limiting.
It is further appreciated that the area that active layer 3 and extension active region 5 add up can not have with display panel others
There is the area equation of the active region for the display driving mould group 01 for extending active region 5, active layer 3 and extension active region 5 add
The area to get up can not have the active area of the display driving mould group 01 of extension active region 5 not equal to display panel others
The area in domain.The specific area for extending active region 5 can be adjusted according to actual production and demand, and the present invention is to extension
The specific area of active region 5 is not construed as limiting.
It is further appreciated that the display panel can be used on mobile phone, computer and mobile unit, the present invention is to display panel
Particular use is not construed as limiting.
Fig. 3 show a kind of structural schematic diagram of display driving mould group 01 of one embodiment of the invention offer.
As shown in figure 3, a kind of preparation method of display driving mould group 01, comprising:
Step S001: a substrate is provided；
Step S002: buffer layer is prepared on substrate；
Step S003 prepares active layer 3 on the buffer layer；
Step S004: the extension active region 5 of the connection of active layer 3 is prepared；Extended area 5 can be set active layer 3 with
The side that source electrode 1 is connected perhaps can be set in the side that active layer 3 is connected with drain electrode 2 or can also be arranged simultaneously
In the two sides that active layer 2 is connected with source electrode 1, active layer 2 with drain electrode 1.Extension active region 5 can be made simultaneously with active layer 3
It is standby to form, or prepared according to certain preparation sequence.
Step S005: via hole 4 is prepared on active layer 3；One to be connected in active layer 3 with source electrode 1 can be set in via hole 4
In the insulating layer of side, perhaps it can be set in the insulating layer for the side that active layer 3 is connected with drain electrode 2 or acceptable same
When be arranged in active layer 2 and source electrode 1, the two sides that active layer 2 is connected with drain electrode 1 insulating layer in.
Step S006: the filling electrical connection material in via hole 4 is used to form between source electrode 1 or drain electrode 2 and active layer 3
Electrical connection.Electrical connection material is located inside active layer 3 in projection a part of 3 place plane of active layer, and another part, which is located at, to be expanded
It opens up inside active region 5.
Wherein via hole 4 is located inside active layer 3 in a part of the projection of 3 place plane of active layer, and another part is located at
It extends inside active region 5, that is, the bottom of via hole 4 is arranged simultaneously on active layer 3 and extension active region 5.By
Setting extension active region 5, prevents the area due to active layer 3 not big enough on active layer 3, so that a part exposure of via hole 4
Outside active layer 3, when solving in OLED production process the filling electrical connection material in via hole 4, metal is from being exposed to active layer 3
It is leaked out in outer via hole 4, thus the problem of influencing illumination effect, reduce product yield.
It is appreciated that extension active region 5 can be prepared by exposure development technique, it can also be prepared by other techniques, only
It can satisfy the demand of production, the present invention is not construed as limiting the specific preparation method of extension active region 5.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, made any modification, equivalent replacement etc. be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of display drives mould group characterized by comprising
Source electrode and drain electrode；
Positioned at the active layer of the source electrode and the drain electrode side；
Via hole filled with electrical connection material is used to form being electrically connected between the source electrode or the drain electrode and the active layer
It connects；And
The extension active region being connect with the active layer, wherein the via hole is one of the projection of plane where the active layer
Part is located inside the active layer, and another part is located inside the extension active region.
2. display according to claim 1 drives mould group, which is characterized in that the extension active region and the active layer
In the same plane.
3. display according to claim 1 drives mould group, which is characterized in that the material of the extension active region is polycrystalline
Silicon.
4. display according to claim 1 drives mould group, which is characterized in that the via hole be one of following shape or
Multiple combinations: round hole, rectangular opening and hexagonal hole.
5. display according to claim 1 drives mould group, which is characterized in that the material of the electrical connection material is following material
One of matter is a variety of: molybdenum, silver, titanium and aluminium.
6. display according to claim 1 drives mould group, which is characterized in that further comprise insulating layer, be arranged described
Between source electrode or the drain electrode and the active layer, wherein the via hole setting filled with the electrical connection material is described exhausted
In edge layer.
7. a kind of display panel, which is characterized in that drive mould group including any display of the claims 1-6.
8. display panel according to claim 7, which is characterized in that the display driving mould group is for driving the display
The pixel of face plate edge.
9. a kind of preparation method of display driving mould group characterized by comprising
One substrate is provided；
The buffer layer is prepared on the substrate；
Active layer is prepared on the buffer layer；
Prepare the extension active region of the active layer connection；
Via hole is prepared on the active layer；And
Filling electrical connection material, the electricity being used to form between the source electrode or the drain electrode and the active layer in the via hole
Connection；
Wherein the via hole is located inside the active layer in a part of the projection of plane where the active layer, another part
Inside the extension active region.
10. driving circuit according to claim 9, which is characterized in that the extended area passes through exposure development technique system
It is standby.
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| CN201910228271.5A CN109950283B (en) | 2019-03-25 | 2019-03-25 | Display driving module, display panel and preparation method of display driving module |
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| CN201910228271.5A CN109950283B (en) | 2019-03-25 | 2019-03-25 | Display driving module, display panel and preparation method of display driving module |
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