CN109935948A - Attenuator - Google Patents
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- CN109935948A CN109935948A CN201711377865.XA CN201711377865A CN109935948A CN 109935948 A CN109935948 A CN 109935948A CN 201711377865 A CN201711377865 A CN 201711377865A CN 109935948 A CN109935948 A CN 109935948A
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Abstract
The present invention is a kind of attenuator, is related to attenuator field.It is to solve gradient that the prior art decays to signal less and invent, including 3 attenuation units, it is connected in series between attenuation units；Wherein, the first RF mems switch in attenuation units, the first corner module, resistive module, the second corner module are sequentially connected in series with the second RF mems switch by coplanar waveguide transmission line, form the first branch；Third RF mems switch, third corner module, the 4th corner module and the 4th RF mems switch in attenuation units are sequentially connected in series by coplanar waveguide transmission line, form second branch；First branch first end is connect with second branch first end, the signal input part as attenuation units；First branch second end is connect with second branch second end, the signal output end as attenuation units.The present invention is for decaying to signal.
Description
Technical field
The present invention relates to signal attenuator technical fields, more particularly to a kind of attenuator.
Background technique
With the continuous development of technology, the application of attenuator gradually increases.Currently, the attenuator field in China is in just
The grade starting stage, simultaneously as attenuator is mainly used in the defense technologies such as military project field, in various politics and military affairs
The reason of, the demand of China's attenuator is always that foreign countries prohibit selling, required relevant technical data is also blocked by foreign countries.Cause
This, attention of the relevant technologies of attenuator increasingly by domestic technique personnel.
Currently, attenuator in the prior art is usually fixed attenuation device, by its internal damping resistance being arranged to defeated
The signal entered in attenuator carries out attenuation operations.However, in practical applications, since fixed attenuation device is to the attenuation amplitude of signal
It is fixed numerical value, when needing to carry out different degrees of decaying to signal, the mode of fixed attenuation in the prior art is difficult
To meet the needs of to the decaying of different degrees of signal, therefore, a kind of signal attenuation device of more gradients how is designed, with full
The different degrees of signal attenuation requirement of foot, becomes urgent problem to be solved in field
Summary of the invention
It is a primary object of the present invention to provide a kind of attenuator, to be solved is how to design one kind can satisfy
The signal attenuator decayed in various degree, the problem of to meet different degrees of signal attenuation requirement.
The object of the invention to solve the technical problems adopts the following technical solutions to realize.It proposes according to the present invention
A kind of attenuator comprising:
3 attenuation units are connected in series between the attenuation units；
Wherein, the attenuation units include 4 corner modules, 4 RF mems switch, resistive module and altogether
Coplanar waveguide transmission line；The resistive module is for decaying to the signal being transmitted in the attenuation units；Described first penetrates
Frequency micro electro-mechanical system switch, the first corner module, resistive module, the second corner module and the second RF mems switch
It is sequentially connected in series by the coplanar waveguide transmission line, forms the first branch；The third RF mems switch,
Method of three turning angles module, the 4th corner module and the 4th RF mems switch are successively gone here and there by the coplanar waveguide transmission line
Connection connection, forms second branch；The first branch first end is connect with the second branch first end, as attenuation units
Signal input part；The first branch second end is connect with the second branch second end, and the signal as attenuation units exports
End.
The object of the invention to solve the technical problems also can be used following technical measures and further realize.
Preferably, the resistive module is specially the resistance for the film-form being made of tantalum-nitride material.
Preferably, the RF mems switch is specially single-ended cantilever beam touch switch；
The single-ended beam type exposure switch includes anchor point, cantilever beam and switch contact, the single-ended cantilever beam
Formula contact-making switch is used for when on-load voltage, and to the coplanar waveguide transmission line direction elastic deformation occurs for the cantilever beam, with
It connect the switch contact with coplanar waveguide transmission line, forms closed circuit.
Preferably, the signal input part of the attenuation units and the signal output end of attenuation units are respectively arranged with the first T
Pattern block and the second T-shaped mould block；
The first T-shaped mould block includes: the first T-shaped mould block first end, the first T-shaped mould block second end and the first T-shaped mould
Block third end；
The first T-shaped mould block first end is for receiving signal, the first T-shaped mould block second end and the attenuation units
The first branch first end connection；The first T-shaped mould block third end is connect with the second branch first end of the attenuation units；
The second T-shaped mould block includes: the second T-shaped mould block first end, the second T-shaped mould block second end and the second T-shaped mould
Block third end；
The second T-shaped mould block first end is used for output signal, the second T-shaped mould block second end and the attenuation units
The first branch second end connection；The second T-shaped mould block third end is connect with the second branch second end of the attenuation units.
Preferably, the cross-sectional width that the corner module is specially is 40 μm of corner transmission lines, the corner transmission line
Crank degree is 90 °；
The T-shaped mould block is specially the T-type transmission line that cross-sectional width is 40 μm；
The corner module, T-shaped mould block are identical as the material of the coplanar waveguide transmission line.
Preferably, two of same branch road single-ended cantilever beam touch switches are used for while breaking in the attenuation units
It opens or is closed, be connected and disconnect to realize the first branch or second branch.
Preferably, the resistive module in the first attenuation units in the attenuator, the resistive module of the second attenuation units
And the resistance value between the resistive module of third attenuation units is different, to make first attenuation units, second decline
The signal attenuation amplitude subtracted between unit, third attenuation units is different.
Preferably, pass through institute between the first attenuation units in attenuator, the second attenuation units and third attenuation units
State coplanar waveguide transmission line series connection；
The substrate material of the coplanar waveguide transmission line is silicon, with a thickness of 500 μm, dielectric constant 11.9；It is described coplanar
The impedance of waveguide transmission line is 50 Ω, and width is 120 μm；
The material of the coplanar waveguide transmission line is metallic gold, and the coplanar waveguide transmission line both ends are provided with ground wire, institute
The ground wire spacing for stating coplanar waveguide transmission line and both ends is 75 μm, about 50 Ω of impedance.
By above-mentioned technical proposal, attenuator of the present invention is at least had the advantage that
In technical solution of the present invention, the attenuator includes: 3 attenuation units, is connected in series between the attenuation units；
Wherein, the attenuation units include 4 corner modules, and 4 RF mems switch, resistive module and co-planar waveguide pass
Defeated line；The resistive module is for decaying to the signal being transmitted in the attenuation units；First radio-frequency micro electromechanical
System switching, the first corner module, resistive module, the second corner module and the second RF mems switch pass through described
Coplanar waveguide transmission line is sequentially connected in series, and forms the first branch；The third RF mems switch, third corner mould
Block, the 4th corner module and the 4th RF mems switch are sequentially connected in series by the coplanar waveguide transmission line,
Form second branch；The first branch first end is connect with the second branch first end, and the signal as attenuation units is defeated
Enter end；The first branch second end is connect with the second branch second end, the signal output end as attenuation units.Pass through
Two branches are set in the attenuation units of attenuator, wherein a branch is provided with the resistive mode for making signal decay
Block, another branch are not provided with resistive module, can be ensured in the form of such two branches by selecting different branches
It can be the decaying of signal with selectivity.Meanwhile being based on being provided with 3 attenuation units in the attenuator, it can be ensured that when right
Branch control in different attenuation units, reaches the Attenuation adjustable function to the multi gear position of signal, to solve existing
The attenuator signal attenuation requirement different degrees of since fixed attenuation is unable to satisfy, multi gear can be carried out for signal by realizing one kind
The attenuator of position attenuation function.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And can be implemented in accordance with the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention and the accompanying drawings.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram for attenuator that the embodiment of the present invention provides；
Fig. 2 is the structural schematic diagram for another attenuator that the embodiment of the present invention provides；
Fig. 3 is a kind of structural schematic diagram for single-ended beam type contact-making switch that the embodiment of the present invention provides；
Fig. 4 is the structural schematic diagram of a kind of coplanar waveguide transmission line that the embodiment of the present invention provides and its dependency structure；
Fig. 5 is the topological structure schematic diagram of resistive module in a kind of attenuator of the embodiment of the present invention offer.
Specific embodiment
It is of the invention to reach the technical means and efficacy that predetermined goal of the invention is taken further to illustrate, below in conjunction with
Attached drawing and preferred embodiment, to attenuator proposed according to the present invention and attenuator, specific embodiment, method, structure, spy
Sign and its effect, detailed description is as follows.In the following description, what different " embodiment " or " embodiment " referred to is not necessarily same
One embodiment.In addition, the special characteristic, structure or feature in one or more embodiments can be combined by any suitable form.
A kind of attenuator that the embodiment of the present invention one proposes, specifically as shown in Figure 1, the device includes: the first decaying
Unit 11, the second attenuation units 12 and third attenuation units 13, first attenuation units 11, the second attenuation units 12 and
It is connected in series between third attenuation units 13；
Wherein, first attenuation units 11 include 4 corner modules, 4 RF mems switch, resistive module
And coplanar waveguide transmission line；The resistive module 111 is for decaying to the signal being transmitted in the attenuation units；Institute
State the first RF mems switch 112, the first corner module 113, resistive module 111, the second corner module 114 and
Two RF mems switch 115 are sequentially connected in series by the coplanar waveguide transmission line, form first branch 11a；Institute
State third RF mems switch 116, third corner module 117, the 4th corner module 118 and the 4th radio-frequency micro electromechanical
System switching 119 is sequentially connected in series by the coplanar waveguide transmission line, forms second branch 11b；The first branch
One end 11a1 is connect with the second branch first end 11b1, the signal input part as attenuation units；The first branch
Two end 11a2 are connect with the second branch second end 11b2, the signal output end as attenuation units.
Since in the attenuator described in embodiments of the present invention, there are two branches for attenuation units, therefore, when described
It, can be with by adjusting the RF mems switch in attenuation units after the signal input part of attenuation units receives signal
Realize that the regulatory function to signal transmission line, concrete implementation mode can be such that
It is being closed first RF mems switch 112 and the second RF mems switch 115, is disconnecting institute
After stating third RF mems switch 116 and the 4th RF mems switch 119, signal flows through first when transmitting
Road 11a decays by resistive module 111, then exports the letter after decaying from the signal output end of the attenuation units
Number；When disconnecting first RF mems switch 112 and the second RF mems switch 115, described in closure
After third RF mems switch 116 and the 4th RF mems switch 119, signal flows through second branch when transmitting
11b, from the output of the signal output end of the attenuation units with brush into the identical signal of signal.
Specifically, in attenuator described in the embodiment of the present invention, second attenuation units 12, third attenuation units 13
Internal structure it is identical as the internal structure of the first attenuation units 11 described above, do not do specifically repeat herein.In addition, described
The resistance in the resistive module 121 and third attenuation units in resistive module, the second attenuation units in first attenuation units
The resistance value of module 131 may be the same or different, and not do specific restriction herein, more when needing attenuator to carry out
When attenuation gradient, then the resistance value of three resistive modules therein can be set to different resistance values, so as to pass through difference
Resistive module the different attenuation gradient of selection, and then realize the function of increasing the gradient of decaying of signal.
By foregoing description, the embodiment of the invention provides a kind of attenuators, for fixed attenuation device in the prior art
Numerical value is fixed to the attenuation amplitude of signal, it is in the prior art when needing to carry out different degrees of decaying to signal
The mode of fixed attenuation is difficult to meet the problem of the needs of to the decaying of different degrees of signal.Decaying provided in an embodiment of the present invention
Device, 3 attenuation units are connected in series between the attenuation units；Wherein, the attenuation units include 4 corner modules, 4
RF mems switch, resistive module and coplanar waveguide transmission line；The resistive module is used for being transmitted to described decline
The signal subtracted in unit is decayed；First RF mems switch, the first corner module, resistive module, second
Corner module and the second RF mems switch are sequentially connected in series by the coplanar waveguide transmission line, form first
Branch；The third RF mems switch, third corner module, the 4th corner module and the 4th radio-frequency micro electromechanical system
System switch is sequentially connected in series by the coplanar waveguide transmission line, forms second branch；The first branch first end and institute
State the connection of second branch first end, the signal input part as attenuation units；The first branch second end with described second
The connection of road second end, the signal output end as attenuation units.By the way that two branches are arranged in the attenuation units of attenuator,
In a branch be provided with the resistive module for making signal decay, another branch is not provided with resistive module, in this way
The forms of two branches can ensure that by selecting different branch can be that the decaying of signal has selectivity.Meanwhile base
3 attenuation units are provided in the attenuator, it can be ensured that control, reach to letter when to the branch in different attenuation units
Number multi gear position Attenuation adjustable function, so that it is different degrees of since fixed attenuation is unable to satisfy to solve existing attenuator
Signal attenuation requirement realizes a kind of attenuator that signal can be carried out to multi gear position attenuation function.
Further, the embodiment of the present invention also one proposes another attenuator, specifically as shown in Fig. 2, wherein wrapping
Include: the first attenuation units 21, the second attenuation units 22 and third attenuation units 23, first attenuation units 21, second decline
Subtract and is connected in series between unit 22 and third attenuation units 23.
Wherein, first attenuation units 21 include 4 corner modules, 4 RF mems switch, resistive module
And coplanar waveguide transmission line；The resistive module 2101 is for decaying to the signal being transmitted in the attenuation units；
First RF mems switch 2102, the first corner module 2103, resistive module 2101, the second corner module 2104
And second RF mems switch 2105 be sequentially connected in series by the coplanar waveguide transmission line, formed the first branch
21a；The third RF mems switch 2106, third corner module 2107, the 4th corner module 2108 and the 4th
RF mems switch 2109 is sequentially connected in series by the coplanar waveguide transmission line, forms second branch 21b；It is described
First branch first end 21a1 is connect with the second branch first end 21b1, the signal input part as attenuation units；It is described
First branch second end 21a2 is connect with the second branch second end 21b2, the signal output end as attenuation units.
Since in the attenuator described in embodiments of the present invention, there are two branches for attenuation units, therefore, when described
It, can be with by adjusting the RF mems switch in attenuation units after the signal input part of attenuation units receives signal
Realize that concrete implementation mode is consistent with the description in previous embodiment, herein no longer to the regulatory function of signal transmission line
It repeats.
Specifically, in attenuator described in the embodiment of the present invention, second attenuation units 22, third attenuation units 23
Internal structure it is identical as the internal structure of the first attenuation units 21 described above, do not do specifically repeat herein.
Further, in embodiments of the present invention, the resistive module is specially the film-form being made of tantalum nitride, material
Resistance.
Further, in embodiments of the present invention, the RF mems switch is specially single-ended cantilever beam contact
Formula switch.
Specifically, the structure of the single-ended beam type contact-making switch is as shown in figure 3, including anchor point 31, cantilever beam
32 and switch contact 33, the single-ended beam type contact-making switch when being loaded predeterminated voltage, the cantilever beam 32 to
Elastic deformation occurs for 34 direction of coplanar waveguide transmission line, to connect the switch contact 33 and coplanar waveguide transmission line 34
It connects, forms closed circuit.It, can be default by being loaded in the switch when needing to be closed the single-ended beam type contact-making switch
Voltage is acted on by electrostatic attraction, so that by electrostatic attraction elastic deformation is occurred for the cantilever beam 32, so that the cantilever
The switch contact 33 that beam 32 is connected is subjected to displacement and finally connect with the coplanar waveguide transmission line, forms closed circuit, with
When notelet number is by the attenuation units, signal transmission is carried out by the single-ended cantilever beam contact-making switch.
It should be noted that in attenuation units described in the embodiment of the present invention same branch road two single-ended cantilever beams
Touch switch is connected and disconnects for simultaneously switching off or being closed, to realize the first branch or second branch, it is ensured that
When signal transmission line is adjusted, switch is avoided to fail to be closed at or disconnect asking for caused line transmission exception
Topic, improves the accuracy of attenuator on the whole.
Due to using single-ended beam type contact-making switch, avoids and declined as caused by relay switch in the prior art
Subtract the influence for the ghost effect that device occurs in high-frequency work, while also solving in the prior art using transistor switch
When, the lower problem of the power that holds and can bear is limited by transistor itself.Therefore, by the way that the list is arranged in attenuator
Beam type contact-making switch is held, while capable of guaranteeing that attenuator has preferable operating frequency range, moreover it is possible to avoid in device
The influence of portion's ghost effect improves the practicability and stability of attenuator.
Further, in the attenuator described in the embodiment of the present invention, the signal input part of the attenuation units and decaying
The signal output end of unit is respectively arranged with the first T-shaped mould block 2110 and the second T-shaped mould block 2110.
The first T-shaped mould block 2110 includes: the first T-shaped mould block first end 2110a, the first T-shaped mould block second end 2110b
And the first T-shaped mould block third end 2110c.Wherein, the first T-shaped mould block first end 2110a is for receiving signal, and described the
One T-shaped mould block second end 2110b is connect with the first branch first end 21a1 of the attenuation units；The first T-shaped mould block
Three end 2110c are connect with the second branch first end 21b1 of the attenuation units.
The second T-shaped mould block 2111 includes: the second T-shaped mould block first end 2111a, the second T-shaped mould block second end 2111b
And the second T-shaped mould block third end 2111c.Wherein, the second T-shaped mould block first end 2111a is used for output signal, and described the
Two T-shaped mould block second end 2111b are connect with the first branch second end 21a2 of the attenuation units；The second T-shaped mould block
Three end 2111c are connect with the second branch second end 21b2 of the attenuation units.
By setting T-shaped mould block, the branch function to signal may be implemented, when the attenuation units receive signal,
The signal can be received by the T-shaped mould block first end, and according to the switch in the attenuation units, signal be made to flow through T
Pattern block second end enters the first branch of attenuation units or flows through the second branch that T-shaped mould block third end enters attenuation units
In, to realize the branch function of signal.
Further, in the attenuator described in the embodiment of the present invention, section that corner module therein is specifically as follows
Width is 40 μm of corner transmission lines, and the crank degree of the corner transmission line is 90 °, meanwhile, the T-shaped mould block is specially section
The T-type transmission line that width is 40 μm, also, the material phase of the corner module, T-shaped mould block and the coplanar waveguide transmission line
Together.Based on inductive effect, the section of identical material is smaller, and inductance frequency is higher, therefore, because existing coplanar wave guide transmission
The cross-sectional width of line will be wider than the cross-sectional width of corner module described in the embodiment of the present invention and T-shaped mould block, this is just on the whole
The intrinsic frequency for being provided with the attenuation units of the corner module and T-shaped mould block is improved, and then can be avoided described when being equipped with
The resonance noise that the attenuator of attenuation units is likely to occur in high-frequency work, to further improve institute of the embodiment of the present invention
The range of the working frequency for the attenuator stated further improves the practical function of attenuator.
Further, the electricity of the resistive module 2101 in the first attenuation units in the attenuator, the second attenuation units
The resistance value hindered between module 2201 and the resistive module 2301 of third attenuation units is different, to make described first to decline
It is different to subtract unit 21, the second attenuation units 22, the signal attenuation amplitude between third attenuation units 23.
As a result, since the attenuation amplitude of the attenuation units in this attenuator is different, based on each of which decaying
There are two branches, the i.e. branch comprising resistive module and the branch of non-resistance module in unit, due to the included electricity of signal stream
It is attenuated when hindering the branch of module, and flows through the not branch comprising resistive module and be not attenuated then, therefore, each decaying
The obtained signal of unit can obtain two different signals according to actual adjusting, then can be by different to 3
Attenuation units are adjusted, and can export 8 grades of different degrees of deamplifications by the attenuator after the signal having input.
Thus, it is possible to the gradient more diversification for making signal decay, so as to meet the demand of the multi gear decaying to signal.
Further, in the attenuator described in the embodiment of the present invention, the first attenuation units 21 in attenuator, second decline
Subtract and is connected in series between unit 22 and third attenuation units 23 by the coplanar waveguide transmission line 24.
Specifically, the coplanar waveguide transmission line 24 and its relevant structure can be as shown in Figure 4, wherein described coplanar
41 material of substrate of waveguide transmission line is silicon, with a thickness of 500 μm, dielectric constant 11.9.The coplanar waveguide transmission line 42
Impedance is 50 Ω, and width is 120 μm, and the material of the coplanar waveguide transmission line is metallic gold；The coplanar waveguide transmission line 42
Both ends be provided with ground wire 43,43 spacing of ground wire at the coplanar waveguide transmission line 42 and both ends is 75 μm, about 50 Ω of impedance.
In addition, in attenuator described in the embodiment of the present invention, in attenuation units, inside be additionally provided with for balancing altogether
The air bridge module of coplanar waveguide transmission line both ends ground wire potential.
Specific set-up mode can as in Fig. 2 the mode of air bridges 2112 and air bridges 2113 be arranged.Wherein, air bridges
The both ends of the first T-shaped mould block 2110 are arranged in module 2112, to balance the electricity of 2110 both ends ground wire of the first T-shaped mould block
Gesture；The both ends of the corner units 2103 are arranged in the air bridges 2113, to balance 2103 both ends ground wire of corner units
Potential.In addition, near T-shaped mould block and corner module in 3 attenuation units in attenuator described in the embodiment of the present invention
Air bridge module can be set in the manner described above, both ends potential can be balanced with this, to avoid because both ends potential difference is to declining
Subtract the influence of unit.
Further, in multiple attenuation units in attenuator described in the embodiment of the present invention, the internal resistance being arranged
Module is the film like structures of tantalum nitride, and in embodiments of the present invention, the topological structure of the resistive module can be T junction
Structure, that is, two resistance Rs and a parallel resistance Rp composition, its specific topological structure can be as shown in Figure 5.Certainly,
The topological structure of the resistive module includes but is not limited to above-mentioned T-type structure, for example, when the attenuation units need to carry out it is larger
Signal decaying when, then the topological structure for the resistive module being arranged in its attenuation units can be π type, that is, two parallel connections
Resistance and a series resistance.
By foregoing description, the embodiment of the invention provides another attenuators, for fixed attenuation in the prior art
Device is fixed numerical value to the attenuation amplitude of signal, when needing to carry out different degrees of decaying to signal, in the prior art
The mode of fixed attenuation the needs of being difficult to meet to the decaying of different degrees of signal the problem of.Decaying provided in an embodiment of the present invention
Device, 3 attenuation units are connected in series between the attenuation units；Wherein, the attenuation units include 4 corner modules, 4
RF mems switch, resistive module and coplanar waveguide transmission line；The resistive module is used for being transmitted to described decline
The signal subtracted in unit is decayed；First RF mems switch, the first corner module, resistive module, second
Corner module and the second RF mems switch are sequentially connected in series by the coplanar waveguide transmission line, form first
Branch；The third RF mems switch, third corner module, the 4th corner module and the 4th radio-frequency micro electromechanical system
System switch is sequentially connected in series by the coplanar waveguide transmission line, forms second branch；The first branch first end and institute
State the connection of second branch first end, the signal input part as attenuation units；The first branch second end with described second
The connection of road second end, the signal output end as attenuation units.By the way that two branches are arranged in the attenuation units of attenuator,
In a branch be provided with the resistive module for making signal decay, another branch is not provided with resistive module, in this way
The forms of two branches can ensure that by selecting different branch can be that the decaying of signal has selectivity.Meanwhile base
3 attenuation units are provided in the attenuator, it can be ensured that control, reach to letter when to the branch in different attenuation units
Number multi gear position Attenuation adjustable function, so that it is different degrees of since fixed attenuation is unable to satisfy to solve existing attenuator
Signal attenuation requirement realizes a kind of attenuator that signal can be carried out to multi gear position attenuation function.
Further, since using single-ended beam type contact-making switch, avoid in the prior art since relay switch is led
The influence for the ghost effect that the attenuator of cause occurs in high-frequency work, while also solving in the prior art using transistor
When switch, the lower problem of the power that holds and can bear is limited by transistor itself.Therefore, by the way that institute is arranged in attenuator
Single-ended beam type contact-making switch is stated, while capable of guaranteeing that attenuator has preferable operating frequency range, moreover it is possible to avoid device
The influence of part endophyte effect improves the practicability and stability of attenuator.In addition, by setting T-shaped mould block, Ke Yishi
Now to the branch function of signal, when the attenuation units receive signal, institute can be received by the T-shaped mould block first end
Signal is stated, and according to the switch in the attenuation units, signal is made to flow through first that T-shaped mould block second end enters attenuation units
Road flows through T-shaped mould block third end and enters in the second branch of attenuation units, to realize the branch function of signal.
Further, since the cross-sectional width of existing coplanar waveguide transmission line will be wider than the corner module and the T
The cross-sectional width of pattern block, this just improves the intrinsic of the attenuation units for being provided with the corner module and T-shaped mould block on the whole
Frequency, and then can be avoided the resonance noise being likely to occur when being equipped with the attenuator of the attenuation units in high-frequency work,
To further improve the range of the working frequency of attenuator described in the embodiment of the present invention, attenuator is further improved
Practical function.Further, since the attenuation amplitude of the attenuation units in this attenuator is different, therefore, declined based on each of which
Subtract unit and there are two branches, the i.e. branch comprising resistive module and the branch of non-resistance module, since signal stream is included
It is attenuated when the branch of resistive module, and flows through the not branch comprising resistive module and be not attenuated then, therefore, each declines
Two different signals can be obtained according to actual adjusting by subtracting the obtained signal of unit, then can be by 3 differences
Attenuation units be adjusted, 8 grades of different degrees of decaying letters can be exported by the attenuator after the signal having input
Number.Thus, it is possible to the gradient more multi-ladder for making signal decay, so as to meet the need of the multi-ladder decaying to signal
It asks.
In the above-described embodiments, it all emphasizes particularly on different fields to the description of each embodiment, there is no the portion being described in detail in some embodiment
Point, reference can be made to the related descriptions of other embodiments.
It is understood that the correlated characteristic in the above method and device can be referred to mutually.In addition, in above-described embodiment
" first ", " second " etc. be and not represent the superiority and inferiority of each embodiment for distinguishing each embodiment.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, can refer to corresponding processes in the foregoing method embodiment, and details are not described herein.
In the instructions provided here, numerous specific details are set forth.It is to be appreciated, however, that implementation of the invention
Example can be practiced without these specific details.In some instances, well known method, structure is not been shown in detail
And technology, so as not to obscure the understanding of this specification.
Similarly, it should be understood that in order to simplify the disclosure and help to understand one or more of the various inventive aspects,
Above in the description of exemplary embodiment of the present invention, each feature of the invention is grouped together into single implementation sometimes
In example, figure or descriptions thereof.However, the disclosed method should not be interpreted as reflecting the following intention: i.e. required to protect
Shield the present invention claims features more more than feature expressly recited in each claim.More precisely, as following
Claims reflect as, inventive aspect is all features less than single embodiment disclosed above.Therefore,
Thus the claims for following specific embodiment are expressly incorporated in the specific embodiment, wherein each claim itself
All as a separate embodiment of the present invention.
Those skilled in the art will understand that can be carried out adaptively to the module in the equipment in embodiment
Change and they are arranged in one or more devices different from this embodiment.It can be the module or list in embodiment
Member or component are combined into a module or unit or component, and furthermore they can be divided into multiple submodule or subelement or
Sub-component.Other than such feature and/or at least some of process or unit exclude each other, it can use any
Combination is to all features disclosed in this specification (including adjoint claim, abstract and attached drawing) and so disclosed
All process or units of what method or apparatus are combined.Unless expressly stated otherwise, this specification is (including adjoint power
Benefit require, abstract and attached drawing) disclosed in each feature can carry out generation with an alternative feature that provides the same, equivalent, or similar purpose
It replaces.
In addition, it will be appreciated by those of skill in the art that although some embodiments described herein include other embodiments
In included certain features rather than other feature, but the combination of the feature of different embodiments mean it is of the invention
Within the scope of and form different embodiments.For example, in the following claims, embodiment claimed is appointed
Meaning one of can in any combination mode come using.
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and ability
Field technique personnel can be designed alternative embodiment without departing from the scope of the appended claims.In the claims,
Any reference symbol between parentheses should not be configured to limitations on claims.Word "comprising" does not exclude the presence of not
Element or step listed in the claims.Word "a" or "an" located in front of the element does not exclude the presence of multiple such
Element.The present invention can be by means of including the hardware of several different elements and being come by means of properly programmed computer real
It is existing.In the unit claims listing several devices, several in these devices can be through the same hardware branch
To embody.The use of word first, second, and third does not indicate any sequence.These words can be explained and be run after fame
Claim.
Claims (8)
1. a kind of attenuator characterized by comprising 3 attenuation units are connected in series between the attenuation units；
Wherein, the attenuation units include 4 corner modules, 4 RF mems switch, resistive module and coplanar wave
Lead transmission line；The resistive module is for decaying to the signal being transmitted in the attenuation units；First radio frequency is micro-
Electromechanical system switch, the first corner module, resistive module, the second corner module and the second RF mems switch pass through
The coplanar waveguide transmission line is sequentially connected in series, and forms the first branch；The third RF mems switch, third turn
Corner Block List Representation, the 4th corner module and the 4th RF mems switch are sequentially connected in series company by the coplanar waveguide transmission line
It connects, forms second branch；The first branch first end is connect with the second branch first end, the signal as attenuation units
Input terminal；The first branch second end is connect with the second branch second end, the signal output end as attenuation units.
2. attenuator described according to claim 1, which is characterized in that the resistive module is specially to be made of tantalum-nitride material
Film-form resistance.
3. attenuator described according to claim 1, which is characterized in that the RF mems switch is specially single-ended outstanding
Arm beam touch switch；
The single-ended beam type exposure switch includes anchor point, cantilever beam and switch contact, and the single-ended beam type connects
Touching switch is for when on-load voltage, to the coplanar waveguide transmission line direction elastic deformation to occur for the cantilever beam, to make
The switch contact is connect with coplanar waveguide transmission line, forms closed circuit.
4. attenuator described according to claim 1, which is characterized in that in the attenuator, the signal of the attenuation units
Input terminal and the signal output end of attenuation units are respectively arranged with the first T-shaped mould block and the second T-shaped mould block；
The first T-shaped mould block includes: the first T-shaped mould block first end, the first T-shaped mould block second end and the first T-shaped mould block
Three ends；
The first T-shaped mould block first end is for receiving signal, and the of the first T-shaped mould block second end and the attenuation units
The connection of one branch first end；The first T-shaped mould block third end is connect with the second branch first end of the attenuation units；
The second T-shaped mould block includes: the second T-shaped mould block first end, the second T-shaped mould block second end and the second T-shaped mould block
Three ends；
The second T-shaped mould block first end is used for output signal, and the of the second T-shaped mould block second end and the attenuation units
The connection of one branch second end；The second T-shaped mould block third end is connect with the second branch second end of the attenuation units.
5. the attenuator according to claim 4, which is characterized in that
The cross-sectional width that the corner module is specially is 40 μm of corner transmission lines, and the crank degree of the corner transmission line is
90°；
The T-shaped mould block is specially the T-type transmission line that cross-sectional width is 40 μm；
The corner module, T-shaped mould block are identical as the material of the coplanar waveguide transmission line.
6. the attenuator according to claim 3, which is characterized in that
In the attenuation units two of same branch road single-ended cantilever beam touch switches for simultaneously switching off or being closed, with
Just the first branch or second branch is made to realize conducting and disconnect.
7. attenuator according to claim 1, which is characterized in that
The resistive module in the first attenuation units, the resistive module of the second attenuation units and third decaying in the attenuator
Resistance value between the resistive module of unit is different, to make first attenuation units, the second attenuation units, third decline
The signal attenuation amplitude subtracted between unit is different.
8. according to claim 1, attenuator described in 4 or 7, which is characterized in that
It is passed between the first attenuation units, the second attenuation units and third attenuation units in attenuator by the co-planar waveguide
Defeated line is connected in series；
The substrate material of the coplanar waveguide transmission line is silicon, with a thickness of 500 μm, dielectric constant 11.9；
The impedance of the coplanar waveguide transmission line is 50 Ω, and width is 120 μm, and the material of the coplanar waveguide transmission line is metal
Gold；
The both ends of the coplanar waveguide transmission line are provided with ground wire, and the ground wire spacing at the coplanar waveguide transmission line and both ends is 75
μm, about 50 Ω of impedance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711377865.XA CN109935948A (en) | 2017-12-19 | 2017-12-19 | Attenuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711377865.XA CN109935948A (en) | 2017-12-19 | 2017-12-19 | Attenuator |
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| Publication Number | Publication Date |
|---|---|
| CN109935948A true CN109935948A (en) | 2019-06-25 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| US6472948B1 (en) * | 2000-07-10 | 2002-10-29 | Rockwell Collins, Inc. | High-power precision 1 dB step attenuator |
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| CN102403561A (en) * | 2011-09-22 | 2012-04-04 | 东南大学 | Micro-electromechanical cantilever beam switch type microwave power coupler and method for preparing microwave power coupler |
| CN205864378U (en) * | 2016-07-01 | 2017-01-04 | 合肥众强微波科技有限公司 | A kind of Ku wave band numerical-control attenuator |
| US20170062197A1 (en) * | 2015-08-28 | 2017-03-02 | Micromass Uk Limited | Mass Spectrometer with Digital Step Attenuator |
| CN107437483A (en) * | 2017-07-24 | 2017-12-05 | 中北大学 | A kind of board-type single-pole single-throw switch (SPST) single-chip integration attenuator |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6472948B1 (en) * | 2000-07-10 | 2002-10-29 | Rockwell Collins, Inc. | High-power precision 1 dB step attenuator |
| CN101202369A (en) * | 2007-12-11 | 2008-06-18 | 中国电子科技集团公司第五十五研究所 | Miniature MEMS switching line phase shifter |
| CN102403561A (en) * | 2011-09-22 | 2012-04-04 | 东南大学 | Micro-electromechanical cantilever beam switch type microwave power coupler and method for preparing microwave power coupler |
| US20170062197A1 (en) * | 2015-08-28 | 2017-03-02 | Micromass Uk Limited | Mass Spectrometer with Digital Step Attenuator |
| CN205864378U (en) * | 2016-07-01 | 2017-01-04 | 合肥众强微波科技有限公司 | A kind of Ku wave band numerical-control attenuator |
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