CN109931859B - Linear displacement sensor with complementary coupling structure - Google Patents
Linear displacement sensor with complementary coupling structure Download PDFInfo
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- CN109931859B CN109931859B CN201910286342.7A CN201910286342A CN109931859B CN 109931859 B CN109931859 B CN 109931859B CN 201910286342 A CN201910286342 A CN 201910286342A CN 109931859 B CN109931859 B CN 109931859B
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Abstract
The invention discloses a linear displacement sensor with a complementary coupling structure, which comprises a fixed scale, a movable scale, a fixed scale mounting base body and a movable scale mounting base body, wherein the fixed scale mounting base body comprises a base and a limiting block, a fixed scale groove matched with the fixed scale in length is formed in the base, the fixed scale is vertically mounted in the fixed scale groove and is limited and fixed through the limiting block, a straight groove opening is formed in the middle of the movable scale mounting base body, the width of the straight groove opening is larger than the sum of the fixed scale thickness and the two movable scales, and the depth of the straight groove opening is larger than the height of a fixed scale sensing unit on the fixed scale, the movable scale mounting base body is symmetrical about the straight groove opening, the two movable scales are symmetrically mounted on two sides of the straight groove opening, the movable scale sensing units on the two movable scales are connected in series, and the fixed scale is inserted into the straight groove opening, so that the movable scale sensing units. The invention can realize complementary coupling between excitation and induction, and can effectively reduce the influence of sensor manufacture, assembly, installation and the like on the measurement performance.
Description
Technical Field
The invention belongs to the technical field of precision measurement sensors, and particularly relates to a linear displacement sensor with a complementary coupling structure.
Background
In order to achieve better linear positioning accuracy, linear motion units on machine tools or other instruments often require linear displacement sensors to provide position feedback. The existing linear displacement sensors mainly have an electromagnetic induction type, an electric field type and an optical field type, and mainly comprise a fixed ruler and a movable ruler which are arranged just opposite to each other in parallel, but have the following problems: (1) the movable ruler is coupled with the fixed ruler only at one side of the fixed ruler, so that the measuring performance of the sensor is greatly influenced by the size of a gap between the movable ruler and the fixed ruler, the parallelism and the like, and higher requirements are provided for the manufacturing and the installation of the movable ruler and the fixed ruler; (2) if the scale sensing unit on the scale is assembled on the surface of the scale base body in a sticking mode, the flatness and the straightness of the scale sensing unit are difficult to ensure, and therefore the measuring performance of the sensor is also affected.
The linear displacement sensor based on the electromagnetic induction principle is better applied due to stronger environmental adaptability. The electromagnetic induction type linear displacement sensor comprises an excitation coil and an induction coil, wherein an alternating current signal is applied to the excitation coil to generate a magnetic field, and the induction coil receives the magnetic field and generates an induction signal related to the measured position, so that the linear displacement measurement is realized. CN105300262A discloses an absolute time grating linear displacement sensor, in which an excitation coil and an induction coil are respectively included in a movable scale and a fixed scale, the excitation coil on the movable scale generates a magnetic field, and the induction coil on the fixed scale receives the magnetic field. CN107796293A discloses an electromagnetic induction type linear displacement sensor, in which an excitation coil and an induction coil are both contained in a fixed length. The magnet exciting coil and the induction coil on the fixed ruler respectively generate a magnetic field and a receiving magnetic field, and the movable ruler is used for changing the distribution of the magnetic field. When the movable scale and the fixed scale are displaced relatively, the magnetic field received by the induction coil changes, so that the signal output by the induction coil changes, and the relative displacement of the movable scale and the fixed scale can be obtained by processing the signal output by the induction coil. Both of these linear displacement sensors have the following problems: (1) the movable ruler only affects the induction coil to receive the magnetic field at one side of the fixed ruler, so that the measuring performance of the sensor is greatly affected by the size of a gap between the movable ruler and the fixed ruler, the parallelism and the like, and higher requirements are provided for the manufacturing and the installation of the movable ruler and the fixed ruler of the sensor; (2) if the coil on the scale is assembled on the surface of the scale base body in a sticking mode, the flatness and the straightness of the coil are difficult to ensure, and therefore the measuring performance of the sensor is influenced. In addition, the planar rectangular spiral coil in CN107796293A has only one winding direction, and the planar rectangular spiral coil cannot resist the external common mode interference magnetic field, and is a non-negligible error source for the measurement result of the sensor, especially when the planar rectangular spiral coil of the sensor is used as the induction coil.
Disclosure of Invention
The invention aims to provide a linear displacement sensor with a complementary coupling structure, so as to reduce the influence of the manufacture and installation of a movable scale and a fixed scale on the measurement performance and further improve the measurement precision.
The invention relates to a linear displacement sensor with a complementary coupling structure, which comprises a fixed scale, two movable scales, a fixed scale mounting base body and a movable scale mounting base body, wherein the fixed scale mounting base body comprises a base and a limiting block, a fixed scale groove matched with the length of the fixed scale is formed in the base, the fixed scale is vertically mounted in the fixed scale groove and is limited and fixed through the limiting block, a straight groove opening is formed in the middle of the movable scale mounting base body, the width of the straight groove opening is larger than the sum of the thickness of the fixed scale and the thickness of the two movable scales, the depth of the straight groove opening is larger than the height of a fixed scale sensing unit on the fixed scale, the movable scale mounting base body is symmetrical about the straight groove opening, the two movable scales are symmetrically mounted on two sides of the straight groove opening, the movable scale sensing units on the two movable scales are connected in series, and the fixed scale is inserted into the straight groove opening. The linear displacement sensor with the complementary coupling structure can be applied to an electromagnetic induction type linear displacement sensor and also can be applied to a non-electromagnetic induction type linear displacement sensor (such as an electric field type linear displacement sensor, an optical field type linear displacement sensor and the like). The linear displacement sensor with the complementary coupling structure has the following effects: (1) the installation process is simple, and only the fixed length needs to be vertically placed in the fixed length groove and limited and fixed through the limiting block; (2) the fixed-length vertical installation is realized through the matching of the base, the fixed-length groove and the limiting block, the participation of an adhesive is reduced in the installation process, the flatness and the straightness of the fixed-length sensing unit are not influenced by the adhesive any more, and the flatness and the straightness of the fixed-length sensing unit are ensured; (3) the scale is installed perpendicularly, and movable ruler installation base member is symmetrical about the straight flute mouth, and two movable ruler symmetries are installed in the both sides of straight flute mouth, and the scale inserts in the straight flute mouth of movable ruler installation base member, and movable ruler sensing unit is just to the coupling with the scale sensing unit, even movable ruler installation is unsatisfactory or the movement track is unsatisfactory, the clearance sum between two movable rulers and the scale keeps unchangeable, has realized the complementary coupling between excitation and the response, and it has reduced the manufacturing and the installation of movable ruler and scale to measuring performance's influence, has further improved measurement accuracy.
For the electromagnetic induction type linear displacement sensor, the fixed length comprises a fixed length coil base body and the fixed length sensing units printed on the fixed length coil base body, wherein the fixed length sensing units are formed by the distribution period W and the distribution period number W
The initial position of the first coil linear array along the measuring direction is different from the initial position of the second coil linear array along the measuring direction
The movable ruler comprises a movable ruler coil base body and the movable ruler sensing units printed on the movable ruler coil base body, wherein the movable ruler sensing units are distributed in a period W and the number of the distributed periods is
The first double sinusoidal coil linear array; wherein m is1N is an even number, n is not less than 4, and m is not less than 21＜n。
The first coil linear array and the second coil linear array are composed of 4n straight wires with the length of L and connecting wires for connecting the straight wires, wherein 2n +2 straight wires are distributed on a first wiring layer of the fixed-length coil base body along the measuring direction, and the other 2n-2 straight wires are distributed on a second wiring layer of the fixed-length coil base body along the measuring direction and are symmetrical to the 2n-2 straight wires distributed in the middle of the first wiring layer; the distance between two adjacent straight wires on the same wiring layer along the measuring direction is
The 2i +1 th straight wire on the first wiring layer is connected with the 2i +1 th straight wire on the second wiring layer through a connecting wire and a via hole, the 2i +1 th straight wire on the second wiring layer is connected with the 2i +5 th straight wire on the first wiring layer through a connecting wire and a via hole, the 2n-1 th straight wire on the first wiring layer is connected with the 2n +1 th straight wire on the first wiring layer through a connecting wire and a via hole to form a first coil linear array, and the unconnected end part leads of the 1 st straight wire and the 3 rd straight wire on the first wiring layer are used as signal input/output terminals of the first coil linear array; the 2i +2 th straight wire on the first wiring layer is connected with the 2i +2 th straight wire on the second wiring layer through a connecting wire and a via hole, and the 2i +2 th straight wire on the second wiring layer is connected with the first straight wire on the first wiring layer through a connecting wire and a via holeThe straight wires are connected with the 2i +6 th straight wires on the first wiring layer through connecting wires and via holes, the 2n th straight wires on the first wiring layer are connected with the 2n +2 th straight wires on the first wiring layer through connecting wires and via holes to form a second coil linear array, and the lead wires at the unconnected end parts of the 2 nd straight wires and the 4 th straight wires on the first wiring layer are used as signal input/output wiring terminals of the second coil linear array; wherein i is all integers from 0 to n-2 in sequence. Odd number straight wires on the first wiring layer and the second wiring layer of the fixed-length coil base body are connected to form a first coil linear array, even number straight wires on the first wiring layer and the second wiring layer of the fixed-length coil base body are connected to form a second coil linear array, the symmetry of the coils is guaranteed by the crossed wiring mode, the symmetry of the first coil linear array and the second coil linear array relative to the first double-sine-shaped coil linear array is guaranteed, the first coil linear array and the second coil linear array are enabled to have two winding directions, therefore, an external common-mode interference magnetic field is better resisted, and measuring errors are reduced.
The first double-sine-shaped coil linear array has the same starting position, amplitude of A, period of W and period number of
The first and the second sinusoidal wire sections with 180 degrees phase difference enclose the first sinusoidal wire section
The interval part,
Of sections and of second sinusoidal conductor segments
The interval parts are distributed on the first wiring layer of the moving ruler coil base body, and the second sinusoidal wire segments
The interval part,
Of sections and first sinusoidal conductor segments
The interval parts are all distributed on a second wiring layer of the movable scale coil substrate, lead wires at the end parts of two adjacent interval parts distributed on different wiring layers are used as signal input/output terminals of the first double-sine-shaped coil linear array, and the end parts of the interval parts distributed on different wiring layers are connected through via holes; wherein j is 0 to
All of the integers of (1). One part of the first sinusoidal wire is arranged on a first wiring layer of the movable scale coil base body, the other part of the first sinusoidal wire is arranged on a second wiring layer of the movable scale coil base body, one part of the second sinusoidal wire is arranged on the first wiring layer of the movable scale coil base body, and the other part of the second sinusoidal wire is arranged on a second wiring layer of the movable scale coil base body.
Preferably, the top of the movable scale mounting base body is provided with an L-shaped gap, and a signal input/output terminal of the first double-sine-shaped coil linear array is exposed outside the movable scale mounting base body through the L-shaped gap, so that the connection between the signal input/output terminal of the first double-sine-shaped coil linear array and a subsequent signal processing system is facilitated.
Go up to electromagnetic induction formula linear displacement sensor, when carrying out linear displacement measurement there are two kinds of mode of connection: the first one is to use the first coil linear array and the second coil linear array as the exciting coil, the first double-sine coil linear array as the induction coil, the first coil linear array and the second coil linear array are respectively connected with two orthogonal alternating excitation signals, when the movable scale and the fixed scale move relatively along the measuring direction, the first double-sine coil linear array outputs the induction signal with constant amplitude and periodic variation of phase, the phase discrimination processing is carried out on the induction signal, and the linear displacement of the movable scale relative to the fixed scale is obtained after the conversion. And the second method is that a first double-sine-shaped coil linear array is used as an excitation coil, a first coil linear array and a second coil linear array are used as induction coils, alternating excitation signals are introduced into the first double-sine-shaped coil linear array, when the movable scale and the fixed scale move relatively along the measuring direction, the first coil linear array and the second coil linear array respectively output a path of induction signals with constant phase and periodically changing amplitude, the two paths of induction signals are subjected to amplitude discrimination processing, and linear displacement of the movable scale relative to the fixed scale is obtained after conversion.
The invention relates to another electromagnetic induction type linear displacement sensor with a complementary coupling structure, which comprises a fixed scale and a movable scale, wherein the fixed scale comprises a fixed scale coil base body and a sensing unit printed on the fixed scale coil base body, the movable scale is a metal magnetizer or a conductive metal non-magnetizer, the sensor also comprises a fixed scale mounting base body, the fixed scale mounting base body comprises a base and a limiting block, a fixed scale groove matched with the length of the fixed scale is formed in the base, the fixed scale is vertically arranged in the fixed scale groove and is limited and fixed through the limiting block, a movable scale straight notch is formed in the middle of the movable scale, the width of the movable scale straight notch is larger than the fixed scale thickness, the depth of the movable scale straight notch is larger than the height of the sensing unit, the movable scale is symmetrical about the movable scale straight notch, and the length of the
The fixed ruler is inserted into the straight notch of the movable ruler, so that the front part and the rear part of the movable ruler are coupled with the sensing unit in a right-facing way; the sensing unit is composed of a first coil linear array, a second coil linear array and a second double sinusoidal coil linear array, the distribution period of the first coil linear array and the second coil linear array is W, and the number of the distribution periods is W
The initial position of the first coil linear array along the measuring direction is staggered with the initial position of the second coil linear array along the measuring direction
The second double sinusoidal coil linear array has the distribution period of
Number of distribution cycles is
The second double-sine-shaped coil linear array is positioned in an area formed by the first coil linear array and the second coil linear array, and the difference between the initial position of the second double-sine-shaped coil linear array along the measuring direction and the initial position of the first coil linear array along the measuring direction
Wherein m is2N is an even number, n is not less than 4, m2Not less than 4, k is an integer and k is not less than 0. The electromagnetic induction type linear displacement sensor with the complementary coupling structure has the following effects: (1) the installation process is simple, and only the fixed length needs to be vertically placed in the fixed length groove and limited and fixed through the limiting block; (2) the fixed-size vertical installation is realized through the matching of the base, the fixed-size groove and the limiting block, the participation of an adhesive is reduced in the installation process, the flatness and the straightness of the sensing unit on the fixed size are not influenced by the adhesive, and the flatness and the straightness of the sensing unit are ensured; (3) the fixed ruler is vertically installed, the movable ruler is symmetrical about the straight notch of the movable ruler, the fixed ruler is inserted into the straight notch of the movable ruler, the front part and the rear part of the movable ruler are coupled with the sensing unit in a right-to-right mode, even if the movable ruler is installed unsatisfactorily or the moving track is unsatisfactorily, the sum of the gaps between the movable ruler and the fixed ruler is kept unchanged, complementary coupling between excitation and induction is achieved, the influence of manufacturing and installing the movable ruler and the fixed ruler on measuring performance is reduced, and measuring accuracy is further improved.
The first coil linear array and the second coil linear array are composed of 4n straight wires with the length of L and connecting wires for connecting the straight wires, wherein 2n +2 straight wires are distributed on a first wiring layer of the fixed-length coil base body along the measuring direction, and the other 2n-2 straight wires are distributed on a fourth wiring layer of the fixed-length coil base body along the measuring direction and are symmetrical to the 2n-2 straight wires distributed in the middle of the first wiring layer; the same wiringThe distance between two adjacent straight wires on the layer along the measuring direction is
The 2i +1 th straight wire on the first wiring layer is connected with the 2i +1 th straight wire on the fourth wiring layer through a connecting wire and a via hole, the 2i +1 th straight wire on the fourth wiring layer is connected with the 2i +5 th straight wire on the first wiring layer through a connecting wire and a via hole, the 2n-1 th straight wire on the first wiring layer is connected with the 2n +1 th straight wire on the first wiring layer through a connecting wire and a via hole to form a first coil linear array, and the unconnected end leads of the 1 st straight wire and the 3 rd straight wire on the first wiring layer are used as signal input/output terminals of the first coil linear array; the 2i +2 straight wires on the first wiring layer are connected with the 2i +2 straight wires on the fourth wiring layer through connecting wires and via holes, the 2i +2 straight wires on the fourth wiring layer are connected with the 2i +6 straight wires on the first wiring layer through connecting wires and via holes, the 2n straight wires on the first wiring layer are connected with the 2n +2 straight wires on the first wiring layer through connecting wires and via holes to form a second coil linear array, and the unconnected end leads of the 2 nd and 4 th straight wires on the first wiring layer are used as signal input/output terminals of a second linear array coil; wherein i is all integers from 0 to n-2 in sequence.
The second double-sine-shaped coil linear array has the same starting position, the amplitude of A and the period of A
The number of cycles is
A third sinusoidal wire section and a fourth sinusoidal wire section which have 180-degree phase difference
The interval part,
Of sections and fourth sinusoidal conductor segments
The interval parts are all distributed on the second wiring layer of the fixed-length coil base body and of the fourth sinusoidal wire section
The interval part,
Of sections and third sinusoidal conductor segments
The interval parts are all distributed on a third wiring layer of the fixed-length coil substrate, lead wires at the end parts of certain two adjacent interval parts distributed on different wiring layers are used as signal input/output terminals of a second double-sine-shaped coil linear array, and the end parts of all the interval parts distributed on different wiring layers are connected through via holes; wherein j is 0 to
All of the integers of (1).
The first coil linear array is formed by connecting odd straight wires on a first wiring layer and a fourth wiring layer of a fixed-length coil base body, the second coil linear array is formed by connecting even straight wires on the first wiring layer and the fourth wiring layer of the fixed-length coil base body, one part of a third sine wire is arranged on the second wiring layer of the fixed-length coil base body, the other part of the third sine wire is arranged on the third wiring layer of the fixed-length coil base body, one part of a fourth sine wire is arranged on the second wiring layer of the fixed-length coil base body, the other part of the fourth sine wire is arranged on the third wiring layer of the fixed-length coil base body, the cross wiring mode ensures the symmetry of the coil, ensures the symmetry of the first coil linear array wiring layer and the second coil linear array relative to the second double sine coil linear array, and ensures that the first coil linear array, the second coil linear array and the second double-shaped coil linear array all have' two winding directions, therefore, the external common-mode interference magnetic field is resisted better, and the measurement error is further reduced.
Go up to electromagnetic induction formula linear displacement sensor, when carrying out linear displacement measurement there are two kinds of mode of connection: the first type is that a first coil linear array and a second coil linear array are used as excitation coils, a second double-sine-shaped coil linear array is used as an induction coil, two orthogonal alternating excitation signals are respectively introduced into the first coil linear array and the second coil linear array, when the movable scale and the fixed scale move relatively along the measuring direction, the second double-sine-shaped coil linear array outputs induction signals with constant amplitude and periodic phase change, phase discrimination processing is carried out on the induction signals, and linear displacement of the movable scale relative to the fixed scale is obtained after conversion. And the second type is that a second double-sine-shaped coil linear array is used as an excitation coil, a first coil linear array and a second coil linear array are used as induction coils, alternating excitation signals are introduced into the second double-sine-shaped coil linear array, when the movable scale and the fixed scale move relatively along the measuring direction, the first coil linear array and the second coil linear array respectively output a path of induction signals with constant phase and periodically changing amplitude, the two paths of induction signals are subjected to amplitude discrimination processing, and linear displacement of the movable scale relative to the fixed scale is obtained after conversion.
Drawings
Fig. 1 is a schematic view of the overall structure of embodiment 1 and embodiment 2.
Fig. 2 is a schematic cross-sectional view of fig. 1.
Fig. 3 is a schematic structural diagram of sizing in embodiments 1 and 2.
Fig. 4 is a schematic wiring diagram of the sensing unit in embodiment 1 and embodiment 2.
Fig. 5 is a schematic diagram of the wiring on the first wiring layer on the fixed-length coil base in examples 1 and 2.
Fig. 6 is a schematic diagram of the wiring on the fourth wiring layer on the fixed-length coil base in example 1 and example 2.
Fig. 7 is a schematic diagram of the wiring on the second wiring layer on the fixed-length coil base in examples 1 and 2.
Fig. 8 is a schematic diagram of the wiring on the third wiring layer on the fixed-length coil base in examples 1 and 2.
Fig. 9 is an exploded view of the scale mounting base in examples 1 and 2.
Fig. 10 is a schematic structural view of the movable scale in embodiments 1 and 2.
Fig. 11 is a schematic view of the overall structure of embodiments 3 and 4.
Fig. 12 is a side view of fig. 11.
Fig. 13 is a schematic view of the sizing structure in embodiments 3 and 4.
Fig. 14 is a schematic wiring diagram of the fixed-length sensing unit in embodiments 3 and 4.
Fig. 15 is a schematic structural view of the movable scale in embodiments 3 and 4.
Fig. 16 is a schematic wiring diagram of the movable scale sensing units in embodiments 3 and 4.
Fig. 17 is a schematic structural view of the movable scale mounting base according to embodiments 3 and 4.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
The measurement direction is defined as a fixed length direction (i.e., an X-axis direction), a direction perpendicular to a fixed surface is defined as a front-rear direction (i.e., a Y-axis direction), and a direction perpendicular to a surface of a fixed mounting base is defined as an up-down direction (i.e., a Z-axis direction).
Example 1: the electromagnetic induction type linear displacement sensor with the complementary coupling structure as shown in fig. 1 to 10 includes a fixed scale 1, a fixed scale mounting base 2 and a movable scale 3. The scale 1 comprises a scale coil base body 11 and a sensor unit printed on the scale coil base body 11, the lower side of the scale coil base body 11 having two through holes for mounting the scale 1 on the scale mounting base body 2.
As shown in fig. 4 to 8, the sensing unit is composed of a first coil linear array 121, a second coil linear array 122, and a second double sinusoidal coil linear array 13, where the first coil linear array 121, the second coil linear array 122, and the second double sinusoidal coil linear array 13 are all planar coils and are distributed on 4 wiring layers (i.e., a first wiring layer, a second wiring layer, a third wiring layer, and a fourth wiring layer) of the fixed-length coil base 11.
As shown in fig. 4, 5 and 6, the first coil wires 121 are distributed circumferentiallyThe period is W, the number of the distribution cycles is 4, the distribution cycle of the second coil linear array 122 is W, the number of the distribution cycles is 4, the initial position of the first coil linear array 121 along the measuring direction is staggered with the initial position of the second coil linear array 122 along the measuring direction
The first coil linear array 121 and the second coil linear array 122 are composed of 32 straight wires with a length of L and connecting wires connecting the straight wires, wherein 18 straight wires are distributed on the first wiring layer of the fixed-size coil base body 11 along the measuring direction, the other 14 straight wires are distributed on the fourth wiring layer of the fixed-size coil base body 11 along the measuring direction, the 14 straight wires are symmetrical (namely, projection superposition in the Y-axis direction) with the 14 straight wires distributed in the middle of the first wiring layer, and the distance between two adjacent straight wires on the same wiring layer along the measuring direction is
The 2i +1 th straight wire on the first wiring layer is connected with the 2i +1 th straight wire on the fourth wiring layer through a connecting wire and a via hole, the 2i +1 th straight wire on the fourth wiring layer is connected with the 2i +5 th straight wire on the first wiring layer through a connecting wire and a via hole, the 15 th straight wire on the first wiring layer is connected with the 17 th straight wire on the first wiring layer through a connecting wire and a via hole to form a first coil linear array 121, the unconnected end part of the 1 st straight wire on the first wiring layer is led out on the fourth wiring layer through a via hole to serve as a first signal input/output terminal of the first coil linear array 121, and the unconnected end part of the 3 rd straight wire on the first wiring layer is led out on the first wiring layer directly to serve as a second signal input/output terminal of the first coil linear array 121; the 2i +2 straight wires on the first wiring layer are connected with the 2i +2 straight wires on the fourth wiring layer through connecting wires and via holes, the 2i +2 straight wires on the fourth wiring layer are connected with the 2i +6 straight wires on the first wiring layer through connecting wires and via holes, the 16 th straight wires on the first wiring layer are connected with the 18 th straight wires on the first wiring layer through connecting wires and via holes to form a second coil linear array 122, and the 2 nd straight wires on the first wiring layer are connected with the 2i +2 straight wires on the second wiring layer through connecting wires and via holesThe unconnected end of the straight wire is led on the fourth wiring layer through the via hole to be used as a first signal input/output terminal of the second coil linear array 122, and the unconnected end of the 4 th straight wire on the first wiring layer is led on the first wiring layer directly to be used as a second signal input/output terminal of the second coil linear array 122; wherein i in turn takes all integers from 0 to 6.
As shown in fig. 4, 7 and 8, the second double sinusoidal coil linear array 13 is located in the area formed by the first coil linear array 121 and the second coil linear array 122, and the starting position of the second double sinusoidal coil linear array 13 in the measuring direction is different from the starting position of the first coil linear array 121 in the measuring direction
The second double-sine-shaped coil linear array 13 has the same starting position, the amplitude of A and the period of
A third sinusoidal wire segment and a fourth sinusoidal wire segment which have 7 periods and 180-degree phase difference, wherein the third sinusoidal wire segment
The interval part,
Of sections and fourth sinusoidal conductor segments
The interval parts are all distributed on the second wiring layer of the fixed-length coil substrate 11 and the fourth sinusoidal wire section
The interval part,
Interval part and third sine guideOf line segments
The interval parts are distributed on the third wiring layer of the fixed-length coil base body 11; in the fourth sinusoidal conductor section
At the position, leads are respectively arranged on a second wiring layer and a third wiring layer of the fixed-length coil base body 11 and serve as signal input/output terminals of a second double-sine-shaped coil linear array 13, and the ends of all interval parts distributed on different wiring layers are connected through via holes; wherein j is an integer of 0 to 6, and 2A is less than L.
As shown in fig. 9, the fixed length installation base body 2 includes a base 21 and a limiting block 22, a fixed length groove matched with the length of the fixed length 1 is formed in the base 21, two screw holes are formed in the side face of the fixed length groove in the base 21, the positions of the screw holes correspond to the through holes in the fixed length coil base body 11 one to one, the positions of the screw holes correspond to those of the through holes, two through holes are also formed in the limiting block 22, a screw 23 penetrates through the through holes in the limiting block 22 and the fixed length coil base body 11, the screw enters the screw holes and is screwed, the fixed length 1 is compressed by the base 21 and the limiting block 22, and the sensing unit area of the fixed length.
As shown in fig. 10, the movable scale 3 is a rectangular magnetizer, a movable scale notch 33 is formed in the middle of the movable scale 3, the size of the movable scale notch 33 in the Y-axis direction is larger than the thickness of the fixed scale, the size of the movable scale notch 33 in the Z-axis direction is larger than the size of the sensing unit in the Z-axis direction, the movable scale 3 is symmetrical with respect to the movable scale notch 33, and the length of the movable scale 3 in the measuring direction (i.e., the size of the movable scale 3 in the X-axis direction) is
The fixed ruler 1 is inserted into the straight notch 33 of the movable ruler, so that the front part and the rear part of the movable ruler 3 are in opposite coupling with the sensing unit (see figure 1).
Taking the first coil linear array 121 and the second coil linear array 122 as excitation coils, taking the second double sinusoidal coil linear array 13 as an induction coil, and respectively introducing an amplitude I into the first coil linear array 121 and the second coil linear array 122mCurrent i of121＝Imsin (ω t) and i122＝Imcos (ω t), the first coil linear array 121 and the second coil linear array 122 are coupled to the second double sinusoidal coil linear array 13 by a magnetic field. Since the movable scale 3 is a magnetizer, the magnetic field coupling between the first coil linear array 121 and the second coil linear array 122 at the position of the movable scale 3 and the second double sinusoidal coil linear array 13 is strong (compared with other positions). When the movable scale 3 moves relatively to the fixed scale 1 in the direction of the X axis, the magnetic field coupling between the first coil linear arrays 121 and the second coil linear arrays 122 and the second double sinusoidal coil linear arrays 13 changes periodically.
The second double-sine-shaped coil linear array 13 is designed to be sine-shaped, and the purpose is to make the change of the magnetic flux in the second double-sine-shaped coil linear array 13 change in a sine rule, as shown in formulas (1) and (2):
where, ω represents the current frequency,
showing the variation of magnetic flux produced by the second double sinusoidal coil wire array 13 under the action of the first coil wire array 121,
showing the change in magnetic flux produced by the second doubly sinusoidal coil wire array 13 under the influence of the second coil wire array 122,
the magnitude of the magnetic flux is shown, and X represents the measured linear displacement (i.e., the displacement of the movable scale 3 in the X-axis direction with respect to the fixed scale 1).
Because the magnetic fields generated by the first coil linear array 121 and the second coil linear array 122 are superposed in the second double-sinusoidal coil linear array 13, according to the faraday's law of electromagnetic induction, the second double-sinusoidal coil linear array 13 outputs an induction signal with a constant amplitude and a periodically-changing phase, as shown in formula (3):
carrying out phase discrimination processing on the formula (3) to obtain the phase thereof
Then, the displacement X of the movable scale 3 relative to the fixed scale 1 in the X-axis direction is obtained through conversion.
Example 2: as shown in fig. 1 to 10, the structure of the electromagnetic induction type linear displacement sensor having the complementary coupling structure in the present embodiment is the same as that in embodiment 1, except that: taking the second double-sine-shaped coil linear array 13 as an excitation coil, taking the first coil linear array 121 and the second coil linear array 122 as induction coils, and introducing an amplitude I into the second double-sine-shaped coil linear array 13mCurrent i of13＝Imsin (ω t), the first coil linear array 121 and the second coil linear array 122 output induction signals. When the movable scale 3 moves relatively to the fixed scale 1 in the direction of the X axis, the magnetic field coupling between the first coil linear arrays 121 and the second coil linear arrays 122 and the second double sinusoidal coil linear arrays 13 changes periodically.
The variation of the magnetic flux in the first coil linear array 121 and the second coil linear array 122 is as shown in equations (4) and (5):
wherein the content of the first and second substances,
representing the magnitude of the magnetic flux.
According to the faraday's law of electromagnetic induction, the amplitudes of the output signals of the first coil linear array 121 and the second coil linear array 122 change periodically, as shown in equations (6) and (7):
carrying out amplitude discrimination processing on the induction signals represented by the formulas (6) and (7) to obtain the amplitudes of the two paths of signals
And
dividing the two amplitudes and calculating the arc tangent or arc cotangent of the result to obtain
Then, the displacement X of the movable scale 3 relative to the fixed scale 1 in the X-axis direction is obtained through conversion.
Example 3: the electromagnetic induction type linear displacement sensor with the complementary coupling structure shown in fig. 11 to 17 includes a fixed scale 1, a fixed scale mounting base 2, a movable scale mounting base 4 and two identical movable scales 3.
As shown in fig. 13 and 14, the sizing coil 1 includes a sizing coil base 11 and a sizing sensing unit printed on the sizing coil base 11, and the lower side of the sizing coil base 11 has two through holes for mounting the sizing coil 1 on the sizing-mounting base 2. The fixed-length sensing unit is composed of a first coil linear array 121 and a second coil linear array 122, wherein the first coil linear array 121 and the second coil linear array 122 are planar coils and are distributed on 2 wiring layers (namely, a first wiring layer and a second wiring layer) of the fixed-length coil base body 11.
Distribution period of the first coil linear array 121The number of the distribution periods is W, the number of the distribution periods is 4, the number of the distribution periods of the second coil linear array 122 is W, the number of the distribution periods is 4, and the initial position of the first coil linear array 121 along the measuring direction is staggered with the initial position of the second coil linear array 122 along the measuring direction
The first coil linear array 121 and the second coil linear array 122 are composed of 32 straight wires with a length of L and connecting wires connecting the straight wires, wherein 18 straight wires are distributed on a first wiring layer of the fixed-size coil base body 11 along the measuring direction, the other 14 straight wires are distributed on a second wiring layer of the fixed-size coil base body 11 along the measuring direction, and the 14 straight wires are symmetrical (i.e. the projection in the Y-axis direction is coincident) with the 14 straight wires distributed in the middle of the first wiring layer; the distance between two adjacent straight wires on the same wiring layer along the measuring direction is
The 2i +1 th straight wire on the first wiring layer is connected with the 2i +1 th straight wire on the second wiring layer through a connecting wire and a via hole, the 2i +1 th straight wire on the second wiring layer is connected with the 2i +5 th straight wire on the first wiring layer through a connecting wire and a via hole, the 15 th straight wire on the first wiring layer is connected with the 17 th straight wire on the first wiring layer through a connecting wire and a via hole to form a first coil linear array 121, the unconnected end part of the 1 st straight wire on the first wiring layer is led out on the second wiring layer through a via hole to serve as a first signal input/output terminal of the first coil linear array 121, and the unconnected end part of the 3 rd straight wire on the first wiring layer is led out on the first wiring layer directly to serve as a second signal input/output terminal of the first coil linear array 121; the 2i +2 straight wires on the first wiring layer are connected with the 2i +2 straight wires on the second wiring layer through connecting wires and via holes, the 2i +2 straight wires on the second wiring layer are connected with the 2i +6 straight wires on the first wiring layer through connecting wires and via holes, the 16 th straight wires on the first wiring layer are connected with the 18 th straight wires on the first wiring layer through connecting wires and via holes to form a second coil linear array 122, and the 2 nd straight wires on the first wiring layer are connected with the 2i +2 straight wires on the second wiring layer through connecting wires and via holesThe unconnected end of the straight wire is led on the second wiring layer through the via hole to be used as a first signal input/output terminal of the second coil linear array 122, and the unconnected end of the 4 th straight wire on the first wiring layer is led on the first wiring layer directly to be used as a second signal input/output terminal of the second coil linear array 122; wherein i in turn takes all integers from 0 to 6.
Scale installation base member 2 includes base 21 and stopper 22, set up on the base 21 with scale 1's length assorted scale groove, there are two screw holes scale groove side on the base 21, the screw hole position corresponds with the through-hole one-to-one on the scale coil base member 11, the position of corresponding screw hole, two through-holes have also been seted up on the stopper 22, screw 23 passes the through-hole on stopper 22 and the scale coil base member 11, get into the screw hole and screw, make scale 1 compress tightly by base 21 and stopper 22, the scale sensing unit region of scale 1 must avoid the scale groove part.
As shown in fig. 15 and 16, the movable scale 3 includes a movable scale coil base 31 and movable scale sensing units printed on the movable scale coil base 31, where the movable scale sensing units are formed by first double sinusoidal coil linear arrays 32, and the first double sinusoidal coil linear arrays 32 are planar coils and are distributed on 2 wiring layers (i.e., first and second wiring layers) of the movable scale coil base 31; the first double-sine-shaped coil linear array 32 is formed by surrounding first and second sine wire segments which have the same initial position, amplitude A (2A < L), period W, period number 1 and phase difference of 180 degrees, wherein the first and second sine wire segments are of the same phase position
The interval part,
Of sections and of second sinusoidal conductor segments
The interval parts are distributed on the first wiring layer of the movable ruler coil base body 31, and the second sinusoidal wire segments
The interval part,
Of sections and first sinusoidal conductor segments
The interval parts are distributed on the second wiring layer of the movable ruler coil substrate 31 and on the first sinusoidal wire section
At the position, leads are respectively arranged on the first wiring layer and the second wiring layer to be used as signal input/output terminals of the first double-sine-shaped coil linear array 32, and the ends of all interval parts distributed on different wiring layers are connected through via holes.
As shown in fig. 11, 12 and 17, the movable scale mounting base 4 is a rectangular magnetizer and is mainly used for fixing the movable scale 3, the size of the movable scale mounting base 4 in the X axis direction is larger than W and smaller than the fixed scale length, a straight notch 41 is formed in the middle of the movable scale mounting base 4, the size of the straight notch 41 in the Y axis direction is larger than the sum of the fixed scale thickness and the thicknesses of the two movable scales, and the size in the Z axis direction is larger than the size of the fixed scale sensing unit in the Z axis direction, the movable scale mounting base 4 is symmetrical about the straight notch 41, an L-shaped notch 42 is formed in the top of the movable scale mounting base 4, the two movable scales 3 are symmetrically mounted at two sides of the straight notch 41, signal input/output terminals of the first double sinusoidal coil linear arrays 32 on the two movable scales 3 are exposed outside the movable scale mounting base 4, the two first double sinusoidal coil linear arrays 32 are connected in series through signal input/output terminal, the scale 1 is inserted into the notch 41 so that the first double sinusoidal coil linear array 32 is in direct face coupling with the first coil linear array 121 and the second coil linear array 122.
Taking the first coil linear array 121 and the second coil linear array 122 as excitation coils, taking the first double sinusoidal coil linear array 32 as an induction coil, and respectively introducing an amplitude I into the first coil linear array 121 and the second coil linear array 122mCurrent i of121＝Imsin (ω t) and i122＝Imcos (ω t), then firstThe coil wire arrays 121 and 122 are coupled to the first doubly sinusoidal coil wire array 32 by a magnetic field. Since the magnetic fields generated by the first coil wire array 121 and the second coil wire array 122 are periodically distributed on the fixed scale 1, when the movable scale 3 moves relative to the fixed scale 1 in the X-axis direction, the magnetic field coupling between the first coil wire array 121 and the second coil wire array 122 and the first double sinusoidal coil wire array 32 changes periodically.
The first double-sine-shaped coil linear array 32 is designed to be sine-shaped, and the purpose is to make the change of the magnetic flux in the first double-sine-shaped coil linear array 32 change in a sine rule, as shown in formulas (8) and (9):
where, ω represents the current frequency,
showing the change in magnetic flux produced by the first doubly sinusoidal coil wire array 32 under the influence of the first coil wire array 121,
which is representative of the change in magnetic flux produced by the first doubly sinusoidal coil wire array 32 under the influence of the second coil wire array 122,
the magnitude of the magnetic flux is shown, and X represents the measured linear displacement (i.e., the displacement of the movable scale 3 in the X-axis direction with respect to the fixed scale 1).
Because the magnetic fields generated by the first coil linear array 121 and the second coil linear array 122 are superposed in the first double-sine-shaped coil linear array 32, according to the faraday's law of electromagnetic induction, the first double-sine-shaped coil linear array 32 outputs a sine induction signal with a constant amplitude and a periodically changing phase, as shown in formula (10):
the phase of the formula (10) is obtained by phase discrimination
Then, the displacement X of the movable scale 3 relative to the fixed scale 1 in the X-axis direction is obtained through conversion.
Example 4: as shown in fig. 11 to 17, the structure of the electromagnetic induction type linear displacement sensor having the complementary coupling structure in the present embodiment is the same as that of embodiment 3, except that: the first double-sine-shaped coil linear array 32 is used as an excitation coil, the first coil linear array 121 and the second coil linear array 122 are used as induction coils, namely, the amplitude value I is introduced into the first double-sine-shaped coil linear array 32mCurrent i of32＝Imsin (ω t), the first coil linear array 121 and the second coil linear array 122 output induction signals. When the movable scale 3 moves relatively to the fixed scale 1 in the direction of the X axis, the magnetic field coupling between the first coil linear arrays 121 and the second coil linear arrays 122 and the first double sinusoidal coil linear arrays 32 changes periodically.
The variation of the magnetic flux in the first coil linear array 121 and the second coil linear array 122 is as shown in equations (11) and (12):
wherein the content of the first and second substances,
representing the magnitude of the magnetic flux.
According to the faraday's law of electromagnetic induction, the amplitudes of the output signals of the first coil linear array 121 and the second coil linear array 122 change periodically, as shown in equations (13) and (14):
carrying out amplitude discrimination processing on the induction signals represented by the formulas (13) and (14) to obtain the amplitudes of the two paths of signals
And
dividing the two amplitudes and calculating the arc tangent or the arc cotangent of the result to obtain
Then, the displacement X of the movable scale 3 relative to the fixed scale 1 in the X-axis direction is obtained through conversion.
In addition, to the non-electromagnetic induction formula linear displacement sensor who has complementary coupling structure, it includes the scale, two movable rulers, scale installation base member and movable ruler installation base member, scale installation base member includes base and stopper, set up the scale groove with the length phase-match of scale on the base, the scale is installed perpendicularly in the scale inslot and is passed through the stopper, the spacing is fixed of screw, the straight notch has been seted up in the middle of movable ruler installation base member, the width of this straight notch is greater than the sum of scale thickness and two movable rulers thickness, the degree of depth is greater than the scale sensing unit height on the scale, movable ruler installation base member is symmetrical about the straight notch, two movable rulers are symmetrically installed in the both sides of straight notch, movable ruler sensing unit on two movable rulers establishes ties, the scale inserts in the straight notch, make movable ruler sensing unit and scale sensing unit just to the coupling.
Claims (7)
1. A linear displacement sensor with complementary coupling structure comprises a fixed ruler (1) and a movable ruler (3), and is characterized in that: the scale mounting device also comprises a fixed scale mounting base body (2) and a movable scale mounting base body (4), wherein the fixed scale mounting base body (2) comprises a base (21) and a limiting block (22), a fixed scale groove matched with the fixed scale in length is formed in the base (21), the fixed scale (1) is vertically arranged in the fixed scale groove and is limited and fixed through the limiting block, a straight notch (41) is formed in the middle of the movable scale mounting base body (4), the width of the straight slot opening is larger than the sum of the thickness of the fixed ruler and the thickness of the two movable rulers, the depth of the straight slot opening is larger than the height of the fixed ruler sensing units on the fixed ruler, the movable ruler installation base body (4) is symmetrical about the straight slot opening, the number of the movable rulers (3) is two, the two movable rulers (3) are symmetrically installed on two sides of the straight slot opening, the movable ruler sensing units on the two movable rulers (3) are connected in series, and the fixed ruler (1) is inserted into the straight slot opening (41), so that the movable ruler sensing units are just coupled with the fixed ruler sensing units;
the scale (1) comprises a scale coil base body (11) and scale sensing units printed on the scale coil base body, wherein the scale sensing units have a distribution period of W and a distribution period of W
The first coil linear array (121) and the second coil linear array (122) are formed, the initial position of the first coil linear array (121) along the measuring direction is staggered with the initial position of the second coil linear array (122) along the measuring direction
The movable ruler (3) comprises a movable ruler coil base body (31) and movable ruler sensing units printed on the movable ruler coil base body, wherein the movable ruler sensing units have a distribution period of W and a distribution period of W
A first double sinusoidal coil linear array (32); wherein m is1N is an even number, n is not less than 4, and m is not less than 21＜n；
The first coil linear array (121) and the second coil linear array (122) are composed of 4n straight wires with the length of L and connecting wires for connecting the straight wires, wherein 2n +2 straight wires are distributed on the fixed-length coil substrate (11) along the measuring directionOn the first wiring layer, the other 2n-2 straight wires are distributed on a second wiring layer of the fixed-length coil base body (11) along the measuring direction and are symmetrical to the 2n-2 straight wires distributed in the middle of the first wiring layer; the distance between two adjacent straight wires on the same wiring layer along the measuring direction is
The 2i +1 th straight wire on the first wiring layer is connected with the 2i +1 th straight wire on the second wiring layer through a connecting wire and a via hole, the 2i +1 th straight wire on the second wiring layer is connected with the 2i +5 th straight wire on the first wiring layer through a connecting wire and a via hole, the 2n-1 th straight wire on the first wiring layer is connected with the 2n +1 th straight wire on the first wiring layer through a connecting wire and a via hole to form a first coil linear array (121), and the unconnected end leads of the 1 st straight wire and the 3 rd straight wire on the first wiring layer are used as signal input/output terminals of the first coil linear array (121); the 2i +2 straight wires on the first wiring layer are connected with the 2i +2 straight wires on the second wiring layer through connecting wires and via holes, the 2i +2 straight wires on the second wiring layer are connected with the 2i +6 straight wires on the first wiring layer through connecting wires and via holes, the 2n straight wires on the first wiring layer are connected with the 2n +2 straight wires on the first wiring layer through connecting wires and via holes to form a second coil linear array (122), and the unconnected end leads of the 2 nd straight wires and the 4 th straight wires on the first wiring layer are used as signal input/output terminals of the second coil linear array (122); wherein i is all integers from 0 to n-2 in sequence.
2. The linear displacement sensor with complementary coupling structure of claim 1, wherein: the first double-sine-shaped coil linear array (32) has the same starting position, amplitude of A, period of W and the number of periods of W
The first and the second sinusoidal wire sections with 180 degrees phase difference enclose the first sinusoidal wire section
The interval part,
Of sections and of second sinusoidal conductor segments
The interval parts are distributed on the first wiring layer of the moving ruler coil base body, and the second sinusoidal wire segments
The interval part,
Of sections and first sinusoidal conductor segments
The interval parts are all distributed on a second wiring layer of the movable scale coil substrate, lead wires at the end parts of two adjacent interval parts distributed on different wiring layers are used as signal input/output terminals of a first double-sine-shaped coil linear array (32), and the end parts of all the interval parts distributed on different wiring layers are connected through via holes; wherein j is 0 to
All of the integers of (1).
3. The linear displacement sensor with complementary coupling structure of claim 2, wherein: an L-shaped gap (42) is formed in the top of the movable scale mounting base body (4), and a signal input/output wiring terminal of the first double-sine-shaped coil linear array (32) is exposed out of the movable scale mounting base body (4) through the L-shaped gap.
4. The linear displacement sensor with complementary coupling structure of any one of claims 1 to 3, wherein:
the first coil linear array (121) and the second coil linear array (122) are excitation coils, the first double-sine-shaped coil linear array (32) is an induction coil, two orthogonal alternating excitation signals are respectively introduced into the first coil linear array (121) and the second coil linear array (122), when the movable scale (3) and the fixed scale (1) move relatively along the measuring direction, the first double-sine-shaped coil linear array (32) outputs an induction signal with constant amplitude and periodic change of phase, phase discrimination processing is carried out on the induction signal, and linear displacement of the movable scale relative to the fixed scale is obtained after conversion;
or the first double-sine-shaped coil linear array (32) is an excitation coil, the first coil linear array (121) and the second coil linear array (122) are induction coils, alternating excitation signals are introduced into the first double-sine-shaped coil linear array (32), when the movable scale (3) and the fixed scale (1) move relatively along the measuring direction, the first coil linear array (121) and the second coil linear array (122) respectively output a path of induction signals with constant phase and periodically changing amplitude, amplitude discrimination processing is carried out on the two paths of induction signals, and linear displacement of the movable scale relative to the fixed scale is obtained after conversion.
5. An electromagnetic induction type linear displacement sensor with a complementary coupling structure comprises a fixed scale (1) and a movable scale (3), wherein the fixed scale (1) comprises a fixed scale coil substrate (11) and a sensing unit printed on the fixed scale coil substrate, and the movable scale (3) is a metal magnetizer or a conductive metal non-magnetizer, and is characterized in that: the sensor still includes scale installation base member (2), scale installation base member (2) are including base (21) and stopper (22), set up on base (21) with the length assorted scale groove of scale, scale (1) is installed perpendicularly at the scale inslot and is spacing fixed through the stopper, movable ruler straight notch (33) have been seted up to the centre of movable ruler (3), the width in movable ruler straight notch is greater than scale thickness, the degree of depth is greater than the sensing unit height, movable ruler (3) are about movable ruler straight notch symmetry and along the length of measuring direction be
The fixed ruler (1) is inserted into the straight notch (33) of the movable ruler to lead the front of the movable ruler (3)The latter two parts are coupled with the sensing unit in a positive way; the sensing unit is composed of a first coil linear array (121), a second coil linear array (122) and a second double sinusoidal coil linear array (13), the distribution period of the first coil linear array and the second coil linear array (121, 122) is W, and the number of the distribution periods is W
The initial position of the first coil linear array (121) along the measuring direction is staggered with the initial position of the second coil linear array (122) along the measuring direction
The second double sinusoidal coil linear array (13) has a distribution period of
Number of distribution cycles is
The second double-sine-shaped coil linear array (13) is positioned in an area formed by the first coil linear array (121) and the second coil linear array (122), and the difference between the initial position of the second double-sine-shaped coil linear array (13) along the measuring direction and the initial position of the first coil linear array (121) along the measuring direction
Wherein m is2N is an even number, n is not less than 4, m2Not less than 4, k is an integer and k is not less than 0;
the first coil linear array (121) and the second coil linear array (122) are composed of 4n straight wires with the length of L and connecting wires for connecting the straight wires, wherein 2n +2 straight wires are distributed on a first wiring layer of the fixed-size coil base body (11) along the measuring direction, and the other 2n-2 straight wires are distributed on a fourth wiring layer of the fixed-size coil base body (11) along the measuring direction and are symmetrical to the 2n-2 straight wires distributed in the middle of the first wiring layer; the distance between two adjacent straight wires on the same wiring layer along the measuring direction is
The 2i +1 th straight wire on the first wiring layer is connected with the 2i +1 th straight wire on the fourth wiring layer through a connecting wire and a via hole, the 2i +1 th straight wire on the fourth wiring layer is connected with the 2i +5 th straight wire on the first wiring layer through a connecting wire and a via hole, the 2n-1 th straight wire on the first wiring layer is connected with the 2n +1 th straight wire on the first wiring layer through a connecting wire and a via hole to form a first coil linear array (121), and the unconnected end leads of the 1 st and 3 rd straight wires on the first wiring layer are used as signal input/output terminals of the first coil linear array (121); the 2i +2 straight wires on the first wiring layer are connected with the 2i +2 straight wires on the fourth wiring layer through connecting wires and via holes, the 2i +2 straight wires on the fourth wiring layer are connected with the 2i +6 straight wires on the first wiring layer through connecting wires and via holes, the 2n straight wires on the first wiring layer are connected with the 2n +2 straight wires on the first wiring layer through connecting wires and via holes to form a second coil linear array (122), and the unconnected end leads of the 2 nd straight wires and the 4 th straight wires on the first wiring layer are used as signal input/output terminals of the second coil linear array (122); wherein i is all integers from 0 to n-2 in sequence.
6. An electromagnetic induction type linear displacement sensor having a complementary coupling structure according to claim 5, characterized in that: the second double-sine-shaped coil linear array (13) has the same starting position, amplitude of A and period of
The number of cycles is
A third sinusoidal wire section and a fourth sinusoidal wire section which have 180-degree phase difference
The interval part,
Of sections and fourth sinusoidal conductor segments
The interval parts are all distributed on the second wiring layer of the fixed-length coil base body and of the fourth sinusoidal wire section
The interval part,
Of sections and third sinusoidal conductor segments
The interval parts are all distributed on a third wiring layer of the fixed-length coil substrate, lead wires at the end parts of certain two adjacent interval parts distributed on different wiring layers are used as signal input/output terminals of a second double-sine-shaped coil linear array (13), and the end parts of all the interval parts distributed on different wiring layers are connected through via holes; wherein j is 0 to
All of the integers of (1).
7. An electromagnetic induction type linear displacement sensor having a complementary coupling structure according to claim 5 or 6, characterized in that:
the first coil linear array (121) and the second coil linear array (122) are excitation coils, the second double-sine-shaped coil linear array (13) is an induction coil, two orthogonal alternating excitation signals are respectively introduced into the first coil linear array (121) and the second coil linear array (122), when the movable scale (3) and the fixed scale (1) move relatively along the measuring direction, the second double-sine-shaped coil linear array (13) outputs induction signals with constant amplitude and periodic phase change, phase discrimination processing is carried out on the induction signals, and linear displacement of the movable scale relative to the fixed scale is obtained after conversion;
or the second double sinusoidal coil linear array (13) is an excitation coil, the first coil linear array (121) and the second coil linear array (122) are induction coils, an alternating excitation signal is introduced into the second double sinusoidal coil linear array (13), when the movable scale (3) and the fixed scale (1) move relatively along the measuring direction, the first coil linear array (121) and the second coil linear array (122) respectively output a path of induction signal with a constant phase and a periodically changing amplitude, amplitude discrimination processing is carried out on the two paths of induction signals, and linear displacement of the movable scale relative to the fixed scale is obtained after conversion.
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Application publication date: 20190625 Assignee: Chongqing Han's Shizha Technology Co.,Ltd. Assignor: Chongqing University of Technology Contract record no.: X2022500000007 Denomination of invention: Linear displacement sensor with complementary coupling structure Granted publication date: 20210514 License type: Exclusive License Record date: 20220926 |
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