CN109922591A - A kind of acquisition device of middle energy large beam spot weak current electronics - Google Patents

A kind of acquisition device of middle energy large beam spot weak current electronics Download PDF

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CN109922591A
CN109922591A CN201910269784.0A CN201910269784A CN109922591A CN 109922591 A CN109922591 A CN 109922591A CN 201910269784 A CN201910269784 A CN 201910269784A CN 109922591 A CN109922591 A CN 109922591A
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line
acquisition device
electron gun
bunch
electron
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郭盘林
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Abstract

The present invention provides the acquisition device of energy large beam spot weak current electronics in one kind, is related to electron accelerator line control technology field, electron gun, for generating electron stream;Accelerating tube connects electron gun, for being accelerated electron stream to obtain the line with certain energy;Bunch is set to the outlet of accelerating tube, for flowing into after line focusing release according to the expanding helix tube halved tie being arranged on bunch to realize expanding for line;First beam-defining jaw hole and the second beam-defining jaw hole, are set to and expand solenoidal outlet, for intercepting the line for being located at marginal position to obtain the target line for being located at central area;Beam current measurement module, is set on bunch, for detecting the beam intensity, uniformity and total beam amount of line.Electron energy caused by the present invention is continuously adjustable from 10-300 kiloelectron-volts, and beam intensity is continuously adjusted from several milliamperes to several pico-amperes;Generated line is direct current, and beam spot diameter, is evenly distributed up to hundreds of millimeters, beam cross section and stability is high.

Description

A kind of acquisition device of middle energy large beam spot weak current electronics
Technical field
The present invention relates to energy large beam spot weak current electronics in electron accelerator line control technology field more particularly to one kind Acquisition device.
Background technique
Electron source, also known as electron accelerator are the devices for charged particle being accelerated to using manual method higher-energy. It can produce electronics, proton, deuteron, α particle and some other heavy ion of various energy using this device.Utilize these Directly accelerated charged particle and substance phase separation, can also generate a variety of electrifications and uncharged secondary, as γ Particle, neutron and a variety of mesons, hyperon, antiparticle etc..According to classification standard difference, electron accelerator can be divided into many classes Type.Such as it is different by accelerated particle energy, low energy accelerator, medium-energy accelerator, high energy acclerator and extrahigh energy can be divided into and accelerated Device;By beam intensity difference, high-current accelerator, middle flow accelerator and weak current accelerator can be divided into.20 th century later foreign countries start There is weak current electron source apparatus, is mainly used for biological and medical field, materials science field and space and space industry, but go out In the reason of the technical know-how, related data about weak current electron source apparatus not external disclosure.And the country is for the field Research is started late, and the related data in relation to weak current electron source is seldom.
Weak current electron source is mainly characterized by that electron energy is low, electron stream is weak, and low-energy electron is highly susceptible to interfere, very Small magnetic field will make electronics deviate original transmission path, and the transmission range more longer easier influence for receiving magnetic field.It is extraneous The transverse magnetic field vertical with beam direction generated is easy to interfere line, and along the then halved tie of the longitudinal magnetic field of beam direction Stream does not interfere.Cause the calculation formula of the deflection angle of electronic deflection as follows in interference magnetic field:
Tan θ=BL/ (B ρ)
Wherein, B is average residual transverse magnetic field;L transports line length for line;B ρ is the magnetic rigidity of electronics.
In order to weaken beam intensity, need to extend line transports line length, from above formula as can be seen that transporting wire length The deflection angle theta that the increase of degree will lead to electronic deflection increases, so that the energy lower limit of the line of output is higher.Thus may be used , it is ensured that the line of output has biggish energy range, the then line exported while beam intensity with higher;It protects The line of card output has weaker beam intensity, then the line exported while having lesser energy range;This contradiction makes Energy weak current electron source becomes a technical problem in obtaining.
Summary of the invention
Aiming at the problems existing in the prior art, the present invention provides the acquisition device of energy large beam spot weak current electronics in one kind, It specifically includes:
Electron gun, for generating electron stream;
Accelerating tube connects the electron gun, for being accelerated the electron stream to obtain the beam with certain energy Stream;
Bunch is set to the outlet of the accelerating tube, for according to the processing unit being arranged on the bunch to described Line is handled to obtain target line;
The processing unit includes:
Solenoid is expanded, for release after being focused to the line to realize that the line expands;
First beam-defining jaw, be set to it is described expand solenoidal outlet, for intercept the beam positioned at marginal position Stream is located at the target line of central area, the beam spot diameter, in the aperture of first beam-defining jaw and the target line to obtain Unanimously;
Second beam-defining jaw is set to the outlet of first beam-defining jaw, hangs down for forming one with the first beam-defining jaw Straight path is to obtain the target line of Vertical Launch, the beam spot in the aperture of second beam-defining jaw and the target line Diameter is consistent;
Beam current measurement module is set on the bunch, for detecting the beam intensity, uniformity and total beam of the line Flow;
High pressure steel drum is set to the outside of the electron gun and the accelerating tube, for for the electron gun and it is described plus Fast pipe provides stable use environment.
Preferably, the bunch periphery is enclosed with shielding cylinder, for shielding external magnetic interference.
Preferably, the acquisition device according to installation ground earth magnetism field direction installed with reduce outside with the beam Flow the interference of the vertical transverse magnetic field in direction.
Preferably, the electron gun uses cathode of the pure tungsten silk as the electron gun.
Preferably, the accelerating tube is Equip-grads accelerative tube.
Preferably, the beam current measurement module includes:
Flange, be set to the accelerating tube and it is described expand between solenoid, for measuring the beam before expanding The beam intensity of stream;
The uniform instrument of terminal is set between first beam-defining jaw and second beam-defining jaw, described for measuring The uniformity and total beam amount of target line.
Preferably, the regulative mode of the beam intensity of the target line includes the temperature for adjusting the cathode of the electron gun Degree, and/or the voltage of the grid of the electron gun is adjusted, and/or expand solenoidal focusing magnetic field described in adjusting.
Preferably, described to expand solenoidal technical parameter according to the parameter of the target line according to certain rule calculating It obtains.
Preferably, in the high pressure steel drum further include:
Voltage multiplying rectifier column is installed on the flange in the bottom of the high pressure steel drum, for providing for the cathode of the electron gun Negative high voltage power source;
Negative high voltage platform is set to the top of the voltage multiplying rectifier column, for being installed as cathode, the grid of the electron gun With the power-supply device of anode supply;
Isolating transformer is installed in the top flange of the high pressure steel drum, for powering for the power-supply device.
Above-mentioned technical proposal have the following advantages that or the utility model has the advantages that
1) electron energy caused by is continuously adjustable from 10-300 kiloelectron-volts, and beam intensity is from several milliamperes to several skins Peace is continuously adjustable;
2) line caused by is direct current, and beam spot diameter, is up to hundreds of millimeters, the unevenness of beam cross section distribution and not Stability is less than ± 5%, and energy instability is less than 5/10000ths;
3) it is had a unique use in biological and medical field, materials science field and space environment simulation field.
Detailed description of the invention
Fig. 1 is in preferred embodiment of the invention, it is a kind of it is middle can the structure of acquisition device of large beam spot weak current electronics show It is intended to;
Fig. 2 is a kind of equivalent electricity of the acquisition device of middle energy large beam spot weak current electronics in preferred embodiment of the invention Road schematic diagram;
Fig. 3 is the structural schematic diagram of the control equipment of bunch vacuum environment in preferred embodiment of the invention;
In preferred embodiment Fig. 4 of the invention, the structural schematic diagram of control module;
In preferred embodiment Fig. 5 of the invention, the schematic illustration that expands.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present invention is not limited to the embodiment party Formula, as long as meeting purport of the invention, other embodiments also may belong to scope of the invention.
In preferred embodiment of the invention, it is based on the above-mentioned problems in the prior art, now providing can be big in one kind The acquisition device of beam spot weak current electronics specifically includes as depicted in figs. 1 and 2:
Electron gun 200, for generating electron stream;
Accelerating tube 300 connects electron gun 200, for being accelerated electron stream to obtain the line with certain energy;
Bunch 400 is set to the outlet of accelerating tube 300, for according to the processing unit being arranged on bunch 400 to line It is handled to obtain target line;
Processing unit includes:
Solenoid 401 is expanded, release is after flowing into line focusing for halved tie to realize expanding for line;
First beam-defining jaw 402, is set to the outlet for expanding solenoid 401, for intercepting the line for being located at marginal position To obtain the target line for being located at central area, the aperture of the first beam-defining jaw 402 is consistent with the beam spot diameter, of target line;
Second beam-defining jaw 403 is set to the outlet of the first beam-defining jaw 402, for being formed with the first beam-defining jaw 402 One vertical-path is to obtain the target line of Vertical Launch, the aperture of second beam-defining jaw 403 and the subject beam The beam spot diameter, of stream is consistent;
Beam current measurement module is set on bunch 400, for detecting the beam intensity, uniformity and total beam amount of line;
High pressure steel drum 100 is set to the outside of electron gun 200 and accelerating tube 300, for being electron gun 200 and accelerating tube 300 provide stable use environment.
Specifically, in the present embodiment, above-mentioned electron stream obtains line after the acceleration of accelerating tube 300, and the line is via expansion It after beam solenoid 401 focuses, scatters again through overfocus, after a distance of drifting about, beam spot increases naturally, at this time placement and target Consistent first beam-defining jaw 402 of beam spot diameter, and the second beam-defining jaw 403 select more being uniformly distributed for beam center region Line pass through, remaining edge line is blocked, reached with this be evenly distributed, beam intensity is weak and it is straight to meet target beam spot The purpose of the line of diameter.
In the present embodiment, above-mentioned electron gun 200 and accelerating tube 300 are placed in a closed high pressure steel drum 100, the height The SF6 insulating gas of 3atm is filled in compressed steel bucket 100.Insulating gas is good dielectric, improves resistance to pressure;And it closes High pressure steel drum 100 be electron gun 200 provide metastable working environment, be both high-tension shielding cover and electronics The stable operation of stream.
In the present embodiment, electron gun 200 is mounted on the head of accelerating tube 300, and the inside of the two is vacuum environment, and outside is The SF6 insulating gas of 3atm.
In preferred embodiment of the invention, 400 periphery of bunch is enclosed with shielding cylinder 404, for shielding external magnetic field Interference.
Specifically, in the present embodiment, large beam spot is obtained since present invention employs the modes expanded, line is characterized in Direct current is that continuously, this has essential distinction with by way of scanning mode acquisition large beam spot, and scanning mode obtains in time Large beam spot be discontinuous in time.Simultaneously as present invention employs the modes expanded to obtain large beam spot, therefore uncommon Hope the line longer distance that can drift about after expanding that can just play and pass through so that beam spot be allowed to expand to sufficiently large size Limit the purpose that beam obtains weak beam stream.However, the magnetic rigidity very little of medium energy electrons, it is highly prone to around to dissipate the influence in miscellaneous magnetic field and inclined From original transmission path, the transmission range more longer easier influence for receiving magnetic field.Therefore, the shadow of stray magnetic field in order to prevent It rings, to wrap up the shielding cylinder 404 of the high magnetic permeability of shielding stray magnetic field interference in 400 periphery of bunch.Further, bunch 400 On component select non-magnetic material, and select suitable bunch length.
In the present embodiment, as shown in figure 3, vacuum chamber 405 is additionally provided on bunch 400, for providing very for electronic beam current Altitude;Vacuum meter 406 is additionally provided on bunch 400, for monitoring the vacuum pressure in vacuum chamber 405;It is also set on bunch 400 It is equipped with vent valve 407, for vacuum chamber 405 to be hunted leak and inflated;Plate valve 408 is additionally provided on bunch 400, for protecting The molecular pump 409 being set on bunch 400;Solenoid valve 410 is additionally provided on bunch 400, for being set on bunch 400 Fore pump 411 carries out pipeline conversion;Oil pollution separator 412 is additionally provided on bunch 400, for removing 405 remnants' of vacuum chamber Oil vapour and purification vacuum room 405.
In preferred embodiment of the invention, acquisition device is installed outer to reduce according to the earth magnetism field direction on installation ground The interference of the transverse magnetic field vertical with beam direction in portion.
Specifically, in the present embodiment, since line electronics transports direction easily by extraneous stray magnetic field in accelerator 300 Interference, therefore using it is above-mentioned according to installation ground earth magnetism field direction installed.For being also easy to produce the component in interference magnetic field, Not influencing to be mounted under the premise of its is functional apart from beam axis remote position, to be further reduced interference magnetic field Interference.
In preferred embodiment of the invention, cathode of the electron gun 200 using pure tungsten silk as electron gun 200.
Specifically, in the present embodiment, above-mentioned electron gun 200 is not present between cathode and anode because the reason of weak current The accumulation of space charge, generation is heat limitation stream.Cathode using pure tungsten silk as electron gun 200, by adjusting tungsten wire temperature Degree, and cooperate the mode of grid potential that can change emitted electron energy, and expand effect further to line using subsequent It is adjusted and decays.
In preferred embodiment of the invention, accelerating tube 300 is Equip-grads accelerative tube.
Specifically, in the present embodiment, above-mentioned Equip-grads accelerative tube, equipped with divider resistance, uniform ring and discharge ball gap Deng not only there is pressure effect, additionally it is possible to effectively improve the whole pressure resistance of accelerating tube 300, and during line is accelerated Not halved tie stream carries out biggish focusing and the effect of scattered angle, and the use for the processing unit on subsequent bunch 400 provides strong item Part.
In preferred embodiment of the invention, beam current measurement module includes:
It flange 501, is set to accelerating tube 300 and expands between solenoid 401, for measuring the line before expanding Beam intensity;
The uniform instrument 502 of terminal, is set between the first beam-defining jaw 402 and the second beam-defining jaw 403, for measuring target The uniformity and total beam amount of line.
Specifically, in the present embodiment, above-mentioned flange cylinder 501 connect a four-way before put, wherein flange cylinder 501 receive Collect the line before expanding, puts the measurement of its beam intensity of row before four-way into;The above-mentioned uniform instrument 502 of terminal connects two weak currents Measuring instrument, wherein the uniform collection of the instrument 502 target line of terminal, two weak-current meters progress uniformities and total beam amount Measurement.The uniform instrument 502 of terminal first measures the uniformity of target line in measurement, then measures the total beam amount of target line, with Save time of measuring.
In preferred embodiment of the invention, the regulative mode of the beam intensity of target line includes adjusting electron gun 200 Cathode temperature, and/or adjust the voltage of the grid of electron gun 200, and/or adjust and expand the focusing magnetic field of solenoid 401.
Specifically, in the present embodiment, by being used cooperatively for the regulative modes of above-mentioned three kinds of beam intensities, mesh may be implemented The beam intensity for marking line is continuously adjusted from several milliamperes to several pico-ampere ranges.
In preferred embodiment of the invention, expand the technical parameter of solenoid 401 according to the parameter of target line according to Certain rule is calculated.
Specifically, in the present embodiment, above-mentioned calculate according to certain rule can be to be calculated according to Gaussian distribution formula. Since electronic beam section distribution has the characteristics that Gaussian Profile, it can be calculated according to Gaussian distribution formula and expand spiral shell The technical parameter of spool 401.
In preferred embodiment of the invention, in high pressure steel drum 100 further include:
Voltage multiplying rectifier column 701 is installed on the flange in the bottom 101 of high pressure steel drum 100, for the cathode for electron gun 200 Negative high voltage power source is provided;
Negative high voltage platform 702 is set to the top of voltage multiplying rectifier column 701, for being installed as the yin of the electron gun 200 Pole, grid and anode supply power-supply device.
Isolating transformer 703 is installed in the top flange 102 of high pressure steel drum 100, for powering for power-supply device.
Specifically, in the present embodiment, as shown in Fig. 2, electron gun 200 includes cathode 201, grid 202 and anode 203, In, cathode 201 is separately connected the negative high voltage power source provided by voltage multiplying rectifier column 701 and the cathode power provided by power-supply device 704;Grid 202 connects the grid power supply 705 provided by power-supply device, the anode electricity that the connection of anode 203 is provided by power-supply device Source 706.The energy that the present invention uses above-mentioned negative high voltage power source that electronics is once accelerated to flow to needs.The negative high voltage power source uses multiplication of voltage Rectifier system, ripple and instability reach the level of a ten thousandth, thus the shakiness for the weak current electronics that the acquisition device obtains Fixed degree can also reach a ten thousandth.
In the present embodiment, the side of above-mentioned high pressure steel drum 100 is provided with manhole flange 103, which removes Afterwards, it can enter in high pressure steel drum 100 and the installment works such as wiring are carried out to the power-supply device on negative high voltage platform.Above-mentioned negative high voltage Corona cover is covered with outside platform 702, for improving the pressure resistance of negative high voltage platform 702.
In the present embodiment, as shown in figure 4, further including control module 1, which is PLC controller, above-mentioned control Module 1 can be divided into two parts, and a part is set on the negative high voltage platform 702 of the rigid bucket 100 of high pressure, sets for controlling above-mentioned power supply It is standby, and communicated by the network switch 3 by optical fiber 4 between a control computer 2;Another part is set in ground potential 5, is used The equipment such as solenoid 401 and beam current measurement module 500 are expanded in control, and pass through above-mentioned network between above-mentioned control computer 2 Interchanger 3 is communicated by optical fiber 4;Above-mentioned optical fiber 4 can carry out high_voltage isolation to the signal of transmission.
In a preferred embodiment of the invention, it is desirable that the acquisition device of middle energy large beam spot weak current electronics of the invention Main technical requirements are as follows: energy is continuously adjusted within the scope of 10keV-300keV;Beam intensity connects within the scope of 1.3nA-1.3mA Continue adjustable;Beam spot diameter, is more than or equal to 100mm;Line inhomogeneities is less than or equal to ± 10%;Energy unstability is less than or equal to 0.1%h.
It in the present embodiment, is rapidly spread using expanding after solenoid 401 allows electron stream rapidly to assemble, recycles the first limit beam Diaphragm 402 and the second beam-defining jaw 403 block peripheral electron stream, only center electron are allowed to pass through.Wherein, the purpose of diffusion is to change The beam intensity of the uniformity of kind line and line of decaying.Have the characteristics that Gaussian Profile according to electronic beam section distribution, Select the simultaneously more uniform line of educt beaming flow central part.Solenoid 401 is expanded using the calculating of following Gaussian distribution formula Technical parameter:
Wherein: Z is beam current density;
When x value is zero, Z is maximized, and indicates beam current density maximum point.
To make line inhomogeneities be less than or equal to ± 10%, then need to find a beam current density smallest point so that
(Zmax-Zmin)/(Zmax-Zmin)=0.1
Solving above equation and can obtaining the value of x is 0.6335 σ.Therefore, it can be seen that in 0.6335 σ of -0.6335 σ < x < In section, meet the technical requirements that line inhomogeneities is less than or equal to ± 10%.
According to beam spot diameter, be more than or equal to 100mm technical requirements, take beam spot diameter, be 100mm, in summary calculate by 0.6335 σ=50mm can obtain σ ≈ 79mm.It follows that the line in 0.6335 section σ -0.6335 σ < x < accounts for total beam The ratio of amount is about 73.6%.
According to the technical requirements that beam intensity is continuously adjusted within the scope of 1.3nA-1.3mA, taking beam intensity is 1.3mA, The emission current that electron gun 200 then is calculated according to following formula is minimum are as follows: 1.3mA/0.736=1.8mA.It follows that It is about 97.7% that line in 2 section σ -2 σ < x <, which accounts for the ratio of total beam amount,.It is generally acknowledged that the line in this section is Total beam amount, then via expanding after solenoid 401 expands, the beam diameter before the first beam-defining jaw 402 are as follows: 4 σ ≈ 79mm*4=316mm.
Further, expand solenoid 401 expands principle as shown in figure 5, expanding the focus 413 of helix tube 401, focal length For f, expanding distance is L, convergent angle θ, and the beam radius before expanding is R1, the first beam-defining jaw 402 after expanding distance L Radius is RT, and the beam spot after expanding expands as R2.According to the above technical requirements, R1=5mm, R2=158mm are taken, then R2/R1= 158/5=31.6.F=30mm is chosen, then L=948mm is obtained according to L/f=R2/R1.
Thus, convergent angle θ=arctanR/L=arctan158/948 ≈ 9.46°
It can to sum up obtain, expand solenoid 401 using air core solenoid, length takes 100mm, focal length 30mm, it is known that energy Magnetic rigidity for the electronics of 300keV is 21 Gauss rice, then strong by expanding 401 center highest magnetic field of solenoid known to calculating Degree 800 Gausses of selection can reach requirement.
The foregoing is merely preferred embodiments of the present invention, are not intended to limit embodiments of the present invention and protection model It encloses, to those skilled in the art, should can appreciate that and all be equal with made by this specification and diagramatic content It replaces and obviously changes obtained scheme, should all be included within the scope of the present invention.

Claims (9)

1. the acquisition device of energy large beam spot weak current electronics in one kind, which is characterized in that specifically include:
Electron gun, for generating electron stream;
Accelerating tube connects the electron gun, for being accelerated the electron stream to obtain the line with certain energy;
Bunch is set to the outlet of the accelerating tube, for according to the processing unit being arranged on the bunch to the line It is handled to obtain target line;
The processing unit includes:
Solenoid is expanded, for release after being focused to the line to realize that the line expands;
First beam-defining jaw, be set to it is described expand solenoidal outlet, for intercept the line positioned at marginal position with Obtain the target line for being located at central area, the beam spot diameter, one in the aperture of first beam-defining jaw and the target line It causes;
Second beam-defining jaw is set to the outlet of first beam-defining jaw, for forming a vertical road with the first beam-defining jaw Diameter is to obtain the target line of Vertical Launch, the beam spot diameter, in the aperture of second beam-defining jaw and the target line Unanimously;
Beam current measurement module is set on the bunch, for detecting the beam intensity, uniformity and total beam of the line Amount;
High pressure steel drum is set to the outside of the electron gun and the accelerating tube, for being the electron gun and the accelerating tube Stable use environment is provided.
2. acquisition device according to claim 1, which is characterized in that the bunch periphery is enclosed with shielding cylinder, for shielding Cover external magnetic interference.
3. acquisition device according to claim 1, which is characterized in that the acquisition device is according to the earth's magnetic field side for installing ground To installed with reduce outside the transverse magnetic field vertical with the beam direction interference.
4. acquisition device according to claim 1, which is characterized in that the electron gun is using pure tungsten silk as the electronics The cathode of rifle.
5. acquisition device according to claim 1, which is characterized in that the accelerating tube is Equip-grads accelerative tube.
6. acquisition device according to claim 1, which is characterized in that the beam current measurement module includes:
Flange, be set to the accelerating tube and it is described expand between solenoid, for measuring the line before expanding Beam intensity;
The uniform instrument of terminal is set between first beam-defining jaw and second beam-defining jaw, for measuring the target The uniformity and total beam amount of line.
7. acquisition device according to claim 1, which is characterized in that the regulative mode of the beam intensity of the target line Temperature including adjusting the cathode of the electron gun, and/or the voltage of the grid of the electron gun is adjusted, and/or described in adjusting Expand solenoidal focusing magnetic field.
8. acquisition device according to claim 1, which is characterized in that described to expand solenoidal technical parameter according to The parameter of target line is calculated according to certain rule.
9. acquisition device according to claim 1, which is characterized in that in the high pressure steel drum further include:
Voltage multiplying rectifier column is installed on the flange in the bottom of the high pressure steel drum, for providing negative height for the cathode of the electron gun Voltage source;
Negative high voltage platform is set to the top of the voltage multiplying rectifier column, for being installed as the cathode, grid and sun of the electron gun The power-supply device of pole power supply.
Isolating transformer is installed in the top flange of the high pressure steel drum, for powering for the power-supply device.
CN201910269784.0A 2019-04-03 2019-04-03 A kind of acquisition device of middle energy large beam spot weak current electronics Pending CN109922591A (en)

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PANLIN GUO: "Progress at the Shanghai EBIT", JOURNAL OF PHYSICS: CONFERENCE SERIES, vol. 58, no. 419, 31 December 2007 (2007-12-31) *
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周平;王文静;荆涛;张爱兵;郭盘林;盛树刚;景毓辉;孙越强;梁金宝;朱光武;冀文涛;马利媛;: "空间电子辐射环境探测载荷测试定标试验平台研制", 空间科学学报, no. 06, pages 2 *
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Cited By (4)

* Cited by examiner, † Cited by third party
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CN113257651A (en) * 2021-02-02 2021-08-13 中国电力科学研究院有限公司 High-precision weak-current electron beam adjusting device and method
CN113257651B (en) * 2021-02-02 2023-12-01 中国电力科学研究院有限公司 High-precision weak-current electronic beam adjusting device and method
CN116347740A (en) * 2023-03-08 2023-06-27 中子高新技术产业发展(重庆)有限公司 Neutron treatment beam transmission system
CN116347740B (en) * 2023-03-08 2023-10-20 中子高新技术产业发展(重庆)有限公司 Neutron treatment beam transmission system

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