CN109916924A - Mobile phone glass quality detection device - Google Patents

Mobile phone glass quality detection device Download PDF

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Publication number
CN109916924A
CN109916924A CN201711329409.8A CN201711329409A CN109916924A CN 109916924 A CN109916924 A CN 109916924A CN 201711329409 A CN201711329409 A CN 201711329409A CN 109916924 A CN109916924 A CN 109916924A
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CN
China
Prior art keywords
film plating
vacuum film
plating substrate
mobile phone
substrate frame
Prior art date
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Pending
Application number
CN201711329409.8A
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Chinese (zh)
Inventor
陈立
祝海生
黄乐
凌云
黄夏
孙桂红
黄国兴
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XIANGTAN HONGDA VACUUM TECHNOLOGY Co Ltd
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XIANGTAN HONGDA VACUUM TECHNOLOGY Co Ltd
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Application filed by XIANGTAN HONGDA VACUUM TECHNOLOGY Co Ltd filed Critical XIANGTAN HONGDA VACUUM TECHNOLOGY Co Ltd
Priority to CN201711329409.8A priority Critical patent/CN109916924A/en
Publication of CN109916924A publication Critical patent/CN109916924A/en
Pending legal-status Critical Current

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Abstract

The invention discloses mobile phone glass quality detection devices, including at least a vacuum film plating substrate frame, a track, transmission mechanism and quality inspection system, each vacuum film plating substrate frame slides in its respective carter back and forth, the transmission mechanism connect with vacuum film plating substrate frame and provides power for it, several substrate holes are installed on the vacuum film plating substrate frame, vacuum film plating substrate is installed in substrate hole, the quality inspection system includes light source and sequentially connected photodetector, filter and A/D converter, and the light source and photodetector are divided into track two sides.Mobile phone glass quality detection device provided by the invention can be used for the quality testing of vacuum film plating substrate, it is installed in substrate hole by the substrate for the completion plated film for transmitting downstream chamber and carries out Photoelectric Detection, each chamber of production line can be cooperated to realize the high-volume of plated film, low cost production, be particularly suitable for large-scale industrial production.

Description

Mobile phone glass quality detection device
Technical field
The present invention relates to mobile phone glass quality detection devices, belong to technical field of vacuum plating.
Background technique
Vacuum coating technology is begun to show in the 1930s, four the fifties start industrial application occur, and industrialization is big to advise Mould production starts from widely answering in the 1980s, obtaining in the industry such as electronics, aerospace, packaging, decoration, gold stamping printing With.Vacuum coating technology is the new technology of a kind of novel materials synthesis and processing, is the important set of field of surface engineering technique At part.Vacuum coating technology is the plated film that the surface of solids is coated to one layer of property using physics, chemical means, to make There is the surface of solids wear-resistant, high temperature resistant, corrosion-resistant, anti-oxidant, radiation protection, conduction, magnetic conduction, insulation and ornament lamp many to be better than The superior function of solid material itself reaches and improves product quality, extends life of product, the significant technology warp of energy saving and acquisition The effect for benefit of helping.Need plated film is referred to as substrate, and the material of plating is referred to as target.
Magnetron sputtering is to make target atom or molecule be sputtered out using lotus energy particle bombardment solid target and deposit to A kind of technique of substrate surface.Metallic target and ceramic target can be selected in target.Magnetron sputtering the preparation method has deposition rate height, substrate The advantages of temperature is low, film forming adhesion is good, easy to control, at low cost, suitable large area is film-made.Exactly needs are made for vacuum evaporation The substance of film, which is put in vacuum, to be evaporated or distils, and is allowed to be precipitated over the substrate surface.The device of vacuum evaporation is simpler Single, technological parameter is less, the growth of easily-controllable made membrane, and impurity content is low in film.But the height of vacuum degree directly affects film Structure and performance, vacuum degree is low, and material is seriously polluted by residual gas molecule, film performance be deteriorated, improve underlayer temperature have Conducive to the desorption of gas molecule.
With in field of vacuum coating coating technique make rapid progress, the requirement to coated product is also higher and higher, therefore More and more improving also occurs in coating film production line, and the requirement of production line increases accordingly, the coating film production line of the prior art it is whole Body stability and plating film uniformity, production efficiency is low and corresponding equipment cost is high.
Summary of the invention
In view of the above-mentioned problems existing in the prior art, the object of the present invention is to provide can vertical plated film mobile phone glass quality Detection device.
For achieving the above object, The technical solution adopted by the invention is as follows:
The purpose of the present invention is to provide mobile phone glass quality detection devices, including an at least vacuum film plating substrate frame, one Track, transmission mechanism and quality inspection system, each vacuum film plating substrate frame slide in its respective carter back and forth, the biography Motivation structure connect with vacuum film plating substrate frame and provides power for it, is equipped with several substrates on the vacuum film plating substrate frame Hole, vacuum film plating substrate are installed in substrate hole, and the quality inspection system includes light source and sequentially connected photodetector, filtering Device and A/D converter, the light source and photodetector are divided into track two sides, and the light that the light source issues penetrates vacuum coating Substrate is received by a photoelectric detector, and is converted to detection signal by A/D converter after filtering.
Preferably, the mobile phone glass quality detection device includes two vacuum film plating substrate framves and two tracks, transmission Mechanism and quality inspection system, two tracks are bonded and are mounted in parallel, and each vacuum film plating substrate frame is in its correspondence rail It is slided back and forth on road, the light source and photodetector of the quality inspection system are divided into track two sides.
Preferably, the vacuum film plating substrate top of the trellis horizontal row shows several substrate holes, and the transmission mechanism is set to true Installation is moved towards along track in empty film plating substrate frame lower part or bottom.
Preferably, the transmission mechanism includes engine, several driving members and belt, and the driving member is fixedly connected on very Empty film plating substrate frame lower part passes through belt between each driving wheel and connects.
Preferably, the transmission mechanism includes permanent magnet transmission motor, magnetic steering part and Magnetic drive part, the permanent magnet transmission electricity Machine is connect with magnetic steering part and Magnetic drive part magnetism, and the Magnetic drive part is installed on vacuum film plating substrate frame bottom, the magnetic conductance Track interior is installed on to part.
Preferably, the quality inspection system further includes server, and the server is connected with A/D converter, for that will convert Electric signal analyzed and compared.
Compared with prior art, mobile phone glass quality detection device provided by the invention can be used for the matter of vacuum film plating substrate Amount detection, is installed in substrate hole by the substrate for the completion plated film for transmitting downstream chamber and carries out Photoelectric Detection, can match symphysis Each chamber of producing line realizes the high-volume of plated film, low cost production, is particularly suitable for large-scale industrial production.
Detailed description of the invention
Fig. 1 is a preferred embodiment schematic diagram of mobile phone glass quality detection device provided by the invention;
Fig. 2 is technique for vacuum coating flow diagram provided by the invention;
Wherein, 11, substrate frame, 12, substrate hole, 13, transmission mechanism.
Specific embodiment
The present invention is made further to illustrate in detail, completely below with reference to embodiment and comparative example.
Mobile phone glass quality detection device of the invention is installed in the quality inspection room of vacuum coating production line, is vertical single side Plated film is designed as eight cell structures, and respectively upstream chamber, import surge chamber, import transfer chamber, sputtering chamber are (according to processing and installation Determination is divided into several sections to condition again), outlet transfer chamber, outlet surge chamber, downstream chamber and quality inspection room, each process chamber passes through flap valve company It connects;As seen from Figure 1, the processing step of production line preparation is: upper section substrate transport to upstream chamber, upstream chamber substrate transport It is transported to the import surge chamber of condition of high vacuum degree, import surge chamber substrate by import transfer chamber logical to sputtering chamber, sputtering chamber substrate Outlet transfer chamber is crossed to transport to outlet surge chamber, outlet surge chamber substrate transport to the downstream chamber of rough vacuum, downstream chamber's substrate Transport to quality inspection room, quality inspection qualification substrate transport to unloading section (10~70).
In the present embodiment, sputtering chamber design has 6 direct current target position, and 6 pieces of Mo targets realize the Mo of high quality using DC power supply Film;Equipment designs the planar glass substrate material of 1 610mm × 435mm of processing dimension, productive temp 420s;Production line is adopted It is evacuated the design to form gas isolating with molecular pump, production line is furnished with 6 TMP-V2304LM maglev molecular pumps (day island proper altogether Saliva) to obtain efficient isolation, stable pumping speed and the distribution of uniform gas.
In the present embodiment, production line and each chamber design size are as follows:
Upstream chamber/import surge chamber/import transfer chamber/outlet transfer chamber/outlet surge chamber/downstream chamber: 850mm (L) × 1200mm(H)×500(W);
Sputtering chamber: 5000mm (L) × 1200mm (H) × 500mm (W);
Quality inspection room: 1000mm (L) × 1200mm (H) × 500mm (W);
Flap valve: 150mm (L) × 1200mm (H) × 150mm (W);
Mobile phone glass quality detection device total length: 12.15m (be subject to actual design);
In the present embodiment, upstream chamber is low vacuum aspirating chamber, completes low vacuum pumping process, and pedestal is automatically sent to Fine pumping room.
Vacuum cavity portion size: 850mm (L) × 1200mm (H) × 500mm (W) is designed to abnormally-structured, subtracts as far as possible The interior space of small box.
Bleeding point is mounted on bottom plate, pumping bore be DN100, air-extractor:
Sliding vane rotary pump (SV300B) 1 (German Lay is precious);
Lobe pump (WAU1001) 1 (German Lay is precious).
Deflation inlet duct: upstream chamber deflation is totally 2, first to carry out soft deflation by Pneumatic corner valve DN40.
Gas isolator: being isolated between atmosphere using simple flap valve, and simple and effective (utilizing atmospheric pressure) is acted.
Operational effectiveness: vacuum degree reaches 5~8 × 100Pa。
In the present embodiment, import surge chamber is fine pumping room, completes fine pumping process, and pedestal is passed automatically It is sent in transfer chamber.
Vacuum cavity portion size: 850mm (L) × 1200mm (H) × 500mm (W).
Air-extractor:
Molecular pump (TMP-V2304LM) 1 (Japanese Shimadzu).
Atmosphere isolation device: being isolated between first part using advanced flap valve, can stablize effectively be isolated it is low Vacuum and high vacuum environment fill balanced gas (Ar) by flowmeter control.
Heating: back side panel installs 3 sections of heating devices, and front side board installs 3 sections of heating devices, carries out just to substrate and substrate frame It is heat-insulated to install four layers of stainless steel mirror board for step heating between stainless steel heater and cabinet.
Molecular pump is mounted on door-plate, and molecular pump exhaust pipe is connect with fore pump pipeline to be realized automatically using pneumatic structure It seals and automatically opens, mutual disassembly's pump-line is not had to when switch gate.
Operational effectiveness: vacuum degree reaches 2~5 × 10 after Ar balance-1Pa (normal coating process vacuum degree);
In the present embodiment, import transfer chamber, for substrate frame to be transmitted to sputtering chamber by fine pumping room, substrate frame is passed Speed is sent to be transformed into plated film transmission speed by transmission speed.
Vacuum cavity portion size: 850mm (L) × 1200mm (H) × 500mm (W).
The configuration of fine pumping prime part (import surge chamber, import transfer chamber, sputtering chamber, outlet transfer chamber and outlet Surge chamber shares):
Sliding vane rotary pump (SV300B) 1 (German Lay is precious);
Lobe pump (WAU1001) 1 (German Lay is precious);
Fine pumping maintains part to configure:
Molecular pump (TMP-V2304LM) 1 (Japanese Shimadzu).
Atmosphere isolation device: be isolated with second part using advanced flap valve, can efficiently separate pumping atmosphere and Processing atmosphere.
Heating: back side panel installs three sections of heating devices, and front side board installs five sections of heating devices, carries out to substrate and substrate frame It is heat-insulated to install four layers of stainless steel mirror board for high-temperature heating between stainless steel heater and cabinet.
Molecular pump is mounted on door-plate, and molecular pump exhaust pipe is connect with fore pump pipeline to be realized automatically using pneumatic structure It seals and automatically opens, mutual disassembly's pump-line is not had to when switch gate.
In the present embodiment, sputtering chamber completes vacuum sputtering coating.
Vacuum cavity portion size: 5000mm (L) × 1200mm (H) × 500mm (W);
This chamber body designs 6 pieces of DC cathode target position and 2 molecular pumps altogether, and DC cathode target position is uniformly distributed in sputtering chamber Live-roller side, molecular pump are installed on sputtering chamber door-plate.
Every piece of cathode target position is furnished with two groups of admission lines, and admission line is three layers of uniform atmosphere structure design;
Heating: bottom plate is equipped with three sections of heating devices, and non-target side plate installs five sections of heating devices, guarantees glass when plated film Temperature stablize, temperature maintain range be ± 5 DEG C;Between stainless steel heater and cabinet install four layers of stainless steel mirror board every Heat installs titanium plate and as soaking and blocks sputtering object between heater and substrate frame.
Maintain exhaust portion configuration:
Molecular pump (TMP-V2304LM) 2 (Japanese Shimadzu).
Molecular pump is mounted on door-plate, and molecular pump exhaust pipe is connect with fore pump pipeline to be realized automatically using pneumatic structure It seals and automatically opens, mutual disassembly's pump-line is not had to when switch gate.
Direct current planar magnetic controlled sputtering target: all single cathodes can be mounted in any target position of coating wire, and specific location can basis Process requirement arrangement.
Cathode baffle and gas distributing system:
3 layers with mass flow controller (AE) equal gas air supply systems;
The protection of stomata and side shielding;
Sputter baffle;
Shielding case: installing a secondary shielding case on cathode site, and polygamy after a secondary production in viability for exchanging It is spare after sandblasting, the baffle of shield, side including upper part and up and down shielding etc..
In the present embodiment, transfer chamber is exported, maintains room for substrate frame to be transmitted to high vacuum by sputtering chamber, substrate frame passes Speed is sent to be transformed into transmission speed by plated film transmission speed;
Vacuum cavity portion size: 850mm (L) × 1200mm (H) × 500mm (W);
Fine pumping maintains part to configure:
Molecular pump (TMP-V2304LM) 1 (Japanese Shimadzu).
Atmosphere isolation device: being isolated using advanced flap valve, isolation pumping atmosphere and process gas that can be effective and stable Atmosphere.
Heating: back side panel installs 3 sections of heating devices, and front side board is installed 3 sections of heating devices, protected to substrate and substrate frame It is heat-insulated to install four layers of stainless steel mirror board for temperature heating between stainless steel heater and cabinet.
Molecular pump is mounted on door-plate, and molecular pump exhaust pipe is connect with fore pump pipeline to be realized automatically using pneumatic structure It seals and automatically opens, mutual disassembly's pump-line is not had to when switch gate.
In the present embodiment, outlet surge chamber is used to substrate frame being transmitted to downstream chamber by fine pumping room;Vacuum state Low vacuum is transitioned by high vacuum, substrate frame is by outlet surge chamber automatic Transition to downstream chamber.
Vacuum cavity portion size: 850mm (L) × 1200mm (H) × 500mm (W);
Maintain exhaust portion configuration:
Molecular pump (TMP-V2304LM) 1 (Japanese Shimadzu);
Gas isolator: carrying out initial vacuum using advanced flap valve and be isolated with high vacuum, is filled by flowmeter control Balanced gas (Ar).
Molecular pump is mounted on door-plate, and molecular pump exhaust pipe is connect with fore pump pipeline to be realized automatically using pneumatic structure It seals and automatically opens, mutual disassembly's pump-line is not had to when switch gate.
In the present embodiment, downstream chamber is to deflate to enter atmospheric condition slice, restores low vacuum again after the completion and was evacuated Journey, and substrate frame is automatically sent to quality inspection room.
Vacuum cavity portion size: 850mm (L) × 1200mm (H) × 500 (W);(be subject to actual design), is designed to It is abnormally-structured, minimize the interior space of cabinet.
The configuration of vacuum suction part:
Sliding vane rotary pump (SV300B) 1 (German Lay is precious);
Lobe pump (WAU1001) 1 (German Lay is precious);
Deflation inlet duct: upstream chamber deflation is totally 2, first to carry out soft deflation by Pneumatic corner valve DN40.
Gas isolator: it is isolated with atmosphere using simple flap valve, initial vacuum can effectively and easily be isolated.
Bleeding point is mounted on bottom plate, and pumping bore is DN100.
Operational effectiveness: vacuum degree reaches 5~8 × 100Pa;
In the present embodiment, quality inspection room is to carry out quality inspection to substrate under atmospheric pressure, and qualified product is wrapped after substrate undercarriage Dress, rejected product recycling.
In the present embodiment, mobile phone glass quality detection device includes an at least vacuum film plating substrate frame 11, a track, transmission Mechanism 13 and quality inspection system, each vacuum film plating substrate frame 11 slide in its respective carter back and forth, the driver Structure 13 connect with vacuum film plating substrate frame 11 and provides power for it, is equipped with several substrates on the vacuum film plating substrate frame 11 Hole 12, vacuum film plating substrate are installed in substrate hole 12, the quality inspection system include light source and sequentially connected photodetector, Filter and A/D converter, the light source and photodetector are divided into track two sides, and the light that the light source issues penetrates vacuum Film plating substrate is received by a photoelectric detector, and is converted to detection signal by A/D converter after filtering.
In the present embodiment, the mobile phone glass quality detection device includes two vacuum film plating substrate framves 11 and two rails Road, transmission mechanism 13 and quality inspection system, two tracks are bonded and are mounted in parallel, and each vacuum film plating substrate frame 11 is It is slided back and forth in its respective carter, the light source and photodetector of the quality inspection system are divided into track two sides.
In the present embodiment, 11 top horizontal of vacuum film plating substrate frame is arranged with several substrate holes 12, the driver Structure 13 is set to 11 lower part of vacuum film plating substrate frame or bottom, moves towards installation along track.
In the present embodiment, the transmission mechanism 13 includes engine, several driving members and belt, and the driving member is fixed to be connected It is connected to 11 lower part of vacuum film plating substrate frame, is connected between each driving wheel by belt.
In the present embodiment, the transmission mechanism 13 includes permanent magnet transmission motor, magnetic steering part and Magnetic drive part, the permanent magnetism Driving motor is connect with magnetic steering part and Magnetic drive part magnetism, and the Magnetic drive part is installed on 11 bottom of vacuum film plating substrate frame, The magnetic steering part is installed on track interior.
In the present embodiment, the quality inspection system further includes server, and the server is connected with A/D converter, and being used for will The electric signal of conversion is analyzed and is compared.
In the present embodiment, section is unloaded and live-roller is all made of advanced magnetic steering transmission in upper section, can ensure that the flat of braking Steady and accurate positioning.
In the present embodiment, returns frame system and be mounted under cabinet rear side, transmitted, be driven by same using advanced friction magnetic steering Step band is connected, and stroke is positioned by photoelectricity, and entirely time frame system is totally-enclosed using tempered glass, upper installation high efficiency particulate air filter.
In the present embodiment, extract system is specifically pumped and valve arrangement is by depending on specific operating condition, and all pipelines use SUS304 Mirror surface pipe, valve use import butterfly valve, auto-admission when being equipped with SMC power-off intake valve, termination of pumping or unexpected power-off before sliding vane rotary pump Ensure that mechanical pump does not return oil.
In the present embodiment, the magnetic steering frictional drive that the transmission of live-roller and plated film quality inspection roller uses, the interior transmission of cabinet is drawn Enter and introduced using magnetic fluid, substrate frame operation ensures at least to step up 3 driving wheels.Transmission is connected by synchronous belt, and stroke is by photoelectricity Positioning.
In the present embodiment, insulated between link stopper and guide rail and upper link stopper and substrate frame magnetic receiver by PEEK under substrate frame Material connection, it is ensured that the insulation of substrate frame and cabinet.
In the present embodiment, programmable control system is controlled the motion flow of equipment by PLC system.
In the present embodiment, operator can implement relevant setting by industrial PC (setting setting value, show actual value) To operate and control the motion flow of coating wire, system realization: visible system;State of the art is shown;Process data storage management; Data acquisition and alarm module;Statistical form;Technological parameter printing and record;Error message prompt;Automatically, manually and debugging operations Mode;Server is equipped with safe precaution measure, the storage capacity with kinds of processes process, has online input, modifies parameter With the function of switching value.
In the present embodiment, cooling water system includes:
Cathode target, cabinet pipeline, molecular pump, power supply are cooled down by the pure water of cool-heat-exchanger circulation;
The requirement of closed cycle cooling water system: plated film generic cyclic cooling water requires standard, 18~22 degree of inflow temperature, electric Resistance is greater than 10M Ω, and hydraulic pressure is greater than 3.5 kilograms.
In the present embodiment, air supply system includes:
(1) process gas supply system requirement:
Argon gas: 99.99%;
Oxygen: 99.99%;
Other gases select according to the technological requirements, provide process gas gas cylinder and pressure reducing valve by manufacturer, can directly adopt soft Pipe connects fastly.
(2) compressed air air supply system requirement:
Water removal, oil removing, pressure >=6 kilogram, 0.5 cubic meters per minute of gas production.
(3) extract system exhaust pipe requirement:
Vacuum pump group exhaust is directly connected to outdoor by flange or hose connection exhaust pipe, and exhaust outlet inside and outside pressure difference≤ 1.5E4Pa。
In the present embodiment, continuous magnetron sputtering coating film production line energy index:
(1) device type: vertical single side continuous magnetron sputtering coating wire (using SUS304 stainless steel material)
(2) film plating substrate frame size: 1 435mm × 610mm;
(3) filming equipment rhythm of production: mono- frame of 420s;
(4) vacuum chamber ultimate vacuum requirement: low vacuum chamber≤5Pa;(resume work true high vacuum chamber≤5.0 × 10-4Pa Empty time≤3 hour);System leak rate meets relevant national standard;
(5) sheet mode the equipment kind of drive: is loaded into using the vertical trolley of advanced magnetic steering frictional drive;
(6) gas isolating mode: being isolated using flap valve, and sputtering chamber carries out processing atmosphere isolation with molecular pump;
(7) coating temperature controls: using stainless steel armouring heating device, maximum temperature is 500 DEG C, according to room temperature~500 DEG C it can arbitrarily set design;
(8) control system requirement: the automatic control to entire production process is realized using the PLC of Omron, is manually controlled It is changeable with automatically controlling.Server is equipped with safe precaution measure, operational administrative password etc., and the storage with kinds of processes process Ability is deposited, there is online input, modify the function of parameter and switching value.
Be it is necessary to described herein finally: above embodiments are served only for making technical solution of the present invention further detailed Ground explanation, should not be understood as limiting the scope of the invention, those skilled in the art's above content according to the present invention The some nonessential modifications and adaptations made all belong to the scope of protection of the present invention.

Claims (6)

1. mobile phone glass quality detection device, it is characterised in that: including an at least vacuum film plating substrate frame (11), a track, pass Motivation structure (13) and quality inspection system, each vacuum film plating substrate frame (11) is slided in its respective carter back and forth, described Transmission mechanism (13) connect with vacuum film plating substrate frame (11) and provides power for it, pacifies on the vacuum film plating substrate frame (11) Equipped with several substrate holes (12), vacuum film plating substrate is installed in substrate hole (12), and the quality inspection system includes light source and sequentially Photodetector, filter and the A/D converter of connection, the light source and photodetector are divided into track two sides, the light The light that source issues is received by a photoelectric detector through vacuum film plating substrate, is converted to detection letter by A/D converter after filtering Number.
2. mobile phone glass quality detection device according to claim 1, it is characterised in that: the mobile phone glass quality testing Device includes two vacuum film plating substrate framves (11) and two tracks, transmission mechanism (13) and quality inspection system, two tracks It is bonded and is mounted in parallel, each vacuum film plating substrate frame (11) is slided in its respective carter back and forth, the quality inspection system The light source and photodetector of system are divided into track two sides.
3. mobile phone glass quality detection device according to claim 2, it is characterised in that: the vacuum film plating substrate frame (11) top horizontal is arranged with several substrate holes (12), the transmission mechanism (13) be set to vacuum film plating substrate frame (11) lower part or Installation is moved towards along track in bottom.
4. mobile phone glass quality detection device according to claim 3, it is characterised in that: the transmission mechanism (13) includes Engine, several driving members and belt, the driving member are fixedly connected on vacuum film plating substrate frame (11) lower part, each driving wheel it Between pass through belt connect.
5. mobile phone glass quality detection device according to claim 3, it is characterised in that: the transmission mechanism (13) includes Permanent magnet transmission motor, magnetic steering part and Magnetic drive part, the permanent magnet transmission motor are connect with magnetic steering part and Magnetic drive part magnetism, The Magnetic drive part is installed on vacuum film plating substrate frame (11) bottom, and the magnetic steering part is installed on track interior.
6. mobile phone glass quality detection device according to claim 1, it is characterised in that: the quality inspection system further includes clothes Business device, the server is connected with A/D converter, for being analyzed and being compared the electric signal of conversion.
CN201711329409.8A 2017-12-13 2017-12-13 Mobile phone glass quality detection device Pending CN109916924A (en)

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Application Number Priority Date Filing Date Title
CN201711329409.8A CN109916924A (en) 2017-12-13 2017-12-13 Mobile phone glass quality detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711329409.8A CN109916924A (en) 2017-12-13 2017-12-13 Mobile phone glass quality detection device

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Publication Number Publication Date
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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201038986Y (en) * 2007-06-06 2008-03-19 龚达明 Drive device using permanent magnetic body
CN101832945A (en) * 2010-04-29 2010-09-15 中国科学院上海技术物理研究所 Online detection method and device for defects of coated glass film
CN202730224U (en) * 2012-07-23 2013-02-13 陈晓东 Deposition equipment for conducting film of flexible thin-film solar cell
CN103046017A (en) * 2012-12-29 2013-04-17 中国科学院沈阳科学仪器股份有限公司 Chain transmission mechanism applicable to field of vacuum coating
CN203289302U (en) * 2013-04-25 2013-11-13 朱龙 Permanent magnetic transmission device
CN203551112U (en) * 2013-11-08 2014-04-16 东莞南玻太阳能玻璃有限公司 On-line verifying attachment for plated film aberration and uniformity and for glass appearance
CN103940354A (en) * 2014-05-15 2014-07-23 黑龙江大学 Device and method for measuring glass thickness through linear frequency modulation multi-beam laser heterodyne
CN105548217A (en) * 2016-02-23 2016-05-04 信阳舜宇光学有限公司 Appearance inspection device and method of film coating product
CN106353336A (en) * 2016-10-27 2017-01-25 哈尔滨理工大学 Lens coating automatic detection system

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201038986Y (en) * 2007-06-06 2008-03-19 龚达明 Drive device using permanent magnetic body
CN101832945A (en) * 2010-04-29 2010-09-15 中国科学院上海技术物理研究所 Online detection method and device for defects of coated glass film
CN202730224U (en) * 2012-07-23 2013-02-13 陈晓东 Deposition equipment for conducting film of flexible thin-film solar cell
CN103046017A (en) * 2012-12-29 2013-04-17 中国科学院沈阳科学仪器股份有限公司 Chain transmission mechanism applicable to field of vacuum coating
CN203289302U (en) * 2013-04-25 2013-11-13 朱龙 Permanent magnetic transmission device
CN203551112U (en) * 2013-11-08 2014-04-16 东莞南玻太阳能玻璃有限公司 On-line verifying attachment for plated film aberration and uniformity and for glass appearance
CN103940354A (en) * 2014-05-15 2014-07-23 黑龙江大学 Device and method for measuring glass thickness through linear frequency modulation multi-beam laser heterodyne
CN105548217A (en) * 2016-02-23 2016-05-04 信阳舜宇光学有限公司 Appearance inspection device and method of film coating product
CN106353336A (en) * 2016-10-27 2017-01-25 哈尔滨理工大学 Lens coating automatic detection system

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