CN109910188A - A kind of scribing machine gantry cutting Double-blade mechanism - Google Patents
A kind of scribing machine gantry cutting Double-blade mechanism Download PDFInfo
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- CN109910188A CN109910188A CN201910166356.5A CN201910166356A CN109910188A CN 109910188 A CN109910188 A CN 109910188A CN 201910166356 A CN201910166356 A CN 201910166356A CN 109910188 A CN109910188 A CN 109910188A
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- scribing machine
- cutter
- blade mechanism
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Abstract
The invention discloses a kind of scribing machine gantry to cut Double-blade mechanism, comprising: two groups of grinding wheel components are made of blade and air spindle, for the cutting processing of wafer, are installed in the rack of scribing machine；Working metal disk, positioned at the inferoanterior of grinding wheel component, for placing workpiece；W axis DD motor, the angle position for workpiece adjusts, convenient for the processing of subsequent handling；Y-axis motor, the feeding for cutter Y-axis；Control system, control Double-blade move synchronously and the feed motion of scratch diskette, the descending motion of Z axis and the rotary motion of W axis etc.；The present invention solves the problems, such as that the processing efficiency in wafer scribing processing is lower, is beneficial to the extensive use of scribing machine.
Description
Technical field
The present invention relates to scribing machine machining fields, especially relate to a kind of scribing machine gantry cutting Double-blade machine
Structure.
Background technique
Scribing machine is the key equipment of semiconductor machining, the main material that can be processed have monocrystalline silicon, polysilicon it is integrated
Circuit, quartz, ceramics, solar battery sheet etc..Machinable material ranges are high, and processing accuracy is high, therefore it is required that for
The control of each axis reaches very high precision.
When carrying out machining to workpiece, the Z axis decline of scribing machine drives diamond tool using high-speed rotating main shaft
Tool carries out cutting-up processing to workpiece.The process is high speed micro processing, and cutting speed is not high, processes a workpiece and needs rather
The time of clock.And due in process the problems such as bring sliver, so that processing efficiency is very low.Promote processing efficiency and guarantor
Processing quality is demonstrate,proved, general method is improved feed speed or is cut using double-pole.It improves feed speed and may bring and split
Piece and cannot be fully penetrated the problems such as, therefore, using double-pole cutting be the highest method of feasibility.
To sum up, equipped for existing cutting-up existing insufficient, can efficiently wafer be added by needing a kind of structure
Work and guarantee processing quality.
Summary of the invention
The purpose of the present invention is to solve process velocities in scribing machining process it is slow, processing efficiency is low the shortcomings that and mention
Cut Double-blade mechanism in the novel scribing machine gantry of one kind out.
Present invention employs following technical solutions:
A kind of novel scribing machine gantry cutting Double-blade mechanism, it is characterised in that, include:
Rack components, including metal plate and pedestal, for installing other assemblies；
Feeder assembly, including Y-axis feed system, Z axis jacking system and W axis rotary system, for realizing cutter Y-axis into
To gone up and down with Z axis and the W axis of workpiece rotation, be installed in rack components；
Two groups of cutting assemblies are installed on feeder assembly for cutting workpiece；
Control system controls the synchronous fortune between feeding, decline, cutting, the rotation of W axis and two cutters of Double-blade
It is dynamic.
Further, Y-axis feed system includes Y-axis feeding motor, cog-wheel coupling I, cog-wheel coupling II, Y-axis ball wire
Bar I and Y-axis ball screw II, Y-axis feeding motor are matched with cog-wheel coupling I and cog-wheel coupling II respectively, two tooth forms
Shaft coupling is connected with Y-axis ball screw I and Y-axis ball screw II respectively；Z axis jacking system includes Z axis lifting motor, Z axis
Shaft coupling and Z axis screw rod, Z axis lifting motor are connect by Z axis shaft coupling with Z axis screw rod, realize the elevating movement of Z axis；The rotation of W axis
Transfer from one department to another scratch diskette I, scratch diskette II that system includes two DD motors and is attached thereto, W axis DD motor realizes turning for scratch diskette W axis
It is dynamic.
Further, scratch diskette I and scratch diskette II are metal material, more durable.
Further, cutting assembly includes air spindle I, air spindle II, cutter I and cutter II, air spindle I and cutter
I is fixedly connected, and air spindle II is fixedly connected with cutter II.
Further, air spindle I and cutter I are connected by locking nut I, and air spindle II and cutter II pass through locking screw
Mother II connects, convenient for the disassembly of cutter.
Further, Y-axis feed system is equipped with grating scale, further promotes the feed accuracy of Y-axis.
Further, the distance between two air spindles are determined according to the size of scratch diskette I and scratch diskette II.
Beneficial effects of the present invention: improve and optimizate setting by the cutting subsystem to existing sand-wheel slice cutting machine
Meter carries out machining to wafer using two diamond cutters, wafer is significantly improved on the basis of existing
Processing efficiency.
Detailed description of the invention
Fig. 1 is that Double-blade mechanism schematic top plan view is cut at novel scribing machine gantry of the invention；
Fig. 2 is that Double-blade mechanism schematic side view is cut at novel scribing machine gantry of the invention；
1, Y-axis feeding motor, 2, metal plate, 3, air spindle I, 4, blade I, 5, locking nut I, 6, working metal disk I,
7, cog-wheel coupling II, 8, Y-axis screw rod II, 9, cog-wheel coupling I, 10, Y-axis screw rod I, 11, air spindle II, 12, locking screw
Female II, 13, blade II, 14, working metal disk II, 15, Z axis screw rod, 16, shaft coupling, 17, Z axis lifting motor, 18, pedestal,
19, W axis DD motor, 20, grating scale.
Specific embodiment
In order to keep the objectives, technical solutions, and advantages of the present invention more clear, with reference to the accompanying drawings and embodiments,
The present invention is further described in detail.It should be appreciated that specific embodiment described herein is only to explain this
Invention, is not intended to limit the present invention.
Fig. 1 and Fig. 2 are please referred to, the present invention provides a kind of technical solutions of mechanism: cut at the novel scribing machine gantry of one kind
Cutting Double-blade mechanism includes cutting assembly and feeder assembly and rack components, control system, and the cutting assembly includes air
Main shaft I and air spindle II and cutter I and cutter II, connection between the two pass through locking nut I and locking nut II；
The cutting assembly further includes two working metal disks 6 and 14, positioned at the inferoanterior of blade；The feeder assembly realizes knife
The Y-axis feeding and the descending motion of Z axis and the rotation of W axis of tool, including Y-axis feeding motor 1 and two cog-wheel couplings 7 and 9
Cooperation drives Y-axis ball screw 8 and 10 to rotate, to realize the feed motion of Y-axis；Z axis lifting motor 15 passes through Z axis shaft coupling
Device 16 is connect with Z axis screw rod, realizes the elevating movement of Z axis；W axis DD motor 19 controls the rotation that working metal disk realizes W axis；Machine
Frame component includes metal plate 2 and pedestal 18, and cutting assembly and feeder assembly are both secured on metal plate 2 and pedestal 18.
Wherein, cutter is mounted on air spindle by locking nut, and air spindle connects Z axis screw rod, by Z axis motor band
It is dynamic to move up and down.
Specifically, Y-axis has installed grating scale 20 additional in order to further enhance the feed accuracy of Y-axis.
Further, Double-blade control system, control the feeding of Double-blade, the rotation of decline cutting W axis and two cutters it
Between move synchronously.
The working principle of the present embodiment is as follows: system issues feeding order, motion control card is issued to Y-axis driver
Pulse, driver drives y-axis motor movement, by the cooperation with cog-wheel coupling, while two Y-axis ball screws being driven to turn
It is dynamic, linear motion is converted by the rotary motion of motor, to drive air spindle in the feeding of Y direction.Motor is according to setting
The number of pulses received is converted to the amount of feeding by fixed pulse equivalency, and due to being a motor while driving two screw rods same
When rotate, therefore, the movement of the Y direction of two air spindles is synchronous.When blade is fed into distalmost end, system controls Z
Axis decline and working metal disk reach determining station, and main shaft rotation band cutting blade rotates, right according to the cutting technique of selection
Workpiece is cut.After the completion of cutting, system returns to original position.In order to promote the precision of Y-axis, system is using grating scale as Y-axis
The feedback of feeding.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And transformation, the scope of the present invention is defined by the appended.
Claims (7)
1. Double-blade mechanism is cut at a kind of scribing machine gantry, it is characterised in that, include:
Rack components, including metal plate (2) and pedestal (18), for installing other assemblies；
Feeder assembly, including Y-axis feed system, Z axis jacking system and W axis rotary system, for realizing cutter Y-axis feeding and
Z axis lifting and the W axis rotation of workpiece, are installed in the rack components；
Two groups of cutting assemblies are installed on the feeder assembly for cutting workpiece；
Control system controls moving synchronously between feeding, decline, cutting, the rotation of W axis and two cutters of Double-blade.
2. Double-blade mechanism is cut at scribing machine gantry as described in claim 1, which is characterized in that the Y-axis feed system packet
Include Y-axis feeding motor (1), cog-wheel coupling I (9), cog-wheel coupling II (7), Y-axis ball screw I (10) and Y-axis ball screw
II (8), Y-axis feeding motor (1) match with the cog-wheel coupling I (9) and the cog-wheel coupling II (7) respectively,
Two cog-wheel couplings are connected with the Y-axis ball screw I (10) and the Y-axis ball screw II (8) respectively；Z axis lifting
System includes that Z axis lifting motor (17), Z axis shaft coupling (16) and Z axis screw rod (15), the Z axis lifting motor (17) pass through institute
It states Z axis shaft coupling (16) to connect with the Z axis screw rod (15), realizes the elevating movement of Z axis；W axis rotary system includes two DD
Motor (19) and the scratch diskette I (6) being attached thereto, scratch diskette II (14), the W axis DD motor (19) realize scratch diskette W axis
Rotation.
3. Double-blade mechanism is cut at scribing machine gantry as claimed in claim 2, which is characterized in that the scratch diskette I (6) and institute
Stating scratch diskette II (14) is metal material.
4. Double-blade mechanism is cut at scribing machine gantry as described in claim 1, which is characterized in that the cutting assembly includes sky
Gas main shaft I (3), air spindle II (11), cutter I (4) and cutter II (13), the air spindle I (3) and the cutter I (4)
It is fixedly connected, the air spindle II (11) is fixedly connected with the cutter II (13).
5. Double-blade mechanism is cut at scribing machine gantry as claimed in claim 4, which is characterized in that the air spindle I (3) and
The cutter I (4) is connected by locking nut I (5), and air spindle II (11) cutter II (13) passes through locking nut
II (12) connection.
6. Double-blade mechanism is cut at novel scribing machine gantry as described in claim 1, which is characterized in that Y-axis feed system dress
There are grating scale (20).
7. Double-blade mechanism is cut at a kind of novel scribing machine gantry as described in claim 1, which is characterized in that two air
The distance between main shaft is determined according to the size of the scratch diskette I (6) and the scratch diskette II (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910166356.5A CN109910188A (en) | 2019-03-06 | 2019-03-06 | A kind of scribing machine gantry cutting Double-blade mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910166356.5A CN109910188A (en) | 2019-03-06 | 2019-03-06 | A kind of scribing machine gantry cutting Double-blade mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109910188A true CN109910188A (en) | 2019-06-21 |
Family
ID=66963455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910166356.5A Pending CN109910188A (en) | 2019-03-06 | 2019-03-06 | A kind of scribing machine gantry cutting Double-blade mechanism |
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| Country | Link |
|---|---|
| CN (1) | CN109910188A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200932462A (en) * | 2007-11-19 | 2009-08-01 | Tokyo Seimitsu Co Ltd | Dicing method |
| CN204621370U (en) * | 2015-02-12 | 2015-09-09 | 鞍山盛雄激光设备有限公司 | A kind of Semi-automatic wafer scribing cut-off machine of many |
| CN207771261U (en) * | 2017-12-22 | 2018-08-28 | 沈阳芯嘉科技有限公司 | A kind of laser sand-wheel slice cutting machine |
| CN208214423U (en) * | 2018-03-26 | 2018-12-11 | 安徽哲乐机电有限公司 | A kind of Double-blade cutting apparatus with guide rail powered lift function |
-
2019
- 2019-03-06 CN CN201910166356.5A patent/CN109910188A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200932462A (en) * | 2007-11-19 | 2009-08-01 | Tokyo Seimitsu Co Ltd | Dicing method |
| US20110054657A1 (en) * | 2007-11-19 | 2011-03-03 | Takeo Tsushima | Dicing method |
| CN204621370U (en) * | 2015-02-12 | 2015-09-09 | 鞍山盛雄激光设备有限公司 | A kind of Semi-automatic wafer scribing cut-off machine of many |
| CN207771261U (en) * | 2017-12-22 | 2018-08-28 | 沈阳芯嘉科技有限公司 | A kind of laser sand-wheel slice cutting machine |
| CN208214423U (en) * | 2018-03-26 | 2018-12-11 | 安徽哲乐机电有限公司 | A kind of Double-blade cutting apparatus with guide rail powered lift function |
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Application publication date: 20190621 |
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