CN109904096B - Semiconductor dress piece all-in-one - Google Patents
Semiconductor dress piece all-in-one Download PDFInfo
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- CN109904096B CN109904096B CN201910123740.7A CN201910123740A CN109904096B CN 109904096 B CN109904096 B CN 109904096B CN 201910123740 A CN201910123740 A CN 201910123740A CN 109904096 B CN109904096 B CN 109904096B
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 24
- 230000007246 mechanism Effects 0.000 claims abstract description 161
- 239000000463 material Substances 0.000 claims abstract description 153
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 80
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 80
- 239000010439 graphite Substances 0.000 claims abstract description 80
- 238000000034 method Methods 0.000 claims abstract description 16
- 238000007599 discharging Methods 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims description 22
- 238000003475 lamination Methods 0.000 claims description 10
- 238000010030 laminating Methods 0.000 claims description 9
- 239000012528 membrane Substances 0.000 claims description 6
- 238000012546 transfer Methods 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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Abstract
The invention discloses a semiconductor chip loading all-in-one machine which comprises a frame, a linear motor module, a servo motor module and an electric control system, wherein a workbench of the frame is provided with a feeding station, a dispensing station, a chip attaching station, a graphite disc chip combining station and a discharging station, the workbench is provided with a linear guide rail and a linear motor, and each station is provided with an accurate position through the guide rail and the linear motor. According to the invention, the linear guide rail is arranged on the workbench, and four material loading mechanisms are arranged on the linear guide rail, so that one station corresponds to one material loading mechanism basically; each operating mechanism is arranged along the linear guide rail, and the corresponding operation is carried out when the operating mechanism moves to the corresponding station through the material carrying mechanism, so that the processes of film bracket dispensing, chip attaching, chip dispensing, film combining on a graphite disc, discharging and the like can be simultaneously carried out, and double-material-sheet transmission is realized, so that the whole operation flow is smoother, the failure rate is reduced, the production efficiency is greatly improved, and the labor power of 3-4 persons can be saved compared with that of a traditional single-strip assembly line.
Description
Technical Field
The invention relates to the technical field of semiconductor production devices, in particular to equipment for manufacturing semiconductor electronic devices, such as semiconductor diodes, semiconductor triodes and the like.
Background
With the rapid development of science and technology, semiconductor electronic devices are increasingly widely used, semiconductor diodes, semiconductor triodes and the like, and meanwhile, requirements on the semiconductor electronic devices are also increasingly high, so that the production process of the semiconductor electronic devices is also increasingly strict. In the production process of semiconductor devices, packaging is generally realized by adopting a chip loader, however, the existing semiconductor packaging equipment is deficient in structural design and lacks intelligence, so that the production flow is complicated, the efficiency is low, the operation procedures cannot be completely connected, various problems exist in equipment stability and quality control aspects, and big data are not used as statistics; in addition, because the structure is complicated, lead to maintaining inconvenient, the equipment security performance subalternation problem.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention provides the semiconductor chip mounting integrated machine which has the advantages of relatively simpler structure, more reasonable design, smoother production flow and higher production efficiency.
In order to solve the technical problems, the invention adopts the following technical scheme: the utility model provides a semiconductor dress piece all-in-one, is provided with material loading station, point on the workstation of frame and glues the station, pastes chip station, graphite dish and closes piece station and unloading station including frame, linear motor module, servo motor module and electrical system, is equipped with the carrying mechanism who is used for bearing the weight of the tablet and is used for transferring the conveying manipulator of tablet between the station, its characterized in that: the workbench is provided with a linear guide rail, and the material loading mechanism is arranged on the linear guide rail to form a structure capable of moving along the linear guide rail so as to transfer the material sheet from the previous station to a lower station; each station is arranged along the edge of the linear guide rail, and each conveying manipulator is arranged beside the station or between the two stations;
the dispensing station comprises a first dispensing station and a second dispensing station, a first dispensing device and a second dispensing device are respectively arranged on the first dispensing station and the second dispensing station, the first dispensing device is arranged on one side of the initial end position of the linear guide rail, the feeding station is also close to the initial end of the linear guide rail, and the dispensing process is completed through the first dispensing device by a material sheet transferred to a material loading mechanism at the first dispensing station by the feeding station;
the chip attaching station is arranged behind the first dispensing station and comprises two chip attaching units which are respectively arranged at two sides of the linear guide rail, and each chip attaching unit is provided with a set of chip attaching and taking mechanism; the chip pasting and taking mechanism comprises a chip placing device, a chip taking device and a positioning detection mechanism, wherein the chip placing device is used for taking out a chip on the chip placing device and transferring the chip to the material loading mechanism at a chip pasting station, and the chip is placed on a material sheet in the material loading mechanism at the chip pasting station under the control of the positioning detection mechanism to finish the chip pasting process;
the second dispensing station is arranged behind the chip attaching station, the second dispensing device is arranged on one side of the linear guide rail, and the chip carried on the material sheet, which is transferred to the second dispensing station by the chip attaching station, completes the dispensing process through the second dispensing device;
after the graphite disc laminating station is arranged at the second dispensing station, a graphite disc carrying platform and a corresponding conveying manipulator mechanism are arranged at the graphite disc laminating station, the graphite disc carrying platform is arranged on the linear guide rail to form a movable structure, the conveying manipulator mechanism is suspended above the graphite disc carrying platform, a material sheet which completes the dispensing process and carries chips is transferred onto the graphite disc carrying platform through the conveying manipulator mechanism, and a loading support is covered on a bottom sheet support with the dispensed chips through the conveying manipulator mechanism;
the blanking station is arranged behind the graphite disc lamination station and is positioned at the tail end of the linear guide rail.
Further, the material loading mechanism comprises a first material loading mechanism, a second material loading mechanism and a third material loading mechanism, each material loading mechanism comprises a material sheet carrying platform, the material sheet carrying platform is arranged on a material loading Y-axis moving seat, the material loading Y-axis moving seat is arranged on a material loading X-axis moving seat, a moving track perpendicular to the linear guide rail is arranged on the material loading X-axis moving seat, the material loading Y-axis moving seat is connected with a driving device to form a structure capable of moving back and forth along the Y direction on the material loading X-axis moving seat, and the material loading X-axis moving seat is connected with the driving device to form a structure capable of moving back and forth along the X direction on the linear guide rail; the first material carrying mechanism is arranged at the first dispensing station, the second material carrying mechanism is arranged at the chip attaching station, and the third material carrying mechanism is arranged at the second dispensing station. The loading mechanisms can better realize the position alignment of the negative film bracket.
Further, a first conveying manipulator is arranged beside the feeding station, a detection sensing device for detecting whether the negative film bracket is successfully absorbed or not is arranged on the first conveying manipulator, and the material sheet of the feeding station is transferred to a material sheet carrying table of a first material carrying mechanism through the first conveying manipulator; a second conveying manipulator is arranged between the first dispensing station and the chip attaching station, and the material sheets on the first material loading mechanism are transferred to a material sheet carrying table of the second material loading mechanism through the second conveying manipulator; a third conveying manipulator is arranged between the chip attaching station and the second dispensing station, and the material sheet loaded with chips on the second material loading mechanism is transferred to a material sheet carrying table of the third material loading mechanism through the third conveying manipulator; the conveying manipulator mechanism arranged at the graphite disc sheet combining station is a fourth conveying manipulator, the fourth conveying manipulator is arranged on a fourth conveying manipulator Y-axis moving mechanism to form a structure capable of reciprocating along the Y direction, the fourth conveying manipulator Y-axis moving mechanism is vertical to the linear guide rail and transversely suspended above the linear guide rail, a sheet carrying chips on the third loading mechanism is transferred onto a graphite disc loading table through the fourth conveying manipulator, and a bracket cover is taken at a sheet feeding trough to finish sheet combining action on the graphite disc loading table; a fifth conveying manipulator is arranged at the blanking station and is arranged on a Y-axis moving mechanism of the fifth conveying manipulator to form a structure capable of reciprocating along the Y direction, the Y-axis moving mechanism of the fifth conveying manipulator is perpendicular to the linear guide rail, and the fifth conveying manipulator is used for blanking the material sheets with the graphite disc sheets.
Further, the bearing mechanism of the graphite disc carrier is the same as the bearing mechanism of the tablet carrier, and also comprises a material carrying X-axis moving seat and a material carrying Y-axis moving seat, the graphite disc carrier is arranged on the material carrying Y-axis moving seat, the material carrying Y-axis moving seat is arranged on the material carrying X-axis moving seat, a moving track perpendicular to the linear guide rail is arranged on the material carrying X-axis moving seat, the material carrying Y-axis moving seat is connected with a driving device to form a structure capable of moving along Y directions on the material carrying X-axis moving seat in a reciprocating manner, and the material carrying X-axis moving seat is connected with a driving device to form a structure capable of moving X directions on the linear guide rail in a reciprocating manner. The bearing mechanism can better realize the alignment of the bottom sheet bracket and the upper sheet bracket.
Further, a negative plate discharging device is arranged at the feeding station, two negative plate bearing plates which are arranged in parallel are arranged on the negative plate discharging device, negative plate limiting columns used for blocking negative plate supports are arranged around the two negative plate bearing plates, and the two negative plate supports are simultaneously sucked and transferred onto the first material loading mechanism through the first conveying mechanical arm once.
Further, the first dispensing device and the second dispensing device have the same structure and comprise a dispensing controller and a dispensing head, and the dispensing head is controlled by the dispensing controller; a plurality of dispensing heads are arranged on a dispensing lifting seat through an X-axis guide rail to form a structure capable of moving along the X direction, the dispensing lifting seat is arranged on a dispensing fixed seat through a Z-axis guide rail to form a lifting structure, a dispensing driving mechanism is arranged on the dispensing fixed seat, and the dispensing driving mechanism is connected with the dispensing lifting seat to control lifting movement of the dispensing lifting seat.
Further, a first detection camera is arranged at the first dispensing station, and a second detection camera is arranged at the second dispensing station so as to detect the effect of the dispensing; and a third detection camera is arranged at the position of the graphite disc lamination station to detect the effect of the graphite disc lamination bracket.
Further, the chip placement device comprises a chip placement ring and a linear module X, Y moving mechanism, the chip placement ring is arranged on the linear module X, Y moving mechanism to form a position-adjustable structure, and the membrane carrying the chip is placed on the chip placement ring; the positioning detection mechanism is arranged above the chip placement ring; the chip taking device comprises a taking swing arm and a thimble mechanism, the taking swing arm is controlled by a rotary servo motor to absorb chips from left to right, up to down and through vacuum gas, the taking swing arm is horizontally arranged between a chip placing ring and a second material carrying mechanism, and the chips on a chip carrying diaphragm are transferred to the second material carrying mechanism to be attached to a material sheet through the taking swing arm; the ejector pin mechanism is arranged below the chip placement ring, and the chip bearing membrane is ejected through the ejector pin mechanism so as to clamp and absorb the chip with the matched material taking swing arm.
Further, a feeding and discharging device for placing a graphite disc feeding support is arranged beside the linear guide rail at the graphite disc laminating station, the graphite disc feeding support is placed in the feeding and discharging device in advance, and then the graphite disc feeding support is transferred to the graphite disc carrying table by a fourth conveying manipulator to be attached to the chip.
Further, the first graphite carrier and the second graphite carrier are arranged at the blanking station and symmetrically arranged at two sides of the tail end of the linear guide rail, the fifth conveying manipulator is used for respectively transferring the tablets on the graphite disc carrier to the first graphite carrier and the second graphite carrier for blanking, and blanking can be simultaneously carried out at two sides, so that the efficiency is improved.
According to the invention, the linear guide rail communicated with the tail is arranged on the workbench, and four material loading mechanisms are arranged on the linear guide rail, so that one station corresponds to one material loading mechanism basically, and the material loading mechanism can move left and right on the linear guide rail to realize material transfer and accurate alignment; the operating mechanism of each station is arranged along the linear guide rail, corresponding operation is carried out when the operating mechanism moves to the corresponding station through the material carrying mechanism, processes such as film bracket dispensing, chip laminating, chip dispensing, graphite disc laminating and blanking can be simultaneously carried out, and double-material-sheet transmission is realized, so that the whole operation flow is smoother, the production efficiency can be greatly improved, and compared with the traditional process, the labor force of an assembly line can be saved by 3-4 persons. In addition, the smoothness of the flow is improved, so that quality control is more accurate, the detection camera is matched with software, data are realized, real-time alarm is realized, and the system is more reliable. Through industrial computer and control panel card communication, control linear electric motor and servo motor (in each mobile mechanism), realize the accurate control of position.
Drawings
FIG. 1 is a perspective view of the structure of the present invention;
FIG. 2 is a top view of the structure of the present invention;
fig. 3 is an enlarged view of a portion a of fig. 1;
fig. 4 is an enlarged view of a portion B of fig. 1;
fig. 5 is an enlarged view of a portion C of fig. 1.
In the figure, 1 is a frame, 10 is a workbench, 11 is a linear guide, 13 is a first carrying mechanism, 14 is a second carrying mechanism, 15 is a third carrying mechanism, 16 is a tablet carrying platform, 17 is a carrying X-axis moving seat, 18 is a carrying Y-axis moving seat, 19 is a graphite disc carrying platform, 2 is a negative discharging device, 21 is a negative carrying plate, 22 is a negative limiting column, 31 is a first conveying manipulator, 32 is a second conveying manipulator, 33 is a third conveying manipulator, 34 is a fourth conveying manipulator, 35 is a fifth conveying manipulator, 36 is a fourth conveying manipulator Y-axis moving mechanism, 37 is a fifth conveying manipulator Y-axis moving mechanism, 41 is a first dispensing device, 42 is a second dispensing device, 43 is a dispensing controller, 44 is a dispensing head, 45 is a dispensing lifting seat, 46 is a Z-axis guide, 47 is a dispensing fixed seat, and 48 is a dispensing driving mechanism; 5 is a chip attaching and taking mechanism, 51 is a chip placing ring, 52 is a linear module X, Y moving mechanism, 53 is a material taking swing arm, 54 is a material taking control box, 55 is a thimble mechanism, 56 is a positioning and detecting mechanism, 6 is a display mechanism, 71 is a first detecting camera, 72 is a second detecting camera, 73 is a third detecting camera, 8 is a loading and discharging device, 91 is a first graphite carrier, and 92 is a second graphite carrier.
Detailed Description
In this embodiment, referring to fig. 1 to fig. 4, the integrated semiconductor die-filling machine includes a frame 1, a display mechanism 6 and an electronic control system, a workbench 10 of the frame 1 is provided with a feeding station, a dispensing station, a die bonding station, a graphite disc die bonding station and a discharging station, and a loading mechanism for loading a tablet and a conveying manipulator for transferring the tablet are arranged between the stations; a linear guide rail 11 is arranged on the workbench 10, and the material loading mechanism is arranged on the linear guide rail 11 to form a structure capable of moving along the linear guide rail 11 so as to transfer a material sheet from a previous station to a lower station; each station is arranged along the edge of the linear guide rail 11, and each conveying manipulator is arranged beside the station or between the two stations;
the dispensing station comprises a first dispensing station and a second dispensing station, a first dispensing device 41 and a second dispensing device 42 are respectively arranged on the first dispensing station and the second dispensing device 41 is arranged on one side of the initial end position of the linear guide rail 11, the feeding station is also close to the initial end of the linear guide rail 11, and the dispensing process is completed through the first dispensing device 41 by a material sheet transferred to a material loading mechanism at the first dispensing station by the feeding station;
the chip attaching station is arranged behind the first dispensing station and comprises two chip attaching units which are respectively arranged at two sides of the linear guide rail 11, and each chip attaching unit is provided with a set of chip attaching and taking mechanism 5; the chip pasting and taking mechanism 5 comprises a chip placing device, a chip taking device and a positioning detection mechanism 56, the chip placing device is used for taking out the chip on the chip placing device and transferring the chip to the loading mechanism at the chip pasting station, and the chip is placed on a material sheet positioned in the loading mechanism at the chip pasting station under the control of the positioning detection mechanism 56 to complete the chip pasting process;
the second dispensing station is arranged behind the chip attaching station, the second dispensing device 42 is arranged on one side of the linear guide rail 11, and the chip carried on the material sheet, which is transferred to the second dispensing station by the chip attaching station, completes the dispensing process through the second dispensing device 42;
after the graphite disc laminating station is arranged at the second dispensing station, a graphite disc carrying platform 19 and a corresponding conveying manipulator mechanism are arranged at the graphite disc laminating station, the graphite disc carrying platform 19 is arranged on the linear guide rail 11 to form a movable structure, the conveying manipulator mechanism is suspended above the graphite disc carrying platform 19, the material sheets which complete the dispensing process and bear chips are transferred onto the graphite disc carrying platform 19 through the conveying manipulator mechanism, and the graphite disc upper sheets are attached to the chips through the conveying manipulator mechanism;
the blanking station is arranged behind the graphite disc lamination station and is positioned at the tail end of the linear guide rail 11.
The material loading mechanism comprises a first material loading mechanism 13, a second material loading mechanism 14 and a third material loading mechanism 13, and comprises a material sheet carrying table 16, wherein the material sheet carrying table 16 is arranged on a material loading Y-axis moving seat 18, the material loading Y-axis moving seat 18 is arranged on a material loading X-axis moving seat 17, a moving track perpendicular to the linear guide rail 11 is arranged on the material loading X-axis moving seat 17, the material loading Y-axis moving seat 18 is connected with a driving device to form a structure capable of moving back and forth on the material loading X-axis moving seat 17 along the Y direction, and the material loading X-axis moving seat 17 is connected with the driving device to form a structure capable of moving back and forth on the linear guide rail 11; the first material loading mechanism 13 is arranged at the first dispensing station, the second material loading mechanism 14 is arranged at the chip attaching station, and the third material loading mechanism 14 is arranged at the second dispensing station. The loading mechanisms can better realize the position alignment of the negative film bracket.
A first conveying manipulator 31 is arranged beside the feeding station, and is provided with a detection sensing device for detecting whether the negative film bracket is successfully absorbed, and the material sheet of the feeding station is transferred to a material sheet carrying table 16 of a first material carrying mechanism 13 through the first conveying manipulator 31; a second conveying manipulator 32 is arranged between the first dispensing station and the chip attaching station, and the material sheets on the first material loading mechanism 13 are transferred to the material sheet carrying table 16 of the second material loading mechanism 14 through the second conveying manipulator 32; a third conveying manipulator 33 is arranged between the chip attaching station and the second dispensing station, and the material sheet loaded with chips on the second material loading mechanism 14 is transferred to the material sheet carrying table 16 of the third material loading mechanism 15 through the third conveying manipulator 33; the conveying manipulator mechanism arranged at the graphite disc lamination station is a fourth conveying manipulator 34, the fourth conveying manipulator 34 is arranged on a fourth conveying manipulator Y-axis moving mechanism 36 to form a structure capable of reciprocating along the Y direction, the fourth conveying manipulator Y-axis moving mechanism 36 is perpendicular to the linear guide rail 11 and transversely suspended above the linear guide rail 11, and the material sheets loaded with chips on the third loading mechanism 15 are transferred to the graphite disc loading table 19 through the fourth conveying manipulator 34; a fifth conveying manipulator 35 is arranged at the blanking station, the fifth conveying manipulator 35 is arranged on a fifth conveying manipulator Y-axis moving mechanism 37 to form a structure capable of reciprocating along the Y direction, the fifth conveying manipulator Y-axis moving mechanism 37 is perpendicular to the linear guide rail 11, and the fifth conveying manipulator 35 is used for blanking the material sheets with the graphite disc sheets.
The carrying mechanism of the graphite disc carrying platform 19 is the same as the carrying mechanism of the tablet carrying platform 16, and also comprises a carrying X-axis moving seat 17 and a carrying Y-axis moving seat 18, wherein the graphite disc carrying platform 19 is arranged on the carrying Y-axis moving seat 18, the carrying Y-axis moving seat 18 is arranged on the carrying X-axis moving seat 17, a moving track perpendicular to the linear guide rail 11 is arranged on the carrying X-axis moving seat 17, the carrying Y-axis moving seat 18 is connected with a driving device to form a structure capable of moving back and forth on the carrying X-axis moving seat 17 along the Y direction, and the carrying X-axis moving seat 17 is connected with a driving device to form a structure capable of moving back and forth on the linear guide rail 11 along the X direction. The bearing mechanism can better realize the alignment of the bottom sheet bracket and the upper sheet bracket.
The negative film feeding device 2 is arranged at the feeding station, two parallel negative film bearing plates 21 are arranged on the negative film feeding device 2, negative film limiting columns 22 for blocking negative film supports are arranged around the two negative film bearing plates 21, and the two negative film supports are simultaneously sucked and transferred onto the first material loading mechanism 13 through the first conveying mechanical arm 31.
The first dispensing device 41 and the second dispensing device 42 have the same structure, and each of the first dispensing device and the second dispensing device comprises a dispensing controller 43 and a dispensing head 44, and the dispensing heads 44 are controlled by the dispensing controller 43; a plurality of (e.g. 3) dispensing heads 44 are mounted on a dispensing lifting seat 45 through an X-axis guide rail to form a structure capable of moving along the X-direction, the dispensing lifting seat 45 is mounted on a dispensing fixing seat 47 through a Z-axis guide rail 46 to form a lifting structure, a dispensing driving mechanism 48 is mounted on the dispensing fixing seat 47, and the dispensing driving mechanism 48 is connected with the dispensing lifting seat 45 to control lifting movement thereof.
A first detection camera 71 is arranged at the first dispensing station, and a second detection camera 72 is arranged at the second dispensing station to detect the effect of the dispensing; a third detection camera 73 is provided at the graphite disc lamination station to detect the effect of the graphite disc upper sheet support.
The chip placement device comprises a chip placement ring 51 and a linear module X, Y moving mechanism 52, wherein the chip placement ring 51 is arranged on the linear module X, Y moving mechanism 52 to form a position-adjustable structure, and a membrane carrying a chip is placed on the chip placement ring 51; the positioning detection mechanism 56 is arranged above the chip placement ring 51; the chip taking device comprises a taking swing arm 53 and a thimble mechanism 55, wherein the taking swing arm 53 is controlled by a rotary servo motor in a taking control box 54 to absorb chips from left to right, up to down and through vacuum gas, the taking swing arm 53 is horizontally arranged between a chip placing ring 51 and a second loading mechanism 14, and chips on a chip bearing membrane are transferred to the second loading mechanism 14 through the taking swing arm 53 to be attached to a material sheet; the ejector mechanism 55 is disposed below the chip placement ring 51, and the chip carrier film is lifted up by the ejector mechanism 55 so as to clamp and suck the chip with the material taking swing arm 53.
And an upper sheet discharging device 8 for placing an upper sheet support of the graphite disc is arranged beside the linear guide rail 11 at the position of the graphite disc lamination station, the upper sheet support of the graphite disc is placed in the upper sheet discharging device 8 in advance, and then the upper sheet support of the graphite disc is transferred to the graphite disc carrying table 19 by a fourth conveying manipulator 34 to be attached to the chip.
The first graphite carrier 91 and the second graphite carrier 92 are symmetrically arranged at the two sides of the tail end of the linear guide rail 11, the fifth conveying manipulator 35 transfers the tablets on the graphite disc carrier 19 to the first graphite carrier 91 and the second graphite carrier 92 for discharging, and the two sides can be used for discharging simultaneously, so that the efficiency is improved.
The foregoing detailed description of the invention has been presented for purposes of illustration and description, but is not intended to limit the scope of the invention, i.e., the invention is not limited to the details shown and described.
Claims (7)
1. The utility model provides a semiconductor dress piece all-in-one, is provided with material loading station, point on the workstation of frame and glues the station, pastes chip station, graphite dish and closes piece station and unloading station including frame, linear motor module, servo motor module and electrical system, is equipped with the carrying mechanism who is used for bearing the weight of the tablet and is used for transferring the conveying manipulator of tablet between the station, its characterized in that: the workbench is provided with a linear guide rail, and the material loading mechanism is arranged on the linear guide rail to form a structure capable of moving along the linear guide rail so as to transfer the material sheet from the previous station to a lower station; each station is arranged along the edge of the linear guide rail, and each conveying manipulator is arranged beside the station or between the two stations;
the dispensing station comprises a first dispensing station and a second dispensing station, a first dispensing device and a second dispensing device are respectively arranged on the first dispensing station and the second dispensing station, the first dispensing device is arranged on one side of the initial end position of the linear guide rail, the feeding station is also close to the initial end of the linear guide rail, and the dispensing process is completed through the first dispensing device by a material sheet transferred to a material loading mechanism at the first dispensing station by the feeding station;
the chip attaching station is arranged behind the first dispensing station and comprises two chip attaching units which are respectively arranged at two sides of the linear guide rail, and each chip attaching unit is provided with a set of chip attaching and taking mechanism; the chip pasting and taking mechanism comprises a chip placing device, a chip taking device and a positioning detection mechanism, the chip placing device is used for taking out and transferring the chip on the chip placing device to the material loading mechanism at the chip pasting station, and the chip is placed on a material sheet positioned in the material loading mechanism at the chip pasting station under the control of the positioning detection mechanism, so that the chip pasting process is completed; the second dispensing station is arranged behind the chip attaching station, the second dispensing device is arranged on one side of the linear guide rail, the chip attaching station is transferred to the second dispensing station, and the chip borne on the material sheet is subjected to the dispensing process through the second dispensing device;
after the graphite disc laminating station is arranged at the second dispensing station, a graphite disc carrying platform and a corresponding conveying manipulator mechanism are arranged at the graphite disc laminating station, the graphite disc carrying platform is arranged on the linear guide rail to form a movable structure, the conveying manipulator mechanism is suspended above the graphite disc carrying platform, the dispensing process is completed through the conveying manipulator mechanism, the material sheets bearing chips are transferred to the graphite disc carrying platform, and the feeding support is covered on the bottom sheet support coated with the dispensed chips through the conveying manipulator mechanism;
the blanking station is arranged behind the graphite disc lamination station and is positioned at the tail end of the linear guide rail;
the material loading mechanism comprises a first material loading mechanism, a second material loading mechanism and a third material loading mechanism, and all comprises a material sheet carrying platform which is arranged on a material loading Y-axis moving seat, wherein the material loading Y-axis moving seat is arranged on a material loading X-axis moving seat, a moving track which is perpendicular to the linear guide rail is arranged on the material loading X-axis moving seat, the material loading Y-axis moving seat is connected with a driving device to form a structure capable of moving back and forth along Y direction on the material loading X-axis moving seat, and the material loading X-axis moving seat is connected with the driving device to form a structure capable of moving back and forth along X direction on the linear guide rail; the first material loading mechanism is arranged at the first dispensing station, the second material loading mechanism is arranged at the chip attaching station, and the third material loading mechanism is arranged at the second dispensing station;
a first conveying manipulator is arranged beside the feeding station, a detection sensing device for detecting whether the negative film bracket is successfully absorbed or not is arranged on the first conveying manipulator, and a material sheet of the feeding station is transferred to a material sheet carrying table of a first material carrying mechanism through the first conveying manipulator; a second conveying manipulator is arranged between the first dispensing station and the chip attaching station, and the material sheets on the first material loading mechanism are transferred to a material sheet carrying table of the second material loading mechanism through the second conveying manipulator; a third conveying manipulator is arranged between the chip attaching station and the second dispensing station, and the material sheet loaded with chips on the second material loading mechanism is transferred to a material sheet carrying table of the third material loading mechanism through the third conveying manipulator; the conveying manipulator mechanism arranged at the graphite disc sheet combining station is a fourth conveying manipulator, the fourth conveying manipulator is arranged on a fourth conveying manipulator Y-axis moving mechanism to form a structure capable of reciprocating along the Y direction, the fourth conveying manipulator Y-axis moving mechanism is vertical to the linear guide rail and transversely suspended above the linear guide rail, a sheet carrying chips on the third loading mechanism is transferred onto a graphite disc loading table through the fourth conveying manipulator, and a bracket cover is taken at a sheet feeding trough to finish sheet combining action on the graphite disc loading table; a fifth conveying manipulator is arranged at the blanking station and is arranged on a Y-axis moving mechanism of the fifth conveying manipulator to form a structure capable of reciprocating along the Y direction, the Y-axis moving mechanism of the fifth conveying manipulator is vertical to the linear guide rail, and the fifth conveying manipulator is used for blanking the material sheets with the graphite disc sheets;
the first dispensing device and the second dispensing device have the same structure and comprise a dispensing controller and a dispensing head, and the dispensing heads are controlled by the dispensing controller; a plurality of dispensing heads are arranged on a dispensing lifting seat through an X-axis guide rail to form a structure capable of moving along the X direction, the dispensing lifting seat is arranged on a dispensing fixed seat through a Z-axis guide rail to form a lifting structure, a dispensing driving mechanism is arranged on the dispensing fixed seat, and the dispensing driving mechanism is connected with the dispensing lifting seat to control lifting movement of the dispensing lifting seat.
2. The semiconductor die attach all-in-one machine of claim 1, wherein: the bearing mechanism of the graphite disc carrier is the same as the bearing mechanism of the tablet carrier, and also comprises a material carrying X-axis moving seat and a material carrying Y-axis moving seat, the graphite disc carrier is arranged on the material carrying Y-axis moving seat, the material carrying Y-axis moving seat is arranged on the material carrying X-axis moving seat, a moving track perpendicular to the linear guide rail is arranged on the material carrying X-axis moving seat, the material carrying Y-axis moving seat is connected with a driving device to form a structure capable of moving back and forth along Y directions on the material carrying X-axis moving seat, and the material carrying X-axis moving seat is connected with a driving device to form a structure capable of moving back and forth along X directions on the linear guide rail.
3. The semiconductor die attach all-in-one machine of claim 1, wherein: the negative film feeding device is arranged at the feeding station, two parallel negative film bearing plates are arranged on the negative film feeding device, limiting columns used for blocking negative film supports are arranged around the two negative film bearing plates, and the two negative film supports are simultaneously sucked and transferred onto the first material loading mechanism through the first conveying mechanical arm.
4. The semiconductor die attach all-in-one machine of claim 1, wherein: the first glue dispensing station is provided with a first detection camera, the second glue dispensing station is provided with a second detection camera, and the graphite disc lamination station is provided with a third detection camera.
5. The semiconductor die attach all-in-one machine of claim 1, wherein: the chip placing device comprises a chip placing ring and a linear module X, Y moving mechanism, the chip placing ring is arranged on the linear module X, Y moving mechanism to form a position-adjustable structure, and a membrane carrying a chip is placed on the chip placing ring; the positioning detection mechanism is arranged above the chip placement ring; the chip taking device comprises a taking swing arm and a thimble mechanism, the taking swing arm is controlled by a rotary servo motor to absorb chips from left to right, up to down and through vacuum gas, the taking swing arm is horizontally arranged between a chip placing ring and a second material carrying mechanism, and the chips on a chip carrying diaphragm are transferred to the second material carrying mechanism to be attached to a material sheet through the taking swing arm; the ejector pin mechanism is arranged below the chip placement ring, and the chip bearing membrane is ejected up through the ejector pin mechanism and matched with the material taking swing arm to absorb the chip.
6. The semiconductor die attach all-in-one machine of claim 1, wherein: and a feeding and discharging device for placing a graphite disc feeding support is arranged beside the linear guide rail at the graphite disc lamination station.
7. The semiconductor die attach all-in-one machine of claim 1, wherein: the blanking station is also provided with a first graphite carrier and a second graphite carrier which are symmetrically arranged at two sides of the tail end of the linear guide rail, and a fifth conveying manipulator is used for respectively transferring the tablets on the graphite disc carrier to the first graphite carrier and the second graphite carrier for blanking.
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| CN110252596B (en) * | 2019-06-21 | 2021-11-26 | 深圳市昌富祥智能科技有限公司 | Intelligent automatic dispensing device |
| CN110246794A (en) * | 2019-06-24 | 2019-09-17 | 东莞市凯格精密机械有限公司 | LED double end chip attachment machine |
| CN110600410A (en) * | 2019-10-21 | 2019-12-20 | 广东协铖微电子科技有限公司 | Dispensing and chip feeding machine for chip frame |
| CN111081612A (en) * | 2020-01-11 | 2020-04-28 | 深圳市昌富祥智能科技有限公司 | Semiconductor annular chip mounting all-in-one machine |
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| CN113911735B (en) * | 2021-11-19 | 2023-06-27 | 博众精工科技股份有限公司 | Feeding equipment |
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| CN115763314B (en) * | 2022-11-28 | 2023-09-05 | 江苏新智达新能源设备有限公司 | High-power rectifier bridge packaging production line |
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