CN109874221A - A kind of method for generating plasma using microwave energized gas under normal temperature and pressure - Google Patents
A kind of method for generating plasma using microwave energized gas under normal temperature and pressure Download PDFInfo
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- CN109874221A CN109874221A CN201910276218.2A CN201910276218A CN109874221A CN 109874221 A CN109874221 A CN 109874221A CN 201910276218 A CN201910276218 A CN 201910276218A CN 109874221 A CN109874221 A CN 109874221A
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- microwave
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Abstract
The invention belongs to microwave plasma technical fields, more particularly to the method for microwave energized gas generation plasma is utilized under a kind of normal temperature and pressure, under the action of microwave, the high energy charged particles bombarding gas molecule inspired by Medium Wave Guide material, so that gas molecule generates plasma.The Medium Wave Guide material is nonmetallic materials.The dielectric waveguide body material is graphite felt.The dielectric waveguide body material is any one of polytetrafluoroethylene (PTFE) cylindrical rod, quartz glass bar and ZSM-5 molecular sieve.The dielectric waveguide body material is active carbon particle.The dielectric waveguide body material is graphite felt+tungsten electrode.The method that microwave energized gas provided by the invention generates plasma, has many advantages, such as that mode is simple, low energy consumption, plasma stability, there are the time is long.
Description
Technical field
The invention belongs to utilize microwave energized gas to produce under microwave plasma technical field more particularly to a kind of normal temperature and pressure
The method of raw plasma.
Background technique
Plasma is referred to as four kind substance existing forms of the nature in addition to solid-state, liquid and gaseous state.Plasma
Body is exactly ionized gas, it is the aggregate of the particles such as electronics, ion, atom, molecule, free radical.Since 18th century mid-term
Since being found, its understanding and utilization are deepened constantly, especially lower temperature plasma technology is widely used in present
Many professional domains, and become more and more important.
For low-temperature plasma exciting method, currently advanced has electron beam discharge, corona discharge, Jie using exciting method
Matter barrier discharge, glow discharge etc..
1, electron beam irradiation is a kind of NTP generation method for typically using ionising radiation principle.Electron accelerator transmitting
High-power electron beam cause the Radiolysis of radiation area molecule to react, eventually lead to the formation of NTP.Electron accelerator is electronics
The crucial processing component of beam irradiation apparatus.Electron accelerator mainly has direct power line transformer accelerator, high-power compacting
Transformer electronic accelerator, high repetition pulse accelerator, lotus root close multiplier accelerator, single-cavity resonance accelerator etc..But because of electronics
There is many problems for beam technology, because without large-scale application.
2, corona discharge is to develop on the basis of electron beam discharge, and the method does not pass through accelerator can produce height
The plasma of density successfully avoids the problems such as electron gun loss is shielded with x-ray.Corona discharge is frequently with Asymmetric Electric
Pole can form corona in atmospheric conditions.
3, glow discharge is a kind of stable self-maintained discharge, and the energy level that discharges is higher than corona discharge, while the brightness generated
Light expands to the entire discharge space of two electrodes asked, shines bright, be nonthermal plasma chemistry field be widely used one
Kind discharge type.
4, dielectric barrier discharge is a kind of gas discharge form that dielectric is inserted into discharge space, also known as noiseless to put
Electricity.This electric discharge is evenly distributed, disperse and stabilization, and the use condition of medium discharge principle is very well-to-do, does not need the environment of vacuum,
As long as under atmospheric conditions or being higher than under conditions of atmospheric pressure, it will be able to generation stabilization, highdensity plasma, thus by
To the extensive concern of domestic and international researcher.
Although the above mode of excitation has a little application in respective field, application is always due to they itself defect
It is restricted.
Summary of the invention
(1) technical problems to be solved
For existing technical problem, the present invention, which provides, to be generated under a kind of normal temperature and pressure using microwave energized gas etc.
The method of gas ions has many advantages, such as that mode is simple, and low energy consumption, plasma stability, there are the time is long.
(2) technical solution
In order to achieve the above object, the main technical schemes that the present invention uses include:
Passed through under the action of microwave under a kind of normal temperature and pressure using the method that microwave energized gas generates plasma
The high energy charged particles bombarding gas molecule that Medium Wave Guide material inspires, so that gas molecule generates plasma；
Gas is activated into plasma in microwave electric arc furnace；
Wherein, microwave electric arc furnace includes furnace body and the magnetron for being symmetricly set on furnace body two sides；
The quartz ampoule gas circuit that a front and back penetrates through is equipped in furnace body, quartz ampoule rear and front end is respectively equipped with gas outlet and air inlet
Mouthful；
Gas molecule enters quartz ampoule gas circuit by air inlet and is activated into plasma, and is discharged in gas outlet；
Medium Wave Guide material is placed in quartzy pipeline, the center of furnace body interior resonance chamber is placed in；
The microwave action that magnetron issues is on the Medium Wave Guide material at resonant cavity center, to generate energetic charged particles
Son.
Preferably, the Medium Wave Guide material is nonmetallic materials.
Preferably, the dielectric waveguide body material is graphite felt.
Preferably, the dielectric waveguide body material is in polytetrafluoroethylene (PTFE) cylindrical rod, quartz glass bar and ZSM-5 molecular sieve
It is any.
Preferably, the dielectric waveguide body material is active carbon particle.
Preferably, the dielectric waveguide body material is graphite felt+tungsten electrode.
Preferably, the power of microwave is 0-20kW；
Gas flow is 1-20L/min.
Preferably, the power of microwave is 1-10kW；
Gas flow is 1-10L/min.
Preferably, gas is any one of nitrogen, oxygen, air and argon gas.
(3) beneficial effect
The beneficial effects of the present invention are: the present invention, which provides, generates plasma using microwave energized gas under a kind of normal temperature and pressure
The method of body, has the advantages that
Microwave plasma excitated mode provided by the invention more can increase the excitation of gas molecule, ionization and dissociate
The metastable state active particle of journey, excitation is more, and reactivity is strong.
Microwave device leakage provided by the invention field is easy to shield, and microwave plasma electron density is higher.It is various forms of
Microwave discharge can realize stable discharging within the scope of low pressure, and the active particle generated when compared with low pressure discharge is not easy
It is compound, the active group service life is long, and can by rationally design in specified discharging regions.
Pressure and microwave power can be adjusted in wide range in microwave plasma reaction zone provided by the invention, technique
Control is good, easy to operate.
Microwave plasma mode of excitation provided by the invention is by gas flow, microwave discharge power, Medium Wave Guide three
Person's co- controlling, reduces energy consumption.
It is nothing that microwave induced Medium Wave Guide excited gas of the invention, which generates microwave induced electric discharge in the method for plasma,
The degree of electrode discharge, no electrode fouling and microwave-excitation plasma can change and to different medium waveguide, side
Formula is simple, low energy consumption, the plasma stability generated by microwave-excitation, long there are the time and according to there is mobility, thus
It can be in multiple fields application.
Detailed description of the invention
Fig. 1 is to be generated in the method for plasma in fact under a kind of normal temperature and pressure provided by the invention using microwave energized gas
It applies microwave-excitation argon gas in example and generates plasma schematic diagram；
Fig. 2 is to be generated in the method for plasma in fact under a kind of normal temperature and pressure provided by the invention using microwave energized gas
It applies microwave-excitation nitrogen in example and generates plasma schematic diagram；
Fig. 3 is to be generated in the method for plasma in fact under a kind of normal temperature and pressure provided by the invention using microwave energized gas
It applies microwave-excitation oxygen in example and generates plasma schematic diagram；
Fig. 4 is to be generated in the method for plasma in fact under a kind of normal temperature and pressure provided by the invention using microwave energized gas
It applies microwave-excitation air in example and generates plasma schematic diagram；
Fig. 5 is to be generated in the method for plasma in fact under a kind of normal temperature and pressure provided by the invention using microwave energized gas
It applies microwave-excitation argon gas in example and generates plasma schematic diagram；
Fig. 6 is to be generated in the method for plasma in fact under a kind of normal temperature and pressure provided by the invention using microwave energized gas
It applies microwave-excitation nitrogen in example and generates plasma schematic diagram；
Fig. 7 is to be generated in the method for plasma in fact under a kind of normal temperature and pressure provided by the invention using microwave energized gas
It applies microwave-excitation oxygen in example and generates plasma schematic diagram；
Fig. 8 is to be generated in the method for plasma in fact under a kind of normal temperature and pressure provided by the invention using microwave energized gas
It applies microwave-excitation argon gas in example and generates plasma schematic diagram；
Fig. 9 is to be generated in the method for plasma in fact under a kind of normal temperature and pressure provided by the invention using microwave energized gas
It applies microwave-excitation nitrogen in example and generates plasma schematic diagram；
Figure 10 is in the method for generate under a kind of normal temperature and pressure provided by the invention using microwave energized gas plasma
Microwave-excitation oxygen generates plasma schematic diagram in embodiment；
Figure 11 is in the method for generate under a kind of normal temperature and pressure provided by the invention using microwave energized gas plasma
Microwave-excitation air generates plasma schematic diagram in embodiment；
Figure 12 is in the method for generate under a kind of normal temperature and pressure provided by the invention using microwave energized gas plasma
Microwave-excitation argon gas generates plasma schematic diagram in embodiment；
Figure 13 is in the method for generate under a kind of normal temperature and pressure provided by the invention using microwave energized gas plasma
Microwave-excitation nitrogen generates plasma schematic diagram in embodiment；
Figure 14 is in the method for generate under a kind of normal temperature and pressure provided by the invention using microwave energized gas plasma
Microwave-excitation oxygen generates plasma schematic diagram in embodiment；
Figure 15 is in the method for generate under a kind of normal temperature and pressure provided by the invention using microwave energized gas plasma
Microwave-excitation air generates plasma schematic diagram in embodiment.
Specific embodiment
In order to preferably explain the present invention, in order to understand, by following specific embodiments, present invention work is retouched in detail
It states.
Present embodiment discloses a kind of methods for utilizing microwave energized gas to generate plasma under normal temperature and pressure, specifically
Ground, under the action of microwave, the high energy charged particles bombarding gas molecule inspired by Medium Wave Guide material, so that gas point
Son generates plasma.
Gas is activated into plasma in microwave electric arc furnace；
Wherein, microwave electric arc furnace includes furnace body and the magnetron for being symmetricly set on furnace body two sides；
The quartz ampoule gas circuit that a front and back penetrates through is equipped in furnace body, quartz ampoule rear and front end is respectively equipped with gas outlet and air inlet
Mouthful；
Gas molecule enters quartz ampoule gas circuit by air inlet and is activated into plasma, and is discharged in gas outlet；
Medium Wave Guide material is placed in quartzy pipeline, the center of furnace body interior resonance chamber is placed in；
The microwave action that magnetron issues is on the Medium Wave Guide material at resonant cavity center, to generate energetic charged particles
Son.
Specifically, Medium Wave Guide material described in the present embodiment is nonmetallic materials.
For example, dielectric waveguide body material here is graphite felt.
Alternatively, dielectric waveguide body material is appointing in polytetrafluoroethylene (PTFE) cylindrical rod, quartz glass bar and ZSM-5 molecular sieve
It is a kind of.
Certainly, dielectric waveguide body material described in the present embodiment is active carbon particle.
The dielectric waveguide body material is graphite felt+tungsten electrode.
Finally, it is noted that the power of the microwave in embodiment is 0-20kW；Gas flow is 1-20L/min.
Certainly, best microwave power is 1-10kW；Gas flow is 2-10L/min.
It is noted that gas here is any one of nitrogen, oxygen, air and argon gas.
It is noted that the microwave that magnetron issues in the present embodiment passes through rectangular waveguide feed-in resonant cavity, in resonance
The dielectric waveguide body material of certain material is put into chamber.Due to the effect of microwave, Medium Wave Guide material can excite under this condition
A large amount of high energy charged particles out, these charged particles will continue to bombardment gas with various molecule, and then it is high, steady to generate a large amount of activity
The fixed plasma spent strong, evidence and have mobility.
Here excitation apparatus is microwave electric arc furnace, including furnace body contains monosymmetric microwave source, there is one in furnace
The sealing non-metallic pipe gas circuit of front and back perforation, non-metallic pipe rear and front end is respectively equipped with gas outlet, air inlet.By the medium wave
It leads material to be placed in the nonmetallic pipeline of closing of the experimental provision, is placed in the center of resonant cavity.The experiment dress
When setting work, the microwave action that magnetron issues forms stablize in a short time on the Medium Wave Guide material at resonant cavity center
Plasma stream, to achieve the effect that good excitation of plasma.
Dielectric waveguide body material herein can be referred to as Medium Wave Guide.
[embodiment 1]
The present embodiment, which is investigated, generates plasma, argon flow 1L/ using microwave induced Medium Wave Guide excitation argon gas
Min, microwave power 2kw.
As seen from Figure 1, under an argon atmosphere, microwave induced active carbon inspires the fulgurans plasma of purple
Stream, this plasma is steady, density is big, there are the time is long.
[embodiment 2]
The present embodiment, which is investigated, generates plasma stream, nitrogen flow 1L/ using microwave induced Medium Wave Guide excitation nitrogen
Min, microwave power 2kw.
As seen from Figure 2, in a nitrogen atmosphere, microwave induced active carbon inspires purple torch-like plasma stream.
These are ion stabilized, density is big, there are the time is long.
[embodiment 3]
The present embodiment, which is investigated, generates plasma, oxygen flow 100ml/ using microwave induced Medium Wave Guide excitation oxygen
Min, microwave power 2kw.
As seen from Figure 3, under oxygen atmosphere, microwave induced active carbon inspires yellow torch-like plasma stream,
These are ion stabilized, density is big, there are the time is long.
[embodiment 4]
The present embodiment, which is investigated, generates plasma, air mass flow 1l/ using microwave induced Medium Wave Guide excitation air
Min, microwave power 2kw.
As seen from Figure 4, in air atmosphere, microwave induced active carbon inspires the bright plasma stream of white, this
Plasma is stable, density is big, there are the time is long.
[embodiment 5]
The present embodiment, which is investigated, generates plasma using microwave induced Medium Wave Guide-polytetrafluoroethylene (PTFE) cylindrical rod excitation argon gas
Body, argon flow 1L/min, microwave power 2kw.
As seen from Figure 5, under an argon atmosphere, argon can be excited under the induction of microwave under microwave induced room temperature, normal pressure
Gas produces purple lightning arcuation gas ions, this plasma is quiet, steady, density is big, energy is high, there are the time is long.
[embodiment 6]
The present embodiment, which is investigated, generates plasma, argon gas using microwave induced Medium Wave Guide-quartz glass bar excitation argon gas
Flow is 1L/min, microwave power 2kw.
As seen from Figure 6, in a nitrogen atmosphere, microwave induced quartz glass bar inspires purple lightning arcuation plasma
Body, in quartz glass nose with obvious torch-like plasma stream.This plasma is quiet, steady, density is big, energy is big,
It is long there are the time.
[embodiment 7]
The present embodiment, which is investigated, generates plasma, argon using microwave induced Medium Wave Guide-ZSM-5 molecular sieve excitation argon gas
Throughput is 1l/min, microwave power 1kw.
As seen from Figure 7, under an argon atmosphere, microwave induced ZSM-5 molecular sieve, which inspires, generates white lightning arcuation
Plasma, this plasma is quiet, steady, density is big, there are the time is long, and energy is big.
[embodiment 8]
The present embodiment, which is investigated, generates plasma, argon flow 1L/ using microwave induced Medium Wave Guide excitation argon gas
Min, microwave power 2kw.
As seen from Figure 8, under an argon atmosphere, microwave induced graphite felt inspires blue torch-shaped plasma stream,
This plasma is quiet, steady, density is big, there are the time is long, and can propagate with the direction of air-flow.
[embodiment 9]
The present embodiment, which is investigated, generates plasma stream, nitrogen flow 1L/ using microwave induced Medium Wave Guide excitation nitrogen
Min, microwave power 2kw.
As seen from Figure 9, in a nitrogen atmosphere, microwave induced graphite felt inspires the bright torch-shaped plasma of purple
Stream, this plasma is quiet, steady, density is big, there are the time is long, and can propagate with the direction of air-flow.
[embodiment 10]
The present embodiment, which is investigated, generates plasma, oxygen flow 100ml/ using microwave induced Medium Wave Guide excitation oxygen
Min, microwave power 2kw.
As seen from Figure 10, under oxygen atmosphere, microwave induced graphite felt inspires orange bright torch-shaped plasma
Body stream, this plasma is quiet, steady, density is big, there are the time is long, and can propagate with the direction of air-flow.
[embodiment 11]
The present embodiment, which is investigated, generates plasma, air mass flow 1l/ using microwave induced Medium Wave Guide excitation air
Min, microwave power 2kw.
As seen from Figure 11, in air atmosphere, microwave induced graphite felt inspires the white torch-shaped plasma of dark orange
Body stream, this plasma is quiet, steady, density is big, there are the time is long, and can propagate with the direction of air-flow.
[embodiment 12]
The present embodiment, which is investigated, generates plasma, argon flow 1L/ using microwave induced Medium Wave Guide excitation argon gas
Min, microwave power 2kw.
As seen from Figure 12, under an argon atmosphere, microwave induced tungsten electrode auxiliary graphite felt inspires lightning shape and has
The plasma of yellow halo, this plasma is quiet, steady, density is big, there are the time is long, and the electric discharge of tungsten electrode center is most strong.
[embodiment 13]
The present embodiment, which is investigated, generates plasma stream, nitrogen flow 1L/ using microwave induced Medium Wave Guide excitation nitrogen
Min, microwave power 2kw.
As seen from Figure 13, in a nitrogen atmosphere, microwave induced tungsten electrode auxiliary graphite felt inspires orange-yellow halo
Plasma, this plasma is quiet, steady, density is big, there are the time is long, and the electric discharge of tungsten electrode center is most strong.
[embodiment 14]
The present embodiment, which is investigated, generates plasma, oxygen flow 100ml/ using microwave induced Medium Wave Guide excitation oxygen
Min, microwave power 2kw.
As seen from Figure 14, under oxygen atmosphere, microwave induced tungsten electrode auxiliary graphite felt inspires orange red halo
Plasma, this plasma is quiet, steady, density is big, there are the time is long, and the electric discharge of tungsten electrode center is most strong.
[embodiment 15]
The present embodiment, which is investigated, generates plasma, air mass flow 1l/ using microwave induced Medium Wave Guide excitation air
Min, microwave power 2kw.
As seen from Figure 15, in air atmosphere, microwave induced tungsten electrode auxiliary graphite felt, which inspires, generates blood red coloured light
Dizzy this plasma of shape plasma is quiet, steady, density is big, there are the time is long, and the electric discharge of tungsten electrode center is most strong.
The above invention is merely a preferred embodiment of the present invention, and is not intended to restrict the invention.For this field
For interior technical staff, the present invention can have various variation.In every case within spirit of that invention and principle, done it is any more
Change, equivalent replacement, improvement etc., it should all be within protection scope of the present invention.
Claims (9)
1. a kind of method for generating plasma using microwave energized gas under normal temperature and pressure, which is characterized in that in the work of microwave
Under, the high energy charged particles bombarding gas molecule inspired by Medium Wave Guide material, so that gas molecule generates plasma
Body；
Gas is activated into plasma in microwave electric arc furnace；
Wherein, microwave electric arc furnace includes furnace body and the magnetron for being symmetricly set on furnace body two sides；
The quartz ampoule gas circuit that a front and back penetrates through is equipped in furnace body, quartz ampoule rear and front end is respectively equipped with gas outlet and air inlet；
Gas molecule enters quartz ampoule gas circuit by air inlet and is activated into plasma, and is discharged in gas outlet；
Medium Wave Guide material is placed in quartzy pipeline, the center of furnace body interior resonance chamber is placed in；
The microwave action that magnetron issues is on the Medium Wave Guide material at resonant cavity center, to generate high energy charged particles.
2. the method according to claim 1, wherein the Medium Wave Guide material is nonmetallic materials.
3. according to the method described in claim 2, it is characterized in that, the dielectric waveguide body material is graphite felt.
4. according to the method described in claim 2, it is characterized in that, the dielectric waveguide body material is polytetrafluoroethylene (PTFE) cylinder
Any one of stick, quartz glass bar and ZSM-5 molecular sieve.
5. according to the method described in claim 2, it is characterized in that, the dielectric waveguide body material is active carbon particle.
6. the method according to claim 1, wherein the dielectric waveguide body material is graphite felt+tungsten electrode.
7. method according to claim 1-6, which is characterized in that
The power of microwave is 0-20kW；
Gas flow is 1-20L/min.
8. the method according to the description of claim 7 is characterized in that
The power of microwave is 1-10kW；
Gas flow is 1-10L/min.
9. according to the method described in claim 8, it is characterized in that, gas is any in nitrogen, oxygen, air and argon gas
Kind.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111048224A (en) * | 2019-12-31 | 2020-04-21 | 西南科技大学 | Method for treating radioactive engine oil by inducing plasma through microwave activated carbon |
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Application publication date: 20190611 |