CN109870825A - A kind of colimated light system and laser radar based on MEMS galvanometer - Google Patents
A kind of colimated light system and laser radar based on MEMS galvanometer Download PDFInfo
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Abstract
The present invention provides a kind of colimated light system and laser radar based on MEMS galvanometer, the colimated light system based on MEMS galvanometer, comprising: laser emission element, for emitting modulation laser beam；Preposition beam shaping unit, the laser for emitting laser emission element carry out shaping；MEMS galvanometer scanning unit, for carrying out visual field scanning to object plane to be measured after carrying out tuned reflection to the light beam after the preposition beam shaping unit shaping using MEMS galvanometer；Postposition collimation unit makes edge light beam and the central light beam equivalent optical path at the entrance pupil of postposition collimation unit after MEMS galvanometer deflects for that will carry out secondary reshaping by the light beam after MEMS galvanometer scanning unit reflection.Colimated light system provided by the invention based on MEMS galvanometer can be improved the energy coupling efficiency of system, reduce beam divergence angle and system bulk, while making the range capability uniformity of central vision and peripheral field.
Description
Technical field
The present invention relates to laser radar technique fields, and in particular to a kind of colimated light system and laser thunder based on MEMS galvanometer
It reaches.
Background technique
Key core technologies one of of the laser radar technique as pilotless automobile, because of range accuracy height, response is fast, side
Tropism is strong, the advantages such as is not influenced by ground clutter, and information needed for capable of effectively providing Vehicle Decision Method and control system, becomes mesh
Preceding unmanned environment senses most efficient solution.
Currently, usually utilizing mechanical rotary device, and utilize multiple transmittings when being detected using laser radar technique
Laser and multiple pick-up probes realize multi-thread scanning, and laser is placed on the turntable that can be at the uniform velocity rotated
On, while laser transmitting laser beam scanning object is controlled, and corresponding record azimuth information, it will lead to scan frequency in this way
Low and angular resolution is poor, and system structure is also complex, influences the stability of system entirety.Depositing in response to the above problems
People are constantly looking for stability height, high resolution, the simple laser radar of structure, as a result, based on the laser radar of MEMS
It has gradually developed.
But based on the laser radar of MEMS, there are many problems, big about emission system energy coupling efficiency and emergent light spot
Small is exactly wherein one of critical problem.Since MEMS galvanometer will realize higher vibration frequency, mirror surface size is not
Can be too big, the circle that common MEMS galvanometer mirror surface is 1mm to 2mm having a size of diameter.The laser that laser issues usually requires pair
Light beam carries out collimating and correcting, but more, the hot spot that the hot spot caliber size after collimating and correcting will be big compared to MEMS galvanometer mirror surface size
It cannot all be emitted on MEMS galvanometer, result in system capacity coupling efficiency low in this way, in this way based on the laser radar of MEMS
Range capability will have a greatly reduced quality.Therefore, have on the market at present using the preferable solid state laser of beam quality as light
The scheme in source ensures that higher energy coupling efficiency in this way.But since solid state laser needs refrigeration system, usual ruler
Very little, volume is all very big, and which results in the size of entire laser radar system is very big, and solid state laser cost is relatively high
It is expensive, therefore this scheme reduces the applications of product.
Laser radar desired size very little based on MEMS can generally use the higher semiconductor laser of cost performance, but
The eigen astigmatism of semiconductor laser leads to its fast and slow axis light-emitting surface not in the same plane, when carrying out beam path alignment shaping,
Cannot be orthopedic by the beam collimation of fast and slow axis simultaneously, it will lead to hot spot diverging at a distance in this way, as a result ranging energy
Power is insufficient, and systemic resolution is low.
Summary of the invention
For the defects in the prior art, the present invention provides a kind of colimated light system and laser radar based on MEMS galvanometer,
The present invention can be improved the energy coupling efficiency of system, reduce beam divergence angle, while make central vision and peripheral field
Range capability uniformity.
To achieve the above object, the present invention the following technical schemes are provided:
In a first aspect, the present invention provides a kind of colimated light systems based on MEMS galvanometer, comprising:
Laser emission element, for emitting modulation laser beam；
Preposition beam shaping unit, the laser for emitting laser emission element carry out shaping；
MEMS galvanometer scanning unit, for using MEMS galvanometer to the light beam after the preposition beam shaping unit shaping into
Visual field scanning is carried out to object plane to be measured after row tuned reflection；
Postposition collimation unit, for secondary reshaping will to be carried out by the light beam after MEMS galvanometer scanning unit reflection,
Make edge light beam and the central light beam equivalent optical path at the entrance pupil of postposition collimation unit after MEMS galvanometer deflects.
Preferably, the postposition collimation unit includes: double-curved surface mirror；
The double-curved surface mirror makes for that will carry out secondary reshaping by the light beam after MEMS galvanometer scanning unit reflection
Edge light beam and the central light beam equivalent optical path at the entrance pupil of double-curved surface mirror after the deflection of MEMS galvanometer.
Preferably, laser emission element includes: semiconductor laser and semiconductor laser driving unit；The semiconductor
The light beam that laser drive unit is used to issue the semiconductor laser is modulated.
Preferably, the preposition beam shaping unit includes: shaping lens；The shaping lens are used to send out the laser
The light beam for penetrating unit sending carries out shaping.
Preferably, the shaping lens are by least a piece of aspherical or free form surface lens or multi-disc ordinary lens group
At.
Preferably, the preposition beam shaping unit further include: be encapsulated in micro- at laser emission element beam exit mouth
Lens；The light beam that the lenticule is used to issue the laser emission element carries out preliminary shaping.
Preferably, the preposition beam shaping unit further include: field stop；The field stop is for after limiting shaping
Beam and focus size, so that outgoing beam is all incident on MEMS galvanometer, intercept extra stray light.
Preferably, the MEMS galvanometer scanning unit includes: MEMS vibration mirror scanning component and MEMS turntable driving component；Institute
MEMS turntable driving component is stated for MEMS vibration mirror scanning component described in drive control；The driving of the MEMS turntable driving component
Mode includes one of Piezoelectric Driving, electrothermal drive, electrostatic drive and electromagnetic drive or a variety of.
Preferably, the MEMS vibration mirror scanning component is made of monolithic or multi-disc MEMS vibrating mirror array, the monolithic or more
Piece MEMS vibrating mirror array is scanned reflection to the light beam after shaping respectively according to corresponding scanning drive signal.
Second aspect, the present invention also provides a kind of laser radars, including the collimation recited above based on MEMS galvanometer
System.
As shown from the above technical solution, the colimated light system provided by the invention based on MEMS galvanometer is provided with postposition and collimates
Unit makes inclined by MEMS galvanometer for that will carry out secondary reshaping by the light beam after MEMS galvanometer scanning unit reflection
Edge light beam and the central light beam equivalent optical path at the entrance pupil of postposition collimation unit after turning.As it can be seen that the present invention can be improved is
The energy coupling efficiency of system reduces beam divergence angle, so that central vision is consistent with the range capability of peripheral field, improves and is
It unites in the detectivity of peripheral field.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the present invention
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the structural schematic diagram of the colimated light system provided in an embodiment of the present invention based on MEMS galvanometer；
Fig. 2 is the structural schematic diagram provided in an embodiment of the present invention that postposition collimation unit function is realized using double-curved surface mirror；
Fig. 3 is the operation principle schematic diagram of the colimated light system provided in an embodiment of the present invention based on MEMS galvanometer；
Fig. 4 is principle effect of the colimated light system provided in an embodiment of the present invention based on MEMS galvanometer on slow-axis direction
Figure；
Fig. 5 is principle effect of the colimated light system provided in an embodiment of the present invention based on MEMS galvanometer on fast axis direction
Figure；
Wherein, the label meaning above in each figure is as follows:
101 indicate laser emission element；102 indicate preposition beam shaping unit；103 indicate MEMS galvanometer unit；104 tables
Show postposition collimation unit；105 indicate target determinand；201 indicate semiconductor laser；202 indicate lenticule；203 indicate whole
Shape lens；204 indicate field stop；205 indicate MEMS galvanometer；206 indicate double-curved surface mirror；207 indicate target object plane to be measured.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a kind of colimated light systems based on MEMS galvanometer, and referring to Fig. 1, which includes:
Laser emission element 101, preposition beam shaping unit 102, MEMS galvanometer scanning unit 103 and postposition collimation unit 104,
In:
Laser emission element 101, for emitting modulation laser beam；
Preposition beam shaping unit 102, the laser for emitting laser emission element 101 carry out shaping；
MEMS galvanometer scanning unit 103, for using MEMS galvanometer to preposition 102 shaping of beam shaping unit after
Light beam carries out visual field scanning to object plane to be measured after carrying out tuned reflection；
Postposition collimation unit 104, it is secondary for that will be carried out by the light beam after the MEMS galvanometer scanning unit 103 reflection
Shaping makes edge light beam and the central light beam equivalent optical path at the entrance pupil of postposition collimation unit after MEMS galvanometer deflects.
Further, the laser emission element 101 includes: semiconductor laser and semiconductor laser driving unit；
The light beam that the semiconductor laser driving unit is used to issue the semiconductor laser is modulated.
Further, the preposition beam shaping unit 102 includes: shaping lens；The shaping lens are used for described
The light beam that semiconductor laser 201 issues carries out shaping.Preferably, the shaping lens are by least a piece of aspherical or freely bent
The lens or multi-disc ordinary lens in face form.
Further, in order to which the light beam issued to the laser emission element 101 carries out preliminary shaping, the preposition light beam
Shaping unit 102 further include: the lenticule being encapsulated at laser emission element exit portal；The lenticule is used for Laser emission
The light beam that unit issues carries out preliminary shaping.
Further, in order to limit the beam and focus size after shaping, outgoing beam is enable all to be incident on MEMS vibration
On mirror, extra stray light, the preposition beam shaping unit 102 further include: field stop are intercepted；The field stop is used for
Beam and focus size after limiting shaping, enables outgoing beam to be all incident on MEMS galvanometer, intercepts extra stray light.
Further, the MEMS galvanometer scanning unit 103 includes: MEMS vibration mirror scanning component and MEMS scanning driving part
Part, the MEMS turntable driving component is for MEMS vibration mirror scanning component described in drive control；The MEMS turntable driving component
Driving method include one of Piezoelectric Driving, electrothermal drive, electrostatic drive and electromagnetic drive or a variety of.It is understood that
It is that, according to the size of when actual scanning range, the MEMS vibration mirror scanning component can be by monolithic or multi-disc MEMS galvanometer battle array
Column composition, the monolithic or multi-disc MEMS vibrating mirror array respectively carry out the light beam after shaping according to corresponding scanning drive signal
Scanning reflection.
Referring to Fig. 1, the laser issued by laser emission element 101 is whole by preposition beam shaping unit 102 progress light beam
After shape, it is incident on MEMS galvanometer scanning unit 103, after the laser warp after 103 tuned reflection of MEMS galvanometer scanning unit
It sets collimation unit 104 and carries out shaping again, the beam exit by second of shaping to target determinand 105 forms one in advance
If the hot spot of size, after MEMS galvanometer scanning unit 103 is swung according to certain signal rule, keep emergent light spot to be measured in target
Regular sensing point is formed on object 105, that is, completes the scanning to target determinand 105.
It should be noted that since laser emission element uses semiconductor laser, light beam provided in this embodiment
Collimating and correcting principle is to be handled in two directions, i.e., the fast axle of semiconductor laser and slow axis respectively carry out light beam quasi-
Straight shaping.
By above description it is found that the colimated light system provided in this embodiment based on MEMS galvanometer, is provided with postposition and collimates
Unit makes inclined by MEMS galvanometer for that will carry out secondary reshaping by the light beam after MEMS galvanometer scanning unit reflection
Edge light beam and the central light beam equivalent optical path at the entrance pupil of postposition collimation unit after turning.As it can be seen that the present invention can be improved is
The energy coupling efficiency of system reduces beam divergence angle, so that the range capability uniformity of central vision and peripheral field, is improved
Detectivity of the system in peripheral field.
In a preferred embodiment of the invention, as shown in Fig. 2, the postposition collimation unit 104 is preferably using multiple song
Face mirror realizes that specifically, the double-curved surface mirror will be for that will carry out two by the light beam after MEMS galvanometer scanning unit reflection
Secondary shaping makes edge light beam and the central light beam equivalent optical path at the entrance pupil of double-curved surface mirror after MEMS galvanometer deflects.
Further, the operation principle schematic diagram of the colimated light system shown in Figure 3 based on MEMS galvanometer.Light beam is from partly
Conductor laser 201 is emitted, and into lenticule 202, enters shaping lens 203 by the light beam of primary compression, light beam is saturating from shaping
Mirror 203 enters MEMS galvanometer 205 after being emitted, and before being incident on MEMS galvanometer 205, light beam intercepts side by field stop 204
The stray light of edge.Light beam enters double-curved surface mirror 206 after being reflected by MEMS galvanometer 205, carries out secondary reshaping, makes by MEMS galvanometer
Edge light beam and central light beam after the deflection equivalent optical path at the entrance pupil of double-curved surface mirror.Final light beam goes out from double-curved surface mirror 206
It penetrates and reaches on target object plane 207 to be measured.MEMS galvanometer 205 is in this course according to the swing of certain rule, thus complete
At the scanning to target object plane to be measured 207.
Further, principle effect picture of the colimated light system shown in Figure 4 based on MEMS galvanometer on slow-axis direction.
The laser beam that semiconductor laser 201 emits after the lenticule 202 of preposition shaping unit, tentatively pressed by beam divergence angle
Contracting improves the energy into next shaping lens 203.After entering shaping lens 203 by the light beam of primary compression, due at this time
The light beam of fast axis direction is collimated to be shaped to directional light, and the slow axis photosurface of semiconductor laser is in preceding, fast axle photosurface
Rear, the distance of the photosensitive identity distance shaping lens 203 of slow axis is farther compared to fast axle photosurface, therefore slow axis forms converging beam, and
The smallest convergent point is formed on MEMS galvanometer 205.At the same time, light beam is before being incident on MEMS galvanometer 205, by a view
The stray light of field diaphragm 204, beam edge part is intercepted, and improves beam quality.
As shown in Figure 4, in slow-axis direction, light beam becomes divergent beams after MEMS galvanometer 205, if untreated,
In distant location, beam divergence angle is big, and light spot energy is not concentrated, and energy efficiency is low.In consideration of it, light beam is passing through MEMS galvanometer
After 205, into double-curved surface mirror 206, double-curved surface mirror 206 can be equivalent on slow-axis direction it is a piece of or one group only on slow-axis direction
There is the cylindrical mirror of curvature, second of collimating and correcting is carried out to hot spot.In this way, light beam is forming diverging after double-curved surface mirror 206
The lesser hot spot in angle is emitted on target object plane 207 to be measured.
Further, principle effect picture of the colimated light system shown in Figure 5 based on MEMS galvanometer on fast axis direction.
On fast axis direction, the laser that semiconductor laser 201 issues, equally by primary compression, makes its light beam after lenticule 202
Energy enters shaping lens 203 as far as possible.Light beam is being formed collimated light beam after shaping lens 203 and is being incident on
On MEMS galvanometer 205.Light beam is being emitted to double-curved surface mirror 206 after MEMS galvanometer 205.
As shown in Figure 5, on fast axis direction, double-curved surface mirror 206 can be equivalent to a curved plate glass, MEMS galvanometer
The convergent point of hot spot is at the center of curvature of double-curved surface mirror 206 on 205.On fast axis direction, due to the swing of MEMS galvanometer, light
Beam passes through each region of double-curved surface mirror 206 and is scanned, and forms central vision and peripheral field.Due to double-curved surface mirror 206
Curved shape, make the equivalent optical path of the hot spot eye point on its various pieces distance MEMS galvanometer, the light of visual field each in this way
Aberration is also in the same size, and some advantages that arise therefrom is that the central vision of hot spot is consistent with the angle of divergence of peripheral field, to mention
High detectivity of the system in peripheral field, the range capability uniformity of each visual field.
As shown in Figure 5, on fast axis direction, the hot spot being emitted from MEMS galvanometer 205 is at peripheral field compared to non-curved
Bent plate, light can be incident on plate faster, therefore the size of double-curved surface mirror 206 can be smaller.MEMS galvanometer 205 needs
The swing of big visual field is carried out, therefore is size maximum one in the present embodiment in the double-curved surface mirror 206 after MEMS galvanometer 205
Module, so 206 size of double-curved surface mirror reduces, the volume of whole system also and then reduces accordingly.
Analysis according to Fig. 3~Fig. 5 and above is it is found that (face is swept from MEMS galvanometer in the first face of the double-curved surface mirror
Retouch the one side of the light beam of unit injection) it can be equivalent to cylinder, only a direction (fast axis direction) of light beam is handled；It is described
The second face (one side opposite with the first face) of double-curved surface mirror cylinder can be equivalent to respectively in both direction (fast axle and slow axis),
The both direction of light is handled respectively, wherein the second face is equivalent to curvature and the first face of cylinder on fast axis direction
Curvature is identical.
It can be known by being analyzed above, since the beam divergence angle of semiconductor laser is larger, therefore be usually required rear
Face adds a beam shaping unit, but since the mirror surface size of MEMS galvanometer is smaller, and the subsequent beam shaping of semiconductor laser
For unit for the beam energy of collection semiconductor laser, bore will not be too small, and light beam is resulted in be incident on MEMS galvanometer in this way
When upper, only the energy of fraction is received by MEMS galvanometer, and most of energy does not impinge on MEMS galvanometer, energy coupling effect
Rate is low.To solve this problem, the light beam after beam shaping unit can be presented by convergent manner by corresponding light path design
State, and convergent point is formed on MEMS galvanometer, most of energy acceptance can thus be utilized, improve energy coupling effect
Rate.But in this case, it will become since the hot spot being incident on MEMS galvanometer is converging beam when leaving MEMS galvanometer
At the light beam of diverging, if be directly emitted at a distance, the angle of divergence is very big, and energy is not concentrated, if cooperating other reception systems, letter
It number can be very low.In order to solve the problems, such as that light beam angle of divergence after MEMS galvanometer is big, the prior art generally can be in MEMS galvanometer
Plano-convex cylindrical lens are set afterwards or other plane mirrors carry out secondary reshaping, but since MEMS galvanometer needs to carry out the scanning of big visual field,
So the size of plano-convex cylindrical lens in a scanning direction after MEMS galvanometer can be very in order to all collect and be emitted scanning ray
Greatly, this point is unsatisfactory for requirement of the laser radar to size.In addition, plano-convex cylindrical lens can not also solve light beam on fast and slow axis simultaneously
The problem of collimating and correcting.
For this purpose, the embodiment of the present invention after MEMS galvanometer plus increase a double-curved surface mirror, for the hot spot to slow-axis direction into
Second of shaping of row, makes beam divergence angle become smaller, and distant place light spot energy is concentrated.Simultaneously on fast axis direction, due to double-curved surface mirror
Curved shape, make the equivalent optical path of the hot spot eye point on its various pieces distance MEMS galvanometer, some advantages that arise therefrom is
The central vision of hot spot and the angle of divergence of peripheral field are consistent, so that system is improved in the detectivity of peripheral field, so that
The range capability uniformity of each visual field.Simultaneously as double-curved surface mirror is the curved shape in both sides, the light of such peripheral field
Postposition collimation unit can quickly be entered, this curved shape reduces the size of postposition collimation unit, while also just subtracting
The small volume of whole system.
As it can be seen that the colimated light system provided in this embodiment based on MEMS galvanometer, it is secondary whole to carry out light beam using double-curved surface mirror
Shape greatlies simplify the size and structure of laser radar system, reduces the weight and volume of laser radar, while making system
Whole angular resolution with higher and scan frequency, and be easily integrated are conducive to push laser radar technique to small-sized
Change, lightness and integrated direction develop.
Another embodiment of the present invention additionally provides a kind of laser radar, including described in above-described embodiment based on MEMS galvanometer
Colimated light system.
Laser radar provided in this embodiment as include above-described embodiment described in the colimated light system based on MEMS galvanometer,
Therefore its technical principle is similar with beneficial effect, and details are not described herein again.
The above examples are only used to illustrate the technical scheme of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation
Technical solution documented by example is modified or equivalent replacement of some of the technical features；And these are modified or replace
It changes, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of colimated light system based on MEMS galvanometer characterized by comprising
Laser emission element, for emitting modulation laser beam；
Preposition beam shaping unit, the laser for emitting laser emission element carry out shaping；
MEMS galvanometer scanning unit, it is humorous for being carried out using MEMS galvanometer to the light beam after the preposition beam shaping unit shaping
Visual field scanning is carried out to object plane to be measured after vibration reflection；
Postposition collimation unit, for by by the MEMS galvanometer scanning unit reflection after light beam carry out secondary reshaping, make through
Edge light beam and the central light beam equivalent optical path at the entrance pupil of postposition collimation unit after crossing the deflection of MEMS galvanometer.
2. system according to claim 1, which is characterized in that the postposition collimation unit includes: double-curved surface mirror；
The double-curved surface mirror be used for by by the MEMS galvanometer scanning unit reflection after light beam carry out secondary reshaping, make by
Edge light beam and the central light beam equivalent optical path at the entrance pupil of double-curved surface mirror after the deflection of MEMS galvanometer.
3. system according to claim 1, which is characterized in that laser emission element includes: semiconductor laser and partly leads
Body laser driving unit；The light beam that the semiconductor laser driving unit is used to issue the semiconductor laser into
Row modulation.
4. system according to claim 1, which is characterized in that the preposition beam shaping unit includes: shaping lens；Institute
It states light beam of the shaping lens for issuing to the laser emission element and carries out shaping.
5. system according to claim 4, which is characterized in that the shaping lens are by least a piece of aspherical or freely bent
The lens or multi-disc ordinary lens in face form.
6. system according to claim 4, which is characterized in that the preposition beam shaping unit further include: be encapsulated in sharp
Lenticule at light emitting unit beam exit mouth；The light beam that the lenticule is used to issue the laser emission element carries out
Preliminary shaping.
7. the system according to claim 4 or 6, which is characterized in that the preposition beam shaping unit further include: visual field light
Door screen；The field stop enables outgoing beam to be all incident on MEMS galvanometer for limiting the beam and focus size after shaping
On, intercept extra stray light.
8. system according to claim 1, which is characterized in that the MEMS galvanometer scanning unit includes: that MEMS galvanometer is swept
Retouch component and MEMS turntable driving component；The MEMS turntable driving component is for MEMS vibration mirror scanning portion described in drive control
Part；The driving method of the MEMS turntable driving component includes in Piezoelectric Driving, electrothermal drive, electrostatic drive and electromagnetic drive
It is one or more.
9. system according to claim 8, which is characterized in that the MEMS vibration mirror scanning component is by monolithic or multi-disc MEMS
Vibrating mirror array composition, the monolithic or multi-disc MEMS vibrating mirror array are according to corresponding scanning drive signal respectively to the light after shaping
Beam is scanned reflection.
10. a kind of laser radar, which is characterized in that including the standard as described in any one of claims 1 to 9 based on MEMS galvanometer
Direct line system.
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| CN111175765A (en) * | 2019-12-12 | 2020-05-19 | 深圳市镭神智能***有限公司 | Duplex bearing mirror and laser radar that shakes |
| CN111308725A (en) * | 2020-04-02 | 2020-06-19 | 杭州欧镭激光技术有限公司 | Light beam shaping device for laser radar and shaping method of far-field light spot |
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| WO2021184398A1 (en) * | 2020-03-17 | 2021-09-23 | 金华市蓝海光电技术有限公司 | Laser ranging device |
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| WO2021184398A1 (en) * | 2020-03-17 | 2021-09-23 | 金华市蓝海光电技术有限公司 | Laser ranging device |
| CN111308725A (en) * | 2020-04-02 | 2020-06-19 | 杭州欧镭激光技术有限公司 | Light beam shaping device for laser radar and shaping method of far-field light spot |
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| WO2021196193A1 (en) * | 2020-04-03 | 2021-10-07 | 深圳市速腾聚创科技有限公司 | Lidar and self-driving device |
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