CN109870205B - Microfluidic flow meter and manufacturing method thereof - Google Patents
Microfluidic flow meter and manufacturing method thereof Download PDFInfo
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Abstract
The invention also provides a micro-fluid flowmeter and a manufacturing method thereof, comprising the following steps: the semiconductor substrate is provided with a first temperature sensor, a second temperature sensor, a heating unit and a signal processing circuit, wherein the first temperature sensor and the second temperature sensor are arranged on two sides of the heating unit; the micro-channel passes through the first temperature sensor, the heating unit and the second temperature sensor; and the cavity is formed on the back surface of the semiconductor substrate and corresponds to the heating unit in position. The invention can realize on-chip detection of the micro-fluid flow of the micro-fluid control system, realize the fully integrated design of the sensor, the signal processing circuit and the micro-channel and increase the integration level of the micro-fluid control chip. The micro-fluid flow meter can complete the measurement of the flow direction and the flow speed of the fluid in the micro-channel, and the cavity can prevent the heat from losing through the silicon substrate, thereby increasing the sensitivity of flow speed detection. The invention adopts the circuit structure design of common mode negative feedback to increase the consistency of the sensor and reduce the noise.
Description
Technical Field
The invention belongs to the field of design and manufacture of MEMS sensors, and particularly relates to a micro-fluidic flow meter based on a CMOS-MEMS process and a manufacturing method thereof.
Background
The microfluidic chip technology integrates basic operation units of sample preparation, reaction, separation, detection and the like in biological, chemical and medical analysis processes into a micron-scale chip, and automatically completes the whole analysis process. Due to its great potential in the fields of biology, chemistry, medicine and the like, the method has been developed into a new research field crossing the disciplines of biology, chemistry, medicine, fluid, electronics, materials, machinery and the like.
Microfluidic chips (microfluidic chips) are a hot spot area for the development of current micro Total Analysis Systems (minidesigned Total Analysis Systems). The micro-fluidic chip analysis takes a chip as an operation platform, simultaneously takes analytical chemistry as a basis, takes a micro-electromechanical processing technology as a support, takes a micro-pipeline network as a structural characteristic, takes life science as a main application object at present, and is the key point of the development of the field of the current micro total analysis system. Its goal is to integrate the functions of the whole laboratory, including sampling, diluting, adding reagents, reacting, separating, detecting, etc., on a microchip, and to be used many times.
The micro-fluidic chip is a main platform for realizing the micro-fluidic technology. The device is characterized in that the effective structure (channels, reaction chambers and other functional parts) for containing the fluid is at least in one latitude in micron scale. Due to the micro-scale structure, the fluid exhibits and develops specific properties therein that differ from those of the macro-scale. Thus developing unique assay-generated properties.
The micro-fluidic chip has the characteristics of controllable liquid flow, extremely less consumed samples and reagents, ten-fold and hundred-fold improvement of analysis speed and the like, can simultaneously analyze hundreds of samples in a few minutes or even shorter time, and can realize the pretreatment and the separation of the samples on line.
The micro-fluidic chip is an integrated chip for controlling liquid in the field of MEMS, and the commonly used micro-fluidic devices at present comprise a micro pump, a micro valve, a micro mixer and a micro reaction cavity, but lack an on-chip integrated micro-fluidic flowmeter.
Based on the above, the invention provides a micro-fluid flow meter based on CMOS-MEMS technology, which can realize the full integration of CMOS circuits, sensors and micro-channels and complete the pico-liter flow measurement.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, it is an object of the present invention to provide a microfluidic flow meter and a method for making the same, which solves the problem of the prior art that lacks an on-chip integrated microfluidic flow meter.
To achieve the above and other related objects, the present invention provides a method for manufacturing a microfluidic flow meter, including: 1) providing a semiconductor substrate, and manufacturing a first temperature sensor, a second temperature sensor, a heating unit and a signal processing circuit in the semiconductor substrate based on a CMOS (complementary metal oxide semiconductor) process, wherein the first temperature sensor and the second temperature sensor are arranged on two sides of the heating unit; 2) fabricating a micro channel through the first temperature sensor, the heating unit, and the second temperature sensor based on a MEMS process; and 3) etching a cavity corresponding to the heating unit on the back of the semiconductor substrate to reduce the heat loss of the heating unit.
Preferably, when the flow rate of the fluid in the microchannel is detected, the heating unit is turned on, the heat transfer between the first temperature sensor and the second temperature sensor is proportional to the flow rate of the fluid in the microchannel, and the flow rate value of the fluid is obtained based on the difference between the first temperature sensor and the second temperature sensor.
Further, the signal processing circuit is used for processing signals of the first temperature sensor, the heating unit and the second temperature sensor and performing operation to obtain a flow value of the fluid.
Preferably, the signal processing circuit includes: the temperature sensor comprises a first amplifying circuit, a second amplifying circuit, an adder, a subtracter and a delay circuit, wherein the first temperature sensor and the second temperature sensor are respectively used for amplifying and then carrying out signal operation, a subtraction signal of the subtracter is output to be a fluid flow signal, the polarity of the subtraction signal represents the fluid flow direction, the absolute value represents the fluid flow, and an addition signal of the adder is subjected to 180-degree delay through the delay circuit and then controls the heating unit in a feedback mode to form common-mode negative feedback. The signal processing circuit is led out through a pad 108 located on the semiconductor substrate.
Preferably, step 2) comprises: 2-1) forming a side wall material of a micro-channel on the semiconductor substrate; 2-2) carrying out patterning treatment on the side wall material to form a micro-groove side wall passing through the first temperature sensor, the heating unit and the second temperature sensor; and 2-3) covering a dry film structure on the side wall of the micro groove to form the micro channel.
Preferably, the material of the sidewalls of the microchannel comprises one of the group consisting of polymer, silicon and glass.
Preferably, the side wall material of the microchannel contains photosensitive polymer, and the step 2-2) adopts a photoetching process to pattern the photosensitive polymer.
Further, the photosensitive polymer comprises a photosensitive polyimide.
The present invention also provides a microfluidic flow meter comprising: the semiconductor device comprises a semiconductor substrate, a first temperature sensor, a second temperature sensor, a heating unit and a signal processing circuit, wherein the first temperature sensor and the second temperature sensor are arranged on two sides of the heating unit; a microchannel passing through the first temperature sensor, the heating unit, and the second temperature sensor; and the cavity is formed on the back surface of the semiconductor substrate and corresponds to the heating unit in position so as to reduce the heat loss of the heating unit.
Preferably, when the flow rate of the fluid in the microchannel is detected, the heating unit is turned on, the heat transfer between the first temperature sensor and the second temperature sensor is proportional to the flow rate of the fluid in the microchannel, and the flow rate value of the fluid is obtained based on the difference between the first temperature sensor and the second temperature sensor.
Preferably, the signal processing circuit is configured to perform signal processing on the first temperature sensor, the heating unit, and the second temperature sensor, and perform an operation to obtain a flow rate value of the fluid.
Preferably, the signal processing circuit includes: the temperature sensor comprises a first amplifying circuit, a second amplifying circuit, an adder, a subtracter and a delay circuit, wherein the first temperature sensor and the second temperature sensor are respectively used for amplifying and then carrying out signal operation, a subtraction signal of the subtracter is output to be a fluid flow signal, the polarity of the subtraction signal represents the fluid flow direction, the absolute value represents the fluid flow, and an addition signal of the adder is subjected to 180-degree delay through the delay circuit and then controls the heating unit in a feedback mode to form common-mode negative feedback.
Preferably, the microchannel comprises: the micro-groove side walls are formed on the semiconductor substrate, and a first temperature sensor, a second temperature sensor and a heating unit are arranged between the micro-groove side walls; and the dry film structure covers the side wall of the micro groove to form the micro channel.
Further, the micro-trench sidewalls comprise one of the group consisting of a polymer, silicon, and glass, the polymer comprising a photosensitive polyimide.
As described above, the microfluidic flow meter and the manufacturing method thereof of the present invention have the following advantages:
the invention can realize on-chip detection of the micro-fluid flow of the micro-fluid control system, realize the fully integrated design of the sensor, the signal processing circuit and the micro-channel and increase the integration level of the micro-fluid control chip.
The micro-fluid flow meter can complete the measurement of the flow direction and the flow speed of the fluid in the micro-channel, the increase of the thickness of the cavity can prevent the heat from losing through the silicon substrate, and the heat can be diffused to the temperature sensor and the fluid in the channel as much as possible, so that the sensitivity of flow detection is increased, and the heat of the heating unit can also increase the sensitivity of flow speed detection.
The invention adopts the circuit structure design of common mode negative feedback to increase the consistency of the sensor and reduce the noise.
Drawings
Fig. 1 shows a schematic diagram of the structure of a microfluidic flow meter according to the present invention.
Fig. 2 is a schematic circuit diagram of a signal processing circuit of the microfluidic flow meter according to the present invention.
Fig. 3 to 8 are schematic structural diagrams of steps of a method for manufacturing a microfluidic flow meter according to the present invention, in which fig. 3 and 4 are schematic structural diagrams of a cross section at a-a 'in fig. 1, and fig. 5 to 8 are schematic structural diagrams of a cross section at B-B' in fig. 1.
Description of the element reference numerals
101 semiconductor substrate
102 signal processing circuit
103 first temperature sensor
104 second temperature sensor
105 heating unit
106 cavity
107 micro-channel
108 bonding pad
109 sidewall material
110 micro-trench sidewalls
111 dry film structure
201 first amplifying circuit
202 second amplifying circuit
203 subtracter
204 adder
205 delay circuit
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1 to 8. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the drawings only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of each component in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.
As shown in fig. 1 to 8, wherein fig. 3 and 4 are schematic cross-sectional views a-a 'in fig. 1, and fig. 5 to 8 are schematic cross-sectional views B-B' in fig. 1, the present embodiment provides a method for manufacturing a microfluidic flow meter, the method for manufacturing the microfluidic flow meter includes:
as shown in fig. 1 to 4, step 1) is performed first, a semiconductor substrate 101 is provided, and a first temperature sensor 103, a second temperature sensor 104, a heating unit 105 and a signal processing circuit 102 are fabricated in the semiconductor substrate 101 based on a CMOS process, wherein the first temperature sensor 103 and the second temperature sensor 104 are disposed on two sides of the heating unit 105.
The semiconductor substrate 101 includes a silicon substrate, a germanium substrate, a silicon carbide substrate, and the like, and in this embodiment, the semiconductor substrate 101 includes a silicon substrate.
The first temperature sensor 103 and the second temperature sensor 104 adopt a 1:48 array triode as a temperature sensing module to convert a temperature signal into a voltage signal, and the heating unit 105 adopts a small-impedance resistor to directly connect with an external voltage source signal. The embodiment can flexibly and accurately control the fluid by driving the microfluid and detecting the flow.
The signal processing circuit 102 is configured to perform signal processing on the first temperature sensor 103, the heating unit 105, and the second temperature sensor 104, and perform operation to obtain a flow rate value of the fluid.
As shown in fig. 2, the signal processing circuit 102 includes: the temperature sensor comprises a first amplifying circuit 201, a second amplifying circuit 202, an adder 204, a subtractor 203 and a delay circuit 205, wherein the first amplifying circuit 201 and the second amplifying circuit 202 of the first temperature sensor 103 and the second temperature sensor 104 respectively perform signal operation after amplification, a subtraction signal of the subtractor 203 is output as a fluid flow signal, the polarity of the subtraction signal represents the fluid flow direction, the absolute value represents the fluid flow, and an addition signal of the adder 204 is delayed by 180 degrees through the delay circuit 205 and then feedback-controls the heating unit 105 to form common-mode negative feedback. The present invention implements on-chip integration of the CMOS signal processing circuit 102 and employs a common mode feedback circuit to reduce noise and external interference.
When the flow rate of the fluid in the micro-channel 107 is detected, the heating unit 105 is turned on, the heat transfer between the first temperature sensor 103 and the second temperature sensor 104 is proportional to the flow rate of the fluid in the micro-channel 107, and the flow rate value of the fluid is obtained based on the difference between the first temperature sensor 103 and the second temperature sensor 104.
As shown in fig. 1 and 5 to 7, step 2) is performed to fabricate a micro channel 107 passing through the first temperature sensor 103, the heating unit 105 and the second temperature sensor 104 based on the MEMS process.
The step 2) comprises the following steps:
as shown in fig. 5, step 2-1) is performed first to form a sidewall material 109 of the micro-channel 107 on the semiconductor substrate 101.
The sidewall material 109 of the microchannel 107 comprises one of the group consisting of polymer, silicon, and glass.
Preferably, the sidewall material 109 of the microchannel 107 comprises a photosensitive polymer, and in this embodiment, the sidewall material 109 of the microchannel 107 comprises a photosensitive polyimide.
As shown in fig. 6, step 2-2) is then performed to pattern the sidewall material 109 to form micro-trench sidewalls 110 passing through the first temperature sensor 103, the heating unit 105 and the second temperature sensor 104.
Step 2-2) performing a patterning process on the photosensitive polymer by using a photolithography process to obtain a micro-trench sidewall 110 passing through the first temperature sensor 103, the heating unit 105, and the second temperature sensor 104.
The invention adopts photosensitive polymer, can obtain the graphical polymer material only by one-time photoetching process, has very simple process and high process precision, and can effectively reduce the process cost.
As shown in fig. 7, step 2-3) is finally performed to cover the dry film structure 111 on the side wall 110 of the micro-groove to form the micro-channel 107, where two ends of the micro-channel 107 are a fluid inlet and a fluid outlet, respectively. The microchannel 107 may be combined with a micropump to form a liquid driving unit with flow detection.
As shown in fig. 1 and 8, step 3) is finally performed to etch a cavity 106 corresponding to the position of the heating unit 105 on the back surface of the semiconductor substrate 101, so as to reduce the heat loss of the heating unit 105.
In this embodiment, the area of the cavity 106 is larger than the area of the heating unit 105, so as to further reduce the heat loss of the heating unit 105.
Preferably, the thickness of the semiconductor substrate 101 sandwiched by the cavity 106 and the heating unit 105 is not more than 50 nm.
As shown in fig. 1 to 2, the present embodiment also provides a microfluidic flow meter including: semiconductor substrate 101, microchannel 107, and cavity 106.
The semiconductor substrate 101 has a first temperature sensor 103, a second temperature sensor 104, a heating unit 105, and a signal processing circuit 102, wherein the first temperature sensor 103 and the second temperature sensor 104 are disposed on both sides of the heating unit 105.
The micro channel 107 passes through the first temperature sensor 103, the heating unit 105, and the second temperature sensor 104. The microchannel 107 includes: micro-trench sidewalls 110 formed on the semiconductor substrate 101, wherein the micro-trench sidewalls 110 include a first temperature sensor 103, a second temperature sensor 104 and a heating unit 105 therebetween; and a dry film structure 111 covering the micro-groove sidewall 110 to form the micro-channel 107. Further, the micro-trench sidewalls 110 comprise one of the group consisting of a polymer comprising a photosensitive polyimide, silicon, and glass.
The cavity 106 is formed on the back surface of the semiconductor substrate 101 and corresponds to the heating unit 105 in position, so as to reduce the heat loss of the heating unit 105.
The signal processing circuit 102 is configured to perform signal processing on the first temperature sensor 103, the heating unit 105, and the second temperature sensor 104, and perform operation to obtain a flow rate value of the fluid.
The signal processing circuit 102 includes: the temperature sensor comprises a first amplifying circuit 201, a second amplifying circuit 202, an adder 204, a subtractor 203 and a delay circuit 205, wherein the first amplifying circuit 201 and the second amplifying circuit 202 of the first temperature sensor 103 and the second temperature sensor 104 respectively perform signal operation after amplification, a subtraction signal of the subtractor 203 is output as a fluid flow signal, the polarity of the subtraction signal represents the fluid flow direction, the absolute value represents the fluid flow, and an addition signal of the adder 204 is delayed by 180 degrees through the delay circuit 205 and then feedback-controls the heating unit 105 to form common-mode negative feedback.
When the flow rate of the fluid in the micro-channel 107 is detected, the heating unit 105 is turned on, the heat transfer between the first temperature sensor 103 and the second temperature sensor 104 is proportional to the flow rate of the fluid in the micro-channel 107, and the flow rate value of the fluid is obtained based on the difference between the first temperature sensor 103 and the second temperature sensor 104.
As described above, the microfluidic flow meter and the manufacturing method thereof of the present invention have the following advantages:
the invention can realize on-chip detection of the micro-fluid flow of the micro-fluid control system, realize the fully integrated design of the sensor, the signal processing circuit 102 and the micro-channel and increase the integration level of the micro-fluid control chip.
The micro-fluid flow meter of the invention can complete the measurement of the flow direction and the flow speed of the fluid in the micro-channel, the increase of the thickness of the cavity 106 can prevent the heat loss through the silicon substrate, and the heat can be diffused to the temperature sensor and the fluid in the channel as much as possible, thereby increasing the sensitivity of flow detection, and the increase of the heat of the heating unit 105 can also increase the sensitivity of flow detection.
The invention adopts the circuit structure design of common mode negative feedback to increase the consistency of the sensor and reduce the noise.
Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (12)
1. A method of fabricating a microfluidic flow meter, the method comprising:
1) providing a semiconductor substrate, and manufacturing a first temperature sensor, a second temperature sensor, a heating unit and a signal processing circuit in the semiconductor substrate based on a CMOS (complementary metal oxide semiconductor) process, wherein the first temperature sensor and the second temperature sensor are arranged on two sides of the heating unit;
2) fabricating a micro channel through the first temperature sensor, the heating unit, and the second temperature sensor based on a MEMS process; and
3) etching a cavity corresponding to the heating unit on the back of the semiconductor substrate to reduce the heat loss of the heating unit;
the signal processing circuit includes: the temperature sensor comprises a first amplifying circuit, a second amplifying circuit, an adder, a subtracter and a delay circuit, wherein the first temperature sensor and the second temperature sensor are respectively amplified by the first amplifying circuit and the second amplifying circuit and then perform signal operation, a subtraction signal of the subtracter is output to be a fluid flow signal, the polarity of the subtraction signal represents the fluid flow direction, the absolute value represents the fluid flow, and an addition signal of the adder is subjected to 180-degree delay by the delay circuit and then controls the heating unit in a feedback mode to form common-mode negative feedback.
2. The method of making a microfluidic flow meter according to claim 1, wherein: when the flow of the fluid in the microchannel is detected, the heating unit is started, the heat transmission of the first temperature sensor and the second temperature sensor is in direct proportion to the flow of the fluid in the microchannel, and the flow value of the fluid is obtained based on the difference value of the first temperature sensor and the second temperature sensor.
3. The method of making a microfluidic flow meter according to claim 2, wherein: the signal processing circuit is used for processing signals of the first temperature sensor, the heating unit and the second temperature sensor and performing operation to obtain a flow value of the fluid.
4. The method of making a microfluidic flow meter according to claim 1, wherein: the step 2) comprises the following steps:
2-1) forming a side wall material of a micro-channel on the semiconductor substrate;
2-2) carrying out patterning treatment on the side wall material to form a micro-groove side wall passing through the first temperature sensor, the heating unit and the second temperature sensor; and
2-3) covering a dry film structure on the side wall of the micro groove to form the micro channel.
5. The method of making a microfluidic flow meter according to claim 4, wherein: the side wall material of the microchannel comprises one of the group consisting of polymer, silicon and glass.
6. The method of making a microfluidic flow meter according to claim 4, wherein: the side wall material of the microchannel comprises photosensitive polymer, and the step 2-2) adopts photoetching process to carry out patterning treatment on the photosensitive polymer.
7. The method of making a microfluidic flow meter according to claim 6, wherein: the photosensitive polymer comprises a photosensitive polyimide.
8. A microfluidic flow meter, comprising:
a semiconductor substrate having a first temperature sensor, a second temperature sensor, a heating unit, and a signal processing circuit, wherein the first temperature sensor and the second temperature sensor are disposed on both sides of the heating unit, the signal processing circuit includes: the temperature sensor comprises a first amplifying circuit, a second amplifying circuit, an adder, a subtracter and a delay circuit, wherein the first temperature sensor and the second temperature sensor are respectively amplified by the first amplifying circuit and the second amplifying circuit and then perform signal operation, a subtraction signal of the subtracter is output as a fluid flow signal, the polarity of the subtraction signal represents the fluid flow direction, the absolute value represents the fluid flow, and an addition signal of the adder is subjected to 180-degree delay by the delay circuit and then controls the heating unit in a feedback mode to form common-mode negative feedback;
a microchannel passing through the first temperature sensor, the heating unit, and the second temperature sensor; and
and the cavity is formed on the back surface of the semiconductor substrate and corresponds to the heating unit in position so as to reduce the heat loss of the heating unit.
9. The microfluidic flow meter of claim 8, wherein: when the flow of the fluid in the microchannel is detected, the heating unit is started, the heat transmission of the first temperature sensor and the second temperature sensor is in direct proportion to the flow of the fluid in the microchannel, and the flow value of the fluid is obtained based on the difference value of the first temperature sensor and the second temperature sensor.
10. The microfluidic flow meter of claim 9, wherein: the signal processing circuit is used for processing signals of the first temperature sensor, the heating unit and the second temperature sensor and performing operation to obtain a flow value of the fluid.
11. The microfluidic flow meter of claim 8, wherein: the microchannel includes:
the micro-groove side walls are formed on the semiconductor substrate, and a first temperature sensor, a second temperature sensor and a heating unit are arranged between the micro-groove side walls; and
and the dry film structure is covered on the side wall of the micro groove to form the micro channel.
12. The microfluidic flow meter of claim 11, wherein: the micro-trench sidewalls comprise one of the group consisting of a polymer, silicon, and glass, the polymer comprising a photosensitive polyimide.
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| CN110531953B (en) * | 2019-08-28 | 2021-06-15 | 厦门大学 | Microfluidic logical operation unit and thin film lens focusing system |
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| CN114100716B (en) * | 2021-12-01 | 2023-04-21 | 上海天马微电子有限公司 | Microfluidic device and driving method thereof |
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