CN109863609A - 氮化物半导体元件及其制造方法与所应用的封装结构 - Google Patents
氮化物半导体元件及其制造方法与所应用的封装结构 Download PDFInfo
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- CN109863609A CN109863609A CN201780045923.0A CN201780045923A CN109863609A CN 109863609 A CN109863609 A CN 109863609A CN 201780045923 A CN201780045923 A CN 201780045923A CN 109863609 A CN109863609 A CN 109863609A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 1072
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 1037
- 238000004519 manufacturing process Methods 0.000 title description 15
- 230000004888 barrier function Effects 0.000 claims abstract description 434
- 239000000463 material Substances 0.000 claims description 234
- 229910052782 aluminium Inorganic materials 0.000 claims description 159
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 135
- 239000004411 aluminium Substances 0.000 claims description 133
- 239000011777 magnesium Substances 0.000 claims description 52
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 41
- 229910052749 magnesium Inorganic materials 0.000 claims description 41
- 239000003989 dielectric material Substances 0.000 claims description 40
- 229910052738 indium Inorganic materials 0.000 claims description 23
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 20
- 239000000758 substrate Substances 0.000 abstract description 134
- 239000000872 buffer Substances 0.000 abstract description 71
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 128
- 229910052751 metal Inorganic materials 0.000 description 93
- 239000002184 metal Substances 0.000 description 93
- 229910002601 GaN Inorganic materials 0.000 description 91
- 229910045601 alloy Inorganic materials 0.000 description 90
- 239000000956 alloy Substances 0.000 description 90
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 82
- 239000000843 powder Substances 0.000 description 82
- 239000002390 adhesive tape Substances 0.000 description 45
- 239000012535 impurity Substances 0.000 description 44
- 239000010949 copper Substances 0.000 description 41
- 229910052802 copper Inorganic materials 0.000 description 38
- 239000010931 gold Substances 0.000 description 36
- 229910052709 silver Inorganic materials 0.000 description 34
- 239000010936 titanium Substances 0.000 description 34
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 33
- 239000004020 conductor Substances 0.000 description 33
- 229910052737 gold Inorganic materials 0.000 description 33
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 30
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 30
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 30
- 229910052719 titanium Inorganic materials 0.000 description 29
- 230000003287 optical effect Effects 0.000 description 28
- 239000011651 chromium Substances 0.000 description 27
- 239000010948 rhodium Substances 0.000 description 27
- 229910052721 tungsten Inorganic materials 0.000 description 26
- 229910052804 chromium Inorganic materials 0.000 description 24
- 229910052750 molybdenum Inorganic materials 0.000 description 24
- 229910052759 nickel Inorganic materials 0.000 description 24
- 229910052763 palladium Inorganic materials 0.000 description 24
- 229910052697 platinum Inorganic materials 0.000 description 24
- 229910052703 rhodium Inorganic materials 0.000 description 24
- 150000004645 aluminates Chemical class 0.000 description 22
- 239000002223 garnet Substances 0.000 description 22
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 21
- 239000013078 crystal Substances 0.000 description 21
- 238000005476 soldering Methods 0.000 description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 17
- 229910052718 tin Inorganic materials 0.000 description 17
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 16
- 229910052733 gallium Inorganic materials 0.000 description 16
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 15
- 229920005989 resin Polymers 0.000 description 15
- 239000011347 resin Substances 0.000 description 15
- 239000011787 zinc oxide Substances 0.000 description 15
- 239000004332 silver Substances 0.000 description 13
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 229910002651 NO3 Inorganic materials 0.000 description 11
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 11
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 11
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 11
- 238000004020 luminiscence type Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 239000004642 Polyimide Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 10
- 238000010276 construction Methods 0.000 description 10
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical group [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 10
- 229920001721 polyimide Polymers 0.000 description 10
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000009877 rendering Methods 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 241001025261 Neoraja caerulea Species 0.000 description 8
- 230000007547 defect Effects 0.000 description 8
- 239000003822 epoxy resin Substances 0.000 description 8
- 229920000647 polyepoxide Polymers 0.000 description 8
- 230000003746 surface roughness Effects 0.000 description 8
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 7
- 229910001152 Bi alloy Inorganic materials 0.000 description 7
- -1 InGaN (InGaN) Chemical compound 0.000 description 7
- 229910001128 Sn alloy Inorganic materials 0.000 description 7
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 7
- 229910052797 bismuth Inorganic materials 0.000 description 7
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000003292 glue Substances 0.000 description 7
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 7
- 238000002844 melting Methods 0.000 description 7
- 229910001092 metal group alloy Inorganic materials 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 239000010955 niobium Substances 0.000 description 7
- 230000003247 decreasing effect Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 230000010287 polarization Effects 0.000 description 6
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 229910004205 SiNX Inorganic materials 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- JYMITAMFTJDTAE-UHFFFAOYSA-N aluminum zinc oxygen(2-) Chemical compound [O-2].[Al+3].[Zn+2] JYMITAMFTJDTAE-UHFFFAOYSA-N 0.000 description 5
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 229910052758 niobium Inorganic materials 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 229910052715 tantalum Inorganic materials 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 230000005641 tunneling Effects 0.000 description 5
- 238000005286 illumination Methods 0.000 description 4
- 239000004615 ingredient Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 3
- 229910052596 spinel Inorganic materials 0.000 description 3
- 239000011029 spinel Substances 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 2
- QYHNIMDZIYANJH-UHFFFAOYSA-N diindium Chemical compound [In]#[In] QYHNIMDZIYANJH-UHFFFAOYSA-N 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910004613 CdTe Inorganic materials 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 241001062009 Indigofera Species 0.000 description 1
- 241000254158 Lampyridae Species 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
一种氮化物半导体元件(100),其包括P型氮化物半导体(101)、N型氮化物半导体(102)、氮化物半导体量子井发光结构(103)、基板(104)以及缓冲层(105)。氮化物半导体量子井发光结构(103)位于P型氮化物半导体(101)以及N型氮化物半导体(102)之间,且包括多个井层(103A)以及多个阻挡层(103B)。各个井层(103A)以及各个阻挡层(103B)彼此交错配置。多个阻挡层(103B)包括配置于最接近P型氮化物半导***置(101)的第一阻挡层(103B1)、配置于最接近N型氮化物半导体(102)位置的第二阻挡层(103B2)以及多个第三阻挡层(103B3)。第一阻挡层(103B1)的厚度小于100埃。各个第三阻挡层(103B1)位于相邻的两个井层(103A)之间。缓冲层(105)位于N型氮化物半导体(102)以及基板(104)之间。
Description
PCT国内申请,说明书已公开。
Claims (20)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662379738P | 2016-08-25 | 2016-08-25 | |
US62/379,738 | 2016-08-25 | ||
US201762471946P | 2017-03-15 | 2017-03-15 | |
US62/471,946 | 2017-03-15 | ||
PCT/CN2017/098626 WO2018036513A1 (zh) | 2016-08-25 | 2017-08-23 | 氮化物半导体元件及其制造方法与所应用的封装结构 |
Publications (1)
Publication Number | Publication Date |
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CN109863609A true CN109863609A (zh) | 2019-06-07 |
Family
ID=61246393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201780045923.0A Pending CN109863609A (zh) | 2016-08-25 | 2017-08-23 | 氮化物半导体元件及其制造方法与所应用的封装结构 |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN109863609A (zh) |
TW (1) | TWI668885B (zh) |
WO (1) | WO2018036513A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110137323A (zh) * | 2019-05-29 | 2019-08-16 | 福建兆元光电有限公司 | 带有AlN缓冲层的LED芯片及制造方法 |
TWI730460B (zh) * | 2019-10-18 | 2021-06-11 | 進化光學有限公司 | 高出光效率的背接觸式全彩led顯示面板及其製造方法 |
TWI730472B (zh) * | 2019-10-25 | 2021-06-11 | 進化光學有限公司 | 使用雷射切割道絕緣之全彩led顯示面板及其製造方法 |
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- 2017-08-07 TW TW106126619A patent/TWI668885B/zh not_active IP Right Cessation
- 2017-08-23 CN CN201780045923.0A patent/CN109863609A/zh active Pending
- 2017-08-23 WO PCT/CN2017/098626 patent/WO2018036513A1/zh active Application Filing
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CN103972334A (zh) * | 2014-05-14 | 2014-08-06 | 湘能华磊光电股份有限公司 | Led外延层结构、生长方法及具有该结构的led芯片 |
WO2016002419A1 (ja) * | 2014-07-04 | 2016-01-07 | シャープ株式会社 | 窒化物半導体発光素子 |
CN104766914A (zh) * | 2015-04-20 | 2015-07-08 | 电子科技大学 | 一种高取光率的高压led芯片结构 |
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