CN109860005B - Non-magnetic lead connector and manufacturing method thereof - Google Patents

Non-magnetic lead connector and manufacturing method thereof Download PDF

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Publication number
CN109860005B
CN109860005B CN201811141632.4A CN201811141632A CN109860005B CN 109860005 B CN109860005 B CN 109860005B CN 201811141632 A CN201811141632 A CN 201811141632A CN 109860005 B CN109860005 B CN 109860005B
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lead
fixing seat
welding
weldment
face
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CN109860005A (en
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段玉宏
汪江
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Gansu Hongguang Electronic Co ltd
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Gansu Hongguang Electronic Co ltd
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Abstract

The invention belongs to the technical field of manufacturing methods of vacuum electronic components, and particularly relates to a nonmagnetic lead joint and a manufacturing method thereof, wherein the nonmagnetic lead joint comprises a lead, a lead ceramic bead and a lead fixing seat, the lead ceramic bead with metalized outer edge is placed on a welding positioning die, a lead is inserted into a small hole on the lead ceramic bead, and after insulating glaze powder is filled into a solder groove of the lead ceramic bead, the lead ceramic bead is placed into a hydrogen furnace for welding to obtain a lead combined weldment; and then the lead fixing seat is placed on the auxiliary welding mould, the lead combination is inserted into the lead fixing seat, the lower end face of the lead combination is placed on the stepped surface in the middle of the lead fixing seat, the metalized outer edge of the lead ceramic bead is tightly matched with the upper inner wall of the stepped surface of the lead fixing seat, palladium-silver-copper welding flux is placed at the sealing part, and the lead is placed into a hydrogen furnace for welding in a suspended state. The invention solves the connection problem of circuits inside and outside the ultrahigh frequency electrostatic amplifier tube, has the characteristics of good air tightness, high mechanical strength, non-magnetic conductivity and high cleanliness, also meets the temperature gradient requirement of secondary welding, and has good welding performance with oxygen-free copper.

Description

Non-magnetic lead connector and manufacturing method thereof
Technical Field
The invention belongs to the technical field of manufacturing methods of vacuum electronic components, and particularly relates to a non-magnetic lead joint and a manufacturing method thereof.
Background
The magnetron has 2 leads (cathode and filament), and the leads are connected with an external circuit mostly by adopting a mode of directly spot welding a cable. The ultra-high frequency electrostatic amplifier has a small tube core, 11 external leads are required to be connected with an external circuit, the aperture of the interface is phi 5.5mm and phi 9mm, and the process requirements cannot be met by the conventional direct spot welding method. Therefore, a metal lead with the diameter of 0.4mm and a sealing piece (a non-magnetic lead joint) made of ceramics are adopted as transition.
The nonmagnetic lead joint is a tie for connecting each electrode, anode and filament in the ultrahigh frequency electrostatic amplifier tube injection frequency amplifier assembly, the cathode fixing seat assembly and the anode assembly with an external power supply system. A non-magnetic lead connector not only ensures the circuit path inside and outside the tube, but also ensures the insulation of each circuit, and further ensures the vacuum tightness of the ultrahigh frequency electrostatic amplifier.
Metals and 95 ceramics are typically needle sealed using a sintered metal powder process. The 95 porcelain sealing surface is metallized and is sealed with metal in a hydrogen furnace by utilizing a special welding mould. After the lead and the lead ceramic bead are sealed by the method, the ceramic sealing piece is cracked due to the fact that the thermal expansion coefficients of the metal tungsten and the 95 ceramic are not matched, the lead ceramic bead and the lead fixing seat are sealed by the method, firstly, the conventional sealing alloy 4J33 is adopted as the lead fixing seat, after sealing, the situation that the periphery of the lead is easily fragile and the pipe leaks air is found, and the 4J33 belongs to a magnetic conductive material, influences the peripheral magnetic field greatly, and the electrical property cannot reach the standard. And then, the conventional molybdenum material is used as a lead material, the non-magnetic ceramic seal alloy 4J80 is used as a lead fixing seat for sealing, so that the air leakage rate of the joint is up to more than 90%, and most of ceramic parts are cracked through observation by a high-power optical microscope.
Disclosure of Invention
Aiming at the problems and the defects in the prior art, the invention provides the nonmagnetic lead joint which can solve the connection problem of circuits inside and outside the ultrahigh frequency electrostatic amplifier tube and has the characteristics of good air tightness, high mechanical strength, no magnetic conduction and high cleanliness.
Another object of the present invention is to provide a method for manufacturing the nonmagnetic lead joint.
In order to achieve the purpose, the invention provides the following technical scheme:
a nonmagnetic lead joint comprises a lead, lead ceramic beads and a lead fixing seat, wherein the lead ceramic beads with metalized outer edges are placed on a welding positioning die, the lead is inserted into a small hole on the lead ceramic beads to form a lead combination, and insulating glaze powder is filled into a solder groove of the lead ceramic beads and then the lead combination is placed into a hydrogen furnace to be welded to obtain a lead combination welding part; the lead fixing seat is placed on the auxiliary welding die, the lead combined weldment is inserted into the lead fixing seat, the lower end face of the lead combined weldment is placed on the stepped step face in the middle of the lead fixing seat, the lower end face of the lead combined weldment is the end face of the lead combined weldment, provided with a solder groove, the outer edge of a lead ceramic bead is tightly matched with the upper inner wall of the stepped face of the lead fixing seat, palladium-silver-copper solder is placed at a sealing part formed by the lead ceramic bead and the lead fixing seat, and the lead is placed in a hydrogen furnace for welding in a suspension state.
Furthermore, the lead is made of high-temperature molybdenum wires.
Further, the lead wire ceramic bead is composed of 95% Al2O3And (3) processing the ceramic.
Further, the lead fixing seat is processed and manufactured by MoCu25Ni 5.
The invention adopts another technical scheme that the manufacturing method of the nonmagnetic lead joint is carried out according to the following steps:
step 1: performing conventional cleaning and purifying treatment on the lead, the lead porcelain beads and the lead fixing seat;
step 2: metallizing the outer edge of the lead wire ceramic bead processed in the step 1;
and step 3: placing the lead wire ceramic beads in the step 2 on a welding positioning die, and inserting a lead wire into a small hole on the lead wire ceramic beads to obtain a lead wire combination;
and 4, step 4: mixing insulating glaze powder with absolute ethyl alcohol to form suspension, wherein the insulating glaze powder comprises the following components in parts by weight: 60-62 parts of quartz sand; 17-19 parts of alumina; 9-11 parts of calcium oxide and 8-10 parts of magnesium oxide;
and 5: dripping the turbid liquid in the step 4 into a solder groove of the lead porcelain beads, and after the absolute ethyl alcohol is volatilized, dripping the turbid liquid into the insulating glaze powder again to fill the solder groove; when the insulating glaze powder is attached to the lead part above the solder bath or other parts outside the solder bath, the lead combination and the welding positioning die are required to be placed into a 100W ultrasonic cleaning machine for cleaning, and then the operation is carried out again according to the step;
step 6: after the absolute ethyl alcohol is volatilized, putting the lead combination and the welding positioning die into a hydrogen furnace, introducing wet hydrogen, heating the hydrogen furnace to 1030 +/-5 ℃, preserving the heat for 4-5min, and cooling to room temperature to obtain a lead combination weldment;
and 7: taking out the lead combined weldment from the hydrogen furnace in the step 6, and detecting the leakage of the lead combined weldment by using a helium mass spectrometer leak detector; if the lead combined weldment leaks air, repeating the steps 5-6;
and 8: placing a lead fixing seat on a welding auxiliary die, inserting a lead combined weldment qualified in leak detection into the lead fixing seat to obtain a lead joint weldment, placing the lower end face of the lead combined weldment on a stepped step face in the middle of the lead fixing seat, wherein the lower end face of the lead combined weldment is the end face of a solder groove arranged on the lead combined weldment, enabling the metalized outer edge of a lead ceramic bead to be tightly matched with the upper inner wall of the stepped face of the lead fixing seat, placing palladium-silver-copper solder at a sealing part, placing the lead joint weldment and the welding auxiliary die into a hydrogen furnace under the condition of ensuring that a lead is suspended, introducing wet hydrogen, heating the hydrogen furnace to 940 +/-10 ℃, preserving heat for 2-3min, and cooling to room temperature to obtain a lead joint;
and step 9: and (5) after taking out the lead connector from the hydrogen furnace in the step 8, using a helium mass spectrometer leak detector to detect the leak, and warehousing after the leak is qualified.
Compared with the prior art, the invention has the beneficial effects that:
1) the invention solves the connection problem of the circuits inside and outside the ultrahigh frequency electrostatic amplifier tube, and has the characteristics of good air tightness, high mechanical strength, non-magnetic conductivity and high cleanliness.
2) The invention also meets the temperature gradient requirement of re-welding and has good welding performance with oxygen-free copper.
3) The invention can be popularized to other miniaturized multi-electrode vacuum devices.
Drawings
FIG. 1 is a schematic view of a lead assembly welding assembly according to the present invention;
fig. 2 is a schematic view of a lead tab soldering assembly.
In the figure: 1. lead wire, 2 lead wire ceramic beads, 21 solder groove, 3 lead wire fixing seat, 4 welding positioning die, 5 lead wire combination welding piece, 6 welding auxiliary die and 7 sealing part.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
As shown in FIGS. 1-2, a nonmagnetic lead joint comprises a lead 1 made of high temperature molybdenum wire, 95% Al2O3Lead wire ceramic beads 2 made of ceramics and a lead wire fixing seat 3 made of MoCu25Ni5, wherein the lead wire ceramic beads 2 with metalized outer edges are placed on a welding positioning die 4 and are arranged in small holes on the lead wire ceramic beads 2Inserting a lead 1 to form a lead combination, filling insulating glaze powder in a solder groove 21 of a lead porcelain bead 2, and then putting the lead combination into a hydrogen furnace for welding to obtain a lead combination weldment 5; the lead fixing seat 3 is placed on the auxiliary welding die 6, the lead combined weldment 5 is inserted into the lead fixing seat 3, the lower end face of the lead combined weldment 5 is placed on a step face in the middle of the lead fixing seat 3, the lower end face of the lead combined weldment 5 is the end face of a welding flux groove 21 formed in the lead combined weldment 5, the outer edge of a lead ceramic bead 2 is tightly matched with the upper inner wall of the step face of the lead fixing seat 3, palladium-silver-copper welding flux is placed at a sealing part 7 formed by the lead ceramic bead 2 and the lead fixing seat 3, and the lead 1 is placed in a hydrogen furnace for welding in a suspended state.
The invention also provides a manufacturing method of the nonmagnetic lead joint, which is specifically carried out according to the following steps:
step 1: carrying out conventional cleaning and purifying treatment on the lead 1, the lead porcelain beads 2 and the lead fixing seat 3;
step 2: metallizing the outer edge of the lead wire ceramic bead 2 treated in the step 1;
and step 3: placing the lead wire ceramic bead 2 in the step 2 on a welding positioning die 4, and inserting a lead wire 1 into a small hole on the lead wire ceramic bead 2 to obtain a lead wire combination;
and 4, step 4: mixing insulating glaze powder with absolute ethyl alcohol to form suspension, wherein the insulating glaze powder comprises the following components in parts by weight: 60-62 parts of quartz sand; 17-19 parts of alumina; 9-11 parts of calcium oxide and 8-10 parts of magnesium oxide;
and 5: dripping the suspension obtained in the step 4 into a solder groove 21 of the lead porcelain bead 2, and after the absolute ethyl alcohol is volatilized, dripping the suspension again until the insulating glaze powder fills the solder groove 21;
step 6: after the absolute ethyl alcohol is volatilized, putting the lead combination and the welding positioning die 4 into a hydrogen furnace, introducing wet hydrogen, heating the hydrogen furnace to 1030 +/-5 ℃, preserving the heat for 4-5min, and cooling to room temperature to obtain a lead combination weldment 5;
and 7: taking out the lead combined weldment 5 from the hydrogen furnace in the step 6, and detecting the leakage of the lead combined weldment 5 by using a helium mass spectrometer leak detector;
and 8: placing a lead fixing seat 3 on a welding auxiliary die 6, inserting a qualified lead combined weldment 5 subjected to leak detection into the lead fixing seat 3 to obtain a lead joint weldment, placing the lower end face of the lead combined weldment 5 on a stepped step face in the middle of the lead fixing seat 3, wherein the lower end face of the lead combined weldment 5 is the end face of a solder groove 21 arranged on the lead combined weldment 5, enabling the metalized outer edge of a lead porcelain bead 2 to be tightly matched with the upper inner wall of the stepped face of the lead fixing seat 3, placing palladium-silver-copper solder at a sealing part 7, placing the lead joint weldment and the welding auxiliary die 6 into a hydrogen furnace under the condition that a lead 1 is suspended, introducing wet hydrogen, heating the hydrogen furnace to 940 +/-10 ℃, preserving the temperature for 2-3min, and cooling to room temperature to obtain a lead joint;
and step 9: and (5) after taking out the lead connector from the hydrogen furnace in the step 8, using a helium mass spectrometer leak detector to detect the leak, and warehousing after the leak is qualified.
The preparation method of the insulating glaze powder used in the step 4 comprises the following steps:
firstly, cleaning a ball milling bottle, a porcelain ball and a high-alumina sagger, and completely drying for later use; respectively mixing 60-62 parts of quartz sand, 17-19 parts of aluminum oxide, 9-11 parts of calcium oxide and 8-10 parts of magnesium oxide according to the weight part ratio to obtain a raw material, mixing ceramic balls and the raw material according to the weight ratio of 1:3, putting the mixture into a dried ball milling bottle for mixing and milling for 2.0-2.5 hours to obtain a mixed abrasive material, discharging the mixed abrasive material, and sieving the mixed abrasive material with a 50-mesh sieve to be smelted; loading the mixed grinding material into a high-alumina sagger, placing the sagger into a hearth of an electric furnace, heating up to 1280-; mixing the smelting material and the porcelain ball according to the weight ratio of 1:3, grinding for 22-24h, and sieving with a 50-mesh sieve to obtain the finished product of the insulating glaze powder.
In step 5, when the insulating glaze powder is attached to the portion of the lead 1 above the solder bath 21 or other portions outside the solder bath 21, the lead assembly and the soldering positioning die 4 must be cleaned in a 100W ultrasonic cleaning machine and then re-operated according to the procedure.
Wherein, if the lead combined weldment 5 leaks air in step 7, the steps 5-6 are repeated.

Claims (7)

1. A nonmagnetic lead joint comprises a lead (1), lead porcelain beads (2) and a lead fixing seat (3), and is characterized in that the lead porcelain beads (2) with metalized outer edges are placed on a welding positioning die (4), the lead (1) is inserted into a small hole on the lead porcelain beads (2) to form a lead assembly, and insulating glaze powder is filled into a solder groove (21) of the lead porcelain beads (2) and then the lead assembly is placed into a hydrogen furnace for welding to obtain a lead assembly weldment (5); the lead fixing seat (3) is placed on the auxiliary welding die (6), the lead combined weldment (5) is inserted into the lead fixing seat (3), the lower end face of the lead combined weldment (5) is placed on a step face in the middle of the lead fixing seat (3), the lower end face of the lead combined weldment (5) is the end face of a welding groove (21) arranged on the lead combined weldment (5), the outer edge of the lead ceramic bead (2) is tightly matched with the upper inner wall of the step face of the lead fixing seat (3), palladium-silver-copper welding flux is placed at a sealing part (7) formed by the lead ceramic bead (2) and the lead fixing seat (3), and the lead (1) is placed in a hydrogen furnace for welding in a suspended state.
2. A nonmagnetic wire joint as claimed in claim 1, characterized in that the wire (1) is made of high-temperature molybdenum wire.
3. A nonmagnetic wire joint as claimed in claim 1, characterized in that said wire ceramic bead (2) consists of 95% Al2O3And (3) processing the ceramic.
4. A nonmagnetic lead joint as claimed in claim 1, characterized in that said lead holder (3) is machined from MoCu25Ni 5.
5. A method of manufacturing a nonmagnetic lead joint as set forth in claim 1, characterized in that the method is carried out according to the following steps:
step 1: the lead (1), the lead porcelain beads (2) and the lead fixing seat (3) are cleaned and purified conventionally;
step 2: metallizing the outer edge of the lead wire ceramic bead (2) treated in the step (1);
and step 3: placing the lead wire ceramic beads (2) in the step (2) on a welding positioning die (4), and inserting the lead wires (1) into small holes in the lead wire ceramic beads (2) to obtain a lead wire combination;
and 4, step 4: mixing insulating glaze powder with absolute ethyl alcohol to form suspension, wherein the insulating glaze powder comprises the following components in parts by weight: 60-62 parts of quartz sand; 17-19 parts of alumina; 9-11 parts of calcium oxide and 8-10 parts of magnesium oxide;
and 5: dripping the suspension in the step 4 into a solder groove (21) of the lead porcelain beads (2), and after the absolute ethyl alcohol is volatilized, dripping the suspension again until the insulating glaze powder fills the solder groove (21);
step 6: after the absolute ethyl alcohol is volatilized, putting the lead combination and the welding positioning die (4) into a hydrogen furnace, introducing wet hydrogen, heating the hydrogen furnace to 1030 +/-5 ℃, preserving the heat for 4-5min, and cooling to room temperature to obtain a lead combination weldment (5);
and 7: taking out the lead combined weldment (5) from the hydrogen furnace in the step 6, and carrying out leak detection on the lead combined weldment (5) by using a helium mass spectrometer leak detector;
and 8: placing a lead fixing seat (3) on a welding auxiliary die (6), inserting a lead combined weldment (5) qualified in leak detection into the lead fixing seat (3) to obtain a lead joint weldment, placing the lower end face of the lead combined weldment (5) on a step face in the middle of the lead fixing seat (3), wherein the lower end face of the lead combined weldment (5) is the end face of the lead combined weldment (5) provided with a solder groove (21), enabling the metalized outer edge of a lead porcelain bead (2) to be tightly matched with the upper inner wall of the step face of the lead fixing seat (3), placing palladium-silver-copper solder at a sealing part (7), placing the lead joint weldment and the welding auxiliary die (6) into a hydrogen furnace under the condition that the lead (1) is suspended, introducing wet hydrogen, heating the hydrogen furnace to 940 +/-10 ℃, preserving the temperature for 2-3min, and cooling to room temperature to obtain the lead joint;
and step 9: and (5) after taking out the lead connector from the hydrogen furnace in the step 8, using a helium mass spectrometer leak detector to detect the leak, and warehousing after the leak is qualified.
6. The method for manufacturing a nonmagnetic lead joint according to claim 5, wherein in step 5, when the insulating glaze powder is attached to the portion of the lead (1) above the solder bath (21) or other portions outside the solder bath (21), the lead assembly and the soldering positioning mold (4) must be cleaned in a 100W ultrasonic cleaner and then re-operated according to step 5.
7. The method for manufacturing a nonmagnetic lead joint according to claim 5, wherein in step 7, if the lead assembly weldment (5) leaks, the steps 5 to 6 are repeated.
CN201811141632.4A 2018-09-28 2018-09-28 Non-magnetic lead connector and manufacturing method thereof Active CN109860005B (en)

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CN115036159A (en) * 2022-07-12 2022-09-09 宜兴市伊特瓷件厂 Air-tight insulating assembly for power device and preparation method thereof

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1638004A (en) * 2003-12-30 2005-07-13 Lg电子株式会社 High voltage input apparatus for magnetron
EP1517351A3 (en) * 2003-09-19 2008-02-20 Matsushita Electric Industrial Co., Ltd. Magnetron cathode assembly
CN201060840Y (en) * 2007-05-08 2008-05-14 广东格兰仕集团有限公司 Main body of vacuum tube cathode support
CN201153355Y (en) * 2008-01-23 2008-11-19 安徽华东光电技术研究所 Miniature pin sealing construction of ceramic body
GB2478990A (en) * 2010-03-26 2011-09-28 E2V Tech Magnetron with high gfrequency cathode heater power supply
CN202564170U (en) * 2011-12-28 2012-11-28 中国电子科技集团公司第十二研究所 Miniaturization structure of collector leading wire insulator
CN105355526A (en) * 2015-11-21 2016-02-24 安徽华东光电技术研究所 Miniature collector lead wire sealing method and seal structure
CN105355339A (en) * 2015-10-23 2016-02-24 中国电子科技集团公司第五十五研究所 Ceramic insulator

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1517351A3 (en) * 2003-09-19 2008-02-20 Matsushita Electric Industrial Co., Ltd. Magnetron cathode assembly
CN1638004A (en) * 2003-12-30 2005-07-13 Lg电子株式会社 High voltage input apparatus for magnetron
CN201060840Y (en) * 2007-05-08 2008-05-14 广东格兰仕集团有限公司 Main body of vacuum tube cathode support
CN201153355Y (en) * 2008-01-23 2008-11-19 安徽华东光电技术研究所 Miniature pin sealing construction of ceramic body
GB2478990A (en) * 2010-03-26 2011-09-28 E2V Tech Magnetron with high gfrequency cathode heater power supply
CN202564170U (en) * 2011-12-28 2012-11-28 中国电子科技集团公司第十二研究所 Miniaturization structure of collector leading wire insulator
CN105355339A (en) * 2015-10-23 2016-02-24 中国电子科技集团公司第五十五研究所 Ceramic insulator
CN105355526A (en) * 2015-11-21 2016-02-24 安徽华东光电技术研究所 Miniature collector lead wire sealing method and seal structure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
小型化多级降压收集极引线瓷封件研究;骆岷,李瑶;《真空电子技术》;20121025;全文 *

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