CN109807471B - Laser marking device and method - Google Patents
Laser marking device and method Download PDFInfo
- Publication number
- CN109807471B CN109807471B CN201910105624.2A CN201910105624A CN109807471B CN 109807471 B CN109807471 B CN 109807471B CN 201910105624 A CN201910105624 A CN 201910105624A CN 109807471 B CN109807471 B CN 109807471B
- Authority
- CN
- China
- Prior art keywords
- lens
- light
- optical fiber
- light beam
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 35
- 238000010330 laser marking Methods 0.000 title claims abstract description 29
- 239000013307 optical fiber Substances 0.000 claims abstract description 67
- 238000001514 detection method Methods 0.000 claims abstract description 46
- 238000012545 processing Methods 0.000 claims abstract description 33
- 230000003287 optical effect Effects 0.000 claims description 81
- 238000004458 analytical method Methods 0.000 claims description 6
- 238000001914 filtration Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000012014 optical coherence tomography Methods 0.000 abstract description 6
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000000284 extract Substances 0.000 abstract description 3
- 239000000523 sample Substances 0.000 description 63
- 230000000694 effects Effects 0.000 description 4
- 238000005457 optimization Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Abstract
The invention discloses a laser marking device and a laser marking method, comprising the following steps: the system comprises a sample arm light path system, a detection light path system and a reference arm light path system; the sample arm light path system includes: the device comprises a marking light source, a first collimating lens, a two-dimensional vibrating mirror group, a half-reflecting half-lens, a flat field focusing mirror, an objective table and a first driving module; the reference arm light path system comprises a first optical fiber connector, a third collimating lens, a converging lens and a reflecting mirror; the detection light path system comprises a second optical fiber connector, a second collimating lens, a detection light source, an optical fiber coupler, a photoelectric detector and a computer processing terminal. The invention is based on the interference principle and the optical coherence tomography technology, extracts the depth position of the point to be marked on the sample, monitors focusing in real time, drives the objective table to move longitudinally, tracks the focal plane for marking, has simple light path, lower energy consumption, high automation degree and higher accuracy, and effectively improves the production efficiency and the production quality of laser marking.
Description
Technical Field
The invention relates to the technical field of laser marking, in particular to a laser marking device and a laser marking method.
Background
The principle of the laser marking machine is that laser generated by a laser enters a laser marking head through a set of optical system of a machine body, the laser marking head guides laser beams to pass through a focusing mirror to be converged into a light spot with high energy density, then the light spot interacts with a sample, and various characters, symbols, patterns and bar codes are marked on the surface of the light spot to manufacture permanent marks, trademarks, artworks and the like. Before marking, the plane to be marked of the sample is required to be placed on the focal plane of a focusing mirror of a laser marking machine, so that the marked graph is clear, and the optimal marking effect is obtained, so that the position of the sample for searching the focal plane is required to be moved, and the process is generally called focusing or focusing.
The existing fixed focus mode mainly comprises the following three modes. The first method is to manually adjust, firstly, a metal sheet is placed on the surface of a sample, the lifting upright post is adjusted through a mechanical hand wheel while marking, the distance between the field lens and the sample is changed to find a focus, and the position with the loudest sound and the best marking effect is the marking focus. The adjustment mode is time-consuming and labor-consuming, has poor adjustment precision and inconvenient adjustment, is easy to cause defocusing of equipment, and more importantly, the manual adjustment level is different from person to person, so that the marking quality is difficult to keep consistent. The second method is to obtain three-dimensional information of the object to be marked in advance, and adjust the focal length through the three-dimensional information of the object, wherein the adjustment mode can automatically adjust the focal length, but has limitations, on one hand, the focusing mode cannot be realized under the condition that the three-dimensional information of the object to be marked is unclear; on the other hand, this method is complicated in process and not efficient. The third method adopts a visible light source or ultrasonic waves to indicate the laser focus position so as to realize focusing, and the method can only determine the initial position of marking and can not focus in real time in the marking process, so that the adjustment precision is still not high enough for a sample with an unstable marking structure, and the marking quality and the production efficiency can be influenced.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a laser marking device and a laser marking method, which utilize interference signals to extract depth information of marking positions, and monitor and position points to be marked in real time.
The invention solves the technical problems as follows: a laser marking apparatus comprising: the system comprises a sample arm light path system, a detection light path system and a reference arm light path system;
the sample arm light path system includes: the device comprises a marking light source, a first collimating lens, a two-dimensional vibrating lens group, a half-reflecting half-lens, a flat field focusing lens, an objective table and a first driving module, wherein the objective table is used for placing a sample, and the first driving module is used for driving the objective table to move longitudinally;
the reference arm light path system comprises a first optical fiber connector, a third collimating lens, a converging lens and a reflecting mirror, wherein the first optical fiber connector, the third collimating lens, the converging lens and the reflecting mirror are connected by light rays and are sequentially arranged along the incident direction of the light rays;
the detection light path system comprises a second optical fiber connector, a second collimating lens, a detection light source, an optical fiber coupler, a photoelectric detector and a computer processing terminal;
the marking light source, the first collimating lens and the two-dimensional vibrating mirror group are connected by light rays, the half-reflecting half-lens transmits reflected light of the two-dimensional vibrating mirror group to the flat field focusing lens, and the light beam focused by the flat field focusing lens is emitted to the sample;
the optical fiber coupler is respectively connected with the first optical fiber connector, the second optical fiber connector, the detection light source and the photoelectric detector through optical fibers, and the photoelectric detector is electrically connected with the computer processing terminal;
after entering the optical fiber coupler, the light beam emitted by the detection light source is divided into a first light beam and a second light beam, wherein the first light beam enters a second collimating lens, and the second light beam enters a third collimating lens;
the half-reflecting and half-reflecting mirror reflects the emergent light of the second collimating lens at an incident angle of 45 degrees, reflects the emergent light to the flat field focusing lens for focusing, and the focused first light beam contacts with the sample and reflects on the surface of the sample, and the reflected light returns to the optical fiber coupler along the original path;
the photoelectric detector is used for capturing interference signals generated in the optical fiber coupler, converting the interference signals into electric signals and transmitting the electric signals to the computer processing terminal;
the computer processing terminal processes the electric signals according to the Michelson interferometer interference principle, and drives the objective table to longitudinally move through the first driving module according to the processing result.
Further, the detection light path system further comprises a spectroscope and an optical power meter, wherein the spectroscope transmits and reflects the emergent light after the second collimating lens is parallel at an incident angle of 45 degrees, a part of the emergent light is transmitted to the half-reflecting half-lens, and the other part of the emergent light is reflected to the optical power meter.
Further, the detection light path system further comprises an optical circulator and a third optical fiber connector, wherein the optical circulator is connected with the detection light source, the optical fiber coupler and the third optical fiber connector through optical fibers respectively.
Further, the detection light path system further comprises a high-pass filter, and the high-pass filter is electrically connected with the photoelectric detector and the computer processing terminal respectively.
Further, the detection light source is a broadband low-coherence light source.
Further, a laser marking method, using the laser marking device, the method comprises:
the light beam emitted by the detection light source is split into a first light beam and a second light beam by the optical fiber coupler;
after being collimated and parallel by the second collimating lens, the first light beam is directed to a half-reflecting half-lens with an incident angle of 45 degrees, the half-reflecting half-lens reflects the first light beam to a flat field focusing lens for focusing, the focused first light beam contacts with a sample and is reflected on the surface of the sample, and the reflected light returns to the optical fiber coupler along an original path;
the second light beam is collimated and parallel by the third collimating lens, is transmitted to the reflecting mirror after passing through the converging lens, and the reflecting mirror and the converging lens linearly move to enable the propagation optical path of the second light beam to linearly change, and the second light beam is reflected by the reflecting mirror and then returns to the optical fiber coupler along the original path with optical path reference information;
the first light beam and the second light beam returned to the optical fiber coupler interfere to generate interference signal peaks, and the photoelectric detector captures the interference signals and converts the interference signals into electric signals to be transmitted to the computer processing terminal;
the computer processing terminal processes the electric signals according to the Michelson interferometer interference principle to obtain the distance between the point to be marked on the sample and the focal plane, and controls the first driving module to longitudinally adjust the height of the objective table so that the point to be marked on the sample is located on the focal plane;
the marking light source emits laser, the laser is collimated and parallel by the first collimating lens and then irradiates the two-dimensional vibrating lens group, the half-reflection and half-lens transmits reflected laser of the two-dimensional vibrating lens group to the flat field focusing lens, and the laser focused by the flat field focusing lens irradiates the sample to mark the point to be marked on the sample.
Further, the method for linearly changing the propagation optical path of the second light beam includes: the distance between the mirror and the third collimating lens is linearly changed, and the mirror and the converging lens move synchronously.
The beneficial effects of the invention are as follows: the invention is based on the interference principle and the optical coherence tomography technology, extracts the depth position of the point to be marked on the sample, monitors focusing in real time, drives the objective table to move longitudinally, tracks the focal plane for marking, has simple light path, lower energy consumption, high automation degree and higher accuracy, and effectively improves the production efficiency and the production quality of laser marking.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings that are required to be used in the description of the embodiments will be briefly described below. It is evident that the drawings described are only some embodiments of the invention, but not all embodiments, and that other designs and drawings can be obtained from these drawings by a person skilled in the art without inventive effort.
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic overall flow diagram of the present invention;
FIG. 3 is a graph of signal strength versus depth position for detection of the resulting interference signal.
Detailed Description
The conception, specific structure, and technical effects produced by the present invention will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, features, and effects of the present invention. It is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments, and that other embodiments obtained by those skilled in the art without inventive effort are within the scope of the present invention based on the embodiments of the present invention. In addition, all connection relationships mentioned herein do not refer to direct connection of the components, but rather, refer to a connection structure that may be better formed by adding or subtracting connection aids depending on the particular implementation. The technical features in the invention can be interactively combined on the premise of no contradiction and conflict.
Embodiment 1, referring to fig. 1, a laser marking apparatus includes: sample arm optical path system 100, probe optical path system 200, and reference arm optical path system 300;
the sample arm optical path system 100 includes: the device comprises a marking light source 110, a first collimating lens 120, a two-dimensional vibrating lens group 130, a half-reflecting half-lens 140, a flat field focusing lens 150, an objective table 170 and a first driving module 180, wherein the objective table 170 is used for placing a sample 190, and the first driving module 180 is used for driving the objective table 170 to longitudinally move;
the reference arm optical path system 300 includes a first optical fiber connector 310, a third collimating lens 320, a converging lens 330 and a reflecting mirror 340, where the first optical fiber connector 310, the third collimating lens 320, the converging lens 330 and the reflecting mirror 340 are connected by light and are sequentially arranged along the incident direction of the light;
the detection light path system 200 comprises a second optical fiber connector 210, a second collimating lens 220, a detection light source 292, an optical fiber coupler 250, a photodetector 260 and a computer processing terminal 280;
the marking light source 110, the first collimating lens 120 and the two-dimensional vibrating mirror set 130 are in light connection, the half-reflecting half-lens 140 transmits the reflected light of the two-dimensional vibrating mirror set 130 to the flat field focusing lens 150, and the light beam focused by the flat field focusing lens 150 is directed to the sample 190;
the optical fiber coupler 250 is respectively connected with the first optical fiber connector 310, the second optical fiber connector 210, the detection light source 292 and the photoelectric detector 260 through optical fibers, and the photoelectric detector 260 is electrically connected with the computer processing terminal 280;
after the light beam emitted by the detection light source 292 enters the optical fiber coupler 250, the light beam is split into a first light beam and a second light beam according to a split ratio of 90:10, the first light beam enters the second collimating lens 220, and the second light beam enters the third collimating lens 320;
the half reflecting and half reflecting mirror 140 reflects the outgoing light of the second collimating lens 220 at an incident angle of 45 ° and reflects the outgoing light onto the flat field focusing lens 150 for focusing, the focused first light beam contacts the sample 190 and reflects on the surface of the sample 190, and the reflected light returns to the optical fiber coupler 250 along the original path;
the photodetector 260 is used for capturing the interference signal generated in the optical fiber coupler 250, converting the interference signal into an electrical signal, and transmitting the electrical signal to the computer processing terminal 280;
the computer processing terminal 280 processes the electrical signal according to the michelson interferometer interference principle, and drives the stage 170 to move longitudinally through the first driving module 180 according to the processing result.
Preferably, the optical detection path system 200 further includes a high-pass filter 270, and the high-pass filter 270 is electrically connected to the photodetector 260 and the computer processing terminal 280, respectively.
Preferably, the detection light source 292 is a broadband low coherence light source.
The first driving module 180 is a first motor module, and controls the first motor module to drive the stage 170 to move longitudinally through the computer processing terminal 280.
Referring to fig. 2, the laser marking apparatus further includes a laser marking method, the method including:
the light beam emitted by the detection light source 292 is split into a first light beam and a second light beam by the optical fiber coupler 250;
after the first light beam is collimated and parallel by the second collimating lens 220, the first light beam is directed to the half-reflecting half-lens 140 with the incident angle of 45 degrees, the half-reflecting half-lens 140 reflects the first light beam onto the flat-field focusing lens 150 to focus, the focused first light beam contacts with the sample 190 and reflects on the surface of the sample 190, and the reflected light returns to the optical fiber coupler 250 along the original path;
the second light beam is collimated and parallel by the third collimating lens 320, and is transmitted to the reflecting mirror 340 after passing through the converging lens 330, the reflecting mirror 340 and the converging lens 330 linearly move to linearly change the propagation optical path of the second light beam, and the second light beam is reflected by the reflecting mirror 340 and then returned to the optical fiber coupler 250 along the original path with the optical path reference information;
the first light beam and the second light beam returned to the optical fiber coupler 250 interfere to generate interference signals, and the photo detector 260 captures the interference signals and converts the interference signals into electric signals to be transmitted to the computer processing terminal 280;
the computer processing terminal 280 processes the electrical signal according to the michelson interferometer interference principle to obtain a distance between a point to be marked on the sample 190 and a focal plane, and controls the first driving module 180 to longitudinally adjust the height of the objective table 170 so that the point to be marked on the sample 190 is located on the focal plane;
the marking light source 110 emits laser, the laser is collimated and parallel by the first collimating lens 120 and then is emitted to the two-dimensional vibrating mirror set 130, the half-reflecting and half-reflecting lens 140 transmits the reflected laser of the two-dimensional vibrating mirror set 130 to the flat-field focusing lens 150, and the laser focused by the flat-field focusing lens 150 is emitted to the sample 190 to mark the point to be marked on the sample 190.
As an optimization, the method for linearly changing the propagation optical path of the second light beam comprises the following steps: the distance between the reflecting mirror 340 and the third collimating lens 320 is linearly changed, and the reflecting mirror 340 and the condensing lens 330 are synchronously moved.
The mirror 340 and the condensing lens 330 are moved in synchronization by the second motor module 350, perform optical path scanning, and linearly change the distance between the mirror 340 and the third collimating lens 320. The reflecting mirror 340 and the converging lens 330 are fixedly connected to the upper end of the second motor module 350, and the distance between the reflecting mirror 340 and the converging lens 330 is not changed during the movement.
The first motor module and the second motor module 350 are electrically connected to the computer processing terminal 280.
The working principle of the invention is as follows:
the detection process comprises the following steps: the light beam emitted by the detection light source 292 enters the optical fiber coupler 250, the light beam is split into a first light beam and a second light beam according to a split ratio of 90:10, the first light beam is collimated and parallel by the second collimating lens 220 and then is emitted to the half-reflecting half-lens 140 with the incident angle of 45 degrees in the sample arm optical path system 100, the half-reflecting half-lens 140 reflects the first light beam onto the flat-field focusing lens 150 to focus, the focused first light beam is reflected by the point to be marked on the surface of the sample 190, and the reflected light beam returns to the optical fiber coupler 250 along the original path along with the optical path information of the point to be marked.
The second light beam is collimated and parallel by the third collimating lens 320, and is transmitted to the reflecting mirror 340 after passing through the converging lens 330, the reflecting mirror 340 and the converging lens 330 linearly move to linearly change the propagation optical path of the second light beam, and the second light beam is reflected by the reflecting mirror 340 and then returned to the optical fiber coupler 250 along the original path with the optical path reference information;
the first and second light beams returning to the fiber optic coupler 250 interfere to generate interference signals, which the photodetector 260 captures and converts to electrical signals for transmission to the computer processing terminal 280.
In OCT systems, the longitudinal resolution of the OCT system is equivalent to the coherence length of the light source:
wherein lambda is 0 Is the center wavelength of the OCT system light source, Δλ is the full width at half maximum of the light source power spectrum. At the central wavelength lambda 0 The larger the bandwidth of the light source, the shorter the coherence length, the higher the longitudinal resolution and the higher the detection accuracy, without change. Therefore, the device adopts a broadband low-coherence light source to realize chromatography, and for the broadband light source with the central wavelength of 830nm and the bandwidth of 20nm, the coherence length of the broadband light source is about 15 mu m, so that the detection precision is improved.
Michelson interferometer interference principle: the light intensity after two beams with the same optical path with the same source interfere is as follows:
I＝A 0 +γ 1 γ 2 A 2 cos(2k·Δz) (2)
wherein I is light intensity, A 0 As a direct current signal, gamma 1 For the first beam to reflect at the sample arm optical path system 100, γ 2 The reflection coefficient of the second light beam in the reference arm light path system 300 is that a is the amplitude of the light wave, k is the wave vector, and Δz is the difference between the optical path of the first light beam reaching the sample arm light path system 100 and the optical path of the second light beam reaching the reference arm light path system 300, that is, the optical path difference. The first and second beams are homologous beams.
Since the detection light source 292 is a broadband low coherence light source, two light beams from the sample arm light path system 100 and the reference arm light path system 300 interfere in the fiber coupler 250, so that the light intensity amplitude is:
a＝γ 1 γ 2 A 2 (3)
the intensity of the light after the interference of the two light beams is:
wherein a is 0 As a direct current signal, k i For wave vectors corresponding to different wavelengths of the light source, deltaz j A is the optical path difference of the light beam reflected back from the point to be marked at different depths in the sample arm optical path system 100 and the light beam reflected back from the reference arm optical path system 300 j And the light intensity amplitude corresponding to the optical path difference is obtained. It can be seen that the interference signal peak obtained by final detection is only at the optical path difference deltaz j Where=0, then the signal strength decays rapidly to both positive and negative sides.
Let the optical path difference between the reference arm optical path system 300 and the sample arm optical path system 100 be Δz j ＝L-z j Where L is the optical path, z, of the reference arm optical path system 300 j Is the optical path length of the sample arm optical path system 100. Since the velocity v of the mirror 340 in the reference arm optical path system 300 is fixed, then l=l+vt, where L is the optical path length of the reference arm at time t=0, then equation (4) can be expressed as:
let l+vt-z j =0, get
Along with the uniform movement of the reflecting mirror 340 in the reference arm light path system 300, the optical path information returned from the sample arm light path system 100, which is equal to the optical path of the reference arm light path system 300, sequentially enters the photoelectric detection system.
The photodetector 260 of the present device is a single-point detector, and receives and processes the interference signal from the optical fiber coupler 250 along with the optical path scanning of the optical path system of the reference arm, and converts the interference signal into an electrical signal, and inputs the electrical signal into the high-pass filter 270, where the electrical signal converted from the interference signal can be expressed as:
where η is the quantum efficiency of the photodetector 260, e is the electron charge, hν is the photon energy, η 0 Is the intrinsic impedance of free space E 1 Representing the light field returned from the reference arm light path system 300, E 2 Represents the optical field returned from the sample arm optical path system 100, A 1 Representing the amplitude, a, of the optical field returned from the reference arm optical path system 300 2 Representing the amplitude of the optical field returned from the sample arm optical path system 100, real { } represents the real component operation and conjugate.
The dc component and low frequency noise of the electrical signal are filtered by a high pass filter 270 to become an electrical signal carrying depth information of the point to be marked on the surface of the sample 190:
in order to further reduce noise and improve signal-to-noise ratio, the two voltage signals are subjected to differential amplification by a differential amplification circuit, and then high-frequency noise is filtered by a high-pass filter 270, so that the waveform is smoothed. The resulting voltage signal is transmitted to the computer processing terminal 280 via the data acquisition card.
The computer processing terminal 280 performs hilbert transform on the received signal to obtain:
further obtain the analysis signal of the interference signal
Q(t)＝Γ(t)+iΓ′(t) (9)
And (5) calculating the amplitude information of the analysis signal, namely extracting the signal envelope. And obtaining signal intensities y (z) corresponding to different depth positions z, wherein an abscissa z corresponding to a position with the largest signal intensity is the detected depth position of the point to be marked, as shown in fig. 3, the abscissa depth position corresponding to a signal intensity peak value of a curve y1 and y1 representing the signal intensity in the figure is z1, and z1=600 μm.
Initializing the setting:
prior to the marking process, the device is first initially set up and the sample 190 is placed on the stage 170. The second motor module 350 is adjusted to the middle of the screw, that is, the mirror 340 can move back and forth along the screw, so that the optical path length of the reference arm optical path system 300 can be increased or decreased by 10mm. The first motor module may drive the stage 170 to move longitudinally to adjust the height of the sample 190. The distance between the focal plane and the flat field focusing lens 150 is calculated by the parameters of the flat field focusing lens 150.
A test mirror 340 is placed on stage 170 to determine the depth position of the focal plane. The detection light source 292 emits a light beam, and splits the light beam according to the detection process to obtain a first light beam and a second light beam, so that the first light beam reflects with the test mirror 340, the second light beam has an optical path reference signal, after an interference signal is generated, an interference signal peak representing a focal plane position can be detected to obtain an analysis signal of the interference signal according to the above working principle, and a signal envelope is extracted according to amplitude information of the analysis signal, so as to obtain a signal intensity curve y0. Referring to fig. 3, the abscissa corresponding to the signal intensity peak value corresponding to the signal intensity curve y0 is the depth position corresponding to the focal plane, and z0=200 μm is obtained as the target position for the subsequent focusing. The left side of the stage 170 is provided with a scale 160, and the zero graduation line of the scale 160 is placed on the same horizontal plane as the focal plane according to the depth position corresponding to the obtained focal plane.
The depth range of the point to be marked on the sample 190 that can be detected by the device is from 10mm above the focal plane to 10mm below the focal plane. If the depth position of the point to be marked of the sample 190 cannot be detected, a motor driver is manually operated to control the first motor module to move and adjust the height of the sample 190, and the height is placed in the scale range of the scale 160.
The marking working process of the invention comprises the following steps:
referring to fig. 3, the depth position of the point to be marked of the sample 190 is detected, and the abscissa depth position corresponding to the signal intensity peak of the curve y1, y1 representing the signal intensity is z1, where z1=600 μm. When the depth position of the spot to be marked on the sample 190 is greater than the depth position of the focal plane, the direction is positive, i.e., the first motor module moves upward, and vice versa. The depth position corresponding to the focal plane is z0=200 μm, and the result is positive, namely the direction is positive, from z1-z0=600 μm-200 μm=400 μm. Further, the computer processing terminal 280 converts the calculated data to obtain the working voltage of the first motor module, the computer processing terminal 280 outputs a level signal to the first motor module, and the first motor module drives the objective table 170 to move upwards by 400 μm, so that the point to be marked of the sample 190 moves to the focal plane for focusing. If the calculation result is negative, the direction is negative, and the first motor module drives the stage 170 to move downward. After the movement is completed, the signal intensity curve y1 of the point to be marked is basically overlapped with the signal intensity curve y0 of the focal plane, and the peak value reaches the highest value.
The accuracy of the first motor module is 100 μm,100 μm is an allowable error range, and as long as the longitudinal relative distance between the position of the point to be marked and the target position is within 100 μm, it can be judged that the focus is completed.
The marking light source 110 in the sample arm light path system 100 emits laser beams, the laser beams enter the two-dimensional vibrating mirror group 130 after being collimated and parallel by the first collimating lens 120, and reflected light is focused on a sample 190 to be marked by the flat field focusing lens 150 after being reflected by the x-scanning vibrating mirror 132 and the y-scanning vibrating mirror 131 in the two-dimensional vibrating mirror group 130, so that marking is performed.
In the marking process, whether the point to be marked on the sample 190 deviates from the target position or not is detected in real time by collecting interference signals, and if the point to be marked is not completely focused, the point to be marked is refocused, and if the point to be marked is not completely focused, the first motor module drives the objective table 170 to longitudinally move, so that the focal plane is tracked in real time.
The marking of one sample 190 is completed, and if it is desired to continue to mark the next sample 190, the above-described actions are repeated, and if not, the device is turned off.
The invention is based on the interference principle and the optical coherence tomography technology, extracts the depth position of the point to be marked on the sample 190, monitors focusing in real time, drives the objective table 170 to move longitudinally, tracks the focal plane for marking, has simple device light path, lower energy consumption, high automation degree and higher accuracy, and effectively improves the production efficiency and the production quality of laser marking.
As an optimization, the detection light path system 200 further includes a beam splitter 230 and an optical power meter 240, where the beam splitter 230 transmits and reflects the outgoing light after the second collimating lens 220 is parallel at an incident angle of 45 °, and a part of the outgoing light is transmitted to the half mirror 140, and another part of the outgoing light is reflected to the optical power meter 240.
The beam splitter 230 and the optical power meter 240 form an optical power detection system, the ratio of transmission and reflection of the beam splitter 230 is 99:1, and after the transmitted light emitted by the second collimating lens 220 is split by the beam splitter 230, 1% of the light beam is received by the optical power meter 240, and whether the optical power exceeds a safe power value or not is detected, so that real-time safe detection of the optical power is realized.
As an optimization, the probe optical path system 200 further comprises an optical circulator 291 and a third optical fiber connector 293, wherein the optical circulator 291 is connected with the probe light source 292, the optical fiber coupler 250 and the third optical fiber connector 293 through optical fibers respectively.
The probe light of the probe light source 292 first enters the first port of the optical circulator 291, and the probe light enters the optical fiber coupler 250 through the second port of the optical circulator 291. The third optical fiber connector 293 is connected to the third port of the optical circulator 291, and the optical circulator 291 is used for preventing the reflected laser light from directly striking the detection light source 292 to damage the device, and the reflected laser light can be discharged to the outside through the third optical fiber connector 293.
While the preferred embodiments of the present invention have been illustrated and described, the present invention is not limited to the embodiments, and various equivalent modifications and substitutions can be made by one skilled in the art without departing from the spirit of the present invention, and these are intended to be included in the scope of the present invention as defined in the appended claims.
Claims (6)
1. A laser marking apparatus, comprising: the system comprises a sample arm light path system, a detection light path system and a reference arm light path system;
the sample arm light path system includes: the device comprises a marking light source, a first collimating lens, a two-dimensional vibrating lens group, a half-reflecting half-lens, a flat field focusing lens, an objective table and a first driving module, wherein the objective table is used for placing a sample, and the first driving module is used for driving the objective table to move longitudinally;
the reference arm light path system comprises a first optical fiber connector, a third collimating lens, a converging lens and a reflecting mirror, wherein the first optical fiber connector, the third collimating lens, the converging lens and the reflecting mirror are connected by light rays and are sequentially arranged along the incident direction of the light rays;
the detection light path system comprises a second optical fiber connector, a second collimating lens, a detection light source, an optical fiber coupler, a photoelectric detector and a computer processing terminal;
the detection light path system further comprises a high-pass filter, and the high-pass filter is electrically connected with the photoelectric detector and the computer processing terminal respectively;
the marking light source, the first collimating lens and the two-dimensional vibrating mirror group are connected by light rays, the half-reflecting half-lens transmits reflected light of the two-dimensional vibrating mirror group to the flat field focusing lens, and the light beam focused by the flat field focusing lens is emitted to the sample;
the optical fiber coupler is respectively connected with the first optical fiber connector, the second optical fiber connector, the detection light source and the photoelectric detector through optical fibers, and the photoelectric detector is electrically connected with the computer processing terminal;
after entering the optical fiber coupler, the light beam emitted by the detection light source is divided into a first light beam and a second light beam, wherein the first light beam enters a second collimating lens, and the second light beam enters a third collimating lens;
the half-reflecting and half-reflecting mirror reflects the emergent light of the second collimating lens at an incident angle of 45 degrees, reflects the emergent light to the flat field focusing lens for focusing, and the focused first light beam contacts with the sample and reflects on the surface of the sample, and the reflected light returns to the optical fiber coupler along the original path;
the photoelectric detector is used for capturing interference signals generated in the optical fiber coupler, converting the interference signals into electric signals and transmitting the electric signals to the computer processing terminal;
wherein, the electric signal converted from the interference signal can be expressed as:
,
eta is the quantum efficiency of the photoelectric detector, e is the electron quantity, hν is the photon energy, eta 0 Is the intrinsic impedance of free space E 1 Representing the light field returned from the reference arm light path system, E 2 Representing the optical field returned from the sample arm optical path system, A 1 Representing the amplitude of the optical field returned from the reference arm optical path system, A 2 Representing the amplitude of the optical field returned from the sample arm optical path system, the real { } table taking the real part operation, the x represents taking the conjugate operation;
the computer processing terminal processes the electric signals according to the Michelson interferometer interference principle, and drives the objective table to longitudinally move through the first driving module according to the processing result;
the high-pass filter is used for filtering direct current components and low-frequency noise of the electric signal to enable the direct current components and the low-frequency noise to become electric signals of depth information of points to be marked on the surface of the sample:
,
the computer processing terminal performs Hilbert transform on the received signals to obtain:
,
further obtain the analysis signal of the interference signal
Q(t)＝Г(t)+iΓ′(t),
And calculating the amplitude information of the analysis signal to obtain signal intensity y (z) corresponding to different depth positions z, wherein the abscissa z corresponding to the position with the maximum signal intensity is the detected depth position of the point to be marked.
2. A laser marking device as claimed in claim 1, wherein: the detection light path system further comprises a spectroscope and an optical power meter, wherein the spectroscope transmits and reflects emergent light collimated and parallel by the second collimating lens at an incident angle of 45 degrees, a part of the emergent light is transmitted to the half-reflecting half-lens, and the other part of the emergent light is reflected to the optical power meter.
3. A laser marking device as claimed in claim 1, wherein: the detection light path system further comprises an optical circulator and a third optical fiber connector, wherein the optical circulator is connected with the detection light source, the optical fiber coupler and the third optical fiber connector through optical fibers respectively.
4. A laser marking device as claimed in claim 1, wherein: the detection light source is a broadband low-coherence light source.
5. A laser marking method, characterized by using a laser marking device according to claim 1, the method comprising:
the light beam emitted by the detection light source is split into a first light beam and a second light beam by the optical fiber coupler;
after being collimated and parallel by the second collimating lens, the first light beam is directed to a half-reflecting half-lens with an incident angle of 45 degrees, the half-reflecting half-lens reflects the first light beam to a flat field focusing lens for focusing, the focused first light beam contacts with a sample and is reflected on the surface of the sample, and the reflected light returns to the optical fiber coupler along an original path;
the second light beam is collimated and parallel by the third collimating lens, is transmitted to the reflecting mirror after passing through the converging lens, and the reflecting mirror and the converging lens linearly move to enable the propagation optical path of the second light beam to linearly change, and the second light beam is reflected by the reflecting mirror and then returns to the optical fiber coupler along the original path with optical path reference information;
the first light beam and the second light beam returned to the optical fiber coupler interfere, and the photoelectric detector captures the interference signal and converts the interference signal into an electric signal to be transmitted to the computer processing terminal;
the computer processing terminal processes the electric signals according to the Michelson interferometer interference principle to obtain the distance between the point to be marked on the sample and the focal plane, and controls the first driving module to longitudinally adjust the height of the objective table so that the point to be marked on the sample is located on the focal plane;
the marking light source emits laser, the laser is collimated and parallel by the first collimating lens and then irradiates the two-dimensional vibrating lens group, the half-reflection and half-lens transmits reflected laser of the two-dimensional vibrating lens group to the flat field focusing lens, and the laser focused by the flat field focusing lens irradiates the sample to mark the point to be marked on the sample.
6. A laser marking method as claimed in claim 5, wherein: the method for linearly changing the propagation optical path of the second light beam comprises the following steps: the distance between the mirror and the third collimating lens is linearly changed, and the mirror and the converging lens move synchronously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910105624.2A CN109807471B (en) | 2019-02-01 | 2019-02-01 | Laser marking device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910105624.2A CN109807471B (en) | 2019-02-01 | 2019-02-01 | Laser marking device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109807471A CN109807471A (en) | 2019-05-28 |
| CN109807471B true CN109807471B (en) | 2024-03-26 |
Family
ID=66605186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910105624.2A Active CN109807471B (en) | 2019-02-01 | 2019-02-01 | Laser marking device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109807471B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110899988B (en) * | 2019-11-27 | 2021-04-23 | 佛山科学技术学院 | Laser marking focusing control method |
| CN115682979A (en) * | 2022-10-31 | 2023-02-03 | 西华大学 | Real-time online diagnosis system for femtosecond laser drilling depth of engine blade |
| CN116060763B (en) * | 2023-04-06 | 2023-07-11 | 中科德迈(沈阳)激光技术有限公司 | In-situ on-machine measuring system for water-guided laser processing and laser processing equipment |
| CN117572389B (en) * | 2024-01-19 | 2024-03-29 | 挚感(苏州)光子科技有限公司 | Reflecting device for laser interference ranging and laser range finder |
Citations (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1194057A (en) * | 1995-06-07 | 1998-09-23 | 大锅有限合伙人公司 | Removal of material by polarized radiation and back side application of radiation |
| CN1476365A (en) * | 2000-11-17 | 2004-02-18 | ��Ī�ƹ�˾ | Laser separated die with tapered sidewalls for improved light extraction |
| CN1681432A (en) * | 2002-07-18 | 2005-10-12 | 莫纳基技术公司 | Method and equipment for fiber optic high-resolution fluorescence imaging |
| CN101002081A (en) * | 2004-06-14 | 2007-07-18 | 莫纳基技术公司 | Multimarking fiber fluorescence microscopic imagery system and method |
| CN201139554Y (en) * | 2008-01-03 | 2008-10-29 | 中国科学院上海光学精密机械研究所 | Frequency domain optical coherence tomography image forming apparatus with large depth of investigation |
| WO2009147425A1 (en) * | 2008-06-02 | 2009-12-10 | Ian Mercer | Apparatus and method for sample analysis |
| WO2012098859A1 (en) * | 2011-01-20 | 2012-07-26 | 三菱電機株式会社 | Optical pickup device and optical disk device |
| WO2013023425A1 (en) * | 2011-08-18 | 2013-02-21 | 天津大学 | Polarization sensitive distributed optical frequency domain reflection turbulence sensing device and demodulation method |
| EP2607844A1 (en) * | 2011-12-22 | 2013-06-26 | HILTI Aktiengesellschaft | Laser system for producing a linear laser marking |
| CN103344569A (en) * | 2013-06-21 | 2013-10-09 | 中国科学院上海光学精密机械研究所 | Optical coherence tomography method and optical coherence tomography system for complex polarization frequency domain |
| CN103344646A (en) * | 2013-06-25 | 2013-10-09 | 中国人民解放军陆军军官学院 | Method for detecting damage of first wall of fusion reactor in real time based on optical coherence tomography |
| CN104027073A (en) * | 2014-06-11 | 2014-09-10 | 无锡微奥科技有限公司 | Swept source based common-channel optical coherence tomography system and method |
| CN203885484U (en) * | 2014-06-03 | 2014-10-22 | 深圳市斯尔顿科技有限公司 | Optical device used for increasing blood vessel sampling frequency in rotary Doppler OCT |
| CN104523239A (en) * | 2015-01-12 | 2015-04-22 | 南京理工大学 | Full-depth spectral domain optical coherent tomography device and method |
| JP2016024176A (en) * | 2014-07-24 | 2016-02-08 | 日本電信電話株式会社 | Optical coherence tomographic apparatus |
| WO2016062636A1 (en) * | 2014-10-20 | 2016-04-28 | Precitec Gmbh & Co. Kg | Device for measuring the depth of a weld seam in real time |
| CN106232520A (en) * | 2014-02-17 | 2016-12-14 | 威廉马歇莱思大学 | The grapheme material of induced with laser and they purposes in an electronic |
| CN107320066A (en) * | 2017-06-30 | 2017-11-07 | 执鼎医疗科技（杭州）有限公司 | A kind of eyeground OCT image system of shared reference arm |
| CN107515054A (en) * | 2017-09-25 | 2017-12-26 | 中国计量大学 | A kind of fiber optic temperature and refractometry sensing device based on Michelson's interferometer |
| CN107728304A (en) * | 2017-10-24 | 2018-02-23 | 佛山科学技术学院 | A kind of multifocal frequency domain OCT self-adapting focusing devices and methods therefors |
| CN107790887A (en) * | 2017-11-16 | 2018-03-13 | 商丘师范学院 | The femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure |
| CN107843969A (en) * | 2017-10-24 | 2018-03-27 | 佛山科学技术学院 | A kind of multifocal frequency sweep OCT focus controls and its method |
| CN107931850A (en) * | 2017-12-12 | 2018-04-20 | 佛山科学技术学院 | A kind of laser mark printing device based on frequency sweep OCT |
| CN107953037A (en) * | 2017-12-12 | 2018-04-24 | 佛山科学技术学院 | A kind of high-precision laser three dimensional sculpture device and method based on frequency sweep OCT |
| CN108326451A (en) * | 2018-02-08 | 2018-07-27 | 中国科学院西安光学精密机械研究所 | A kind of femtosecond laser film micro-group hole effective production process |
| CN108398098A (en) * | 2018-05-11 | 2018-08-14 | 中国科学院苏州生物医学工程技术研究所 | A kind of optical surface spacing non-contact measurement apparatus and method |
| CN207787994U (en) * | 2017-11-23 | 2018-08-31 | 佛山科学技术学院 | One kind being based on broad band laser frequency domain Three dimensional slots device |
| CN207832690U (en) * | 2017-11-22 | 2018-09-07 | 佛山科学技术学院 | A kind of defect of lens detection device |
| CN109157187A (en) * | 2018-09-06 | 2019-01-08 | 中国科学院上海光学精密机械研究所 | Increase the method for frequency sweep optical coherence tomography system imaging depth range |
| CN209754279U (en) * | 2019-02-01 | 2019-12-10 | 佛山科学技术学院 | laser marking device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10699891B2 (en) * | 2015-12-22 | 2020-06-30 | Bruker Daltonik Gmbh | Mass spectrometer with a laser desorption ion source, and laser system with a long service life |
-
2019
- 2019-02-01 CN CN201910105624.2A patent/CN109807471B/en active Active
Patent Citations (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1194057A (en) * | 1995-06-07 | 1998-09-23 | 大锅有限合伙人公司 | Removal of material by polarized radiation and back side application of radiation |
| CN1476365A (en) * | 2000-11-17 | 2004-02-18 | ��Ī�ƹ�˾ | Laser separated die with tapered sidewalls for improved light extraction |
| CN1681432A (en) * | 2002-07-18 | 2005-10-12 | 莫纳基技术公司 | Method and equipment for fiber optic high-resolution fluorescence imaging |
| CN101002081A (en) * | 2004-06-14 | 2007-07-18 | 莫纳基技术公司 | Multimarking fiber fluorescence microscopic imagery system and method |
| CN201139554Y (en) * | 2008-01-03 | 2008-10-29 | 中国科学院上海光学精密机械研究所 | Frequency domain optical coherence tomography image forming apparatus with large depth of investigation |
| WO2009147425A1 (en) * | 2008-06-02 | 2009-12-10 | Ian Mercer | Apparatus and method for sample analysis |
| WO2012098859A1 (en) * | 2011-01-20 | 2012-07-26 | 三菱電機株式会社 | Optical pickup device and optical disk device |
| WO2013023425A1 (en) * | 2011-08-18 | 2013-02-21 | 天津大学 | Polarization sensitive distributed optical frequency domain reflection turbulence sensing device and demodulation method |
| EP2607844A1 (en) * | 2011-12-22 | 2013-06-26 | HILTI Aktiengesellschaft | Laser system for producing a linear laser marking |
| CN103344569A (en) * | 2013-06-21 | 2013-10-09 | 中国科学院上海光学精密机械研究所 | Optical coherence tomography method and optical coherence tomography system for complex polarization frequency domain |
| CN103344646A (en) * | 2013-06-25 | 2013-10-09 | 中国人民解放军陆军军官学院 | Method for detecting damage of first wall of fusion reactor in real time based on optical coherence tomography |
| CN106232520A (en) * | 2014-02-17 | 2016-12-14 | 威廉马歇莱思大学 | The grapheme material of induced with laser and they purposes in an electronic |
| CN203885484U (en) * | 2014-06-03 | 2014-10-22 | 深圳市斯尔顿科技有限公司 | Optical device used for increasing blood vessel sampling frequency in rotary Doppler OCT |
| CN104027073A (en) * | 2014-06-11 | 2014-09-10 | 无锡微奥科技有限公司 | Swept source based common-channel optical coherence tomography system and method |
| JP2016024176A (en) * | 2014-07-24 | 2016-02-08 | 日本電信電話株式会社 | Optical coherence tomographic apparatus |
| WO2016062636A1 (en) * | 2014-10-20 | 2016-04-28 | Precitec Gmbh & Co. Kg | Device for measuring the depth of a weld seam in real time |
| CN104523239A (en) * | 2015-01-12 | 2015-04-22 | 南京理工大学 | Full-depth spectral domain optical coherent tomography device and method |
| CN107320066A (en) * | 2017-06-30 | 2017-11-07 | 执鼎医疗科技（杭州）有限公司 | A kind of eyeground OCT image system of shared reference arm |
| CN107515054A (en) * | 2017-09-25 | 2017-12-26 | 中国计量大学 | A kind of fiber optic temperature and refractometry sensing device based on Michelson's interferometer |
| CN107843969A (en) * | 2017-10-24 | 2018-03-27 | 佛山科学技术学院 | A kind of multifocal frequency sweep OCT focus controls and its method |
| CN107728304A (en) * | 2017-10-24 | 2018-02-23 | 佛山科学技术学院 | A kind of multifocal frequency domain OCT self-adapting focusing devices and methods therefors |
| CN107790887A (en) * | 2017-11-16 | 2018-03-13 | 商丘师范学院 | The femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure |
| CN207832690U (en) * | 2017-11-22 | 2018-09-07 | 佛山科学技术学院 | A kind of defect of lens detection device |
| CN207787994U (en) * | 2017-11-23 | 2018-08-31 | 佛山科学技术学院 | One kind being based on broad band laser frequency domain Three dimensional slots device |
| CN107931850A (en) * | 2017-12-12 | 2018-04-20 | 佛山科学技术学院 | A kind of laser mark printing device based on frequency sweep OCT |
| CN107953037A (en) * | 2017-12-12 | 2018-04-24 | 佛山科学技术学院 | A kind of high-precision laser three dimensional sculpture device and method based on frequency sweep OCT |
| CN108326451A (en) * | 2018-02-08 | 2018-07-27 | 中国科学院西安光学精密机械研究所 | A kind of femtosecond laser film micro-group hole effective production process |
| CN108398098A (en) * | 2018-05-11 | 2018-08-14 | 中国科学院苏州生物医学工程技术研究所 | A kind of optical surface spacing non-contact measurement apparatus and method |
| CN109157187A (en) * | 2018-09-06 | 2019-01-08 | 中国科学院上海光学精密机械研究所 | Increase the method for frequency sweep optical coherence tomography system imaging depth range |
| CN209754279U (en) * | 2019-02-01 | 2019-12-10 | 佛山科学技术学院 | laser marking device |
Non-Patent Citations (5)
| Title |
|---|
| 一种干涉测温的新方法;鲁强, 曾绍群, 徐海峰, 刘贤德;光电工程(01);全文 * |
| 基于单分子荧光闪烁的快速超分辨显微方法和实验研究;王雪花;中国博士学位论文全文数据库 (信息科技辑);20170815(第8期);全文 * |
| 庄顺连等.光子器件物理.电子工业出版社,2013,(第1版),全文. * |
| 硅单晶片的激光标识技术研究;于妍;张殿朝;杨洪星;;电子工业专用设备(10);全文 * |
| 阶梯型三能级原子中自发诱导相干对无反转激光的效应;韩定安等;佛山科学技术学院学报(自然科学版);20100228(第1期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109807471A (en) | 2019-05-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109807471B (en) | Laser marking device and method | |
| US10222204B2 (en) | High-speed 3D imaging system using continuous-wave THz beam scan | |
| CN103983340B (en) | Microvibration measuring system and measuring method based on remote pulse laser speckle | |
| CN105334262B (en) | Noncontact optoacoustic detection method and device based on Through Optical Interference Spectra | |
| CN107860742B (en) | Reflective terahertz time-domain near-field scanning microscope | |
| CN105044895B (en) | A kind of super-resolution confocal microscopic imaging apparatus and method | |
| CN111551250A (en) | Method and device for measuring light field distribution | |
| CN209754279U (en) | laser marking device | |
| CN110153108B (en) | Focusing method and device for laser cleaning | |
| CN113245693B (en) | Laser welding penetration information monitoring equipment for optical weak coherent imaging and detection method thereof | |
| CN103115580A (en) | Three-dimensional hole-shape detection method and detection system based on optical coherence tomography | |
| CN101290351B (en) | Optical recognition and distance measurer | |
| CN105588847A (en) | Great-depth OCT (optical coherence tomograph) scanning device and method for nearly transparent minerals | |
| CN106767521A (en) | A kind of vertical scanning measures white light interference gauge head | |
| CN112945130B (en) | Ultrafast microscopic imaging system for simultaneously obtaining depth and surface information | |
| CN203489968U (en) | Terahertz wave far field detection super diffraction resolution imager | |
| CN106441576A (en) | Device for performing real-time imaging by means of spatial chirped terahertz pulse | |
| CN102866492A (en) | Balance detection confocal microscope imaging system and three-dimensional image reconstruction method thereof | |
| CN108051369B (en) | Non-contact all-optical photoacoustic imaging device and method thereof | |
| CN110907451A (en) | Ultra-deep OCT system device based on Airy beam and tissue transparentization technology | |
| CN113847888B (en) | Automatic measurement device and method for heterogeneous jump surface morphology | |
| CN206556610U (en) | A kind of vertical scanning measures white light interference gauge head | |
| CN112747669B (en) | Device for detecting particle displacement of optical tweezers system based on dual-frequency laser interference | |
| CN104729424B (en) | Confocal dot laser microscope and its scan method based on self-mixed interference | |
| CN1274842A (en) | Method and equipment of detecting optical far field parameters of optical system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |