CN109794692A - A kind of 532nm superhard material laser precision machining equipment - Google Patents
A kind of 532nm superhard material laser precision machining equipment Download PDFInfo
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- CN109794692A CN109794692A CN201910217758.3A CN201910217758A CN109794692A CN 109794692 A CN109794692 A CN 109794692A CN 201910217758 A CN201910217758 A CN 201910217758A CN 109794692 A CN109794692 A CN 109794692A
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Abstract
The invention discloses a kind of 532nm superhard material laser precision machining equipments, including pedestal, pedestal is equipped with laser, the Z-type resonant cavity of laser is equipped in laser, the Z-type resonant cavity includes the acousto-optic Q-switching being adjacently positioned, 1064nm laser module and the resonance lens set for 1064nm light to be converted into 532nm light, and the output end side of Z-type resonant cavity is equipped with wave plate；The output end of laser is successively arranged beam expanding lens, cutting head and fixture equipped with focus lamp along optical path direction；The horizontal mobile mechanism that pedestal is equipped with camera and connect with fixture.A kind of 532nm superhard material laser precision machining equipment provided by the invention, laser beam quality is high and stablizes, and breaks through that processing hard brittle material yields at present is low, technical bottleneck of low efficiency.
Description
Technical field
The present invention relates to superhard material laser cutting processes more particularly to a kind of 532nm superhard material laser accurate to add
Tooling is standby.
Background technique
Original superhard material (such as rough diamond) is needed by that after processing, could be used as product and be applied to jewellery
Or industrial circle.Superhard material cuts different sides adding man-hour requirement.Currently, to the manufacturing process of superhard material
Machine cuts, manual grinding polishing etc. are mostly used greatly, it is complicated for operation, wherein machine cuts need the component (example to run at high speed
Such as saw disc), there are the swings of certain amplitude when fast turn-around, cause accuracy low, and the component of movement is easy that superhard matter will be cut
The dust generated when material raises, and pollution is big, and the noise of machine cuts is also big.
With the continuous maturation of laser generator, utilization of the laser in cutting is also more and more extensive.It is superhard in order to cut
Laser power needed for material is higher.However, powerful laser is due to its pumping compared with lower-powered laser
A large amount of heat can be generated, it is unstable that the thermal lens of the too high generation of heat will lead to resonant cavity, to cause beam quality poor.And
Superhard material requires the beam quality of laser high.Green (light) laser or power on the market is inadequate or power is enough
Beam quality it is insufficient, the yields of work piece is very low.Moreover, its structure of the laser of different capacity has certain difference
The opposite sex, the variation of the power of laser module are also not linear, it is difficult to and it adjusts, causes in actual use, single laser
Output power range it is relatively narrow, applicability is lower.In addition, the volume of current laser is larger, and in light beam containing it is more not
The light of co-wavelength, beam quality is lower, then cutting efficiency is relatively low.
High-temperature machining is belonged to using laser cutting object, although illuminated material can be made to melt rapidly, vaporize, ablation
Or reach burning point, but melt substance remains on material and also to cause to hinder to subsequent cutting, reduces the accuracy of cutting and cuts
Cut efficiency.
Summary of the invention
The object of the present invention is to provide a kind of 532nm superhard material laser precision machining equipment, laser beam quality is high
And stablize, break through that processing hard brittle material yields at present is low, technical bottleneck of low efficiency.
To achieve the above object, the present invention provides a kind of 532nm superhard material laser precision machining equipment, including pedestal,
Pedestal is equipped with laser, the Z-type resonant cavity of laser is equipped in laser, the Z-type resonant cavity includes the sound being adjacently positioned
Light Q-switch, 1064nm laser module and the resonance lens set for 1064nm light to be converted into 532nm light, Z-type resonant cavity it is defeated
Outlet side is equipped with wave plate；The output end of laser along optical path direction be successively arranged beam expanding lens, the cutting head equipped with focus lamp and
Fixture；The horizontal mobile mechanism that pedestal is equipped with camera and connect with fixture.
As a further improvement of the present invention, 45 degree of reflecting mirrors, the camera shooting are equipped between the beam expanding lens and cutting head
Head is located at the top of 45 degree of reflecting mirrors.
As a further improvement of the present invention, the top of 45 degree of reflecting mirrors is equipped with 45 degree of ribs of arrangement in parallel
Mirror, the camera lens of the camera horizontally toward 45 degree of prisms.
As a further improvement of the present invention, the cutting head is equipped with blowing mechanism；The pedestal is equipped with and expands
The position adjusting mechanism of mirror.
As a further improvement of the present invention, in the laser, the quantity of Z-type resonant cavity is two and mutually simultaneously
The output end of column setting, two Z-type resonant cavities is equipped with light combination mirror group；The output end of two Z-type resonant cavities is towards identical, the conjunction
Beam microscope group includes the first total reflective mirror and light combination mirror that the two is parallel to each other, and the first total reflective mirror and light combination mirror are separately positioned on described two
The output end side of a Z-type resonant cavity and be in 45 degree of angles with optical path, both the first total reflective mirror and light combination mirror mirror surface is oppositely arranged.
As a further improvement of the present invention, the resonance lens set includes the first output being sequentially arranged along optical path
Mirror, pore diaphragm, frequency-doubling crystal and the second total reflective mirror；First outgoing mirror is logical 532nm light, the knot for reflecting 1064nm light
Structure, frequency-doubling crystal are the structure that 1064nm light can be converted to 532nm light；The direction and the of both laser module, pore diaphragm
It is in identical angle between one outgoing mirror input face, the wave plate is located at the side of the first outgoing mirror output face.
As a further improvement of the present invention, the resonance lens set further includes third total reflective mirror and polarizing film, third
Total reflective mirror, polarizing film and acousto-optic Q-switching three are sequentially arranged.
As a further improvement of the present invention, the Z-type resonant cavity includes being located at polarizing film and acousto-optic Q-switching along optical path
Between the 4th total reflective mirror.
As a further improvement of the present invention, it is anti-to be successively arranged two for the output light path in the laser along the wave plate
The spectroscope and the second outgoing mirror that the face of penetrating is parallel to each other.
As a further improvement of the present invention, the optical path direction between the polarizing film and third total reflective mirror and frequency multiplication are brilliant
Optical path direction between body and the second total reflective mirror is parallel, optical path direction and laser module between polarizing film and third total reflective mirror
The angle of optical path direction is 10-50 °.
As a further improvement of the present invention, it is equipped between laser module and the first outgoing mirror in the laser
Baffle, to be rotatably connected between the baffle and the shell of laser.
Beneficial effect
Compared with prior art, the advantages of 532nm superhard material laser precision machining of the invention equipment are as follows:
1, resonant cavity uses Z-type structure, and the quality of light beam can be allowed high and stablized, the arrangement of optical path is additionally favorable for, facilitates sound
Light Q-switch, 1064nm laser module, resonance lens set and wave plate are arranged in a lesser space, to realize 532nm laser
The miniaturization of device can be suitably used for the laser cutting device of plurality of specifications；Linearly polarized light laser therethrough can be adjusted to by wave plate
Circularly polarized light plays the shaping operation of laser facula.The power and beam quality of the laser are all most to agree with superhard material
, the laser for being able to achieve the hard brittle materials such as superhard material such as rough diamond, cubic boron nitride, artificial monocrystalline diamond, silicon carbide is high
The accurate removal processing of effect, breaks through that processing hard brittle material yields at present is low, technical bottleneck of low efficiency.
2, make the sharp combiner projected from two Z-type resonant cavities at a branch of by light combination mirror group, laser power can be made double
While the laser that ensures to close after beam possess higher beam quality, improve the cutting accuracy to superhard material.In addition, passing through
The laser module in one of Z-type resonant cavity is closed, only one Z-type resonant cavity in laser can be allowed to have laser injection,
It realizes and cutting material is come with lower-wattage, cope with the demand of different capacity, to have the ability of cutting different materials, without setting
Count two sets of different systems, save the cost.
3, two Z-type resonant cavity output ends towards identical, then light combination mirror group need to only use one piece of first total reflective mirror and one
Block light combination mirror, structure is simple, at low cost, assembly when pairing beam microscope group eyeglass be finely adjusted.
4, the 1064nm laser reflected by the first outgoing mirror, successively entirely through 1064nm laser module, acousto-optic Q-switching, the 4th
After anti-mirror, polarizing film, then by third total reflective mirror reflection backtracking, and is reflected by the first outgoing mirror and turn by frequency-doubling crystal again
532nm laser is turned to, wave plate is eventually passed through, it is ensured that all 1064nm laser that laser module projects can be converted into 532nm and swash
Light simultaneously projects, and makes full use of energy of light source, the loss of energy in the optical path is reduced, to improve cutting efficiency.Polarizing film energy handle
Light beam is adjusted to the highest polarization state of frequency-doubling crystal efficiency.
5, baffle can be moved up between laser module and the first outgoing mirror by rotating from laser path when not in use
It opens；And when needing to close laser, acousto-optic Q-switching is without normally locking light, laser from laser housing light-emitting window in order to prevent
Place projects, and can keep off between laser module and the first outgoing mirror baffle to block optical path, as safety device, avoid the occurrence of not
When being cut by laser and laser is projected from laser, prevents security risk.
6, when being processed using 532nm superhard material laser precision machining equipment, superhard material (such as diamond) quilt
It is fixed on one end of bonding stick, bonding stick is fixed by the fixture on pedestal.532nm laser is horizontal after laser injection to be passed through
Then beam expanding lens is changed to irradiate downwards, be focused by the focus lamp on cutting head by 45 degree of reflecting mirrors, final to shine
It penetrates on superhard material and is cut.Optical path switchs to downwards from level, can allow laser and fixture, move horizontally machine
Structure setting is in different height, conducive to the occupied area for reducing equipment.
7, the cutting situation for observing superhard material in real time according to camera adjusts superhard material by horizontal mobile mechanism
The position of material, to realize accurate cutting.
8, cutting head is equipped with blowing mechanism and can blow away during cutting superhard material and be attached to superhard material
Melt substance on material avoids melt substance obstruction caused by laser cutting, to improve cutting efficiency and cutting accuracy.
9,45 degree prisms of the top of 45 degree of reflecting mirrors equipped with arrangement in parallel, horizontally toward 45 degree of the camera lens of camera
Prism is placed compared to camera shooting head erect so as to which camera is horizontal, can make full use of laser cutting for camera is horizontal
The horizontal space of device reduces its height.
Through the following description and in conjunction with the attached drawings, the present invention will become more fully apparent, these attached drawings are used to explain the present invention
Embodiment.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the laser internal structure chart of 532nm superhard material laser precision machining equipment；
Fig. 2 is one of the schematic diagram of internal structure of 532nm superhard material laser precision machining equipment；
Fig. 3 is A in Fig. 2 to enlarged drawing；
Fig. 4 is the two of the schematic diagram of internal structure of 532nm superhard material laser precision machining equipment；
Fig. 5 is the position adjusting mechanism stereoscopic schematic diagram of beam expanding lens；
Fig. 6 is the right view of position adjusting mechanism；
Fig. 7 is the rearview of position adjusting mechanism.
Specific embodiment
The embodiment of the present invention is described referring now to the drawings.
Embodiment
A specific embodiment of the invention is as shown in Figures 1 to 7, a kind of 532nm superhard material laser precision machining equipment,
Including pedestal 16, pedestal 16 is equipped with laser.The Z-type resonant cavity of laser is equipped in laser, the Z-type resonant cavity includes phase
Acousto-optic Q-switching 2,1064nm laser module 1 and the resonance lens set for 1064nm light to be converted into 532nm light of neighbour's arrangement, Z
The output end side of type resonant cavity is equipped with wave plate 11.The output end of laser is successively arranged beam expanding lens 27 along optical path direction, is equipped with
The cutting head 19 and fixture 20 of focus lamp.The horizontal mobile mechanism 21 that pedestal 16 is equipped with camera 22 and connect with fixture 20.
In the present embodiment, the laser of laser is horizontally projected, and 45 degree of reflecting mirrors 17 are equipped between beam expanding lens 27 and cutting head 19, is swashed
Light becomes straight down through 45 degree of reflecting mirrors 17.Camera 22 is located at the top of 45 degree of reflecting mirrors 17.
In order to improve the power of laser, in the laser, the quantity of Z-type resonant cavity is two and is mutually juxtaposed setting.Two
The output end of a Z-type resonant cavity is equipped with light combination mirror group.The output end of two Z-type resonant cavities is towards identical, the light combination mirror group packet
The first total reflective mirror 39 and light combination mirror 40 that the two is parallel to each other are included, the first total reflective mirror 39 and light combination mirror 40 are separately positioned on described two
The output end side of a Z-type resonant cavity and be in 45 degree angles with optical path, 40 the two mirror surface of the first total reflective mirror 39 and light combination mirror is opposite
Setting.In addition, according to the difference of two Z-type resonant cavity output end directions, mirror arrangement and number in light combination mirror group can also be with
Do selection appropriate.Two Z-type resonant cavities and light combination mirror group are mounted in jointly in a shell 15.Acousto-optic Q-switching 2 is continuous for making
Laser power output is converted into the pulsed laser output with high-peak power.
Resonance lens set includes that the first outgoing mirror 3 being sequentially arranged along optical path, pore diaphragm 4, frequency-doubling crystal 5 and second are complete
Anti- mirror.First outgoing mirror 3 is logical 532nm light, the structure for reflecting 1064nm light, and frequency-doubling crystal 5 is that can turn 1064nm light
It is changed to the structure of 532nm light.The direction of both laser module 1, pore diaphragm 4 be in phase between 3 input face of the first outgoing mirror
Same angle, the wave plate 11 are located at the side of 3 output face of the first outgoing mirror.The laser projected from 1064nm laser module 1 shines
It penetrates in the first outgoing mirror 3, the first outgoing mirror 3 reflects the light of 1064nm and passes through pore diaphragm 4.Pore diaphragm 4 is for limiting
The radial dimension of controlling laser beam.The laser of 1064nm becomes 532nm laser after frequency-doubling crystal, and 532nm laser is complete through second
Anti- mirror 6 sequentially passes through the first outgoing mirror 3 and wave plate 11 after reflecting.
The resonance lens set further includes third total reflective mirror 9 and polarizing film 8, and third total reflective mirror 9, polarizing film 8 and acousto-optic Q are opened
2 threes are closed to be sequentially arranged.Z-type resonant cavity further includes the 4th total reflective mirror along optical path between polarizing film 8 and acousto-optic Q-switching 2
7。
Output light path in the laser along the wave plate 11 is successively arranged the spectroscope 12 that two reflectings surface are parallel to each other
With the second outgoing mirror 13.
In the present embodiment, third total reflective mirror 9, polarizing film 8, the 4th total reflective mirror 7, acousto-optic Q-switching 2,1064nm laser module
1, baffle 14, the first outgoing mirror 3, pore diaphragm 4, frequency-doubling crystal 5 and the second total reflective mirror 6 are sequentially arranged along optical path.
Between optical path direction and frequency-doubling crystal 5 and the second total reflective mirror 6 between the polarizing film 8 and third total reflective mirror 9
Optical path direction is parallel, and the angle of the optical path direction between polarizing film 8 and third total reflective mirror 9 and 1 optical path direction of laser module is
10-50 °, it is ensured that under the premise of laser optical path is not interfered, as far as possible by the optical path between polarizing film 8 and third total reflective mirror 9
The hypotelorism of optical path direction between direction and frequency-doubling crystal 5 and the second total reflective mirror 6, to reduce the volume of laser.This
In embodiment, the angle of optical path direction and 1 optical path direction of laser module between polarizing film 8 and third total reflective mirror 9 is 33.5 degree.
The baffle 14 being equipped in the shell 15 of laser positioned at laser module 1 and the first outgoing mirror 3 between, the baffle 14 and
It is to be rotatably connected between the shell 15 of laser.
The light projected from Z-type resonant cavity wave plate 11 is circularly polarized laser.Circularly polarized laser is evenly distributed, and processing diamond is a kind of
Superhard material be most suitable.When work, the circularly polarized laser projected from one of wave plate 11 is placed through it and goes out light
The light combination mirror 40 of mouth side, the circularly polarized laser projected from another wave plate 11 are radiated at conjunction after the reflection of the first total reflective mirror 39
On beam mirror 40, two beam circularly polarized lasers close beam after light combination mirror 40 and irradiate to same direction, and the circular polarization after economic cooperation beam at this time swashs
Its power of light is not close twice before beam, while closing the laser after beam and possessing higher beam quality, when cutting superhard material
Its cutting accuracy is higher, and product quality is more preferable.It, can be in addition, by the laser module 1 closed in one of Z-type resonant cavity
It allows the laser of only one Z-type resonant cavity in laser to project, realizes and cutting material is come with lower-wattage, cope with different capacity
Demand, to have the ability of cutting different materials, without designing two sets of different systems, save the cost.
In the present embodiment, the control box 25 and laser power supply 26 being additionally provided on pedestal 16 below laser, laser
Device power supply 26 is connect with laser.
Cutting head 19 includes elevating mechanism, and the height of focus lamp can be adjusted according to the position to be cut of superhard material on fixture 20
Degree, it is ensured that the hot spot fallen on position to be cut is as small as possible, and heat is sufficiently high.
When being cut, superhard material (such as diamond) is fixed on one end of bonding stick, is bonded stick by pedestal 16
Fixture 20 fix.As shown in figure 3, fixture 20 includes difference the first clamping part arranged up and down and the second clamping part.First
Clamping part and the second clamping part are connected with each other by the first bolt.On the opposite end face of both first clamping part and the second clamping part
Equipped with one-to-one semi-cylindrical groove up and down, a pair of of semi-cylindrical groove constitutes horizontal-extending circular clamp hole.First
Clamping part is equipped with the locking mechanism of bonding stick, and locking mechanism includes the fastener hole and lock-screw being mutually threadedly engaged.Fastening
Hole and holding holes correspond, and fastener hole passes vertically through the first clamping part and is connected to holding holes, and lock-screw one end is from fastening
Hole stretches in holding holes and pushes down bonding stick.In addition, the opposite end face of both the first clamping part and the second clamping part is equipped with
One-to-one groove may be gore groove up and down, and a pair of of gore groove constitutes horizontal-extending diamond shape clamping
Hole, diamond shape holding holes can clamp the bonding stick of a variety of different-diameters.Clamping hole number on fixture is a plurality of and is arranged in juxtaposition,
Its orientation horizontal extension.
Cutting head 19 is equipped with blowing mechanism 24.Blowing mechanism 24 includes the air jet pipe that one end is equipped with gas outlet, air jet pipe
The other end be gas conduit connecting pin.Air jet pipe is two and its middle part and 19 bottom side of cutting head are rotation connection,
Its swaying direction is identical as the orientation of holding holes on fixture.During cutting superhard material, blowing mechanism 24 can
The melt substance being attached on superhard material is blown away, melt substance obstruction caused by laser cutting is avoided, is cut to improve
Cut efficiency and cutting accuracy.
The top of 45 degree of reflecting mirrors 17 is equipped with 45 degree of prisms 23 of arrangement in parallel, and the camera lens of the camera 22 is horizontal
Towards 45 degree of prisms 23.The back side of second total reflective mirror 6 and third total reflective mirror 9 is equipped with laser absorption plate 10, is used for minute quantity
Fall through the laser absorption of the second total reflective mirror 6 and third total reflective mirror 9.
In addition, water-cooling system can also be arranged on pedestal 16, water-cooling system is equipped with for giving acousto-optic Q-switching 2 He
1064nm laser module 1 carries out cooling water cooling tube.
The position adjusting mechanism 30 of beam expanding lens 27 is additionally provided on pedestal 16.In the present embodiment, position adjusting mechanism 30 includes
It is capable of fixing the first mobile translation plates of the substrate 31 on pedestal 16, the sleeve 32 for installing beam expanding lens 27, horizontal linear
331, the second translation plates 332 and angular deflection plate 341 to move linearly up and down.Sleeve 32 is fixed in the first translation plates 331.Base
Plate 31, angular deflection plate 341, the second translation plates 332 and the first translation plates 331 4 are sequentially arranged along optical path direction, and four
Vertical arrangement.
Horizontal guide 333 is installed in second translation plates 332, the first translation plates 331 are set in horizontal guide 333, and
The spring being also arranged in horizontal guide 333 between the first translation plates 331 and the second translation plates 332.Second translation plates 332
Be equipped be threadedly engaged with it, the first push rod 334 for pushing the first translation plates 331 to move horizontally, the first translation plates 331 exist
It can be resetted under spring effect.Vertical guide rod 342 is installed on angular deflection plate 341, the second translation plates 332 are set in vertical guide rod
The spring being also arranged on 342, and on vertical guide rod 342 between the second translation plates 332 and angular deflection plate 341.Angle
Deflecting plates 341 be equipped be threadedly engaged with it, the second push rod 343 for pushing the second translation plates 332 to move down, second is flat
Moving plate 332 can reset under the action of the spring.By operating the first push rod 334 and the second push rod 343, adjustable beam expanding lens 27
Upper and lower, left and right position.
Angular deflection plate 341 is square, what two inferior horn and being respectively equipped at angle on one of them was connect with substrate 31
First screw spring assembly 35, the second screw spring assembly 36 and third screw spring assembly 37, wherein third screw groups of springs
Part 37 is located at the surface of the second screw spring assembly 36, and each screw spring assembly includes screw and is set on screw
Spring.According to circumstances turn the first screw spring assembly 35, the second screw spring assembly 36 and third screw spring assembly 37 3
Person, the horizontal hunting angle of adjustable beam expanding lens 27 and upper and lower inclination angle, to obtain optimal optical path in actual operation.
Combining most preferred embodiment above, invention has been described, but the invention is not limited to implementations disclosed above
Example, and various modifications, equivalent combinations according to the essence of the present invention should be covered.
Claims (10)
1. a kind of 532nm superhard material laser precision machining equipment, including pedestal (16), which is characterized in that pedestal is set on (16)
There is laser, the Z-type resonant cavity of laser is equipped in the laser, the Z-type resonant cavity includes the acousto-optic Q-switching being adjacently positioned
(2), 1064nm laser module (1) and the resonance lens set for 1064nm light to be converted into 532nm light, Z-type resonant cavity it is defeated
Outlet side is equipped with wave plate (11)；The output end of laser is successively arranged beam expanding lens (27) along optical path direction, equipped with focus lamp
Cutting head (19) and fixture (20)；The horizontal mobile mechanism that pedestal (16) is equipped with camera (22) and connect with fixture (20)
(21)。
2. a kind of 532nm superhard material laser precision machining equipment according to claim 1, which is characterized in that the expansion
45 degree of reflecting mirrors (17) are equipped between Shu Jing (27) and cutting head (19), the camera (22) is located at 45 degree of reflecting mirrors (17)
Top.
3. a kind of 532nm superhard material laser precision machining equipment according to claim 2, which is characterized in that described 45
The top for spending reflecting mirror (17) is equipped with 45 degree of prisms (23) of arrangement in parallel, and the camera lens of the camera (22) is horizontally toward
45 degree of prisms (23).
4. being equipped according to claim 1 to a kind of 532nm superhard material laser precision machining described in 3 any one, feature
It is, the cutting head (19) is equipped with blowing mechanism (24)；The position that the pedestal (16) is equipped with beam expanding lens (27) is adjusted
Mechanism (30).
5. a kind of 532nm superhard material laser precision machining equipment according to claim 1, which is characterized in that described
In laser, the quantity of Z-type resonant cavity is two and is mutually juxtaposed setting, and the output end of two Z-type resonant cavities is equipped with light combination mirror
Group；The output end of two Z-type resonant cavities is towards identical, the first total reflective mirror (39) that both the light combination mirror group, which includes, is parallel to each other
With light combination mirror (40), the first total reflective mirror (39) and light combination mirror (40) are separately positioned on the output end one of described two Z-type resonant cavities
Side and with optical path be in 45 degree angles, the first total reflective mirror (39) and light combination mirror (40) the two mirror surface be oppositely arranged.
6. a kind of 532nm superhard material laser precision machining equipment, feature described according to claim 1 or 2 or 3 or 5 exist
In, the resonance lens set include the first outgoing mirror (3) being sequentially arranged along optical path, pore diaphragm (4), frequency-doubling crystal (5) and
Second total reflective mirror (6)；First outgoing mirror (3) is logical 532nm light, the structure for reflecting 1064nm light, and frequency-doubling crystal (5) is energy
1064nm light is converted to the structure of 532nm light；Direction and the first outgoing mirror of both laser module (1), pore diaphragm (4)
It (3) is in identical angle between input face, the wave plate (11) is located at the side of the first outgoing mirror (3) output face.
7. a kind of 532nm superhard material laser precision machining equipment according to claim 6, which is characterized in that described humorous
Vibration lens group further includes third total reflective mirror (9) and polarizing film (8), third total reflective mirror (9), polarizing film (8) and acousto-optic Q-switching (2)
Three is sequentially arranged, and the Z-type resonant cavity includes being located at the between polarizing film (8) and acousto-optic Q-switching (2) the 4th along optical path to be all-trans
Mirror (7).
8. a kind of 532nm superhard material laser precision machining equipment, feature described according to claim 1 or 2 or 3 or 5 or 7
It is, the output light path in the laser along the wave plate (11) is successively arranged the spectroscope (12) that two reflectings surface are parallel to each other
With the second outgoing mirror (13).
9. a kind of 532nm superhard material laser precision machining equipment according to claim 7, which is characterized in that described inclined
The optical path side between optical path direction and frequency-doubling crystal (5) and the second total reflective mirror (6) to shake piece (8) between third total reflective mirror (9)
To parallel, the angle of optical path direction and laser module (1) optical path direction between polarizing film (8) and third total reflective mirror (9) is
10-50°。
10. a kind of 532nm superhard material laser precision machining equipment according to claim 6, which is characterized in that described to swash
The rotatable baffle (14) between laser module (1) and the first outgoing mirror (3) is equipped in light device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910217758.3A CN109794692A (en) | 2019-03-21 | 2019-03-21 | A kind of 532nm superhard material laser precision machining equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910217758.3A CN109794692A (en) | 2019-03-21 | 2019-03-21 | A kind of 532nm superhard material laser precision machining equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109794692A true CN109794692A (en) | 2019-05-24 |
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Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201245024Y (en) * | 2008-08-22 | 2009-05-27 | 深圳市泛友科技有限公司 | Laser inner carving apparatus |
| CN102386550A (en) * | 2010-09-03 | 2012-03-21 | 苏州天弘激光股份有限公司 | Method for generating diaphragm on light pass face of solid gained medium of solid laser |
| CN102798954A (en) * | 2012-08-22 | 2012-11-28 | 中国科学院上海光学精密机械研究所 | Five-dimensional adjusting rack |
| CN103050886A (en) * | 2012-12-25 | 2013-04-17 | 青岛镭创光电技术有限公司 | Wide-temperature laser module |
| CN204053246U (en) * | 2014-09-17 | 2014-12-31 | 沈阳工业大学 | Electromagnetic Drive permanent magnetism self-replaced type laser cutting head |
| CN105006732A (en) * | 2015-08-12 | 2015-10-28 | 广州安特激光技术有限公司 | Medium and small power LD parallelly pumped high-power green laser |
| CN105954858A (en) * | 2016-06-29 | 2016-09-21 | 西安中科微精光子制造科技有限公司 | Three-DF (degree of freedom) adjustable reflector device |
| CN107398637A (en) * | 2017-08-01 | 2017-11-28 | 深圳市大族锐波传感科技有限公司 | A kind of coupling welding machine |
| CN207057865U (en) * | 2017-08-02 | 2018-03-02 | 上海嘉强自动化技术有限公司 | A kind of multi-functional middle high power commercial Application optical-fiber laser processing head |
| CN107824958A (en) * | 2017-12-01 | 2018-03-23 | 暨南大学 | A kind of 355nm Ultra-Violet Lasers diamond cut equipment |
| CN207205560U (en) * | 2017-04-18 | 2018-04-10 | 伯纳激光科技有限公司 | A kind of high-power carbon dioxide laser cutting machine light path mirror unit |
| CN207540490U (en) * | 2017-11-29 | 2018-06-26 | 山东代代良智能控制科技有限公司 | A kind of product size vision-based detection camera detection unit |
| CN108332852A (en) * | 2018-05-09 | 2018-07-27 | 天津优视医疗器械有限公司 | A kind of centering adjusting device and its working method applied to OCT spectrometer cameras |
| CN108346971A (en) * | 2018-04-08 | 2018-07-31 | 北京华宇德信光电技术有限公司 | A kind of acousto-optic Q modulation frequency double laser using electrooptical switching control laser output |
| CN109175712A (en) * | 2018-09-10 | 2019-01-11 | 绍兴豪春纺织科技有限公司 | A kind of laser engraving machine head |
| CN209664612U (en) * | 2019-03-21 | 2019-11-22 | 广州安特激光技术有限公司 | A kind of 532nm superhard material laser precision machining equipment |
-
2019
- 2019-03-21 CN CN201910217758.3A patent/CN109794692A/en active Pending
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201245024Y (en) * | 2008-08-22 | 2009-05-27 | 深圳市泛友科技有限公司 | Laser inner carving apparatus |
| CN102386550A (en) * | 2010-09-03 | 2012-03-21 | 苏州天弘激光股份有限公司 | Method for generating diaphragm on light pass face of solid gained medium of solid laser |
| CN102798954A (en) * | 2012-08-22 | 2012-11-28 | 中国科学院上海光学精密机械研究所 | Five-dimensional adjusting rack |
| CN103050886A (en) * | 2012-12-25 | 2013-04-17 | 青岛镭创光电技术有限公司 | Wide-temperature laser module |
| CN204053246U (en) * | 2014-09-17 | 2014-12-31 | 沈阳工业大学 | Electromagnetic Drive permanent magnetism self-replaced type laser cutting head |
| CN105006732A (en) * | 2015-08-12 | 2015-10-28 | 广州安特激光技术有限公司 | Medium and small power LD parallelly pumped high-power green laser |
| CN105954858A (en) * | 2016-06-29 | 2016-09-21 | 西安中科微精光子制造科技有限公司 | Three-DF (degree of freedom) adjustable reflector device |
| CN207205560U (en) * | 2017-04-18 | 2018-04-10 | 伯纳激光科技有限公司 | A kind of high-power carbon dioxide laser cutting machine light path mirror unit |
| CN107398637A (en) * | 2017-08-01 | 2017-11-28 | 深圳市大族锐波传感科技有限公司 | A kind of coupling welding machine |
| CN207057865U (en) * | 2017-08-02 | 2018-03-02 | 上海嘉强自动化技术有限公司 | A kind of multi-functional middle high power commercial Application optical-fiber laser processing head |
| CN207540490U (en) * | 2017-11-29 | 2018-06-26 | 山东代代良智能控制科技有限公司 | A kind of product size vision-based detection camera detection unit |
| CN107824958A (en) * | 2017-12-01 | 2018-03-23 | 暨南大学 | A kind of 355nm Ultra-Violet Lasers diamond cut equipment |
| CN108346971A (en) * | 2018-04-08 | 2018-07-31 | 北京华宇德信光电技术有限公司 | A kind of acousto-optic Q modulation frequency double laser using electrooptical switching control laser output |
| CN108332852A (en) * | 2018-05-09 | 2018-07-27 | 天津优视医疗器械有限公司 | A kind of centering adjusting device and its working method applied to OCT spectrometer cameras |
| CN109175712A (en) * | 2018-09-10 | 2019-01-11 | 绍兴豪春纺织科技有限公司 | A kind of laser engraving machine head |
| CN209664612U (en) * | 2019-03-21 | 2019-11-22 | 广州安特激光技术有限公司 | A kind of 532nm superhard material laser precision machining equipment |
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