CN109791303A - 利用可变光束形状的激光的材料加工 - Google Patents

利用可变光束形状的激光的材料加工 Download PDF

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Publication number
CN109791303A
CN109791303A CN201780043627.7A CN201780043627A CN109791303A CN 109791303 A CN109791303 A CN 109791303A CN 201780043627 A CN201780043627 A CN 201780043627A CN 109791303 A CN109791303 A CN 109791303A
Authority
CN
China
Prior art keywords
workpiece
light beam
optical element
lens
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780043627.7A
Other languages
English (en)
Chinese (zh)
Inventor
P·塔耶巴提
F·维拉里尔-绍塞多
周望龙
B·陈
R·黄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp of North America
Original Assignee
Teradiode Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US15/261,096 external-priority patent/US11204506B2/en
Application filed by Teradiode Inc filed Critical Teradiode Inc
Publication of CN109791303A publication Critical patent/CN109791303A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0734—Shaping the laser spot into an annular shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
CN201780043627.7A 2016-07-15 2017-07-14 利用可变光束形状的激光的材料加工 Pending CN109791303A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201662362824P 2016-07-15 2016-07-15
US62/362824 2016-07-15
US15/261,096 US11204506B2 (en) 2014-03-05 2016-09-09 Polarization-adjusted and shape-adjusted beam operation for materials processing
US15/261096 2016-09-09
PCT/US2017/042089 WO2018013901A2 (en) 2016-07-15 2017-07-14 Material processing utilizing a laser having a variable beam shape

Publications (1)

Publication Number Publication Date
CN109791303A true CN109791303A (zh) 2019-05-21

Family

ID=60953351

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780043627.7A Pending CN109791303A (zh) 2016-07-15 2017-07-14 利用可变光束形状的激光的材料加工

Country Status (4)

Country Link
JP (2) JP6783374B2 (ja)
CN (1) CN109791303A (ja)
DE (1) DE112017003592T5 (ja)
WO (1) WO2018013901A2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110614446A (zh) * 2019-09-24 2019-12-27 上海精测半导体技术有限公司 一种切割设备及切割方法
CN113710404A (zh) * 2019-04-04 2021-11-26 宝钢激光拼焊(德国)有限公司 熔焊由可模压硬化钢制成的一个或多个钢板的方法
CN114633018A (zh) * 2020-12-16 2022-06-17 阳程科技股份有限公司 使用于光轴倾斜加工的光学透镜模块

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1266776A (zh) * 1999-01-28 2000-09-20 莱斯特加工技术公司 焊接塑料工件或塑料与其他材料的激光焊接方法及装置
JP2005314198A (ja) * 2004-04-26 2005-11-10 Lemi Ltd ガラス割断用レーザ装置
CN1739903A (zh) * 2004-08-27 2006-03-01 索尼株式会社 基板加工装置及基板加工方法
CA2660062A1 (en) * 2007-04-16 2008-11-06 Toyota Jidosha Kabushiki Kaisha Laser welding method for stacked workpieces
CN102149508A (zh) * 2008-09-12 2011-08-10 法国液体空气焊接公司 利用通过衍射光学部件修改激光束品质因子的装置的激光切割方法和设备
CN102642084A (zh) * 2011-01-21 2012-08-22 莱丹科技股份公司 用于激光光斑调整的方法及用于执行该方法的激光装置
US20130146569A1 (en) * 2011-12-13 2013-06-13 Hypertherm, Inc. Optimization and control of beam quality for material processing
US20140027415A1 (en) * 2012-07-26 2014-01-30 General Electric Company Adaptive control hybrid welding system and methods of controlling
CN105531074A (zh) * 2013-02-04 2016-04-27 纽波特公司 用于激光切割透明和半透明基底的方法和装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69418248T2 (de) * 1993-06-03 1999-10-14 Hamamatsu Photonics Kk Optisches Laser-Abtastsystem mit Axikon
US6192062B1 (en) 1998-09-08 2001-02-20 Massachusetts Institute Of Technology Beam combining of diode laser array elements for high brightness and power
US6208679B1 (en) 1998-09-08 2001-03-27 Massachusetts Institute Of Technology High-power multi-wavelength external cavity laser
US6469275B2 (en) * 1999-01-20 2002-10-22 Lsp Technologies, Inc Oblique angle laser shock processing
JP2000263257A (ja) * 1999-03-15 2000-09-26 Hitachi Cable Ltd 非金属材料のレーザによる割断方法及びその装置
JP3722731B2 (ja) * 2000-09-13 2005-11-30 浜松ホトニクス株式会社 レーザ加工方法
US7164152B2 (en) * 2003-09-16 2007-01-16 The Trustees Of Columbia University In The City Of New York Laser-irradiated thin films having variable thickness
JP2005230834A (ja) * 2004-02-18 2005-09-02 Campus Create Co Ltd レーザ光を用いた加工方法および加工装置
JP4350558B2 (ja) * 2004-03-09 2009-10-21 三菱電機株式会社 レーザビーム光学系およびレーザ加工装置
US8053704B2 (en) * 2008-05-27 2011-11-08 Corning Incorporated Scoring of non-flat materials
US8670180B2 (en) 2010-03-05 2014-03-11 TeraDiode, Inc. Wavelength beam combining laser with multiple outputs
CN103081261B (zh) 2010-03-05 2016-03-09 泰拉二极管公司 波长光束组合***与方法
JP2012094591A (ja) * 2010-10-25 2012-05-17 Disco Abrasive Syst Ltd ビアホールの加工方法およびレーザー加工装置
JP2011119026A (ja) * 2011-03-22 2011-06-16 Panasonic Corp 光ピックアップ装置及びそれに用いられる対物レンズ
US9335551B2 (en) 2012-11-28 2016-05-10 TeraDiode, Inc. Welding techniques using multi-wavelength beam combining systems
JP5998968B2 (ja) * 2013-02-04 2016-09-28 旭硝子株式会社 ガラス基板の切断方法、ガラス基板及び近赤外線カットフィルタガラス
DE102014200633B3 (de) * 2014-01-15 2015-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche
US9889524B2 (en) * 2014-03-05 2018-02-13 TeraDiode, Inc. Polarization-adjusted beam operation for materials processing
US9429849B2 (en) * 2014-03-07 2016-08-30 Kabushiki Kaisha Toshiba Adjusting method of pattern transferring plate, laser application machine and pattern transferring plate
DE102014108259A1 (de) * 2014-06-12 2015-12-17 Scanlab Ag Vorrichtung zur Lasermaterialbearbeitung

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1266776A (zh) * 1999-01-28 2000-09-20 莱斯特加工技术公司 焊接塑料工件或塑料与其他材料的激光焊接方法及装置
JP2005314198A (ja) * 2004-04-26 2005-11-10 Lemi Ltd ガラス割断用レーザ装置
CN1739903A (zh) * 2004-08-27 2006-03-01 索尼株式会社 基板加工装置及基板加工方法
CA2660062A1 (en) * 2007-04-16 2008-11-06 Toyota Jidosha Kabushiki Kaisha Laser welding method for stacked workpieces
CN102149508A (zh) * 2008-09-12 2011-08-10 法国液体空气焊接公司 利用通过衍射光学部件修改激光束品质因子的装置的激光切割方法和设备
CN102642084A (zh) * 2011-01-21 2012-08-22 莱丹科技股份公司 用于激光光斑调整的方法及用于执行该方法的激光装置
US20130146569A1 (en) * 2011-12-13 2013-06-13 Hypertherm, Inc. Optimization and control of beam quality for material processing
US20140027415A1 (en) * 2012-07-26 2014-01-30 General Electric Company Adaptive control hybrid welding system and methods of controlling
CN105531074A (zh) * 2013-02-04 2016-04-27 纽波特公司 用于激光切割透明和半透明基底的方法和装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113710404A (zh) * 2019-04-04 2021-11-26 宝钢激光拼焊(德国)有限公司 熔焊由可模压硬化钢制成的一个或多个钢板的方法
CN110614446A (zh) * 2019-09-24 2019-12-27 上海精测半导体技术有限公司 一种切割设备及切割方法
CN114633018A (zh) * 2020-12-16 2022-06-17 阳程科技股份有限公司 使用于光轴倾斜加工的光学透镜模块

Also Published As

Publication number Publication date
WO2018013901A3 (en) 2018-07-26
WO2018013901A2 (en) 2018-01-18
JP6783374B2 (ja) 2020-11-11
DE112017003592T5 (de) 2019-03-28
JP2021007985A (ja) 2021-01-28
JP2019523137A (ja) 2019-08-22
JP7098696B2 (ja) 2022-07-11

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Effective date of registration: 20230703

Address after: new jersey

Applicant after: PANASONIC CORPORATION OF NORTH AMERICA

Address before: Massachusetts

Applicant before: TERADIODE, Inc.