CN109782254A - Scanning means and its scan method, laser radar - Google Patents

Scanning means and its scan method, laser radar Download PDF

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Publication number
CN109782254A
CN109782254A CN201910083057.5A CN201910083057A CN109782254A CN 109782254 A CN109782254 A CN 109782254A CN 201910083057 A CN201910083057 A CN 201910083057A CN 109782254 A CN109782254 A CN 109782254A
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CN
China
Prior art keywords
galvanometer
scanning
scanning means
spatial light
light modulator
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CN201910083057.5A
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Chinese (zh)
Inventor
卢炎聪
向少卿
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Hesai Photonics Technology Co Ltd
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Hesai Photonics Technology Co Ltd
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Application filed by Hesai Photonics Technology Co Ltd filed Critical Hesai Photonics Technology Co Ltd
Priority to CN201910083057.5A priority Critical patent/CN109782254A/en
Publication of CN109782254A publication Critical patent/CN109782254A/en
Priority to PCT/CN2020/073151 priority patent/WO2020156310A1/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements

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  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

A kind of scanning means and its scan method, laser radar, the scanning means includes: galvanometer, the galvanometer has movement portion, the movement portion has the reflecting surface for being suitable for reflecting incident beam to form outgoing beam, the galvanometer changes the direction of propagation of the outgoing beam by the swing in the movement portion, at least one in the vibration frequency and amplitude in the movement portion of the galvanometer is variable;Spatial light modulator, the spatial light modulator are located in the optical path of at least one in the incident beam and the outgoing beam, and the spatial light modulator is suitable for adjusting phase of light wave to change direction of beam propagation.Technical solution of the present invention can be under the premise of guaranteeing the scan frequency of the scanning means, realizing the acquisition of high frame frequency, make the adjustable of the direction of scanning field of view, field angle size and visual field angular resolution, so as to adjust visual field according to detection demand, more accurate target information can be provided for unmanned or other field.

Description

Scanning means and its scan method, laser radar
Technical field
The present invention relates to laser acquisition fields, in particular to a kind of scanning means and its scan method, laser radar.
Background technique
Laser radar is a kind of common distance measuring sensor, has remote detection range, high resolution, little interference by environment etc. Feature is widely used in the fields such as intelligent robot, unmanned plane, unmanned.In recent years, automatic Pilot technology is quickly grown, Core sensor of the laser radar as its perceived distance, it is indispensable.
Laser radar in use, when the target for finding some direction cause algorithm note that needing further When detection, need to carry out the laser acquisition of more harness on this direction, i.e., development examination is with the laser line number in target, to divide Distinguish the details of target.
But laser radar in the prior art is often difficult to reach this demand.
Summary of the invention
Problems solved by the invention is to provide a kind of scanning means and its scan method, laser radar, is guaranteeing high frame frequency Under the premise of acquisition, the adjustable of visual field direction, field angle size and visual field angular resolution is realized, to meet laser radar hair The technical need of existing barrier or target to be detected.
To solve the above problems, the present invention provides a kind of scanning means, comprising: galvanometer, the galvanometer have movement portion, institute Stating movement portion has the reflecting surface for being suitable for reflecting incident beam to form outgoing beam, and the galvanometer passes through the movement portion Swing change the direction of propagation of the outgoing beam, in the vibration frequency and amplitude in the movement portion of the galvanometer at least One is variable;Spatial light modulator, the spatial light modulator are located in the incident beam and the outgoing beam extremely In few one optical path, the spatial light modulator is suitable for adjusting phase of light wave to change direction of beam propagation.
Optionally, the spatial light modulator includes: in transmissive spatial optical modulator or reflective spatial light modulator At least one.
Optionally, the spatial light modulator includes: acousto-optic modulator, electrooptic modulator, magneto-optic modulator, liquid crystal spatial At least one of optical modulator or the micro- reflective spatial modulator of number.
Optionally, it is 0 ° to 90 ° that the spatial light modulator, which changes the angular range of direction of beam propagation, preferred angle Range is 0 ° to 60 °, and more preferably angular range is 0 ° to 30 °.
Optionally, further includes: control unit, described control unit are connected with the galvanometer, and described control unit is suitable for Adjust at least one of vibration frequency and the amplitude in the movement portion of the galvanometer.
Optionally, described control unit is also connected with the spatial light modulator, to control the spatial modulator to light The adjusting of wave phase.
Optionally, the galvanometer includes MEMS galvanometer.
Optionally, the galvanometer includes at least one of one-dimensional galvanometer or 2-D vibration mirror.
Correspondingly, the present invention also provides a kind of scan methods, comprising: provide scanning means, the scanning means is this hair Bright scanning means;The vibration frequency and amplitude and the spatial light modulator for adjusting the movement portion of the galvanometer are adjusted At least one of phase of light wave size is to be scanned.
Optionally, when scanning nearby target, increase the amplitude of the galvanometer.
Optionally, the scanning means successively receives at least two incident beams;At least two incident beam is successively Form at least two outgoing beams;When scanning nearby target, the spatial light modulator is controlled so that at least two outgoing The field stitching of light beam.
Optionally, the scanning means receives at least two incident beams;The scanning means includes at least two galvanometers With at least two spatial light modulators;The galvanometer, the spatial light modulator and the incident beam correspond;Scanning Nearby when target, control at least two spatial light modulator so that the formed outgoing beam of corresponding incident beam visual field Splicing.
Optionally, when scanning distant object, reduce the amplitude of the galvanometer.
Optionally, increase the vibration frequency in the movement portion of the galvanometer.
Optionally, when receiving detectable signal, the spatial light modulator is adjusted according to the detectable signal so that light beam passes Direction is broadcast towards target to be detected.
Optionally, adjusted according to the detectable signal in the vibration frequency and amplitude in the movement portion of the galvanometer to It is one few.
Optionally, when receiving supplement signal, the spatial light modulator is adjusted according to the supplement signal so that light beam passes Direction is broadcast towards target to be detected.
Optionally, adjusted according to the supplement signal in the vibration frequency and amplitude in the movement portion of the galvanometer to It is one few.
In addition, the present invention also provides a kind of laser radars, comprising: emitter, the emitter generate incident beam; Scanning means, the scanning means receive incident beam and form scanning light beam, the scanning means according to the incident beam For scanning means of the invention;At least partly described scanning light beam reflects to form echo beam through target to be detected;Reception device, The reception device receives the echo beam.
Optionally, further includes: detection device, the detection device are connected with the scanning means, and the detection device produces Raw detectable signal.
Optionally, further includes: identification device, the identification device are connected with the reception device, the identification device root Judge whether target to be detected is complete according to the received echo beam of the reception device institute;The identification device also with the scanning Device is connected, and when judging that target to be detected is imperfect, the identification device generates supplement signal.
Compared with prior art, technical solution of the present invention has the advantage that
In technical solution of the present invention, the scanning means includes that at least one in movement portion vibration frequency and amplitude is variable Galvanometer and spatial light modulator.Movement portion vibration frequency and the adjustable of amplitude can make to be formed by according to the incident beam The field angle size and angular resolution of scanning light beam are realized adjustable;The setting of the spatial light modulator can make the scanning light Realize adjustable in beam visual field direction.Therefore the scanning means can be realized scanning field of view direction, field angle size and field angle Resolution ratio it is adjustable, so as to according to detection demand adjust visual field;And the combination setting of galvanometer and spatial light modulator, also The scan frequency that can guarantee the scanning means help to obtain high frame frequency acquisition, provides for unmanned or other field More accurate target information.
In optinal plan of the invention, the spatial light modulator can be transmissive spatial optical modulator and reflective sky Between at least one of optical modulator.Spatial light modulator modulated light wave mode flexibly selects, and can be the light of scanning means Road provides biggish design space, is conducive to the raising of optical path precision and the reduction of optical path building difficulty.
In optinal plan of the present invention, the spatial light modulator can be acousto-optic modulator, electrooptic modulator, magneto-optic modulation At least one of device, LCD space light modulator or the micro- reflective spatial modulator of number.The spatial light modulator is wide in range Range of choice can make composed scanning means be suitble to multiple technologies demand, to expand the applicable model of the scanning means It encloses.In particular, the spatial light modulator can in LCD space light modulator and the micro- reflective spatial modulator of number extremely Few one kind.The angle that LCD space light modulator and the micro- reflective spatial modulator of number change direction of beam propagation is relatively large, Therefore at least one of LCD space light modulator or the micro- reflective spatial modulator of number are set by the spatial light modulator Way, can scanning field of view direction change angle it is relatively large, it might even be possible to make visual field towards front any angle, so as to The scope of application of enough further expansion scanning means, is more advantageous to the scanning means in the application in unmanned field.
In optinal plan of the present invention, the scanning means further include: the control unit being connected with the galvanometer, to adjust It states galvanometer and swings at least one in the frequency and amplitude of the acting surface;Described control unit can also be with the space light modulation Device is connected to control adjusting of the spatial light modulator to phase of light wave.Therefore described control unit can be according to specific need It asks, coordinates frequency that the galvanometer swings the acting surface and amplitude and the spatial light modulator to direction of beam propagation It adjusts, to make to be formed by scanning light beam with preferable or even optimal visual field direction, field angle size and field angle point Resolution provides more accurate information for the discovery and complete detection of barrier or target to be detected.
Detailed description of the invention
Fig. 1 is the light channel structure schematic diagram of one embodiment of scanning means of the present invention;
When Fig. 2 is that phase delay caused by phase delay caused by Fig. 1 spatial light modulator and glass plate is equivalent Light path schematic diagram;
Fig. 3 is phase delay caused by Fig. 1 spatial light modulator and the prism etc. that the edge direction+x thickness is gradually increased Light path schematic diagram when effect;
Fig. 4 is phase delay caused by Fig. 1 spatial light modulator and the prism etc. that the edge direction-x thickness is gradually increased Light path schematic diagram when effect;
Fig. 5 is the flow diagram of one embodiment of scan method of the present invention.
Specific embodiment
It can be seen from background technology that there are visual field angular direction, size and angles for the scanning means of laser radar in the prior art Resolution ratio is unable to satisfy the problem of detection demand.
In the prior art, the method that solid-state laser radar is realized is mainly MEMS galvanometer scheme.MEMS galvanometer scheme exists After machine installs, field of view is fixed, and can only detect the target within maximum field of view angle, cannot be to any of measured zone Target carries out development examination to distinguish more specific details.
The method that solid-state laser radar is realized is mainly MEMS galvanometer scheme.MEMS galvanometer scheme is installed in machine Afterwards, field of view is fixed, and can only be detected in determining region, and the amplitude by changing galvanometer can change field angle Size realize development examination, but it can only observe a fixed direction, cannot observe any direction in field angle and be added Secret agent surveys, and can not detect the target outside maximum field of view angle.If only using spatial light modulator, spatial light modulator speed Slowly, it is unfavorable for obtaining high frame per second acquisition.
To solve the technical problem, the present invention provides a kind of scanning means, comprising: the galvanometer with movement portion, it is described At least one in the vibration frequency and amplitude in the movement portion of galvanometer is variable;Positioned at the incident beam and the outgoing Spatial light modulator in the optical path of at least one in light beam, the spatial light modulator are suitable for adjusting phase of light wave to change Direction of beam propagation.Movement portion vibration frequency is that variable galvanometer is mutually tied with spatial light modulator at least one in amplitude The setting combined is closed, can make the scanning field of view direction of the scanning means, field angle size and visual field angular resolution can It adjusts, so as to adjust visual field according to detection demand;And the combination setting of galvanometer and spatial light modulator, additionally it is possible to guarantee institute The scan frequency for stating scanning means help to obtain high frame frequency acquisition, provides for unmanned or other field more accurate Target information.
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention Specific embodiment be described in detail.
With reference to Fig. 1, the light channel structure schematic diagram of one embodiment of scanning means of the present invention is shown.
The scanning means includes: galvanometer 110, and the galvanometer 110 has movement portion 111, and the movement portion 111 has suitable It is suitable for the reflecting surface 112 of reflection incident beam 101 to form outgoing beam 102, the galvanometer 110 passes through the movement portion 111 swing changes the direction of propagation of the outgoing beam 102, the vibration frequency in the movement portion 111 of the galvanometer 110 It is variable at least one in amplitude;Spatial light modulator 120, the spatial light modulator 120 are located at the incident beam 101 and the outgoing beam 102 at least one optical path, the spatial light modulator 120 is suitable for adjusting phase of light wave To change direction of beam propagation.
111 vibration frequency of movement portion and the adjustable of amplitude can make to be formed by scanning light according to the incident beam 101 The field angle size and visual field angular resolution of beam 103 are realized adjustable;The setting of the spatial light modulator 120 can make described sweep It is adjustable to retouch the realization of 103 visual field direction of light beam.Therefore the scanning means can be realized scanning field of view direction, field angle size and Visual field angular resolution it is adjustable, so as to according to detection demand adjust visual field;And galvanometer 110 and spatial light modulator 120 Combination setting, additionally it is possible to the scan frequency for guaranteeing the scanning means help to obtain the acquisition of high frame frequency, to be unmanned or Other field provides more accurate target information.
Technical solution of the present invention is described in detail with reference to the accompanying drawing.
The galvanometer 110 includes the movement portion 111 with reflecting surface 112, and the reflecting surface 112 can reflect the received light of institute Line.Specifically, the scanning means receives collimated incident beam 101, the incident beam 101 is projected to the reflecting surface On 112, reflect to form outgoing beam 102 through the reflecting surface 112.
The galvanometer 110 further includes shaft (not shown), and the movement portion 111 can be put around the shaft It is dynamic;At least partly surface in the movement portion 111 is the reflecting surface 112, described anti-with the swing in the movement portion 111 Face 112 is penetrated consequently also to swing;In the case where 101 direction of propagation of incident beam is constant, the outgoing beam 102 The direction of propagation, which can also change to make to be formed by the realization of scanning light beam 103 with the swing in the movement portion 111, sweeps It retouches.
It should be noted that the galvanometer 110 includes at least one of one-dimensional galvanometer or 2-D vibration mirror.In Fig. 1 not The shaft is shown.In one embodiment of this invention, the galvanometer is 2-D vibration mirror, can be in two orthogonal dimensions On swung, so that scanning light beam be made to be scanned three-dimensional space.In other embodiments of the invention, the galvanometer It can be one-dimensional galvanometer, the vertical paper setting of the axis of the shaft of the galvanometer, the movement portion is around the shaft swing.But These set-up modes are only some examples, and the present invention is not intended to limit position and the set-up mode of the shaft.
The amplitude in the movement portion 111, i.e., the amplitude of the swing in the described movement portion 111, the size of amplitude and the scanning The field angle size of light beam 103 is related: the amplitude in the movement portion 111 is bigger, and the field angle of the scanning light beam 103 is bigger; The amplitude in the movement portion 111 is smaller, and the field angle of the scanning light beam 103 is smaller.
Moreover, incident beam 101 it is constant (the i.e. described incident beam 101 be pulsed light when, the incident beam 101 Pulse frequency is constant) in the case where, the size of 103 field angle of scanning light beam also will affect the angular resolution of scanning light beam 103 Rate height: the field angle of the scanning light beam 103 is bigger, and the angle between adjacent scanning light beam 103 is bigger, and row is got over It is low, angular resolution is lower;The field angle of the scanning light beam 103 is smaller, and the angle between adjacent scanning light beam 103 is smaller, line Shu Midu is higher, angular resolution is higher.
On the other hand, field angle size is constant or field angle variation in a certain range when, the movement portion 111 Vibration frequency, i.e. the frequency that swings of the movement portion 111, the angular resolution of the height of vibration frequency and the scanning light beam 103 Rate height is related: the vibration frequency in the movement portion 111 is higher, and scanning harness is fewer, the angular resolution of the scanning light beam 103 It is lower;The vibration frequency in the movement portion 111 is lower, and scanning harness is more, and the angular resolution of the scanning light beam 103 is higher.
At least one in the vibration frequency and amplitude in the movement portion 111 is variable, therefore is passed in the incident light 101 Broadcast direction it is constant in the case where, be formed by the direction of propagation and propagation side of the reflected beams 102 through the reflecting surface 112 reflection Into the frequency of variation, at least one is variable, so as to make the field angle size and angle according to the scanning light beam 103 Resolution ratio is realized adjustable.
It should be noted that by the swing in movement portion 111 described in field drives, therefore can pass through in the present embodiment The mode of the size and change frequency that change magnetic field achievees the purpose that the vibration frequency and amplitude that control the movement portion 111.
In the present embodiment, the vibration frequency and amplitude in the movement portion 111 are adjustable.Other embodiments of the invention In, it is adjustable that the galvanometer 110 may be set to be vibration frequency, or it is adjustable for being set as amplitude.
In the present embodiment, the galvanometer 110 includes MEMS galvanometer.In the scanning means, the galvanometer 110 is arranged For the way of MEMS galvanometer, the integrated level of the scanning means can be effectively improved, improves the scan frequency of the scanning means.
It continues to refer to figure 1, the scanning means further includes spatial light modulator 120.The spatial light modulator 120 is one The device that kind is modulated the spatial distribution of light wave, has the function of spatially modulating light beam in real time, so as to Adjust phase of light wave enough to realize the effect for changing direction of beam propagation.
In conjunction with referring to figs. 2 to Fig. 4, respectively illustrating in scanning means shown in Fig. 1 under the conditions of different modulating in dotted line frame 100 Equivalent light path schematic diagram.
Fig. 2 shows phase delays caused by phase delay caused by the spatial light modulator 120 and glass plate etc. Light path schematic diagram when effect.
When the outgoing beam 102 that the galvanometer 110 is formed has the visual field of (- α ,+α) in x/y plane (as shown in Figure 2) When angle, phase delay caused by the phase delay due to caused by the spatial light modulator 120 and glass plate is equivalent, institute The setting for stating spatial light modulator 120 will not cause the change of direction of beam propagation, i.e., be emitted from the spatial light modulator 120 Light beam also there is the field angle of (- α ,+α), so the field angle of formed scanning light beam 103 also remains (- α ,+α).
Fig. 3 show phase delay caused by the spatial light modulator 120 and along the direction+x thickness be gradually increased three Light path schematic diagram when prism is equivalent.
When the outgoing beam 102 that the galvanometer 110 is formed has the field angle of (- α ,+α) in x/y plane, by institute The prism stating phase delay caused by spatial light modulator 120 and being gradually increased along the direction+x thickness is equivalent, therefore the sky Between optical modulator 120 setting can make the light beam in x/y plane with the direction-z (i.e. vertical paper is inside) be axis rotate angle, θ (i.e. Chief ray is set to rotate angle, θ with the direction-z axis, wherein chief ray refers to the light by optical system pupil center), so The light beam being emitted from the spatial light modulator 120 has (- α-θ, α-θ) field angle, the view of the resulting scanning light beam Rink corner is (- α-θ, α-θ).
Fig. 4 show phase delay caused by the spatial light modulator 120 and along the direction-x thickness be gradually increased three Light path schematic diagram when prism is equivalent.
Similar, when the outgoing beam 102 that the galvanometer 110 is formed has the field angle of (- α ,+α) in x/y plane, The prism that the phase delay due to caused by the spatial light modulator 120 and the edge direction-x thickness are gradually increased is equivalent, The setting of the spatial light modulator 120 can make the light beam in x/y plane with the direction+z (i.e. vertical paper is outside) for axis, rotation (even if chief ray rotates angle, θ by axis of the direction+z, wherein chief ray refers to the light by optical system pupil center to angle, θ Line), so the light beam being emitted from the spatial light modulator 120 has (- α+θ, α+θ) field angle, the resulting scanning The field angle of light beam is (- α+θ, α+θ).
It can be seen that passing through the phase delay for adjusting the spatial light modulator 120, thus it is possible to vary from the spatial light tune The direction of propagation (i.e. the direction of propagation of chief ray) for the light beam that device 120 processed is emitted, thus in the movement portion for not changing galvanometer 110 Under the premise of 111 swing angle, achieve the purpose that change is formed by scanning light beam visual field angular direction.
It continues to refer to figure 1, since the setting of the spatial light modulator 120 can change the side of the scanning means visual field To if reducing amplitude, keeping the incident beam 101 constant in conjunction with the variable of 110 vibration frequency of galvanometer and amplitude In the case where, then it can reduce the angle between adjacent scanning light beam 103, to reach chief ray direction laser harness, improve The purpose of angular resolution realizes development examination.It can be seen that the variable galvanometer 110 of the vibration frequency and amplitude and described The combination of space optical detector 120 is arranged, and can adjust visual field direction, field angle size and field angle point according to detection demand Resolution, additionally it is possible to which the scan frequency for guaranteeing the scanning means help to obtain high frame frequency acquisition, for unmanned or other necks Domain provides more accurate target information.
The spatial light modulator 120 include in transmissive spatial optical modulator or reflective spatial light modulator at least It is a kind of.In the present embodiment, the spatial light modulator 120 is transmissive spatial optical modulator, i.e. outgoing beam 102 projects described Spatial light modulator 120 is to form scanning light beam 103.In other embodiments of the invention, the spatial light modulator can also be set It is set to reflective spatial light modulator.Spatial light modulator modulated light wave mode flexibly selects, and can be the light of scanning means Road provides biggish design space, is conducive to the raising of optical path precision and the reduction of optical path building difficulty.
The spatial light modulator 120 includes: acousto-optic modulator, electrooptic modulator, magneto-optic modulator, liquid crystal spatial light tune At least one of device processed or the micro- reflective spatial modulator of number.The wide in range range of choice of the spatial light modulator, can make Composed scanning means is suitble to multiple technologies demand, to expand the scope of application of the scanning means.
In the present embodiment, the spatial light modulator 120 is LCD space light modulator.LCD space light modulator sum number The angle that the micro- reflective spatial modulator of word changes direction of beam propagation is relatively large, therefore the spatial light modulator 120 is set It is set to the way of at least one of LCD space light modulator or the micro- reflective spatial modulator of number, it being capable of the change of scanning field of view direction It is relatively large to change angle, it might even be possible to make visual field towards front any angle, so as to the suitable of further expansion scanning means With range, the scanning means is more advantageous in the application in unmanned field.
In the present embodiment, the angular range that the spatial light modulator 120 changes direction of beam propagation is 0 ° to 90 °, excellent The angular range of choosing is 0 ° to 60 °, and more preferably angular range is 0 ° to 30 °.The spatial light modulator 120 is changed into light The angle setting of the beam direction of propagation in the reasonable scope, can select suitable spatial light modulator according to actual needs, thus Reach the balance of performance and cost.
It should be noted that as shown in Figure 1, the spatial light modulator 120 is set to the emergent light in the present embodiment In the optical path of beam 102, i.e., the described spatial light modulator 120 receives the outgoing beam 102, and adjusts the outgoing beam 102 Phase of light wave to achieve the purpose that change direction of beam propagation, and then to form scanning light beam 103.
In other embodiments of the invention, the spatial light modulator can also be located in the optical path of incident beam, i.e., described Spatial light modulator receives the incident beam, and adjusts the phase of light wave of the incident beam to change direction of beam propagation; The light beam that phase of light wave is adjusted through the spatial light modulator is projected on the reflecting surface, through the reflective surface, thus To form scanning light beam.
It should be noted the scanning means further include: the control unit being electrically connected with the galvanometer 110 is (in figure It is not shown), described control unit is suitable in the vibration frequency and amplitude that adjust the movement portion 111 of the galvanometer 110 At least one.
In the present embodiment, described control unit provides driving voltage so that the movement portion 111 realizes to the galvanometer 110 It swings.At least one in size and frequency of the described control unit by changing the driving voltage is to realize to the galvanometer The change of at least one in the vibration frequency and amplitude in 110 movement portion 111.In other embodiments of the invention, the control is single Member can also adjust the swing in the movement portion of the galvanometer by other means.
In addition, described control unit is also connected with the spatial light modulator 120, to control the spatial modulator to light The adjusting of wave phase.Described control unit can coordinate the frequency that the galvanometer 110 swings the acting surface according to specific requirements Adjusting with amplitude and the spatial light modulator 120 to direction of beam propagation, to make to be formed by the tool of scanning light beam 103 There are preferable or even optimal visual field direction, field angle size and visual field angular resolution, is the hair of barrier or target to be detected Existing and complete detection provides more accurate information.
Correspondingly, the present invention also provides a kind of scan methods.
With specific reference to Fig. 5, the flow diagram of one embodiment of scan method of the present invention is shown.
The scan method includes: to execute step S510, provides scanning means, and the scanning means is scanning of the invention Device;Step S520 is executed, the vibration frequency and amplitude and the spatial light modulator tune in the movement portion of the galvanometer are adjusted At least one of phase of light wave size is saved to be scanned.
Light wave is adjusted by the vibration frequency and amplitude in the movement portion of the adjusting galvanometer and the spatial light modulator At least one of phase size, capable of adjusting the scanning means, to be formed by the visual field direction of scanning light beam, field angle big Small and visual field angular resolution, so make visual field direction, field angle size and the visual field angular resolution of scanning light beam closer to Specific detection demand can realize scanning direction selection, local cypher scanning or completion under the premise of guaranteeing scan frequency The concrete functions such as target to be detected can provide more accurate target information for subsequent algorithm, be conducive to algorithm identification target, have Conducive to raising scanning accuracy and accuracy.
In conjunction with reference Fig. 1, step S510 is executed, scanning means (not indicating in figure) is provided.Since the scanning means is Scanning means of the invention, thus the specific technical solution of the scanning means refer to previous embodiment, the present invention to this no longer It repeats.
As shown in Figure 1, the scanning means includes galvanometer 110 and spatial light modulator 120, the galvanometer 110 it is described At least one in the vibration frequency and amplitude in movement portion 111 is that can be changed, and the spatial light modulator 120 can adjust light wave phase Position is to change direction of beam propagation.
It should be noted that the scanning means is applied in laser radar in the present embodiment.Specifically, the laser Radar includes: emitter 130, and the emitter 130 generates incident beam 101;The scanning means receives incident beam 101 and according to the incident beam 101 formed scanning light beam 103;At least partly described scanning light beam 103 is through target to be detected 160 reflect to form echo beam (not shown);Reception device 150, the reception device 150 receive the echo beam.
In conjunction with reference Fig. 5, step S520 is executed, the vibration frequency and vibration in the movement portion 111 of the galvanometer 110 are adjusted Width and the spatial light modulator 120 adjust at least one of phase of light wave size to be scanned.
The visual field direction of the scanning light beam 103 can be changed by adjusting the change of spatial light modulator 120 phase of light wave; The amplitude for adjusting the movement portion 111 of the galvanometer 110 can change the field angle size of the scanning light beam 103;It adjusts The vibration frequency in the movement portion 111 of the galvanometer 110 can change the angular resolution height of the scanning light beam 103;Cause The vibration frequency and amplitude and the spatial light tune in the movement portion 111 of the galvanometer 110 is arranged according to detection demand in this Device 120 processed adjusts at least one of phase of light wave size with closer to specific detection demand, thus guaranteeing scan frequency Under the premise of, realize the concrete functions such as scanning direction selection, local cypher scanning or completion target 160 to be detected.
When scanning nearby target, increase the amplitude of the galvanometer 110.When scanning nearby target, required visual field is larger, Therefore the amplitude for increasing galvanometer 110, can expand the field angle of the scanning light beam 103, to meet the need of nearby targeted scans It asks.
In other embodiments of the invention, the scanning means receives at least two incident beams, and according to described at least two A incident beam forms at least two scanning light beams being emitted from the scanning means, wherein at least two incident beam It can be spatially or on the time to distinguish, for example, the scanning means successively successively receives at least two incident light Beam or scanning means receive at least two different incident beams of the direction of propagation;At least two scanning light beam with it is described At least two incident beams correspond;Control the spatial light modulator so that at least two outgoing beam visual field court To different directions, simply and easily to realize multi-direction scanning.
It, can be by controlling the spatial light after receiving at least two incident beams in some embodiments of the invention Modulator is so that the visual field of at least two outgoing beam realizes splicing, so that scanning means described in further expansion is formed Scanning light beam visual field.
Especially when scanning nearby target, by controlling the spatial light modulator so that at least two emergent light The visual field of beam adjoins each other or partly overlaps, can be in the premise for not changing hardware device to achieve the effect that field stitching Under, it realizes the expansion of visual field, is more advantageous to the reference in unmanned equal fields.
It should be noted that in some embodiments of the invention, the scanning means has multiple optical paths, in each optical path It is provided with galvanometer and spatial light modulator.Specifically, the scanning means receives at least two incident beams, and according to it is described extremely Few two incident beams form corresponding at least two scanning light beam being emitted from the scanning means;The scanning means packet Include at least two galvanometers and at least two spatial light modulators;The galvanometer, the spatial light modulator and the incident light Beam corresponds.
Wherein, in some embodiments, by control the spatial light modulator in each optical path respectively so that with it is described extremely The visual field of few corresponding outgoing beam of two incident beams is towards different directions, so as to simply and easily realize not Tongfang To while scan.It in some embodiments, can also be by controlling the spatial light modulator in each optical path respectively so that institute The visual field of at least two scanning light beam formed adjoins each other or partly overlaps, to achieve the effect that field stitching.
When scanning distant object, reduce the amplitude of the galvanometer 110.When scanning distant object, to visual field size requirement phase To lower, and detection resolution is required relatively high, therefore when scanning distant object, reduces the amplitude of the galvanometer 110, with The line density of light beam near chief ray is improved to obtain higher angular resolution, so as to improve the effect of distant object scanning.
In addition, in addition to the amplitude of the reduction galvanometer 110, can also pass through reduces the vibration when scanning distant object The vibration frequency in the movement portion 111 of mirror 110, and the raising of 101 pulse frequency of incident beam is combined, it can further increase The row of scanning light beam 103 obtains higher angular resolution, is more advantageous to the accuracy for improving long-range target acquisition.
It should be noted that in the present embodiment, the laser radar further include: processing unit (not shown), it is described Processing unit is based on the echo beam and obtains scan data, and obtains point cloud chart according to the scan data, wherein described sweep Retouching data, (reflection occurs for the i.e. described scanning light beam to form echo beam including at least at least one described scanning light beam incidence point Position) azimuth and distance.
In addition, being preset with distance threshold in the processing unit in the present embodiment, the processing unit compares at least one The distance of the scanning light beam incidence point judges the remote of scanned target with the size of the distance threshold and according to comparison result It is close: when the distance of at least one scanning light beam incidence point is greater than the distance threshold, the processing unit judgement The scanning target is distant object;When the distance of at least one scanning light beam incidence point is less than the distance threshold When, the processing unit judges the scanning target for nearby target.
The processing unit is also scanned based on the result generation distant place scanning signal for judging scanned target distance and nearby Signal: when judging the scanning target for distant object, the processing unit generates distant place scanning signal;It sweeps described in the judgement Retouch target be nearby target when, the processing unit generates nearby scanning signal.
In the present embodiment, the scanning means includes being connected with the galvanometer 110 and the spatial light modulator 120 Control unit (not shown);Described control unit receives the distant place scanning signal or the nearby scanning signal, and root According to received distant place scanning signal or nearby scanning signal is realized to the galvanometer 110 and the spatial light modulator 120 It adjusts.
In addition, the processing unit judges the distance of scanned target based on the feedback of echo beam in the present embodiment.But It is that can be selected in other embodiments of the invention by being manually entered to be judged, the present invention does not limit this.
In addition, preset distance threshold can be a numerical value in the processing unit in the present embodiment, it is also possible to root According to multiple and different numerical value set by scene difference.For example, when the laser radar is applied to unmanned field, the place Scene mode corresponding from different road conditions, such as high-speed mode, crowded mode etc., different scenes mode are preset in reason device In, not equal distance threshold, if distance threshold is relatively large under high-speed mode, the distance threshold under crowded mode can be set It is relatively small.But above-mentioned set-up mode is only an example, can not be limited the scope of the invention with this.
In the present embodiment, the scanning means also receives detectable signal, and the detectable signal is suitable for driving the scanning Detection of the device to target 160 to be detected.When receiving detectable signal, the space light modulation is adjusted according to the detectable signal Device 120 so that direction of beam propagation towards target 160 to be detected.
Specifically, the detectable signal includes the location information of the target to be detected 160, the location information is at least wrapped Include the azimuth of 160 present position of target to be detected;According to the detectable signal, the spatial light modulator 120 is adjusted, It is transferred to visual field in the target to be detected 160, even if visual field direction makes to lead towards the direction of the target 160 to be detected Light is propagated towards the direction of the target 160 to be detected, so as to be scanned for the target 160 to be detected, is obtained Obtain the more accurate scan data of the target 160 to be detected.
While adjusting spatial light modulator 120, the vibration further can also be adjusted according to the detectable signal At least one of the vibration frequency in the movement portion 111 of mirror 110 and amplitude, so that the field angle of the scanning light beam 103 Size and angular resolution are suitable for the scanning of the target to be detected 160, such as: it can be by suitably reducing the vibration of galvanometer 110 Width is to reduce field angle, to achieve the effect that local cypher;It can also be by suitably increasing the amplitude of galvanometer 110, and simultaneously The pulse frequency and vibration frequency of incident beam 101 are improved, to guarantee that completely the target 160 to be detected is located at described sweep While retouching in 103 field range of light beam, higher row is obtained, realize taking into account for field angle and angular resolution.
It should be noted that in the present embodiment, the laser radar further include: detection device (not shown), it is described Detection device generates detectable signal according to processing unit scan data obtained;The scanning means and the detection fill It sets connected, obtains the detectable signal from the detection device.Specifically, the scanning means have with the galvanometer 110 and The connected control unit of the spatial light modulator 120, described control unit are connected with the detection device, from the detection Device receives the detectable signal, and is realized according to the detectable signal to the galvanometer 110 and the spatial light modulator 120 Adjusting.
It should also be noted that, above-mentioned detection device is only an example according to the way that scan data generates detectable signal, In other embodiments of the invention, the detection device can also receive the instruction that user is manually entered, and according to the received finger of institute It enables and generates detectable signal to realize the detection to the target 160 to be detected.The present invention is not intended to limit the production of the detectable signal Raw mode.
In addition, the scanning means also receives supplement signal in the present embodiment, the supplement signal is suitable for described in starting Scanning means scans the specific aim for the target to be detected 160 having found.Specifically, receiving supplement signal, according to the benefit Full signal adjusts the spatial light modulator 120 so that direction of beam propagation is towards target 160 to be detected.
In addition, the target to be detected 160 in field range according to the scan data fed back advantageously, it has been found that still judge The target to be detected 160 is simultaneously imperfect, can not identify the target to be detected 160.At this point, described in the scanning means reception Supplement signal, to obtain the scan data of the complete target 160 to be detected.
Specifically, the supplement signal includes the location information of the target to be detected 160, the location information is at least wrapped Include the azimuth of 160 present position of target to be detected;, the spatial light modulator 120 is adjusted according to the supplement signal, It is transferred to visual field in the target to be detected 160, is located at the target to be detected 160 among visual field as far as possible, in order to obtain Obtain the scan data of the completely target to be detected 160.
At the same time, the movement portion 111 of the galvanometer 110 can also be further adjusted according to the supplement signal At least one of vibration frequency and amplitude, so that the field angle size and angular resolution of the scanning light beam 103 are suitable for institute State the scanning of target 160 to be detected.
It should be noted that in the present embodiment, the laser radar further include: identification device (not shown), it is described Identification device identifies the target 160 to be detected according to processing unit scan data obtained, and judges institute Whether complete state target 160 to be detected;When judging that the target to be detected 160 is imperfect, the identification device generates completion Signal.The scanning means is connected with the identification device, obtains the supplement signal from the identification device.Specifically, institute Stating scanning means has the control unit being connected with the galvanometer 110 and the spatial light modulator 120, described control unit It is connected with the identification device, receives the supplement signal from the identification device, and realize to institute according to the supplement signal State the adjusting of galvanometer 110 and the spatial light modulator 120.
It should also be noted that, above-mentioned identification device is only an example based on the way that scan data generates supplement signal. In other embodiments of the invention, the identification device can also receive the instruction that user is manually entered, and according to the received finger of institute It enables and generates supplement signal to realize the detection to the target 160 to be detected.The present invention is not intended to limit the production of the supplement signal Raw mode.
In addition, in the present embodiment, the processing unit in control unit and the laser radar in the scanning means, spy One or more field programmable gate arrays (Field Programmable Gate can be passed through by surveying device and identification device Array, FPGA) Lai Shixian.The present invention is without limitation, can also be that other can realize the hardware realization of identical function.
Correspondingly, the present invention also provides a kind of laser radars.
As shown in Figure 1, showing the light channel structure schematic diagram of one embodiment of laser radar of the present invention.
The laser radar includes: emitter 130, and the emitter 130 generates incident beam 101;Scanning means (not indicating in figure), the scanning means receive incident beam 101 and form scanning light beam 103 according to the incident beam 101, The scanning means is scanning means of the invention;At least partly described scanning light beam 103 is reflected to form through target 160 to be detected Echo beam (not shown);Reception device 150, the reception device 150 receive the echo beam.
Due to the scanning means be scanning means of the invention, including 111 vibration frequency of movement portion and amplitude at least One is variable galvanometer 110 and spatial light modulator 120.111 vibration frequency of movement portion and the adjustable of amplitude can make basis The incident beam 101 be formed by scanning light beam 103 field angle size and angular resolution realize it is adjustable;The spatial light tune It is adjustable that the setting of device 120 processed can be such that the 103 visual field direction of scanning light beam realizes.Therefore the scanning means, which can be realized, sweeps The adjustable of visual field direction, field angle size and visual field angular resolution is retouched, so as to adjust visual field according to detection demand;And The combination of galvanometer 110 and spatial light modulator 120 is arranged, additionally it is possible to which the scan frequency for guaranteeing the scanning means is conducive to obtain High frame frequency acquisition is obtained, more accurate target information is provided for unmanned or other field.
In the present embodiment, the laser radar is the laser radar for receiving and dispatching road altogether.Light caused by the emitter 130 The collimated formation collimated light beam of line, the collimated light beam form the incident beam 101 through light-dividing device (not indicating in figure); Scanning means (not indicating in figure) including the galvanometer 110 and the spatial light modulator 120 receives the incident beam 101, reflecting surface 112 reflection of the incident beam 101 through the galvanometer 110 simultaneously adjusts light through the spatial light modulator 120 Wave phase is to form scanning light beam 103;At least partly described scanning light beam 103 is projected in the target to be detected 160 concurrently Raw scattering, rear orientation light line therein form echo beam;Acquisition of the echo beam through the scanning means, i.e., through institute State spatial light modulator 120 transmission, then the reflecting surface 112 through the galvanometer 110 reflection and light-dividing device reflection, projection To converging device 140;Received echo beam is projected to the reception device positioned at its focal point by the converging device 140 On 150;The reception device 150 acquires the optical signal of the echo beam, and carries out photoelectric conversion and form corresponding telecommunications Number.
It should be noted that in the present embodiment, the laser radar further include: processing unit (not shown), it is described Processing unit is connected with the reception device 150, obtains from the reception device 150 and is formed by electric signal, and according to described Electric signal obtains scan data, further point cloud chart is obtained according to the scan data, wherein the scan data includes at least The orientation of at least one scanning light beam incidence point (reflection occurs for the i.e. described scanning light beam to form the position of echo beam) Angle and distance.
In the present embodiment, the laser radar further include: detection device (not shown), the detection device is according to institute It states processing unit scan data obtained and generates detectable signal;The scanning means is connected with the detection device, from described Detection device obtains the detectable signal.Specifically, the scanning means has and the galvanometer 110 and the space light modulation The connected control unit of device 120, described control unit are connected with the detection device, receive the spy from the detection device Signal is surveyed, and the adjusting to the galvanometer 110 and the spatial light modulator 120 is realized according to the detectable signal.
The detectable signal is suitable for the detection for driving the scanning means to target 160 to be detected.Receiving detection letter Number when, the scanning means adjusts the spatial light modulator 120 so that direction of beam propagation direction according to the detectable signal Target 160 to be detected.
Specifically, the detectable signal includes the location information of the target to be detected 160, the location information is at least wrapped Include the azimuth of 160 present position of target to be detected;According to the detectable signal, the control unit tune of the scanning means Save the spatial light modulator 120, be transferred to visual field in the target to be detected 160, though visual field direction towards it is described to The direction for detecting target 160 propagates chief ray towards the direction of the target 160 to be detected, so as to for it is described to Detection target 160 is scanned, and obtains the more accurate scan data of the target 160 to be detected.
While adjusting spatial light modulator 120, the control unit of the scanning means can also further basis The detectable signal adjusts at least one of vibration frequency and the amplitude in the movement portion 111 of the galvanometer 110, so that institute The field angle size and angular resolution of stating scanning light beam 103 are suitable for the scanning of the target to be detected 160, such as: the control Unit processed can be by suitably reducing the amplitude of galvanometer 110 to reduce field angle, to achieve the effect that local cypher;The control Unit processed can also be by suitably increasing the amplitude of galvanometer 110, and improves the pulse frequency and vibration frequency of incident beam 101 simultaneously Rate, with while guaranteeing that the complete target 160 to be detected is located in 103 field range of scanning light beam, acquisition compared with High row, realization field angle and angular resolution are taken into account.
It should be noted that above-mentioned detection device is only an example according to the way that scan data generates detectable signal, this In invention other embodiments, the detection device can also receive the instruction that user is manually entered, and according to the received instruction of institute Detectable signal is generated to realize the detection to the target 160 to be detected.The present invention is not intended to limit the generation of the detectable signal Mode.
In addition, in the present embodiment, the laser radar further include: identification device (not shown), the identification device The target 160 to be detected is identified according to processing unit scan data obtained, and is judged described to be detected Whether target 160 is complete;When judging that the target to be detected 160 is imperfect, the identification device generates supplement signal.It is described Scanning means is connected with the identification device, obtains the supplement signal from the identification device.Specifically, the scanning means With the control unit being connected with the galvanometer 110 and the spatial light modulator 120, described control unit and the identification Device is connected, and receives the supplement signal from the identification device, and realize to 110 He of galvanometer according to the supplement signal The adjusting of the spatial light modulator 120.
The supplement signal, which is suitable for starting the scanning means, sweeps the specific aim for the target to be detected 160 having found It retouches.Specifically, receiving supplement signal, the scanning means adjusts the spatial light modulator 120 according to the supplement signal So that direction of beam propagation is towards target 160 to be detected.
In addition, the target to be detected 160 in field range according to the scan data advantageously, it has been found that still identify Device judges the target to be detected 160 and imperfect, can not identify the target to be detected 160.At this point, the scanning means The supplement signal that the identification device generates is received, to obtain the scan data of the complete target 160 to be detected.
Specifically, the supplement signal includes the location information of the target to be detected 160, the location information is at least wrapped Include the azimuth of 160 present position of target to be detected;According to the supplement signal, the control unit tune of the scanning means The spatial light modulator 120 is saved, is transferred to visual field in the target to be detected 160, makes the target to be detected 160 as far as possible Among visual field, in order to obtain the scan data of the complete target 160 to be detected.
At the same time, the control unit of the scanning means further can also adjust the vibration according to the supplement signal At least one of the vibration frequency in the movement portion 111 of mirror 110 and amplitude, so that the field angle of the scanning light beam 103 Size and angular resolution are suitable for the scanning of the target to be detected 160.
It should be noted that above-mentioned identification device is only an example based on the way that scan data generates supplement signal.This In invention other embodiments, the identification device can also receive the instruction that user is manually entered, and according to the received instruction of institute Supplement signal is generated to realize the detection to the target 160 to be detected.The present invention is not intended to limit the generation of the supplement signal Mode.
It should be noted that the emitter 130 may include laser in the present embodiment;The light-dividing device can To include semi-transparent semi-reflecting lens;The converging device 140 may include convergent lens;The reception device may include photodetection Device.But above-mentioned set-up mode is only an example, the present invention is not intended to limit the emitter, the light-dividing device, the remittance The specific set-up mode of poly- device and the reception device.
It should also be noted that, the laser radar can be the laser radar detected based on the flight time, that is, adopt After the optical signal for collecting the echo beam, it can be calculated according to the echo beam and the time delay of incident beam to be detected The distance of target 160, and then realize the positioning of the target 160 to be detected.In other embodiments of the invention, the laser radar It is also possible to based on the laser radar for thinking dry detection;After the optical signal for acquiring the echo beam, according to echo beam and The coherence messages of incident beam obtain the distance of target 160 to be detected.The present invention does not do the detection mode of the laser radar It limits.
In addition, in the present embodiment, the processing unit in control unit and the laser radar in the scanning means, spy One or more field programmable gate arrays (Field Programmable Gate can be passed through by surveying device and identification device Array, FPGA) Lai Shixian.The present invention is without limitation, can also be that other can realize the hardware realization of identical function.
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute Subject to the range of restriction.

Claims (21)

1. a kind of scanning means characterized by comprising
Galvanometer, the galvanometer have movement portion, and the movement portion has the reflecting surface for being suitable for reflecting incident beam to be formed Outgoing beam, the galvanometer change the direction of propagation of the outgoing beam by the swing in the movement portion, the galvanometer At least one in the vibration frequency and amplitude in the movement portion is variable;
Spatial light modulator, the spatial light modulator are located at the light of at least one in the incident beam and the outgoing beam Lu Zhong, the spatial light modulator are suitable for adjusting phase of light wave to change direction of beam propagation.
2. scanning means as described in claim 1, which is characterized in that the spatial light modulator includes: transmissive spatial light At least one of modulator or reflective spatial light modulator.
3. scanning means as claimed in claim 1 or 2, which is characterized in that the spatial light modulator includes: acousto-optic modulation At least one of device, electrooptic modulator, magneto-optic modulator, LCD space light modulator or the micro- reflective spatial modulator of number.
4. scanning means as described in claim 1, which is characterized in that the spatial light modulator changes direction of beam propagation Angular range is 0 ° to 90 °.
5. scanning means as described in claim 1, which is characterized in that further include: control unit, described control unit with it is described Galvanometer is connected, and described control unit is suitable at least one in the vibration frequency and amplitude that adjust the movement portion of the galvanometer It is a.
6. scanning means as claimed in claim 5, which is characterized in that described control unit also with the spatial light modulator phase Even, to control adjusting of the spatial modulator to phase of light wave.
7. scanning means as described in claim 1, which is characterized in that the galvanometer includes MEMS galvanometer.
8. scanning means as described in claim 1, which is characterized in that the galvanometer includes in one-dimensional galvanometer or 2-D vibration mirror It is at least one.
9. a kind of scan method, which is characterized in that the scan method includes:
Scanning means is provided, the scanning means is as described in claim 1~8 any one;
The vibration frequency and amplitude and the spatial light modulator for adjusting the movement portion of the galvanometer adjust phase of light wave At least one of size is to be scanned.
10. scan method as claimed in claim 9, which is characterized in that when scanning nearby target, increase the vibration of the galvanometer Width.
11. scan method as claimed in claim 9, which is characterized in that the scanning means receives at least two incident beams, And at least two scanning light beams being emitted from the scanning means are formed according at least two incident beam;
Scanning nearby target when, control the spatial light modulator so that at least two scanning light beam field stitching.
12. scan method as claimed in claim 9, which is characterized in that the scanning means receives at least two incident beams, And at least two scanning light beams being emitted from the scanning means are formed according at least two incident beam;
The scanning means includes at least two galvanometers and at least two spatial light modulators;
The galvanometer, the spatial light modulator and the incident beam correspond;
Scanning nearby target when, control at least two spatial light modulator so that at least two scanning light beam visual field Splicing.
13. scan method as claimed in claim 9, which is characterized in that when scanning distant object, reduce the vibration of the galvanometer Width.
14. scan method as claimed in claim 13, which is characterized in that increase the vibration frequency in the movement portion of the galvanometer Rate.
15. scan method as claimed in claim 9, which is characterized in that when receiving detectable signal, according to the detectable signal tune The spatial light modulator is saved so that direction of beam propagation is towards target to be detected.
16. scan method as claimed in claim 15, which is characterized in that adjust the institute of the galvanometer according to the detectable signal State at least one of vibration frequency and the amplitude in movement portion.
17. scan method as claimed in claim 9, which is characterized in that when receiving supplement signal, according to the supplement signal tune The spatial light modulator is saved so that direction of beam propagation is towards target to be detected.
18. scan method as claimed in claim 17, which is characterized in that adjust the institute of the galvanometer according to the supplement signal State at least one of vibration frequency and the amplitude in movement portion.
19. a kind of laser radar characterized by comprising
Emitter, the emitter generate incident beam;
Scanning means, the scanning means receive incident beam and form scanning light beam, the scanning according to the incident beam Device is as described in claim 1~8 any one;
At least partly described scanning light beam reflects to form echo beam through target to be detected;
Reception device, the reception device receive the echo beam.
20. laser radar as claimed in claim 19, which is characterized in that further include: detection device, the detection device and institute It states scanning means to be connected, the detection device generates detectable signal.
21. laser radar as claimed in claim 19, which is characterized in that further include: identification device, the identification device and institute It states reception device to be connected, whether the identification device judges target to be detected according to the received echo beam of the reception device institute Completely;
The identification device is also connected with the scanning means, and when judging that target to be detected is imperfect, the identification device is produced Raw supplement signal.
CN201910083057.5A 2019-01-28 2019-01-28 Scanning means and its scan method, laser radar Pending CN109782254A (en)

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