CN109756203A - 一种fbar谐振频率和振荡薄膜各层厚度对应关系建立方法 - Google Patents
一种fbar谐振频率和振荡薄膜各层厚度对应关系建立方法 Download PDFInfo
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Denomination of invention: A method to establish the relationship between FBAR resonance frequency and the thickness of each layer of oscillating film Effective date of registration: 20220926 Granted publication date: 20201215 Pledgee: Agricultural Bank of China Co.,Ltd. Heyuan Yuancheng District Sub branch Pledgor: Guangzhou Everbright Technology Co.,Ltd. Registration number: Y2022980016273 |
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