CN109752029A - A kind of preparation method of the capacitive flexible sensor of paper base - Google Patents

A kind of preparation method of the capacitive flexible sensor of paper base Download PDF

Info

Publication number
CN109752029A
CN109752029A CN201811511149.0A CN201811511149A CN109752029A CN 109752029 A CN109752029 A CN 109752029A CN 201811511149 A CN201811511149 A CN 201811511149A CN 109752029 A CN109752029 A CN 109752029A
Authority
CN
China
Prior art keywords
paper
paper base
flexible sensor
preparation
conductive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201811511149.0A
Other languages
Chinese (zh)
Other versions
CN109752029B (en
Inventor
谢丽萍
曾何德乐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northeastern University China
Original Assignee
Northeastern University China
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northeastern University China filed Critical Northeastern University China
Priority to CN201811511149.0A priority Critical patent/CN109752029B/en
Publication of CN109752029A publication Critical patent/CN109752029A/en
Application granted granted Critical
Publication of CN109752029B publication Critical patent/CN109752029B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The invention discloses a kind of preparation methods of the capacitive flexible sensor of paper base, comprising: by handling paper base, the paper base surface is made to form close and distant water patterns;Conductive material is filled into the hydrophilic region on the close and distant water patterns, so that the conductive material is formed conductive layer on the paper base surface, and form external interface in conductive layer edge connection outside lead;The paper base, conductive layer and portion of external lead are packaged with the first encapsulated layer, form monolithic electrode plate;The one side of the close conductive layer of two monolithic electrode plates is bonded in opposite directions, two-pad electrode plate is formed, then be packaged the surface of the two-pad electrode plate by the second encapsulated layer, obtains capacitive flexible sensor.Not only manufacture craft is simple for preparation method provided by the invention, and finished product Young's modulus is low, light-weight, and has low cost, and high-flexibility is highly sensitive, good biocompatibility and it is wearable the advantages that.

Description

A kind of preparation method of the capacitive flexible sensor of paper base
Technical field
The invention belongs to flexible sensor technical field, in particular to the preparation side of a kind of capacitive flexible sensor of paper base Method.
Background technique
Wearable sensors in the wide of fields such as personal health, physical activity monitoring, artificial intelligence robots due to answering With prospect, the extensive concern of academia and industry is caused.Wearable sensors due to modulus is low, light-weight, strong flexibility, It with the performances such as stretchable, can be very good to be fitted on skin or organ, can recorde from small physiological signal (such as arteries and veins Fight, cardiac rate, breathing, sounding) to high-intensitive action signal (such as muscular movement), it is body-building information trace, medical diagnosis on disease A kind of new approach is provided with Risk Monitoring.It has been developed based on piezoelectricity, pressure drag, resistance and capacitance detecting principle at present Flexible sensor.However, most methods depend on microelectronics manufacture, it is related to complicated manufacturing process, as ultraviolet light shines Penetrate, corona treatment, thin film vacuum deposition, from spin-coated layer, photoetching, dry and wet etching, trans-printing etc..Although these methods are It is proved to be effective, but high expense brought by expensive instrument and material limits their application.By simple Manufacture craft, developing a kind of highly sensitive, high performance-price ratio novel flexible sensor is still a urgent problem to be solved.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of low costs, the highly sensitive capacitive flexible sensing of paper base The preparation method of device.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of preparation method of the capacitive flexible sensor of paper base, comprising:
By handling paper base, the paper base surface is made to form close and distant water patterns;
Conductive material is filled into the hydrophilic region on the close and distant water patterns, makes the conductive material in the paper base Surface forms conductive layer, and forms external interface in conductive layer edge connection outside lead;
The paper base, conductive layer and portion of external lead are packaged with the first encapsulated layer, form monolithic electrode plate;
The one side of the close conductive layer of two monolithic electrode plates is bonded in opposite directions, forms two-pad electrode plate, then The surface of the two-pad electrode plate is packaged by the second encapsulated layer, obtains capacitive flexible sensor.
Further, when by handling the paper base, the processing method of the use includes spin-coating method, lamination Method, photoetching process, seal method, intaglio printing, letterpress, wax printing method, ink-jet printing, silk screen print method, magnetron sputtering, heat are steamed Plating, the method for printing and dyeing, chemical conversion membrane processing method, fan-fold paper template, adhesive tape transfer method, physical vaporous deposition and plasma etching One or more of method.
Further, the fan-fold paper template includes:
After the pattern that paper matrix plate is cut into the hollow out of folding, barrier material is smeared on the paper matrix plate;
The material that paper base can be prepared is put into the centre of the fan-fold paper template, forms sandwich structure, the fan-fold paper Barrier material in template by contact paper base prepare material after, the barrier material penetrates into the preparing on material of paper base, And then close and distant water patterns are formed on the paper base prepared.
Further, the method for the hydrophilic region that conductive material is added to paper base be pipettor dropwise addition, 3D printing method, One or more of seal method and inkjet printing.
Further, the pattern that conductive layer is formed on the paper base is ellipse, circle, rectangle, star, triangle, five Side shape, hexagon, arrow-shaped or semi-moon shaped basic figure, or for Bezier, Peano, Hilbert, Moore and One or more of the fractal curve of Greek cross curve.
Further, first encapsulated layer and the second encapsulated layer are that flexible material is prepared, the flexible material Including polyethylene naphthalate, polymethyl methacrylate, polyurethanes, urethane acrylate, poly dimethyl Siloxanes, polyacrylonitrile, polyethylene terephthalate, polyethylene, polypropylene, polyamide, polyvinylidene fluoride acid, polytetrafluoroethyl-ne One or more of alkene, polyvinyl alcohol, polylactic acid, polyetherimide, polycarbonate, polyimides, polyvinyl chloride.
Further, the paper base is that paper-like materials or/and the biomaterial containing micro-structure are prepared, the paper The paper-like materials of base include face tissue, nitrocellulose membrane, qualitative filter paper, chromatographic paper, printing paper, blotting paper, brown paper, fibre One or more of element-carbon nanotube extrusion coating paper, fiber-silver ink extrusion coating paper, drawing paper are tieed up, the paper base contains micro- knot The biomaterial of structure includes one or more of PET film, nanofiber-based, cotton, silk scarf, natural rubber films.
Further, the conductive includes metal material, metal oxide, liquid metal alloy, inorganic partly leads One or more of body, organic conductive macromolecule material and carbon materials;The carbon materials include and are not limited to graphene Film, graphene wall, graphene microchip, graphene oxide, graphite alkane, graphite, carbon black, carbon nanotube, carbon nanocoils;The gold Belong to material to include and be not limited to silver nanowires, Pt nanowires, nanowires of gold, zinc oxide nanowire, Nano silver grain, copper nanometer Line, monoatomic layer germanium alkene, diatomic layer germanium alkene;The metal oxide includes and is not limited to tin indium oxide, fluorine oxide tin, oxidation Aluminium zinc;Inorganic semiconductor includes and is not limited to silicon, germanium, cadmium telluride;The liquid metal alloy includes and is not limited to gallium indium tin conjunction Gold;The organic conductive macromolecule material includes and is not limited to polythiophene, polyacetylene, polyaniline, polypyrrole.
Further, the outside lead is Cu, Au, Pt, Al, Ag, Ni, Pd, made of the pure metal or alloy in Ru Conducting wire or conduction band.
Further, the paper base, the first encapsulated layer and the second encapsulated layer are with a thickness of 0.001-5mm, area 0.1- 100cm2, the conductive layer thickness is 0.001-5mm, area 0.1-100cm2, the outside lead diameter is 0.1-5mm.
A kind of preparation method of the capacitive flexible sensor of paper base provided by the invention, passes through the hydrophobe on paper base surface Conductive material is filled in hydrophilic region on pattern, forms conductive material and the consistent conduction of hydrophobe pattern form in paper base Paper base, conductive layer and portion of external lead, are packaged by layer with the first encapsulated layer from two sides, form monolithic electrode plate;By two A monolithic electrode plate by its close to it is conductive it is laminated be bonded in opposite directions, formation two-pad electrode plate, then by two-pad electrode plate It is packaged by the surface of the second encapsulated layer, obtains capacitive flexible sensor;Therefore, paper base provided by the invention is capacitive Not only manufacture craft is simple for the preparation method of flexible sensor, and finished product Young's modulus is low, light-weight, and has low cost, high Flexibility, highly sensitive, long service life, good biocompatibility, it is wearable the advantages that.Can be to pressing, the strain such as bending, stretching There are preferable detection performance, the either extruding to the touching of moment or to lasting stress, can obtain tactile letter well Breath.It can be used for various physiological signals such as breath signal, pulse signal, voice signal, the signals such as body kinematics signal adopt in real time Collection.
Detailed description of the invention
Fig. 1 is a kind of process signal of the preparation method of the capacitive flexible sensor of paper base of implementation embodiment of the present invention Figure;
Fig. 2 is the structural schematic diagram for the capacitive flexible sensor of paper base that implementation embodiment of the present invention is prepared;
Fig. 3 is survey of the capacitive flexible sensor of paper base that provides of implementation embodiment of the present invention in the case where different pressures act on Test result figure;
Fig. 4 is placed on tester's wrist oar for the capacitive flexible sensor of paper base that implementation embodiment of the present invention provides and moves The pulse waveform figure recorded at arteries and veins.
Specific embodiment
In order to overcome the shortcomings in the prior art, the present invention provides a kind of preparation method of capacitive flexible sensor of paper base. To be more clear the object, technical solutions and advantages of the present invention, below in conjunction with the attached drawing in the preferred embodiment of the present invention, Technical solution in the embodiment of the present invention is further described in more detail.Described embodiment is that a part of the invention is implemented Example, instead of all the embodiments.The embodiments described below with reference to the accompanying drawings are exemplary, it is intended to for explaining this hair It is bright, and be not considered as limiting the invention.Based on the embodiments of the present invention, those of ordinary skill in the art are not doing Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.With reference to the accompanying drawing The embodiment of the present invention is described in detail.
As shown in Figure 1, a kind of preparation method of the capacitive flexible sensor of paper base, comprising:
S100, by handling paper base, so that paper base surface is formed close and distant water patterns;
S200, conductive material is filled into the hydrophilic region on close and distant water patterns, makes conductive material in paper base surface shape External interface is formed at conductive layer, and in conductive layer edge connection outside lead;
S300, the paper base with conductive layer and outside lead is carried out by two sides encapsulation by the first encapsulated layer, makes paper base, leads Electric layer and portion of external lead packages form monolithic electrode plate in the first encapsulated layer;
S400, the one side of the close conductive layer of two monolithic electrode plates is bonded in opposite directions, forms two-pad electrode plate, then The surface of two-pad electrode plate is packaged by the second encapsulated layer, obtains capacitive flexible sensor.
As shown in Fig. 2, the capacitive flexible sensor of a kind of paper base that the embodiment of the present invention is prepared, including the first monolithic electricity Pole plate 10 and the second monolithic electrode plate 20, the first monolithic electrode plate 10 and the second monolithic electrode plate 20 exist including paper base 30, setting On paper base 30 and by the conductive layer 40 of the close and distant water-bound limitation on paper base 30, it is connect with conductive layer 40 and forms external interface Outside lead 50 and towards the fitting of conductive layer 40 by paper base 30, conductive layer 40 and portion of external lead 50 be encapsulated in the One encapsulated layer 60;First monolithic electrode plate 10 and 20 back side of the second monolithic electrode plate setting the second encapsulated layer (being not drawn into figure) will First monolithic electrode plate 10 and the second monolithic electrode plate 20 are fit together with the first encapsulated layer 60 for front in opposite directions.
The working principle of the capacitive flexible sensor of a kind of paper base provided by the invention are as follows: when outer bound pair sensor applied force Compression is brought it about, when bending deformation, the distance between upper layer and lower layer conductive layer will change, so that the paper base is electric The capacitance size of appearance type flexible sensor changes.Metamorphosis of the sensor under current external force can pass through the change of capacitor Change digitally embodies.
As a preferred embodiment, when by handling paper base, the processing method of use includes spin-coating method, layer Platen press, photoetching process, seal method, intaglio printing, letterpress, wax printing method, ink-jet printing, silk screen print method, magnetron sputtering, heat Vapor deposition, the method for printing and dyeing, chemical conversion membrane processing method, fan-fold paper template, adhesive tape transfer method, physical vaporous deposition and plasma erosion One or more of lithography.
As a preferred embodiment, fan-fold paper template includes:
After the pattern that paper matrix plate is cut into the hollow out of folding, barrier material is smeared on the paper matrix plate;
The material that paper base can be prepared is put into the centre of fan-fold paper template, forms sandwich structure, in fan-fold paper template Barrier material by contact paper base prepare material after, barrier material penetrates into the preparing on material of paper base, and then is preparing Paper base on form close and distant water patterns.
It is pipettor dropwise addition, 3D by the method that conductive material is added to the hydrophilic region of paper base as a preferred embodiment One or more of impact system, seal method and inkjet printing.
As a preferred embodiment, the pattern that conductive layer is formed on paper base is ellipse, circle, rectangle, star, triangle Shape, pentagon, hexagon, arrow-shaped or semi-moon shaped basic figure, or be Bezier, Peano, Hilbert, Moore With one or more of the fractal curve of Greek cross curve.
As a preferred embodiment, the first encapsulated layer and the second encapsulated layer are that flexible material is prepared, flexible material Material includes polyethylene naphthalate, polymethyl methacrylate, polyurethanes, urethane acrylate, poly- diformazan Radical siloxane, polyacrylonitrile, polyethylene terephthalate, polyethylene, polypropylene, polyamide, polyvinylidene fluoride acid, polytetrafluoro One or more of ethylene, polyvinyl alcohol, polylactic acid, polyetherimide, polycarbonate, polyimides, polyvinyl chloride.
As a preferred embodiment, paper base is that paper-like materials or/and the biomaterial containing micro-structure are prepared, The paper-like materials of the paper base include face tissue, nitrocellulose membrane, qualitative filter paper, chromatographic paper, printing paper, blotting paper, ox One or more of mulberry paper, cellulose-carbon nano-tube extrusion coating paper, fiber-silver ink extrusion coating paper, drawing paper, the paper base Biomaterial containing micro-structure includes one of PET film, nanofiber-based, cotton, silk scarf, natural rubber films or several Kind.
As a preferred embodiment, conductive includes metal material, metal oxide, liquid metal alloy, nothing One or more of machine semiconductor, organic conductive macromolecule material and carbon materials;Carbon materials include and are not limited to graphite Alkene film, graphene wall, graphene microchip, graphene oxide, graphite alkane, graphite, carbon black, carbon nanotube, carbon nanocoils;Metal Material include and be not limited to silver nanowires, Pt nanowires, nanowires of gold, zinc oxide nanowire, Nano silver grain, copper nano-wire, Monoatomic layer germanium alkene, diatomic layer germanium alkene;Metal oxide includes and is not limited to tin indium oxide, fluorine oxide tin, aluminum zinc oxide;Nothing Machine semiconductor includes and is not limited to silicon, germanium, cadmium telluride;The liquid metal alloy includes and is not limited to gallium-indium-tin alloy;It is described Organic conductive macromolecule material includes and is not limited to polythiophene, polyacetylene, polyaniline, polypyrrole.
Pure metal or alloy as a preferred embodiment, in outside lead Cu, Au, Pt, Al, Ag, Ni, Pd, Ru Manufactured conducting wire or conduction band.
As a preferred embodiment, with a thickness of 0.001-5mm, area is for paper base, the first encapsulated layer and the second encapsulated layer 0.1-100cm2, the conductive layer thickness is 0.001-5mm, area 0.1-100cm2, the outside lead diameter is 0.1- 5mm。
The sensor that a kind of preparation method of the capacitive flexible sensor of paper base provided in this embodiment is prepared is by upper and lower Two monolithic conductive electrode compositions, wherein monolithic conductive plate is made of conductive layer and encapsulated layer, also, in monolithic conductive plate The pattern of conductive layer can according to need and be designed to different shapes, meanwhile, by flexible material preparation the first encapsulated layer and Second encapsulated layer encapsulates conductive layer to form single electrode plate, and two monolithic conductive plates is made to constitute capacitive flexible sensor, The sensor detection sensitivity is high, can reach 16kpa-1
A kind of preparation method of the capacitive flexible sensor of paper base provided by the invention is done below by specific embodiment It illustrates.
Embodiment 1:
(1) paper matrix with channel is made on segmental mold paperboard using the mode of graduating with cutter or laser engraving or mechanical engraving Plate, and PDMS mixed liquor (10:1) is equably applied on paper matrix plate using glass bar.Single layer face tissue is sandwiched into segmental mold In plate, by one face flype of folding template, 1 minute is stood, until PDMS solution complete wetting face tissue and without will after diffusion Internal face tissue takes out.Paper base is put into 60 DEG C of heating plates and is heated 2 minutes, is taken out, the face-cloth for there are close and distant water patterns is obtained Paper, pattern are the square electrode plate of 15X15mm.
(2) silver nanowires solution is drawn using 100ul liquid-transfering gun, is added drop-wise to the hydrophilic region of face tissue, it is naturally dry to it The silver nanowires conductive layer on paper is obtained after dry.
(3) lead is introduced in the marginal position of circuit, and silver paste, which is added dropwise, makes conductive layer be connected with lead terminal.
(4) face tissue with silver nanowires conductive layer and outside lead is carried out by two sides encapsulation by PU film, makes face-cloth Paper, silver nanowires conductive layer and portion of external lead packages form monolithic electrode plate in PU film.
(5) will by step (1)-(4) obtain two pieces of flexible monolithic conductive plate close conductive layer one side into The opposite fitting of row forms two-pad electrode plate, then two-pad electrode plate is carried out overall package by two PU films, obtains capacitive soft Property sensor.
Embodiment 2
Referring to embodiment 1, a kind of capacitive flexible sensor production method of paper base and embodiment 1 provided in this embodiment are not It is with place, carries out paper base surface modification using ink-jet printing in step (1), specific steps replace with as follows: by pattern The reverse of the conductive layer pattern editted inputs computer, carries out oiliness water resistant ink by Canon iP2780 type ink-jet printer Inkjet printing obtains the printing paper paper base with close and distant water patterns on napkin paper.
Embodiment 3
Referring to embodiment 1, a kind of capacitive flexible sensor preparation method of paper base and embodiment 1 provided in this embodiment are not It is with place, the channel pattern on paper matrix plate described in step (1) is changed to size by the square of 15X15mm and is 15X15mm, " F " type that line thickness is 500 μm.
Embodiment 4
Referring to embodiment 1, a kind of capacitive flexible sensor preparation method of paper base and embodiment 1 provided in this embodiment are not It is with place, conductive used in step (2) is carbon nano-tube solution.
Embodiment 5
Referring to embodiment 1, a kind of capacitive flexible sensor preparation method of paper base and embodiment 1 provided in this embodiment are not It is with place, encapsulating material used in step (4) and step (5) is PDMS film.
Embodiment 6
The wrist radial artery of measured is attached at using the capacitive flexible sensor of paper base prepared by 1 method of embodiment Place, the capacitance signal of inventive sensor is read using LCR table, and waveform recording is as shown in Figure 4.
Referring to Fig. 3, the capacitive flexible sensor of paper base of preparation of the embodiment of the present invention is presented under the action of different pressures Bilinearity variation, in 0-1kPa pressure limit, the flexible sensor sensitivity can reach 7.492kPa-1, pressed in 1-2.5Ka Within the scope of power, the flexible sensor sensitivity can reach 0.896kPa-1, it can satisfy the requirement of physiology signal measurement, Such as the measurement of tiny signal pulse wave.The capacitive flexible sensor of paper base has high sensitivity, and wearable property is good, stability Good feature.
Referring to fig. 4, the pulse wave of the capacitive flexible sensor measurement of the paper base of preparation of the embodiment of the present invention, pulse waveform Clear and accurate, the characteristic peak containing standard pulse wave illustrates present invention sensitivity with higher, can detecte minor change Physiological signal.With high sensitivity, the advantages that high s/n ratio, high duplication, low sluggishness, low error.
It should be noted last that the above specific embodiment is only used to illustrate the technical scheme of the present invention and not to limit it, Although being described the invention in detail referring to example, those skilled in the art should understand that, it can be to the present invention Technical solution be modified or replaced equivalently, without departing from the spirit and scope of the technical solution of the present invention, should all cover In the scope of the claims of the present invention.

Claims (10)

1. a kind of preparation method of the capacitive flexible sensor of paper base characterized by comprising
By handling paper base, the paper base surface is made to form close and distant water patterns;
Conductive material is filled into the hydrophilic region on the close and distant water patterns, makes the conductive material on the paper base surface Conductive layer is formed, and forms external interface in conductive layer edge connection outside lead;
The paper base, conductive layer and portion of external lead are packaged with the first encapsulated layer, form monolithic electrode plate;
The one side of the close conductive layer of two monolithic electrode plates is bonded in opposite directions, forms two-pad electrode plate, then pass through The surface of the two-pad electrode plate is packaged by the second encapsulated layer, obtains capacitive flexible sensor.
2. a kind of preparation method of the capacitive flexible sensor of paper base according to claim 1, which is characterized in that passing through When handling the paper base, the processing method of the use includes spin-coating method, laminating method, photoetching process, seal method, intaglio process Brush, letterpress, wax printing method, ink-jet printing, silk screen print method, magnetron sputtering, hot evaporation, the method for printing and dyeing, at chemical composition coating One or more of logos, fan-fold paper template, adhesive tape transfer method, physical vaporous deposition and plasma etching method.
3. a kind of preparation method of the capacitive flexible sensor of paper base according to claim 2, which is characterized in that the folding Stacker template includes:
After the pattern that paper matrix plate is cut into the hollow out of folding, barrier material is smeared on the paper matrix plate;
The material that paper base can be prepared is put into the centre of the fan-fold paper template, forms sandwich structure, the fan-fold paper template On barrier material by contact paper base prepare material after, the barrier material penetrates into the preparing on material of paper base, in turn Close and distant water patterns are formed on the paper base prepared.
4. a kind of preparation method of the capacitive flexible sensor of paper base according to claim 1, which is characterized in that described to incite somebody to action Conductive material is added to the method for the hydrophilic region of paper base as one in pipettor dropwise addition, 3D printing method, seal method and inkjet printing Kind is several.
5. a kind of preparation method of the capacitive flexible sensor of paper base according to claim 1, which is characterized in that the paper The pattern that conductive layer is formed on base is ellipse, circle, rectangle, star, triangle, pentagon, hexagon, arrow-shaped or half a month The basic figure of shape, or for Bezier, Peano, Hilbert, Moore and Greek cross curve fractal curve in One or more.
6. a kind of preparation method of the capacitive flexible sensor of paper base according to claim 1, which is characterized in that described One encapsulated layer and the second encapsulated layer are that flexible material is prepared, the flexible material include polyethylene naphthalate, Polymethyl methacrylate, urethane acrylate, dimethyl silicone polymer, polyacrylonitrile, gathers to benzene two polyurethanes Formic acid glycol ester, polyethylene, polypropylene, polyamide, polyvinylidene fluoride acid, polytetrafluoroethylene (PTFE), polyvinyl alcohol, polylactic acid, polyethers One or more of acid imide, polycarbonate, polyimides, polyvinyl chloride.
7. a kind of preparation method of the capacitive flexible sensor of paper base according to claim 1, which is characterized in that the paper Base is that paper-like materials or/and the biomaterial containing micro-structure are prepared, and the paper-like materials of the paper base include face-cloth Paper, nitrocellulose membrane, qualitative filter paper, chromatographic paper, printing paper, blotting paper, brown paper, cellulose-carbon nano-tube extrusion coating paper, fibre One or more of dimension-silver ink extrusion coating paper, drawing paper, the biomaterial containing micro-structure of the paper base include PET film, One or more of nanofiber-based, cotton, silk scarf, natural rubber films.
8. a kind of preparation method of the capacitive flexible sensor of paper base according to claim 1, which is characterized in that described to lead Electric layer material include metal material, metal oxide, liquid metal alloy, inorganic semiconductor, organic conductive macromolecule material and One or more of carbon materials;The carbon materials include and to be not limited to graphene film, graphene wall, graphene micro- Piece, graphene oxide, graphite alkane, graphite, carbon black, carbon nanotube, carbon nanocoils;The metal material includes and is not limited to Yin Na Rice noodles, Pt nanowires, nanowires of gold, zinc oxide nanowire, Nano silver grain, copper nano-wire, monoatomic layer germanium alkene, diatomic layer Germanium alkene;The metal oxide includes and is not limited to tin indium oxide, fluorine oxide tin, aluminum zinc oxide;Inorganic semiconductor includes and not It is limited to silicon, germanium, cadmium telluride;The liquid metal alloy includes and is not limited to gallium-indium-tin alloy;The organic conductive macromolecule material Material includes and is not limited to polythiophene, polyacetylene, polyaniline, polypyrrole.
9. a kind of preparation method of the capacitive flexible sensor of paper base according to claim 1, which is characterized in that described outer Portion's lead is conducting wire or conduction band made of the pure metal or alloy in Cu, Au, Pt, Al, Ag, Ni, Pd, Ru.
10. a kind of preparation method of the capacitive flexible sensor of paper base according to claim 1, which is characterized in that described Paper base, the first encapsulated layer and the second encapsulated layer are with a thickness of 0.001-5mm, area 0.1-100cm2, the conductive layer thickness is 0.001-5mm, area 0.1-100cm2, the outside lead diameter is 0.1-5mm.
CN201811511149.0A 2018-12-11 2018-12-11 Preparation method of paper-based capacitive flexible sensor Active CN109752029B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811511149.0A CN109752029B (en) 2018-12-11 2018-12-11 Preparation method of paper-based capacitive flexible sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811511149.0A CN109752029B (en) 2018-12-11 2018-12-11 Preparation method of paper-based capacitive flexible sensor

Publications (2)

Publication Number Publication Date
CN109752029A true CN109752029A (en) 2019-05-14
CN109752029B CN109752029B (en) 2020-08-07

Family

ID=66403556

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811511149.0A Active CN109752029B (en) 2018-12-11 2018-12-11 Preparation method of paper-based capacitive flexible sensor

Country Status (1)

Country Link
CN (1) CN109752029B (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110184859A (en) * 2019-05-16 2019-08-30 西安石油大学 A kind of multi-layer graphene fibrous paper and preparation method thereof
CN110205867A (en) * 2019-06-14 2019-09-06 陕西科技大学 A kind of multi-functional paper base flexible sensing material and its preparation method and application
CN110423371A (en) * 2019-08-01 2019-11-08 陕西科技大学 A kind of degradable multifunction flexible sensing material and preparation method thereof and the sensor being made from it
CN110793677A (en) * 2019-10-25 2020-02-14 天津大学 Degradable paper capacitive flexible pressure sensor and preparation method thereof
CN110916621A (en) * 2019-11-28 2020-03-27 杭州电子科技大学 Flexible sensor for detecting multiple physiological signals
CN111189383A (en) * 2020-02-20 2020-05-22 吉林大学 Super-hydrophobic paper-based strain sensor and preparation method thereof
CN112033277A (en) * 2020-09-08 2020-12-04 东南大学 Curvature sensor based on paper folding structure
CN112305039A (en) * 2020-10-30 2021-02-02 深圳瀚光科技有限公司 Formic acid gas sensor based on germanium nanosheets and application
WO2021017841A1 (en) * 2019-07-18 2021-02-04 宁波韧和科技有限公司 Capacitive elastic strain sensor, and preparation method and use therefor
CN114413744A (en) * 2022-03-07 2022-04-29 西安交通大学 3D printing composite material flexible strain sensor based on auxetic structure and preparation method thereof
CN115216995A (en) * 2022-07-20 2022-10-21 钱塘科技创新中心 Paper processing method, carbon paste method, part preparation method and sensor for flexible pressure sensor

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007094998A1 (en) * 2006-02-10 2007-08-23 Milliken & Company Printed capacitive sensor
WO2010095581A1 (en) * 2009-02-18 2010-08-26 株式会社クラレ Multi-layered deformation sensor
US20150048852A1 (en) * 2013-08-13 2015-02-19 Tech4Imaging Llc Modular Stretchable and Flexible Capacitance Sensors for Use with Electrical Capacitance Volume Tomography & Capacitance Sensing Applications
CN104613860A (en) * 2015-01-26 2015-05-13 北京科技大学 Flexible wearable paper-based strain sensor and preparation method thereof
CN106706176A (en) * 2016-11-23 2017-05-24 浙江大学 Capacitive touch sensor having patterned microstructure array
CN106813811A (en) * 2017-01-20 2017-06-09 南京大学 A kind of high sensitivity capacitor type pliable pressure sensor
CN106908176A (en) * 2017-03-06 2017-06-30 中国科学院苏州纳米技术与纳米仿生研究所 Multiphase dielectric layer capacitance pressure transducer, and its preparation method with micro-structural
CN107093493A (en) * 2017-03-21 2017-08-25 中山大学 A kind of paper substrate flexible electrode and its preparation method and application
CN108318059A (en) * 2018-02-12 2018-07-24 清华大学 Paper substrate sensor and preparation method thereof
CN207936978U (en) * 2018-02-12 2018-10-02 清华大学 Paper substrate sensor
CN108931565A (en) * 2018-08-13 2018-12-04 山东农业大学 The construction method of nano-cellulose paper base biosensor

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007094998A1 (en) * 2006-02-10 2007-08-23 Milliken & Company Printed capacitive sensor
WO2010095581A1 (en) * 2009-02-18 2010-08-26 株式会社クラレ Multi-layered deformation sensor
US20150048852A1 (en) * 2013-08-13 2015-02-19 Tech4Imaging Llc Modular Stretchable and Flexible Capacitance Sensors for Use with Electrical Capacitance Volume Tomography & Capacitance Sensing Applications
CN104613860A (en) * 2015-01-26 2015-05-13 北京科技大学 Flexible wearable paper-based strain sensor and preparation method thereof
CN106706176A (en) * 2016-11-23 2017-05-24 浙江大学 Capacitive touch sensor having patterned microstructure array
CN106813811A (en) * 2017-01-20 2017-06-09 南京大学 A kind of high sensitivity capacitor type pliable pressure sensor
CN106908176A (en) * 2017-03-06 2017-06-30 中国科学院苏州纳米技术与纳米仿生研究所 Multiphase dielectric layer capacitance pressure transducer, and its preparation method with micro-structural
CN107093493A (en) * 2017-03-21 2017-08-25 中山大学 A kind of paper substrate flexible electrode and its preparation method and application
CN108318059A (en) * 2018-02-12 2018-07-24 清华大学 Paper substrate sensor and preparation method thereof
CN207936978U (en) * 2018-02-12 2018-10-02 清华大学 Paper substrate sensor
CN108931565A (en) * 2018-08-13 2018-12-04 山东农业大学 The construction method of nano-cellulose paper base biosensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
候玉群: "柔性电容式应力传感器及其灵敏度影响因素研究", 《中国优秀硕士学位论文全文数据库.信息科技辑》 *

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110184859A (en) * 2019-05-16 2019-08-30 西安石油大学 A kind of multi-layer graphene fibrous paper and preparation method thereof
CN110184859B (en) * 2019-05-16 2021-08-27 西安石油大学 Multilayer graphene fiber paper and preparation method thereof
CN110205867A (en) * 2019-06-14 2019-09-06 陕西科技大学 A kind of multi-functional paper base flexible sensing material and its preparation method and application
WO2021017841A1 (en) * 2019-07-18 2021-02-04 宁波韧和科技有限公司 Capacitive elastic strain sensor, and preparation method and use therefor
CN110423371A (en) * 2019-08-01 2019-11-08 陕西科技大学 A kind of degradable multifunction flexible sensing material and preparation method thereof and the sensor being made from it
CN110423371B (en) * 2019-08-01 2022-04-29 陕西科技大学 Degradable multifunctional flexible sensing material, preparation method thereof and sensor made of degradable multifunctional flexible sensing material
CN110793677A (en) * 2019-10-25 2020-02-14 天津大学 Degradable paper capacitive flexible pressure sensor and preparation method thereof
CN110916621A (en) * 2019-11-28 2020-03-27 杭州电子科技大学 Flexible sensor for detecting multiple physiological signals
CN111189383A (en) * 2020-02-20 2020-05-22 吉林大学 Super-hydrophobic paper-based strain sensor and preparation method thereof
CN112033277A (en) * 2020-09-08 2020-12-04 东南大学 Curvature sensor based on paper folding structure
CN112033277B (en) * 2020-09-08 2021-10-08 东南大学 Curvature sensor based on paper folding structure
CN112305039A (en) * 2020-10-30 2021-02-02 深圳瀚光科技有限公司 Formic acid gas sensor based on germanium nanosheets and application
CN114413744A (en) * 2022-03-07 2022-04-29 西安交通大学 3D printing composite material flexible strain sensor based on auxetic structure and preparation method thereof
CN115216995A (en) * 2022-07-20 2022-10-21 钱塘科技创新中心 Paper processing method, carbon paste method, part preparation method and sensor for flexible pressure sensor
CN115216995B (en) * 2022-07-20 2024-02-09 钱塘科技创新中心 Flexible pressure sensor part preparation method and sensor

Also Published As

Publication number Publication date
CN109752029B (en) 2020-08-07

Similar Documents

Publication Publication Date Title
CN109752029A (en) A kind of preparation method of the capacitive flexible sensor of paper base
CN108318059A (en) Paper substrate sensor and preparation method thereof
CN110082010A (en) Flexible touch sensation sensor array and array scanning system applied to it
Luo et al. A new approach for ultrahigh-performance piezoresistive sensor based on wrinkled PPy film with electrospun PVA nanowires as spacer
Lou et al. Recent progress of self‐powered sensing systems for wearable electronics
Zhang et al. On-skin ultrathin and stretchable multifunctional sensor for smart healthcare wearables
CN106580256B (en) A kind of pliable pressure sensor and preparation method thereof
US10845213B2 (en) Paper based electronics platform
CN111533081B (en) Composite flexible pressure sensor based on bionic microstructure and preparation method thereof
CN106908176B (en) Multi-phase dielectric layer capacitive pressure sensor with micro-structure and manufacturing method thereof
CN113465796B (en) Flexible integrated array pressure sensor and preparation method thereof
CN110207866B (en) High-sensitivity flexible pressure sensor based on modified paper base and preparation method thereof
CN109770866B (en) Preparation method of high-sensitivity electronic skin
CN108871629A (en) A kind of flexible resistive array of pressure sensors and preparation method thereof
CN111693188B (en) Piezoresistive flexible sensor based on visual electrical impedance tomography technology and manufacturing method thereof
CN104359597A (en) Electronic skin based on three-dimensional flexible substrate graphene and preparing method thereof
CN208721291U (en) A kind of flexible resistive array of pressure sensors
CN109384194A (en) A kind of preparation method of the non-solid phase biological pressure sensor of electronic skin
CN108801347A (en) A kind of transparent flexible Multifunction Sensor and preparation method thereof
Du et al. A review of inkjet printing technology for personalized-healthcare wearable devices
CN112504518A (en) Flexible capacitive pressure sensor and preparation method thereof
CN112945429A (en) High-sensitivity flexible pressure sensor and manufacturing method thereof
CN110526198A (en) A kind of pliable pressure sensor and its manufacturing method based on hemispherical micro-structure
CN209117220U (en) A kind of threedimensional haptic sensor array of flexible piezoelectric formula
CN113218296B (en) Elastic strain sensor and preparation method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant