CN109750271A - A kind of heat resistant and wear resistant damage vibrating screen ball and preparation method thereof - Google Patents

A kind of heat resistant and wear resistant damage vibrating screen ball and preparation method thereof Download PDF

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Publication number
CN109750271A
CN109750271A CN201910144574.9A CN201910144574A CN109750271A CN 109750271 A CN109750271 A CN 109750271A CN 201910144574 A CN201910144574 A CN 201910144574A CN 109750271 A CN109750271 A CN 109750271A
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ball
inner core
vibrating screen
heat resistant
wear resistant
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CN109750271B (en
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张俊彦
白常宁
强力
安璐璐
高凯雄
张斌
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Lanzhou Institute of Chemical Physics LICP of CAS
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Lanzhou Institute of Chemical Physics LICP of CAS
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Abstract

The present invention relates to a kind of heat resistant and wear resistants to damage vibrating screen ball, which is made of ball inner core and the DLC film being arranged on the outside of the ball inner core as spherical surface;The DLC film with a thickness of 500 ~ 600nm.Meanwhile the invention also discloses the preparation methods of the ball.The present invention is different with the thermal expansion coefficient of DLC film using rubber ball body, and film is conducive to the stress for discharging film, promotes film and the good adhesiveness of ball inner core in segmentation shape;And effectively improve the wearability and temperature tolerance of rubber ball body.

Description

A kind of heat resistant and wear resistant damage vibrating screen ball and preparation method thereof
Technical field
The present invention relates to a kind of industrial vibration sieve ball more particularly to a kind of heat resistant and wear resistant damage vibrating screen ball and Preparation method.
Background technique
Vibrating screen is common material separation device, is widely used in the neck such as chemical industry, agricultural, metallurgy, building, mine Domain.In actual screening process, since the granular material that a large amount of granule sizes are different, thickness mixes enters after compass screen surface only one Point particle is contacted with compass screen surface, and by the vibration of screen box, the oversize bed of material is loose, make bulky grain natively existing for gap by into One step expands, and little particle is seized the opportunity to be transferred in lower layer or transporter across gap.However, when particulate sieves thoroughly, material and sieve pore ruler Very little similar particle, sieve is just more difficult thoroughly, is just more difficult through the particulate interspaces of compass screen surface lower layer, especially a large amount of material will block Sieve face.Therefore, when vibrating screen works, by designing the exciting force given by vibrating motor, promote rubber bound that can rise To the effect of the blocking material in cleaning sieve screen apertures, to improve screening yield.
Although ball, which in vibrating screen operational process, imitates artificial ceaselessly slap compass screen surface, can achieve the effect of not network blocking Fruit, but it belongs to the vulnerable part in vibrating screen.Since ball is bounced repeatedly under high-speed condition, with the increasing of stroke speed Add, it is increasing that ball surface layer is stripped shared percentage, ultimately causes the material that a large amount of abrasive dust is doped in screening.This Outside, the long-term operation of screen box and ball and sieve rub repeatedly generation heat accumulation the elasticity of rubber will be caused to reduce and can not It realizes and is on active service.Realize good cleaning effect, the selection of rubber ball body is also particularly critical, and sphere is heavier to be caused to damage to sieve Evil, and sphere relatively gently then reduces vibrating effect.Therefore, in the item for not changing sphere weight, the elastic property for not changing sphere Under part, the wearability of ball is improved, high temperature resistance will improve production efficiency, one of the measure of screening object purification.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of heat resistant and wear resistants of function admirable to damage vibrating screen ball Preparation method.
Another technical problem to be solved by this invention is to provide the preparation of heat resistant and wear resistant damage vibrating screen ball Method.
To solve the above problems, a kind of heat resistant and wear resistant of the present invention damages vibrating screen ball, it is characterised in that: should Ball is made of ball inner core and the DLC film being arranged on the outside of the ball inner core as spherical surface;The class Diamond thin with a thickness of 500 ~ 600nm.
The ball inner core material refers to one of nitrile rubber, neoprene, silicon rubber, ethylene propylene diene rubber, Its surface roughness < 100nm.
A kind of preparation method of heat resistant and wear resistant damage vibrating screen ball as described above, comprising the following steps:
(1) ball inner core is handled:
By industrial vibrating screen ball first through 60 DEG C of suds ultrasonic oscillations, then using in submissive hairbrush cleaning ball The impurity of wicking surface, 5 times repeatedly, finally use volumetric concentration for 75% alcohol wipe ball core surface, and with nitrogen wind The dry ball inner core to get cleaning;
(2) the ball inner core by the cleaning is fitted into plasma enhanced chemical vapor deposition vacuum chamber, and pallet uses The vibration of 0.2Hz frequency is parallel to pallet face and promotes ball movement;Then 1.0 × 10 are evacuated to–4Pa;
(3) it is first passed through hydrogen, power is used to carry out plasma bombardment for the pulsed ion source of 100W;It is passed through methane and argon gas again, With 600 ~ 800V pulsed bias plated film, 20 ~ 30min;Finally, be passed through methane and hydrogen, with 600 ~ 800V pulsed bias plated film 60 ~ 80min to obtain the final product.
The step (1) in 60 DEG C of suds refer to 100 grams of soap be dissolved in 990 milliliters of water, heated after to be dissolved To 60 DEG C to obtain the final product.
The step (3) in hydrogen gas plasma bombardment condition refer to pulsed bias be 400 ~ 500V, duty ratio 60%, Frequency is 60 ~ 70KHz, and vacuum cavity temperature is lower than 50 DEG C, and bombardment time is 15 ~ 25min.
The step (3) in hydrogen, methane, argon gas purity be 99.99%.
(3) the flow-rate ratio of middle methane and argon gas is 1:2 ~ 1:3 to the step;The flow-rate ratio of methane and hydrogen is 1:1.8 ~ 1: 2.2。
Compared with the prior art, the present invention has the following advantages:
1, the present invention is different with the thermal expansion coefficient of DLC film using rubber ball body, and film is conducive in segmentation shape The stress of film is discharged, film and the good adhesiveness of ball inner core are promoted.Liquid nitrogen is carried out to film prepared in the present invention It freezes and cuts and prepare section, interface is characterized (referring to Fig. 1) by scanning electron microscope.The result shows that the film 1 ~ 2 μm of plate is divided into be uniformly adhered in ball inner core.
2, preferably (500-600nm), which will not change rubber bodies inner core to the uniformity of the thickness of film of the present invention Shore durometer number and elastic property effectively improve the wearability and temperature tolerance of rubber ball body.
3, the temperature that the DLC film in the present invention can be born is higher than 300 DEG C or more, by the guarantor to ball inner core Shield reaches best.Meanwhile can have good elasticity under high temperature environment, it ensure that the fine separation of material of vibrating screen, extend The service life of vibrating screen.
4, the secondary simple spin friction experiment of progress of pairing is made using GCr15 steel to ball of the present invention, test display is heavy Product DLC film can significantly reduce coefficient of friction (coefficient of friction drops to 0.2 from 1), and friction coefficient curve stationarity is stronger And without noticeable wear, to prove that frictional behaviour of the present invention is far superior to traditional rubber ball body.
5, the cleaning for carrying out rubber is introduced a gas into vacuum chamber in preparation process of the present invention and temperature is constant is no more than 50 DEG C, and promote the movement of ball inner core simply by the vibration of pallet and realize comprehensive deposition film.
6, preparation method of the present invention is simple, is easy to industrial applications.
Detailed description of the invention
Specific embodiments of the present invention will be described in further detail with reference to the accompanying drawing.
Fig. 1 is cross-section diagram of the depositing diamond-like film of the present invention in rubber curved surface.
Specific embodiment
A kind of heat resistant and wear resistant of embodiment 1 damages vibrating screen ball, which sets by ball inner core and as spherical surface The DLC film on the outside of ball inner core is set to be made;DLC film with a thickness of 500-600nm.
Wherein: ball inner core material refers to nitrile rubber, surface roughness < 100nm.
The preparation method of heat resistant and wear resistant damage vibrating screen ball, comprising the following steps:
(1) ball inner core is handled:
By industrial Ф 30mm vibrating screen ball first through 60 DEG C of suds ultrasonic oscillations, rubber is then cleared away using submissive hairbrush The impurity of glueballs core surface, 5 times repeatedly, each 15min, it is therefore an objective to using the principle expanded with heat and contract with cold by ball inner core surface layer Impurity dialysis go out.Finally use volumetric concentration for 75% alcohol wipe ball core surface, and with nitrogen air-dry to get Clean ball inner core.
Wherein: 60 DEG C of suds, which refer to, is dissolved in 990 milliliters of water for 100 grams of soap, and 60 DEG C are heated to after to be dissolved To obtain the final product.
(2) clean ball inner core is fitted into plasma enhanced chemical vapor deposition vacuum chamber, pallet uses The vibration of 0.2Hz frequency is parallel to pallet face and promotes ball movement, i.e., so that pallet amplitude uniformly carries out extensional vibration;So Mechanical pump is opened afterwards, vacuum is evacuated to 100Pa, then opened lobe pump for vacuum and be evacuated to 2Pa, finally open molecular pump for vacuum It is evacuated to 1.0 × 10–4Pa。。
(3) it is first passed through the hydrogen of 300sccm into vacuum chamber, power is used to carry out plasma for the pulsed ion source of 100W Body bombardment, the oxide (paraffin, grease) on ball inner core surface layer is removed using hydrogen gas plasma, and to ball inner core It is not damaged.
Wherein: the condition of hydrogen gas plasma bombardment refers to that pulsed bias is 500V, and duty ratio 60%, frequency is 60KHz, 38 DEG C of vacuum cavity temperature, bombardment time 20min.
It is passed through the methane and argon gas that flow-rate ratio is 1:2 again, the purpose for using argon plasma is to be conducive to rubber surface to generate A large amount of free radicals promote various carbon-containing group (CH3 +, CH2 +Deng) be combined with the active site of rubber surface.With 800V pulse Bias deposition plating 20min;Finally, the methane and hydrogen that flow-rate ratio is 1:2 are passed through, with 800V pulsed bias deposition plating 60min to obtain the final product.It is subsequent to add enough hydrogen contents mainly for improving the suppleness of film and playing passivation.
Pallet is in concussion state during entire pretreatment and plated film, promotes ball core surface comprehensive and equal Even film forming.
A kind of heat resistant and wear resistant of embodiment 2 damages vibrating screen ball, which sets by ball inner core and as spherical surface The DLC film on the outside of ball inner core is set to be made;DLC film with a thickness of 500-600nm.
Wherein: ball inner core material refers to ethylene propylene diene rubber, surface roughness < 100nm.
The preparation method of heat resistant and wear resistant damage vibrating screen ball, comprising the following steps:
(1) ball inner core is handled;(2) same embodiment 1 is vacuumized.
(3) it is first passed through the hydrogen of 300sccm into vacuum chamber, power is used to carry out plasma for the pulsed ion source of 100W Body bombardment, the oxide (paraffin, grease) on ball inner core surface layer is removed using hydrogen gas plasma, and to ball inner core It is not damaged.
Wherein: the condition of hydrogen gas plasma bombardment refers to that pulsed bias is 500V, and duty ratio 60%, frequency is 60KHz, 40 DEG C of vacuum cavity temperature, bombardment time 20min.
It is passed through the methane and argon gas that flow-rate ratio is 1:2 again, the purpose for using argon plasma is to be conducive to rubber surface to generate A large amount of free radicals promote various carbon-containing group (CH3 +, CH2 +Deng) be combined with the active site of rubber surface.With 600V pulse Bias deposition plating 30min;Finally, the methane and hydrogen that flow-rate ratio is 1:2 are passed through, with 700V pulsed bias deposition plating 75min to obtain the final product.It is subsequent to add enough hydrogen contents mainly for improving the suppleness of film and playing passivation.
Pallet is in concussion state during entire pretreatment and plated film, promotes ball core surface comprehensive and equal Even film forming.
A kind of heat resistant and wear resistant of embodiment 3 damages vibrating screen ball, which sets by ball inner core and as spherical surface The DLC film on the outside of ball inner core is set to be made;DLC film with a thickness of 500-600nm.
Wherein: ball inner core material refers to neoprene, surface roughness < 100nm.
The preparation method of heat resistant and wear resistant damage vibrating screen ball, comprising the following steps:
(1) ball inner core is handled;(2) same embodiment 1 is vacuumized.
(3) it is first passed through the hydrogen of 300sccm into vacuum chamber, power is used to carry out plasma for the pulsed ion source of 100W Body bombardment, the oxide (paraffin, grease) on ball inner core surface layer is removed using hydrogen gas plasma, and to ball inner core It is not damaged.
Wherein: the condition of hydrogen gas plasma bombardment refers to that pulsed bias is 400V, and duty ratio 60%, frequency is 70KHz, temperature 45 C in vacuum chamber, bombardment time 15min.
It is passed through the methane and argon gas that flow-rate ratio is 1:3 again, the purpose for using argon plasma is to be conducive to rubber surface to generate A large amount of free radicals promote various carbon-containing group (CH3 +, CH2 +Deng) be combined with the active site of rubber surface.With 700V pulse Bias deposition plating 25min;Finally, the methane and hydrogen that flow-rate ratio is 1:1.8 are passed through, with 600V pulsed bias deposition plating 80min to obtain the final product.It is subsequent to add enough hydrogen contents mainly for improving the suppleness of film and playing passivation.
Pallet is in concussion state during entire pretreatment and plated film, promotes ball core surface comprehensive and equal Even film forming.
A kind of heat resistant and wear resistant of embodiment 4 damages vibrating screen ball, which sets by ball inner core and as spherical surface The DLC film on the outside of ball inner core is set to be made;DLC film with a thickness of 500-600nm.
Wherein: ball inner core material refers to silicon rubber, surface roughness < 100nm.
The preparation method of heat resistant and wear resistant damage vibrating screen ball, comprising the following steps:
(1) ball inner core is handled;(2) same embodiment 1 is vacuumized.
It is first passed through the hydrogen of 300sccm into vacuum chamber, power is used to carry out plasma for the pulsed ion source of 100W Bombardment, using hydrogen gas plasma remove ball inner core surface layer oxide (paraffin, grease), and to ball inner core without Damage.
Wherein: the condition of hydrogen gas plasma bombardment refers to that pulsed bias is 450V, and duty ratio 60%, frequency is 65KHz, temperature 45 C in vacuum chamber, bombardment time 25min.
It is passed through the methane and argon gas that flow-rate ratio is 1:2.5 again, the purpose for using argon plasma is to be conducive to rubber surface to produce Raw a large amount of free radicals promote various carbon-containing group (CH3 +, CH2 +Deng) be combined with the active site of rubber surface.With 600V arteries and veins Rush bias deposition plating 20min;Finally, the methane and hydrogen that flow-rate ratio is 1:2.2 are passed through, with 600V pulsed bias deposition plating 60min to obtain the final product.It is subsequent to add enough hydrogen contents mainly for improving the suppleness of film and playing passivation.
Pallet is in concussion state during entire pretreatment and plated film, promotes ball core surface comprehensive and equal Even film forming.
In above-described embodiment 1 ~ 4, hydrogen, methane, argon gas purity be 99.99%.

Claims (7)

1. a kind of heat resistant and wear resistant damages vibrating screen ball, it is characterised in that: the ball is by ball inner core and as spherical surface The DLC film on the outside of the ball inner core is arranged in be made;The DLC film with a thickness of 500 ~ 600nm.
2. a kind of heat resistant and wear resistant as described in claim 1 damages vibrating screen ball, it is characterised in that: the ball inner core Material refers to one of nitrile rubber, neoprene, silicon rubber, ethylene propylene diene rubber, surface roughness < 100nm.
3. a kind of preparation method of heat resistant and wear resistant damage vibrating screen ball as described in claim 1, comprising the following steps:
(1) ball inner core is handled:
By industrial vibrating screen ball first through 60 DEG C of suds ultrasonic oscillations, then using in submissive hairbrush cleaning ball The impurity of wicking surface, 5 times repeatedly, finally use volumetric concentration for 75% alcohol wipe ball core surface, and with nitrogen wind The dry ball inner core to get cleaning;
(2) the ball inner core by the cleaning is fitted into plasma enhanced chemical vapor deposition vacuum chamber, and pallet uses The vibration of 0.2Hz frequency is parallel to pallet face and promotes ball movement;Then 1.0 × 10 are evacuated to–4Pa;
(3) it is first passed through hydrogen, power is used to carry out plasma bombardment for the pulsed ion source of 100W;It is passed through methane and argon gas again, With 600 ~ 800V pulsed bias plated film, 20 ~ 30min;Finally, be passed through methane and hydrogen, with 600 ~ 800V pulsed bias plated film 60 ~ 80min to obtain the final product.
4. a kind of preparation method of heat resistant and wear resistant damage vibrating screen ball as claimed in claim 3, it is characterised in that: described Step (1) in 60 DEG C of suds refer to 100 grams of soap be dissolved in 990 milliliters of water, 60 DEG C are heated to after to be dissolved to obtain the final product.
5. a kind of preparation method of heat resistant and wear resistant damage vibrating screen ball as claimed in claim 3, it is characterised in that: described Step (3) in hydrogen gas plasma bombardment condition refer to pulsed bias be 400 ~ 500V, duty ratio 60%, frequency be 60 ~ 70KHz, vacuum cavity temperature are lower than 50 DEG C, and bombardment time is 15 ~ 25min.
6. a kind of preparation method of heat resistant and wear resistant damage vibrating screen ball as claimed in claim 3, it is characterised in that: described Step (3) in hydrogen, methane, argon gas purity be 99.99%.
7. a kind of preparation method of heat resistant and wear resistant damage vibrating screen ball as claimed in claim 3, it is characterised in that: described (3) the flow-rate ratio of middle methane and argon gas is 1:2 ~ 1:3 to step;The flow-rate ratio of methane and hydrogen is 1:1.8 ~ 1:2.2.
CN201910144574.9A 2019-02-27 2019-02-27 High-temperature-resistant wear-resistant rubber ball for vibrating screen and preparation method of rubber ball Active CN109750271B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112375246A (en) * 2020-11-27 2021-02-19 中国科学院兰州化学物理研究所 Method for modifying polymer surface by carbon dioxide plasma discharge under atmospheric pressure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1313914A (en) * 1999-06-18 2001-09-19 日新电机株式会社 Carbon film and method for formation thereof and article covered with carbon film and method for preparation thereof
EP1197582A1 (en) * 2000-10-12 2002-04-17 Nissin Electric Co., Ltd. Carbon coated object for contact with human skin
CN102753341A (en) * 2010-02-15 2012-10-24 横滨橡胶株式会社 Bonded body composed of carbon thin film-coated article and rubber
CN106011794A (en) * 2016-05-31 2016-10-12 中国科学院兰州化学物理研究所 Preparation method for super-lubricity nanocrystalline-amorphous carbon film in atmosphere environment
CN109371360A (en) * 2018-12-13 2019-02-22 纳峰真空镀膜(上海)有限公司 A kind of preparation method applied to the wear-resisting diamond-like coating on cryogenic material

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1313914A (en) * 1999-06-18 2001-09-19 日新电机株式会社 Carbon film and method for formation thereof and article covered with carbon film and method for preparation thereof
EP1197582A1 (en) * 2000-10-12 2002-04-17 Nissin Electric Co., Ltd. Carbon coated object for contact with human skin
CN102753341A (en) * 2010-02-15 2012-10-24 横滨橡胶株式会社 Bonded body composed of carbon thin film-coated article and rubber
CN106011794A (en) * 2016-05-31 2016-10-12 中国科学院兰州化学物理研究所 Preparation method for super-lubricity nanocrystalline-amorphous carbon film in atmosphere environment
CN109371360A (en) * 2018-12-13 2019-02-22 纳峰真空镀膜(上海)有限公司 A kind of preparation method applied to the wear-resisting diamond-like coating on cryogenic material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112375246A (en) * 2020-11-27 2021-02-19 中国科学院兰州化学物理研究所 Method for modifying polymer surface by carbon dioxide plasma discharge under atmospheric pressure
CN112375246B (en) * 2020-11-27 2021-07-13 中国科学院兰州化学物理研究所 Method for modifying polymer surface by carbon dioxide plasma discharge under atmospheric pressure

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