CN109738107A - A kind of pressure sensor of hydraulic oil formula high stable - Google Patents

A kind of pressure sensor of hydraulic oil formula high stable Download PDF

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Publication number
CN109738107A
CN109738107A CN201910005918.8A CN201910005918A CN109738107A CN 109738107 A CN109738107 A CN 109738107A CN 201910005918 A CN201910005918 A CN 201910005918A CN 109738107 A CN109738107 A CN 109738107A
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China
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sensor
pressure
hydraulic oil
hydraulic
formula high
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CN201910005918.8A
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Chinese (zh)
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胡靖阳
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Individual
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Abstract

The invention discloses a kind of pressure sensors of hydraulic oil formula high stable, belong to sensor field, it is big to solve existing sensor assembling difficulty, presser sensor diaphragm stress surface is uneven, mechanically operated mode causes stress the problem of detection inaccuracy, it is characterized in that: including lower lock block, sensor upper housing, hydraulic column and sensor lower case, the sensor upper housing center bottom is fixedly connected with hydraulic column, hydraulic column bottom side connects sensor lower case by threaded portion, receive to exert pressure by installing the lower lock block that can be slided up and down in shell on a sensor or be offseted by Pressure Block and pressure object, the diaphragm in the area Li Min is transferred to by hydraulic oil, after silicon resistance sensing element of pressure is exerted a force and is detected, it will test signal by sensor inner core to transmit out, eliminate the influence that hydraulic fluid chamber tests its dynamic, biography is fully ensured that The Dynamic response characteristic of sensor, fully meets the response frequency of dynamically pressure testing test requirements document.

Description

A kind of pressure sensor of hydraulic oil formula high stable
Technical field
The present invention relates to sensor fields, are specifically related to a kind of pressure sensor of hydraulic oil formula high stable.
Background technique
Pressure sensor is to experience pressure signal, and can be converted into pressure signal according to certain rule available defeated The device or device of electric signal out are a kind of sensors the most commonly used in industrial practice.Pressure sensor is also pacified extensively Dress is on the rolling stock.With the rapid development of sensor technology, the type of sensor have differential pressure pickup, pressure sensor, Ultrasonic sensor etc., wherein pressure sensor causes to sense often due to the internal structure of sensor and the layout of chip The static pressure performance of device is bad, to cause the job stability of sensor during the work time bad;Meanwhile over-voltage performance is usual It is determined via sensor chip, and then leads to the over-voltage limited performance of pressure sensor, it is difficult to so that sensor adapts to more Complicated working environment.
Chinese patent CN207964133U discloses a kind of pressure sensor of good insulating, comprising: connector, shell, biography Sensor inner core, insulation sleeve one, limit buckle, felt pad, insulation sleeve two, dead ring, wiring board, sealing waterproof layer, signal wire, it is described Shell is installed in the top of connector, and the sensor inner core is assemblied in inside connector, and sensor inner core peripheral equipment is exhausted with one Edge set one, the limit buckle is mounted on above sensor inner core, although can realize structure novel, good seal performance it is excellent Point, still, this pressure sensor assembling difficulty is big, and presser sensor diaphragm stress surface is uneven, and mechanically operated mode causes Pressure detecting inaccuracy.Accordingly, it is desirable to provide a kind of pressure sensor of hydraulic oil formula high stable, it is intended to solve the above problems.
Summary of the invention
In view of the deficiencies of the prior art, the present invention intends to provide a kind of pressure biography of hydraulic oil formula high stable Sensor, to solve the problems in above-mentioned background technique.
To achieve the above object, the invention provides the following technical scheme:
A kind of pressure sensor of hydraulic oil formula high stable, including lower lock block, sensor upper housing, hydraulic column and sensor lower casing Body, the sensor upper housing center bottom are fixedly connected with hydraulic column, and hydraulic column bottom side connects sensor lower casing by threaded portion Body, sensor upper housing upper end inside are equipped with lower lock block, and lower lock block is slidably arranged in sensor upper housing, below lower lock block Hydraulic fluid chamber is set as in sensor upper housing, hydraulic column top middle portion is equipped with signal detecting mouth, is equipped with to receive inside hydraulic column and lead to Road, hydraulic fluid chamber are connected to by signal detecting mouth with receiving channel, and hydraulic column bottom is set as the area Li Min, the area Li Min bottom equipped with every Film, separator bottom are equipped with silicon resistance sensing element of pressure, and silicon resistance sensing element of pressure connects sensor inner core, and sensor inner core connection turns Connect cable.
As a further solution of the present invention, the threaded portion includes that the external screw thread that hydraulic column side wall is arranged in and setting exist The internal screw thread of sensor lower case inner wall, external screw thread and internal screw thread intermeshing.
As a further solution of the present invention, Pressure Block is connected at the top of the lower lock block, lower lock block top middle portion is equipped with liquid Pressure oil injection channel, hydraulic oil injection channel internal screw thread connect sealing bolt, set between sealing bolt and hydraulic oil injection channel There is sealing ring.
As a further solution of the present invention, hydraulic oil injection channel bottom is connected to filter chamber, filter chamber bottom peace Equipped with filter screen, hydraulic fluid chamber is connected to filter chamber.
As a further solution of the present invention, the filter screen is filtering metal net.
As a further solution of the present invention, the area Li Min is arranged between circular pit block and upper holder block, upper holder block It is set on hydraulic column and is equipped with gasket between hydraulic column, biography is installed in the sensor lower case of circular pit block bottom Sensor pedestal.
As a further solution of the present invention, diaphragm, silicon resistance sensing element of pressure side are installed in the circular pit block Equipped with lug, the quantity of lug is at least 1 and is embedded in the card slot of circular pit block.
As a further solution of the present invention, the quantity of the lug is 2 and is symmetrical arranged.
As a further solution of the present invention, the sensor inner core is electronic sensor chip, quick with silicon pressure drag Sensing unit connection;Diaphragm is the silicon diaphragm of twin polishing, and silicon diaphragm is with a thickness of 0.3-0.7cm, diaphragm and silicon resistance sensing element of pressure It offsets.
It as a further solution of the present invention, further include spring, spring is mounted in hydraulic fluid chamber, and spring is mounted on sensing Between device upper housing bottom wall and lower lock block.
In conclusion compared with the prior art, the invention has the following beneficial effects:
The pressure sensor of hydraulic oil formula high stable of the invention, stabilized structure is easy to assembly, by shell on a sensor The lower lock block that can slide up and down is installed to receive to exert pressure or offset by Pressure Block and the object that presses, is transferred to by hydraulic oil The diaphragm in the area Li Min after silicon resistance sensing element of pressure is exerted a force and detected, will test signal by sensor inner core and transmit out, eliminate The influence that hydraulic fluid chamber tests its dynamic has fully ensured that the Dynamic response characteristic of sensor, fully meets dynamic pressure survey Try the response frequency of test requirements document.
In order to explain the structural features and functions of the invention more clearly, come with reference to the accompanying drawing with specific embodiment to this hair It is bright to be described in detail.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of invention.
Fig. 2 is the structural schematic diagram of sensor upper housing in invention.
Fig. 3 is the structural schematic diagram of silicon resistance sensing element of pressure in invention.
Appended drawing reference: 1- Pressure Block, 2- lower lock block, 3- spring, 4- hydraulic fluid chamber, 5- sensor upper housing, 6- seal spiral shell Bolt, 7- sealing ring, 8- hydraulic oil injection channel, 9- filter chamber, 10- filter screen, 11- signal detecting mouth, 12- hydraulic column, 13- spiral shell Line portion, 14- sensor lower case, 15- receiving channel, 16- upper holder block, 17- gasket, 18- circular pit block, the area 19- Li Min, 20- diaphragm, 21- silicon resistance sensing element of pressure, 22- sensor inner core, 23- sensor base, 24- transit cable, 25- lug.
Specific embodiment
The following further describes the technical solution of the present invention in the following with reference to the drawings and specific embodiments.
Embodiment 1
Referring to FIG. 1 to FIG. 3, in the present embodiment, a kind of pressure sensor of hydraulic oil formula high stable, including lower lock block 2, sensor Upper housing 5, hydraulic column 12 and sensor lower case 14,5 center bottom of sensor upper housing are fixedly connected with hydraulic column 12, liquid 12 bottom side of compression leg connects sensor lower case 14 by threaded portion 13, and threaded portion 13 includes the outer spiral shell that 12 side wall of hydraulic column is arranged in Line and the internal screw thread that 14 inner wall of sensor lower case is set, external screw thread and internal screw thread intermeshing, to realize hydraulic column 12 With the connection of sensor lower case 14.
Lower lock block 2 is equipped with inside 5 upper end of sensor upper housing, lower lock block 2 is slidably arranged in sensor upper housing 5 It is interior, Pressure Block 1 is connected at the top of lower lock block 2, Pressure Block 1 offsets for receiving object of exerting pressure or press, in 2 top of lower lock block Portion is equipped with hydraulic oil injection channel 8, and 8 internal screw thread of hydraulic oil injection channel connects sealing bolt 6, and sealing bolt 6 and hydraulic oil are infused Entering to be equipped with sealing ring 7 between channel 8 can open hydraulic oil injection channel 8 when backing out sealing bolt 6, facilitate hydraulic oil Injection, conversely, sealing bolt 6 can block hydraulic oil injection channel 8 after tightening sealing bolt 6.
8 bottom of hydraulic oil injection channel is connected to filter chamber 9, and 9 bottom of filter chamber is equipped with filter screen 10, the pushing It is set as hydraulic fluid chamber 4 in the sensor upper housing 5 of 2 lower section of block, hydraulic fluid chamber 4 is connected to filter chamber 9, and filter screen 10 is using filtering Metal mesh is filtered hydraulic oil, protects the hydraulic fluid chamber 4 not by hydraulic oil pollution and damage.
12 top middle portion of hydraulic column is equipped with signal detecting mouth 11, and receiving channel 15 is equipped with inside hydraulic column 12, hydraulic Oil pocket 4 is connected to by signal detecting mouth 11 with receiving channel 15;12 bottom of hydraulic column is set as the area Li Min 19, and the area Li Min 19 is set It sets between circular pit block 18 and upper holder block 16, upper holder block 16 is set on hydraulic column 12 and is equipped between hydraulic column 12 close Packing 17 is equipped with sensor base 23 in the sensor lower case 14 of 18 bottom of circular pit block.
Diaphragm 20 is installed, the setting of diaphragm 20 is in 19 bottom of the area Li Min, 20 bottom of diaphragm peace in the circular pit block 18 Equipped with silicon resistance sensing element of pressure 21, silicon resistance sensing element of pressure 21 connects sensor inner core 22, the connection switching electricity of sensor inner core 22 Cable 24.
21 side of silicon resistance sensing element of pressure is equipped with lug 25, and the quantity of lug 25 is at least 1 and is embedded in annular In the card slot of pit block 18, it is preferred that in the present embodiment, the quantity of lug 25 is 2 and is symmetrical arranged that lug 25 is to silicon pressure The limit of 21 position of sensing element is hindered, it is avoided to rotate or beat.
The sensor inner core 22 is electronic sensor chip, is connect with silicon resistance sensing element of pressure 21, for that will press Force signal is transmitted by cable 24, and the diaphragm 20 is the silicon diaphragm of twin polishing, and silicon diaphragm is with a thickness of 0.3-0.7cm, diaphragm 20 offset with silicon resistance sensing element of pressure 21, eliminate the influence that hydraulic fluid chamber 4 tests its dynamic, have fully ensured that sensor Dynamic response characteristic fully meets the response frequency of dynamically pressure testing test requirements document.
Embodiment 2
Please refer to FIG. 1 to FIG. 3, in the present embodiment, a kind of pressure sensor of hydraulic oil formula high stable, further includes spring 3, spring 3 are mounted in hydraulic fluid chamber 4, and spring 3 is mounted between 5 bottom wall of sensor upper housing and lower lock block 2, under spring 3 is for assisting Remaining structure division of the homing action of briquetting 2, the present embodiment is same as Example 1.
The technical principle of the invention is described above in combination with a specific embodiment, is only the preferred embodiment of the present invention.This The protection scope of invention is not limited merely to above-described embodiment, and all technical solutions belonged under thinking of the present invention belong to the present invention Protection scope.Those skilled in the art, which does not need to pay for creative labor, can associate other specific realities of the invention Mode is applied, these modes will fall within the scope of protection of the present invention.

Claims (10)

1. a kind of pressure sensor of hydraulic oil formula high stable, including lower lock block (2), sensor upper housing (5), hydraulic column (12) With sensor lower case (14), sensor upper housing (5) center bottom is fixedly connected hydraulic column (12), hydraulic column (12) bottom Side passes through threaded portion (13) connection sensor lower case (14), which is characterized in that is equipped with down inside sensor upper housing (5) upper end Briquetting (2), lower lock block (2) are slidably arranged in sensor upper housing (5), in the sensor upper housing (5) below lower lock block (2) It is set as hydraulic fluid chamber (4), hydraulic column (12) top middle portion is equipped with signal detecting mouth (11), is equipped with to receive inside hydraulic column (12) and lead to Road (15), hydraulic fluid chamber (4) are connected to by signal detecting mouth (11) with receiving channel (15), and it is quick that hydraulic column (12) bottom is set as power Area (19), the area Li Min (19) bottom are equipped with diaphragm (20), and diaphragm (20) bottom is equipped with silicon resistance sensing element of pressure (21), silicon pressure drag Sensing element (21) connects sensor inner core (22), and sensor inner core (22) connects transit cable (24).
2. the pressure sensor of hydraulic oil formula high stable according to claim 1, which is characterized in that the threaded portion (13) Including be arranged hydraulic column (12) side wall external screw thread and setting sensor lower case (14) inner wall internal screw thread, external screw thread and Internal screw thread intermeshing.
3. the pressure sensor of hydraulic oil formula high stable according to claim 2, which is characterized in that the lower lock block (2) Top connects Pressure Block (1), and lower lock block (2) top middle portion is equipped with hydraulic oil injection channel (8), in hydraulic oil injection channel (8) Seal with screwed joint bolt (6) is equipped with sealing ring (7) between sealing bolt (6) and hydraulic oil injection channel (8).
4. the pressure sensor of hydraulic oil formula high stable according to claim 3, which is characterized in that the hydraulic oil injection Channel (8) bottom is connected to filter chamber (9), and filter chamber (9) bottom is equipped with filter screen (10), hydraulic fluid chamber (4) and filter chamber (9) Connection.
5. the pressure sensor of hydraulic oil formula high stable according to claim 4, which is characterized in that the filter screen (10) For filtering metal net.
6. the pressure sensor of -5 any hydraulic oil formula high stables according to claim 1, which is characterized in that the power is quick Area (19) is arranged between circular pit block (18) and upper holder block (16), and upper holder block (16) is set on hydraulic column (12) and and liquid Gasket (17) are equipped between compression leg (12), sensor is installed in the sensor lower case (14) of circular pit block (18) bottom Pedestal (23).
7. the pressure sensor of hydraulic oil formula high stable according to claim 6, which is characterized in that the circular pit block (18) it is equipped with diaphragm (20) in, silicon resistance sensing element of pressure (21) side is equipped with lug (25), and the quantity of lug (25) is at least 1 It is a and be embedded in the card slot of circular pit block (18).
8. the pressure sensor of hydraulic oil formula high stable according to claim 7, which is characterized in that the lug (25) Quantity is 2 and is symmetrical arranged.
9. the pressure sensor of hydraulic oil formula high stable according to claim 8, which is characterized in that the sensor inner core (22) it is electronic sensor chip, is connect with silicon resistance sensing element of pressure (21);Diaphragm (20) is the silicon diaphragm of twin polishing, Silicon diaphragm offsets with a thickness of 0.3-0.7cm, diaphragm (20) with silicon resistance sensing element of pressure (21).
10. the pressure sensor of hydraulic oil formula high stable according to claim 9, which is characterized in that further include spring (3), spring (3) is mounted in hydraulic fluid chamber (4), spring (3) be mounted on sensor upper housing (5) bottom wall and lower lock block (2) it Between.
CN201910005918.8A 2019-01-04 2019-01-04 A kind of pressure sensor of hydraulic oil formula high stable Pending CN109738107A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504541A (en) * 2020-11-25 2021-03-16 丁竹韵 Piezoelectric pressure sensor
CN113916418A (en) * 2021-11-05 2022-01-11 连云港杰瑞电子有限公司 Force sensitive sensor with flexible structure
CN114568330A (en) * 2022-02-21 2022-06-03 牧原食品股份有限公司 Feeding device and method for calculating amount of feed in feeding device
CN114593864A (en) * 2022-03-09 2022-06-07 中国船舶重工集团公司第七0三研究所 Hydraulic sensor for thermal power plant thermodynamic system
CN113916418B (en) * 2021-11-05 2024-06-28 连云港杰瑞电子有限公司 Flexible structure force sensor

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CN2056246U (en) * 1989-04-14 1990-04-18 重庆市市中区塑料电器厂 Piston-type low micromanometer
CN201716142U (en) * 2010-07-13 2011-01-19 北京六合伟业科技有限公司 Hydraulic sensor applied to low-temperature environment
CN104330197A (en) * 2014-10-16 2015-02-04 宝鸡百事得控制技术有限公司 High pressure resistant overload pressure transmitter
CN105352650A (en) * 2015-11-27 2016-02-24 上海立格仪表有限公司 Piston induction amplifiable type Hart bus measuring instrument
US20160146680A1 (en) * 2014-11-21 2016-05-26 California Institute Of Technology Pressure sensor using piezoelectric bending resonators
CN106461481A (en) * 2014-02-28 2017-02-22 测量专业股份有限公司 Differential pressure sensing die
CN206787756U (en) * 2017-06-12 2017-12-22 四川职业技术学院 A kind of pressure sensor with pressure-limiting function
CN207675354U (en) * 2017-12-20 2018-07-31 深圳瑞德感知科技有限公司 A kind of MEMS oil-filled pressure transducers measured for negative pressure

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2056246U (en) * 1989-04-14 1990-04-18 重庆市市中区塑料电器厂 Piston-type low micromanometer
CN201716142U (en) * 2010-07-13 2011-01-19 北京六合伟业科技有限公司 Hydraulic sensor applied to low-temperature environment
CN106461481A (en) * 2014-02-28 2017-02-22 测量专业股份有限公司 Differential pressure sensing die
CN104330197A (en) * 2014-10-16 2015-02-04 宝鸡百事得控制技术有限公司 High pressure resistant overload pressure transmitter
US20160146680A1 (en) * 2014-11-21 2016-05-26 California Institute Of Technology Pressure sensor using piezoelectric bending resonators
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CN206787756U (en) * 2017-06-12 2017-12-22 四川职业技术学院 A kind of pressure sensor with pressure-limiting function
CN207675354U (en) * 2017-12-20 2018-07-31 深圳瑞德感知科技有限公司 A kind of MEMS oil-filled pressure transducers measured for negative pressure

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504541A (en) * 2020-11-25 2021-03-16 丁竹韵 Piezoelectric pressure sensor
CN112504541B (en) * 2020-11-25 2022-03-22 江苏惟哲新材料有限公司 Piezoelectric pressure sensor
CN113916418A (en) * 2021-11-05 2022-01-11 连云港杰瑞电子有限公司 Force sensitive sensor with flexible structure
CN113916418B (en) * 2021-11-05 2024-06-28 连云港杰瑞电子有限公司 Flexible structure force sensor
CN114568330A (en) * 2022-02-21 2022-06-03 牧原食品股份有限公司 Feeding device and method for calculating amount of feed in feeding device
CN114568330B (en) * 2022-02-21 2023-08-01 牧原食品股份有限公司 Feeding device and method for calculating amount of feed in feeding device
CN114593864A (en) * 2022-03-09 2022-06-07 中国船舶重工集团公司第七0三研究所 Hydraulic sensor for thermal power plant thermodynamic system
CN114593864B (en) * 2022-03-09 2024-05-17 中国船舶重工集团公司第七0三研究所 Hydraulic sensor for thermal power plant thermodynamic system

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Application publication date: 20190510