CN109724539B - Temperature drift zero compensation method for strain angle sensor - Google Patents
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Abstract
The invention belongs to the technical field of dynamic light beam orientation, and discloses a temperature drift zero compensation system of a strain angle sensor, which comprises: the outer ring CCD is used for respectively measuring the light beam angle deviation of the pendulum platform in the x-axis direction and the y-axis direction, the light beam angle deviation is combined with environmental interference and transmitted to the angle controller to form an angle master command, the angle master command is combined with the optimized output of the zero compensator to be transmitted to the inner ring driving controller to give out a pendulum platform control voltage, the pendulum platform is driven to swing through driving the pendulum platform, the strain type sensor feeds back the pendulum platform deflection angle to the zero compensator in real time, the zero compensator obtains optimized output according to the pendulum platform creep interference, the temperature effect of the angle sensor and the thermal output of the angle sensor and transmits the optimized output to the driving controller, and the driving closed-loop control. The invention realizes the online calculation compensation of the swing platform creep interference and the thermal output of the sensor, controls the zero drift of the swing platform creep interference and the thermal output of the sensor in a small range when the swing platform creep interference and the thermal output of the sensor work directionally for a long time in a complex temperature environment, and realizes the optimized output of the output data of the sensor.
Description
Technical Field
The invention belongs to the technical field of dynamic light beam orientation, and relates to a temperature drift zero compensation method of a micro-displacement piezoelectric driving deflection mirror strain type angle sensor, which is used for improving the positioning accuracy of the sensor in a complex temperature environment.
Background
In order to further improve the tracking accuracy of the photoelectric tracking system, dynamic beam orientation technology is widely adopted at home and abroad, and a light beam is always kept in a certain direction or converged and locked near a certain fixed point in space, so that an imaging target is stabilized in a specified range in a view field. In order to improve the control bandwidth, the planar mirror is controlled and driven by a micro-displacement piezoelectric driving controller with higher working frequency, which is also called as a piezoelectric deflection mirror. As shown in fig. 1, in a typical dynamic light beam orientation system, an outer ring CCD measures light beam angle deviations in x and y directions, respectively, an angle master is formed by an angle controller and is led into an inner ring piezoelectric deflection mirror driving controller, the piezoelectric deflection mirror is arranged on a swing table, the driving controller drives the piezoelectric deflection mirror to swing by driving the swing table, a strain angle sensor feeds back a swing angle of the swing table in real time to realize driving closed-loop control, and light beams are converged and locked at a spatial designated position by using the two-axis deflection of the piezoelectric deflection mirror.
The XS-330 two-dimensional piezoelectric deflection table produced by German PI company is taken as a typical micro-displacement piezoelectric actuator, a coplanar axis parallel system is adopted to form two-axis deflection, two pairs of differential drive piezoelectric ceramics realize good stability and linearity, the response speed is in a sub-millisecond level, and the micro-displacement piezoelectric actuator is widely applied to laboratories and industries. However, because of the adoption of the strain angle sensor package, the strain angle sensor is relatively sensitive to temperature change, the temperature effect of the strain angle sensor cannot be ignored, and in addition, the creep phenomenon and the temperature characteristic of the piezoelectric ceramic are influenced, so that when the strain angle sensor works in a complex temperature environment, the sensor has a certain degree of null shift, the positioning precision of the deflection mirror is influenced, even oscillation or divergence is excited, and the application range of the piezoelectric deflection table is limited.
Disclosure of Invention
Objects of the invention
The purpose of the invention is: through a series of temperature characteristic test experiments, a temperature drift zero compensation method for a strain type angle sensor of a micro-displacement piezoelectric deflection table is provided based on test data, and the angle output of the sensor is optimized in real time through the online work of a zero compensator, so that the piezoelectric deflection table can normally work within the ambient temperature change range of-40-60 ℃.
(II) technical scheme
In order to solve the above technical problem, the present invention provides a temperature drift zero compensation system for a strain angle sensor, comprising: the outer ring CCD is used for respectively measuring light beam angle deviations in the x axis direction and the y axis direction of the swing table, the light beam angle deviations are transmitted to the angle controller in combination with environmental interference to form an angle master command, the angle master command is transmitted to the inner ring driving controller in combination with the optimized output of the zero compensator, the driving controller gives out swing table control voltage, the piezoelectric deflection mirror is driven to swing by driving the swing table, the strain type sensor feeds back the swing angle of the swing table to the zero compensator in real time, the zero compensator obtains optimized output according to the creep interference of the swing table, the temperature effect of the angle sensor and the heat output of the angle sensor and transmits the optimized output to the driving controller, and closed-loop control driving is achieved.
The invention also provides a compensation method based on the temperature drift zero compensation system of the strain angle sensor, which comprises the following steps:
step 1: placing the swing table in a high-low temperature test box, controlling a driving power amplifier to open loop to give out constant driving voltage, avoiding creep interference of the swing table, measuring temperature drift characteristic data of the sensor, and calculating numerical values of parameters a and b in a thermal output regression equation off line based on the temperature drift characteristic data of the sensor; calculating a heat output compensation value by using a heat output regression equation, wherein the calculation formula is as follows:
in the formula:
heat output compensation;
a. b: parameters of the heat output regression equation;
t: ambient temperature;
step 2: in the self-checking mode of the dynamic light beam orientation system, the zero compensator calculates initial zero compensation;
and step 3: the dynamic light beam orientation system completes self-checking and changes into a working mode, and the zero position compensator resolves the optimized output of the sensor in real time to perform real-time zero position compensation.
In step 1, the sensor temperature drift characteristic data includes temperature values of the temperature gradients and arithmetic mean values output by the temperature gradient sensors.
In the step 1, a least square method is adopted to fit a heat output regression equation in the environment temperature change range of the pendulum table Tmin-Tmax, and the process is as follows: carrying out multiple temperature cycle tests in the environment temperature range of Tmin-Tmax ℃, selecting multiple temperature gradient values at fixed intervals from the environment temperature range of Tmin-Tmax, measuring the arithmetic average value of the output of the temperature gradient sensor obtained by multiple measurements corresponding to the temperature gradient values, calculating the average value of the environment temperature and the average output of the sensor, and calculating the values of the parameters a and b in the thermal output regression equation according to the average value of the environment temperature and the average output of the sensor.
In the step 1, n temperature gradient values are selected from the environmental temperature range of Tmin-Tmax ℃, and the temperature gradient values comprise:
in the formula:
average output of the sensors;
each temperature gradient sensor outputs an arithmetic mean value;
an ambient temperature average; t isi: temperature values of the temperature gradients; t is1＝Tmin，TnTmax; a: a thermal output regression equation slope parameter; b: heat output regression equation intercept parameters.
In the step 1, the change range of the environment temperature of the platform is 10-60 ℃, and T is taken from multiple temperature cycle test data1＝10℃，T2＝20℃，…，T6The arithmetic mean of the outputs of the corresponding sensors, at 60 ℃, is recorded as
The six gradients are taken as n-6.
In step 2, in the self-checking mode of the dynamic beam directing system, the zero compensator calculates initial zero compensation, and the calculation formula is as follows:
in the formula (I), the compound is shown in the specification,
compensating an initial zero position of an x axis;
initial zero compensation of the y axis; thetax+: measuring the positive deviation of the x-axis angle by the CCD; thetay+: measuring the positive deviation of the y-axis angle by using the CCD; thetax-: measuring negative deviation of the x-axis angle by the CCD; thetay-: the CCD measures the negative deviation of the angle of the y axis.
The optimal output of the zero compensator at this stage is:
in the formula:
optimizing output of the x-axis zero compensator;
optimizing output of the y-axis zero compensator; thetax: the actual output of the x-axis sensor; thetay: the actual output of the y-axis sensor.
Wherein, in the step 3, the dynamic beam orientation system completes self-checking and switching to workIn the working mode, the process of solving the optimized output of the sensor in real time by the zero compensator comprises the following steps: keeping the solution in step 2
And when the ambient temperature is higher than 0 ℃, the temperature variation range exceeds 10 ℃ and the duration time exceeds 10 minutes, starting the sensor thermal output compensation mode, and then optimizing the output of the zero compensator at the stage as follows:
in the formula:
heat output compensation; t: ambient temperature;
optimizing output of the x-axis zero compensator;
optimizing output of the y-axis zero compensator; thetax: the actual output of the x-axis sensor; thetay: the actual output of the y-axis sensor.
(III) advantageous effects
According to the technical scheme, the zero compensator added in the feedback loop of the sensor is used for realizing online calculation compensation of the creep interference of the pendulum platform and the thermal output of the sensor, the zero drift of the pendulum platform during long-time oriented work in a complex temperature environment is controlled in a small range, the output data of the sensor is optimized, and the working performance of the piezoelectric pendulum platform in the environment temperature change range of-40-60 ℃ is guaranteed. The zero compensation designed in the invention is easy to realize in engineering and has wider universality.
Drawings
FIG. 1 is a block diagram of a dynamic beam steering system.
FIG. 2 is a block diagram of a temperature drift zero compensation system of a strain gauge angle sensor.
FIG. 3 shows XS-330 pendulum stage sensor temperature drift characteristics in a low temperature environment.
FIG. 4 shows a regression equation straight line of the XS-330 pendulum stage sensor temperature drift characteristics and the thermal output in a high temperature environment.
FIG. 5 shows the data optimization effect of the zero compensator of the present invention.
Detailed Description
In order to make the objects, contents and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
First, the present invention provides a temperature drift zero compensation system for a strain gauge angle sensor, as shown in fig. 3, the compensation system includes: the outer ring CCD is used for respectively measuring light beam angle deviations in the x axis direction and the y axis direction of the swing table, the light beam angle deviations are transmitted to the angle controller in combination with environmental interference to form an angle master command, the angle master command is transmitted to the inner ring driving controller in combination with the optimized output of the zero compensator, the driving controller gives out swing table control voltage, the piezoelectric deflection mirror is driven to swing by driving the swing table, the strain type sensor feeds back the swing angle of the swing table to the zero compensator in real time, the zero compensator obtains optimized output according to the creep interference of the swing table, the temperature effect of the angle sensor and the heat output of the angle sensor and transmits the optimized output to the driving controller, and closed-loop control driving is achieved.
The main factors causing the zero drift of the strain type angle sensor and the corresponding method of the invention are analyzed as follows:
first, pendulum platform creep interference
When the piezoelectric ceramic micro-displacer is driven at high voltage, the piezoelectric ceramic micro-displacer generates creep phenomenon, namely, under certain voltage, the displacement slowly changes along with time after reaching a certain value, and reaches a stable value in a longer time. This phenomenon is caused by the relaxation of the polarization of the dielectric inside the micro-displacer under the influence of an electric field. The creep value is substantially the same regardless of the direction of the voltage change, i.e., although there is hysteresis in the round trip of the piezoelectric ceramic. The creep increases with an increase in the voltage applied to the piezoelectric ceramic posts, that is, with an increase in the amount of displacement change, but the proportion of increase becomes smaller.
The angular deflection of the swing table is realized by pushing and pulling a pair of piezoelectric ceramic columns, namely, the voltages applied to the two ceramic columns are different, the creep deformation conditions of the two ceramic columns are different, and the superposition effect of the two ceramic columns is related to the position of the swing table. In addition, the sensor also has creep deformation, so that the creep deformation interference caused by the long-term maintenance of a deflection angle of the swing table lacks repeatability and is difficult to predict.
Therefore, the invention deals with the creep interference of the platform as follows:
as shown in fig. 3, the outer ring angle controller is open-loop, the inner ring drive controller is closed-loop, the angle controller simulates an angle master command of ± 60-80% FSR of the pendulum platform in an axial direction, initial zero compensation is solved through corresponding angle deviation fed back by the outer ring CCD, and the calculation formula is as follows:
in the formula (I), the compound is shown in the specification,
initial zero compensation;
θ+: measuring the positive angle deviation by using a CCD (charge coupled device);
θ-: the CCD measures the negative deviation of the angle.
Temperature effect of angle sensor and heat output thereof
For a swing table packaged by a strain type angle sensor, the strain effect is utilized to realize effective measurement of the micro-displacement of the piezoelectric ceramic column, and the high resolution can be achieved in a laboratory environment. However, strain sensors are sensitive to changes in operating temperature, and the temperature effect of the sensor cannot be ignored when the accuracy requirement is high.
And if the working temperature is changed to delta t ℃, the relative change of the resistance of the strain gauge adhered to the piezoelectric ceramic column is caused as follows:
in the formula: r: the original resistance value of the strain gauge;
αt: the resistance temperature coefficient of the sensitive grid material of the strain sensor;
k: strain sensitivity coefficient of strain gauge sensor;
βs: linear expansion coefficient of the piezoelectric ceramic column;
βt: linear expansion coefficient of strain sensor sensitive grid material.
This temperature effect will induce a sensor thermal output, which is a main cause of the strain-gauge sensor null shift in complex temperature environments. The temperature effect heat output consists of two parts: a part is caused by thermal resistance effect; the other part is caused by the thermal expansion mismatch between the sensitive grid and the piezoelectric ceramic column. The expression is as follows:
this thermal output disturbance needs to be compensated for when the operating temperature varies greatly.
Temperature characteristic test tests show that under the open-loop constant driving voltage, the creep interference of the swing table is avoided, and the temperature effect heat output has an obvious change rule. As shown in fig. 3 and 4, the heat output tends to be stable in the low temperature section, and is linear with the temperature in the medium and high temperature sections, and the repeatability is predictable. Therefore, the invention adopts a least square method to fit the heat output regression equation in the environment temperature change range of 10-60 ℃.
In the multiple temperature cycle test data, T is taken1＝10℃，T2＝20℃，…，T 660 ℃, corresponding to the arithmetic mean of the sensor outputs, and is reported as
The six gradients, n being 6, have:
in the formula:
average output of the sensors;
In the formula:
an ambient temperature average;
Ti: temperature values of the respective temperature gradients.
The parameters a and b of the regression equation of the thermal output are calculated according to the formula:
calculating a heat output compensation value by using a heat output regression equation, wherein the calculation formula is as follows:
in the formula:
heat output compensation;
a: a thermal output regression equation slope parameter;
b: thermal output regression equation intercept parameters;
t: the ambient temperature.
A heat output regression equation line based on the wobble plate temperature characteristic test data was then fitted, as shown in fig. 4.
In addition, because the piezoelectric ceramic column and the strain sensor arranged on the piezoelectric ceramic column are hermetically packaged and arranged in a metal shell, the temperature change of the piezoelectric ceramic column and the external environment have a time lag of 8-10 minutes after test. Thus, in the present invention: and when the temperature change is over 10 ℃ and the duration is over 10 minutes, starting a sensor thermal output compensation mode.
Finally, the zero compensator added in the feedback loop of the sensor realizes the online calculation and compensation of the pendulum platform creep interference and the thermal output of the sensor, controls the zero drift of the pendulum platform creep interference and the thermal output of the sensor in a small range when the pendulum platform creep interference and the thermal output of the sensor work directionally for a long time in a complex temperature environment, and further realizes the optimization of the output data of the sensor. The optimization algorithm formula of the zero compensator is as follows:
in the formula:
optimizing output of the zero compensator;
θ: the actual output of the sensor.
The data optimization effect of the zero compensator is shown in fig. 5, and compared with the original output data of the table setting sensor, the zero drift of the sensor is effectively controlled after the zero compensator is introduced.
The working process of the zero compensator can be called by an interrupt service function of a timer of a drive controller DSP chip so as to realize online iterative solution under the idea.
The working state of the dynamic beam orientation system comprises a system self-checking mode and a working mode. Firstly, the system is electrified to enter a self-checking mode, the laser outputs low-energy laser, and zero compensation is carried out at the stageCompensation of zero position by compensator
The initial zero calibration of two paths of strain type sensors of the tilting mirror swing table is realized; then, the self-checking completion system enters a working mode, the laser outputs high-energy laser, and the zero compensator keeps the last calculation
And working environment temperature real-time resolving heat output compensation fed back by temperature sensor
And optimized sensor output
According to the actual situation, after working for a period of time, the self-checking mode can be started again to carry out initial zero calibration.
Taking XS-330 as an example, the temperature drift zero compensation method of the strain type angle sensor comprises the following steps:
step 1: and (3) placing the swing table in a high-low temperature test box, controlling a driving power amplifier to open loop to give out constant driving voltage, eliminating creep interference of the swing table, and measuring temperature drift characteristic data of the sensor, as shown in fig. 3 and 4. On the basis of the temperature drift characteristic data of the sensor, calculating the numerical values of parameters a and b in the heat output regression equation in an off-line manner, and for XS-330 stage setting: a equals-0.65, b equals 3.5.
The sensor temperature drift characteristic data comprises an environment temperature average value, temperature values of all temperature gradients, sensor average output and an arithmetic average value of output of all temperature gradient sensors.
Step 2: and in the self-checking mode of the dynamic light beam orientation system, the zero compensator calculates initial zero compensation.
The laser outputs low-energy laser, an outer ring angle controller is opened, an inner ring drive controller is closed, the angle controller simulates an angle master command of +/-0.8 mrad in the x and y axis directions, initial zero compensation is solved through corresponding angle deviation fed back by an outer ring CCD, and the calculation formula is as follows:
in the formula (I), the compound is shown in the specification,
compensating an initial zero position of an x axis;
initial zero compensation of the y axis; thetax+: measuring the positive deviation of the x-axis angle by the CCD; thetay+: measuring the positive deviation of the y-axis angle by using the CCD; thetax-: measuring negative deviation of the x-axis angle by the CCD; thetay-: the CCD measures the negative deviation of the angle of the y axis.
The optimal output of the zero compensator at this stage is:
in the formula:
optimizing output of the x-axis zero compensator;
optimizing output of the y-axis zero compensator; thetax: the actual output of the x-axis sensor; thetay: the actual output of the y-axis sensor.
And step 3: the dynamic light beam orientation system completes self-checking and changes into a working mode, and the zero compensator calculates the optimized output of the sensor in real time.
The laser outputs high-energy laser, the angle controller and the driving controller are closed-loop, and the temperature sensor feeds back the working environment temperature to the driving controller in real time. Keeping the last step of resolving
And starting the sensor thermal output compensation mode when the ambient temperature is higher than 0 ℃, the temperature variation range exceeds 10 ℃ and the duration time exceeds 10 minutes. Withdrawing the thermal output compensation value from the calculation result of step 1
The calculation formula of (a) is as follows:
the optimal output of the zero compensator at this stage is:
in the formula:
heat output compensation; t: ambient temperature;
optimizing output of the x-axis zero compensator;
optimizing output of the y-axis zero compensator; thetax: the actual output of the x-axis sensor; thetay: the actual output of the y-axis sensor.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (2)
1. A temperature drift zero compensation method for a strain angle sensor is characterized by comprising the following steps:
step 1: placing the swing table in a high-low temperature test box, controlling a driving power amplifier to open loop to give out constant driving voltage, avoiding creep interference of the swing table, measuring temperature drift characteristic data of the sensor, and calculating numerical values of parameters a and b in a thermal output regression equation off line based on the temperature drift characteristic data of the sensor; calculating a heat output compensation value by using a heat output regression equation, wherein the calculation formula is as follows:
in the formula:
heat output compensation;
a. b: parameters of the heat output regression equation;
t: ambient temperature;
step 2: in the self-checking mode of the dynamic light beam orientation system, the zero compensator calculates initial zero compensation;
and step 3: the dynamic light beam orientation system completes self-checking and shifts to a working mode, and the zero position compensator solves the optimized output of the sensor in real time to perform real-time zero position compensation;
in the step 1, the temperature drift characteristic data of the sensor comprises temperature values of all temperature gradients and an arithmetic average value output by all temperature gradient sensors;
in the step 1, a least square method is adopted to fit a heat output regression equation in the environment temperature change range of the pendulum table Tmin-Tmax, and the process is as follows: carrying out multiple temperature cycle tests in an environment temperature range of Tmin-Tmax ℃, selecting multiple temperature gradient values at fixed intervals from the environment temperature range of Tmin-Tmax, measuring the arithmetic average value of the output of the temperature gradient sensor obtained by multiple measurements corresponding to the temperature gradient values, calculating the average value of the environment temperature and the average output of the sensor, and calculating the values of parameters a and b in a thermal output regression equation according to the average value of the environment temperature and the average output of the sensor;
in the step 1, n temperature gradient values are selected from the environmental temperature range of Tmin-Tmax, and the temperature gradient values comprise:
in the formula:
average output of the sensors;
each temperature gradient sensor outputs an arithmetic mean value;
an ambient temperature average; t isi: temperature values of the temperature gradients; t is1＝Tmin，TnTmax; a: a thermal output regression equation slope parameter; b: thermal output regression equation intercept parameters;
in the step 1, the variation range of the environment temperature of the platform is 10-60 ℃, and T is taken from multiple temperature cycle test data1＝10℃，T2＝20℃，…，T6The arithmetic mean of the outputs of the corresponding sensors, at 60 ℃, is recorded as
Taking n as 6 in six gradients;
in the step 2, in the self-checking mode of the dynamic beam orientation system, the zero compensator calculates initial zero compensation, and the calculation formula is as follows:
in the formula (I), the compound is shown in the specification,
compensating an initial zero position of an x axis;
initial zero compensation of the y axis; thetax+: measuring the positive deviation of the x-axis angle by the CCD; thetay+: measuring the positive deviation of the y-axis angle by using the CCD; thetax-: measuring negative deviation of the x-axis angle by the CCD; thetay-: measuring a negative deviation of the y-axis angle by the CCD;
the optimal output of the zero compensator at this stage is:
in the formula:
optimizing output of the x-axis zero compensator;
optimizing output of the y-axis zero compensator; thetax: the actual output of the x-axis sensor; thetay: the actual output of the y-axis sensor.
2. The temperature drift zero compensation method of the strain angle sensor according to claim 1, wherein in the step 3, the dynamic beam steering system completes self-checking transition to a working mode, and the process of the zero compensator for real-time resolving the optimized output of the sensor comprises: keeping the solution in step 2
And when the ambient temperature is higher than 0 ℃, the temperature variation range exceeds 10 ℃ and the duration time exceeds 10 minutes, starting the sensor thermal output compensation mode, and then optimizing the output of the zero compensator at the stage as follows:
in the formula:
heat output compensation; t: ambient temperature;
optimizing output of the x-axis zero compensator;
optimizing output of the y-axis zero compensator; thetax: the actual output of the x-axis sensor; thetay: the actual output of the y-axis sensor.
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