CN109721356A - The preparation method of thermal barrier coating large scale zirconia ceramics target - Google Patents
The preparation method of thermal barrier coating large scale zirconia ceramics target Download PDFInfo
- Publication number
- CN109721356A CN109721356A CN201711018522.4A CN201711018522A CN109721356A CN 109721356 A CN109721356 A CN 109721356A CN 201711018522 A CN201711018522 A CN 201711018522A CN 109721356 A CN109721356 A CN 109721356A
- Authority
- CN
- China
- Prior art keywords
- powder
- green body
- zirconium oxide
- large scale
- thermal barrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
The present invention relates to the thermal barrier coating preparation methods of large scale zirconia ceramics target, the following steps are included: preparing 6-8mol yttrium oxide partially stabilized zirconia powder using vacuum electrode arc furnace melting, purity is higher than 99.9%, obtains 100nm powder below using air current classifying.After mist projection granulating, isostatic pressing is carried out using special large scale rubber package set, obtains large scale zirconium oxide target material blank body.After finishing, 800-1500 DEG C of firing zirconia ceramics target of high temperature can be used for the equipment such as electro beam physics vapour deposition, magnetron sputtering and prepare thermal barrier coating green body.The present invention is using capacitor, the method for classification, prepare yttrium oxide partially stabilized zirconia powder, further such that product purity it is high, crystal grain distribution uniformity, temperature is low when sintering, it is small, not easy to crack to shrink, post-production surplus is few, meets the requirement of the equipment such as physical vapour deposition (PVD) or magnetron sputtering, and gained coating composition and performance are stablized.
Description
Technical field
The present invention relates to a kind of thermal barrier coating preparation methods of large scale zirconia ceramics target, can be used for electron-beam
The equipment such as physical vapor deposition, magnetron sputtering prepare thermal barrier coating, belong to product protective coating applied technical field.
Background technique
The Service Environment of aero gas turbine engine is harsh, and blade will drive turbine high speed rotation at work, bears
The airflow scouring of high temperature and high speed.Along with each airborne period of aircraft, part temperatures can rise to work temperature from room temperature rapidly
Degree then cools to room temperature from operating temperature again.In addition, fuel burning can generate a variety of corrosion products.At this stage, mature
Means of defence is to coat on the high-temperature alloy part of gas-turbine unit or deposit one layer of thermal barrier coating, to block High Temperature Gas
The direct contact of body and matrix alloy forms a biggish temperature gradient, to reduce high temperature alloy matrix on the surface of the material
The temperature that surface is born.It is therefore desirable to thermal barrier coating not only has excellent high-temperature mechanics intensity, toughness, creep-resistant property, and
And have excellent high temperature oxidation resisting, thermal fatigue property and corrosion resistance.
The zirconium oxide of stabilized with yttrium oxide has low thermal conductivity, high thermal expansion coefficient, lower elasticity modulus, good
Compatibility.It ensure that effectively heat-insulated, to be just not easy in the hot and cold cyclic process huge thermal stress of meeting generation, coating caused to open
It splits or peels off, cause to fail, to extend the service life of coating.Simultaneously overcome simple zirconium oxide phase structure it is unstable lack
Point has good structural stability.Currently, the zirconium oxide of stabilized with yttrium oxide is widely used aero gas turbine engine
The preparation of thermal barrier coating.
It is many to prepare yttria-stabilized zirconia thermal barrier coating process, there is magnetron sputtering, chemical vapor deposition, explosion
Spraying, plasma spraying, electro beam physics vapour deposition etc..But from the point of view of the development of thermal barrier coating and application, the system of coating
Standby technology is based on plasma spraying and electro beam physics vapour deposition.Electro beam physics vapour deposition prepares the mistake of thermal barrier coating
Journey is as follows: under vacuum conditions, accelerating and pass through the high-power electron beam bombardment of electric field or magnetic field focusing, zirconium oxide through high-tension current
Ceramic target melts it and effectively evaporates, and steam moves to workpiece surface deposition and obtains thermal barrier coating.The former material of prepares coating
Material is zirconia ceramics target, and the quality of zirconia ceramics target directly determines the performance of thermal barrier coating, zirconia ceramics
The size of target determines the efficiency used, has larger impact to cost.
At this stage, the use of zirconium oxide target is to guarantee purity, mostly synthesizes zirconium oxide using chemical method, it is not only with high costs,
And since sintering temperature and time must be controlled when calcining, make crystal grain that can not give sufficient growth, it is even more impossible to guarantee to aoxidize
Easily there is more pure zirconia powder in the full and uniform fusion of yttrium and zirconium oxide.It is easy in target sintering because crystal grain is raw
Long or zirconium oxide volume change causes cracking damage, increases the product cost of target obviously.In addition, due to mold and work
The limitation of skill, existing zirconia ceramics target size is only 100-200mm long, is needed frequently more when preparing thermal barrier coating
Target is changed, production efficiency is reduced, adds somewhat to production cost.Therefore it is badly in need of developing high performance thermal barrier coating use
The preparation method of large scale zirconia ceramics target adapts to demand of China's high-performance aeroengine to thermal barrier coating development,
Meet the needs of engineering application, promotes Chinese target market and be growing.
Summary of the invention
Status in view of the above technology, the purpose of the present invention are small using vacuum electrode arc furnace melting preparation purity is high, granularity
Yttrium oxide partially stabilized zirconia powder, carry out isostatic pressing using special large scale rubber package set, be sintered after processing
Thermal barrier coating large scale zirconia ceramics target is obtained, is wanted with meeting the equipment such as electro beam physics vapour deposition, magnetron sputtering
It asks, prepares the thermal barrier coating haveing excellent performance.
The method that the present invention prepares thermal barrier coating large scale zirconia ceramics target, including the yttrium partially stabilized oxidation of oxidation
The preparation of zirconium powder body, mist projection granulating, zirconia green body molding, green body processing and the sintering of zirconium oxide target.This method includes following step
It is rapid:
1, the preparation of yttrium oxide partially stabilized zirconia powder
(1) according to the requirement of thermal barrier coating, 6-8mol yttrium oxide and aluminium-zirconium oxide powder is subjected to ball milling mixing, use oxygen
Change zirconium abrading-ball, slurry removal is dehydrated by pellet weight share 1:2 after expecting water weight share 4:3,2-8h；
(2) drying 18-24h is carried out to above-mentioned dewatered mixed powder using 90 DEG C of baking oven, obtains uniform, dry mix
Close powder；
(3) electric smelting, vacuum degree 1.0e0, electric current 2000- are carried out to mixed powder using the melting of vacuum electrode arc furnace
3000A, voltage 30-50V；
(4) it is used for multiple times airslide disintegrating mill and gas flow sizing machine, capacitor powder after atmospheric pressure 0.7-1Mpa is crushed,
2000-2500r/min is classified to obtain 100nm yttrium oxide partially stabilized zirconia powder below.
2, mist projection granulating
(1) yttrium oxide partially stabilized zirconia powder powder by weight percentage is mixed with 0.5-2% binder, is made
With zirconium oxide balls, pellet weight share 1:2, preparation obtains uniformly mixed slurry after expecting water weight share 4:3,2h,
Above-mentioned binder selects gum arabic；
(2) mist projection granulating is carried out using press spray pelletizer, spray drying temperature is 150-190 DEG C, pressure 0.05-
0.1Mpa obtains the zirconium oxide pelletizing of epigranular and good fluidity.
3, zirconia green body forms
Zirconium oxide pelletizing is added in special large scale rubber package set, makes powder ram-jolt using shaking platform, used
Cold isostatic press forms target material blank body, according to different powder proportions and length needs, briquetting pressure 100-200MPa, when molding
Between 2-10min, by molding green body in room temperature condition bottom knockout.
4, green body is processed
Green body after demoulding is clamped using special rubber mold, carries out turnery processing using diamond bit,
It is cooling using air when processing, obtain diameter Ф 60-80mm, the green body of length H200-350mm；
5, zirconium oxide target is sintered
Green body is put into high temperature Muffle furnace, 800-1500 DEG C of heat preservation 2-8h is warming up to 2-5 DEG C/min, it is then cold with furnace
But, diameter Ф 50-75mm, the thermal barrier coating large scale zirconia ceramics target of length H150-300mm are obtained.
The diameter of above-mentioned special large scale rubber bag is greater than 90mm, is highly greater than 350mm.
The thermal barrier coating large scale zirconia ceramics target prepared using the method provided by the present invention has purity is high, height
It spends up to 300mm, density in 3.5-6.0g/cm3It is adjustable in range, meet making for the equipment such as physical vapour deposition (PVD) or magnetron sputtering
With requiring, gained thermal barrier coating ingredient and performance are stablized.
In conclusion the invention has the following advantages that
(1) it is higher than using vacuum electrode arc furnace melting preparation 6-8mol yttrium oxide partially stabilized zirconia powder purity
99.9%, it is high-efficient, it is at low cost；
(2) sintering temperature of target can be reduced using electro-melting yttrium oxide partially stabilized zirconia, target crystalline grains distribution is equal
Even consistent, contraction is not small, easy to crack, and post-production surplus is few；
(3) isostatic pressing is carried out using large scale rubber package set, obtains the oxidation of the good quality of height 300-400mm
Zirconium target material blank body, can mass production；
(4) present invention can prepare diameter Ф 50-75mm, the thermal barrier coating large scale zirconium oxide of length H150-300mm
Ceramic target, density can be according to customer requirements in 3.5-6.0g/cm3It is adjustable in range.
Specific embodiment
Embodiment 1
The preparation method of thermal barrier coating large scale zirconia ceramics target, this method are realized by following specific steps
:
1, the preparation of yttrium oxide partially stabilized zirconia powder
(1) 8mol yttrium oxide and aluminium-zirconium oxide powder are subjected to ball milling mixing, use zirconium oxide balls, material ball ratio 1:2, material
Slurry is removed after water ratio 4:3,8h and is dehydrated；
(2) mixed powder is dried using 90 DEG C of baking oven and obtains uniform, dry mixed powder for 24 hours；
(3) electric smelting, vacuum degree 1.0e0, electric current 3000A, electricity are carried out to mixed powder using the melting of vacuum electrode arc furnace
Press 50V；
(4) airslide disintegrating mill and gas flow sizing machine, capacitor powder after atmospheric pressure 0.9Mpa is crushed, 2400r/ is used for multiple times
Min is classified to obtain the yttrium oxide partially stabilized zirconia powder of granularity 50nm or so.
2, mist projection granulating
(1) yttrium oxide partially stabilized zirconia powder powder is mixed with 0.8% binder, using zirconium oxide balls,
It is prepared after material ball ratio 1:2, material-water ratio 4:3,2h and obtains uniformly mixed slurry；
(2) mist projection granulating is carried out using press spray pelletizer, spray drying temperature is 180-190 DEG C, pressure
0.5Mpa；Obtain epigranular, the zirconium oxide pelletizing of good fluidity.
3, zirconia green body forms
Zirconium oxide pelletizing is added in special large scale rubber package set, makes powder ram-jolt 5min using shaking platform,
Target material blank body is formed using cold isostatic press, according to different powder proportions and length needs, briquetting pressure 190MPa, when molding
Between 10min, by molding green body in room temperature condition bottom knockout.
4, green body is processed,
Green body after demoulding is clamped using special rubber mold, carries out turnery processing using diamond bit,
It is cooling using air when processing, obtain the green body of length H350mm or so.
5, zirconium oxide target is sintered
Green body is put into high temperature Muffle furnace, 1300 DEG C of heat preservation 4h are warming up to 2 DEG C/min, then furnace cooling obtains
The thermal barrier coating large scale zirconia ceramics target of diameter Ф 70mm, length H300mm.
Embodiment 2
The preparation method of thermal barrier coating large scale zirconia ceramics target, this method are realized by following specific steps
:
1, the preparation of yttrium oxide partially stabilized zirconia powder
(1) according to the requirement of thermal barrier coating, 6mol yttrium oxide and aluminium-zirconium oxide powder is subjected to ball milling mixing, use oxidation
Slurry is removed after material-water ratio 4:3,2h and is dehydrated by zirconium abrading-ball, material ball ratio 1:2；
(2) drying 18h is carried out to mixed powder using 90 DEG C of baking oven, obtains uniform, dry mixed powder；
(3) electric smelting, vacuum degree 1.0e0, electric current 2100A, electricity are carried out to mixed powder using the melting of vacuum electrode arc furnace
Press 35V；
(4) airslide disintegrating mill and gas flow sizing machine, capacitor powder after atmospheric pressure 0.7Mpa is crushed, 2100r/ is used for multiple times
Min is classified to obtain 100nm yttrium oxide partially stabilized zirconia powder below.
2, mist projection granulating
(1) yttrium oxide partially stabilized zirconia powder powder is mixed with 2% binder, uses zirconium oxide balls, material
It is prepared after ball ratio 1:2, material-water ratio 4:3,2h and obtains uniformly mixed slurry；
(2) mist projection granulating is carried out using pressure examination sponging granulator, spray drying temperature is 150-160 DEG C, pressure
0.08Mpa；Obtain epigranular, the zirconium oxide pelletizing of good fluidity.
3, zirconia green body forms
Zirconium oxide pelletizing is added in special large scale rubber package set, makes powder ram-jolt using shaking platform, used
Cold isostatic press forms target material blank body, according to different powder proportions and length needs, briquetting pressure 100MPa, molding time
3min。
4, green body is processed
Green body after demoulding is clamped using special rubber mold, carries out turnery processing using diamond bit,
It is cooling using air when processing, obtain the green body of length H250mm or so.
5, zirconium oxide target is sintered
Green body is put into high temperature Muffle furnace, 900 DEG C of heat preservation 8h are warming up to 5 DEG C/min, then furnace cooling obtains straight
The thermal barrier coating large scale zirconia ceramics target of diameter Ф 65mm, length H200mm.
Embodiment 3
The preparation method of thermal barrier coating large scale zirconia ceramics target, this method are realized by following specific steps
:
1, the preparation of yttrium oxide partially stabilized zirconia powder
(1) according to the requirement of thermal barrier coating, 7mol yttrium oxide and aluminium-zirconium oxide powder is subjected to ball milling mixing, use oxidation
Slurry is removed after material-water ratio 4:3,5h and is dehydrated by zirconium abrading-ball, material ball ratio 1:2；
(2) drying 20h is carried out to mixed powder using 90 DEG C of baking oven, obtains uniform, dry mixed powder；
(3) electric smelting, vacuum degree 1.0e0, electric current 2500A, electricity are carried out to mixed powder using the melting of vacuum electrode arc furnace
Press 40V；
(4) airslide disintegrating mill and gas flow sizing machine, capacitor powder after atmospheric pressure 0.8Mpa is crushed, 2300r/ is used for multiple times
Min is classified to obtain 100nm yttrium oxide partially stabilized zirconia powder below.
2, mist projection granulating
(1) yttrium oxide partially stabilized zirconia powder powder is mixed with 1% binder, uses zirconium oxide balls, material
It is prepared after ball ratio 1:2, material-water ratio 4:3,2h and obtains uniformly mixed slurry；
(2) mist projection granulating is carried out using pressure examination sponging granulator, spray drying temperature is 160-170 DEG C, pressure
0.005Mpa；Obtain epigranular, the zirconium oxide pelletizing of good fluidity.
3, zirconia green body forms
Zirconium oxide pelletizing is added in special large scale rubber package set, makes powder ram-jolt using shaking platform, used
Cold isostatic press forms target material blank body, according to different powder proportions and length needs, briquetting pressure 150MPa, molding time
5min, by molding green body in room temperature condition bottom knockout.
4, green body is processed,
Green body after demoulding is clamped using special rubber mold, carries out turnery processing using diamond bit,
It is cooling using air when processing, obtain the green body of length H300mm or so.
5, zirconium oxide target is sintered
Green body is put into high temperature Muffle furnace, 1500 DEG C of heat preservation 2h are warming up to 3 DEG C/min, then furnace cooling obtains
The thermal barrier coating large scale zirconia ceramics target of diameter Ф 55mm, length H250mm.
Binder described in embodiment 1-3 uses gum arabic；The diameter of the special large scale rubber bag is greater than
90mm is highly greater than 350mm.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modification within mind and principle, equivalent replacement and improvement etc., should all be included in the protection scope of the present invention.
Claims (5)
1. a kind of thermal barrier coating preparation method of large scale zirconia ceramics target, this method is through the following steps that realize
:
Step 1: the preparation of yttrium oxide partially stabilized zirconia powder
(1) according to the requirement of thermal barrier coating, 6-8mol yttrium oxide and aluminium-zirconium oxide powder is subjected to ball milling mixing, use zirconium oxide
Slurry removal is dehydrated by abrading-ball, pellet weight share 1:2 after expecting water weight share 4:3,2-8h；
(2) drying 18-24h is carried out to above-mentioned dewatered mixed powder using 90 DEG C of baking oven, obtains uniform, dry mixed powder
Body；
(3) electric smelting, vacuum degree 1.0e0, electric current 2000-3000A, electricity are carried out to mixed powder using the melting of vacuum electrode arc furnace
Press 30-50V；
(4) airslide disintegrating mill and gas flow sizing machine, capacitor powder after atmospheric pressure 0.7-1Mpa is crushed, 2000- is used for multiple times
2500r/min is classified to obtain 100nm yttrium oxide partially stabilized zirconia powder below；
Step 2: mist projection granulating
(1) yttrium oxide partially stabilized zirconia powder powder by weight percentage is mixed with 0.5-2% binder, uses oxygen
Change zirconium abrading-ball, pellet weight share 1:2, preparation obtains uniformly mixed slurry after expecting water weight share 4:3,2h；
(2) mist projection granulating is carried out using press spray pelletizer, spray drying temperature is 150-190 DEG C, pressure 0.05-
0.1Mpa obtains the zirconium oxide pelletizing of epigranular and good fluidity；
Step 3: zirconia green body molding
Zirconium oxide pelletizing is added in special large scale rubber package set, makes powder ram-jolt using shaking platform, using cold etc.
Static pressure machine forms target material blank body, according to different powder proportions and length needs, briquetting pressure 100-200MPa, molding time 2-
10min, by molding green body in room temperature condition bottom knockout；
Step 4: green body processing
Green body after demoulding is clamped using special rubber mold, carries out turnery processing, processing using diamond bit
When it is cooling using air, obtain diameter Ф 60-80mm, the green body of length H200-350mm；
Step 5: zirconium oxide target sintering
Green body is put into high temperature Muffle furnace, 800-1500 DEG C of heat preservation 2-8h is warming up to 2-5 DEG C/min, then furnace cooling,
Obtain diameter Ф 50-75mm, the thermal barrier coating large scale zirconia ceramics target of length H150-300mm.
2. the thermal barrier coating as described in claim 1 preparation method of large scale zirconia ceramics target, this method are to pass through
Step and technical conditions are realized in detail below:
Step 1: the preparation of yttrium oxide partially stabilized zirconia powder
(1) 8mol yttrium oxide and aluminium-zirconium oxide powder are subjected to ball milling mixing, use zirconium oxide balls, material ball ratio 1:2, material-water ratio
Slurry is removed after 4:3,8h and is dehydrated；
(2) mixed powder is dried using 90 DEG C of baking oven and obtains uniform, dry mixed powder for 24 hours；
(3) electric smelting, vacuum degree 1.0e0, electric current 3000A, voltage are carried out to mixed powder using the melting of vacuum electrode arc furnace
50V；
(4) airslide disintegrating mill and gas flow sizing machine, capacitor powder after atmospheric pressure 0.9Mpa is crushed, 2400r/min is used for multiple times
Classification obtains the yttrium oxide partially stabilized zirconia powder of granularity 50nm or so；
Step 2: mist projection granulating
(1) yttrium oxide partially stabilized zirconia powder powder is mixed with 0.8% binder, uses zirconium oxide balls, pellet
Than 1:2, is prepared after material-water ratio 4:3,2h and obtain uniformly mixed slurry；
(2) mist projection granulating is carried out using press spray pelletizer, spray drying temperature is 180-190 DEG C, pressure 0.5Mpa；?
To epigranular, the zirconium oxide pelletizing of good fluidity；
Step 3: zirconia green body molding
Zirconium oxide pelletizing is added in special large scale rubber package set, makes powder ram-jolt 5min using shaking platform, used
Cold isostatic press forms target material blank body, according to different powder proportions and length needs, briquetting pressure 190MPa, molding time
10min, by molding green body in room temperature condition bottom knockout；
Step 4: green body processing
Green body after demoulding is clamped using special rubber mold, carries out turnery processing, processing using diamond bit
When it is cooling using air, obtain the green body of length H350mm or so；
Step 5: zirconium oxide target sintering
Green body is put into high temperature Muffle furnace, 1300 DEG C of heat preservation 4h are warming up to 2 DEG C/min, then furnace cooling obtains diameter
The thermal barrier coating of Ф 70mm, length H300mm large scale zirconia ceramics target.
3. the thermal barrier coating as described in claim 1 preparation method of large scale zirconia ceramics target, this method are to pass through
Step and technical conditions are realized in detail below:
Step 1: the preparation of yttrium oxide partially stabilized zirconia powder
(1) according to the requirement of thermal barrier coating, 6mol yttrium oxide and aluminium-zirconium oxide powder is subjected to ball milling mixing, ground using zirconium oxide
Slurry is removed after material-water ratio 4:3,2h and is dehydrated by ball, material ball ratio 1:2；
(2) drying 18h is carried out to mixed powder using 90 DEG C of baking oven, obtains uniform, dry mixed powder；
(3) electric smelting, vacuum degree 1.0e0, electric current 2100A, voltage are carried out to mixed powder using the melting of vacuum electrode arc furnace
35V；
(4) airslide disintegrating mill and gas flow sizing machine, capacitor powder after atmospheric pressure 0.7Mpa is crushed, 2100r/min is used for multiple times
Classification obtains 100nm yttrium oxide partially stabilized zirconia powder below；
Step 2: mist projection granulating
(1) yttrium oxide partially stabilized zirconia powder powder is mixed with 2% binder, uses zirconium oxide balls, material ball ratio
It is prepared after 1:2, material-water ratio 4:3,2h and obtains uniformly mixed slurry；
(2) mist projection granulating is carried out using pressure examination sponging granulator, spray drying temperature is 150-160 DEG C, pressure 0.08Mpa；
Obtain epigranular, the zirconium oxide pelletizing of good fluidity；
Step 3: zirconia green body molding
Zirconium oxide pelletizing is added in special large scale rubber package set, makes powder ram-jolt using shaking platform, using cold etc.
Static pressure machine forms target material blank body, according to different powder proportions and length needs, briquetting pressure 100MPa, molding time 3min；
Step 4: green body processing,
Green body after demoulding is clamped using special rubber mold, carries out turnery processing, processing using diamond bit
When it is cooling using air, obtain the green body of length H250mm or so；
Step 4: zirconium oxide target sintering
Green body is put into high temperature Muffle furnace, 900 DEG C of heat preservation 8h are warming up to 5 DEG C/min, then furnace cooling obtains diameter Ф
The thermal barrier coating of 65mm, length H200mm large scale zirconia ceramics target.
4. the thermal barrier coating as described in claim 1 preparation method of large scale zirconia ceramics target, this method are to pass through
Step and technical conditions are realized in detail below:
Step 1: the preparation of yttrium oxide partially stabilized zirconia powder
(1) according to the requirement of thermal barrier coating, 7mol yttrium oxide and aluminium-zirconium oxide powder is subjected to ball milling mixing, ground using zirconium oxide
Slurry is removed after material-water ratio 4:3,5h and is dehydrated by ball, material ball ratio 1:2；
(2) drying 20h is carried out to mixed powder using 90 DEG C of baking oven, obtains uniform, dry mixed powder；
(3) electric smelting, vacuum degree 1.0e0, electric current 2500A, voltage are carried out to mixed powder using the melting of vacuum electrode arc furnace
40V；
(4) airslide disintegrating mill and gas flow sizing machine, capacitor powder after atmospheric pressure 0.8Mpa is crushed, 2300r/min is used for multiple times
Classification obtains 100nm yttrium oxide partially stabilized zirconia powder below；
Step 2: mist projection granulating
(1) yttrium oxide partially stabilized zirconia powder powder is mixed with 1% binder, uses zirconium oxide balls, material ball ratio
It is prepared after 1:2, material-water ratio 4:3,2h and obtains uniformly mixed slurry；
(2) mist projection granulating is carried out using pressure examination sponging granulator, spray drying temperature is 160-170 DEG C, pressure 0.005Mpa；
Obtain epigranular, the zirconium oxide pelletizing of good fluidity；
Step 3: zirconia green body molding
Zirconium oxide pelletizing is added in special large scale rubber package set, makes powder ram-jolt using shaking platform, using cold etc.
Static pressure machine forms target material blank body, according to different powder proportions and length needs, briquetting pressure 150MPa, molding time 5min,
By molding green body in room temperature condition bottom knockout；
Step 4: green body processing
Green body after demoulding is clamped using special rubber mold, carries out turnery processing, processing using diamond bit
When it is cooling using air, obtain the green body of length H300mm or so；
Step 5: zirconium oxide target sintering
Green body is put into high temperature Muffle furnace, 1500 DEG C of heat preservation 2h are warming up to 3 DEG C/min, then furnace cooling obtains diameter
The thermal barrier coating of Ф 55mm, length H250mm large scale zirconia ceramics target.
5. the thermal barrier coating as claimed in claim 1 or 2 or 3 or 4 preparation method of large scale zirconia ceramics target, the party
Binder described in method uses gum arabic；The diameter of the special large scale rubber bag is greater than 90mm, is highly greater than
350mm。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711018522.4A CN109721356A (en) | 2017-10-27 | 2017-10-27 | The preparation method of thermal barrier coating large scale zirconia ceramics target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711018522.4A CN109721356A (en) | 2017-10-27 | 2017-10-27 | The preparation method of thermal barrier coating large scale zirconia ceramics target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109721356A true CN109721356A (en) | 2019-05-07 |
Family
ID=66290661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711018522.4A Pending CN109721356A (en) | 2017-10-27 | 2017-10-27 | The preparation method of thermal barrier coating large scale zirconia ceramics target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109721356A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111996492A (en) * | 2020-08-28 | 2020-11-27 | 昆明理工大学 | Preparation method of zirconium oxide doped gadolinium niobate amorphous high-temperature ceramic coating |
| CN113502456A (en) * | 2021-07-22 | 2021-10-15 | 法柯特科技（江苏）有限公司 | Preparation process of silicon-boron-carbon sputtering target material |
| CN113698202A (en) * | 2021-08-30 | 2021-11-26 | 中科南京绿色制造产业创新研究院 | Water gap and preparation method and application thereof |
| CN114195513A (en) * | 2021-12-30 | 2022-03-18 | 辽宁省轻工科学研究院有限公司 | Preparation method of high-density, high-purity and large-size ceramic target material |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1218843A (en) * | 1997-11-27 | 1999-06-09 | 中南工业大学 | Indium oxide/tin oxide sputtering target material and its preparing method |
| CN102086122A (en) * | 2009-12-08 | 2011-06-08 | 沈阳临德陶瓷研发有限公司 | Novel preparation method of ZrO2 ceramic target |
| CN103936415A (en) * | 2014-03-17 | 2014-07-23 | 内蒙古科技大学 | Stable zirconia ceramic target material for electron beam physic vapor deposition, and its preparation method |
| CN105714137A (en) * | 2014-12-05 | 2016-06-29 | 北京有色金属研究总院 | High-volume-fraction silicon carbide particle reinforced aluminum matrix composite and preparation method thereof |
| CN105948739A (en) * | 2016-04-28 | 2016-09-21 | 郑州方铭高温陶瓷新材料有限公司 | Yttria-zirconia sosoloid ceramics for temperature field of ultrahigh-temperature crystal growing furnace and preparation method for yttria-zirconia sosoloid ceramics |
| CN107129297A (en) * | 2017-05-08 | 2017-09-05 | 三祥新材股份有限公司 | A kind of preparation method of zirconium oxide composite bioceramic material |
-
2017
- 2017-10-27 CN CN201711018522.4A patent/CN109721356A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1218843A (en) * | 1997-11-27 | 1999-06-09 | 中南工业大学 | Indium oxide/tin oxide sputtering target material and its preparing method |
| CN102086122A (en) * | 2009-12-08 | 2011-06-08 | 沈阳临德陶瓷研发有限公司 | Novel preparation method of ZrO2 ceramic target |
| CN103936415A (en) * | 2014-03-17 | 2014-07-23 | 内蒙古科技大学 | Stable zirconia ceramic target material for electron beam physic vapor deposition, and its preparation method |
| CN105714137A (en) * | 2014-12-05 | 2016-06-29 | 北京有色金属研究总院 | High-volume-fraction silicon carbide particle reinforced aluminum matrix composite and preparation method thereof |
| CN105948739A (en) * | 2016-04-28 | 2016-09-21 | 郑州方铭高温陶瓷新材料有限公司 | Yttria-zirconia sosoloid ceramics for temperature field of ultrahigh-temperature crystal growing furnace and preparation method for yttria-zirconia sosoloid ceramics |
| CN107129297A (en) * | 2017-05-08 | 2017-09-05 | 三祥新材股份有限公司 | A kind of preparation method of zirconium oxide composite bioceramic material |
Non-Patent Citations (1)
| Title |
|---|
| 罗旭东等著: "《镁质复相耐火材料原料、制品与性能》", 28 February 2017, 冶金工业出版社 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111996492A (en) * | 2020-08-28 | 2020-11-27 | 昆明理工大学 | Preparation method of zirconium oxide doped gadolinium niobate amorphous high-temperature ceramic coating |
| CN113502456A (en) * | 2021-07-22 | 2021-10-15 | 法柯特科技（江苏）有限公司 | Preparation process of silicon-boron-carbon sputtering target material |
| CN113698202A (en) * | 2021-08-30 | 2021-11-26 | 中科南京绿色制造产业创新研究院 | Water gap and preparation method and application thereof |
| CN114195513A (en) * | 2021-12-30 | 2022-03-18 | 辽宁省轻工科学研究院有限公司 | Preparation method of high-density, high-purity and large-size ceramic target material |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109721356A (en) | The preparation method of thermal barrier coating large scale zirconia ceramics target | |
| TWI722531B (en) | Boroncarbide sintered body and etch apparatus comprising the same | |
| CN113683430B (en) | Oxide high-entropy ceramic with defect fluorite structure and preparation method of anti-ablation coating thereof | |
| CN108530110A (en) | A kind of superhigh temperature ceramics coating of C/C composite materials and preparation method thereof | |
| CN108101533B (en) | Preparation method of ceramic target material for thermal barrier coating | |
| JP6125689B1 (en) | Indium oxide-zinc oxide (IZO) sputtering target | |
| JP2013507526A (en) | Tin oxide ceramic sputtering target and method for producing the same | |
| CN112592207A (en) | Self-healing ZrB2-SiC-Y2O3Coating and application thereof to SiC-embedded carbon-carbon composite material | |
| CN112831747B (en) | Thermal protection coating and preparation method thereof | |
| CN102674892A (en) | Carbon/carbon composite ultrahigh temperature anti-oxidation coating and preparation process thereof | |
| CN108218476A (en) | A kind of rare earth lutetium silicate combinational environment barrier coating and preparation method thereof | |
| CN104651771A (en) | High-temperature-resistant ablation-resistant tantalum carbide composite coating and preparation method thereof | |
| CN116377372A (en) | High-entropy ceramic thermal barrier coating and preparation method thereof | |
| CN115028472A (en) | Preparation method of oxidation-resistant ablation coating on surface of C/C composite material | |
| CN114988895A (en) | Impact-resistant thermal cycle and CMAS corrosion resistant complex phase eutectoid environmental barrier coating and preparation method thereof | |
| CN108467265B (en) | Core-shell structure powder for thermal barrier coating, preparation method and application thereof, and engine component | |
| CN104846307A (en) | High-temperature resistant ceramic coating for metal based hot spraying and spraying method of coating | |
| CN110256092A (en) | A kind of heat barrier coat material and preparation method thereof | |
| CN108558444A (en) | A kind of laser melting method improving silicon substrate non-oxide ceramic material surface environment barrier coating hardness and thermal shock resistance | |
| CN107790730A (en) | A kind of method that high-temperature oxidation resistant coating is prepared in Nb Si based alloys | |
| CN108754390B (en) | Preparation method of small-caliber graphite crucible protective coating for smelting radioactive metal | |
| US20240191082A1 (en) | Thermal barrier coating and preparation method thereof | |
| CN105603374A (en) | Method for preparing Si3N4 film on polycrystalline silicon ingot cast crucible | |
| CN108817387A (en) | A kind of preparation method of the tungsten-based composite material with high rigidity and high temperature oxidation resistance | |
| CN114411085A (en) | Preparation method of dense thick thermal barrier coating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190507 |
|
| RJ01 | Rejection of invention patent application after publication |